JP4685806B2 - Humidity adjustment method for environmental test apparatus and environmental test apparatus - Google Patents

Description

  The present invention relates to a humidity adjustment method and an environmental test apparatus of an environmental test apparatus for performing an environmental test such as a constant temperature and humidity test on test objects such as electronic parts, electrical equipment, and polymer materials.

  In recent years, when conducting environmental tests such as a constant temperature and humidity test (high temperature and high humidity test) on test objects such as electronic parts, electrical equipment, and polymer materials, water temperature controlled humidifying environmental test equipment has been widely used. . This water temperature controlled humidifying environmental test device includes a test room for storing test objects such as electronic parts and electrical equipment and conducting an environmental test such as a constant temperature and humidity test, and an air conditioning room for air conditioning of the test room. The test chamber is heated by a room heater provided in the air conditioning room to maintain the test room at a predetermined temperature, and the humidified water supplied to the evaporating humidifying dish provided in the air conditioning room is set to a predetermined temperature. While evaporating by heating with a water heater, the test chamber is maintained at a predetermined humidity by dehumidifying excess evaporated moisture with a dehumidifier. This evaporative humidifying tray is supplied with makeup water heated to the same temperature as the temperature of the humidified water measured by the temperature sensor disposed on the evaporative humidifying tray, so as to compensate for the humidified water that becomes insufficient due to evaporation. (For example, Patent Document 1).

In the environmental test apparatus configured as described above, the test chamber is maintained at a predetermined temperature by the chamber heater, and the humidified water is evaporated by being heated by the water heater, while excess evaporated water is removed from the dehumidifier. The test chamber is maintained at a predetermined humidity by being dehumidified with the above, and the makeup water supplied from the outside is heated to the same temperature as the temperature of the humidification water in the evaporative humidification dish. Even in this case, as a result of suppressing the significant fluctuation of the temperature of the humidifying water in the evaporating / humidifying tray, a predetermined environmental test can be performed on the test object under relatively stable conditions.
Japanese Patent Laid-Open No. 61-213522

  However, in the conventional environmental test apparatus, the temperature fluctuation of the humidified water is suppressed by supplying the replenishing water heated to the same temperature as the temperature of the humidified water in the evaporative humidifying dish. However, since the humidified water in the evaporative humidifying tray is heated by the water heater provided in the evaporative humidifying tray, the temperature distribution in the evaporative humidifying tray is inevitably generated. Although it is said that the supplementary water heated to the same temperature as is supplied is heated to the temperature at the location where the temperature sensor is installed, the temperature in the evaporative humidifying pan is increased by supplying supplementary water. As a result of fluctuations in the distribution, the amount of evaporation from the evaporating / humidifying pan fluctuates, and as a result, there is a problem that disturbance of humidity control inevitably occurs.

  The present invention has been made in view of such circumstances, and an object thereof is to provide a humidity adjustment method and an environmental test apparatus for an environmental test apparatus that can easily maintain the humidity of a test chamber in a stable state. To do.

  In order to achieve the above object, the invention of claim 1 is configured so that air adjusted to a predetermined temperature and humidity is sent from the air conditioning room to the test room, and the air passing through the test room is returned to the air conditioning room. An environmental test apparatus comprising a heater for heating the air in the air-conditioned room, a humidifying dish for humidifying the air in the air-conditioned room by evaporating humidified water, and a dehumidifier for dehumidifying the air in the air-conditioned room. A method for adjusting humidity, wherein the absolute moisture and specific volume of the air are determined from the temperature and humidity of the air sent from the air conditioning chamber, and the absolute moisture and the specific moisture of the air are calculated from the temperature and humidity of the air returned to the air conditioning chamber. The specific volume is obtained, and the temperature of the humidified water in the humidifying dish is obtained from the absolute moisture and specific volume of the air sent out from the air-conditioned room and the absolute moisture and specific volume of the air returned to the air-conditioned room. Heated It is characterized by supplying water to the humidifying dish.

  According to a second aspect of the present invention, in the method according to the first aspect, the temperature of the humidified water in the humidifying tray is such that the absolute moisture and specific volume of the air sent from the air conditioning chamber and the absolute moisture of the air returned to the air conditioning chamber. Further, the vapor pressure of saturated air equal to the temperature of the humidified water is obtained from the specific volume, and the vapor pressure is obtained from this vapor pressure.

  The invention according to claim 3 is the method according to claim 1 or 2, wherein the absolute moisture and the specific volume of the air sent from the air-conditioned room measure the temperature of the air sent from the air-conditioned room and the humidity. The absolute moisture and specific volume of the air returned to the air conditioning chamber are calculated based on the measured value of the humidity sensor that measures the temperature, the humidity sensor that measures the humidity and the temperature sensor that measures the temperature of the air returned to the air conditioning chamber. It is calculated | required based on the measured value of a sensor, and the temperature of the humidification water of the said humidification tray is calculated | required from these calculated | required absolute water | moisture contents and specific volume.

  The invention of claim 4 is an environmental test apparatus in which air adjusted to a predetermined temperature and humidity is sent from the air-conditioned room to the test room, and the air passing through the test room is returned to the air-conditioned room. A heater that heats the air in the air-conditioning chamber, a humidifying dish that is provided in the air-conditioning chamber and is supplied with humidified water from the outside, and is disposed in the air-conditioning chamber. A dehumidifier for dehumidifying the air in the air-conditioned room, and obtaining the absolute moisture and specific volume of the air from the temperature and humidity of the air sent from the air-conditioned room, and the air from the temperature and humidity of the air returned to the air-conditioned room Temperature derivation, and the temperature derivation for obtaining the temperature of the humidifying water in the humidifying dish from the absolute moisture and specific volume of the air sent from the air conditioning chamber and the absolute moisture and specific volume of the air returned to the air conditioning chamber And the temperature derivation unit The makeup water heated to meta temperature is characterized in that a makeup water supply unit for supplying the humidifying dish.

  Invention of Claim 5 concerns on Claim 4, The said temperature derivation | leading-out part is based on the absolute water | moisture content and specific volume of the air sent out from the said air conditioned room, and the absolute water | moisture content and specific volume of the air returned to the said air conditioned room. A vapor pressure of saturated air equal to the temperature of the humidified water is obtained, and the temperature of the humidified water in the humidifying dish is obtained from the vapor pressure.

  The invention of claim 6 relates to claim 4 or 5, wherein the temperature deriving unit measures the absolute moisture content and specific volume of the air sent from the air-conditioned room, and measures the temperature of the air sent from the air-conditioned room. A temperature sensor that measures the absolute moisture content and specific volume of the air that is returned to the air-conditioned room, and a temperature sensor that measures the temperature of the air that is returned to the air-conditioned room. It is obtained based on the measured value of the humidity sensor to be measured, and the temperature of the humidified water in the humidifying dish is obtained from the obtained absolute moisture and specific volume.

  According to the invention of claim 1, the temperature of the humidified water in the humidifying dish is obtained from the absolute moisture and specific volume of the air sent from the air-conditioning room and the absolute moisture and specific volume of the air returned to the air-conditioned room. Since the replenished water heated to the humidifying dish is supplied to the humidifying dish, the humidifying dish is supplied with the replenishing water at a temperature corresponding to the actual evaporation amount, so that the humidifying water in the humidifying dish is inevitable. Even if there is a temperature distribution, the humidity of the test chamber can be easily maintained in a stable state.

  According to the invention of claim 2, the temperature of the humidified water in the humidifying dish is changed from the absolute moisture and specific volume of the air sent out from the air conditioning room and the absolute moisture and specific volume of the air returned to the air conditioning room to the temperature of the humidified water. Since the vapor pressure of the saturated air is obtained and obtained from this vapor pressure, the humidified water temperature in the humidifying pan can be accurately calculated as the temperature corresponding to the actual evaporation amount. Even if the temperature distribution is inevitably generated, the humidity of the test chamber can be easily maintained in a stable state.

  According to the invention of claim 3, the absolute moisture and the specific volume of the air sent from the air conditioning room are based on the measurement values of the temperature sensor for measuring the temperature of the air sent from the air conditioning room and the humidity sensor for measuring the humidity. The absolute moisture and specific volume of the air returned to the air conditioning room are obtained based on the measured values of the temperature sensor for measuring the temperature of the air returned to the air conditioning room and the humidity sensor for measuring the humidity. As a result, the temperature of the humidified water in the humidifying pan can be accurately determined as the temperature corresponding to the actual amount of evaporation. Can be easily maintained.

  According to invention of Claim 4, the temperature of the humidification water of a humidification dish is calculated | required from the absolute water | moisture content and specific volume of the air sent out from the air conditioned room, and the absolute water content and specific volume of the air returned to an air conditioned room, and this calculated | required temperature Since the replenished water heated to the humidifying dish is supplied to the humidifying dish, the humidifying dish is supplied with the replenishing water at a temperature corresponding to the actual evaporation amount, so that the humidifying water in the humidifying dish is inevitable. Therefore, it is possible to realize an environmental test apparatus that can easily maintain the humidity of the test chamber in a stable state even when a temperature distribution is generated.

  According to the invention of claim 5, the temperature of the humidified water in the humidifying dish is changed from the absolute moisture and specific volume of the air sent out from the air-conditioned room to the temperature of the humidified water from the absolute moisture and specific volume of the air returned to the air-conditioned room. Since the vapor pressure of the saturated air is obtained and obtained from this vapor pressure, the humidified water temperature in the humidifying pan can be accurately calculated as the temperature corresponding to the actual evaporation amount. Therefore, it is possible to realize an environmental test apparatus that can easily maintain the humidity of the test chamber in a stable state even if temperature distribution is inevitably generated.

  According to the invention of claim 6, the absolute moisture and specific volume of the air sent from the air conditioning room are based on the measurement values of the temperature sensor for measuring the temperature of the air sent from the air conditioning room and the humidity sensor for measuring the humidity. The absolute moisture and specific volume of the air returned to the air conditioning room are obtained based on the measured values of the temperature sensor for measuring the temperature of the air returned to the air conditioning room and the humidity sensor for measuring the humidity. As a result, the temperature of the humidified water in the humidifying pan can be accurately determined as the temperature corresponding to the actual amount of evaporation. It is possible to realize an environmental test apparatus that can be easily maintained in the above state.

  FIG. 1 is a diagram schematically showing a configuration of an environmental test apparatus to which a humidity adjustment method for an environmental test apparatus according to an embodiment of the present invention is applied. That is, the environmental test apparatus 10 according to the present invention accommodates test objects such as electronic parts and electric devices, and performs a test room 12 that performs environmental tests such as a constant temperature and humidity test (high temperature and high humidity) on the test objects. And a test tank 16 having an air-conditioning chamber 14 for air-conditioning the test chamber 12, and air adjusted to a predetermined temperature and humidity is provided above the partition wall 18 that partitions the test chamber 12 and the air-conditioning chamber 14. A delivery port 20 for sending the air from the air conditioning chamber 14 to the test chamber 12 is formed, and a return port 22 for returning the air passing through the test chamber 12 from the test chamber 12 to the air conditioning chamber 14 is formed below the partition wall 18. Thus, the test chamber 12 and the air conditioning chamber 14 are in a state in which ventilation is possible.

  Further, the environmental test apparatus 10 is disposed in the air conditioning chamber 14 and is disposed in the air conditioning chamber 14 and the room heater 24 that heats the air in the air conditioning chamber 14. The humidified water is evaporated and evaporated in the air conditioning chamber 14. An evaporative humidifying tray 26 for supplying the evaporative humidifier, a water heater 30 for heating the humidified water 28 supplied into the evaporative humidifying pan 26, and the air conditioning chamber 14, A dehumidifier (or cooler) 32 that adjusts humidity by dehumidifying the air in the air conditioning chamber 14 and the air conditioning chamber 14 are disposed in the test chamber 12 and the air conditioning chamber 14 via the outlet 20 and the return port 22. And a blower 34 for making the temperature and humidity of the test chamber 12 uniform by circulating air between them and a supply pipe 36 for supplying makeup water disposed outside the test tank 16 and heated to a predetermined temperature. The humidified water evaporated by supplying to the evaporative humidifying dish 26 via the And a makeup water supply 38 for feeding.

  Furthermore, the environmental test apparatus 10 is disposed in the vicinity of the delivery port 20 of the test chamber 12, and is a first for measuring the temperature of the feed air sent from the air conditioning chamber 14 to the test chamber 12 via the delivery port 20. A temperature sensor 40 and a first humidity sensor 42 which is disposed in the vicinity of the delivery port 20 of the test chamber 12 and measures the humidity of the feed air sent from the air conditioning chamber 14 to the test chamber 12 via the delivery port 20. A second temperature sensor 44 that is disposed in the vicinity of the return port 22 of the air conditioning chamber 14 and measures the temperature of the return air that is returned from the test chamber 12 to the air conditioning chamber 14 via the return port 22; 12, a second humidity sensor 46 for measuring the humidity of the return air returned from the test chamber 12 to the air conditioning chamber 14 via the return port 22, the test chamber 12 and the air conditioning chamber. 14, the room heater 24, water Heat 30, and a control unit 48 to maintain the test chamber 12 to a predetermined temperature and humidity by controlling the operation of the dehumidifier 32 and the makeup water supply 38.

  Here, the chamber heater 24 and the water heater 30 are constituted by an electric heater or the like, and the blower 34 is constituted by a motor with a fan or the like. The first temperature sensor 40 and the second temperature sensor 44 are composed of a temperature sensitive element such as a thermistor, and the first humidity sensor 42 and the second humidity sensor 46 sinter a moisture sensitive material paste on a ceramic substrate. It is comprised by the made moisture sensitive element etc. A water level sensor 50 composed of a temperature sensing element such as a thermistor is disposed at an upper position in the evaporative humidifying dish 26 so that the level (water level) of the humidified water 28 in the evaporative humidifying dish 26 is detected. It has become.

  The makeup water supply unit 38 is a heater for heating makeup water used as the humidified water 28, a temperature sensor for measuring the temperature of the makeup water, and a makeup water by stirring the makeup water heated by the heater. The replenishing water heating unit 52 includes a stirrer that equalizes the temperature of the water and a pump 54 that feeds the replenishing water to the evaporating / humidifying pan 26 via the replenishing pipe 36. The control unit 48 includes a CPU that executes arithmetic processing, a ROM that stores processing programs and data, and a microcomputer that includes a RAM that temporarily stores data.

  The controller 48 includes a room heater 24, a water heater 30, a dehumidifier 32, a blower 34, a first temperature sensor 40, a first humidity sensor 42, a second temperature sensor 44, and a second humidity sensor. 46, a water level sensor 50, and a makeup water heater 52 are connected to each other via an interface circuit (not shown), and a test condition setting unit 56 for setting the temperature and humidity of the test chamber 12 and the environmental test time, and Data and a calculation formula for obtaining the temperature Tw of the humidified water 28 of the evaporative humidifying dish 26 from the absolute moisture and specific volume of the air sent from the air conditioning chamber 14 and the absolute moisture and specific volume of the air returned to the air conditioning chamber 14 A storage unit 58 for storage is connected via an interface circuit (not shown).

  The control unit 48 includes a room temperature determination unit 60, a room temperature control unit 62, a room humidity determination unit 64, a room humidity control unit 66, a blower control unit 68, a water level determination unit 70, a humidified water temperature derivation unit 72, And each function implementation | achievement part of the makeup water temperature control part 74 is provided.

  Here, the room temperature determination unit 60 determines whether or not the temperature of the test chamber 12 has a set value, and the air sent from the air conditioning chamber 14 to the test chamber 12 through the outlet 20. This is determined by comparing the temperature measured by the first temperature sensor 40, which is the temperature of the test, with the temperature set by the test condition setting unit 56. When the first temperature sensor 40 is formed of a temperature sensitive element such as a thermistor, for example, the resistance value of the first temperature sensor 40 or a value related to the resistance value (such as a current value or a voltage value). ) And a resistance value set by the test condition setting unit 56 or a related value (such as a current value or a voltage value) with the resistance value is compared.

  The room temperature control unit 62 controls the electric power supplied to the chamber heater 24 by adjusting the value of the current flowing through the chamber heater 24 and the like, so that the temperature of the air sent to the test chamber 12 is changed to the test condition setting unit 56. It is controlled so as to be the value set in.

  The room humidity discriminating unit 64 discriminates whether or not the humidity of the test chamber 12 has a set value, and is based on the humidity of the air sent from the air conditioning chamber 14 to the test chamber 12 through the outlet 20. This is determined by comparing the humidity measured by a certain first humidity sensor 42 with the humidity set by the test condition setting unit 56. In the case where the first humidity sensor 42 is constituted by, for example, a moisture-sensitive element obtained by sintering a moisture-sensitive material paste on a ceramic substrate, the first humidity sensor 42 is similar to the first temperature sensor 40. The resistance value of the humidity sensor 42 or a related value (current value, voltage value, etc.) with the resistance value and the resistance value set by the test condition setting unit 56 or the related value (current value or voltage value). Etc.) will be compared.

  The room humidity controller 66 controls the power supplied to the water heater 30 by adjusting the current value flowing through the water heater 30 and controls the operation of the dehumidifier 32 to be sent to the test chamber 12. The air humidity is controlled so as to be the value set by the test condition setting unit 56. In the present embodiment, as the humidity of the test chamber 12 is set to a higher value, the power supplied to the water heater 30 is controlled to a higher value and the temperature of the humidified water 28 is increased, so that the evaporation amount is increased. As the humidity of the test chamber 12 is set to a lower value, the amount of evaporation is reduced by controlling the power supplied to the water heater 30 to a lower value and lowering the temperature of the humidified water 28. It has come to be. The electric power supplied to the water heater 30 is controlled according to the temperature of the humidified water 28 measured by a temperature sensor (not shown).

  The blower control unit 68 turns on the operation of the blower 34 when heating and humidification of the test chamber 12 is started, and turns off the operation of the blower 34 when a predetermined test time has elapsed.

  The water level discriminating unit 70 discriminates whether or not the humidified water 28 in the evaporative humidifying tray 26 is supplied to a predetermined level position. In the case where the water level sensor 50 is composed of a temperature sensitive element such as a thermistor, for example, the resistance value of the water level sensor 50 or a value (current value, voltage value, etc.) related to the resistance value is the water level sensor. It is determined whether or not the humidified water 28 is supplied up to a predetermined level position by utilizing the change between when 50 is present in the humidified water 28 and when it is exposed to the air.

  The humidified water temperature deriving unit 72 obtains the temperature Tw of the humidified water 28 of the evaporative humidifying dish 26 as a value (estimated value) corresponding to the actual evaporation amount from the water surface of the humidified water 28 in the evaporative humidifying dish 26, The following procedure is executed.

That is, the absolute moisture (kg / kg ′) of the air (controlled temperature / humidity air) sent to the test chamber 12 via the outlet 20 is Xd, and the air (control) is sent to the test chamber 12 via the outlet 20. The specific volume (temperature / humidity air) (m ³ / kg ′) is Vd, the absolute moisture (kg / kg ′) of the air (return air) returned to the air conditioning chamber 14 via the return port 22 is Xu, and the return port 22 is The specific volume (m ³ / kg ′) of the air (return air) returned to the air conditioning chamber 14 via Vu, the humidification amount (kg / m ² · h) in the evaporative humidifying dish 26 is Wo, and the evaporative humidifying dish 26 When the water surface area (m ² ) is A, the dehumidifying amount (kg / h) in the dehumidifier 32 is Wc, and the circulating air amount (m ³ / h) by the blower 34 is F, the following equation 1 is established. It is known to do.

  Here, the absolute moisture Xd of the air (control temperature / humidity air) sent to the test chamber 12 and the specific volume Vd of the air (control temperature / humidity air) sent to the test chamber 12 are determined by the first temperature sensor 40. It can be obtained by reading from a known air diagram (wet air diagram) using the measured temperature and the humidity (relative humidity) measured by the first humidity sensor 42. For this reason, in this embodiment, the temperature and humidity of the control temperature / humidity air and the absolute moisture Xd and specific volume Vd read from the air diagram are stored in advance in the storage unit 58 in a state corresponding to each other. Thus, the absolute moisture Xd and the specific volume Vd of the controlled temperature and humidity air are obtained by the humidified water temperature deriving unit 72 being read from the storage unit 58.

  The absolute moisture Xu of the air returned to the air conditioning chamber 14 (return air) and the specific volume Vu of the air returned to the air conditioning chamber 14 (return air) are the temperature measured by the second temperature sensor 44 and the second It can be obtained by reading from a known air diagram (wet air diagram) using the humidity (relative humidity) measured by the humidity sensor 46. For this reason, in the present embodiment, the temperature and humidity of the return air, the absolute moisture Xu read from the air diagram, and the specific volume Vu are stored in advance in the storage unit 58 in a state corresponding to each other. The absolute moisture Xu and the specific volume Vu of the return air are obtained by being read from the storage unit 58 by the humidified water temperature deriving unit 72.

  Further, the water surface area A of the evaporative humidifying dish 26, the dehumidifying amount Wc in the dehumidifier 32, and the circulating air volume F by the blower 34 are previously stored in the storage unit 58, respectively, obtained from the devices actually used. Therefore, the water surface area A of the evaporative humidifying dish 26, the dehumidifying amount Wc in the dehumidifier 32, and the circulating air amount F by the blower 34 are obtained by being read from the storage unit 58 by the humidifying water temperature deriving unit 72.

  Therefore, the absolute moisture Xd of the control temperature / humidity air read from the storage unit 58, the specific volume Vd of the control temperature / humidity air, the absolute moisture Xu of the return air, the specific volume Vu of the return air, and the water surface area of the evaporative humidification dish 26 A, the humidification amount Wo in the evaporative humidification dish 26 is calculated by the humidification water temperature deriving unit 72 from the above equation 1 using the dehumidification amount Wc in the dehumidifier 32 and the circulating air amount F by the blower 34.

  On the other hand, the vapor pressure (mmHg) of saturated air equal to the temperature Tw (° C.) of the humidified water 28 of the evaporative humidifying dish 26 is Ew, and the vapor pressure (return air) of the air returned to the air-conditioning chamber 14 through the return port 22 ( mmHg) is Eu, atmospheric pressure (atm) is B ', and the air velocity (m / sec) on the surface of the evaporative humidifying dish 26 of the air (return air) returned to the air conditioning chamber 14 through the return port 22 is S. It is known that the following equation (2) holds.

  Here, the vapor pressure Eu of the air returned to the air-conditioning chamber 14 (return air) is known using the temperature measured by the second temperature sensor 44 and the humidity (relative humidity) measured by the second humidity sensor 46. It can be obtained by reading from the air diagram (wet air diagram). Therefore, in this embodiment, the temperature and humidity of the return air and the vapor pressure Eu read from the air diagram are stored in advance in the storage unit 58 in a state corresponding to each other. The pressure Eu is obtained by being read from the storage unit 58 by the humidified water temperature deriving unit 72.

  Further, the atmospheric pressure B ′ is obtained by being read from the storage unit 58 by the humidified water temperature deriving unit 72 because 1 atm, which is a normal atmospheric pressure, is stored in the storage unit 58 in advance. Further, the air speed S of the air (return air) returned to the air-conditioning chamber 14 on the surface of the evaporative humidifying dish 26 is stored in advance in the storage unit 58 as the value obtained from the device actually used. It is obtained by reading from the storage unit 58 by the water temperature deriving unit 72.

  For this reason, the vapor pressure Eu of the return air read from the storage unit 58, the atmospheric pressure B ′, the wind speed S on the surface of the evaporative humidifying dish 26, and the evaporating / humidifying dish 26 determined by the equation 1 above. Using the humidification amount Wo, the humidification water temperature deriving unit 72 calculates the vapor pressure Ew of saturated air equal to the temperature Tw (° C.) of the humidification water 28 of the evaporative humidification dish 26 from the equation (2). Since the vapor pressure Ew corresponds to the temperature of the saturated air, the corresponding relationship is stored in the storage unit 58 in advance, so that the humidifying water temperature deriving unit 72 stores the vapor pressure Ew from the storage unit 58. Is read out, the temperature Tw of the humidified water 28 in the evaporative humidifying dish 26 is obtained.

  The makeup water temperature control unit 74 adjusts the temperature of the makeup water in the makeup water supply unit 38 by controlling the operation of the makeup water heating unit 52, and the temperature of the makeup water filled in the makeup water supply unit 38. Is set to a temperature equal to the temperature Tw of the humidified water 28 of the evaporative humidifying dish 26 determined by the humidified water temperature deriving unit 72.

  FIG. 2 is a flowchart for explaining a control operation for maintaining the test chamber 12 at a predetermined temperature and humidity when a constant temperature and humidity test is performed using the environmental test apparatus 10. Prior to performing the constant temperature and humidity test, the operator operates the test condition setting unit 56 to set the temperature, humidity, environmental test time, etc. of the test chamber 12, while the environmental test apparatus 10 is turned on. As a result, electric power is supplied to the chamber heater 24, the water heater 30, the dehumidifier 32, and the blower 34, and a predetermined operation is started.

  First, based on the detection signal output from the first temperature sensor 40, whether or not the temperature of the test chamber 12 is a set value is determined by the chamber temperature determination unit 60 (step S1). If the determination in step S1 is affirmative, whether or not the humidity of the test chamber 12 is a set value is determined by the room humidity determination unit 64 based on the detection signal output from the first humidity sensor 42. (Step S3).

  If the determination in step S3 is affirmative, it is determined whether or not the amount of humidified water 28 in the evaporative humidifying dish 26 is less than a predetermined level based on the detection signal from the water level sensor 50. (Step S5). If the determination in step S5 is affirmed, the temperature Tw of the humidified water 28 of the evaporative humidifying dish 26 at this time is obtained by the humidified water temperature deriving unit 72 (step S7).

  Next, the operation of the makeup water heating section 52 is controlled by the makeup water temperature control section 74, and the temperature of the makeup water in the makeup water supply section 38 is the same as the temperature Tw of the humidified water 28 obtained by the humidification water temperature deriving section 72. (Step S9). The makeup water controlled so as to be the same temperature as the temperature Tw of the humidified water 28 in step S9 is sent to the evaporative humidifying tray 26 by the pump 54 (step S11). Then, the water level discriminating unit 70 determines whether or not the humidified water 28 in the evaporative humidifying tray 26 is less than a predetermined level due to evaporation based on the detection signal from the water level sensor 50 (step S13).

  If the determination in step S13 is affirmed, the process returns to step S11, and makeup water is sent to the evaporative humidifying dish 26 by the pump 54. If the determination in step S13 is negative, the replenishment is completed and a series of operations is performed. Ends. If the determination in step S1 is negative, the power supplied to the room heater 24 is controlled by the room temperature control unit 62 so that the set value is obtained, and the temperature adjustment is executed (step S15). After that, the subsequent operations are repeatedly executed. If the determination in step S3 is negative, the power supplied to the water heater 30 is adjusted by the room humidity controller 66 so that the set value is obtained, and the operation of the dehumidifier 32 is controlled to control the humidity. Adjustment is performed (step S17), and the process returns to step S3 and the subsequent operations are repeated. If the determination in step S5 is negative, the process returns to step S1 and the subsequent operations are repeated.

  As described above, according to the humidity adjustment method of the environmental test apparatus 10 and the environmental test apparatus 10 according to the present invention, the absolute moisture and specific volume of the air sent from the air conditioning chamber 14 to the test chamber 12, and the test chamber 12 The temperature Tw of the humidified water 28 of the evaporative humidifying dish 26 is obtained from the absolute moisture and the specific volume of the air returned from the air to the air conditioning chamber 14, and the replenishment of the makeup water supply unit 38 heated to the same temperature as the obtained temperature Tw is performed. Since the water is supplied to the evaporating / humidifying dish 26, the evaporating / humidifying dish 26 is supplied with makeup water having a temperature corresponding to the actual evaporation amount from the water surface. Even if an inevitable temperature distribution occurs in the humidified water 28, the humidity of the test chamber 12 can be easily maintained in a stable state.

  In addition, although the humidity adjustment method of the environmental test apparatus 10 and the environmental test apparatus 10 which concern on this invention are comprised like the said embodiment, it is not restricted to the thing of this embodiment. For example, various modifications as described below can be adopted as necessary.

  (1) In the embodiment described above, the absolute moisture Xd of the control temperature / humidity air, the specific volume Vd of the control temperature / humidity air, which is a numerical value read from the air diagram in the storage unit 58, the absolute moisture Xu of the return air, and the ratio of the return air Although the volume Vu and the return air vapor pressure Eu are stored, the present invention is not limited to this. For example, these numerical values can be obtained from a predetermined calculation formula using the temperature and humidity of the controlled temperature and humidity air and the temperature and humidity of the return air, or the temperature and humidity of the return air. In this case, the humidified water temperature deriving unit 72 calculates a predetermined numerical value using a calculation formula stored in the storage unit 58.

  (2) In the above embodiment, the storage unit 58 stores the vapor pressure Eu and the water temperature Tw in association with each other. However, the present invention is not limited to this. For example, the temperature Tw can be obtained from a predetermined calculation formula using the vapor pressure Eu. In this case, the humidified water temperature deriving unit 72 calculates the temperature Tw using a calculation formula stored in the storage unit 58.

  (3) In the above embodiment, the vapor pressure Eu of the saturated air is obtained, and the temperature Tw of the humidified water 28 of the evaporative humidifying dish 26 is obtained from the vapor pressure Eu, but this is not restrictive. For example, a predetermined constant related to the temperature Tw of the humidifying water 28 of the evaporative humidifying dish 26 other than the vapor pressure Eu of the saturated air can be obtained, and the temperature Tw of the humidifying water 28 can be obtained from the obtained constant.

  (4) In the above embodiment, the water level sensor 50 determines whether or not the humidified water 28 in the evaporative humidifying dish 26 is less than a predetermined level, and the amount of humidified water 28 is less than the predetermined level. In this case, makeup water is supplied, but the present invention is not limited to this. For example, without using the water level sensor 50, it is also possible to supply a predetermined amount of makeup water to the evaporative humidifying dish 26 every time a predetermined time elapses.

  (5) In the above embodiment, the absolute moisture Xd of the controlled temperature / humidity air and the specific volume Vd of the controlled temperature / humidity air are determined using the temperature and humidity detected by the first temperature sensor 40 and the first humidity sensor 42. However, it is not limited to this. For example, it is also possible to obtain using the set value set by the test condition setting unit 56.

  (6) In the above embodiment, the air in the test chamber 12 and the air conditioning chamber 14 is circulated by the blower 34 provided separately from the chamber heater 24. However, the present invention is not limited to this. For example, if the room heater 24 has a structure that generates warm air, the separate blower 34 is not necessarily required. In addition, when the space of the test chamber 12 is narrow, the air in the test chamber 12 and the air conditioning chamber 14 can be circulated by natural convection without using the blower 34.

  (7) In the above embodiment, the test chamber 12 and the air-conditioning chamber 14 are filled with air (gas). However, the present invention is not limited to this. For example, the test chamber 12 and the air conditioning chamber 14 may be filled with an inert gas (gas) such as nitrogen.

  (8) In the above embodiment, the environmental test apparatus 10 adjusts the temperature and humidity of the test chamber 12, but is not limited thereto. For example, it is possible to use the environmental test apparatus 10 as an apparatus that adjusts only humidity. In this case, the test condition setting unit 56 and the like may have a function of switching between a function of adjusting temperature and humidity and a function of adjusting only humidity.

It is a figure which shows roughly the structure of the environmental test apparatus with which the humidity adjustment method of the environmental test apparatus which concerns on one Embodiment of this invention is applied. It is a flowchart for demonstrating the control operation | movement of the temperature and humidity of an environmental test apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Environmental test apparatus 12 Test room 14 Air-conditioning room 16 Test tank 24 Room heater (heater)
26 Evaporation heating dish (humidification dish)
28 Humidified water 32 Dehumidifier 40 First temperature sensor (temperature sensor)
42 First humidity sensor (humidity sensor)
44 Second temperature sensor (temperature sensor)
46 Second humidity sensor (humidity sensor)
72 Humidification water temperature deriving section (temperature deriving section)

Claims (6)

  A heater that heats the air in the air-conditioning chamber in such a manner that air adjusted to a predetermined temperature and humidity is sent from the air-conditioning chamber to the test chamber, and the air passing through the test chamber is returned to the air-conditioning chamber. A humidity adjustment method for an environmental test apparatus including a humidifying dish for humidifying the air in the air-conditioning room by evaporating the humidified water and a dehumidifier for dehumidifying the air in the air-conditioning room, and sent from the air-conditioning room The absolute moisture and specific volume of the air are obtained from the temperature and humidity of the air, and the absolute moisture and specific volume of the air are obtained from the temperature and humidity of the air returned to the air conditioning room. The temperature of the humidifying water in the humidifying dish is obtained from the absolute moisture and the specific volume and the absolute moisture and the specific volume of the air returned to the air conditioning chamber, and the makeup water heated to the obtained temperature is supplied to the humidifying dish. Toss Humidity control method of the environment testing apparatus.   The temperature of the humidified water in the humidifying dish is a vapor of saturated air equal to the temperature of the humidified water from the absolute moisture and specific volume of the air sent out from the air conditioning chamber and the absolute moisture and specific volume of the air returned to the air conditioning chamber. 2. The humidity adjusting method for an environmental test apparatus according to claim 1, wherein the pressure is obtained from the vapor pressure.   The absolute moisture and the specific volume of the air sent from the air conditioning room are obtained based on the measured values of the temperature sensor for measuring the temperature of the air sent from the air conditioning room and the humidity sensor for measuring the humidity. The absolute moisture and specific volume of the air returned to the chamber are obtained based on the measured values of the temperature sensor that measures the temperature of the air that is returned to the air-conditioned room and the humidity sensor that measures the humidity, and the humidifying water of the humidifying dish 3. The humidity adjustment method for an environmental test apparatus according to claim 1, wherein the temperature is obtained from the obtained absolute moisture and specific volume.   An environmental test apparatus in which air adjusted to a predetermined temperature and humidity is sent from an air-conditioning room to a test room, and air passing through the test room is returned to the air-conditioning room. A heater for heating the air in the air-conditioned room, a humidifying dish provided in the air-conditioned room and supplied with humidified water from the outside, and disposed in the air-conditioned room to dehumidify the air in the air-conditioned room Obtain the absolute moisture and specific volume of the air from the dehumidifier and the temperature and humidity of the air sent from the air conditioning room, and calculate the absolute moisture and specific volume of the air from the temperature and humidity of the air returned to the air conditioning room. A temperature deriving unit for obtaining the temperature of the humidified water in the humidifying dish from the absolute moisture and specific volume of the air sent from the air conditioning chamber and the absolute moisture and specific volume of the air returned to the air conditioning chamber; Heat to the temperature found in Environmental test apparatus characterized by the makeup water and a makeup water supply unit for supplying the humidifying dish.   The temperature deriving unit obtains the vapor pressure of saturated air equal to the temperature of the humidified water from the absolute moisture and specific volume of the air sent from the air conditioning room and the absolute moisture and specific volume of the air returned to the air conditioning room, The environmental test apparatus according to claim 4, wherein the temperature of the humidified water in the humidifying dish is obtained from the vapor pressure.   The temperature deriving unit obtains the absolute moisture and the specific volume of the air sent from the air conditioning room based on the measured values of the temperature sensor that measures the temperature of the air sent from the air conditioning room and the humidity sensor that measures the humidity. In addition, the absolute moisture and specific volume of the air returned to the air-conditioning room are obtained based on the measured values of the temperature sensor that measures the temperature of the air that is returned to the air-conditioning room and the humidity sensor that measures the humidity. The environmental test apparatus according to claim 4 or 5, wherein the temperature of the humidified water in the humidifying dish is obtained from the specific volume.

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