JP2006082023A - Composite structure formation system and formation method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a composite structure formation system capable of stabilizing a particulate concentration of aerosol, and formation method. <P>SOLUTION: The composite structure formation system is for forming a composite structure of a structure produced from a component material in the form of particulates and a substrate by hitting aerosol containing the particulates dispersed in a gas against a substrate and comprises a storage mechanism for storing the particulates, an aerosol formation mechanism for forming aerosol by dispersing the particulates in a gas, a supply mechanism for supplying the aerosol to the aerosol formation mechanism from the storage mechanism, a gas supply mechanism for supplying the gas to the aerosol formation mechanism, a jetting outlet for jetting the aerosol toward the substrate, and a quantifying mechanism for quantifying the concentration of the particulates in the aerosol. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a composite structure forming system and a forming method. More specifically, the present invention relates to a structure composed of fine particle constituent materials by spraying “aerosol” in which fine particles of a brittle material are dispersed in a gas. The present invention relates to a composite structure forming system and a forming method to be formed thereon.

As a method for forming a brittle material structure on the surface of a substrate, there is an “aerosol deposition method” (for example, Patent Document 1 and Patent Document 2). This is because "aerosol" in which fine particles containing brittle materials are dispersed in a gas is sprayed from a nozzle toward the base material, and the microparticles collide with a base material such as metal, glass, ceramics or plastic, and the impact of this collision In this method, the brittle material fine particles are deformed or crushed and joined together to directly form a film-like structure made of the constituent material of the fine particles on the substrate. According to this method, a film-like structure can be formed at room temperature without requiring any heating means, and a film-like structure having mechanical strength equal to or higher than that of the fired body can be obtained. In addition, the density, mechanical strength, electrical characteristics, and the like of the film-like structure can be varied in various ways by controlling the conditions under which the fine particles collide and the shape and composition of the fine particles.
Japanese Patent No. 3348154 JP 2000-212766 A

When forming a film-like structure by the aerosol deposition method, it is important to control the concentration of fine particles contained in the aerosol. For example, when the concentration of the fine particles changes, there arises a problem that the film thickness of the film-like structure deviates from the target value.
In addition, when forming a film-like structure on a large-area substrate, a film-like structure having a larger area than that of the nozzle is achieved by moving the nozzles for ejecting the aerosol while facing the substrate. Things need to be formed. In this case, if the fine particle concentration of the aerosol ejected from the nozzle fluctuates, the film thickness of the film-like structure formed on the substrate becomes non-uniform.

  In particular, when there is an abrupt (extreme) variation in the concentration of the aerosol, defects such as defects are introduced into the film-like structure or the surface roughness increases, resulting in non-uniform film quality. Sometimes. Accordingly, it is desirable to stabilize the concentration of the fine particles in the aerosol not only for stability over a long period of time, but also in a short time interval.

  When aerosol deposition is actually performed, for example, the state of the powder (fine particles) changes over time in terms of humidity and chemical stability, or the supply of aerosol according to the remaining amount of powder filling Due to various factors such as the ability to vary, the concentration of the aerosol may vary in the short or long term.

  The present invention has been made on the basis of recognition of such problems, and an object thereof is to provide a composite structure forming system and a forming method capable of stabilizing the concentration of aerosol fine particles.

In order to achieve the above object, according to one aspect of the present invention,
A composite structure forming system that forms a composite structure of a structure made of a constituent material of the fine particles and the base material by causing an aerosol in which fine particles are dispersed in a gas to collide with the base material,
A storage mechanism for storing the fine particles;
An aerosolization mechanism for forming an aerosol by dispersing the fine particles in a gas;
A supply mechanism for supplying the fine particles from the storage mechanism to the aerosolization mechanism;
A gas supply mechanism for supplying the gas to the aerosolization mechanism;
A discharge port for injecting the aerosol toward the substrate;
A quantification mechanism for quantifying the concentration of the fine particles in the aerosol;
A composite structure forming system is provided.

  According to the said structure, the composite structure formation system which can stabilize the density | concentration of the microparticles contained in aerosol can be provided by providing a quantification mechanism.

  Here, the “quantification mechanism” is a mechanism that adjusts the concentration of fine particles in the aerosol supplied per unit time and continuously maintains a predetermined concentration. The unit time for determining the quantification can be appropriately set depending on the required accuracy of the structure, and maintains the quantification in the unit time of several tens of seconds or less (10 to 50 seconds or less). More preferably, the quantitative property may be maintained in a unit time on the order of several seconds (1 to 5 seconds or less).

  Here, if the gas supply mechanism supplies pressurized gas, the aerosol generation in the aerosol generation mechanism can be reliably and easily performed, and the flow rate of the aerosol injected from the discharge port can be increased. Thus, the structure can be reliably formed by colliding with the substrate at a high speed.

  Further, the apparatus is further provided with a structure manufacturing chamber that accommodates the discharge port and the base material, and an exhaust unit that can maintain the internal space of the structure manufacturing chamber at a pressure lower than atmospheric pressure. For example, the structure can be reliably formed by accelerating the aerosol by the differential pressure used between the upstream side of the discharge port and the structure manufacturing chamber and causing it to collide with the substrate at a high speed. In addition, it is possible to confine and collect surplus fine particles in the structure manufacturing chamber, thereby solving problems such as scattering to the surroundings.

  Further, if a measuring mechanism for detecting the concentration of the fine particles contained in the aerosol is further provided, various concentrations can be controlled based on the detection result of the aerosol concentration.

  For example, if the quantification mechanism is controlled based on information detected by the metering mechanism, the aerosol concentration can be maintained at a predetermined value, and the film thickness and film quality can be made uniform.

  Here, if the measuring mechanism is provided between the aerosolization mechanism or between the aerosolization mechanism and the quantification mechanism, so-called feedforward control is possible, and the uniformity of film thickness and film quality is improved. Get higher.

  Further, if the quantification mechanism has a channel resistance variable means for changing the resistance of the channel through which the aerosol passes, the aerosol concentration is quantified by changing the resistance of the aerosol channel. Can be carried out reliably and easily.

Here, if the flow path resistance variable means is controlled based on the information detected by the measuring mechanism, the aerosol concentration can be reliably and easily maintained at a predetermined value.
Further, if the quantification mechanism further includes a gas introduction port for adding a dilution gas on the downstream side of the flow path resistance variable means, the quantification of the aerosol can be performed reliably and easily.
Here, if the amount of the dilution gas added from the gas inlet is controlled based on the information detected by the measuring mechanism, the aerosol concentration can be reliably and easily maintained at a predetermined value. it can.
Further, the quantification mechanism further has a discharge port for discharging at least a part of the aerosol to a flow path different from the flow path of the flow path resistance variable means on the upstream side of the flow path resistance variable means. Then, the aerosol can be quantified reliably and easily.
Here, if the amount of the aerosol discharged from the discharge port is controlled based on the information detected by the measuring mechanism, the concentration of the aerosol can be reliably and easily maintained at a predetermined value.
Further, if a crushing mechanism for crushing the fine particles contained in the aerosol is further provided, it is possible to crush aggregated particles, coarse particles, etc. contained in the aerosol to make the particle sizes uniform.

In addition, if a classification mechanism for selecting the particle size of the fine particles contained in the aerosol is further provided, an aerosol containing more uniform particles can be obtained, and a structure with further improved film thickness and film quality uniformity can be formed. it can.
Further, if it is further provided with at least one of an acceleration mechanism for accelerating the aerosol flux and a rectifying mechanism for making the aerosol flux uniform, a uniform or aerosol beam is formed, and the aerosol is It can be made to collide with the substrate at high speed.

  Further, if a scanning mechanism that changes the relative positional relationship between the discharge port and the base material is further provided, a uniform structure can be formed over a large area.

On the other hand, according to another aspect of the present invention,
A step of dispersing fine particles in a gas to form an aerosol;
Quantifying the concentration of the fine particles in the aerosol;
Forming a composite structure of the base material and the structure made of the constituent material of the fine particles by injecting the quantified aerosol toward the base material;
A method for forming a composite structure is provided.

  According to the said structure, the composite structure formation method which can stabilize the density | concentration of the microparticles | fine-particles contained in aerosol by providing a quantification mechanism can be provided.

  In the specification of the present application, the term “fine particles” refers to particles having an average particle diameter of 50 micrometers or less identified by particle size distribution measurement, a scanning electron microscope, or the like in the case of dense particles.

  In the present specification, “aerosol” is obtained by dispersing the above-mentioned fine particles in a gas such as helium, nitrogen, argon, oxygen, dry air, or a mixed gas containing these, and these fine particles are used as a gas alone. A state in which the fine particles are aggregated and a state in which the aggregated particles in which these fine particles are aggregated are dispersed in the gas. The gas pressure and temperature of the aerosol are arbitrary, but the concentration of fine particles in the gas is 0.0003 mL / L at the time when the gas is injected from the discharge port when the gas pressure is converted to 1 atm and the temperature is converted to 20 degrees Celsius. It is desirable for structure formation to be in the range of ~ 0.06 mL / L.

  According to the present invention, by providing a quantification mechanism, the concentration of fine particles in the aerosol ejected from the discharge port is controlled, and the film thickness and film quality of the film-like structure formed on the substrate are reliably controlled. it can. In this case, it is possible to form a film-like structure having an accurate thickness by keeping the deposition rate of the film-like structure constant by maintaining the concentration of fine particles in the aerosol constant throughout.

  Further, according to the present invention, when quantified by the quantification mechanism, a uniform film-like structure can be formed over a large area. That is, even when a film-like structure is deposited on the surface of a large area substrate by relatively scanning the discharge port and the substrate, if the fine particle concentration in the aerosol is kept constant, the film over a large area Thickness and film quality can be made uniform.

  Furthermore, according to the present invention, it is possible to return the excessive fine particles in the process of quantification by the quantification mechanism to the accommodation mechanism. In this case, the utilization efficiency of fine particles (powder) can be increased, and continuous film formation over a long period of time becomes possible.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic view illustrating the overall configuration of a composite structure forming system according to an embodiment of the invention. That is, this figure is a conceptual diagram illustrating the configuration of the aerosol deposition apparatus.

  The aerosol deposition apparatus of this specific example includes a storage mechanism 1, a supply mechanism 2, a gas supply mechanism 3, an aerosolization mechanism 4, a quantification mechanism 5, and a discharge port 6. The storage mechanism 1 stores powder for forming an aerosol. The supply mechanism 2 supplies the powder stored in the storage mechanism 1 to the aerosolization mechanism 4 at the subsequent stage. A gas supply mechanism 3 is connected to the aerosolization mechanism 4. Further, a quantification mechanism 5 for controlling the aerosol fine particle concentration is provided at the subsequent stage of the aerosolization mechanism 4. As will be described in detail later, the quantification mechanism 5 can be appropriately provided with a dilution gas introduction pipe 508, an aerosol discharge primary discharge pipe 512, and the like. A discharge port 6 is connected to the subsequent stage of the quantification mechanism 5, and the aerosol quantified by the quantification mechanism 5 is jetted toward the base material 7.

  The storage mechanism 1 is filled with powder such as aluminum oxide powder that has been dried and pulverized in advance, and is supplied to the aerosol generation mechanism 4 in small amounts by the rotation operation of the supply mechanism 2 or the like. A gas such as helium is introduced into the aerosol generating mechanism 4 by the gas supply mechanism 3, and the supplied powder is aerosolized here. The generated aerosol is transported to the quantification mechanism 5 along the gas flow. For example, the concentration of the aerosol is adjusted by adding a dilution gas from the introduction pipe 508. Further, as will be described in detail later, for example, the quantification mechanism 5 may be supplied with an excessive amount of aerosol, and the concentration of the fine particles may be adjusted while discharging a part thereof from the primary discharge pipe 512. The aerosol quantified by the quantification mechanism 5 is ejected from the discharge port 6 toward the base material 7, and a film-like structure composed of raw material fine particles is formed on the base material 7. That is, a composite structure composed of the base material 7 and the film-like structure formed thereon is formed. At this time, when pressurized gas is supplied from the gas supply mechanism 3, the aerosol is easily formed by the gas flow, and the aerosol can be injected toward the base material 7 at a sufficient speed.

  The aerosol deposition process is usually carried out at room temperature, and has one feature in that a film-like structure can be formed at a temperature sufficiently lower than the melting point of the particulate material, that is, at a temperature of 100 degrees centigrade or less.

  The fine particles constituting the powder accommodated in the accommodation mechanism 1 are mainly composed of brittle materials such as ceramics and semiconductors, and the same material fine particles can be used alone or mixed with fine particles having different particle diameters. It is possible to mix fine particles of different brittle materials or to use them in a composite. Moreover, it is also possible to mix fine particles such as metal materials and organic materials with brittle material fine particles, or to coat the surface of brittle material fine particles. Even in these cases, the main material for forming the film-like structure is a brittle material.

  In the composite structure formed by this method, when crystalline brittle material fine particles are used as a raw material, the portion of the film-like structure of the composite structure is a polycrystalline body whose crystal particle size is smaller than that of the raw material fine particles. In many cases, the crystal has substantially no crystal orientation. Moreover, the grain boundary layer which consists of a glass layer does not exist substantially in the interface of brittle material crystals. Further, in many cases, the film-like structure portion of the composite structure forms an “anchor layer” that bites into the surface of the base material 7. The film-like structure on which the anchor layer is formed is formed by being firmly attached to the base material 7 with extremely high strength.

  The film-like structure formed by the aerosol deposition method is clearly different from the so-called “green compact” in which fine particles are packed together by pressure and kept in physical form, and possesses sufficient strength. is doing.

  In the aerosol deposition method, the flying brittle material fine particles are crushed and deformed on the base material 7. The brittle material fine particles used as a raw material and the crystallite size of the formed brittle material structure Can be confirmed by measuring by an X-ray diffraction method or the like. That is, the crystallite size of the film-like structure formed by the aerosol deposition method is smaller than the crystallite size of the raw material fine particles. The “developed surface” or “fracture surface” formed when the fine particles are crushed or deformed includes a “new surface” in which atoms that were originally present inside the fine particles and bonded to other atoms are exposed. Is formed. It is considered that a membrane-like structure is formed by joining this new surface, which has high surface energy and is active, with the surface of the adjacent brittle material fine particles, the new surface of the adjacent brittle material, or the surface of the substrate 7.

  In addition, when hydroxyl groups are present on the surface of the fine particles in the aerosol, a mechanochemical acid-base dehydration reaction occurs due to local shear stress generated between the fine particles or between the fine particles and the structure when the fine particles collide. It is also conceivable that these are joined together. The addition of continuous mechanical impact force from the outside causes these phenomena to occur continuously, and the joining progresses and densifies by repeated deformation, crushing, etc. of fine particles, and a film-like structure made of a brittle material Is considered to grow.

  And according to this embodiment, by providing the quantification mechanism 5, the density | concentration of the microparticles | fine-particles in the aerosol injected from the discharge outlet 6 is controlled, and the film thickness of the film-like structure formed on the base material 7 And film quality can be controlled reliably. In this case, it is possible to form a film-like structure having an accurate thickness by keeping the deposition rate of the film-like structure constant by maintaining the concentration of fine particles in the aerosol constant throughout. Also, the film quality can be made uniform.

Furthermore, as illustrated by an arrow R in FIG. 2, it is possible to take out the excessive fine particles in the process of quantification by the quantification mechanism 5 and return them to the storage mechanism 1 through the primary discharge pipe 512. In this way, the utilization efficiency of the fine particles (powder) is increased, and continuous film formation over a long period of time becomes possible.
Details of the structure of each element including the quantification mechanism 5 provided in the present invention will be described later with reference to specific examples.

FIG. 3 is a schematic diagram showing a second specific example of the aerosol deposition apparatus according to the embodiment of the present invention. 3 and the subsequent drawings, the same elements as those shown in the previous drawings are denoted by the same reference numerals, and detailed description thereof is omitted.
In this specific example, a structure production chamber 8 is provided, and at least the tip portion of the discharge port 6 and the base material 7 are arranged in the structure production chamber 8. The internal space of the structure manufacturing chamber 8 can be maintained in a reduced pressure state by the exhaust mechanism 9. As the exhaust mechanism 9, for example, a rotary pump can be used, and the inside of the structure manufacturing chamber 8 can be maintained in a reduced pressure atmosphere lower than the atmospheric pressure.

  The aerosol quantified by the quantification mechanism 5 is ejected from the discharge port 6 toward the base material 7, and a film-like structure made of raw material fine particles is formed on the base material 7. At this time, since the inside of the structure manufacturing chamber 8 is in a negative pressure environment, the aerosol is accelerated by the pressure difference and collides with the base material 7. As a result, a strong film-like structure can be formed. Further, by maintaining the structure manufacturing chamber 8 in a reduced pressure state, the “new surface” formed by the collision of the aerosol with the base material 7 can be maintained in an active state for a longer period of time. The strength can be increased.

FIG. 4 is a schematic diagram showing a third specific example of the aerosol deposition apparatus according to the embodiment of the present invention.
In this specific example, the aerosol is carried out from the aerosolization mechanism 4 to the quantification mechanism 5 through the carrier tube 10. Further, an acceleration mechanism 11 is provided at the tip of the quantification mechanism 5, and a discharge port 6 is provided at the tip of the quantification mechanism 5 via a rectifying mechanism 12.
In the acceleration mechanism 11, the flow velocity of the aerosol is accelerated by utilizing a jet airflow or a compression effect obtained by providing a difference in the channel diameter. Further, in the rectifying mechanism 12, the fine particle concentration can be made uniform by isotropically diffusing or stirring the aerosol. That is, an aerosol beam having a uniform concentration can be obtained. Among these elements, at least the discharge port 6 is disposed inside the structure manufacturing chamber 8.

  Further, the base material 7 supported by the support scanning mechanism 13 is disposed in the structure manufacturing chamber 8. The support scanning mechanism 13 supports the base material 7 and has a role of appropriately displacing the relative positional relationship of the base material 7 with respect to the ejection port 6 in at least one of the XYZθ directions. That is, a film-like structure can be deposited on the surface of the substrate 7 having a larger area than the beam size of the aerosol ejected from the discharge port 6 by spraying the aerosol while appropriately scanning the substrate 7 by the support scanning mechanism 13. . Then, by quantifying the aerosol concentration by the quantification mechanism 5, a uniform film-like structure can be formed over a large area. That is, in the case where a film-like structure is deposited on the surface of a large-area substrate 7 by relatively scanning the discharge port 6 and the substrate 7, if the fine particle concentration in the aerosol is kept constant, the large area It is possible to make the film thickness and film quality uniform.

  FIG. 5 is a schematic diagram showing a fourth specific example of the aerosol deposition apparatus according to the embodiment of the present invention.

  In this specific example, the discharge port 6 is supported by the support scanning mechanism 17 and is movable in at least one direction of XYZθ. That is, a uniform film-like structure over a large area can be formed on the base material 7 by spraying the aerosol while displacing the discharge port 6 relative to the base material 7. In this case, for example, by providing a deformable pipe 18 between the quantification mechanism 5 and the acceleration mechanism 11, the displacement of the discharge port 6 by the support scanning mechanism 17 can be absorbed. That is, the discharge port 6 can be moved by the support scanning mechanism 17 while the quantification mechanism 5 and the structure manufacturing chamber 8 remain stationary. As the deformable pipe 18, for example, a pipe made of an elastic material such as rubber or a pipe such as bellows can be used.

FIG. 6 is a schematic diagram illustrating a fifth specific example of the aerosol deposition apparatus according to the embodiment of the present invention.
Also in this specific example, the aerosol quantified by the quantification mechanism 5 is ejected from the discharge port 6 toward the base material 7 through the acceleration mechanism 11 and the rectification mechanism 12. The substrate 7 is supported on the support scanning mechanism 13 and can form a film-like structure while being appropriately displaced in at least one of the XYZθ directions.
Furthermore, in this specific example, a measuring mechanism 14 for measuring the concentration of the aerosol is disposed between the discharge port 6 and the base material 7. The metering mechanism 14 detects the concentration of fine particles contained in the aerosol ejected from the discharge port 6.
By providing a metering mechanism 14 in the structure manufacturing chamber 8, information related to fluctuations in aerosol concentration after discharge and changes over time are detected and fed back to the quantification mechanism 5, so that the aerosol concentration, ejection speed, etc. Stabilization can be achieved. As a result, a film-like structure having a uniform film quality and a uniform film quality can be formed. In addition, instead of providing the measuring mechanism 14 in the structure production chamber 8, for example, the same feedback control is possible even if it is provided between the quantification mechanism 5 and the acceleration mechanism 11.

  FIG. 7 is a schematic diagram showing a sixth specific example of the aerosol deposition apparatus according to the embodiment of the present invention.

  In this specific example, a measuring mechanism 14 for measuring the concentration of the aerosol is provided in the aerosol generating mechanism 4. That is, by detecting the concentration of the aerosol before being introduced into the quantification mechanism 5, and feeding the result to the quantification mechanism 5 and adjusting the concentration, the aerosol having a stable concentration with respect to the substrate 7 is obtained. Can be supplied. Note that the same feedforward control is possible if the metering mechanism 14 is provided in the transport pipe 10 instead of being provided in the aerosol generating mechanism 4.

  FIG. 8 is a schematic diagram showing a seventh specific example of the aerosol deposition apparatus according to the embodiment of the present invention.

In this specific example, a crushing mechanism 15 and a classification mechanism 16 are provided in the subsequent stage of the aerosolization mechanism 4, and the quantification mechanism 5 is arranged via the transport pipe 10. The crushing mechanism 15 has a role of breaking coarse particles and fine particle aggregates contained in the aerosol and reducing the particle size. On the other hand, the classification mechanism 16 has a role of selecting only particles having a particle diameter in a predetermined range among the fine particles contained in the aerosol.
The aerosol generated in the aerosolization mechanism 4 is introduced into the crushing mechanism 15, and aggregated particles and the like contained in the aerosol are crushed by the crushing mechanism 15. Then, some coarse particles that are insufficiently crushed are removed by the classification mechanism 16, and only the aerosol containing more uniform particles is conveyed to the quantification mechanism 5, which is a subsequent process.

According to this specific example, by providing the crushing mechanism 15 and the classification mechanism 16, it is possible to inject the aerosol whose fine particle diameter is adjusted within a predetermined range onto the base material 7, and uniformity of film thickness and film quality. Can be formed.
In this specific example, the metering mechanism 14 is provided in the structure production chamber 8 and the quantification mechanism 5 is feedback-controlled, whereby the flow rate and concentration of the aerosol ejected from the discharge port 6 can be controlled more precisely. .

  FIG. 9 is a schematic diagram illustrating an eighth specific example of the aerosol deposition apparatus according to the embodiment of the present invention.

Also in this specific example, the crushing mechanism 15 and the classification mechanism 16 are provided, and the aerosol whose fine particle diameter is adjusted within a predetermined range can be injected onto the base material 7.
In addition, a metering mechanism 14 is provided in the structure production chamber 8, and the concentration of aerosol ejected from the discharge port 6 can be measured by the metering mechanism 14 and fed back to the quantification mechanism 5.

FIG. 10 is a schematic diagram showing a ninth specific example of the aerosol deposition apparatus according to the embodiment of the present invention.
In this specific example, a plurality of aerosol generation units ASG are provided in parallel, and the aerosol is supplied to the quantification mechanism 5 from each. Each of the aerosol generation units ASG is provided with the accommodation mechanism 1, the supply mechanism 2, the gas supply mechanism 3, and the aerosol generation mechanism 4 as described above with reference to FIGS. Each aerosol generating unit ASG may generate an aerosol of a different material or an aerosol of the same material. When aerosols of different materials are generated, they are mixed to generate an aerosol composed of a plurality of materials, and this is injected onto the base material 7 to control the composition of the film-like structure. it can.

  When a plurality of aerosol generating units ASG generate the same kind of aerosol, the aerosol can be supplied for a long time without filling the storage mechanism 1 with powder. In this case, the aerosol may be supplied simultaneously from each of the plurality of aerosol generation units ASG, or the aerosol may be supplied by switching sequentially.

  Also in this specific example, by providing the quantification mechanism 5, the concentration of fine particles in the aerosol can be controlled, and the film thickness and film quality of the film-like structure formed on the substrate 7 can be reliably controlled. Also in this specific example, as described above with reference to FIG. 6, the measuring mechanism 14 is provided in the structure manufacturing chamber 8, and the concentration of the aerosol injected from the discharge port 6 is measured and fed back to the quantifying mechanism 5. You may make it do.

FIG. 11 is a schematic diagram showing a tenth specific example of the aerosol deposition apparatus according to the embodiment of the present invention.
In this specific example, a plurality of aerosol generation units ASG are provided in parallel, and a quantification mechanism 5 is provided for each. That is, each aerosol generation unit ASG can be quantified. In this way, for example, when a film-like structure having a predetermined composition is formed by mixing an aerosol composed of a plurality of material fine particles, the mixing ratio of the aerosol can be controlled with high accuracy. As a result, the composition of the film-like structure can be precisely controlled.

  Also in this specific example, as described above with reference to FIG. 7, the metering mechanism 14 may be provided in the aerosol generating mechanism 4 provided in the aerosol generating unit ASG. In this way, since the aerosol concentration in the aerosol generation unit ASG can be measured and fed forward to the quantification mechanism, more precise control becomes possible.

Heretofore, the entire configuration of the aerosol deposition apparatus according to the embodiment of the present invention has been described with reference to ten specific examples. Hereinafter, each element constituting the aerosol deposition apparatus will be described with specific examples.
FIG. 12 is a schematic view illustrating the structure of the aerosol generation unit ASG. That is, the aerosol generation unit ASG includes a housing mechanism 1, a supply mechanism 2, a gas supply mechanism 3, an aerosolization mechanism 4, and the like. For example, fine powder such as aluminum oxide is accommodated in the accommodating mechanism 1. A gas supply mechanism 3 is connected to the aerosolization mechanism 4 adjacent to the storage mechanism 1 and a gas such as helium is introduced. The housing mechanism 1 and the aerosol generating mechanism 4 are separated by, for example, a rotating body 201. For example, one or more V-shaped grooves (not shown) are formed on the rotating body 201. The powder stored in the storage mechanism 1 is filled in the V-groove by its own weight, and can be supplied to the aerosol forming mechanism 4 in the adjacent chamber by rotating the rotating body 201. The supplied powder is soared by the gas injected by the gas supply mechanism 3 to generate an aerosol. The aerosol generated in this manner is carried out through the transport pipe 10 and led out to a subsequent process. A more specific structure of each element constituting the aerosol generation unit ASG will be described in detail later with reference to a specific example.

  Next, the quantification mechanism 5 that can be provided in the aerosol deposition apparatus of the present invention will be described.

FIG. 13 is a schematic view illustrating the structure of the quantification mechanism 5.
That is, the quantification mechanism 5 can have a structure in which the variable throttle mechanism 504 is provided in the quantification chamber 502. The variable throttle 504 functions as a channel resistance variable means for changing the resistance of the channel through which the aerosol passes. A carry-in pipe 506 is connected to the primary side of the variable throttle mechanism 504, and aerosol is supplied from the aerosol generation unit ASG. Further, a gas introduction pipe 508 is connected to the secondary side of the variable throttle mechanism 504, and dilution gas is supplied from the gas supply mechanism 3. Further, a discharge pipe 510 is connected to the secondary side of the variable throttle mechanism 504, and a quantified aerosol is supplied toward the structure manufacturing chamber 8.

FIG. 14 is a schematic view illustrating the planar structure of the variable aperture mechanism 504.
That is, the variable diaphragm mechanism 504 has a plurality of diaphragm plates 504S whose relative arrangement relationship is variable. The size of the opening 504A formed by these diaphragm plates 504S is variable. Note that the shape, size, number, arrangement relationship, and the like of the diaphragm plate 504S are not limited to those illustrated in FIG. 14, and other various modifications can be similarly used. In short, it is sufficient that the size or conductance of the opening 504A through which the aerosol passes is variable.

  According to the present invention, by adopting the quantification mechanism 5 provided with such a variable aperture mechanism 504, the aerosol concentration is controlled within a predetermined range, and a film-like shape is formed on the surface of the substrate with high accuracy and reproducibility. A structure can be formed.

FIG. 15 and FIG. 16 are schematic views illustrating a control method using the quantification mechanism 5.
That is, the concentration and flow rate of the aerosol discharged from the discharge pipe 510 can be measured by the measuring mechanism 14. Based on the measurement result, the aerosol concentration can be controlled within a predetermined range by appropriately controlling at least one of the aerosol generation unit ASG, the variable throttle mechanism 504, and the gas supply mechanism 3 for dilution. Thus, if feedback control by the measurement mechanism 14 is enabled, even if the quantitative property of the aerosol generating unit ASG is poor, an aerosol having a controlled concentration and flow rate can be obtained.

  More specifically, in the case of the quantification mechanism 5 of this specific example, the flow rate of the aerosol output from the discharge pipe 510 is equal to the flow rate of the aerosol supplied from the carry-in pipe 506 and the dilution introduced from the gas introduction pipe 508. It is the sum of the flow rate of the gas for use. Therefore, the flow rate of the aerosol is mainly controlled by controlling the flow rate of the aerosol supplied from the aerosol generation unit ASG to the carry-in pipe 506 and the flow rate of the dilution gas introduced from the gas supply mechanism 3 to the gas introduction pipe 508. The concentration will be determined. Therefore, as illustrated in FIG. 15, feedback control is performed on the flow rate of the aerosol supplied to the carry-in pipe 506 and the flow rate of the gas introduced into the gas introduction pipe 508 based on the measurement value of the measuring mechanism 14 provided in the subsequent stage. Can do.

  However, in this case, instead of controlling the flow rate of the aerosol supplied from the aerosol generating unit ASG to the carry-in pipe 506, the concentration of the aerosol supplied to the subsequent stage can also be controlled by controlling the variable throttle 504 as illustrated in FIG. Can be controlled. For example, when operating under the condition that the pressure is constant instead of making the output flow rate of the aerosol generating unit ASG constant, the pressure loss in the aerosol flow path changes by controlling the variable throttle mechanism 504. The flow rate can be changed. That is, the mixing balance with the dilution gas introduced from the gas introduction pipe 508 can be controlled, and the aerosol concentration can be adjusted.

Next, a second specific example of the quantification mechanism 5 will be described.
FIG. 17 is a schematic diagram illustrating a second specific example of the quantification mechanism 5.
Also in this specific example, the quantification mechanism 5 has a structure in which a variable throttle mechanism 504 is provided in the quantification chamber 502. However, the primary discharge pipe 512 is connected to the primary side of the variable throttle mechanism 504 together with the carry-in pipe 506 so that the aerosol can be discharged from the primary side of the variable throttle mechanism 504.

In this case, the flow rate of the aerosol output from the discharge pipe 510 is calculated from the sum of the flow rate of the aerosol supplied from the carry-in pipe 506 and the flow volume of the dilution gas introduced from the gas introduction pipe 508. The value is obtained by subtracting the amount of aerosol flow from 512. Therefore, mainly, the flow rate of the aerosol supplied from the aerosol generation unit ASG to the carry-in pipe 506, the flow rate of the gas introduced from the gas supply mechanism 3 to the gas introduction pipe 508, and the outflow amount from the primary discharge pipe 512, By appropriately controlling, the flow rate and concentration of the aerosol are determined.
Providing such a primary discharge pipe 512 expands the degree of freedom of aerosol quantitative control, as will be described below.

18 to 20 are schematic views illustrating a control method when the quantification mechanism 5 of this specific example is used.
First, as illustrated in FIG. 18, the flow rate of the aerosol supplied to the carry-in pipe 506 and the flow rate of the dilution gas introduced into the gas introduction pipe 508 based on the measurement value by the measurement mechanism 14 provided at the subsequent stage of the quantification mechanism 5. And feedback control. For example, when the measured value of the concentration in the measuring mechanism 14 is low, the balance of the aerosol supplied from the carry-in pipe 506 to the dilution gas introduced from the gas introduction pipe 508 may be increased.
Next, as illustrated in FIG. 19, the variable throttle mechanism 504 and the flow rate of the dilution gas introduced into the gas introduction pipe 508 may be feedback-controlled. For example, when the measurement value of the concentration in the metering mechanism 14 is low, the balance of the aerosol supplied from the carry-in pipe 506 to the dilution gas introduced from the gas introduction pipe 508 is increased by widening the opening of the variable throttle mechanism 504. That's fine. This control mode is applicable when the aerosol generating unit ASG is operated under a constant pressure condition as described above with reference to FIG.

  Furthermore, as illustrated in FIG. 20, the amount of outflow from the primary discharge pipe 512 and the flow rate of the dilution gas introduced into the gas introduction pipe 508 may be feedback controlled. For example, when the measurement value of the concentration in the metering mechanism 14 is low, at least one of the introduction amount of the dilution gas introduced from the gas introduction pipe 508 and the outflow amount of the aerosol flowing out from the primary discharge pipe 512 can be reduced. Good. This control mode can be applied to the case where the aerosol generating unit ASG is operated under either a constant flow rate or a constant pressure.

  As described above, according to the present invention, by providing the quantification mechanism 5, it is possible to precisely control the aerosol concentration and precisely control the thickness and film quality of the film-like structure formed on the substrate 7. It becomes possible to do.

The control method using the quantification mechanism 5 of the present invention has been described above.
Next, another specific example of the quantification mechanism 5 of the present invention will be described.
FIG. 21 is a schematic diagram illustrating a third specific example of the quantification mechanism 5.
That is, in this specific example, a plurality of carry-in pipes 506 are connected to the primary side of the variable throttle mechanism 504. This is, for example, a specific example suitable for connecting a plurality of aerosol generating units ASG in parallel as described above with reference to FIG.
In this case, as illustrated in FIG. 22, the aerosol supplied from the plurality of aerosol generation units ASG can be quantified and ejected from one discharge port 6.

FIG. 23 is a schematic diagram illustrating a fourth specific example of the quantification mechanism.
That is, also in this specific example, a plurality of carry-in pipes 506 are connected to the primary side of the variable throttle mechanism 504. In this specific example, a plurality of discharge pipes 510 are also connected to the secondary side of the variable throttle mechanism 504. This is a specific example suitable for use in an apparatus provided with a plurality of discharge ports 6 as illustrated in FIG.
FIG. 25 is a schematic diagram illustrating a fifth specific example of the quantification mechanism.
In this specific example, a metering mechanism is provided on the primary side of the variable aperture mechanism 504. As will be described in detail later, the measuring mechanism provided in the present invention includes, for example, a laser 1402 and a light receiver 1404 that monitors the light. For example, the aerosol concentration can be measured by irradiating the aerosol with light from the laser 1402 and monitoring the amount of light transmitted or reflected. Based on the result, for example, the opening of the variable aperture mechanism 504 can be controlled.
In the case of this specific example, since the measuring mechanism is provided on the primary side of the variable throttle mechanism 504 to be controlled, so-called feedforward control is possible. That is, the aerosol concentration is measured on the primary side of the variable throttle mechanism 504, and the opening degree of the variable throttle mechanism 504 can be controlled based on the measured value so as to obtain a predetermined concentration.

FIG. 26 is a schematic diagram illustrating a sixth specific example of the quantification mechanism.
In this specific example, on the secondary side of the variable aperture mechanism 504, a laser 1402 and a light receiver 1404 for monitoring the light are provided as a measuring mechanism. Thus, the aerosol concentration may be measured on the secondary side of the variable throttle mechanism 504. In this case, the variable aperture mechanism 504 can be feedback-controlled based on the measurement result. In other words, the aerosol concentration can be measured on the secondary side of the variable throttle mechanism 504, and the opening degree of the variable throttle mechanism 504 can be controlled so that the measured value becomes a predetermined value.

  The quantification mechanism 5 that can be used in the present invention has been described above.

Next, other elements constituting the aerosol deposition apparatus of the present invention will be described in detail.
First, the aerosol generating unit ASG will be described.
FIG. 27 is a schematic view illustrating the specific structure of the aerosol generation unit ASG.
In this specific example, a storage chamber 101 that constitutes the accommodation mechanism 1 and an aerosolization chamber 401 that constitutes the aerosolization mechanism 4 are provided on a turntable 201 that serves as the supply mechanism 2. The powder 30 is stored in the storage chamber 101, and the internal space is appropriately depressurized by an exhaust pump or the like. An annular groove 203 is formed on the horizontal upper surface of the turntable 201, and acts as a circulation type conveyer that connects the storage chamber 101 and the aerosol generation chamber 401. That is, the powder 30 in the storage chamber 101 uses the weight of the powder 30 or mechanical operation, for example, using a stirrer as in JP-A-5-239627, or applying vibration to the storage chamber 101. Then, it is supplied into the groove 203 provided on the rotary table 201.
And the powder 30 in the groove | channel 203 is sent to the aerosol formation chamber 401 by rotation of the turntable 201, and an aerosol is produced | generated here. It is possible to adjust the amount of powder transport by changing the size of the groove 203 or changing the rotational speed by the driving means.

FIG. 28 is a partial cross-sectional view illustrating the structure of the aerosolization mechanism in this example.
FIG. 29 is a cross-sectional view taken along line AA in FIG.

The aerosolization chamber 401 of this specific example is connected to the gas supply mechanism 3 via a joint 405, and is a gas for blowing the carrier gas supplied from the gas supply mechanism 3 onto the powder 30 dropped into the groove 203. An introduction port 403, a powder crushing pin 402 for scraping and scraping the powder 30 pushed in the groove 203, and an aerosol outlet port 404 are provided. The aerosol outlet 404 is connected to the exhaust mechanism 9 from the joint 406 via the structure manufacturing chamber 8, and the aerosolized powder 30 is generated by the suction force generated when the exhaust mechanism 9 and the carrier gas are discharged. Suck out. The diameter of the powder crushing pin 402 is smaller than the width of the groove 203 as shown in FIG. 29, and a gap may be formed between the powder crushing pin 402 and the side surface of the groove 203. Good. Air from the gas inlet 403 flows toward the aerosol outlet 404 through this gap.
The powder crushing pin 402 may have a shape equivalent to that of the groove 203 and scrape out all the powder 30 fixed in the groove 203. Also, the powder crushing pin 402 itself can be made movable to enhance the scraping effect. For example, when the powder crushing pin 402 is attached to a piezoelectric element and a voltage is applied to vibrate it, the powder can be efficiently scraped. In addition, the powder crushing pin 402 is not fixed to the body of the aerosol chamber 401 but is made movable, and a motor, a weight, a spring or the like is attached to the powder crushing pin 402, so If the tips of the crushing pins 402 are in contact with each other, the powder 30 can be unraveled and scraped without leaving the grooves 203.

In the case of the specific example shown in FIG. 28, the aerosol outlet 404 is arranged first with respect to the moving direction of the powder 30, then the powder crushing pin 402 is arranged, and finally the gas Although the introduction port 403 is arranged, the order of these arrangements is not limited to this specific example. For example, when the gas inlet 403 is arranged upstream of the aerosol outlet 404, there is no risk that the fixed powder enters the aerosol outlet 404, but some powder is downstream of the aerosol outlet 404. If the gas inlet 403 is arranged downstream of the aerosol outlet 404 as shown in the figure, a slight amount of fixed powder may enter the aerosol outlet 404, but the powder There is no waste of flowing downstream from the aerosol outlet 404.
FIG. 30 is a schematic diagram showing still another specific example of the aerosol generation unit ASG.
In this specific example, a supply pipe 210 as a supply mechanism is connected to the lower part of the storage chamber 101 and is connected to an aerosolization chamber 401 provided vertically below. Further, a vibration generating means 212 is provided in the vicinity of the attachment portion of the supply pipe 210 so as to facilitate the fall discharge of the powder 30 to the supply pipe 210 due to the gravity.

  Gas is supplied from the gas supply mechanism 3 to the aerosol generation chamber 401, and the powder 30 is mixed into the gas flow, whereby aerosol is generated. The generated aerosol is supplied to the structure manufacturing chamber 8 through the transport pipe 10. The aerosol chamber 401 is vibrated or rocked by a rocking mechanism 412 so that the aerosolization of the powder 30 can be promoted. Note that if the supply pipe 210 is formed of an elastic body such as rubber or a soft body, it is possible not to transmit the vibration or swing by the swing mechanism 412 to the storage chamber 101.

31 and 32 are schematic views showing still another specific example of the aerosol generation unit ASG.
In these specific examples, a rotary conveying means 217 is provided below the storage chamber 101. The conveying means 217 has a substantially spiral or screw-shaped conveying portion, and rotates to supply the powder 30 accommodated in the accommodating chamber 101 to the aerosol-generating chamber 401 via the supply pipe 216. The aerosol generation chamber 401 is supplied with gas from the gas supply mechanism 3, and the powder 30 is mixed with this gas flow to generate aerosol.

  In addition, as illustrated in FIG. 31, the powder 30 conveyed by the conveying means 217 may be dropped into a gas flow flowing thereunder to form an aerosol, or illustrated in FIG. As described above, the powder 30 conveyed by the conveying means 217 may ride on a gas flow that blows upward from below to generate aerosol.

FIG. 33 is a schematic diagram showing still another specific example of the aerosol generating unit ASG.
In this specific example, a transport pipe 218 is provided below the storage chamber 101. The transport pipe 218 is connected to the aerosolization chamber 401 and merges with the gas supply pipe 416. In this case, if the size of the opening diameter of the transfer pipe 218 and the opening diameter of the gas supply pipe 416 in the aerosol generation chamber 401 and the arrangement of these openings are adjusted as appropriate, the jet flow ejected from the gas supply pipe 416 at the opening of the transfer pipe 218 Is formed. That is, the opening of the transfer pipe 218 is screened by the jet flow, and the pressure in the aerosol chamber 401 and the storage chamber 101 can be substantially cut off. That is, it is possible to replenish the powder 30 by opening the storage chamber 101 to atmospheric pressure while maintaining the structure manufacturing chamber 8 in a reduced pressure state.

The structure of the aerosol generating unit that can be used in the present invention has been described with specific examples.
Next, the crushing mechanism 15 that can be used in the present invention will be described.

FIG. 34 is a schematic view illustrating the structure of the crushing mechanism 15.
That is, the crushing mechanism 15 includes a nozzle 1502 that ejects aerosol and an impact plate 1504 provided in front of the nozzle 1502. The powder 30 contained in the aerosol ejected from the nozzle 1502 receives an impact force when it collides with the impact plate 1504. Due to this impact force, the agglomerated fine particles are decomposed, or coarse fine particles are broken and broken into fine fine particles. In the present invention, in particular, as described above with reference to FIGS. 32 and 30, the powder may be formed in the green compact 30P. In such a case, an aggregate of fine particles may be included in the aerosol. . In such a case, it is effective to use the crushing mechanism 15.

  Further, if the impact plate 1504 is rotated so that the motion vector of the collision point due to the rotation is substantially opposite to the motion vector of the aerosol injection, it is effective to increase the impact force on the fine particles.

FIG. 35 is a schematic diagram illustrating a second specific example of the crushing mechanism.
That is, the locations 1506 with the larger channel diameter and the locations 1508 with the smaller channel diameter are alternately provided in the aerosol channel. If it does in this way, gas will be compressed in the location 1508 with a small flow path diameter, and gas will expand in the location 1506 with a large flow path diameter. When such compression and expansion are repeated, a shearing force acts on the fine particles or powder contained in the aerosol. By this shearing force, the aggregated microparticles are decomposed, or coarse microparticles are broken and split into fine microparticles.

Next, the classification mechanism 16 will be described.
FIG. 36 is a schematic view illustrating the structure of a classification mechanism that can be used in the present invention.

  That is, as a classification mechanism, the baffles 1602 and 1604 can be appropriately disposed in the aerosol flow path. In the figure, the lower part corresponds to the vertically lower part. When aerosol is supplied from vertically below, a flow path bent by baffles 1602 and 1604 is formed. At this time, fine particles having a small mass pass through the classification mechanism 16 along the bent flow path and are supplied to the subsequent stage. However, agglomerates of fine particles having a large mass, coarse particles, and the like have a strong inertial force, so that they tend to go straight and the probability of colliding with the baffles 1602 and 1604 increases. When these particles collide with the baffles 1602 and 1604, kinetic energy is lost, and the particles fall downward due to gravity, or are decomposed or broken into fine particles by impact of the collision. The particles falling downward do not pass through the classification mechanism 16, and the fine particles that have been decomposed or split pass through the classification mechanism 16 on the aerosol flow and are supplied to the subsequent stage.

  That is, by providing such baffles 1602 and 1604, it is possible to separate fine particle aggregates and coarse particles and extract only fine particles. Further, the classification accuracy can be adjusted by controlling the positions of the baffles 1602 and 1604, respectively.

Next, the acceleration mechanism 11 will be described.
37 and 38 are schematic views illustrating the structure of the acceleration mechanism.
That is, as the acceleration mechanism 11, as shown in FIG. 37, a jet stream formed by providing a portion 1102 with a narrow channel diameter and a portion 1104 with a large channel diameter can be used.

  Also, as shown in FIG. 38, a compression effect obtained by gradually narrowing the flow path 1106 may be used.

Next, the rectifying mechanism 12 will be described.
39 and 40 are schematic views illustrating the structure of the rectifying mechanism.
That is, as shown in FIG. 36, the rectifying mechanism 12 can use the isotropic diffusion effect of aerosol by gradually widening the diameter of the flow path 1202.

  In addition, as shown in FIG. 40, the aerosol can be stirred by appropriately providing an obstacle 1204 in the flow path to obtain a uniform flow.

Next, the measuring mechanism 14 will be described.
FIG. 41 is a schematic view illustrating a weighing mechanism that can be used in the present invention.
As described above with reference to FIGS. 25 and 26, the measuring mechanism 14 provided in the present invention can be constituted by, for example, a laser 1402 and a light receiver 1404 for monitoring the light. For example, the aerosol concentration can be measured by irradiating the aerosol with light from the laser 1402 and monitoring the amount of transmission.

  Further, as illustrated in FIG. 42, the aerosol may be irradiated with light from a light projecting unit 1402 such as a laser, and the reflected light may be monitored by a light receiver 1404 such as a CCD.

  Further, as shown in FIG. 43, a sensor 1406 may be provided, and the concentration of aerosol particles reaching the sensor 1406 may be measured mechanically or electrically. For example, using a highly sensitive piezoelectric element as the sensor 1406, the concentration can be measured by measuring the impact force when the aerosol collides. It is also possible to measure the concentration of the aerosol based on the fluctuation of the frequency due to the weight of the film-like structure deposited on the surface of the quartz vibrator as the sensor 1406.

  Furthermore, as illustrated in FIG. 44, the aerosol concentration can be measured by sampling a predetermined volume of aerosol and monitoring its weight by the weight measuring means 1408.

Next, the support scanning mechanisms 13 and 17 will be described.
45 and 46 are schematic views illustrating a support scanning mechanism that can be used in the present invention.
In the present invention, by using the support scanning mechanisms 13 and 17, it is possible to relatively move the base material 7 and the discharge port 6 in at least one direction of XYZθ. In this way, a film-like structure having a uniform thickness and film quality can be formed on the surface of the substrate 7 having a large area. In particular, if the relative distance between the discharge port 6 and the substrate 7 is adjusted by moving in the Z direction, the deposition rate of the film-like structure can be easily adjusted.

The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples.
For example, the powder used in the present invention is not only aluminum oxide, but also oxides such as zirconium oxide, titanium oxide, silicon oxide, barium titanate, lead zirconate titanate, nitrides, borides, carbides, A brittle material such as fluoride, a composite material with a metal or a resin mainly composed of a brittle material may be used.

  The carrier gas used in the present invention may be an inert gas such as nitrogen, oxygen, argon or helium, an organic gas such as methane, ethane, ethylene or acetylene, or a corrosive gas such as fluorine gas. These mixed gases may be used as required.

  In addition, those which are appropriately modified and adopted by those skilled in the art regarding the aerosol deposition apparatus and method of the present invention are also included in the scope of the present invention as long as they have the gist of the present invention.

It is a mimetic diagram which illustrates the whole composition system formation system concerning an embodiment of the invention. FIG. 3 is a schematic view illustrating a system for returning the excessive fine particles in the process of quantification by the quantification mechanism 5 to the storage mechanism 1. It is a schematic diagram showing the 2nd example of the aerosol deposition apparatus concerning embodiment of this invention. It is a schematic diagram showing the 3rd specific example of the aerosol deposition apparatus concerning embodiment of this invention. It is a schematic diagram showing the 4th example of the aerosol deposition apparatus concerning embodiment of this invention. It is a schematic diagram showing the 5th example of the aerosol deposition apparatus concerning embodiment of this invention. It is a schematic diagram showing the 6th specific example of the aerosol deposition apparatus concerning embodiment of this invention. It is a schematic diagram showing the 7th example of the aerosol deposition apparatus concerning embodiment of this invention. It is a schematic diagram showing the 8th example of the aerosol deposition apparatus concerning embodiment of this invention. It is a schematic diagram showing the 9th specific example of the aerosol deposition apparatus concerning embodiment of this invention. It is a schematic diagram showing the 10th specific example of the aerosol deposition apparatus concerning embodiment of this invention. It is a schematic diagram which illustrates the structure of aerosol generation unit ASG. 3 is a schematic view illustrating the structure of a quantification mechanism 5. FIG. 5 is a schematic view illustrating a planar structure of a variable aperture mechanism 504. FIG. It is a schematic diagram which illustrates the method of control using the quantification mechanism. It is a schematic diagram which illustrates the method of control using the quantification mechanism. It is a schematic diagram showing the 2nd specific example of the quantification mechanism. It is a schematic diagram which illustrates the control method at the time of using the quantification mechanism 5 of this example. It is a schematic diagram which illustrates the control method at the time of using the quantification mechanism 5 of this example. It is a schematic diagram which illustrates the control method at the time of using the quantification mechanism 5 of this example. It is a schematic diagram showing the 3rd specific example of the quantification mechanism 5. FIG. FIG. 2 is a schematic view illustrating a system in which aerosol supplied from a plurality of aerosol generation units ASG is quantified and injected from one discharge port 6. It is a schematic diagram showing the 4th specific example of a quantification mechanism. It is a schematic diagram which illustrates the system which provided the several discharge outlet. It is a schematic diagram showing the 5th example of a quantification mechanism. It is a schematic diagram showing the 6th specific example of a quantification mechanism. It is a schematic diagram which illustrates the specific structure of the aerosol generation unit ASG. It is a partial sectional view which illustrates the structure of an aerosolization mechanism. It is the sectional view on the AA line of FIG. It is a schematic diagram showing the other specific example of aerosol generation unit ASG. It is a schematic diagram showing the other specific example of aerosol generation unit ASG. It is a schematic diagram showing the other specific example of aerosol generation unit ASG. It is a schematic diagram showing the other specific example of aerosol generation unit ASG. 3 is a schematic view illustrating the structure of a crushing mechanism 15. FIG. It is a schematic diagram showing the 2nd specific example of a crushing mechanism. It is a schematic diagram which illustrates the structure of the classification mechanism which can be used in this invention. It is a schematic diagram which illustrates the structure of an acceleration mechanism. It is a schematic diagram which illustrates the structure of an acceleration mechanism. It is a schematic diagram which illustrates the structure of a rectification | straightening mechanism. It is a schematic diagram which illustrates the structure of a rectification | straightening mechanism. It is a schematic diagram which illustrates the measurement mechanism which can be used in this invention. It is a schematic diagram which illustrates the system which irradiates light to aerosol from light projection means 1402, such as a laser, and monitors the reflected light with light receivers 1404, such as CCD. It is a schematic diagram which illustrates the system which provides the sensor 1406 and measures the number of fine particles of the aerosol which reaches | attains here. It is a schematic diagram which illustrates the system which monitors the weight of aerosol. It is a schematic diagram which illustrates the support scanning mechanism which can be used in this invention. It is a schematic diagram which illustrates the support scanning mechanism which can be used in this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Storage mechanism 2 Supply mechanism 3 Gas supply mechanism 4 Aerosolization mechanism 5 Quantification mechanism 6 Discharge port 7 Base material 8 Structure preparation chamber 9 Exhaust mechanism 10 Conveyance pipe 11 Acceleration mechanism 12 Rectification mechanism 13 Support scanning mechanism 14 Measurement mechanism 15 Solution Crushing mechanism 16 Classification mechanism 17 Support scanning mechanism 18 Pipe 22 Pressurizing means 30 Powder 30P Compact 73 Groove 74 Aerosolization chamber 101 Storage chamber 102 Pressurizing means 103 Pressure contact body 201 Rotary table (rotating body)
201, 203 Groove 205 Belt conveyor 206, 207 Pulley 210 Supply pipe 212 Vibration generating means 214 Compression means 216 Supply pipe 217 Transport means 218 Transport pipe 401 Aerosolization chamber 402 Powder crushing pin 403 Gas introduction port 404 Aerosol outlet port 405, 406 Joint 408 Pressure blocking means 409 Groove sealing portion 412 Oscillating mechanism 414 Crushing means 416 Gas supply pipe 502 Quantification chamber 504 Variable throttle 504A Opening 504S Plate 506 Carry-in pipe 508 Gas introduction pipe 510 Discharge pipe 512 Primary discharge pipe 1106 Channel 1202 Channel 1204 Obstacle 1402 Laser (light projection means)
1404 Light receiver 1406 Sensor 1408 Weight measuring means 1502 Nozzle 1504 Impact plate 1602 Baffle

Claims (17)

A composite structure forming system that forms a composite structure of a structure made of a constituent material of the fine particles and the base material by causing an aerosol in which fine particles are dispersed in a gas to collide with the base material,
A storage mechanism for storing the fine particles;
An aerosolization mechanism for forming an aerosol by dispersing the fine particles in a gas;
A supply mechanism for supplying the fine particles from the storage mechanism to the aerosolization mechanism;
A gas supply mechanism for supplying the gas to the aerosolization mechanism;
A discharge port for injecting the aerosol toward the substrate;
A quantification mechanism for quantifying the concentration of the fine particles in the aerosol;
A composite structure forming system comprising:   The composite structure forming system according to claim 1, wherein the gas supply mechanism supplies pressurized gas. A structure production chamber for accommodating the discharge port and the base material;
An evacuation means capable of maintaining the internal space of the structure manufacturing chamber at a pressure lower than the atmospheric pressure;
The composite structure forming system according to claim 1, further comprising:   The composite structure forming system according to claim 1, further comprising a measuring mechanism that detects a concentration of the fine particles contained in the aerosol.   The composite structure forming system according to claim 4, wherein the quantifying mechanism is controlled based on information detected by the measuring mechanism.   6. The composite structure forming system according to claim 5, wherein the metering mechanism is provided between the aerosolization mechanism or between the aerosolization mechanism and the quantification mechanism.   The composite structure forming system according to any one of claims 1 to 6, wherein the quantification mechanism includes a channel resistance variable unit that changes a resistance of a channel through which the aerosol passes.   8. The composite structure forming system according to claim 7, wherein the flow path resistance varying means is controlled based on information detected by the measuring mechanism.   9. The composite structure forming system according to claim 7, wherein the quantification mechanism further includes a gas introduction port for adding a dilution gas downstream of the flow path resistance varying unit.   10. The composite structure forming system according to claim 9, wherein the amount of the dilution gas added from the gas inlet is controlled based on information detected by the metering mechanism.   The quantification mechanism further has a discharge port for discharging at least a part of the aerosol to a flow path different from the flow path of the flow path resistance variable means on the upstream side of the flow path resistance variable means. The composite structure forming system according to any one of claims 7 to 10.   12. The composite structure forming system according to claim 11, wherein the amount of the aerosol discharged from the discharge port is controlled based on information detected by the metering mechanism.   The composite structure forming system according to any one of claims 1 to 12, further comprising a crushing mechanism that crushes the fine particles contained in the aerosol.   The composite structure forming system according to any one of claims 1 to 13, further comprising a classification mechanism for selecting a particle size of the fine particles contained in the aerosol.   15. The composite according to claim 1, further comprising at least one of an acceleration mechanism for accelerating the aerosol flux and a rectifying mechanism for homogenizing the aerosol flux. Structure formation system.   The composite structure forming system according to claim 1, further comprising a scanning mechanism that changes a relative positional relationship between the discharge port and the base material. A step of dispersing fine particles in a gas to form an aerosol;
Quantifying the concentration of the fine particles in the aerosol;
Forming a composite structure of the base material and the structure made of the constituent material of the fine particles by injecting the quantified aerosol toward the base material;
A method for forming a composite structure, comprising:

Images