JP2006102867A

JP2006102867A - Surface grinding device

Info

Publication number: JP2006102867A
Application number: JP2004292250A
Authority: JP
Inventors: Etsuo Fujita; 悦男藤田; Yuichi Kiyama; 裕一木山
Original assignee: Okamoto Machine Tool Works Ltd
Current assignee: Okamoto Machine Tool Works Ltd
Priority date: 2004-10-05
Filing date: 2004-10-05
Publication date: 2006-04-20

Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface grinding device furnished with a crosswise moving work table, a lengthwise moving tool table and an oil static pressure direct-acting guide device excellent in straightness of a vertically moving grinding wheel head fixed skidding body. <P>SOLUTION: There is no flexural deformation of corrosion plates 23a, 23b as a load of a sliding main body 2 to constitute one of the oil static pressure direct-acting guide devices (work table 4, saddle 7 and grinding wheel head fixed skidding body 2) is directly applied on head top parts of projected bodies 12b, 12c of a material of a frame 6 of a guide main body 1, and straightness of the sliding main body 2 is improved as a lower pocket 41, an upper pocket 42, an outer side pocket 43 and an inner side pocket 44 are arranged on a sliding surface of the sliding main body 2 so that the oil pockets 41, 42, 43, 44 constrain eight surfaces of the sliding main body 2 even in consideration of the number so as to balance hydraulic pressure. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、超精密加工が可能な平面研削装置に関する。この平面研削装置は、液晶パネル用ガラス基板の研削加工やＴ−ダイの継ぎ目研削加工に有用である。 The present invention relates to a surface grinding apparatus capable of ultra-precision machining. This surface grinding apparatus is useful for grinding a glass substrate for a liquid crystal panel and joint grinding of a T-die.

平面研削装置は知られている。図１に示す平面研削装置１００において、３は砥石車、４は左右方向に往復移動可能なワ−クテ−ブル、５は作業台部、６はフレ−ム、７は前後方向に往復移動可能なサドル、８は操作盤、９はコラム、１０は砥石頭、１１は研削液供給ノズルである。ワ−クテ−ブル４上に電磁チャックを介して固定されたワ−クの加工は、ワ−クテ−ブル４の左右方向の移動と、回転する砥石車３を備える砥石頭１０を支持するコラム６を起立して固定するサドル７の前後方向移動、および砥石頭１０の上下方向移動の相対的な組み合わせにより実施される（例えば、特許文献１参照。）。 Surface grinding devices are known. In the surface grinding apparatus 100 shown in FIG. 1, 3 is a grinding wheel, 4 is a worktable capable of reciprocating in the left-right direction, 5 is a work table, 6 is a frame, and 7 is reciprocally movable in the front-rear direction. A saddle, 8 is an operation panel, 9 is a column, 10 is a grinding wheel head, and 11 is a grinding liquid supply nozzle. The work that is fixed on the worktable 4 via an electromagnetic chuck is processed by moving the worktable 4 in the left-right direction and a column that supports the grinding wheel head 10 including the rotating grinding wheel 3. This is implemented by a relative combination of a front-rear direction movement of the saddle 7 for standing and fixing 6 and a vertical movement of the grindstone head 10 (see, for example, Patent Document 1).

ワ−クテ−ブル４やサドル７のような滑走体（スライド本体）を油静圧軸受でガイド本体に案内支持する油静圧動案内装置も提案され、高い剛性を示し、真直度が０．８〜１．０μｍ／８００ｍｍと高いものも得られている。具体的には、両側面部にスライド凹溝部を形成し且つこれらのスライド凹溝部の上、下面部および端面部に配管と配管出口に油ポケット部を形成したスライド本体（滑走体）と、このスライド本体の両方の前記スライド凹溝部にガイド当て板を挿入して前記スライド本体を摺動可能に保持したガイド本体とからなり、前記油ポケット部への油供給ラインを４系統とした静圧直動案内装置が提案されている（例えば、特許文献２参照。）。 An oil hydrostatic guide device has also been proposed in which a sliding body (slide main body) such as the work table 4 and saddle 7 is guided and supported on the guide main body by an oil hydrostatic bearing, exhibiting high rigidity and a straightness of 0. A thing as high as 8-1.0 micrometer / 800mm is also obtained. Specifically, a slide main body (sliding body) in which slide groove portions are formed on both side surface portions, and an oil pocket portion is formed on the upper, lower surface portion, and end surface portion of these slide groove portions, and an oil pocket portion on the pipe outlet, and the slide A static pressure linear motion comprising a guide main body in which a guide abutment plate is inserted into both of the slide concave groove portions of the main body and the slide main body is slidably held, and four oil supply lines to the oil pocket portion are provided. A guidance device has been proposed (see, for example, Patent Document 2).

また、ガイド部材の周囲に設けられた少なくとも一対の平行な静圧摺動面を介して、そのガイド部材上を移動可能な移動部材（滑走体）を備えた静圧摺動装置において、前記ガイド部材の静圧摺動面の両面に圧油を供給する第一の状態と、一方の静圧摺動面に圧油を供給するとともに、他方の静圧摺動面に対する圧油の供給を停止する第２の状態とに切り換えるための切り換え手段を設けた静圧摺動装置も提案されている（例えば、特許文献３参照。）。 In the hydrostatic sliding device provided with a moving member (sliding body) movable on the guide member via at least a pair of parallel hydrostatic sliding surfaces provided around the guide member, the guide The first state in which pressure oil is supplied to both sides of the static pressure sliding surface of the member, and the supply of pressure oil to one static pressure sliding surface is stopped while the supply of pressure oil to the other static pressure sliding surface is stopped. There has also been proposed a hydrostatic sliding device provided with switching means for switching to the second state (see, for example, Patent Document 3).

更に、矩形の断面を備え、ベッド（フレ−ム）の両側面に沿ってベッドの上面および側面から張り出す様に形成され、該ベッド上面に一対のレ−ル部分を上面に有するガイド本体と、テ−ブル下面に左右対称に３対の突起体を設け、その左右の突起体の下面に当て板を前記ベッドの矩形段部空洞部分に向けて張り出したスライド本体とから成り、スライド本体の一対のレ−ル上面とテ−ブル下面の左右とで第一摺動面を、スライド本体の一対の当て板の上面とスライド本体の左右のレ−ル下面とで第二摺動面を、スライド本体の一対の当て板下面とガイド本体の矩形の段部下面とで第三摺動面を、スライド本体の中央突起体の側面とガイド本体の一対のレ−ル内側面とで第四摺動面を、スライド本体の左右の突起体内側面とガイド本体の一対のレ−ル外側面とで第五摺動面を、スライド本体の左右の当て板内側面とガイド本体の矩形段部の外側面とで第六摺動面を設け、前記スライド本体の第一摺動面を形成するテ−ブルの下面に油ポケットを、第二摺動面を形成する当て板の上面に油ポケットを、第三摺動面を形成する当て板の下面に油ポケットを、第四摺動面を形成するガイド本体の中央突起体側面に油ポケットを適宜な位置に設けた静圧直動案内装置が提案されている（（例えば、特許文献４参照。）。 And a guide main body having a rectangular cross section, formed so as to protrude from the upper surface and the side surface of the bed along both side surfaces of the bed (frame), and having a pair of rail portions on the upper surface of the bed. The slide lower surface is provided with three pairs of protrusions symmetrically on the lower surface of the table, and the slide body is formed by projecting a contact plate on the lower surface of the left and right protrusions toward the rectangular stepped cavity of the bed. The first sliding surface is formed by the upper surfaces of the pair of rails and the left and right sides of the lower surface of the table, and the second sliding surface is formed by the upper surfaces of the pair of contact plates of the slide body and the lower surfaces of the left and right rails of the slide body. The third sliding surface is formed by the lower surface of the pair of contact plates of the slide body and the lower surface of the rectangular stepped portion of the guide body, and the fourth sliding surface is formed by the side surface of the central protrusion of the slide body and the inner surface of the pair of rails of the guide body. The moving surface is a pair of side surfaces of the left and right protrusions of the slide body and the guide body. A fifth sliding surface is provided on the outer surface of the rail, and a sixth sliding surface is provided on the inner surfaces of the left and right contact plates of the slide body and the outer surface of the rectangular step portion of the guide body. Oil pockets on the lower surface of the table forming the moving surface, oil pockets on the upper surface of the backing plate forming the second sliding surface, oil pockets on the lower surface of the backing plate forming the third sliding surface, There has been proposed a static pressure linear motion guide device in which an oil pocket is provided at an appropriate position on a side surface of a central protrusion of a guide body forming four sliding surfaces (see, for example, Patent Document 4).

さらに、前記滑走体の負荷重量の変化や外力に対して一定の摺動抵抗を保持し、滑走体とガイド本体間隔の浮きギャップ量を微量に補正することができる油圧と油供給量を調整できる可変式油圧コントロ−ラ−も提案され、ドイツのションフェルド社（Schonfeld GmbH）よりピ−エム・フロ−・コントロ−ラ（PM Flow Controller：商品名)として販売されている。具体的には、この可変式油圧コントロ−ラ−は、ばね部材の力に抗して移動可能な制御要素をにより隔離された複数個の圧力室を有し、その内、第１の圧力レベルＰ_１で給圧される第一の圧力室は直接に油供給部と、より低い第２の圧力レベルＰ_２で給圧される第二の圧力室は第１の流れ抵抗を介して油供給部と、静油圧ポケットの圧力レベルに相当する第３の圧力レベルＰ₃で給圧される第三の圧力室は静油圧ポケットと連絡し、第二及び第三の圧力室の間に配設されて、ポケットに供給される油流を調節し、流れ抵抗の値が第一の圧力室の力の作用により高められ、ばね力の作用と第二及び第三の圧力室の力の作用により減少される可変の第２の流れ抵抗が制御要素によって形成された、油供給部からの案内装置の静油圧に供給される油流の調整を可能とするレギュレ−タであり、第３の固定−流れ抵抗を備え、一方では静油圧ポケットと、他方では第１の流れ抵抗を介して油供給部と連絡するバイパスを備えるレギュレ−タである（例えば、特許文献５参照。）。 Furthermore, it is possible to adjust the hydraulic pressure and the oil supply amount that can maintain a constant sliding resistance against a change in load weight of the sliding body and an external force, and can correct a slight amount of a floating gap between the sliding body and the guide body. A variable hydraulic controller has also been proposed and sold as a PM Flow Controller (trade name) by Schonfeld GmbH, Germany. Specifically, the variable hydraulic controller has a plurality of pressure chambers separated by a control element movable against the force of a spring member, of which a first pressure level is provided. and the oil supply portion to the first pressure chamber directly to pressurized feed at P _1, a second pressure chamber which is pressurized feed at a lower second pressure level P ₂ through the first flow resistance oil supply And a third pressure chamber supplied with a _third pressure level P ₃ corresponding to the pressure level of the hydrostatic pocket communicates with the hydrostatic pocket and is disposed between the second and third pressure chambers. And adjusting the oil flow supplied to the pocket, the value of the flow resistance is increased by the action of the force of the first pressure chamber, the action of the spring force and the action of the force of the second and third pressure chambers Oil supplied to the hydrostatic pressure of the guide device from the oil supply, wherein the variable second flow resistance to be reduced is formed by the control element A regulator allowing flow regulation, comprising a third fixed-flow resistance, on the one hand a hydrostatic pocket and on the other hand a bypass communicating with the oil supply via the first flow resistance. -For example, refer to Patent Document 5.

特開２０００−３１７８２９号公報JP 2000-317829 A 特開平７−２９９６８４号公報JP 7-299684 A 特開２０００−２８０１３０号公報JP 2000-280130 A 特開２０００−７４０６５号公報JP 2000-74065 A 米国特許第６，２７６，４９１号明細書US Pat. No. 6,276,491

機械加工されるワ−クの寸法が大きくなると、滑走体のランド長さや幅も大きくなり、滑走体の重量は増大する。また、工具（例えば、砥石車）も大型化し、滑走体に負荷する工具重量も増大する。液晶パネル用ガラス基板やＴ−ダイのような大型のワ−クとなると、前記特許文献２および３に記載されるこれら油静圧直動案内装置は、滑走体の荷重がガイド本体の当て板を支えるボルトに集中して負荷する構造であるので、重量物がテ−ブル上に積載した場合にこの当て板がその重みで撓む欠点がある。それ故、得られる加工ワ−クの精度は悪くなり、テ−ブル真直度は１〜２μｍ／２０００ｍとなってしまう。剛性を上げようとすると油圧を高くする必要を生じ、使用する油量が増加する。前記特許文献４に記載される油静圧直動案内装置は、滑走体の荷重がガイド本体を構成するベッド（フレ−ム）に大部分が懸かる構造となっているので張り出し部を有するレ−ルの撓みも減少し、記述した特許文献２および３に記載の油静圧直動案内装置よりも剛性は高い利点を有するが、外部から塵埃が侵入し易い。 As the size of the workpiece to be machined increases, the land length and width of the planing body also increase and the weight of the planing body increases. In addition, a tool (for example, a grinding wheel) is increased in size, and the weight of the tool loaded on the sliding body is increased. When a large work such as a glass substrate for a liquid crystal panel or a T-die is used, these hydrostatic pressure linear motion guide devices described in Patent Documents 2 and 3 are such that the load of the sliding body is a contact plate of the guide body. Therefore, when a heavy object is loaded on the table, the contact plate is bent by its weight. Therefore, the accuracy of the machining work obtained is deteriorated, and the table straightness is 1 to 2 μm / 2000 m. When trying to increase the rigidity, it is necessary to increase the hydraulic pressure, and the amount of oil to be used increases. The hydrostatic linear motion guide device described in Patent Document 4 has a structure in which the load of the sliding body is mostly hung on a bed (frame) that constitutes the guide body, and therefore has a protruding portion. In addition, although it has an advantage that the rigidity is higher than that of the hydrostatic pressure linear motion guide device described in Patent Documents 2 and 3, the dust is likely to enter from the outside.

本発明者等は、平面研削装置におけるワ−クテ−ブルの左右移動案内装置、ツ−ルテ−ブル（サドル）の前後移動案内装置、およびツ−ル（砥石車）の上下昇降案内装置に特殊な構造の八面拘束の油ポケット部を備える滑走体（Slideway）を用いることにより、更に案内装置の剛性が上がり、滑走体の真直度も２から５倍向上することを見い出した。 The present inventors specialize in a work table left-right movement guide device, a tool table (saddle) back-and-forth movement guide device, and a tool (grinding wheel) vertical lift guide device in a surface grinding apparatus. It has been found that the rigidity of the guide device is further increased and the straightness of the sliding body is improved by 2 to 5 times by using a sliding body having an oil pocket portion with an eight-sided restraint having a simple structure.

本発明は、外部からの塵埃の侵入が困難で、滑走体の真直度も０．２〜０．４μｍ／８００ｍｍ、０．３〜０．５μｍ／１０００ｍｍ、１．０〜１．３μｍ／４０００ｍｍと高い油静圧直動案内装置をワ−クテ−ブル案内装置、サドル前後移動案内装置および砥石頭昇降案内装置として備える平面研削装置の提供を目的とする。 In the present invention, it is difficult for dust to enter from the outside, and the straightness of the sliding body is 0.2 to 0.4 μm / 800 mm, 0.3 to 0.5 μm / 1000 mm, and 1.0 to 1.3 μm / 4000 mm. An object of the present invention is to provide a surface grinding apparatus including a high hydrostatic pressure linear motion guide device as a work table guide device, a saddle back-and-forth movement guide device, and a grinding wheel head lifting guide device.

請求項１の発明は、フレ−ム６上に左右方向（Ｘ軸方向）に往復移動可能に設けられたワ−クテ−ブル４を案内する油静圧直動案内装置５０、前記ワ−クテ−ブル４に直交して設けられた前後方向に往復移動可能なサドル７を案内する油静圧直動案内装置５０、該サドル７上に起立して固定されたコラム９、該コラムに砥石車３を軸承する砥石軸を備える砥石頭１０を固定した滑走体２を上下方向（Ｙ軸方向）に昇降させる油静圧直動案内装置５０、および砥石車回転駆動機構を備える平面研削装置１００において、
前記三個の油静圧直動案内装置５０は、一対の凹部レ−ル１３ａ，１３ｃを上面に形成するガイド本体１と、このガイド本体１上を非接触に滑走する、滑走面に油ポケットを有するスライド本体（滑走体）２とから構成され、
前記ガイド本体１は、フレ−ム６の上面に左右対称に四条の突起体１２ａ，１２ｂ，１２ｃ，１２ｄを設けて３条の凹部１３ａ，１３ｂ，１３ｃを形成し、外側の突起体１２ａ，１２ｄの上面に当て板１４ａ，１４ｂを内方に向けて前記第一凹部レ−ル１３ａと第三凹部レ−ル１３ｃの上方一部を塞ぐように敷設して第一凹部レ−ル１３ａと第三凹部レ−ル１３ｃを形成したガイド本体１であり、
スライド本体２は、そのスライドテ−ブル２１下面に前記ガイド本体１に設けられた内側の突起体１２ｂ，１２ｃの頭頂部に当接するとともに、ガイド本体１に設けられた当て板１４ａ，１４ｂの内側面に外側面が対向する突起体２２ａ，２２ｂを左右対称に設け、更にその突起体２２ａ，２２ｂの下面途中より外側に向けてガイド本体１の第一凹部１３ａと第三凹部１３ｃの両側面に側面が対向する当て板２３ａ，２３ｂを敷設した段部脚構造のスライド本体２であり、
前記ガイド本体１の第二突起体１２ｂ、第三突起体１２ｃの頭頂部と、スライド本体２の突起体２２ａ，２２ｂの下面が当接する面で第一摺動面３１，３１を、
前記ガイド本体１の当て板１４ａ，１４ｂの下面と、スライド本体２の当て板２３ａ，２３ｂの上面が当接する面で第二摺動面３２，３２を、
前記ガイド本体１の当て板１４ａ，１４ｂの内側面と、スライド本体２の突起体２２ａ，２２ｂの外側面が対向する面で第三摺動面３３，３３を、
前記ガイド本体１の第一凹部１３ａを形成する第一突起体１２ａの内側面とスライド本体２の当て板２３ａの右側面が対向する面で第四摺動面３４ａを、および前記ガイド本体１の第三凹部１３ｃを形成する第四突起体１２ｄの内側面とスライド本体２の当て板２３ｂの左側面が対向する面で第四摺動面３４ｂを、
前記ガイド本体１の第一凹部１３ａを形成する第二突起体１２ｂの側面とスライド本体２の当て板２３ａの左側面が対向する面で第五摺動面３５ａを、および前記ガイド本体１の第三凹部１３ｃを形成する第三突起体１２ｃの側面とスライド本体２の当て板２３ｂの右側面が対向する面で第五摺動面３５ｂを設け、
前記スライド本体２の第一摺動面３１を形成する突起体２２ａ，２２ｂの下面に油ポケット４１，４１を、第二摺動内面３２を形成する当て板２３ａ，２３ｂの上面に油ポケット４２，４２を、第三摺動面３３を形成する第一および第二突起体２２ａ，２２ｂの外側面に油ポケット４３，４３を、第四摺動面３４を形成する当て板２３ａ，２３ｂの外側面に油ポケット４４，４４を適宜な位置に設けて成る、
静圧直動案内装置５０であることを特徴とする、平面研削装置１００を提供するものである。 The invention according to claim 1 is a hydrostatic linear motion guide device 50 for guiding a work table 4 provided on a frame 6 so as to be capable of reciprocating in the left-right direction (X-axis direction). A hydrostatic linear motion guide device 50 for guiding a saddle 7 reciprocally movable in the front-rear direction provided perpendicular to the bull 4; a column 9 fixed upright on the saddle 7; and a grinding wheel on the column In a surface grinding apparatus 100 having a hydrostatic linear motion guide device 50 that moves up and down a sliding body 2 that has a grinding wheel head 10 having a grinding wheel shaft bearing 3 in a vertical direction (Y-axis direction), and a grinding wheel rotation drive mechanism. ,
The three hydrostatic pressure linear motion guide devices 50 include a guide body 1 that forms a pair of recess rails 13a and 13c on the upper surface, and an oil pocket on the sliding surface that slides on the guide body 1 in a non-contact manner. A slide body (sliding body) 2 having
The guide body 1 is provided with four protrusions 12a, 12b, 12c, 12d symmetrically on the upper surface of the frame 6 to form three recesses 13a, 13b, 13c, and outer protrusions 12a, 12d. The first recess rail 13a and the first recess rail 13a are disposed on the upper surface of the first recess rail 13a so as to close the upper portions of the first recess rail 13a and the third recess rail 13c with the contact plates 14a and 14b facing inward. A guide body 1 in which three recess rails 13c are formed,
The slide body 2 is in contact with the tops of the inner protrusions 12b and 12c provided on the guide body 1 on the lower surface of the slide table 21 and the inner surfaces of the contact plates 14a and 14b provided on the guide body 1. Protrusions 22a and 22b whose outer surfaces are opposed to each other are provided symmetrically on the left and right sides of the first and second recesses 13a and 13c of the guide body 1 toward the outside from the middle of the lower surfaces of the protrusions 22a and 22b. Is a slide body 2 having a stepped leg structure in which facing plate plates 23a and 23b are laid,
The first sliding surfaces 31, 31 are the surfaces where the tops of the second protrusion 12b and the third protrusion 12c of the guide body 1 and the lower surfaces of the protrusions 22a, 22b of the slide body 2 abut,
The second sliding surfaces 32 and 32 are surfaces where the lower surfaces of the contact plates 14a and 14b of the guide body 1 and the upper surfaces of the contact plates 23a and 23b of the slide body 2 abut.
Third sliding surfaces 33, 33 are surfaces where the inner surfaces of the contact plates 14a, 14b of the guide body 1 and the outer surfaces of the protrusions 22a, 22b of the slide body 2 face each other.
A fourth sliding surface 34a is formed on the surface where the inner surface of the first protrusion 12a forming the first recess 13a of the guide body 1 and the right side surface of the contact plate 23a of the slide body 2 face each other, and the guide body 1 The fourth sliding surface 34b is a surface where the inner surface of the fourth protrusion 12d forming the third recess 13c and the left side surface of the contact plate 23b of the slide body 2 face each other.
A fifth sliding surface 35a is formed by a surface where the side surface of the second protrusion 12b forming the first concave portion 13a of the guide body 1 and the left side surface of the contact plate 23a of the slide body 2 face each other, and the guide body 1 A fifth sliding surface 35b is provided on the surface where the side surface of the third protrusion 12c forming the three concave portions 13c and the right side surface of the contact plate 23b of the slide body 2 face each other.
Oil pockets 41 and 41 are formed on the lower surfaces of the protrusions 22a and 22b forming the first sliding surface 31 of the slide body 2, and oil pockets 42 and 41 are formed on the upper surfaces of the contact plates 23a and 23b forming the second sliding inner surface 32. 42, oil pockets 43, 43 on the outer surfaces of the first and second protrusions 22a, 22b forming the third sliding surface 33, and outer surfaces of the contact plates 23a, 23b forming the fourth sliding surface 34. The oil pockets 44, 44 are provided at appropriate positions,
A surface grinding apparatus 100 is provided, which is a static pressure linear motion guide apparatus 50.

油静圧直動案内装置５０の一方を構成する滑走体（スライド本体）２であるワ−クテ−ブル４、サドル７および砥石頭１０を固定する滑走体２の荷重は、ガイド本体１のフレ−ム６素材の突起体１２ｂ，１２ｃの頭頂部に直接懸かるので、当て板２３ａ，２３ｂの撓み変形はなく、滑走体２の真直度は向上する。また、油ポケット４１，４２、４３，４４も滑走体２の滑走面の八面を拘束するように滑走体２の重心位置を考慮して下ポケット４１と上ポケット４２、外サイドポケット４３と内サイドポケット４４を油圧がバランスとれるように数も考慮して左右対称に配置しているので、滑走体の真直度が向上する。 The load of the slide body 2 that fixes the work table 4, the saddle 7, and the grindstone head 10, which is a slide body (slide main body) 2 constituting one of the hydrostatic linear motion guide devices 50, -Since it hangs directly on the tops of the projections 12b, 12c made of the material 6, there is no bending deformation of the contact plates 23a, 23b, and the straightness of the sliding body 2 is improved. The oil pockets 41, 42, 43, 44 also take into account the position of the center of gravity of the sliding body 2 so as to restrain the eight sides of the sliding surface of the sliding body 2, and the inner pockets of the lower pocket 41, the upper pocket 42, and the outer side pocket 43. Since the side pockets 44 are arranged symmetrically considering the number so that the hydraulic pressure can be balanced, the straightness of the sliding body is improved.

以下、図を用いて本発明をさらに詳細に説明する。
図１は平面研削装置の斜視図、図２は平面研削装置の平面図、図３は平面研削装置の部分側面図、図４平面研削装置の部分背面図、図５は図３においてＩ−Ｉ方向から見た砥石頭昇降案内装置の部分断面図、図６はワ−クテ−ブルの油静圧直動案内装置の斜視図、図７はその正面断面図、図８はスライド本体を下面方向から見た平面図、図９はスライド本体の内側側面断面図で、図７においてＹ−Ｙ切断線側から見た図、図１０はスライド本体の内側側面図、図１１はスライド本体を図７においてＸ−Ｘ切断線側から見た図、図１２はサドルを下方向から見た斜視図、および図１３は砥石頭固定滑走体の油静圧直動案内装置の斜視図である。 Hereinafter, the present invention will be described in more detail with reference to the drawings.
1 is a perspective view of a surface grinding device, FIG. 2 is a plan view of the surface grinding device, FIG. 3 is a partial side view of the surface grinding device, FIG. 4 is a partial rear view of the surface grinding device, and FIG. 6 is a partial cross-sectional view of the grinding wheel head lifting guide device viewed from the direction, FIG. 6 is a perspective view of the hydraulic hydrostatic pressure linear guide device of the work table, FIG. 7 is a front cross-sectional view thereof, and FIG. 9 is a cross-sectional side view of the inside of the slide body, FIG. 7 is a view seen from the YY cutting line side in FIG. 7, FIG. 10 is a side view of the inside of the slide body, and FIG. FIG. 12 is a perspective view of the saddle as viewed from below, and FIG. 13 is a perspective view of the hydrostatic linear motion guide device for the grindstone head fixed sliding body.

図１、図２、図３、図４および図５に示す平面研削装置１００において、３は砥石車、４はワ−クテ−ブル、５は作業台部、６はフレ−ム、７はサドル、８は操作盤、９はコラム、１０は砥石頭、１１は研削液供給ノズル、８０は可変式油圧コントロ−ラ、９０は注水装置、９１温度変化減衰タンク、９２は砥石軸静圧タンク、９３は静圧油回収タンク、９４は左右・前後静圧タンク、９５は油圧装置である。 1, 2, 3, 4, and 5, 3 is a grinding wheel, 4 is a worktable, 5 is a work table, 6 is a frame, and 7 is a saddle. , 8 is an operation panel, 9 is a column, 10 is a grinding wheel head, 11 is a grinding fluid supply nozzle, 80 is a variable hydraulic controller, 90 is a water injection device, 91 is a temperature change damping tank, 92 is a grinding wheel shaft static pressure tank, 93 is a hydrostatic oil recovery tank, 94 is a left / right / front / rear hydrostatic tank, and 95 is a hydraulic device.

図３に示すように滑走体２であるワ−クテ−ブル４は、フレ−ム６に一体に形成されたガイド本体１の上に設けられ、サ−ボモ−タＭ_１の回転駆動力を受けて回転可能なボ−ルネジ４ｂに螺合されている螺合体４ｃにワ−クテ−ブルの底面が固定されている。サ−ボモ−タＭ_１の回転によりボ−ルネジが回転し、ワ−クテ−ブル４が左右方向に往復移動可能となっている。４ａはＴ−溝である。 Is a slippery member 2 as shown in FIG. 3 Wa - Kute - table 4, frame - provided on the guide body 1 formed integrally with the arm 6, Sa - Vomo - the rotational driving force of the motor M ₁ The bottom surface of the worktable is fixed to a screwed body 4c screwed to the ball screw 4b that can be received and rotated. Sa - Vomo - rotates ball screw, word - - ball by the rotation of the motor M ₁ Kute - table 4 is made reciprocally movable in the lateral direction. 4a is a T-groove.

砥石車３は砥石軸３ａに軸承され、モ−タＭ₂の回転駆動力を受けて砥石軸３ａ回りに回転する。砥石軸３ａを備える砥石頭１０は、コラム９を構成するフレ−ム１上を上下にスライドする滑走板２に固定されている。滑走板２は、サ−ボモ−タＭ₃の回転駆動力を受けて回転可能なボ−ルネジ７０に螺合されている螺合体７１に滑走体２の底面が固定されている。サ−ボモ−タＭ_３の回転によりボ−ルネジ７０が回転し、滑走体２がコラム９を構成するフレ−ム１上を上下に移動可能となっている。コラム９は重量盗みの目的と電線や配管等の用役が通り抜けられるよう空所９ａが所々に設けられている。 The grinding wheel 3 is journalled in the wheel spindle 3a, motor - rotates the wheel spindle 3a around by receiving a rotational driving force of the motor M _2. A grinding wheel head 10 provided with a grinding wheel shaft 3 a is fixed to a sliding plate 2 that slides up and down on a frame 1 that constitutes a column 9. The bottom surface of the sliding body 2 is fixed to a threaded body 71 that is threadedly engaged with a ball screw 70 that can rotate by receiving the rotational driving force of the servo motor M ₃ . The ball screw 70 is rotated by the rotation of the servo motor M _{3 so} that the sliding body 2 can move up and down on the frame 1 constituting the column 9. The column 9 is provided with vacant spaces 9a in some places so that the purpose of weight stealing and utility such as electric wires and piping can be passed through.

砥石頭１０を備えるコラム９は、滑走体２であるサドル７上に起立して設けられ、このサドル７はフレ−ム（ベッドとも言われる。）６に一体に形成されたガイド本体１上に前記ワ−クテ−ブル４に直交する前後方向に往復移動可能に取り付けられている。砥石車３は、その直径方向がワ−クテ−ブル４の長手方向（左右方向）と平行となるよう砥石軸３ａをワ−クテ−ブル４に直交させて設ける。滑走体２であるサドル７の底面は、サ−ボモ−タＭ₄の回転駆動力を受けて回転可能なボ−ルネジ７０に螺合されている螺合体７１に固定されている。ビルドインモ−タＭ₄の回転によりボ−ルネジが回転し、サドル７がフレ−ム１（ベッド６）上を前後方向に移動可能となっている。 A column 9 having a grinding wheel head 10 is provided upright on a saddle 7 which is a sliding body 2, and the saddle 7 is formed on a guide body 1 formed integrally with a frame (also referred to as a bed) 6. It is attached so as to be able to reciprocate in the front-rear direction perpendicular to the work table 4. The grinding wheel 3 is provided with a grinding wheel shaft 3 a orthogonal to the work table 4 so that the diameter direction thereof is parallel to the longitudinal direction (left-right direction) of the work table 4. Bottom of the saddle 7 is a landing body 2, Sa - Vomo - is fixed to the screw array 71, which is screwed to the ball screw 70 - motor M rotatable ball by receiving a rotational driving force of _4. Birudoinmo - ball by the rotation of the motor M ₄ - ball screw is rotated, the saddle 7 frame - is movable over the beam 1 (bed 6) in the longitudinal direction.

前記のワ−クテ−ブル左右方向移動用の静圧直動案内装置、サドル前後方向移動用の油静圧直動案内装置、および、砥石頭固定滑走体上下方向移動の油静圧直動案内装置は、ワ−クテ−ブル４、サドル７および砥石頭固定滑走体２を滑走体（スライド本体）２とし、フレ−ム６を素材とするガイド本体１と見なすと、油ポケットの設置個数、大きさが異なる他は同じ構造を採る油静圧直動案内装置５０である。 Static pressure linear motion guide device for moving the worktable in the lateral direction, hydraulic static pressure linear motion guide device for moving the saddle in the longitudinal direction, and hydrostatic pressure linear motion guide for moving the grindstone head fixed slide body in the vertical direction Assuming that the work table 4, the saddle 7 and the grindstone head fixed sliding body 2 are the sliding body (slide body) 2 and the guide body 1 is made of the frame 6, the number of oil pockets installed, The hydrostatic linear motion guide device 50 adopts the same structure except that the size is different.

以下、ワ−クテ−ブル左右方向移動用の静圧直動案内装置５０を例として図６乃至図１１を以ってその構造を説明する。ここでは、ワ−クテ−ブル４はスライド本体２に相当する。 Hereinafter, the structure of the static pressure linear motion guide device 50 for moving the worktable in the horizontal direction will be described as an example with reference to FIGS. Here, the work table 4 corresponds to the slide body 2.

静圧直動案内装置５０は、ガイド本体１とスライド本体２とからなる。ガイド本体１は、フレ−ム６の上面に左右対称に４条の突起体１２ａ，１２ｂ，１２ｃ，１２ｄを設けて３条の凹部１３ａ，１３ｂ，１３ｃを設け、外側の突起体１２ａ，１２ｄの上面に当て板１４ａ，１４ｂを内方に向けて前記第一凹部１３ａと第三凹部１３ｃの上方一部を塞ぐように敷設して第一凹部レ−ル１３ａと第三凹部レ−ル１３ｃを形成した構造を採る。 The static pressure linear motion guide device 50 includes a guide body 1 and a slide body 2. The guide body 1 is provided with four protrusions 12a, 12b, 12c, 12d symmetrically on the upper surface of the frame 6 to provide three recesses 13a, 13b, 13c, and the outer protrusions 12a, 12d. The first recess rail 13a and the third recess rail 13c are laid on the upper surface so that the upper portions of the first recess 13a and the third recess 13c are closed with the contact plates 14a and 14b facing inward. Take the formed structure.

スライド本体２は、そのテ−ブル２１下面に前記ガイド本体１に設けられた内側の突起体１２ｂ，１２ｃの頭頂部に当接するとともに、ガイド本体１に設けられた当て板１４ａ，１４ｂの内側面に外側面が対向する突起体２２ａ，２２ｂを左右対称に設け、更にその突起体２２ａ，２２ｂの下面途中より外側に向けてガイド本体１の第一凹部１３ａと第三凹部１３ｃの両側面に側面が対向する当て板２３ａ，２３ｂを敷設した段部脚構造を採る。 The slide body 2 is in contact with the tops of the inner protrusions 12b and 12c provided on the guide body 1 on the lower surface of the table 21, and the inner surfaces of the contact plates 14a and 14b provided on the guide body 1. Protrusions 22a and 22b whose outer surfaces are opposed to each other are provided symmetrically on the left and right sides of the first and second recesses 13a and 13c of the guide body 1 toward the outside from the middle of the lower surfaces of the protrusions 22a and 22b. Adopts a stepped leg structure in which the contact plates 23a and 23b facing each other are laid.

前記ガイド本体１の第二突起体１２ｂ、第三突起体１２ｃの頭頂部と、スライド本体２の突起体２２ａ，２２ｂの下面が当接する面で第一摺動面３１，３１を、前記ガイド本体１の当て板１４ａ，１４ｂの下面と、スライド本体２の当て板２３ａ，２３ｂの上面が当接する面で第二摺動面３２，３２を、前記ガイド本体１の当て板１４ａ，１４ｂの内側面と、スライド本体２の突起体２２ａ，２２ｂの外側面が対向する面で第三摺動面３３，３３を、前記ガイド本体１の第一凹部１３ａを形成する第一突起体１２ａの内側面とスライド本体２の当て板２３ａの右側面が対向する面で第四摺動面３４ａを、および前記ガイド本体１の第三凹部１３ｃを形成する第四突起体１２ｄの内側面とスライド本体２の当て板２３ｂの左側面が対向する面で第四摺動面３４ｂを、前記ガイド本体１の第一凹部１３ａを形成する第二突起体１２ｂの側面とスライド本体２の当て板２３ａの左側面が対向する面で第五摺動面３５ａを、および前記ガイド本体１の第三凹部１３ｃを形成する第三突起体１２ｃの側面とスライド本体２の当て板２３ｂの右側面が対向する面で第五摺動面３５ｂを設ける。 The first sliding surfaces 31, 31 are the surfaces where the tops of the second protrusion 12 b and the third protrusion 12 c of the guide body 1 and the lower surfaces of the protrusions 22 a, 22 b of the slide body 2 come into contact with each other. The second sliding surfaces 32, 32 are the surfaces where the lower surfaces of the first contact plates 14 a, 14 b and the upper surfaces of the contact plates 23 a, 23 b of the slide body 2 abut on the inner surfaces of the contact plates 14 a, 14 b of the guide body 1. And the third sliding surfaces 33, 33 on the surfaces where the outer surfaces of the protrusions 22a, 22b of the slide body 2 face each other, and the inner surface of the first protrusion 12a forming the first recess 13a of the guide body 1 The fourth slide surface 34a is the surface facing the right side surface of the contact plate 23a of the slide body 2 and the inner surface of the fourth protrusion 12d that forms the third recess 13c of the guide body 1 and the slide body 2 contact. The left side surface of the plate 23b is the opposite surface The fourth sliding surface 34b is a surface where the side surface of the second protrusion 12b forming the first recess 13a of the guide body 1 and the left side surface of the contact plate 23a of the slide body 2 are opposed to each other, and the fifth sliding surface 35a is A fifth sliding surface 35b is provided on the surface where the side surface of the third protrusion 12c forming the third recess 13c of the guide body 1 and the right side surface of the contact plate 23b of the slide body 2 face each other.

油ポケットは、前記スライド本体２の第一摺動面３１を形成する突起体２２ａ，２２ｂの下面に油ポケット４１，４１を、第二摺動面３２を形成する当て板２３ａ，２３ｂの上面に油ポケット４２，４２を、第三摺動面３３を形成する第一および第二突起体２２ａ，２２ｂの外側面に油ポケット４３，４３を、第四摺動面３４を形成する当て板２３ａ，２３ｂの外側面に油ポケット４４，４４を適宜な位置に設ける。油ポケットの位置、および数は、スライド本体２がガイド本体１上を浮遊して滑走する際に、油ポケットに供給された潤滑油がスライド本体とガイド本体の摺動面ギャップを２〜１０μｍ（油圧５〜２５バ−ル）に保ち、両者が接触しないように維持している。 The oil pockets have oil pockets 41 and 41 on the lower surfaces of the protrusions 22a and 22b forming the first sliding surface 31 of the slide body 2, and oil pads 41a and 23b on the upper surfaces of the contact plates 23a and 23b forming the second sliding surface 32. The oil pockets 42, 42 are formed on the outer surfaces of the first and second protrusions 22a, 22b forming the third sliding surface 33, and the oil pockets 43, 43 are formed on the outer surfaces of the first protrusions 22a, 22b. Oil pockets 44, 44 are provided at appropriate positions on the outer surface of 23b. The position and number of the oil pockets are such that when the slide main body 2 floats on the guide main body 1 and slides, the lubricating oil supplied to the oil pocket causes the sliding surface gap between the slide main body and the guide main body to be 2 to 10 μm ( The hydraulic pressure is maintained at 5 to 25 bar, and the two are not in contact with each other.

図６および図８に示すように、ガイド本体１のフレ−ム６の第二突起体１２ｂおよび第三突起体１２ｃ上を浮遊して摺動するスライド本体２の突起体２２ａ，２２ｂ底面には等間隔にそれぞれ９個の油ポケット４１が設けられ、スライド本体２の突起体２３ａ，２３ｂの上部にはそれぞれ両端に油ポケット４２がそれぞれ９個（図６および図１１参照）設けられ、スライド本体２の上下のギャップバランスを採っている。また、第三摺動面３３を形成する第一および第二突起体２２ａ，２２ｂの外側面に油ポケット４３，４３を前後にそれぞれ２個（図９参照）、第四摺動面３４を形成する当て板２３ａ，２３ｂの外側面に油ポケット４４，４４をそれぞれ２個（図１０参照）設け、スライド本体２の左右のギャップバランスを採っている。言いかえれば、スライド本体２の第一摺動面３１，３１には左右各々９つの油ポケット４１が設けられ、第三摺動面３３，３３には各々２つの油ポケット４３が設けられ、第四摺動面３４ａ，３４ｂには各々９つの油ポケット４４が設けられ、スライド本体２の第二摺動面３２，３２には左右各々２つの油ポケット４２が設けられている。 As shown in FIGS. 6 and 8, the bottom surfaces of the protrusions 22a and 22b of the slide body 2 that floats and slides on the second protrusion 12b and the third protrusion 12c of the frame 6 of the guide body 1 are shown. Nine oil pockets 41 are provided at equal intervals, and nine oil pockets 42 (see FIGS. 6 and 11) are provided at both ends above the protrusions 23a and 23b of the slide body 2, respectively. A gap balance of 2 is adopted. Further, two oil pockets 43 and 43 are formed on the outer surfaces of the first and second protrusions 22a and 22b forming the third sliding surface 33 on the front and rear sides (see FIG. 9), and the fourth sliding surface 34 is formed. Two oil pockets 44 and 44 (see FIG. 10) are provided on the outer side surfaces of the contact plates 23a and 23b, respectively, and the left and right gap balance of the slide body 2 is taken. In other words, the first sliding surfaces 31 and 31 of the slide body 2 are each provided with nine oil pockets 41 on the left and right sides, and the third sliding surfaces 33 and 33 are each provided with two oil pockets 43, Nine oil pockets 44 are provided on each of the four sliding surfaces 34 a and 34 b, and two oil pockets 42 are provided on the left and right sides of the second sliding surfaces 32 and 32 of the slide body 2.

油静圧直動案内装置５０は、スライド本体２はガイド本体１に対し非接触（浮遊状態）で滑走する。スライド本体２に設けられた各々の油ポケット４１，４２，４３，４４には、油圧ポンプ８３から可変式油圧コントロ−ラ８０に送り込まれる潤滑油の圧力・流量を静圧絞り弁８６で前記静圧油ポケット部の圧力が５〜２５バ−ル、好ましくは１０〜２２バ−ルとなるように調整し、静圧油ポケット部に接続ポ−ト、フィルタ、および配管を経由して供給され、スライド本体の浮上を最大２０μｍとし、ガイド本体１とスライド本体２の摺動面の隙間（ギャップ）が個々の油静圧ポケット部でのギャップがスライド本体の滑走時、２〜７μｍとなるように調整している。かかる静圧絞り弁およびポ−ト部を多数備える可変式油圧コントロ−ラは、ドイツ国に所在のションフェルド（Schonfeld GmbH）社よりPM-Flow Controllerの商品名で市販されており、この可変式油圧コントロ−ラはスライド本体の側壁に取り付ける構造となっており、その構造は、特許文献５に記載されている。潤滑油の供給量は、スライド本体の重量、寸法、移動速度、潤滑油の種類、設定圧により異なり、適宣０．２０〜４．５リットル／分の中から選択する。図中、Ｍはモ−タ、８１はパイプ、８２はパッド、８４は圧力計、８５はレリ−フ弁である。図６では、潤滑油の供給入り口の圧力は２５バ−ル、出口での圧力は０．８バ−ルを示す。 In the hydrostatic linear motion guide device 50, the slide body 2 slides in a non-contact (floating state) with respect to the guide body 1. In each of the oil pockets 41, 42, 43, 44 provided in the slide body 2, the pressure and flow rate of the lubricating oil fed from the hydraulic pump 83 to the variable hydraulic controller 80 is statically controlled by the static pressure throttle valve 86. The pressure in the pressure oil pocket is adjusted to 5 to 25 bar, preferably 10 to 22 bar, and is supplied to the hydrostatic pocket through the connection port, filter and piping. The height of the slide body is set to 20 μm at maximum, and the gap (gap) between the sliding surfaces of the guide body 1 and the slide body 2 is 2 to 7 μm when the slide body slides. It is adjusted to. A variable hydraulic controller having a large number of such static pressure throttle valves and ports is commercially available under the trade name PM-Flow Controller from Schonfeld GmbH in Germany. The hydraulic controller is attached to the side wall of the slide body, and the structure is described in Patent Document 5. The supply amount of the lubricating oil varies depending on the weight of the slide body, the dimensions, the moving speed, the type of the lubricating oil, and the set pressure, and is appropriately selected from 0.20 to 4.5 liters / minute. In the figure, M is a motor, 81 is a pipe, 82 is a pad, 84 is a pressure gauge, and 85 is a relief valve. In FIG. 6, the lubricant supply inlet pressure is 25 bar and the outlet pressure is 0.8 bar.

図１２は、スライド本体２であるサドル（ツ−ルテ−ブル）７を下方向から見た図である。図４で示すガイド本体１（フレ−ム６）の第二突起体１２ｂおよび第三突起体１２ｃの頭頂部を浮遊して滑走するスライド本体２の突起体２２ａ，２２ｂ底面の前後にはそれぞれ２個の油ポケット４１が設けられ、スライド本体２の突起体２３ａ，２３ｂの上部の後部側（砥石頭側ではなく、背面側）に油ポケット４２がそれぞれ１個設けられ、スライド本体２の上下のギャップバランスを採っている。また、第三摺動面３３を形成する第一および第二突起体２２ａ，２２ｂの外側面に油ポケット４３，４３を前後にそれぞれ２個、第四摺動面３４を形成する当て板２３ａ，２３ｂの外側面の前後に油ポケット４２，４２をそれぞれ２個設け、スライド本体２の左右のギャップバランスを採っている。 FIG. 12 is a view of the saddle (tool table) 7 as the slide body 2 as viewed from below. The front and rear surfaces of the protrusions 22a and 22b of the slide body 2 that float and slide on the tops of the second protrusion 12b and the third protrusion 12c of the guide body 1 (frame 6) shown in FIG. Each of the oil pockets 41 is provided, and one oil pocket 42 is provided on each of the rear portions of the upper portions of the protrusions 23a and 23b of the slide body 2 (on the back side, not on the grindstone head side). The gap is balanced. Further, two oil pockets 43, 43 are provided on the outer surfaces of the first and second protrusions 22 a, 22 b forming the third sliding surface 33, respectively, and the contact plates 23 a, forming the fourth sliding surface 34, respectively. Two oil pockets 42 and 42 are provided on the front and rear sides of the outer surface of 23b, respectively, so that the left and right gap balance of the slide body 2 is achieved.

図１３にスライド本体２である砥石頭固定滑走体２の油静圧直動案内装置５０を示す。ガイド本体１のフレ−ム６の第二突起体１２ｂおよび第三突起体１２ｃ頭頂部を浮遊して滑走するスライド本体２の突起体２２ａ，２２ｂ底面の上下にはそれぞれ２個の油ポケット４１が設けられ、スライド本体２の突起体２３ａ，２３ｂの上部にはそれぞれ両端に油ポケット４２がそれぞれ２個設けられ、スライド本体２の上下のギャップバランスを採っている。また、第三摺動面３３を形成する第一および第二突起体２２ａ，２２ｂの外側面に油ポケット４３，４３を上下にそれぞれ２個、第四摺動面３４を形成する当て板２３ａ，２３ｂの外側面の上下に油ポケット４４，４４をそれぞれ１個設け、スライド本体２の左右のギャップバランスを採っている。 FIG. 13 shows an oil hydrostatic linear motion guide device 50 of the grindstone head fixed sliding body 2 which is the slide body 2. Two oil pockets 41 are respectively provided above and below the bottom surfaces of the protrusions 22a and 22b of the slide body 2 that floats and slides on the top of the second protrusion 12b and the third protrusion 12c of the frame 6 of the guide body 1. Two oil pockets 42 are provided at both ends on the upper portions of the protrusions 23 a and 23 b of the slide body 2, respectively, so that the upper and lower gaps of the slide body 2 are balanced. Further, two oil pockets 43, 43 are provided on the outer surfaces of the first and second protrusions 22a, 22b forming the third sliding surface 33, respectively, and the contact plate 23a, forming the fourth sliding surface 34, respectively. One oil pocket 44 is provided on each of the upper and lower sides of the outer surface of 23b, and the left and right gap balance of the slide body 2 is taken.

なお、上記の図６乃至図１３において、滑走体２の駆動機構（モ−タやボ−ルネジ、螺合体等）は油ポケットの位置がはっきりと理解されるよう省略して示している。 In FIGS. 6 to 13, the driving mechanism (motor, ball screw, screwed body, etc.) of the sliding body 2 is omitted so that the position of the oil pocket can be clearly understood.

実施例１
ワ−クテ−ブル４（スライド本体２）は、幅８００ｍｍ、長手方向（進行方向）長さ４２５０ｍｍ、高さ３３５ｍｍ、ガイド本体１は、幅１０２０ｍｍ、長手方向（進行方向）長さ８５００ｍｍ、高さ２５０ｍｍの寸法を有するものを、ツ−ルテ−ブル７の油静圧直動案内装置のサドル（スライド本体２）は、幅８００ｍｍ、前後方向（進行方向）長さ１６６０ｍｍ、高さ４２４ｍｍ、ガイド本体１は、幅１５１０ｍｍ、長手方向（進行方向）長さ２６６０ｍｍ、高さ２６０ｍｍの寸法を有するものを、砥石頭１０の固定滑走体２として幅６１０ｍｍ、上下方向高さ１２００ｍｍ、厚み５４ｍｍ、ガイド本体１は幅７００ｍｍ、上下方向高さ２０４０ｍｍ、厚み６０ｍｍの油静圧案内装置を備えた平面研削装置１００を用いてガラス基板の研削加工を行った。 Example 1
The work table 4 (slide main body 2) has a width of 800 mm, a longitudinal direction (traveling direction) length of 4250 mm, a height of 335 mm, and the guide body 1 has a width of 1020 mm, a longitudinal direction (traveling direction) length of 8500 mm, and a height. The saddle (slide body 2) of the hydrostatic pressure linear motion guide device of the tool table 7 has a width of 800 mm, a longitudinal direction (traveling direction) length of 1660 mm, a height of 424 mm, and a guide body having a size of 250 mm. 1 has a width of 1510 mm, a longitudinal direction (traveling direction) length of 2660 mm, and a height of 260 mm. The fixed sliding body 2 of the grinding wheel head 10 has a width of 610 mm, a vertical height of 1200 mm, a thickness of 54 mm, and a guide body 1. The glass substrate is polished using a surface grinding apparatus 100 equipped with a hydrostatic pressure guide apparatus having a width of 700 mm, a vertical height of 2040 mm, and a thickness of 60 mm. Processing was carried out.

ワ−クテ−ブル４の左右の真直度は１．３μｍ／４２５０ｍｍ、サドル７の前後の真直度は０．３μｍ／１６６０ｍｍ、砥石頭固定滑走体２の上下の真直度は０．３μｍ／１２００ｍｍであった。ワ−クテ−ブル反転時の上下動は１μｍ以下の差もなく反転し、ワ−クテ−ブル左行・右行の動きが均一であり、ワ−クテ−ブル４の送り速度に依存することなく砥石頭とワ−クテ−ブル間の相対変位量を０．０１μｍ以下と保つことができた。さらに、コラム９の前後移動反転時ショックは１．２秒内に収まり、これは従来の静圧直動案内装置の２．５秒から３．０秒の値と比較すると格段と優れる結果であった。 The right and left straightness of the worktable 4 is 1.3 μm / 4250 mm, the straightness before and after the saddle 7 is 0.3 μm / 1660 mm, and the vertical straightness of the grindstone head fixed sliding body 2 is 0.3 μm / 1,200 mm. there were. The vertical movement at the time of reversing the work table is reversed with no difference of 1 μm or less, the movement of the work table left and right is uniform, and depends on the feed speed of the work table 4 The relative displacement between the grinding wheel head and the work table could be kept at 0.01 μm or less. Furthermore, the shock at the time of reversing the movement of the column 9 is within 1.2 seconds, which is a result that is far superior to the value of 2.5 to 3.0 seconds of the conventional static pressure linear motion guide device. It was.

本発明の平面研削装置は、ワ−クテ−ブル、ツ−ルテ−ブル（サドル）および砥石頭固定滑走板の案内装置として、ガイド本体の一対の凹部レ−ル内を滑走するスライド本体の脚部となる当て板をクロ−ズド（閉鎖）構造とし、滑走時に塵埃が摺動面に侵入し難い構造とするとともに、砥石頭の上下方向の剛性および前後方向の剛性を従来のものより高めた静圧直動案内装置としたことにより寸法精度が非常に優れる研削加工ワ−クを与える。 The surface grinding apparatus of the present invention is a leg of a slide body that slides in a pair of recessed rails of a guide body as a guide device for a work table, a tool table (saddle) and a grinding wheel head fixed sliding plate. The base plate is a closed (closed) structure that prevents dust from entering the sliding surface during sliding, and the vertical and longitudinal rigidity of the grinding wheel head is higher than the conventional one. By using a hydrostatic linear motion guide device, a grinding work with excellent dimensional accuracy is provided.

平面研削装置の斜視図である。It is a perspective view of a surface grinding device. 平面研削装置の平面図である。It is a top view of a surface grinding apparatus. 平面研削装置の部分側面図である。It is a partial side view of a surface grinding apparatus. 平面研削装置の部分背面図である。It is a partial rear view of a surface grinding apparatus. 図３においてＩ−Ｉ方向から見た砥石頭昇降案内装置の部分断面図である。It is a fragmentary sectional view of the whetstone head raising and lowering guide device seen from the II direction in FIG. ワ−クテ−ブルの油静圧直動案内装置の斜視図である。It is a perspective view of the hydraulic static pressure linear motion guide apparatus of a worktable. ワ−クテ−ブルの油静圧直動案内装置の正面断面図である。It is front sectional drawing of the hydraulic-static-pressure linear motion guide apparatus of a worktable. スライド本体を下面方向から見た平面図である。It is the top view which looked at the slide main body from the lower surface direction. スライド本体の内側側面断面図で、図７においてＹ−Ｙ切断線側から見た図である。FIG. 8 is a cross-sectional side view of the inside of the slide body, as viewed from the YY cutting line side in FIG. 図３においてＩ−Ｉ方向から見た砥石頭昇降案内装置の部分断面図である。It is a fragmentary sectional view of the whetstone head raising and lowering guide device seen from the II direction in FIG. スライド本体を図７においてＸ−Ｘ切断線側から見た図である。It is the figure which looked at the slide main body from the XX cut line side in FIG. サドルを下方向から見た斜視図である。It is the perspective view which looked at the saddle from the downward direction. 砥石頭固定滑走体の油静圧直動案内装置の斜視図である。It is a perspective view of the hydrostatic pressure linear motion guide apparatus of a grindstone head fixed sliding body.

Explanation of symbols

５０油静圧直動案内装置
１ガイド本体
２スライド本体（滑走体）
３砥石車
４ワ−クテ−ブル（滑走体）
６フレ−ム
７サドル（滑走体）
９コラム
１０砥石頭
１２ｂ，１２ｃ突起体
１３ａ，１３ｃ凹部レ−ル
１００平面研削装置 50 Hydrostatic linear motion guide device 1 Guide body 2 Slide body (sliding body)
3 Grinding wheel 4 Work table (sliding body)
6 frame 7 saddle (sliding body)
9 Column 10 Grinding wheel head 12b, 12c Protrusion body 13a, 13c Recessed rail 100 Surface grinding device

Claims

An oil hydrostatic linear motion guide device 50 for guiding the work table 4 provided on the frame 6 so as to be reciprocally movable in the left-right direction, and a front-rear direction provided orthogonal to the work table 4 An oil hydrostatic linear motion guide device 50 that guides a saddle 7 that can reciprocally move, a column 9 that stands up and is fixed on the saddle 7, and a grinding wheel head 10 that has a grinding wheel shaft that supports the grinding wheel 3 on the column. In the hydrostatic pressure linear motion guide device 50 that raises and lowers the fixed sliding body 2 in the vertical direction, and the surface grinding device 100 that includes a grinding wheel rotation drive mechanism,
The three hydrostatic pressure linear motion guide devices 50 include a guide body 1 that forms a pair of recess rails 13a and 13c on the upper surface, and an oil pocket on the sliding surface that slides on the guide body 1 in a non-contact manner. A slide body 2 having
The guide body 1 is provided with four protrusions 12a, 12b, 12c, 12d symmetrically on the upper surface of the frame 6 to form three recesses 13a, 13b, 13c, and outer protrusions 12a, 12d. The first recess rail 13a and the first recess rail 13a are disposed on the upper surface of the first recess rail 13a so as to close the upper portions of the first recess rail 13a and the third recess rail 13c with the contact plates 14a and 14b facing inward. A guide body 1 in which three recess rails 13c are formed,
The slide body 2 is in contact with the tops of the inner protrusions 12b and 12c provided on the guide body 1 on the lower surface of the slide table 21 and the inner surfaces of the contact plates 14a and 14b provided on the guide body 1. Protrusions 22a and 22b whose outer surfaces are opposed to each other are provided symmetrically on the left and right sides of the first and second recesses 13a and 13c of the guide body 1 toward the outside from the middle of the lower surfaces of the protrusions 22a and 22b. Is a slide body 2 having a stepped leg structure in which facing plate plates 23a and 23b are laid,
The first sliding surfaces 31, 31 are the surfaces where the tops of the second protrusion 12b and the third protrusion 12c of the guide body 1 and the lower surfaces of the protrusions 22a, 22b of the slide body 2 abut,
The second sliding surfaces 32 and 32 are surfaces where the lower surfaces of the contact plates 14a and 14b of the guide body 1 and the upper surfaces of the contact plates 23a and 23b of the slide body 2 abut.
Third sliding surfaces 33, 33 are surfaces where the inner surfaces of the contact plates 14a, 14b of the guide body 1 and the outer surfaces of the protrusions 22a, 22b of the slide body 2 face each other.
A fourth sliding surface 34a is formed on the surface where the inner surface of the first protrusion 12a forming the first recess 13a of the guide body 1 and the right side surface of the contact plate 23a of the slide body 2 face each other, and the guide body 1 The fourth sliding surface 34b is a surface where the inner surface of the fourth protrusion 12d forming the third recess 13c and the left side surface of the contact plate 23b of the slide body 2 face each other.
A fifth sliding surface 35a is formed by a surface where the side surface of the second protrusion 12b forming the first concave portion 13a of the guide body 1 and the left side surface of the contact plate 23a of the slide body 2 face each other, and the guide body 1 A fifth sliding surface 35b is provided on the surface where the side surface of the third protrusion 12c forming the three concave portions 13c and the right side surface of the contact plate 23b of the slide body 2 face each other.
Oil pockets 41 and 41 are formed on the lower surfaces of the protrusions 22a and 22b forming the first sliding surface 31 of the slide body 2, and oil pockets 42 and 41 are formed on the upper surfaces of the contact plates 23a and 23b forming the second sliding inner surface 32. 42, oil pockets 43, 43 on the outer surfaces of the first and second protrusions 22a, 22b forming the third sliding surface 33, and outer surfaces of the contact plates 23a, 23b forming the fourth sliding surface 34. The oil pockets 44, 44 are provided at appropriate positions,
The surface grinding apparatus 100 is a static pressure linear motion guide apparatus 50.