JP2006090681A - Heater for air conditioning, and heating unit - Google Patents
Heater for air conditioning, and heating unit Download PDFInfo
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Abstract
Description
本発明は、精密加工・計測分野に用いられる精密温度制御空調に用いられる空調用加熱器および加熱ユニットに関するものである。 The present invention relates to an air conditioning heater and a heating unit used for precision temperature control air conditioning used in the field of precision machining and measurement.
半導体の大規模集積化に伴い、精密加工・計測精度の環境因子である空気温度を高度制御した精密環境チャンバなどの要求が高まっている。空気温度の制御では、温度センサの測定値を用い、フィードバック制御などで空調用加熱器の出力を調整する手法が採られるが、この場合、高精度な空気温度制御を実現するためには、空調用加熱器に、制御信号に対する応答の速さや、微細な出力の調整が可能であること、空気過熱後の温度ムラが小さいといった特性が要求される。 With the integration of semiconductors on a large scale, there is an increasing demand for precision environmental chambers that control the air temperature, which is an environmental factor for precision processing and measurement accuracy. In air temperature control, the temperature sensor measurement value is used and the output of the air conditioning heater is adjusted by feedback control, etc. In this case, in order to achieve highly accurate air temperature control, air conditioning The heater is required to have characteristics such as quick response to control signals, fine output adjustment, and small temperature unevenness after air overheating.
高精度な空気温度制御を実現するため空調用加熱器としては、一般に、コイル状に巻いた伝熱ワイヤを保護管に挿入し、保護管内に絶縁材を充填したシースヒータが用いられる。この加熱器は、通電により伝熱ワイヤを発熱させ、保護管を加熱し、保護管表面と空気との接触熱伝達により空気を加熱、昇温するものである。 In order to realize highly accurate air temperature control, a sheath heater in which a heat transfer wire wound in a coil shape is inserted into a protective tube and an insulating material is filled in the protective tube is generally used as an air conditioning heater. This heater heats the heat transfer wire by energization, heats the protection tube, and heats and raises the temperature of the air by contact heat transfer between the surface of the protection tube and the air.
この種の加熱器を使用した温度制御システムを図９に示す。ブロア１からの送風空気はダクト２を通じて精密加工・計測領域に供給されている。この供給空気を温度制御するのであるが、空気用ダクト２に加熱器３を挿入配置するとともに、加熱器３の下流に温度センサ４を設置している。温度センサ４は空気温度を測定し、調節計５に測定値信号を送る。調節計５では測定値を基に加熱器３の内部ヒータへの出力電圧が演算され、サイリスタ６に出力信号を送る。サイリスタ６は出力信号に応じて加熱器３への印加電圧を調節し、所定温度に高精度に制御するのである。
A temperature control system using this type of heater is shown in FIG. Air blown from the
この発明に関連する先行文献としては下記のものが挙げられる。
しかしながら、従来用いられているシースヒータ加熱器では、加熱器自体の熱容量が大きく、応答性が悪い。このため制御機器からの出力信号に加熱器が追従できず、制御性能が低くなる問題があった。また、伝熱面積が小さく、所定の熱量を空気に伝達するためには加熱器表面温度を高くする必要がある。このため加熱器と空気の温度差が大きくなり、加熱器出口で空気の温度ムラが発生する問題があった。 However, in the conventionally used sheathed heater, the heat capacity of the heater itself is large and the response is poor. For this reason, there was a problem that the heater could not follow the output signal from the control device and the control performance was lowered. In addition, since the heat transfer area is small, it is necessary to increase the heater surface temperature in order to transmit a predetermined amount of heat to the air. For this reason, there is a problem that the temperature difference between the heater and the air becomes large, and air temperature unevenness occurs at the heater outlet.
本発明は、精密加工時などに要求される空調空気の温度を、温度ムラを発生することなく、高精度にコントロールできる加熱器および加熱ユニットを提供することを目的とする。 An object of this invention is to provide the heater and heating unit which can control the temperature of the air-conditioning air requested | required at the time of precision processing etc. with high precision, without generating temperature nonuniformity.
上記目的を達成するために、本発明は、熱容量が小さく、伝熱面積が広い加熱器を発明した。本加熱器では、加熱部材として薄いシート形状をしており、面内でほぼ一様発熱するヒータ（例えばガラスクロスにカーボン素材を含浸し成型した抵抗体を、ラミネート処理したもの）を用い、これを空気流に対して平行に、かつ加熱器内部の空気流路中に均等な割合で存在する様に複数枚配置したものである。 In order to achieve the above object, the present invention has invented a heater having a small heat capacity and a wide heat transfer area. This heater has a thin sheet shape as a heating member, and uses a heater that generates heat almost uniformly in the plane (for example, a glass cloth impregnated with a carbon material and molded into a laminate). Are arranged in parallel to the air flow and so as to be present at an equal ratio in the air flow path inside the heater.
具体的には、本発明に係る空調用加熱器は、精密加工・計測分野向けの精密温度制御空調設備で使用する加熱器であって、ダクト内部に多段平行流路を形成し、各流路壁面にシート状ヒータを設けたものである。あるいは、精密加工・計測分野向けの精密温度制御空調設備で使用する加熱器であって、ダクト内部に多段平衡流路を形成し、各流路隔壁をシート状ヒータにより形成するように構成することができる。 Specifically, the air-conditioning heater according to the present invention is a heater used in precision temperature control air-conditioning equipment for the precision processing / measurement field, wherein a multistage parallel flow path is formed inside the duct, and each flow path A sheet heater is provided on the wall surface. Alternatively, a heater used in precision temperature control air conditioning equipment for precision processing / measurement fields, wherein a multistage equilibrium flow path is formed inside the duct, and each flow path partition is formed by a sheet heater. Can do.
また、本発明に係る空調用加熱ユニットは、ダクト内部に多段平衡流路を形成し、各流路隔壁をシート状ヒータにより形成した空調用加熱器と、前記多段平行流路の上流部に配置された整流手段とを有し、前記多段平行流路の各入口流速を均一化するように構成した。 An air conditioning heating unit according to the present invention includes an air conditioning heater in which a multistage balanced flow path is formed inside a duct, and each flow path partition is formed by a sheet heater, and disposed upstream of the multistage parallel flow path. The flow rate of each inlet of the multistage parallel flow path is made uniform.
また、更に、ダクト内部に多段平衡流路を形成し、各流路隔壁をシート状ヒータにより形成した空調用加熱器と、前記多段平行流路の上流部に設けられた畜熱体とを有し、空気温度変動を緩和させて多段平衡流路に通流させるように構成することもできる。 Furthermore, a multi-stage equilibrium flow path is formed inside the duct, and each flow path partition is formed by a sheet heater, and there is a livestock heating body provided upstream of the multi-stage parallel flow path. However, it is also possible to reduce the air temperature fluctuation and allow the air to flow through the multistage equilibrium flow path.
上記構成によれば、ダクトを流れる空気は、多段平行流路を通過する際に層状に分割され、分割面の上下両面から加熱されることになる。これによって温度制御の応答性が格段に向上し、本発明により、高精度なく空気温度制御が可能となり、精密加工・計測用環境チャンバ等に応用することができる。ダクトを通流する空気はダクト中心部で最大速度で、ダクト壁面に接触領域が最小速度となるような速度分布をなし、空気とシート状ヒータの接触時間が各平行流路で異なって昇温度が異なる可能性がある場合には、多段平行流路の前段に整流手段、例えば整流板を設けて速度分布がダクト断面で均一になるように調整することによって温度分布のムラのない加熱が可能となる。また、多段平行流路の前段部に畜熱体を置くことにより、空気温度変動が抑制され、温度加熱制御時のオーバーシュートを防止することができる。 According to the said structure, the air which flows through a duct is divided | segmented into a layer shape, when passing a multistage parallel flow path, and will be heated from the upper and lower surfaces of a division surface. As a result, the responsiveness of the temperature control is remarkably improved, and the present invention makes it possible to control the air temperature without high accuracy, and can be applied to an environmental chamber for precision machining and measurement. The air flowing through the duct has a maximum velocity at the center of the duct and a velocity distribution that minimizes the contact area on the duct wall surface. If there is a possibility that the temperature distribution may differ, it is possible to perform heating without uneven temperature distribution by adjusting the speed distribution so that it is uniform in the duct cross section by providing a rectifying means, for example, a rectifying plate, in front of the multistage parallel flow path It becomes. In addition, by placing the heat storage element at the front stage of the multistage parallel flow path, the air temperature fluctuation is suppressed, and overshooting during temperature heating control can be prevented.
以下に、本発明に係る空調用加熱器並びに加熱ユニットの最良の実施形態について、添付図面を参照しつつ、詳細に説明する。
本実施形態に係る空調用加熱器を図１〜２に示す。図示のように、実施形態に係る空調用加熱器１０は、矩形断面をもつダクトケーシング１２を有している。矩形ダクトケーシング１２の内部流路は、空気の流れ方向を横断する方向に分割されており、平行に配置された複数の分割隔壁によって多段平行流路１４（１４1〜１４n）が形成されている。そして、実施形態の場合には、各流路間の隔壁をシート状ヒータ１６によって直接形成しており、当該シート状ヒータ１６を流れに対して平行に、等間隔のピッチで配置した構造となっている。薄いシート状ヒータ１６であるため、熱容量が小さく、温度制御信号に対する応答性が高い。また伝熱面が広く空気との接触面積が増大している分だけ伝熱面温度を低くでき、かつ伝熱面が空気流路内で均等に分布しているため、空調用加熱器１０出口での温度ムラを小さくすることができる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of an air conditioning heater and a heating unit according to the present invention will be described below in detail with reference to the accompanying drawings.
The heater for an air conditioning which concerns on this embodiment is shown to FIGS. As illustrated, the air-conditioning heater 10 according to the embodiment includes a duct casing 12 having a rectangular cross section. The internal flow path of the rectangular duct casing 12 is divided in a direction transverse to the air flow direction, and a multistage parallel flow path 14 (14 1 to 14 n ) is formed by a plurality of divided partition walls arranged in parallel. Yes. In the case of the embodiment, the partition between the flow paths is directly formed by the sheet-like heater 16, and the sheet-like heater 16 is arranged in parallel to the flow at equal intervals. ing. Since it is the thin sheet-like heater 16, the heat capacity is small and the response to the temperature control signal is high. Further, since the heat transfer surface is wide and the contact area with the air is increased, the heat transfer surface temperature can be lowered and the heat transfer surface is evenly distributed in the air flow path. Temperature unevenness can be reduced.
したがって、各流路断面では流通する空気に対して伝熱面が均等になり、空気流れに沿った伝熱を効果的に行うことができ、空気流全体の温度ムラを小さくできるのである。 Therefore, the heat transfer surface becomes uniform with respect to the circulating air in each flow path cross section, heat transfer along the air flow can be performed effectively, and temperature unevenness of the entire air flow can be reduced.
ところで、上述のような空調用加熱器１０を空調ダクト１８に介在させて温度制御している状態を図３に示す。本実施形態では空調用加熱器１０の流路断面内で均等に伝熱面が分布するようにしているが、ダクト１８内では空気は、図３に示すように、その粘性によりダクト中心流速が早く、ダクト壁面接触部の流速が遅い速度分布となる。このような流路内で偏流が発生すると、局所的に流量の多い所では空気温度が低く、流量の少ない所では空気温度が高くなる。 Incidentally, FIG. 3 shows a state where the temperature control is performed by interposing the air conditioning heater 10 as described above in the air conditioning duct 18. In the present embodiment, the heat transfer surface is uniformly distributed in the cross section of the flow path of the air conditioning heater 10, but in the duct 18, air has a duct center flow velocity due to its viscosity as shown in FIG. The velocity distribution of the duct wall surface contact portion is fast and slow. When uneven flow occurs in such a flow path, the air temperature is low at a location where the flow rate is locally high, and the air temperature is high at a location where the flow rate is low.
これを防止するための空調用加熱ユニットの実施形態を、図４に示す。この実施形態に係る空調用加熱ユニットは、上述した空調用加熱器１０と、その上流に整流手段として設置された多孔板２０とから構成したものである。これにより空調用加熱器１０の多段平行流路１４で一様な流れが形成でき、流路断面方向での場所による空気温度の違いを小さくすることができる。整流手段としては多孔板２０に限らず、整流作用のある任意の部材を使用することができる。 An embodiment of a heating unit for air conditioning for preventing this is shown in FIG. The heating unit for air conditioning according to this embodiment is constituted by the above-described heating heater 10 and a perforated plate 20 installed as a rectifying means upstream thereof. Thereby, a uniform flow can be formed in the multistage parallel flow path 14 of the heater 10 for air conditioning, and the difference in the air temperature depending on the location in the cross section direction of the flow path can be reduced. The rectifying means is not limited to the porous plate 20, and any member having a rectifying action can be used.
次に、図５には別の実施形態に係る空調用加熱ユニットの断面構成図を示している。この加熱ユニットは、上述した空調用加熱器１０と、その上流における空調ダクト１８内に配置した畜熱体２２とを備えた構成となっている。この加熱ユニットは空調用加熱器１０の下流側に温度センサ２４が配置されており、温調後の温度状態を計測するようにしている。そして、当該温度センサ２４により測定された温度に対応する温度信号は調節計２６に送られ、ここで測定値を元に空調用加熱器１０の内部ヒータへの出力電圧が演算され、サイリスタ２８に出力信号を送る。サイリスタ２８は出力信号に応じて空調用加熱器１０への印加電圧を調節し、所定温度に高精度にフィードバック制御するのである。 Next, FIG. 5 shows a cross-sectional configuration diagram of an air conditioning heating unit according to another embodiment. This heating unit is configured to include the above-described air conditioner heater 10 and a livestock heat body 22 disposed in the air conditioning duct 18 upstream thereof. In this heating unit, a temperature sensor 24 is disposed on the downstream side of the air-conditioning heater 10, and the temperature state after temperature adjustment is measured. Then, the temperature signal corresponding to the temperature measured by the temperature sensor 24 is sent to the controller 26, where the output voltage to the internal heater of the air conditioning heater 10 is calculated based on the measured value, and the thyristor 28 Send output signal. The thyristor 28 adjusts the voltage applied to the air conditioning heater 10 in accordance with the output signal, and performs feedback control to a predetermined temperature with high accuracy.
上述した空調用加熱器１０のみを用い、フィードバック制御により空気温度制御した場合、空調用加熱器１０の上流の温度変動に対する空調用加熱器１０の下流における温度変動の感度は、例えば図６のようになる。図示のように、０．１Ｈｚ近辺の温度変動は、空調用加熱器１０によって増幅され、温度変動周波数でｂ１〜ｂ２の範囲でオーバーシュートが発生する。図示の例では、これを防止するため、前述したように、本実施形態では空調用加熱器１０の上流に蓄熱体２２を設け、空調用加熱器１０で増幅される周波数の温度変動を予め抑制することで、温度制御を安定化させている。蓄熱体２２はその形状や材質によって温度変動の抑制効果が異なり、図７に示すように、畜熱体Ａ１の温度変動減衰効果が周波数ａ１（＜ｂ１）で現れ、畜熱体Ａ２の温度変動減衰効果が周波数ａ２（＞ｂ１）から現れる場合、空調用加熱器１０のオーバーシュート開始周波数ｂ１より下位周波数ａ１から温度変動減衰効果が表れる畜熱体Ａ１を選定するようにすればよい。もちろん、オーバーシュート開始周波数ｂ１と同一もしくは近傍の下位周波数での減衰効果が開始する畜熱体であることを要する。したがって、図８に示した空調用加熱器１０より畜熱体Ａ１の組合わせによる温度変動感度曲線がＸとなる特性が望ましい。特性線Ｙはオーバーシュートを防止できないため畜熱対Ａ２との組合わせは好ましくないのである。 When only the air conditioning heater 10 described above is used and the air temperature is controlled by feedback control, the sensitivity of the temperature fluctuation downstream of the air conditioning heater 10 to the temperature fluctuation upstream of the air conditioning heater 10 is, for example, as shown in FIG. become. As shown in the figure, the temperature fluctuation in the vicinity of 0.1 Hz is amplified by the air conditioning heater 10, and overshoot occurs in the range of b1 to b2 at the temperature fluctuation frequency. In the illustrated example, in order to prevent this, as described above, the heat storage body 22 is provided upstream of the air conditioning heater 10 in this embodiment, and the temperature fluctuation of the frequency amplified by the air conditioning heater 10 is suppressed in advance. By doing so, temperature control is stabilized. Regenerator 22 have different effect of suppressing the temperature fluctuation depending on the shape and material, as shown in FIG. 7, the temperature variation damping effect of the heat storage body A 1 appear at the frequency a1 (<b1), the heat accumulation element A 2 If the temperature change damping effect appears from the frequency a2 (> b1), it is sufficient to select a heat storage body a 1 temperature fluctuation damping effect appears from the lower frequency a1 from overshooting start frequency b1 of the air-conditioning heater 10 . Of course, it is necessary to be a livestock heat body in which an attenuation effect is started at a lower frequency that is the same as or close to the overshoot start frequency b1. Therefore, characteristic temperature variation sensitivity curve by the combination of the heat storage body A 1 from the air-conditioning heater 10 shown is X in FIG. 8 is desirable. Characteristic line Y is the combination of the heat accumulation pair A 2 can not prevent overshoot is not preferable.
本発明は、半導体生産設備などが配置されるクリーンルームにおける製造設備や計測設備に適用することが可能である。 The present invention can be applied to manufacturing equipment and measuring equipment in a clean room where semiconductor production equipment and the like are arranged.
１０………空調用加熱器、１２………矩形ダクトケーシング、１４（１４1〜１４n）………多段平行流路、１６………シート状ヒータ、１８………空調ダクト、２０………多孔板、２２………畜熱体、２４………温度センサ、２６………調節計、２８………サイリスタ。 10 ......... air conditioning heater 12 ......... rectangular duct casing, 14 (14 1 ~14 n) ......... multistage parallel flow paths, 16 ......... sheet heater, 18 ......... air-conditioning duct, 20 ... ...... Perforated plate, 22 ...... Animal heat, 24 ......... Temperature sensor, 26 ......... Regulator, 28 ......... Thyristor.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007271251A (en) * | 2006-03-07 | 2007-10-18 | Takafumi Wada | Radiation air conditioning unit |
| CN112484302A (en) * | 2020-12-18 | 2021-03-12 | 北京软通智慧城市科技有限公司 | Gas temperature regulation system and control method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007271251A (en) * | 2006-03-07 | 2007-10-18 | Takafumi Wada | Radiation air conditioning unit |
| CN112484302A (en) * | 2020-12-18 | 2021-03-12 | 北京软通智慧城市科技有限公司 | Gas temperature regulation system and control method |
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