JP2006085667A - Pressure regulating valve, functional liquid supply mechanism equipped with the same, drop delivery device, method for manufacturing optoelectronic device, optoelectronic device and electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pressure regulating valve for suppressing the generation of air bubbles, a functional liquid supply mechanism equipped with this, a liquid drop delivery device, a method for manufacturing optoelectronic device, optoelectronic device and electronic equipment. <P>SOLUTION: This pressure regulating valve 7 supplies functional liquid introduced from a functional liquid tank 91 to a primary chamber 122 through a secondary chamber 123 to a functional drop delivery head 11 with a power of gravity, and a valve body 126 is opened/closed so that the pressure of the secondary chamber 123 can be adjusted by using an atmospheric pressure as an adjustment reference pressure by a circular diaphragm 125 of the secondary chamber 123, and an inflow channel 148 communicating an inlet 147 connected to the functional liquid tank with a primary chamber side opening 149 opened at an upper end 153 of the primary chamber 122 is formed at a down-grade, and an outflow channel 180 communicating an outlet 178 communicating secondary chamber side opening 179 opened at a lower end 175 of the secondary chamber 123 with the functional drop delivery head 11 is formed at the down-grade. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a pressure adjustment valve that adjusts the pressure of a functional liquid supplied to a functional liquid droplet ejection head using atmospheric pressure as a reference adjustment pressure, a functional liquid supply mechanism including the pressure adjustment valve, and a liquid droplet ejection apparatus and an electro-optical device The present invention relates to a method, an electro-optical device, and an electronic apparatus.

2. Description of the Related Art Conventionally, in an ink supply mechanism of an ink jet recording apparatus, a pressure adjusting valve that adjusts a pressure difference between a tank with a built-in pressure pump that sends ink and an ink jet head is connected to an ink jet head from a primary chamber connected to the tank side. There is known one that opens and closes a valve body provided in an ink flow path leading to the next chamber by a diaphragm. This diaphragm automatically opens and closes due to the pressure difference between the internal pressure of the primary chamber and the internal pressure of the secondary chamber as the ink is consumed, and supplies ink in small amounts and prevents ink leakage from the inkjet head (for example, , See Patent Document 1).
The pressure regulating valve is provided with an introduction portion connected to the primary chamber from the functional liquid tank at the bottom portion and a supply portion connecting the secondary chamber and the inkjet head at the uppermost portion thereof, so that the initial ink can be obtained. At the time of filling, the structure can be filled without leaving bubbles.
JP 2003-211701 A

  In the conventional pressure regulating valve, the flow rate of ink flowing through the flow path in the valve is extremely slow during normal ink ejection. For this reason, when the supply unit is installed at the uppermost part of the secondary chamber, there is a problem that a so-called ink reservoir in which old ink is accumulated below the secondary chamber.

  The present invention relates to a pressure adjusting valve that suppresses generation of bubbles and does not cause functional liquid accumulation, a functional liquid supply mechanism including the pressure adjusting valve, a droplet discharge device, a method of manufacturing an electro-optical device, an electro-optical device, and an electronic device The issue is to provide equipment.

  The pressure regulating valve of the present invention gravity-feeds the functional liquid introduced from the functional liquid tank into the primary chamber in the valve housing to the functional liquid droplet ejection head via the secondary chamber in the valve housing, and also faces the atmosphere. Then, a circular diaphragm constituting one surface of the secondary chamber is used to open and close the valve body provided in the communication flow path that communicates the primary chamber and the secondary chamber using atmospheric pressure as the adjustment reference pressure. In the pressure regulating valve for regulating the pressure in the next chamber, an inflow passage formed in the valve housing and communicating with the inlet connected to the functional liquid tank and the opening on the primary chamber opened at the upper end of the primary chamber has a downward slope. In addition to forming a flow path, a flow path is formed in a downward gradient, which is formed in the valve housing and communicates with the secondary chamber side opening opened at the lower end of the secondary chamber and the outlet connected to the functional liquid droplet ejection head. It is characterized by that.

  According to this configuration, since the functional liquid is supplied from the inflow channel connected to the upper end of the primary chamber and discharged from the outflow channel connected to the lower end of the secondary chamber, smooth functional liquid that does not resist gravity Supply becomes possible. Thereby, a functional liquid pool does not occur in the flow path in the valve. In addition, since these inflow and outflow channels are formed in a downward slope, the flow velocity in the valve flow passage is kept low, and the internal air and the filling functional liquid are agitated particularly during the initial filling when the flow velocity is high. This prevents the generation of bubbles.

  In this case, it is preferable that the primary chamber and the secondary chamber are disposed adjacent to each other and are formed in a substantially cylindrical shape concentric with the diaphragm.

  According to this configuration, the functional liquid can be easily collected at the lower end in the primary chamber and the secondary chamber, so that it is possible to further prevent the functional liquid accumulation.

  In this case, it is preferable that the opening on the primary chamber side opens at a position slightly deviated from the top of the primary chamber in the circumferential direction.

  According to this configuration, since the functional liquid flows down along the inner wall of the valve and is initially filled in the primary chamber, the internal air and the filled functional liquid are agitated, and bubbles are not generated in the liquid.

  In this case, it is preferable that the secondary chamber side opening is opened in a valley portion including a valley bottom of the secondary chamber.

  According to this configuration, the functional liquid guided to the valley bottom according to gravity can be naturally sent from the secondary chamber side opening to the outflow channel. As a result, the functional liquid that has entered first can be fed to the functional liquid droplet ejection head side, and it can be physically avoided that the functional liquid remains in the secondary chamber.

  In this case, it is preferable that the other surface of the secondary chamber facing the diaphragm is formed in a taper shape following the displacement form of the diaphragm.

  According to this configuration, since the functional liquid supplied from the communication channel flows along the wall surface of the secondary chamber during the initial filling, the internal air and the filled functional liquid can be agitated in the secondary chamber. Absent. Thereby, generation | occurrence | production of a bubble can be prevented. In addition, since the other surface of the secondary chamber is formed in substantially the same form as the diaphragm displacement mode, the entire secondary chamber can be formed thin, and the volume of the secondary chamber can be reduced. .

  In this case, it is preferable that the secondary chamber side opening is formed in a portion extending from the valley bottom to the tapered surface, and the outflow channel extends in a direction substantially orthogonal to the tapered surface.

  According to this configuration, the diameter of the secondary chamber side opening can be increased, and the change in flow rate can be suppressed. Thereby, it is possible to prevent air bubbles from being swept into the outflow channel. Further, the gravity-supplied functional liquid is sent to the functional liquid droplet ejection head side by the gentle gradient outflow channel, so that the flow velocity does not become too fast. Furthermore, since the inflow channel is formed on the side opposite to the diaphragm (primary chamber side), the inlet and the outlet can be arranged on the same side of the pressure regulating valve. Thereby, it can be easily attached and detached, and can be made space-saving.

  In this case, it is preferable that a secondary chamber side air vent hole formed in the valve housing and opened at the top of the secondary chamber is further provided.

  In this case, it is preferable that a primary chamber side air vent hole formed in the valve housing and opened at the top of the primary chamber is further provided.

  According to these configurations, even if bubbles are generated in the secondary chamber, the bubbles are stored in the upper portion of the secondary chamber, so that the secondary chamber-side air vent hole provided in the top portion efficiently eliminates the bubbles. Can do. Similarly, even if bubbles are generated in the primary chamber, they can be efficiently eliminated by the primary chamber side air vent hole provided at the top.

  The functional liquid supply mechanism of the present invention connects the functional liquid tank that stores the functional liquid, the pressure regulating valve that is connected to the functional liquid appropriate discharge head of the functional liquid flow path, and the upstream end portion to the functional liquid tank. And a functional liquid supply channel for connecting the downstream end to the pressure regulating valve.

  According to this configuration, the water head pressure generated from the water head difference between the functional liquid tank and the functional liquid droplet ejection head can be appropriately adjusted before the functional liquid droplet ejection head. For this reason, the functional liquid does not leak from the functional liquid droplet ejection head.

  The liquid droplet ejection apparatus of the present invention includes the above-described functional liquid supply mechanism, a functional liquid droplet ejection head that ejects functional liquid droplets onto the workpiece, and the X axis direction and the Y axis direction with respect to the functional liquid droplet ejection head. And an X / Y moving mechanism for relative movement.

  According to this configuration, since the functional liquid in which bubbles are not generated is supplied to the functional liquid droplet ejection head, it is possible to prevent defective ejection of the liquid droplet ejection apparatus and improve the reliability of the product.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film-forming portion made of functional droplets is formed on a workpiece using the above-described droplet discharge device.

  In addition, an electro-optical device according to the present invention is characterized in that the above-described droplet discharge device is used, and a film forming portion using functional droplets is formed on a workpiece.

  According to these configurations, since it is manufactured using a droplet discharge device in which functional liquid accumulation is unlikely to occur and bubbles are not easily generated, a highly reliable electro-optical device can be manufactured. As the electro-optical device (flat panel display), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  An electronic apparatus according to an aspect of the invention includes the electro-optical device manufactured by the method for manufacturing the electro-optical device or the electro-optical device described above.

  In this case, the electronic apparatus corresponds to various electric products in addition to a mobile phone and a personal computer equipped with a so-called flat panel display.

  As described above, according to the pressure regulating valve of the present invention, the functional liquid supply mechanism including the pressure regulating valve, the droplet discharge device, the electro-optic device manufacturing method, the electro-optic device, and the electronic apparatus, Since the functional liquid can be stably supplied while preventing the functional liquid accumulation and bubbles from occurring, the functional liquid droplets can be discharged with high accuracy and the productivity can be improved.

  In addition, since the electro-optical device manufacturing method, the electro-optical device, and the electronic apparatus according to the present invention are manufactured using the above-described droplet discharge device, the reliability of work is improved and the devices are efficiently manufactured. Is possible.

  Hereinafter, with reference to the accompanying drawings, a liquid droplet ejection apparatus to which a pressure regulating valve of the present invention and a functional liquid supply mechanism 6 including the pressure regulating valve are applied will be described. The droplet discharge device 1 of this embodiment is incorporated in a production line for an organic EL device or a liquid crystal display device which is a kind of so-called flat panel display. In the present embodiment, a droplet discharge device for forming an organic EL device will be mainly described.

  As shown in FIG. 1, a droplet discharge device 1 includes a machine base 2, a drawing device 3 having twelve functional liquid droplet discharge heads 11 arranged in a cross shape at the upper center of the machine base 2, A chamber device (not shown) mounted on the machine base 2, a maintenance device 5 comprising various devices installed on the machine base 2 in parallel with the drawing device 3 and used for maintenance of the functional liquid droplet ejection head 11, A functional liquid supply mechanism 6 that adjusts the pressure of the functional liquid with a pressure adjusting valve and supplies the functional liquid to the drawing apparatus 3 and a control device 12 (control means) that comprehensively controls each of the above constituent devices are provided.

  The drawing device 3, the maintenance device 5, and the functional liquid supply mechanism 6 are accommodated in a chamber device, and a functional liquid droplet ejection head is applied to a work W carried in from the outside in an atmosphere of dry air or inert gas. 11 ejects functional droplets, that is, performs drawing. In addition, when the operation of the droplet discharge device 1 is started, the maintenance device 5 is made to recover the function of the functional droplet discharge head 11.

  The drawing apparatus 3 has an XY movement mechanism 13 installed on the machine base 2. The XY movement mechanism 13 moves the workpiece W relative to the functional liquid droplet ejection head 11 in the X-axis direction and the Y-axis direction, and mounts the workpiece W and moves it in the X-axis direction. An X-axis table 51 and a Y-axis table 52 that is installed so as to cross over the X-axis table 51 and mount each functional liquid droplet ejection head 11 and move it in the Y-axis direction are provided. The drawing apparatus 3 includes various types of head recognition cameras (not shown) for recognizing the positions of the functional liquid droplet ejection heads 11 and a pair of work recognition cameras 53 and 53 for recognizing the position of the work W. A device is provided.

  The X-axis table 51 is directly installed on the machine base 2 so as to be parallel to the maintenance device 5 extending in the X-axis direction, and the suction table 54 and the suction table 54 for sucking the workpiece W are moved around the Z-axis. A set table 56 including a θ table 55 that is rotatably supported on the X axis, an X axis slider 57 that supports the set table 56 so as to be slidable in the X axis direction, and an X axis motor (not shown) that drives the X axis slider 57. have. The work W is sucked and placed on the suction table 54 and is reciprocated in the X-axis direction which is the main scanning direction via the X-axis slider 57.

  The Y-axis table 52 slides on the pair of left and right columns 58 erected on the machine base 2 across the X-axis table 51, the Y-axis frame 59 spanned between both columns 58 and 58, and the Y-axis frame 59. A Y-axis slider 61 that is freely supported, a Y-axis motor (not shown) that drives the Y-axis slider 61, and a main carriage 62 that is supported by the Y-axis slider 61 and on which the functional liquid droplet ejection head 11 is mounted. ing. The functional liquid droplet ejection head 11 is reciprocated in the Y axis direction, which is sub-scanning, via the Y axis slider 61 together with the main carriage 62.

  When drawing on the workpiece W, each functional liquid droplet ejection head 11 faces the workpiece W with a predetermined workpiece gap, and main scanning (reciprocating movement of the workpiece W) by the X-axis table 51 is performed. The functional liquid droplet discharge heads 11 are driven to discharge in synchronism with each other. Further, sub-scanning (movement of the functional liquid droplet ejection head 11) is appropriately performed by the Y-axis table 52. With this series of operations, desired drawing is performed in the drawing area of the workpiece W.

  As shown in FIG. 2, the main carriage 62 includes a slide base 63 fixed to the Y-axis slider 61, a suspended frame 64 suspended from the slide base 63, and a θ axis incorporated in the lower portion of the suspended frame 64. A rotation mechanism 65 and a carriage body 66 provided at the lower end of the θ-axis rotation mechanism 65 are provided. Thereby, the hanging frame 64 supports the carriage body 66 so as to be rotatable around the θ axis via the θ axis rotation mechanism 65.

  The carriage body 66 is a rectangular frame-shaped sub-carriage 67, a head plate 68, a valve plate 69 and a tank plate 70 mounted on the sub-carriage 67, and the sub-carriage 67 and mounted on the θ-axis rotation mechanism 65. The mounting plate 71 includes a plurality of connecting columns 72 that connect the sub-carriage 67 and the mounting plate 71. The subcarriage 67 is mounted with a head plate 68, a valve plate 69, and a tank plate 70 in this order in the longitudinal direction. On the head plate 68, 12 functional liquid droplet ejection heads 11 are mounted so that their lower portions protrude downward. The twelve functional liquid droplet ejection heads 11 are all arranged in a staircase pattern in plan view so that all nozzle rows 33 form one drawing line (see FIG. 1). Similarly, twelve pressure regulating valves 7 are arranged on the valve plate 69 and twelve functional liquid tanks 91 are arranged on the tank plate so as to be stepped in plan view and in series with the functional liquid droplet ejection head 11. ing.

  The functional liquid droplet ejection head 11 has a large number (for example, 180) of nozzles 32 for ejecting functional liquid droplets on the nozzle surface 31, and the large number of nozzles 32 form two nozzle arrays 33. (See FIG. 1). Specifically, the functional liquid droplet ejection head 11 includes a pair of head flow paths (not shown) corresponding to the nozzle rows 33 and cavities (piezo piezoelectric elements) provided facing the head flow paths. (Not shown) and a pair of inlet ports 34 (see FIG. 3) connected to the flow path in the head. In the initial filling step by nozzle suction, the functional liquid is introduced from each introduction port portion 34 of the functional liquid droplet ejection head 11 to fill the flow path in the head. When the functional droplet discharge head 11 is driven to discharge, the cavity exerts a pumping action and discharges the functional liquid in the flow path in the head from the nozzle 32 (discharge of the functional droplet). As a result, the functional liquid is consumed in the functional liquid droplet ejection head 11, and a new functional liquid is supplied from the functional liquid supply mechanism 6 to the flow path in the head accordingly.

  Next, the maintenance device 5 will be described with reference to FIG. The maintenance device 5 includes a storage unit 21 that seals the nozzle surface 31 of the functional liquid droplet ejection head 11 to prevent drying of the nozzle 32 and the nozzles of the functional liquid droplet ejection head 11 when the liquid droplet ejection device 1 is not in operation. A suction unit 22 that sucks and removes the functional liquid thickened from 32 and a wiping unit 23 that wipes off dirt adhering to the nozzle surface 31 of the functional liquid droplet ejection head 11 are provided. Each of these units is mounted on a moving table 24 placed on the machine base 2 so as to extend in the X-axis direction, and is configured to be movable in the X-axis direction by the moving table 24.

  The storage unit 21 has a sealing cap 25 that also functions as a flushing box that receives the discarded discharge of the functional liquid droplet discharge head 11, and the sealing cap 25 is moved by a moving table 24 via an elevating mechanism 26 that raises and lowers the sealing cap 25. Is attached. When the liquid droplet ejection apparatus 1 is not in operation, the functional liquid droplet ejection head 11 has moved to the maintenance position 42 on the moving table 24, and the nozzle of the functional liquid droplet ejection head 11 is raised by raising the sealing cap 25. Adhere to surface 31. That is, all the nozzles 32 of the functional liquid droplet ejection head 11 are sealed, and the functional liquid droplets at each nozzle 32 are prevented from being dried. Further, when drawing is suspended, the sealing cap 25 is slightly lowered from the functional liquid droplet ejection head 11 to receive flushing (discarding ejection) of the functional liquid droplet ejection head 11. This suppresses thickening of the functional liquid and prevents so-called nozzle clogging.

  The suction unit 22 is connected to a suction cap 81 that is in direct contact with the nozzle surface 31 of the functional liquid droplet ejection head 11, a waste liquid tank that collects the waste liquid sucked and removed via the suction cap 81, and an upstream end connected to the suction cap 81. A waste liquid passage (not shown) having a downstream end connected to a waste liquid tank (not shown), a suction pump (not shown) provided in the middle of the waste liquid passage, and a fluid detection sensor for detecting a liquid flowing in the waste liquid passage (Not shown) and a cap raising / lowering mechanism 86 for raising and lowering the suction cap 81 (see FIG. 1). The suction cap 81 is attached to the moving table 24 via a cap lifting mechanism 86. When the operation is started or when the functional liquid is initially filled, the functional liquid droplet ejection head 11 faces the maintenance position 42, and the above-described cap lifting mechanism 86 raises the suction cap 81 to bring it into close contact with the functional liquid droplet ejection head 11, and at the same time, the suction pump The functional liquid that has been driven to increase the viscosity and the functional liquid for filling is sucked from the nozzle 32. The fluid detection sensor functions as a trigger to stop driving the suction pump.

  As shown in FIG. 1, a wiping sheet 41 is provided in the wiping unit 23 so that the wiping sheet 41 can be fed out and wound up, and the wiping unit 23 is moved in the X-axis direction by feeding the fed wiping sheet 41 and moving table 24. The nozzle surface 31 of the functional liquid droplet ejection head 11 is wiped off while being moved. For this reason, the functional liquid adhering to the nozzle surface 31 of the functional liquid droplet ejection head 11 is removed by the suction operation or the like, and the flight bend or the like during functional liquid droplet ejection is prevented. In addition to the above units, the maintenance device 5 is preferably equipped with a discharge inspection unit (not shown) for inspecting the flight state of the functional liquid droplets ejected from the functional liquid droplet ejection head 11.

  Next, the functional liquid supply mechanism 6 of this embodiment will be described with reference to FIG. The functional liquid supply mechanism 6 has twelve functional liquid tanks 91, twelve pressure adjustment valves 7, these functional liquid tanks 91, and respective pressure adjustments corresponding to the respective functional liquid droplet ejection heads 11 on a one-to-one basis. 12 tank-side tubes 92 for connecting the valves 7 and 12 head-side tubes 93 for connecting the respective pressure adjusting valves 7 and the respective functional liquid droplet ejection heads 11 (in the figure, the pressure adjustment is performed). Only one valve 7 and one functional fluid tank 91 are shown). In this case, the functional liquid tank 91 is disposed at the highest position and the functional liquid droplet ejection head 11 is disposed at the lowest position, and the functional liquid in the functional liquid tank 91 includes the tank side tube 92, the pressure adjusting valve 7, the head. It flows in the order of the side tube 93 and is supplied to the functional liquid droplet ejection head 11. That is, the functional liquid in the functional liquid tank 91 is reduced to a predetermined pressure by the pressure adjusting valve 7 and supplied to the functional liquid droplet ejection head 11.

  As shown in FIG. 3, the functional liquid tank 91 is of a cartridge type, and includes a functional liquid pack 94 that stores therein a functional liquid that has been degassed in advance, and a substantially square cartridge case 95 that houses the functional liquid pack 94. And have. The functional liquid pack 94 is provided with a cylindrical resin supply port 97 in a bag-like one in which two rectangular film sheets 96 are overlapped and heat-sealed. The functional liquid pack 94 can store the functional liquid in an airtight state, deforms as the functional liquid decreases, and can be used up to the end. The axis of the supply port 97 is an opening 98 communicating with the inside of the functional liquid pack, and the end of the opening 98 is closed by an elastic body 99 having a functional liquid corrosion resistance, gas impermeability and waterproofness. Has been. This prevents ambient air and moisture from entering the functional liquid pack 94 to deteriorate the functional liquid. In addition, it is preferable that the film sheet 96 also has a laminated structure with a plurality of materials so as to have functional liquid corrosion resistance, gas impermeability and waterproofness.

  The cartridge case 95 is formed in a flat box shape with resin or the like, and a locking groove (not shown) for locking the supply port 97 of the functional liquid pack 94 is formed in the opening 98 at the front end. The accommodated functional liquid pack 94 is locked to the locking groove with the supply port 97 protruding outward. The supply port 97 of the functional liquid pack 94 and the tank side tube 92 are connected via a dedicated connector 101.

  As shown in FIG. 4, the connector 101 includes a tube connector 102 that is directly connected to the tank side tube 92, a tank connector 103 that is connected to the functional liquid tank 91, and a connector stand 104 that supports them. , And a flow path for supplying the functional liquid from the functional liquid pack 94 to the tank side tube 92 is formed in both the connection portions 102 and 103. The tube connecting part 102 is constituted by a threaded joint, and the tank connecting part 103 is constituted by a connecting needle 108 having a flow path formed in the axial center.

  The connecting needle 108 has a sharp tip, and a plurality of minute inflow holes (not shown) connected to the internal flow path (not shown) are formed at the tip. That is, the connecting needle 108 is connected to the functional liquid pack 94 by being inserted through the rubber plug 99 of the supply port 97 described above, and the functional liquid flows out from the functional liquid pack 94 to form a flow path.

  Similar to the functional liquid pack 94 described above, the tank side tube 92 and the head side tube 93 are configured to have a laminated structure considering corrosion resistance, gas impermeability, waterproofness, etc. with respect to the functional liquid. For example, when an aqueous functional liquid is used, a tube having a five-layer structure in which a polyethylene layer, an adhesive layer, an ethylene vinyl alcohol copolymer layer, an adhesive layer, and a polyethylene layer are sequentially laminated from the inside, When a solvent-based functional liquid is used, a tube having a three-layer structure in which an ethylene vinyl alcohol copolymer layer, an adhesive layer, and a polyethylene layer are sequentially laminated from the inside is used. Polyethylene is a waterproof material, and ethylene vinyl alcohol copolymer is a gas-impermeable material.

  Next, the pressure regulating valve 7 of this embodiment will be described in detail with reference to FIG. In the valve housing 121, the pressure regulating valve 7 communicates the primary chamber 122 connected to the functional liquid tank 91, the secondary chamber 123 connected to the functional liquid droplet ejection head 11, the primary chamber 122 and the secondary chamber 123. A communication channel 124 is formed, and a diaphragm 125 is provided on one surface of the secondary chamber 123 so as to face the outside, and a valve body 126 that is opened and closed by the diaphragm 125 is provided in the communication channel 124. It has been. The functional liquid introduced from the functional liquid tank 91 into the primary chamber 122 is supplied to the functional liquid droplet ejection head 11 through the secondary chamber 123. At this time, the diaphragm 125 uses the atmospheric pressure as an adjustment reference pressure. The pressure of the secondary chamber 123 is adjusted by opening and closing the valve body 126 provided in the communication flow path 124.

  Since the pressure regulating valve 7 is used in a vertical position as shown in FIG. 6A, the front side of the paper is “up”, the front side is “down”, and the left side is “front” according to FIG. The description will be made with the right side as “rear”. These drawings show the pressure adjusting valve 7 with an attachment plate 127 for attaching it to a frame or the like, an inflow connector 128 (union joint) for connecting the tank side tube 92, and the head side tube 93. The outflow connector 129 (union joint) for connecting is shown.

  As shown in FIG. 7A, the valve housing 121 includes a primary chamber housing 141 in which a primary chamber 122 is formed, a secondary chamber housing 161 in which a secondary chamber 123 is formed, and a secondary chamber. It is comprised by three members with the ring plate 131 which fixes the diaphragm 125 to the housing 161, All are formed with corrosion-resistant materials, such as stainless steel. The primary chamber housing 141, the secondary chamber housing 161, and the ring plate 131 are positioned with respect to the secondary chamber housing 161 by overlapping the ring plate 131 and the primary chamber housing 141 from the front and the back with a plurality of stepped parallel pins, etc. After that, they are assembled so as to be screwed, and all have an appearance that is concentric with an axis passing through the center of the circular diaphragm 125. The primary chamber housing 141 and the secondary chamber housing 161 are airtightly butt-joined with each other via an O-ring 133, and the secondary chamber housing 161 and the ring plate 131 sandwich the edge of the diaphragm 125 and the packing 134. They are butt-joined in an airtight manner. The primary chamber housing 141 and the secondary chamber housing 161 can be formed integrally.

  The primary chamber housing 141 is formed with a truncated cone (substantially cylindrical) primary chamber 122 concentric with the diaphragm 125, and the inner peripheral wall 142 of the primary chamber 122 slightly expands rearward. Tapered surface. The upper boss 113 formed at the upper back of the housing of the primary chamber 122 is formed with an inflow port 143 and a primary chamber air vent port 144 (primary chamber side air vent portion) connected to the functional liquid tank 91. Yes. The primary chamber air vent port 144 extends in the vertical direction, and the primary chamber air vent port 145 opened to the primary chamber 122 has a top 152 on the inner peripheral surface of the rear portion of the primary chamber 122 serving as an air reservoir. Is open. Note that the primary chamber air vent port 144 is screwed with a mesh lid 146, but when an air tube (not shown) is connected, a connector (joint) is used instead of the mesh lid 146. It will be screwed.

  As shown in FIG. 5A, the inflow port 143 includes an inflow port 147 opened on the outer peripheral surface of the primary chamber housing 141, a primary chamber side opening 149 opened on the upper end 153 of the primary chamber 122, and the like. The inflow channel 148 is formed obliquely in the circumferential direction so as to have a predetermined downward gradient. An inflow connector 128 is screwed into the inflow port 147 from the axial direction of the inflow channel 148, and the tank side tube 92 is connected to the inflow port 148 through the inflow connector 128. The internal flow path of the inflow connector 128 is formed to expand at the downstream end 154 so that no step is generated in the internal flow path and the flow rate of the functional liquid is not greatly changed. The primary chamber-side opening 149 opens at a position adjacent to the primary chamber air vent 145, that is, a position away from the top 152 of the primary chamber 122 in the circumferential direction. The functional liquid flowing in from the functional liquid tank 91 flows down obliquely according to the gradient of the inflow channel 148 and flows into the primary chamber 122 from the primary chamber side opening 149 along the inner peripheral wall 142 of the primary chamber 122. Note that the volume of the primary chamber 122 is sufficiently smaller than the volume of the secondary chamber 123, and functional liquid accumulation is less likely to occur in the primary chamber 122.

  As shown in FIG. 6A, a first annular groove 150 having a rectangular cross section is formed on the front surface of the primary chamber 122 housing in close contact with the secondary chamber housing 161 and positioned outside the primary chamber 122. The O-ring 133 is inserted into the first annular groove 150. Further, the lower portion of the primary chamber housing 141 is cut out in an arcuate shape, and an outflow connector 129 to be described later is disposed in the missing portion.

  As shown in FIG. 6A, the secondary chamber housing 161 is connected to the main chamber 163 having a truncated cone (substantially cylindrical) shape with the front surface for attaching the diaphragm 125 being connected to the rear of the main chamber 163. A frustoconical spring chamber 164 that expands toward the chamber 163 side and the communication channel 124 that connects the spring chamber 164 and the primary chamber 122 are formed. The main chamber 163, the spring chamber 164, and the communication channel 124 all have a circular cross section concentric with the diaphragm 125. However, the communication flow path 124 includes a circular cross-section shaft insertion portion 165 in which a shaft portion 117 of a valve body 126 described later is slidably accommodated, and a cross-shaped cross-section flow extending from the shaft free insertion portion 165 in four radial directions. It is comprised with the road part 166. FIG. In addition, an annular shallow groove 168 is formed on the front surface of the secondary chamber housing 161 so as to face a fixing groove 167 for a packing 134 described later. Since the packing 134 itself has elasticity, the shallow groove 168 is not necessarily formed.

  The inner peripheral wall 162 of the main chamber 163 has a tapered surface 176 that greatly expands forward so as to follow the negative deformation of the diaphragm 125, and the secondary chamber air vent port 169 ( The secondary chamber side air vent part) and the outflow port 171 are formed vertically. The secondary chamber air vent port 169 is formed in an inclined boss portion 177 formed on the upper back surface (upper rear surface) of the secondary chamber housing 161 and extends slightly inclined in the vertical direction. The secondary chamber air vent port (hole) 173 of the secondary chamber air vent port 169 opened to the secondary chamber 123 opens to the top portion 174 including the tapered surface 176 of the front inner peripheral surface of the secondary chamber 123 serving as an air reservoir. is doing. Also in this case, the mecha lid 146 is screwed into the illustrated secondary chamber air vent port 169. However, when an air tube is connected, a connector (joint) (not shown) is used instead of the mecha lid 146. ) Will be screwed together.

  As shown in FIG. 6 (a), the outflow port 171 is formed in an inclined boss portion 177 located at the lower back of the secondary chamber housing 161, and has an outlet 178 opened at the lower back of the secondary chamber housing 161. The secondary chamber 123 includes a secondary chamber side opening 179 that opens to the lower end 175 (valley bottom) of the secondary chamber 123 and an outflow channel 180 that communicates these. The outflow channel 180 is formed obliquely in the front-rear direction so as to have a predetermined downward gradient substantially perpendicular to the tapered surface 176. The outflow connector 129 is screwed into the outflow port 178 from the axial direction of the outflow channel 180, and the head side tube 93 is connected through the outflow connector 129. The internal flow path of the outflow connector 129 is formed to expand at the upstream end 155 so that no step is generated in the internal flow path and a large change in the flow rate of the functional liquid does not occur. The secondary chamber side opening 179 opens to the full width of the inclined surface with respect to the tapered surface 176 including the valley portion 158 of the secondary chamber 123. The functional liquid flowing out from the secondary chamber 123 flows obliquely according to the gradient of the outflow channel 180 from the secondary chamber side opening 179 and flows out to the functional liquid droplet ejection head 11 side.

  As shown in FIG. 5B, the ring plate 131 sandwiches and fixes the diaphragm 125 between the front surface of the secondary chamber housing 161, and an edge portion of the diaphragm 125 is formed on the inner surface of the secondary chamber side. A fixing groove 167 for the packing 134 in contact with is formed.

  The diaphragm 125 is composed of a diaphragm main body 115 made of a resin film 114 and a resin pressure receiving plate 116 attached to the inside of the diaphragm main body 115. The pressure receiving plate 116 is formed in a disk shape concentric with the diaphragm main body 115 and has a sufficiently small diameter with respect to the diaphragm main body 115, and a shaft portion 117 of a valve body 126 (to be described later) abuts on the center thereof. The diaphragm main body 115 is formed by laminating heat-resistant PP (polypropylene), special PP, and PET (polyethylene terephthalate) on which silica is vapor-deposited, and is formed in a circular shape having the same diameter as the front surface of the secondary chamber housing 161. . The diaphragm 125 is hermetically fixed to the front surface of the secondary chamber housing 161 by a ring plate 131 together with a packing 134 attached to the diaphragm 125 from the outside. The pressure receiving plate 116 may be provided outside the diaphragm 125. However, since a shaft portion 117 of a valve body 126 to be described later repeats separation and contact, the pressure receiving plate 116 is provided inside in this embodiment to prevent the diaphragm 125 from being damaged. Yes.

  As shown in FIG. 6A, the valve body 126 includes a disc-shaped valve body main body 201 and a shaft portion 117 extending in one direction so as to form a transverse “T” shape from the center of the valve body main body 201. And an annular valve seal 202 provided (adhered) on the shaft portion 117 side (front surface) of the valve body main body 201. The valve body main body 201 and the shaft portion 117 are integrally formed of a corrosion-resistant material such as stainless steel. An annular small protrusion 203 is formed on the front surface of the valve body main body 201 so as to be located outside the shaft portion 117. (See FIG. 5B). The valve seal 202 is made of, for example, soft silicon rubber, and a seal protrusion 204 serving as an annular protrusion projects from the front surface of the valve seal 202 corresponding to the small protrusion 203 described above. For this reason, when the valve body 126 is closed, the seal projection 204 comes into strong contact with the back surface of the secondary chamber housing 161 serving as a valve seat, that is, the opening edge (not shown) of the communication channel 124, so that the communication channel 124 is It is liquid-tightly closed from the primary chamber 122 side.

  The shaft portion 117 is slidably fitted in the communication flow path 124 and abuts against the pressure receiving plate 116 of the diaphragm 125 whose front end (front end) is in a neutral position in a valve-closed state. That is, in the state of plus deformation in which the diaphragm 125 bulges outward, a predetermined gap is generated between the front end of the shaft portion 117 and the pressure receiving plate 116, and the diaphragm 125 is deformed to the minus side from this state. As a result, when the front end of the shaft portion 117 and the pressure receiving plate 116 come into contact with each other in a neutral state parallel to the ring plate 131, and when the diaphragm 125 is further deformed negatively, the pressure receiving plate 116 passes through the shaft portion 117. The main body 201 is pushed and opened. Therefore, of the volume of the secondary chamber 123, the functional fluid is supplied without receiving any pressure on the primary chamber side for the volume in which the diaphragm 125 becomes neutral from the positive deformation.

  On the other hand, a valve body biasing spring 206 that biases the valve body 126 in the secondary chamber side, that is, in the valve closing direction is interposed between the back surface of the valve body 126 and the rear wall of the primary chamber 122. ing. Similarly, a pressure receiving plate urging spring 207 is provided between the pressure receiving plate 116 and the spring chamber 164 of the secondary chamber 123 to urge the diaphragm main body 115 toward the outside via the pressure receiving plate 116. In this case, the valve body urging spring 206 complements the water head of the functional liquid tank 91 applied to the back surface of the valve body 126, and the hydraulic force of the functional liquid tank 91 and the spring force of the valve body urging spring 206 The valve body 126 is pressed in the closing direction. On the other hand, the pressure receiving plate urging spring 207 complements plus deformation of the diaphragm 125, and acts so that the secondary chamber 123 is slightly negative with respect to atmospheric pressure.

  As will be described in detail later, the pressure regulating valve 7 opens and closes due to the pressure balance between the secondary chamber 123 connected to the atmospheric pressure and the functional liquid droplet ejection head 11, and the valve body 126 opens and closes. The valve body 126 opens and closes very slowly due to the distributed force acting on 206 and the pressure receiving plate urging spring 207 and the valve seal 202 (elastic force) of soft silicone rubber. For this reason, pressure fluctuation (cavitation) due to the opening and closing of the valve body 126 is suppressed, and the ejection driving of the functional liquid droplet ejection head 11 is not affected. Of course, the pulsation and the like generated on the functional liquid tank side (primary side) are also cut off by the valve body 126, and can be absorbed (damper function).

  As shown in FIGS. 5 and 6, the mounting plate 127 is made of a stainless steel plate, and is fixed to the rear side surface of the secondary chamber housing 161. On both surfaces of the mounting plate 127, a linear mark 208 indicating the center position of the diaphragm 125 is engraved at the upper and lower intermediate positions, and the pressure adjustment valve 7 is applied to the functional liquid droplet ejection head 11 by this mark 208. It is used as an index when installing with a predetermined height difference. Reference numeral 209 in the drawing is a long hole for aligning the mark 208 of the mounting plate 127 and the center position of the diaphragm 125. The mounting plate 127 is fixed to the valve housing 121 after this alignment. Is done. The pressure regulating valve 7 is attached to a valve stand 73 installed vertically on the valve plate 69 with reference to the mark 208.

Next, the principle of operation of the pressure regulating valve 7 will be described with reference to FIG. The primary chamber 122 has a water head based on the level of the functional liquid stored in the functional liquid tank 91 (in terms of design, a water head between the central axis of the supply port 97 of the functional liquid pack and the central axis of the primary chamber 122. The pressure based on the water head and the spring force of the valve body urging spring 206 act as the valve closing force of the valve body 126.
That is, when the pressure per unit area based on the water head is P1, the area of the back surface of the valve body 201 is S1, and the spring force of the valve body biasing spring 206 is W1, the valve body from the primary chamber 122 side. The force F1 acting on 126 is
F1 = (P1 × S1) + W1
It becomes. Note that W1 is a value that takes into account the elastic force of the valve seal 202, and here, the total of the spring force and the elastic force (biasing force) of the valve seal 202 is W1.
On the other hand, the force F2 acting on the valve body 126 from the secondary chamber 123 side is when the internal pressure of the secondary chamber 123 is P2, the area of the diaphragm 125 is S2, and the spring force of the pressure receiving plate biasing spring 207 is W2. In addition,
F2 = (P2 × S2) −W2
It becomes. P1 and P2 are gauge pressures. The center diameter D of the diaphragm 175 is an average diameter of the outer diameter of the diaphragm main body 115 and the outer diameter of the pressure receiving plate 116, and is represented by S2 = (D / 2) × (D / 2) × π.

  The valve body 126 opens in the state of F2> F1, and closes in the state of F1> F2. In this embodiment, W1 and W2 are determined experimentally, and S1 is set based on W1. Then, according to the above relationship, the center diameter D of the diaphragm 175 is further obtained so that the valve body 126 opens and closes using substantially atmospheric pressure as a reference adjustment pressure, and the outer diameter of the diaphragm main body 115 and the outer diameter of the pressure receiving plate 116 are set. It is like that.

  That is, when the functional liquid is consumed (discharged) by the functional liquid droplet ejection head 11 from the positively deformed state of the diaphragm 125 and the negative pressure in the secondary chamber increases, the diaphragm 125 is pushed to the atmospheric pressure and is reduced from the neutral state. Transition to deformation. As a result, the valve body 126 is pushed through the pressure receiving plate 116 and slowly opens. When the valve body 126 is opened, the functional liquid flows from the primary chamber 122 into the secondary chamber 123 through the communication channel 124. As a result, the pressure in the secondary chamber 123 increases, and the valve body 126 slowly closes. The pressure receiving plate urging spring 207 acts against the atmospheric pressure even after the valve body 126 is closed, causing the diaphragm 125 to be positively deformed and the functional fluid pressure in the secondary chamber 123 to be slightly negative. Let me. By slowly repeating the above operation, the functional liquid is supplied while the secondary chamber 123 is maintained at a substantially constant pressure.

  Similarly, in the initial filling of the functional liquid, the above-described operation is performed by the forced suction of the functional liquid from the functional liquid droplet ejection head 11 side, and the functional liquid is filled in the flow path in the valve. The pressure of the functional liquid in the secondary chamber 123 is maintained at a pressure lower than the atmospheric pressure by the pressure receiving plate urging spring 207. For this reason, the height difference between the position of the functional liquid droplet ejection head 11 (nozzle) and the position of the pressure adjustment valve 7 (center of the diaphragm 125) is set to a constant value, so Dripping is prevented.

  As described above, the pressure regulating valve 7 according to the embodiment has a structure in which the valve body 126 opens and closes using the atmospheric pressure as the regulation reference pressure, and thus functions at a constant low pressure unless the primary chamber 122 side has an extremely high pressure. The liquid can be supplied to the functional liquid droplet ejection head 11. That is, the functional liquid can be stably supplied to the functional liquid droplet ejection head 11 without being affected by the head of the functional liquid tank 91.

  In particular, in the pressure regulating valve 7 of the embodiment, the inflow channel 148 is provided in the vicinity of the top portion 152 (a position where the top portion 152 is removed in the circumferential direction), and the outflow channel 180 is provided at the lower end 175 (valley bottom) of the secondary chamber 123. Provided. For this reason, the functional liquid flows in the pressure regulating valve 7 from the top to the bottom in accordance with gravity, and the functional liquid pool does not occur in the pressure regulating valve 7. Moreover, since the secondary chamber 123 is formed in a truncated cone shape, it is easy to collect the functional liquid at the lower end 175 (the valley bottom). In addition, the secondary chamber side opening 179 provided at the lower end 175 opens to the full width of the inclined surface with respect to the tapered surface 176 so that the functional liquid entering the secondary chamber 123 does not physically stay. As a result, it is possible to prevent the functional fluid from being accumulated in the secondary chamber 123 and the altered functional fluid from remaining in the pressure regulating valve 7. In addition, the primary chamber 122 has a smaller volume than the secondary chamber 123, so that no functional liquid pool is generated in the primary chamber 122.

  Note that the pressure regulating valve 7 of the embodiment is also considered from the viewpoint of preventing the generation of bubbles during initial filling. That is, by forming the inflow channel 148 and the outflow channel 180 in descending gradients, the flow rate of the filling functional liquid is kept low, the internal air and the filling functional liquid are stirred, and bubbles are mixed into the functional liquid. Is preventing. Further, since the opening on the primary chamber 122 side is provided at a position away from the top 152 of the primary chamber 122 in the circumferential direction, the functional liquid flows down along the inner wall of the primary chamber 122. This prevents the filling functional liquid from agitating with the internal air to generate bubbles. Furthermore, by making the main chamber 163 and the spring chamber 164 of the secondary chamber 123 into a conical trapezoidal shape, the functional liquid flowing into the secondary chamber 123 from the communication channel 124 can flow smoothly down the inner wall. , Thorough prevention of bubble generation.

  The functional liquid is supplied to the functional liquid droplet ejection head 11 through the path shown in FIG. 4 by the functional liquid supply mechanism 6 configured as described above. That is, the tank-side tube 92 is connected to the inflow connector 128 of the pressure regulating valve 7 while the upstream end 157 is horizontally connected to the above-mentioned connector and the downstream end 156 is inclined downward. On the other hand, the head side tube 93 is connected to the functional liquid droplet ejection head 11 with its upstream end connected to the outflow connector 129 of the pressure regulating valve 7 and with its downstream end directed downward. As described above, since the functional liquid supply flow path 14 from the functional liquid pack 91 to the functional liquid droplet ejection head 11 is formed to be inclined toward the functional liquid droplet ejection head 11 as a whole, the functional liquid is also formed as the entire flow path. Accumulation is difficult to occur.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 9 is a flowchart showing the manufacturing process of the color filter, and FIG. 10 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in a bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 10B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 11C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 therebelow serve as a partition wall portion 507b that partitions each pixel region 507a, and the colored layers (film forming portions) 508R, 508G, and 508B are formed by the droplet discharge head 11 in the subsequent colored layer forming step. The landing area of the functional droplet is defined when forming the.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. The landing position accuracy is improved.

  Next, in the colored layer forming step (S103), as shown in FIG. 10 (d), functional droplets are ejected by the functional droplet ejection head 11 and each pixel region 507a is surrounded by the partition wall portion 507b. Let it land. In this case, the functional liquid droplet ejection head 11 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. When the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 11 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 10, the corresponding parts are denoted by the same reference numerals, and description thereof is omitted.

The liquid crystal device 520 is roughly composed of a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 (liquid crystal layer side) of the color filter 500, a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 11 are formed at a predetermined interval. A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 11. Furthermore, it is also possible to apply the first and second alignment films 524 and 527 by the functional liquid droplet ejection head 11.

FIG. 12 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 13 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 14 is a cross-sectional view of a main part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 stacked on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. In addition, you may further form the other functional layer which has another function adjacent to this light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 15, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 16, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b. )
By performing this surface treatment process, when the functional layer 617 is formed using the functional liquid droplet ejection head 11, the functional liquid droplets can be landed more reliably on the pixel area, and can be landed on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. This display device substrate 600A is placed on the set table 56 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 18, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is removed from the functional liquid droplet ejection head 11 into each opening 619 that is a pixel region. Discharge inside. After that, as shown in FIG. 19, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform a surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 20, the pixel composition (second liquid composition containing a light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 20)) is used as a functional droplet. A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 21, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 11, as shown in FIG. 22, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 23, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as an electrode, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 24 is an exploded perspective view of an essential part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701 and a second substrate 702 that are disposed to face each other, and a discharge display portion 703 that is formed therebetween. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence. The red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 56 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 11. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
In the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the droplet ejection head 11, and the corresponding color. In the discharge chamber 705.

Next, FIG. 25 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 includes a first substrate 801, a second substrate 802, and a field emission display unit 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A grid-like bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 26A, and when these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

It is a plane schematic diagram of a droplet discharge device. It is a side surface schematic diagram of a droplet discharge device. It is a side surface schematic diagram which shows the functional liquid flow path from a functional liquid pack to a functional droplet discharge head. It is a side surface schematic diagram which shows the functional liquid flow path around a pressure regulating valve. It is an external appearance perspective view of a pressure control valve. (A) is a longitudinal cross-sectional view of a pressure regulating valve, (b) is a front view of a pressure regulating valve. (A) is a longitudinal cross-sectional view of the pressure regulating valve, and (b) is an enlarged cross-sectional view around the primary chamber. It is explanatory drawing which shows the principle of operation of a pressure regulation valve. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Droplet discharge device 7 Pressure adjustment valve 11 Functional droplet discharge head 13 X / Y moving mechanism 14 Functional liquid supply flow path 91 Functional liquid tank 121 Valve housing 122 Primary chamber 124 Communication flow path 125 Diaphragm 147 Inlet 148 Inflow Path 149 Primary chamber side opening 153 Upper end 152 Top 157 Upstream end 156 Downstream end 173 Secondary chamber air vent (hole)
174 Top 175 Lower end (valley bottom)
176 Tapered surface 178 Outlet 179 Secondary chamber side opening 180 Outflow channel W Workpiece

Claims (13)

The functional liquid introduced from the functional liquid tank into the primary chamber in the valve housing is gravity-supplied to the functional liquid droplet ejection head through the secondary chamber in the valve housing,
A circular diaphragm that faces the atmosphere and constitutes one surface of the secondary chamber is provided with a valve body provided in a communication channel that connects the primary chamber and the secondary chamber with atmospheric pressure as an adjustment reference pressure. In a pressure regulating valve that opens and closes and regulates the pressure in the secondary chamber,
Forming an inflow channel formed in the valve housing and communicating with the inlet connected to the functional liquid tank and the primary chamber side opening opened at the upper end of the primary chamber in a downward gradient;
An outflow passage formed in the valve housing and communicating with a secondary chamber side opening opened at a lower end portion of the secondary chamber and an outlet connected to the functional liquid droplet ejection head is formed in a downward slope. Characteristic pressure regulating valve.   2. The pressure regulating valve according to claim 1, wherein the primary chamber and the secondary chamber are disposed adjacent to each other and are formed in a substantially cylindrical shape concentric with the diaphragm.   The pressure regulating valve according to claim 2, wherein the primary chamber side opening is opened at a position slightly deviated from the top of the primary chamber in the circumferential direction.   4. The pressure regulating valve according to claim 2, wherein the secondary chamber side opening is open to a valley portion including a valley bottom of the secondary chamber. 5.   5. The other surface of the secondary chamber facing the diaphragm is formed in a tapered shape following the displacement form of the diaphragm, while the communication flow path is open. Pressure regulating valve.   The said secondary chamber side opening is formed in the site | part ranging from the said valley bottom to a taper surface, and the said outflow channel is extended in the direction substantially orthogonal to the said taper surface. Pressure regulating valve.   The pressure regulating valve according to claim 1, further comprising a secondary chamber side air vent hole formed in the valve housing and opened at a top portion of the secondary chamber.   The pressure regulating valve according to any one of claims 1 to 7, further comprising a primary chamber side air vent hole formed in the valve housing and opened at a top portion of the primary chamber. The functional liquid tank for storing the functional liquid;
The pressure regulating valve according to any one of claims 1 to 8, which is connected to the functional liquid appropriate ejection head;
A functional liquid supply mechanism comprising: a functional liquid supply flow path that connects an upstream end to the functional liquid tank and connects a downstream end to the pressure regulating valve. The functional liquid supply mechanism according to claim 9,
The functional liquid droplet ejection head for ejecting functional liquid droplets to a workpiece;
An apparatus for discharging liquid droplets, comprising: an XY movement mechanism for moving the workpiece relative to the functional liquid droplet discharge head in the X-axis direction and the Y-axis direction.   11. A method of manufacturing an electro-optical device, wherein the droplet discharge device according to claim 10 is used to form a film forming portion with the functional droplets on the workpiece.   An electro-optical device using the droplet discharge device according to claim 10, wherein a film forming portion using the functional droplet is formed on the workpiece.   An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 11 or the electro-optical device according to claim 12.

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