JP2006090704A - Temperature sensor - Google Patents

Temperature sensor Download PDF

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JP2006090704A
JP2006090704A JP2004272663A JP2004272663A JP2006090704A JP 2006090704 A JP2006090704 A JP 2006090704A JP 2004272663 A JP2004272663 A JP 2004272663A JP 2004272663 A JP2004272663 A JP 2004272663A JP 2006090704 A JP2006090704 A JP 2006090704A
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pipe
substrate
temperature sensor
sensor
sensor substrate
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Yasuyuki Suzuki
康之 鈴木
Shigeru Takada
茂 高田
Takaaki Kenjo
孝明 見上
Jun Kamiyama
準 神山
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Ishizuka Electronics Corp
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Ishizuka Electronics Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To solve problems as to a temperature sensor comprising a heat-sensitive element sealed in a pipe that a long insulation-coated wire to be led out makes it hard to hold an insulated electric wire at a center portion of the pipe when performing insulation resin sealing, resin hardens with the wire in contact with an edge of the pipe to cause resin material to be hardened in a spilt state from the pipe, it is hard to accurately position a heat-sensitive part of a thermistor element which has a defective shape or whose insulation-coated electric wire is connected to an end part of the pipe, and the defective shape or insufficient withstand voltage may cause many defective products. <P>SOLUTION: A sensor substrate is prepared with the heat-sensitive element previously mounted on its land made of conductor foil with a pattern formed thereon on an insulating substrate having a shape conformed to the shape of the pipe. After joining the core of the insulation-coated wire to a terminal part of the sensor substrate, the sensor substrate is inserted into the pipe and an insulating material is put in its surrounding space and hardened to form the temperature sensor. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、給湯器、エアコン、冷蔵庫等の家庭電気製品や各種電子機器の温度制御装置等に用いられるパイプ管内の先端部分にサーミスタ等の感熱素子を絶縁樹脂で封止し、前記パイプの他端開口から絶縁被覆電線等を引き出した温度センサに関するものである。   The present invention seals a thermosensitive element such as a thermistor with an insulating resin at the tip of a pipe used for household appliances such as water heaters, air conditioners, refrigerators, etc., and temperature control devices for various electronic devices, etc. The present invention relates to a temperature sensor in which an insulation coated electric wire or the like is drawn from an end opening.

従来、このような家庭電気製品や各種電子機器に用いられているサーミスタ素子がパイプ内に封入された温度センサとしては、図7(a)に示すように、両面に電極を有するサーミスタチップ25を2芯平行絶縁被覆電線9の端部の絶縁被覆を剥がして露出させた芯線16間に掲置させた後、半田付けして絶縁被覆電線9の芯線16に接続固定した後、先端部を金属や樹脂でできた有底パイプ26内に挿入し周囲にエポキシ樹脂等の絶縁材料27を注入して熱硬化させた温度センサや、図7(b)に示すように、絶縁被覆電線の端部の絶縁被覆を剥がして露出させた芯線間に先端部がガラス被覆されたガラス封止サーミスタ素子28のリード線29を半田付けや溶接によって接続した後、先端部を金属や樹脂でできた有底パイプ26内に挿入し周囲にエポキシ樹脂等の絶縁材料27を注入して熱硬化させた温度センサが知られている。場合によっては、絶縁強度を確保するため、ガラス封止サーミスタ素子28のリード線29に図示しない絶縁チューブを被覆することもある。   Conventionally, as shown in FIG. 7A, a thermistor chip 25 having electrodes on both sides is used as a temperature sensor in which a thermistor element used in such home appliances and various electronic devices is enclosed in a pipe. The insulation coating at the end of the two-core parallel insulation-coated electric wire 9 is peeled off and placed between the exposed core wires 16, and then soldered to be connected and fixed to the core wire 16 of the insulation-coated electric wire 9. Or a temperature sensor that is inserted into a bottomed pipe 26 made of a resin and injected with an insulating material 27 such as an epoxy resin around the pipe and thermally cured, as shown in FIG. After connecting the lead wire 29 of the glass-sealed thermistor element 28 with the tip coated with glass between the exposed core wires by soldering or welding, the tip of the bottom is made of metal or resin. Insert into pipe 26 Temperature sensors insulating material 27 injected into the thermally cured such as epoxy resins are known to the surroundings. In some cases, in order to ensure insulation strength, the lead wire 29 of the glass-sealed thermistor element 28 may be covered with an insulating tube (not shown).

しかしながら、上記したような両面に電極を形成したサーミスタチップ25を、絶縁被覆電線9の芯線16間に載置し半田付けして、有底パイプ26内に挿入し周囲にエポキシ樹脂等の絶縁材料27を注入して熱硬化させた温度センサにおいては、一般に、有底パイプ26の長さに比べて前記パイプから引き出される絶縁被覆電線9の長さの方が非常に長いために、エポキシ樹脂を有底パイプ26内に充填し硬化させるときに、長い絶縁被覆電線9が邪魔となって有底パイプ26の先端部分に正確にサーミスタチップ(感熱部)が位置するようにセッティングすることが難しかった。また、このような欠点を解消するために、治工具等を使用して有底パイプ先端部分にサーミスタチップが位置するように樹脂封止したとき、もし有底パイプ26が金属製の場合には、サーミスタチップ25の表面と有底パイプ26が接近したり、場合によっては接触することがあり、サーミスタチップ25の表面と有底パイプ26間の絶縁耐圧が十分とれなくなり、最終製品としての歩留まりが低下する欠点があった。さらに、サーミスタチップ25の電極面に絶縁被覆電線9の芯線16を直接半田付けするために、銀を主成分とする電極面が半田によって溶解する銀喰われ現象によりサーミスタチップ25の抵抗値が変化し完成した温度センサの製品歩留まりが低下する欠点もあった。また、パイプの直径に比べて絶縁被覆電線の直径が小さく、引き出される絶縁被覆電線が長いために、絶縁樹脂封止するときに絶縁電線を有底パイプの中心部分に保持することが難しく、有底パイプ26の縁に絶縁電線が接触した形で樹脂を加熱硬化させることになり、絶縁樹脂がパイプからこぼれた状態で硬化してしまい、形状不良や上記したようなパイプ先端部にサーミスタ素子の感熱部を正確に位置させることができなく多数の不良品を発生させることとなることがあった。   However, the thermistor chip 25 having electrodes formed on both sides as described above is placed between the core wires 16 of the insulation-coated electric wire 9 and soldered, inserted into the bottomed pipe 26, and an insulating material such as epoxy resin around it. In general, in the temperature sensor in which 27 is injected and cured, the length of the insulated wire 9 drawn out from the pipe is much longer than the length of the bottomed pipe 26. When the bottomed pipe 26 is filled and cured, it is difficult to set so that the thermistor chip (heat-sensitive part) is accurately positioned at the tip of the bottomed pipe 26 because the long insulated wire 9 becomes an obstacle. . In addition, in order to eliminate such drawbacks, when the bottomed pipe 26 is made of metal, when a thermistor tip is positioned with a jig or the like so that the thermistor tip is positioned at the tip of the bottomed pipe, The surface of the thermistor chip 25 and the bottomed pipe 26 may come close to each other or may come into contact with each other, and the insulation withstand voltage between the surface of the thermistor chip 25 and the bottomed pipe 26 cannot be sufficiently obtained, resulting in a yield as a final product. There was a downside. Furthermore, in order to solder the core wire 16 of the insulation coated wire 9 directly to the electrode surface of the thermistor chip 25, the resistance value of the thermistor chip 25 changes due to the silver erosion phenomenon in which the electrode surface mainly composed of silver is melted by the solder. There is also a drawback that the product yield of the completed temperature sensor is lowered. In addition, since the diameter of the insulated wire is smaller than the diameter of the pipe and the drawn insulated wire is long, it is difficult to hold the insulated wire at the center of the bottomed pipe when sealing with insulating resin. The resin is heated and cured in such a manner that the insulated wire is in contact with the edge of the bottom pipe 26, the insulating resin is cured in a state where it spills from the pipe, and the thermistor element of the shape tip or the pipe tip as described above is formed. In some cases, the heat-sensitive part cannot be accurately positioned, and many defective products are generated.

また、このような温度センサは温度変化のある雰囲気で使用するのが一般的であり、長期間使用した場合にこの温度変化によって、絶縁被覆電線の使用部材の膨張・収縮で半田付けされたサーミスタチップの電極部分の剥離が進み、抵抗値が変化することがあり信頼性の面で問題があった。さらに、絶縁被覆電線の芯線部からの水分や湿気の侵入があり、長期使用により芯線の先端部に接続されたサーミスタチップがこれら水分や湿気の影響を受けて特性劣化することがあった。   Also, such a temperature sensor is generally used in an atmosphere with a temperature change, and when used for a long period of time, this temperature change causes the thermistor soldered by the expansion / contraction of the used member of the insulated coated wire. There is a problem in terms of reliability because peeling of the electrode portion of the chip proceeds and the resistance value may change. Furthermore, moisture and moisture have entered from the core wire portion of the insulation-coated electric wire, and the thermistor chip connected to the tip portion of the core wire after long-term use may be affected by the moisture and moisture to deteriorate characteristics.

また、このようにサーミスタチップを直接に絶縁被覆電線の芯線部分に半田付けした温度センサは、サーミスタチップで受熱した熱が、半田付け部分から絶縁被覆電線の芯線に逃げてしまい、被検知体の温度を正確に検知することは難しい。また、上記したように、有底パイプ内において感熱部となるサーミスタチップの位置が変動することによって、温度センサとしての応答特性にバラツキを生じ、電気的性能の面でも十分なものではなかった。図7(b)に示すようなガラス封止サーミスタ素子28を用いた場合には、上記における絶縁耐圧の問題は解決できるが、それ以外の部分では図7(a)におけると同じ問題が生じる。   In addition, the temperature sensor in which the thermistor chip is soldered directly to the core wire portion of the insulation-coated electric wire in this way, the heat received by the thermistor chip escapes from the soldered portion to the core wire of the insulation-coated electric wire, and the detected object It is difficult to detect temperature accurately. Further, as described above, the position of the thermistor chip serving as the heat sensitive portion in the bottomed pipe fluctuates, resulting in variations in response characteristics as a temperature sensor, which is not sufficient in terms of electrical performance. When the glass-sealed thermistor element 28 as shown in FIG. 7B is used, the above-mentioned problem of withstand voltage can be solved, but the same problem as in FIG.

本発明は、上記のような課題を解決するためになされたものであり、ガラエポキシ銅張積層板やポリイミド樹脂フィルム等からなる耐熱性の絶縁基板上にパターン形成された2本のリード部の一端に形成されたランドと、前記リード部の他端側に端子部が形成され、前記ランドに感熱素子を電気的に接続して構成したセンサ基板の端子部に2芯平行絶縁被覆電線の一端部の絶縁被覆を剥がして露出した芯線部を半田付け等の接合手段によって電気的に接続し、前記センサ基板をパイプ内に樹脂封止することによって、小型で温度応答性に優れ、電気的性能バラツキが小さく、経時変化の小さい信頼性の高い温度センサを提供することを目的とするものである。   The present invention has been made to solve the above-described problems, and includes two lead portions patterned on a heat-resistant insulating substrate made of a glass epoxy copper-clad laminate, a polyimide resin film, or the like. A land formed at one end and a terminal portion formed on the other end side of the lead portion, and one end of a two-core parallel insulation coated electric wire on a terminal portion of a sensor substrate configured by electrically connecting a thermal element to the land The core part exposed by peeling off the insulation coating of the part is electrically connected by joining means such as soldering, and the sensor substrate is resin-sealed in the pipe, so that it is small and has excellent temperature response and electrical performance An object of the present invention is to provide a highly reliable temperature sensor with small variation and small change with time.

本発明は、上記課題を達成するためになされたものであり、請求項1の発明は、細長い絶縁基板上に感熱素子を載置したセンサ基板をパイプ内に絶縁材料で封止した温度センサにおいて、前記絶縁基板が一端に形成された一対のランドと、該ランド間に接続された感熱素子と、前記センサ基板の他端に形成された一対の端子部と、前記ランドと前記端子部とを接続するリード部とから構成されたセンサ基板であって、該センサ基板の前記端子部に絶縁被覆電線の露出させた芯線部が電気的に接続されていることを特徴とする温度センサである。   The present invention has been made in order to achieve the above object, and the invention of claim 1 is a temperature sensor in which a sensor substrate having a heat-sensitive element mounted on an elongated insulating substrate is sealed in a pipe with an insulating material. A pair of lands formed at one end of the insulating substrate, a thermal element connected between the lands, a pair of terminal portions formed at the other end of the sensor substrate, and the lands and the terminal portions. A temperature sensor, comprising a lead portion to be connected, wherein a core wire portion where an insulation-coated electric wire is exposed is electrically connected to the terminal portion of the sensor substrate.

本発明の請求項2に係わる発明は、前記絶縁基板の形状を、前記パイプの壁面に沿った形状としたことを特徴とする請求項1に記載の温度センサである。   The invention according to claim 2 of the present invention is the temperature sensor according to claim 1, wherein the shape of the insulating substrate is a shape along the wall surface of the pipe.

本発明の請求項3に係わる発明は、前記感熱素子が、セラミックス基板の片面に形成されたサーミスタ薄膜と、一対の電極部と、該一対の電極部上に金バンプが形成された薄膜サーミスタ素子であることを特徴とする請求項1、2に記載の温度センサである。   According to a third aspect of the present invention, the thermosensitive element is a thin film thermistor element in which a thermistor thin film formed on one surface of a ceramic substrate, a pair of electrode portions, and gold bumps are formed on the pair of electrode portions. The temperature sensor according to claim 1 or 2, wherein:

本発明の請求項4に係わる発明は、前記センサ基板において、前記ランドが形成された前記絶縁基板の端部に切り込み部を設け、該切り込み部に前記感熱素子を挿入固定して、前記ランドと前記感熱素子とを電気的に接続してなることを特徴とする請求項1、2、3に記載の温度センサである。   According to a fourth aspect of the present invention, in the sensor substrate, a cut portion is provided at an end portion of the insulating substrate on which the land is formed, and the thermal element is inserted and fixed in the cut portion, and the land and The temperature sensor according to claim 1, wherein the temperature sensor is electrically connected to the thermosensitive element.

本発明の請求項5に係わる発明は、無酸素銅材料からなるフランジを有する有底パイプと、該有底パイプの壁面に沿った形状を有するセンサ基板と、該センサ基板上の2本のリード部先端に形成された金被覆されたランドと、該ランドと前記薄膜サーミスタ素子の電極部上に形成された金バンプを超音波接合した後、前記センサ基板の端子部に絶縁被覆電線の露出させた芯線部を接合して、前記有底パイプ内に前記センサ基板を挿入して周囲を絶縁樹脂で封止したことを特徴とする請求項1乃至4に記載の温度センサである。   According to a fifth aspect of the present invention, there is provided a bottomed pipe having a flange made of an oxygen-free copper material, a sensor substrate having a shape along a wall surface of the bottomed pipe, and two leads on the sensor substrate. After ultrasonically bonding the gold-covered land formed at the tip of the part and the gold bump formed on the land and the electrode part of the thin film thermistor element, the insulation-coated electric wire is exposed to the terminal part of the sensor substrate. The temperature sensor according to any one of claims 1 to 4, wherein the core wires are joined, the sensor substrate is inserted into the bottomed pipe, and the periphery is sealed with an insulating resin.

本発明の温度センサは、パイプ内に挿入できるような細長い絶縁基板上に導体箔からなる2本のリード部が形成されていて、一端にランドが他端に端子部が設けられており、前記ランドにサーミスタ素子等の感熱素子が電気的に接続されたセンサ基板を予め作製しておき、前記センサ基板の端子部と2芯平行絶縁被覆電線の一端部の絶縁被覆を剥がして露出させた芯線部とを超音波溶接や半田付け等の接合手段によって電気的に接続することで、サーミスタ素子等が搭載されたセンサ基板の状態で電気的特性の検査ができ、良品のみのセンサ基板を使用できるために、歩留まりの向上と効率的な温度センサの製造が可能になる。   In the temperature sensor of the present invention, two lead portions made of conductive foil are formed on an elongated insulating substrate that can be inserted into a pipe, a land is provided at one end, and a terminal portion is provided at the other end. A sensor board in which a heat sensitive element such as a thermistor element is electrically connected to a land is prepared in advance, and the insulation is removed from the terminal part of the sensor board and one end of the two-core parallel insulation coated electric wire and exposed. The electrical characteristics can be inspected in the state of the sensor board on which the thermistor element etc. is mounted by electrically connecting the parts to each other by means of joining such as ultrasonic welding or soldering, and only non-defective sensor boards can be used. Therefore, the yield can be improved and the temperature sensor can be efficiently manufactured.

絶縁基板の端子部のパターン間隔が異なる絶縁基板を用意することによって、使用用途に応じて用いられる太さの異なる各種絶縁被覆電線に対応した温度センサを製造することが可能になる。   By preparing an insulating substrate having different pattern intervals between terminal portions of the insulating substrate, it is possible to manufacture temperature sensors corresponding to various types of insulation-coated electric wires having different thicknesses that are used according to the intended use.

前記センサ基板上にパターン形成されたランドと端子部を接続する導体箔からなる2本のリード部の線幅(パターン幅)をできる限り細くパターン形成することで熱抵抗を高められ、ランド上に載置固定された薄膜サーミスタ素子等の感熱素子が受熱した熱が端子部から絶縁被覆電線の芯線部に放散されにくくすることで、熱応答性に優れた温度センサを製造することができる。   Thermal resistance can be increased by forming the line width (pattern width) of the two lead parts made of conductive foil connecting the land formed on the sensor substrate and the terminal part as narrow as possible. By making it difficult for the heat received by the thermosensitive element such as the mounted thin film thermistor element to be dissipated from the terminal part to the core part of the insulation-coated electric wire, a temperature sensor with excellent thermal response can be manufactured.

センサ基板の形状を有底パイプの壁面に沿った形状にすることによって、絶縁樹脂を充填・硬化させて封止するときにセンサ基板上の感熱素子が載置された先端部分がパイプの底部に正確に固定でき、完成した温度センサとしての熱応答性をはじめとする電気的特性のバラツキを小さくすることができるために製品歩留まりが向上する。また、金属製のパイプを使用したときにセンサ基板の先端部がパイプの底部に正確に固定できることから、感熱素子とパイプとの位置関係バラツキが無くなり十分な絶縁耐圧が得られるとともに、絶縁耐圧による不良品の発生を防止でき歩留まりの向上が期待できる。また、絶縁基板上に感熱素子を載置したセンサ基板を用いることにより、長い有底パイプの温度センサを製造する場合でも、パイプ底部にセンサ基板の感熱素子が載置された先端部を確実容易に設置固定できるため、不良品の発生防止と生産性の向上に効果がある。   By making the shape of the sensor substrate along the wall surface of the bottomed pipe, when the insulating resin is filled and cured and sealed, the tip part where the thermal element on the sensor substrate is placed is at the bottom of the pipe The product yield can be improved because it can be accurately fixed and variation in electrical characteristics including thermal response as a completed temperature sensor can be reduced. In addition, when a metal pipe is used, the tip of the sensor substrate can be accurately fixed to the bottom of the pipe, so that there is no variation in the positional relationship between the thermal element and the pipe, and sufficient withstand voltage is obtained. The generation of defective products can be prevented and an improvement in yield can be expected. In addition, by using a sensor substrate with a thermal element mounted on an insulating substrate, even when manufacturing a temperature sensor with a long bottomed pipe, the tip of the sensor substrate with the thermal element mounted on the bottom of the pipe can be reliably and easily Since it can be installed and fixed on the machine, it is effective in preventing the occurrence of defective products and improving productivity.

有底パイプの壁面に沿った形状のセンサ基板を用いることで、パイプ内にセンサ基板を挿入したときにセンサ基板がパイプの中心軸に固定できるので、製作工程で従来必要であった引き出し用の絶縁被覆電線がパイプの中心に位置するように固定するための特別な治工具を用いる必要がなく工数削減と作業時間の短縮が達成できる。   By using a sensor board with a shape along the wall of the bottomed pipe, the sensor board can be fixed to the center axis of the pipe when the sensor board is inserted into the pipe. It is not necessary to use a special jig for fixing the insulated coated electric wire so that it is positioned at the center of the pipe, and man-hours and working hours can be reduced.

本発明の温度センサに使用するセンサ基板を用いることによって、従来のような周囲温度の急激な変化や周期的変化などの熱衝撃によって発生する絶縁被覆電線の膨張・収縮でサーミスタ素子等の感熱素子電極部の剥がれや、絶縁被覆電線の芯線部から侵入する水分・湿気によるサーミスタチップの特性劣化を防止することができ信頼性の高い温度センサを低コストで提供することができる。   By using the sensor substrate used for the temperature sensor of the present invention, a thermal element such as a thermistor element due to the expansion / contraction of an insulation-coated electric wire generated by a thermal shock such as a rapid change or a periodic change of the ambient temperature as in the past. It is possible to prevent deterioration of the characteristics of the thermistor chip due to peeling of the electrode part and moisture / humidity entering from the core part of the insulating coated electric wire, and a highly reliable temperature sensor can be provided at low cost.

以下、本発明の実施の形態に関して添付図面に基づき説明する。図1(a)は本発明温度センサに使用する絶縁基板の平面図を示す。1はガラスエポキシ銅張積層板またはポリイミド樹脂フィルム等のフレキシブル基板の表面に銅箔を張った耐熱性の絶縁基板で、パイプ内に挿入できるように細長い形状を有している。絶縁基板1の表面の銅箔をエッチングすることで、端子部2、リード部3及び感熱素子を電気的に接続するためのランド4が形成される。ランド4と端子部2を結ぶリード部3は、被検知体から感熱素子が受熱した熱が端子部を通って、絶縁被覆電線の芯線部分に逃げないように、できる限り熱抵抗が大きくなるように線幅の細いパターンで形成することが好ましい。また、熱抵抗を大きくするために、ランド4と端子部2間のリード部3の距離を長く取るようにパターン設計すると良い。本実施例の絶縁基板1は厚みが0.1mmのポリイミド樹脂フィルムを使用した。またリード部3の最小線幅は100〜200ミクロンで形成された。絶縁基板1としては、さらに耐熱性を要求される用途であれば、上記の他にアルミナ等のセラミックス基板を使用することもできる。図1(b)は絶縁基板1のランド4間に感熱素子5が載置され、感熱素子5の図示しない電極部とランド4とが電気的に接合されたセンサ基板6の平面図を示す。   Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. Fig.1 (a) shows the top view of the insulated substrate used for the temperature sensor of this invention. Reference numeral 1 denotes a heat-resistant insulating substrate in which a copper foil is stretched on the surface of a flexible substrate such as a glass epoxy copper-clad laminate or a polyimide resin film, and has an elongated shape so that it can be inserted into a pipe. By etching the copper foil on the surface of the insulating substrate 1, the land 4 for electrically connecting the terminal portion 2, the lead portion 3, and the thermal element is formed. The lead part 3 connecting the land 4 and the terminal part 2 has a thermal resistance as large as possible so that the heat received by the thermosensitive element from the detected object does not escape through the terminal part to the core part of the insulated wire. It is preferable to form a pattern with a narrow line width. In order to increase the thermal resistance, the pattern may be designed so that the distance between the land 4 and the terminal portion 2 is long. For the insulating substrate 1 of this example, a polyimide resin film having a thickness of 0.1 mm was used. The minimum line width of the lead portion 3 was 100 to 200 microns. In addition to the above, a ceramic substrate such as alumina can be used as the insulating substrate 1 as long as heat resistance is required. FIG. 1B is a plan view of the sensor substrate 6 in which the thermal element 5 is placed between the lands 4 of the insulating substrate 1, and an electrode portion (not shown) of the thermal element 5 and the land 4 are electrically joined.

図2(a)は、本発明温度センサの一実施例として、給湯器の水温を検知する温度センサで、有底パイプ7内にセンサ基板6が配置された内部透視斜視図を示す。図2(b)は図2(a)の有底パイプの軸に平行な面のA−A線断面図を示す。本実施例の温度センサは、フランジ8を有する無酸素銅材料からなる有底パイプ7内に、絶縁基板1のランド4間に感熱素子5として薄膜サーミスタ素子11が載置、接続されたセンサ基板6が挿入され、端子部2に接続された絶縁被覆電線9が有底パイプ7から外部に引き出されている。そして、有底パイプ7内の空隙は絶縁樹脂10によって封止されている。図2(c)は本発明温度センサ先端部のA−A線断面図を示す。   FIG. 2A shows an internal perspective view of a temperature sensor for detecting the water temperature of a water heater as an embodiment of the temperature sensor of the present invention, in which a sensor substrate 6 is arranged in a bottomed pipe 7. FIG. 2B is a cross-sectional view taken along line AA of a plane parallel to the axis of the bottomed pipe of FIG. The temperature sensor of the present embodiment is a sensor substrate in which a thin film thermistor element 11 is mounted and connected as a thermal element 5 between lands 4 of an insulating substrate 1 in a bottomed pipe 7 made of an oxygen-free copper material having a flange 8. 6 is inserted, and the insulation-coated electric wire 9 connected to the terminal portion 2 is drawn out from the bottomed pipe 7. The gap in the bottomed pipe 7 is sealed with an insulating resin 10. FIG.2 (c) shows the sectional view on the AA line of the front-end | tip part of the temperature sensor of this invention.

上記実施例で用いられるセンサ基板6の作製手順は次の通りである。絶縁基板1は図2(b)に示すように、有底パイプ7の内側断面形状とほぼ同一な形状を有し、絶縁基板1上のランド4には金(Au)が部分メッキされメッキ膜14が形成されている。一方感熱素子5として使用する薄膜サーミスタ素子11の電極部12上には金バンプ13が形成されている。前記薄膜サーミスタ11を位置決めしてランド4に重ね合わせ、薄膜サーミスタ素子11に圧力を加えてバンプ13をランド部分に圧接しながら超音波振動を加えて接合する。なお接合部を100〜200℃程度に加熱しながら超音波振動を加えることで接合時間を短縮することができる。図2(d)薄膜サーミスタ素子の外観を示す斜視図である。薄膜サーミスタ素子11は、セラミックス基板18上にサーミスタ薄膜15と両端に形成された電極部12と前記電極部12上に形成された金バンプ13から構成されている。絶縁基板1上に薄膜サーミスタ素子11を搭載して完成したセンサ基板6は、図2(a)、(b)に示すように、端子部2と絶縁被覆電線9の一端部を露出させた芯線部16とを超音波溶接等の手段によって接合し、有底パイプ7内に挿入し隙間に絶縁樹脂10を充填し加熱硬化させることで給湯器用の温度センサ17が完成する。図2(c)は前記実施例における図2(a)の先端部のB−B線断面図を示し、同図において温度センサを構成する有底パイプ7の先端部分の断面が扁平形状としてあるのは、センサ基板6を有底パイプ7内に挿入したときにセンサ基板6の先端部に載置した薄膜サーミスタ素子11のセラミックス基板18と有底パイプ7の壁面との距離を接近させて壁面から薄膜サーミスタ素子11への熱伝達を改善し応答特性を向上させている。   The manufacturing procedure of the sensor substrate 6 used in the above embodiment is as follows. As shown in FIG. 2B, the insulating substrate 1 has substantially the same shape as the inner cross-sectional shape of the bottomed pipe 7, and the land 4 on the insulating substrate 1 is partially plated with gold (Au). 14 is formed. On the other hand, a gold bump 13 is formed on the electrode portion 12 of the thin film thermistor element 11 used as the heat sensitive element 5. The thin film thermistor 11 is positioned and superposed on the land 4, and pressure is applied to the thin film thermistor element 11 to bond the bump 13 to the land portion by applying ultrasonic vibration. In addition, joining time can be shortened by applying ultrasonic vibration, heating a junction part at about 100-200 degreeC. FIG. 2D is a perspective view showing the appearance of the thin film thermistor element. The thin film thermistor element 11 includes a thermistor thin film 15 on a ceramic substrate 18, electrode portions 12 formed at both ends, and gold bumps 13 formed on the electrode portions 12. The sensor substrate 6 completed by mounting the thin film thermistor element 11 on the insulating substrate 1 is a core wire in which the terminal portion 2 and one end portion of the insulated coated electric wire 9 are exposed as shown in FIGS. 2 (a) and 2 (b). The temperature sensor 17 for a hot water heater is completed by joining the part 16 by means such as ultrasonic welding, inserting it into the bottomed pipe 7, filling the gap with the insulating resin 10, and curing it. FIG. 2 (c) shows a cross-sectional view of the tip portion of FIG. 2 (a) along the line B-B in the above embodiment, in which the tip portion of the bottomed pipe 7 constituting the temperature sensor has a flat shape. This is because when the sensor substrate 6 is inserted into the bottomed pipe 7, the distance between the ceramic substrate 18 of the thin film thermistor element 11 placed on the tip of the sensor substrate 6 and the wall surface of the bottomed pipe 7 is made closer. The heat transfer from the thin film thermistor element 11 to the thin film thermistor element 11 is improved to improve the response characteristics.

なお、本発明温度センサの他の製造方法としては、例えば、図3に示すような連続して形成された一枚の絶縁基板上の銅箔をエッチングして端子部2、ランド4、リード部3を一度に多数個形成させ、その後、ランド4に金メッキを施したメッキ膜14を形成した後、薄膜サーミスタ素子11の電極部12に形成された金バンプ13とランド4とを圧接しながら超音波振動を加えて接合する。このようにして、多数の薄膜サーミスタ素子11が搭載された一枚の連接したセンサ基板が完成する。この後、絶縁被覆電線9の芯線部16と端子部2とを超音波溶接等の手段によって接合し、点線部分Cで切断することで個々に分割切断することで絶縁被覆電線が取り付けられたひとつのセンサ基板6が完成する。このような短冊状に形成された基板を使用することによって、薄膜サーミスタ素子のマウントと接合工程および絶縁被覆電線の接続工程の自動化が可能となり効率よい製造ができる。   In addition, as another manufacturing method of the temperature sensor of the present invention, for example, a copper foil on a single insulating substrate formed continuously as shown in FIG. 3 are formed at a time, and then a plated film 14 is formed on the land 4 by gold plating, and then the gold bumps 13 formed on the electrode portions 12 of the thin film thermistor element 11 and the lands 4 are pressed against each other. Join by applying sonic vibration. In this way, a single connected sensor substrate on which many thin film thermistor elements 11 are mounted is completed. Thereafter, the core wire portion 16 and the terminal portion 2 of the insulation-coated electric wire 9 are joined by means such as ultrasonic welding, and the insulation-coated electric wire is attached by dividing and cutting individually by cutting along the dotted line portion C. The sensor substrate 6 is completed. By using such a strip-shaped substrate, it is possible to automate the mounting and joining process of the thin film thermistor element and the connection process of the insulated coated electric wire, and efficient production can be achieved.

上記実施例で開示した本発明温度センサは、薄膜サーミスタ素子の電極部に金バンプを設けて、センサ基板のランドとを超音波によって接合する方法について述べたが、これに限定されるものではなく温度センサとして使用する雰囲気や温度によって、一般に用いられている半田付け方法を用いてもよく使用目的に応じて適宜選択すればよいことはもちろんである。センサ基板の端子部と絶縁被覆電線の接続手段についても同様である。   Although the temperature sensor of the present invention disclosed in the above embodiment has been described with respect to a method in which a gold bump is provided on the electrode portion of the thin film thermistor element and the land of the sensor substrate is joined by ultrasonic waves, the present invention is not limited thereto. Of course, a generally used soldering method may be used depending on the atmosphere and temperature used as the temperature sensor, and may be appropriately selected according to the purpose of use. The same applies to the connection means between the terminal portion of the sensor substrate and the insulated wire.

本実施例では、絶縁基板上のランドに薄膜サーミスタ素子を載置固定した構造について示したが、図6に示すように、絶縁基板1の先端部に切り込み部19を設けて、この切り込み部19に薄膜サーミスタ素子11を載置固定し、薄膜サーミスタ素子11の電極部12と絶縁基板1のランド4間をワイヤ20でボンディング等の手段によって接続したセンサ基板の端子部に、絶縁被覆電線の芯線部を半田付けもしくは溶接等の手段によって接合した後、前記センサ基板と前記絶縁被覆電線の一部をパイプ内に挿入し周囲の空隙部分を絶縁樹脂で封止固定すれば、センサ基板の先端部がパイプ底部の感熱部に一層接近して固定できるために、被検知体の正確な温度検知ができるだけではなく、パイプ壁面からの熱の伝達が早められるために熱応答特性の改善が期待できる。   In the present embodiment, the structure in which the thin film thermistor element is placed and fixed on the land on the insulating substrate is shown. However, as shown in FIG. The thin-film thermistor element 11 is placed and fixed on the sensor board terminal portion of the sensor substrate in which the electrode portion 12 of the thin-film thermistor element 11 and the land 4 of the insulating substrate 1 are connected to each other by means of bonding such as a wire 20. After joining the parts by means of soldering or welding, etc., if the sensor board and a part of the insulation-coated electric wire are inserted into the pipe and the surrounding void is sealed and fixed with insulating resin, the tip of the sensor board Since it can be fixed closer to the heat sensitive part at the bottom of the pipe, not only can the temperature of the object to be detected be accurately detected, but also heat transfer from the pipe wall surface can be accelerated. Improvement of the properties can be expected.

図4、図5は用いられる絶縁基板の他の形状を示す。図4(a)は絶縁基板1の端子部2に孔部21が設けられた例を示す。使用用途によっては、絶縁基板1の端子部2と絶縁被覆電線9の芯線部16との接続法として、上記実施例で示したような半田付けや溶接等の接合手段では、接合部の接合強度が十分に得られない場合がある。このときには、図4(b)に示すように、孔部21へ絶縁被覆電線9の芯線部16を嵌挿して絡めて固定したり、図5(a)に示すように、絶縁基板1の端子部2の部分に凹部22を設けた絶縁基板1を用い、同図(b)のように絶縁基板1の端子部2の部分に設けた凹部22に絶縁被覆電線9の芯線部16をはめ込んで固定し、必要に応じて半田付け等を行えば、センサ基板と絶縁被覆電線とをより一層強固に接続することができる。なお、上記した絶縁基板の形状は、上記実施例に示したパイプの壁面に沿った形状に限定されるものではなく、挿入するパイプの断面形状に合わせ、特に感熱素子が載置されたセンサ基板の先端部がパイプの底部に確実に設置固定できるような形状に設計することが好ましい。    4 and 5 show other shapes of the insulating substrate used. FIG. 4A shows an example in which a hole 21 is provided in the terminal portion 2 of the insulating substrate 1. Depending on the intended use, as a connection method between the terminal portion 2 of the insulating substrate 1 and the core wire portion 16 of the insulated wire 9, the joining strength of the joint portion may be used in joining means such as soldering or welding as shown in the above embodiment. May not be sufficient. At this time, as shown in FIG. 4 (b), the core wire portion 16 of the insulation covered electric wire 9 is inserted into the hole portion 21 to be entangled and fixed, or as shown in FIG. 5 (a), the terminal of the insulating substrate 1 is fixed. The insulating substrate 1 provided with the recess 22 in the portion 2 is used, and the core wire portion 16 of the insulation coated electric wire 9 is fitted into the recess 22 provided in the terminal portion 2 portion of the insulating substrate 1 as shown in FIG. If it is fixed and soldering or the like is performed as necessary, the sensor substrate and the insulated coated electric wire can be connected more firmly. The shape of the insulating substrate described above is not limited to the shape along the wall surface of the pipe shown in the above-described embodiment, and is particularly a sensor substrate on which a thermal element is mounted according to the cross-sectional shape of the pipe to be inserted. It is preferable to design the shape so that the front end of the can be securely installed and fixed to the bottom of the pipe.

図1(a)、(b)は、本発明温度センサに用いる絶縁基板及びセンサ基板の平面図である。1A and 1B are plan views of an insulating substrate and a sensor substrate used in the temperature sensor of the present invention. 図2(a)は本発明温度センサの一実施例として、給湯器の水温を検知する温度センサの内部透視斜視図を示す。図2(b)はA−A線で切断した断面図、図2(c)はB−B線で切断した断面図、図2(d)は使用する薄膜サーミスタ素子の概略構成を示す斜視図である。FIG. 2A shows an internal perspective view of a temperature sensor that detects the water temperature of a water heater as an embodiment of the temperature sensor of the present invention. 2B is a cross-sectional view taken along the line AA, FIG. 2C is a cross-sectional view taken along the line BB, and FIG. 2D is a perspective view showing a schematic configuration of the thin film thermistor element used. It is. 図3は、絶縁基板上に感熱素子が載置されたセンサ基板が多数個連結して形成され、各センサ基板に絶縁被覆電線が接続された状態を示す連続形成されたセンサ基板の平面図を示す。FIG. 3 is a plan view of a continuously formed sensor substrate showing a state in which a plurality of sensor substrates each having a thermal element mounted thereon are connected on an insulating substrate, and an insulating coated electric wire is connected to each sensor substrate. Show. 図4(a)は、絶縁基板の他の形状を示す平面図、図4(b)は、その絶縁基板を用いて絶縁被覆電線を接続したときの側面図を示す。FIG. 4A is a plan view showing another shape of the insulating substrate, and FIG. 4B is a side view when the insulated coated electric wire is connected using the insulating substrate. 図5(a)は、絶縁基板の他の形状を示す平面図、図5(b)は、その絶縁基板を用いて絶縁被覆電線を接続したときの側面図を示す。Fig.5 (a) is a top view which shows the other shape of an insulated substrate, FIG.5 (b) shows the side view when an insulated covering electric wire is connected using the insulated substrate. 図6は、絶縁基板の先端部に切り込み部を設けて、この切り込み部に感熱素子を挿入して固定した状態を示す部分斜視図を示す。FIG. 6 is a partial perspective view showing a state in which a cut portion is provided at the tip of the insulating substrate, and a thermal element is inserted and fixed in the cut portion. 図7は、従来例の温度センサであり、図7(a)は絶縁被覆電線に直接サーミスタチップを接続してパイプに樹脂封止したものの断面図、図7(b)は絶縁被覆電線にガラス封止サーミスタ素子を接続したものをパイプに樹脂封止したものの断面図を示す。FIG. 7 is a conventional temperature sensor. FIG. 7A is a cross-sectional view of a thermistor chip directly connected to an insulated coated wire and resin-sealed on a pipe. FIG. Sectional drawing of what sealed the resin which sealed the thermistor element to the pipe is shown.

符号の説明Explanation of symbols

1 絶縁基板
2 端子部
3 リード部
4 ランド
5 感熱素子
6 センサ基板
7 有底パイプ
9 絶縁被覆電線
10 絶縁材料
11 薄膜サーミスタ素子
13 金バンプ
15 サーミスタ薄膜
17 給湯器用温度センサ
DESCRIPTION OF SYMBOLS 1 Insulation board 2 Terminal part 3 Lead part 4 Land 5 Thermal element 6 Sensor board 7 Bottomed pipe 9 Insulated coated electric wire 10 Insulating material 11 Thin film thermistor element 13 Gold bump 15 Thermistor thin film 17 Temperature sensor for water heater

Claims (5)

細長い絶縁基板上に感熱素子を載置したセンサ基板をパイプ内に絶縁材料で封止した温度センサにおいて、前記絶縁基板が一端に形成された一対のランドと、該ランド間に接続された感熱素子と、前記センサ基板の他端に形成された一対の端子部と、前記ランドと前記端子部とを接続するリード部とから構成されたセンサ基板であって、該センサ基板の前記端子部に絶縁被覆電線の露出させた芯線部が電気的に接続されていることを特徴とする温度センサ。   In a temperature sensor in which a sensor substrate having a heat-sensitive element mounted on an elongated insulating substrate is sealed with an insulating material in a pipe, a pair of lands each having the insulating substrate formed at one end, and a heat-sensitive element connected between the lands And a pair of terminal portions formed at the other end of the sensor substrate, and lead portions connecting the lands and the terminal portions, wherein the sensor substrate is insulated from the terminal portions. A temperature sensor, wherein the exposed core wire portion of the covered electric wire is electrically connected. 前記絶縁基板の形状を、前記パイプの壁面に沿った形状としたことを特徴とする請求項1に記載の温度センサ。   The temperature sensor according to claim 1, wherein a shape of the insulating substrate is a shape along a wall surface of the pipe. 前記感熱素子が、セラミックス基板の片面に形成されたサーミスタ薄膜と、一対の電極部と、該一対の電極部上に金バンプが形成された薄膜サーミスタ素子であることを特徴とする請求項1、2に記載の温度センサ。   The thermosensitive element is a thin film thermistor element in which a thermistor thin film formed on one surface of a ceramic substrate, a pair of electrode portions, and gold bumps are formed on the pair of electrode portions. 2. The temperature sensor according to 2. 前記センサ基板において、前記ランドが形成された前記絶縁基板の端部に切り込み部を設け、該切り込み部に前記感熱素子を挿入固定して、前記ランドと前記感熱素子とを電気的に接続してなることを特徴とする請求項1、2、3に記載の温度センサ。   In the sensor substrate, a cut portion is provided at an end portion of the insulating substrate on which the land is formed, the thermal element is inserted and fixed in the cut portion, and the land and the thermal element are electrically connected. The temperature sensor according to claim 1, 2, or 3. 無酸素銅材料からなるフランジを有する有底パイプと、該有底パイプの壁面に沿った形状を有するセンサ基板と、該センサ基板上の2本のリード部先端に形成された金被覆されたランドと、該ランドと前記薄膜サーミスタ素子の電極部上に形成された金バンプを超音波接合した後、前記センサ基板の端子部に絶縁被覆電線の露出させた芯線部を接合して、前記有底パイプ内に前記センサ基板を挿入して周囲を絶縁樹脂で封止したことを特徴とする請求項1乃至4に記載の温度センサ。
A bottomed pipe having a flange made of an oxygen-free copper material, a sensor substrate having a shape along the wall surface of the bottomed pipe, and a gold-coated land formed at the tips of two lead portions on the sensor substrate And ultrasonic bonding the land and the gold bump formed on the electrode portion of the thin film thermistor element, and then bonding the exposed core wire portion to the terminal portion of the sensor substrate, 5. The temperature sensor according to claim 1, wherein the sensor substrate is inserted into a pipe and the periphery is sealed with an insulating resin.
JP2004272663A 2004-09-21 2004-09-21 Temperature sensor Pending JP2006090704A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008026199A (en) * 2006-07-24 2008-02-07 Matsushita Electric Ind Co Ltd Temperature sensor and heated toilet seat equipped therewith
JP2012508870A (en) * 2008-11-14 2012-04-12 エプコス アクチエンゲゼルシャフト Sensor element and method for manufacturing sensor element
WO2013061467A1 (en) * 2011-10-28 2013-05-02 富士通フロンテック株式会社 Circuit substrate and display device
JP2014168037A (en) * 2013-01-30 2014-09-11 Murata Mfg Co Ltd Electronic component
US11172814B2 (en) 2015-09-18 2021-11-16 Olympus Corporation Antifogging device, endoscope device and method of manufacturing antifogging device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008026199A (en) * 2006-07-24 2008-02-07 Matsushita Electric Ind Co Ltd Temperature sensor and heated toilet seat equipped therewith
JP2012508870A (en) * 2008-11-14 2012-04-12 エプコス アクチエンゲゼルシャフト Sensor element and method for manufacturing sensor element
WO2013061467A1 (en) * 2011-10-28 2013-05-02 富士通フロンテック株式会社 Circuit substrate and display device
JP2014168037A (en) * 2013-01-30 2014-09-11 Murata Mfg Co Ltd Electronic component
US11172814B2 (en) 2015-09-18 2021-11-16 Olympus Corporation Antifogging device, endoscope device and method of manufacturing antifogging device

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