JP5428042B2 - Substance supply and metering device, particle processing device, coating device and coating system - Google Patents

Description

  The present invention provides a substance supply and metering device capable of supplying a substance to be supplied from a substance supply container to a receiving unit in a work case and measuring the amount of the substance supplied, and a particle processing apparatus provided with the substance supply and metering device, The present invention relates to a coating apparatus and a coating system.

  As this kind of conventional substance supply and metering device, one in which a meter for measuring the amount of the substance to be fed is arranged inside a work case is known (for example, see Patent Document 1).

JP 11-139562 A (paragraph [0037], FIG. 1)

  However, in the above-described conventional substance supply and weighing device, the accuracy of the measuring instrument is reduced when the temperature or pressure in the work case is significantly different from normal temperature or normal pressure, or the work case is in a corrosive gas atmosphere. There was a risk that it would drop or break down.

  The present invention has been made in view of the above circumstances, and is a substance supply meter that can measure the amount of substance supplied to the receiving unit in the work case without being affected by the atmospheric state in the work case. An object is to provide an apparatus, a particle processing apparatus, a coating apparatus, and a coating system.

  In order to achieve the above object, a substance supply / metering device according to the invention of claim 1 is configured such that a supply substance container containing a supply substance is accommodated in a closed space in the work case and the ceiling wall of the work case is accommodated. The supply substance is discharged from the supply substance container by rotating the supply rotation member around the rotation axis extending in the vertical direction inside the supply substance container, and is disposed at the lower part of the work case. Supply metering that can measure the change in the weight of the entire supply substance container, including the supply substance, supply rotating member, and other contents, with a load measuring instrument as the supply quantity of the supply substance to the receiving part. In the apparatus, the fixed base is fixed to the outside of the work case, and a part or the whole is disposed above the outside of the work case, and is suspended from the fixed base and is disposed above the outside of the work case. A rotation drive source comprising a stator portion that is held non-rotatable, a rotor portion that is rotatably supported by the stator portion and that is arranged coaxially with the supply rotation member, and a work case fixed to the rotor portion. A first coupling magnet disposed on the outside of the ceiling wall, the supply material container and the ceiling wall of the work case, wherein the supply material container can be moved up and down relative to the ceiling wall; A non-rotatable engaging container engaging mechanism, housed in a supply substance container, fixed to a supply rotating member so as to be integrally rotatable, and magnetically coupled in a non-contact state to the first coupling magnet And a second coupling magnet for transmitting the rotation of the rotor part to the supply rotating member and transmitting the weight of the entire supply substance container to the first coupling magnet, and a load measuring instrument, Disposed between the rotation drive source and the fixed base has the characteristics the change in weight of the total feed material container applied to the first coupling magnet at which enables weighing.

  According to a second aspect of the present invention, in the substance supply and metering device according to the first aspect, a plurality of magnet rings in which S magnetic poles and N magnetic poles are alternately arranged in the circumferential direction are coaxially stacked, and different magnetic poles in the axial direction The cylindrical outer magnet is formed by fixing the phases of the magnet rings so that they are adjacent to each other, and the cylindrical or cylindrical shape is loosely fitted inside the outer magnet, and the S magnetic pole and the N magnetic pole are alternately arranged in the circumferential direction. A magnet coupling that allows rotation and axial force to be transmitted with an inner magnet that has a plurality of magnet disks arranged in a line on the same axis, and the phases of the magnet disks are fixed so that different magnetic poles are adjacent in the axial direction. One of the inner magnet and the outer magnet is used as the first coupling magnet, and the other is used as the second coupling. A ring magnet, with the features of the ceiling wall and supply the upper end wall of the material container work cases, was a cylindrical structure corresponding to the inner magnet and the outer magnet.

  According to a third aspect of the present invention, in the substance supply and metering device according to the first aspect, a plurality of magnet rings, in which S magnetic poles and N magnetic poles are alternately arranged in the circumferential direction, are stacked on the same axis, and different magnetic poles in the axial direction. The cylindrical outer magnet is formed by fixing the phases of the magnet rings so that they are adjacent to each other, and the cylindrical or cylindrical shape is loosely fitted inside the outer magnet, and the S magnetic pole and the N magnetic pole are alternately arranged in the circumferential direction. A magnet coupling that allows rotation and axial force to be transmitted with an inner magnet that has a plurality of magnet disks arranged in a line on the same axis, and the phases of the magnet disks are fixed so that different magnetic poles are adjacent in the axial direction. And the inner magnet is the first coupling magnet, while the outer magnet is the second coupling magnet. A first cylindrical hollow protrusion formed by closing the upper end of the outer cylindrical wall and the inner cylindrical wall concentrically with a donut-shaped disk is provided on the ceiling wall of the work case. An inner magnet is rotatably loosely fitted inside the inner cylindrical wall of the cylindrical hollow protrusion, and the upper end of the supply substance container is concentrically arranged with the outer cylindrical wall and the upper end of the inner cylindrical wall being a donut-shaped circle. A second cylindrical hollow protrusion formed by closing with a plate is provided, and an outer magnet is rotatably fitted between the outer cylinder wall and the inner cylinder wall of the second cylindrical hollow protrusion, and the second The cylindrical hollow protrusion of the inner magnet is loosely fitted between the outer cylinder wall and the inner cylinder wall of the first cylindrical hollow protrusion so that each magnet disk of the inner magnet is placed inside each magnet ring of the outer magnet. It is characterized by being arranged and magnetically coupled.

  According to a fourth aspect of the present invention, in the substance supply and weighing device according to any one of the first to third aspects, the load measuring device is opposed to the upper side of the ceiling wall of the work case, and the stator portion of the rotational drive source is provided at the center. The outer horizontal plate is fixed, the inner horizontal plate that protrudes laterally from the supply substance container, sandwiches the ceiling wall of the work case, and faces the outer horizontal plate from below. A plurality of first auxiliary magnets fixed at a plurality of positions that are point-symmetric with respect to the stator portion of the source, and fixed at positions facing each of the plurality of first auxiliary magnets of the inner horizontal plate in the vertical direction; It is characterized in that it includes a plurality of second auxiliary magnets magnetically coupled to the first auxiliary magnets.

  A fifth aspect of the present invention is the substance supply and weighing device according to any one of the first to fourth aspects, wherein the closed space in the work case is hermetically sealed.

  A sixth aspect of the present invention is the substance supply and metering device according to any one of the first to third aspects, wherein the supply port is formed in the supply substance container and is always open upward or sideward, and a work case. And a supply pipe for replenishing the supply substance inside the replenishment port in a non-contact state with the supply substance container.

  A seventh aspect of the present invention is the substance supply and metering device according to the sixth aspect, further comprising a sealing member that seals a portion of the work case through which the replenishment pipe penetrates, and the closed space in the work case is in an airtight state. It has a sealed space that is sealed and arranged outside the work case and communicates with the inside of the work case via a replenishment pipe, and supplies the material contained in the sealed space to the supply material container via the replenishment pipe. It is characterized by a possible supply machine.

  According to an eighth aspect of the present invention, in the substance supply and metering device according to the seventh aspect, the replenisher includes a sealed container having a sealed space inside, a chute that penetrates the upper end wall of the sealed container in an airtight state, and the chute And a pair of valves that can respectively close the upper end side and the lower end side of the chute.

  A ninth aspect of the present invention is the substance supply and weighing device according to any one of the first to eighth aspects, wherein the supply substance is a granular material, and the supply substance container has a powder opened downward or laterally. A granular material discharge port is provided, and it is characterized in that a load is applied to the granular material by the supply rotating member and discharged to the outside of the granular material discharge port.

  A tenth aspect of the present invention is the substance supply and metering device according to the ninth aspect, wherein the granular material discharge port is formed in the bottom wall of the supply material container and opens downward, and the granular materials adhere to each other. The supply rotating member is swiveled around the rotation axis and extends toward the bottom wall to apply an external force to the granular arch, Are provided with a plurality of arch crushing legs for forcibly dropping the granule from the granule outlet to the bottom wall, and the plurality of arch crushing legs are formed between the lower end and the bottom wall. It is characterized in that it includes a first arch crushing leg portion having a relatively small distance and a second arch crushing leg portion having a relatively large distance between the lower end portion and the bottom wall.

  The invention according to claim 11 is the substance supply and metering device according to claim 9, wherein the particulate discharge port is formed in the side wall of the supply substance container and opens to the side, and the supply rotation member is connected to the rotation shaft. It has a feature in that it is provided with a powder extruding piece that extends toward the rear in the rotation direction toward the side wall of the supply substance container and pushes out the powder from the powder discharge port by rotation.

  According to a twelfth aspect of the present invention, in the substance supply / metering device according to any one of the first to eighth aspects, the supply substance is a liquid, and a pressure is applied to the liquid by a supply rotation member in the supply substance container. It is characterized in that a pump mechanism is provided for discharging out of the supply substance container. Instead of the pump mechanism, the supply rotating member may be a needle valve or the like, and the liquid may be discharged out of the supply substance container by gravity.

  A thirteenth aspect of the present invention is the substance supply and metering device according to any one of the first to eighth aspects, wherein the supply substance is a wire, and the receiving part is held in a state where the wire can be melted or dissolved, and the supply substance is accommodated. The wire is provided with a wire rod guide pipe that is inserted through the wire rod and guided to the receiving portion. The wire rod is wound around the supply rotating member, and the wire rod is rotated from the supply rotating member to the wire rod guide pipe by the rotation of the supply rotating member. It is characterized in that it is supplied.

  A fourteenth aspect of the present invention is the substance supply and weighing device according to any one of the first to thirteenth aspects, wherein the work case has a container structure and stores liquid as a receiving portion, and supplies the supply substance from the supply substance container to the liquid. It has a feature that it can be supplied.

  According to a fifteenth aspect of the present invention, there is provided a particle processing apparatus according to any one of the first to eleventh aspects of the present invention, the ultrasonic vibrator and the reflecting plate arranged opposite to each other in the receiving part of the work case. A standing wave sound field is formed by resonating ultrasonic waves between the ultrasonic transducer and the reflector, and the powder discharged from the supply substance container is in the air at the position of the ultrasonic node that resonates in the standing wave sound field. A standing wave sound field generating device that can be held in a liquid, gas, heat, and plasma are applied to the standing wave field to form an atmosphere field for processing, and the particles of the granular material held in the air It is characterized in that it is provided with a powder body processing means for processing the material.

  According to a sixteenth aspect of the present invention, in the particle processing apparatus according to the fifteenth aspect, the ultrasonic transducer and the reflecting plate are arranged to face each other in the vertical direction, and the ultrasonic transducer and the reflecting plate are arranged in the vertical direction. The granular material passageway penetrating through is formed on the same axis, and the granular material from the supply substance container passes through one granular material passageway of the ultrasonic vibrator or the reflector to form a standing wave sound field. When it is supplied and the standing wave sound field is extinguished, it passes through the other granular material passage of the ultrasonic vibrator or reflector so that it is discharged downward from between the ultrasonic vibrator and reflector. It has the characteristics in that place.

  The invention according to claim 17 is the particle processing apparatus according to claim 15 or 16, wherein a plurality of ultrasonic nodes are formed in the standing wave sound field, and the particles can be held at each node. The body processing means is characterized in that a liquid, gas, heat, and plasma can be applied to the powder particles held in each section of the ultrasonic wave.

  A particle processing apparatus according to an invention of claim 18 includes the substance supply and weighing device according to any one of claims 1 to 11, and is fixed to the ceiling wall of the work case so that the entire supply substance container is in a non-contact state. An inner case is provided with a discharge port at the lower end, and the upper end opening of the plasma generation tube whose upper and lower ends are open is connected to the discharge port. It is characterized in that it is transported to a plasma generation tube as a receiving portion by the gas supplied to the inner case, and in this state, the powder is processed with plasma by generating plasma in the plasma generation tube.

  The invention according to claim 19 is characterized in that, in the particle processing apparatus according to claim 18, the plasma generation tube has a cylindrical inner surface, and a gas for plasma generation is supplied along a tangent to the inner surface of the cylinder. Have.

  A particle processing apparatus according to an invention of claim 20 is provided between the substance supply and weighing device according to any one of claims 1 to 11 and the bottom wall of the work case and the supply substance container in the closed space in the work case. Granule processing that forms a processing atmosphere field by applying liquid, gas, heat, and plasma around the powder that is placed and discharged downward from the supply substance container. Means, a receptacle located in the work case below the processing atmosphere, and a receptacle for receiving the processed powder and a bottom wall of the work case, the receptacle can be moved up and down And a receptacle guide for guiding the immovability of the horizontal movement, and a granule weight measuring instrument arranged vertically below the receptacle in the outer region of the bottom wall of the work case, the granular weight measuring instrument and the receptacle, Attach magnets that repel each other to the processed powder Having said weight was possible to measure at the granular weight of the instrument.

  A coating apparatus according to a twenty-first aspect of the present invention is disposed between the substance supply and weighing device according to any one of the first to eleventh aspects and a bottom wall of the work case and a supply substance container in a closed space in the work case. The granular material processing means for melting, sublimating or ionizing the granular material discharged downward from the supply substance container, and the lower surface in the work case, while holding and moving the workpiece, the surface of the workpiece And an inner actuator capable of adhering a constituent of molten or sublimated or ionized granular material, and forming a coating layer with the constituent of the granular material adhering to the surface of the workpiece .

  A coating system according to an invention of claim 22 comprises a plurality of coating apparatuses according to claim 21, wherein the coating layers having different compositions can be formed by the coating apparatuses, and a common outer actuator is provided for each coating apparatus. The outer actuator is provided outside the work case, and the outer actuator is characterized in that the workpiece is transferred to and from each inner actuator of each coating apparatus.

  According to a twenty-third aspect of the present invention, in the coating system according to the twenty-second aspect, a heating furnace for heating the workpiece in a reduced pressure state is provided, and gas is removed or etched from the workpiece before the coating layer is formed. Has characteristics.

[Invention of Claim 1]
According to the first aspect of the present invention, the supply substance container is accommodated in the work case by magnetically coupling the first coupling magnet and the second coupling magnet in a non-contact state. The rotation of the rotor of the rotational drive source is suspended from the ceiling wall and the rotation of the rotor of the rotational drive source is transmitted to the supply rotating member, and the weight of the entire supply substance container including the contents is increased from the second coupling magnet to the first coupling. Is transmitted to the magnet. Then, by arranging the load measuring device between the rotation drive source and the fixed base, the change in the weight of the entire supply substance container applied to the first coupling magnet, that is, the supply to the receiving unit It becomes possible to measure the supply amount of the substance.

  As described above, according to the present invention, the supply amount can be measured in a state where the load measuring device for measuring the supply amount of the supply substance to the receiving unit is arranged outside the work case. The supply amount can be measured without being affected by the ambient conditions such as temperature, pressure, and gas.

[Inventions of Claims 2 and 3]
According to the invention of claim 2, since each magnet disk constituting the inner magnet is arranged inside each magnet ring constituting the outer magnet and is individually magnetically coupled, the first coupling magnet Rotation and axial force can be reliably transmitted between the first coupling magnet and the second coupling magnet.

  Here, either the inner magnet or the outer magnet may be the first coupling magnet, but when the inner magnet is the first coupling magnet and the outer magnet is the second coupling magnet. The configuration is as follows.

  That is, as in the third aspect of the invention, the first cylindrical hollow protrusion is provided on the ceiling wall of the work case, and the inner magnet is loosely fitted inside the inner cylinder wall so as to rotate freely. A second cylindrical hollow protrusion is provided on the part, and an outer magnet is freely loosely fitted between the outer cylinder wall and the inner cylinder wall, and the second cylindrical hollow protrusion is connected to the first cylindrical hollow protrusion. It is loosely fitted between the outer cylinder wall and the inner cylinder wall so as to be linearly movable. As a result, the outer magnet and the inner magnet are magnetically coupled with the inner cylindrical walls of the first and second cylindrical hollow protrusions interposed therebetween.

[Invention of claim 4]
According to invention of Claim 4, the force which suspends a supply substance container from a ceiling wall can be strengthened by the magnetic coupling of a 1st auxiliary magnet and a 2nd auxiliary magnet. That is, even if the entire weight including the contents becomes heavier, the supply substance container can be suspended.

[Invention of claim 5]
According to the fifth aspect of the present invention, the supply substance can be supplied in a state where the closed space of the work case is maintained in a predetermined atmosphere state (temperature, pressure, gas atmosphere).

[Invention of claim 6]
According to the invention of claim 6, the magnetic coupling of the magnetic coupling (the first coupling magnet and the second coupling magnet) is maintained, that is, without removing the supply substance container from the work case. The supply substance container can be replenished with the supply substance.

[Invention of Claim 7]
According to the seventh aspect of the present invention, the supply substance can be replenished to the inside of the supply substance container while the atmosphere state in the closed space of the work case and the magnetic coupling of the magnetic coupling are maintained.

[Invention of Claim 8]
According to the eighth aspect of the present invention, the supply substance can be replenished to the sealed container while keeping the hermeticity of the sealed container by supplying the supply substance to the hopper and operating the pair of valves as follows. . That is, by closing the lower valve and opening the upper valve, the supply substance is accumulated in the upper part of the chute, and then the upper valve is closed and the lower valve is closed. By opening, the feed material accumulated between the pair of valves in the chute is allowed to flow down into the sealed container.

[Invention of claim 9]
According to the ninth aspect of the present invention, when the supply rotation member rotates in the supply substance container in response to the power of the rotation drive source, a load is applied to the granular material in the supply substance container by the rotation, and the supply is performed. A granular material can be discharged | emitted from the granular material discharge port open | released toward the downward direction or the side of the substance container.

[Invention of Claim 10]
According to invention of Claim 10, a granular material is discharged | emitted from the granular material discharge port of a bottom wall because an arch grinding | pulverization leg part grind | pulverizes a granular material arch. Here, when the rotational speed of the supply rotating member is relatively low, the second arch crushing leg may apply an external force enough to collapse the granular arch only by passing over the granular arch. Only the first arch crush leg breaks the granule arch.

  On the other hand, when the rotation speed of the supply rotating member is relatively high, the powder arch is broken by the powder flowing downward, that is, toward the bottom wall by the guide of the second arch crushing leg. It is. That is, both the first and second arch crushing legs break the granular arch. That is, by increasing the rotation speed of the supply rotation member, the discharge amount per rotation of the supply rotation member can be increased from that at the low speed.

[Invention of Claim 11]
According to the invention of claim 11, when the supply rotating member rotates in the supply substance container, the powder substance is pushed to the side by the powder particle extruding piece, and the powder substance provided on the side wall of the supply substance container It is pushed out from the outlet.

[Invention of Claim 12]
According to the twelfth aspect of the present invention, when the supply rotation member rotates in the supply substance container by receiving the power of the rotation drive source, pressure is applied to the liquid as the supply substance in the supply substance container by the rotation. The liquid can be discharged out of the supply substance container.

[Invention of Claim 13]
According to the thirteenth aspect of the present invention, when the supply rotation member rotates in the supply substance container in response to the power of the rotational drive source, the wire as the supply substance wound around the supply rotation member is caused by the rotation. It is sent out to the pipe. The wire is guided to the receiving unit through the wire guide pipe, melted or dissolved in the receiving unit, and separated from the subsequent wire. The weight of the separated part can be measured with a load measuring device.

[Invention of Claim 14]
According to the fourteenth aspect, the supply substance can be supplied to the liquid serving as the receiving unit stored in the work case.

[Inventions of Claims 15 and 16]
According to the particle processing apparatus of claim 15, the standing wave sound field is formed in the receiving part of the work case, and the powder discharged from the supply substance container in the air at the position of the sound pressure node in the standing wave sound field. Granules are retained. And the particle | grains of a granular material can be processed by providing a liquid, gas, a heat | fever, and plasma with respect to the granular material hold | maintained in the air. Here, only one of liquid, gas, heat, and plasma may be applied, or a plurality may be applied in combination. Further, the ultrasonic transducer and the reflecting plate for forming the standing wave sound field only need to be arranged to face each other, and the facing direction may be the horizontal direction, or may be the vertical direction as in the invention of claim 16. . In the case of opposing arrangement in the vertical direction, the granular material is supplied to the standing wave sound field by forming a granular material passageway penetrating in the vertical direction in both the ultrasonic transducer and the reflector. In addition, it is possible to discharge downward from between the ultrasonic transducer and the reflecting plate.

[Invention of Claim 17]
According to the seventeenth aspect of the present invention, it is possible to perform the processing a plurality of times on the granular material in the standing wave sound field. Moreover, more powder particles can be processed simultaneously.

[Invention of Claim 18]
According to the invention of claim 18, the particles of the granular material can be processed with plasma. Here, plasma processing may be performed while introducing liquid or gas into the plasma generation tube.

[Invention of Claim 19]
According to the nineteenth aspect of the present invention, the plasma generating gas becomes a swirling flow along the cylindrical inner surface of the plasma generating tube and covers the inner surface of the plasma generating tube. Adhesion of particles can be prevented. Further, by conveying the ion particles and the granular material by the swirling flow, the ion particles and the granular material can be retained for a long time in the plasma generation tube. A magnetic field may be applied to the plasma generation tube.

[Invention of Claim 20]
According to the invention of claim 20, magnets that repel both the powder weight measuring device disposed in the outer region of the bottom wall of the work case and the receiver that receives the processed powder are attached, Using the repulsive force between the magnets, the weight of the processed granular material can be measured with a granular material weight measuring instrument arranged in the outer region of the work case. Here, since the receptacle is guided so as to be vertically movable and not horizontally movable in the vertical direction of the granular material weight measuring instrument, the position of the receptacle with respect to the granular weight measuring instrument is stabilized.

[Invention of Claim 21]
According to the coating apparatus of claim 21, the granular material discharged from the supply substance container is melted, sublimated or ionized by the granular material processing means, and the melted, sublimated or ionized component of the granular material is applied to the workpiece. Adhere to form a coating layer. At this time, the coating layer can be formed at an arbitrary position of the workpiece by holding and moving the workpiece by the inner actuator. Here, a liquid or a gas may be introduced into the granular material processing means, and they may be vaporized or ionized together with the granular material to adhere to the surface of the workpiece.

[Invention of Claim 22]
According to the coating system of claim 22, a plurality of coating layers having different compositions can be formed on the surface of the workpiece. When transporting a workpiece from one coating device to another coating device, the supplied outer actuator provided outside the work case receives the workpiece from the inner actuator of one coating device and transfers it to the inner actuator of the other coating device. Hand over the workpiece.

[Invention of Claim 23]
According to the invention of claim 23, it is possible to form a good coating layer by removing or etching the gas from the surface of the work before the coating layer is formed.

The front view of the substance supply measuring device concerning a 1st embodiment of the present invention. Partial sectional view of substance supply and weighing device Perspective view of substance supply metering device viewed from above Side view of replenisher Side view of supply drum Side sectional view of male and female couplers in magnetic coupling state Plan view of magnetically coupled magnet ring and magnet disk Cross-sectional perspective view of supply drum Top view of the supply rotation member in the supply drum Perspective view of supply rotation member Cross-sectional perspective view of the lower end of the supply drum Plan view of supply rotating member and screen plate Sectional drawing showing the state which the 1st turning leg part has collapsed the granular material arch Sectional drawing showing the state which the 1st and 2nd turning leg part has broken the granular material arch Partial side sectional view of replenisher (A) Side cross-sectional view of the lower end of the supply pipe, (B) Perspective view Partial sectional view of the middle part of the supply pipe Front view of substance supply and weighing device and work case according to second embodiment Partial sectional view of work case Partial sectional view of a substance supply and weighing device according to a modified example Sectional drawing of the substance supply measuring device concerning a 3rd embodiment Sectional drawing of the substance supply measuring device concerning a 4th embodiment Front view of particle processing apparatus according to fifth embodiment Cross section of standing wave sound field floating device Partial cross-sectional view showing the state where the magnets repel each other between the receiver and the granular material measuring instrument Front view of standing wave sound field floating device according to modification Front view of particle processing apparatus according to sixth embodiment Side view of plasma torch The top view of the coating system concerning a 7th embodiment Partial sectional view of the coating module Partial sectional view of solution vaporizer (A) Side view, (B) Side sectional view of a supply drum according to an eighth embodiment (A) Perspective view of supply rotation member, (B) Plane cross-sectional view showing a state in which the extruded granular material extrudes the granular material Front view of substance supply and weighing device according to ninth embodiment (A) Side sectional view of auxiliary coupling mechanism, (B) Side sectional view of auxiliary coupling mechanism according to modification. (A) Side sectional view of auxiliary coupling mechanism according to modification, (B) Side sectional view of auxiliary coupling mechanism according to modification.

[First Embodiment]
Hereinafter, the substance supply and weighing device 100 according to the first embodiment of the present invention will be described with reference to FIGS. As shown in FIG. 1, the substance supply and metering device 100 includes a supply unit 10 that supplies a granular material as a supply substance to a closed space in a work case 400, and a replenishment for supplying the supply unit 10 with the granular material. Machine 200 and a measuring instrument 300 (corresponding to the “load measuring instrument” of the present invention) for measuring the weight of the granular material supplied from the supply machine 10 into the work case 400.

  The work case 400 has, for example, a box structure having an opening 401 only on one side surface thereof, and includes a door 402 that can close the opening 401 and an intake / exhaust pipe 403. The intake / exhaust pipe 403 communicates with the inside and outside of the work case 400 and protrudes to the side, so that a pump or a gas supply source (not shown) can be connected. When the door 402 is closed, the closed space in the work case 400 can be sealed in an airtight state, and the work case 400 has a predetermined atmosphere (for example, a predetermined pressure or air different from atmospheric pressure). Different gas atmospheres).

  A cylindrical hollow protrusion 413 (corresponding to the “first hollow cylindrical protrusion” of the present invention) is formed in the center of the ceiling wall 410 of the work case 400. As shown in FIG. 4, the hollow cylindrical protrusion 413 protrudes above the work case 400 and opens to the inner surface side. The hollow cylindrical protrusion 413 has a cylindrical structure in which a central portion is depressed when viewed from the upper surface side of the ceiling wall 410. Specifically, the hollow cylindrical protrusion 413 surrounds the side of the inner cylinder wall 413B with the outer cylinder wall 413A concentric with the inner cylinder wall 413B, and closes the lower end of the inner cylinder wall 413B with the center wall 413C. The upper end portions of the outer cylindrical wall 413A and the inner cylindrical wall 413B are closed by joining them with a donut-shaped annular wall 413D, and the lower end is opened between the inner cylindrical wall 413B and the outer cylindrical wall 413A. A cylindrical space (opened inside the work case 400) is formed.

  As shown in FIG. 1, a fixed base 310 is fixedly placed on the top surface of the ceiling wall 410 of the work case 400. The fixed base 310 has a table shape in which a pair of side plates hang down from both sides of the horizontal base plate 311 toward the ceiling wall 410, and a measuring instrument 300 (for example, an electronic balance or a base scale) is provided on the top surface of the base plate 311. ) Is placed (see FIG. 3).

  A movable base 320 that can move up and down while being separated from the ceiling wall 410 is provided above the work case 400. The movable base 320 has a vertically long rectangular frame structure. As shown in FIG. 3, in the movable base 320, the exact center portion of the upper horizontal bar 322 </ b> A extending in the horizontal direction is placed on the platform 301 of the measuring instrument 300. In the movable base 320, a pair of side bars 321 and 321 extending in the vertical direction penetrates the base plate 311 in a non-contact manner and hangs down to a position near the ceiling wall 410 of the work case 400. The lower horizontal bar 322 </ b> B that connects the lower ends of the pair of side bars 321 and 321 extends in the horizontal direction at a position spaced above the ceiling wall 410. Further, a hollow cylindrical protrusion 413 provided on the ceiling wall 410 of the work case 400 passes through the central portion in the horizontal direction of the lower horizontal bar 322B in a non-contact state (see FIG. 5).

  As shown in FIG. 1, the supply machine 10 includes a supply drum 11 (corresponding to a “supply substance container” of the present invention) housed in a closed space of the work case 400 and suspended from the ceiling wall 410, A motor 50 (corresponding to the “rotation drive source” of the present invention) disposed outside the work case 400 is provided.

  As shown in FIG. 5, the motor 50 is held by the movable base 320 in a state of being separated from the ceiling wall 410 of the work case 400, specifically, the position directly above the hollow cylindrical protrusion 413. In order to hold the motor 50, the lower horizontal bar 322 </ b> B of the movable base 320 is provided with a gate-shaped motor support portion 330 so as to straddle the hollow cylindrical protrusion 413. A shaft through hole 332 is formed at a position directly above the protrusion 413 (the center in the left-right direction).

  On the other hand, a step 50A is formed along the outer edge of the lower end surface of the motor 50 (stator 50S), and the step 50A is non-rotatably fitted inside the shaft through hole 332. . As a result, the motor 50 is locked to the upper surface of the motor support 330, and relative rotation with respect to the motor support 330 and movement in the horizontal direction are prohibited.

  An output shaft 52 is connected to the rotor 50 </ b> R of the motor 50. The output shaft 52 protrudes from the lower surface of the motor 50 and passes through the shaft through hole 332.

  Of the feeder 10, the supply drum 11 can accommodate the granular material and can be discharged downward. As shown in FIG. 5, the supply drum 11 includes a large-diameter cylindrical portion 12 and a small-diameter cylindrical portion 13, and an intermediate step wall 14 is provided between the lower end portion of the large-diameter cylindrical portion 12 and the upper end portion of the small-diameter cylindrical portion 13. Are connected by The small-diameter cylindrical portion 13 protrudes vertically downward from the center of the intermediate stepped wall 14, and the powder particles accommodated in the large-diameter cylindrical portion 12 are discharged downward through the inside of the small-diameter cylindrical portion 13.

  The upper end of the large diameter cylindrical portion 12 is open and is closed by a large diameter cap 15. The large diameter cap 15 is screwed onto the outer peripheral surface of the upper end of the large diameter cylindrical portion 12.

  The large-diameter cap 15 is formed with a supply port 15A that is always open facing upward. The replenishing port 15A is provided unevenly at a position deviated from the center of the large-diameter cap 15, and the granular material can be received from a replenisher 200 described later via the replenishing port 15A.

  A center hole 15 </ b> B is formed through the center of the large-diameter cap 15. An in-container rotation shaft 20 is rotatably supported in the center hole 15B via a bearing 16. The in-container rotation shaft 20 is connected to the output shaft 52 of the motor 50 by a magnet coupling mechanism, which will be described later, and is rotated by receiving the torque of the motor 50. The bearing 16 is, for example, a “sliding bearing”, and has a cylindrical shape that penetrates the shaft center portion so that the in-container rotation shaft 20 can be slidably contacted, and the upper end portion projects sideways to open the center hole 15B. Locked to the edge. The bearing 16 is made of resin (specifically, PTFE resin) having a small frictional resistance on the entire surface or the sliding surface with the in-container rotation shaft 20. The bearing 16 may be a thrust bearing.

  A cylindrical screwing wall 15C stands on the upper surface of the large-diameter cap 15 from a side position of the center hole 15B. A male spiral is formed on the outer peripheral surface of the cylindrical screwing wall 15C, and a small-diameter cap 17 is screwed therein. The small-diameter cap 17 has a cylindrical shape that is long in the axial direction, and the upper portion of the small-diameter cap 17 has a small diameter via a stepped portion from the lower end portion screwed with the cylindrical screwing wall 15C.

  The portion above the step portion of the small diameter cap 17 is inserted into the cylindrical space inside from the lower end opening (opening of the inner surface of the ceiling wall 410) of the hollow cylindrical projection 413, and is loosely fitted so as to be linearly movable. Specifically, the side of the inner cylindrical wall 17B is surrounded by an outer cylindrical wall 17A concentric with the inner cylindrical wall 17B, the lower end portion of the inner cylindrical wall 17B is closed with the central wall 17C, and the outer cylindrical wall 17A. The upper end portions of the inner cylindrical wall 17B are joined and closed by a donut-shaped annular wall 17D. And the upper end part of the small diameter cap 17 is inserted between the outer cylinder wall 413A and the inner cylinder wall B of the hollow cylindrical protrusion 413. The small diameter cap 17 corresponds to a “second cylindrical hollow protrusion” according to the present invention.

  Concavity and convexity engaging portions 60, 60 are formed between the peripheral portion (see FIG. 4) of the lower end opening of the hollow cylindrical protrusion 413 and the step portion formed on the outer peripheral surface of the small-diameter cap 17 on the inner surface of the ceiling wall 410. Is formed. The concave and convex engaging portions 60 and 60 are provided at two positions 180 degrees apart from each other in the circumferential direction of the small-diameter cap 17 and the hollow cylindrical protrusion 413, and the pin 17P and the pin hole 410P that are concave and convex engaged in the vertical direction, respectively. It consists of By the concave and convex engaging portions 60, 60, the output shaft 52 of the motor 50 and the in-container rotation shaft 20 supported by the supply drum 11 are positioned on the same axis. Further, relative rotation of the supply drum 11 with respect to the ceiling wall 410 and movement in the horizontal direction are prohibited in a state where the supply drum 11 can be moved up and down with respect to the ceiling wall 410. The uneven engagement portion 60 corresponds to the “container engagement mechanism” of the present invention.

  As shown in FIG. 5, the entire container rotation shaft 20 is accommodated in the supply drum 11 and extends along the central axis of the large-diameter cylindrical portion 12. An upper end portion of the in-container rotation shaft 20 extends through the large-diameter cap 15 and extends inside the small-diameter cap 17, and a supply rotation member 21 is attached to the lower end portion.

  Inside the large-diameter cylindrical portion 12 of the supply drum 11, an in-container disk 30 and an upper surface standby guide 31 are provided. The in-container disk 30 is disposed in the center of the lower end portion of the large diameter cylindrical portion 12 and is loosely fitted inside the large diameter cylindrical portion 12. That is, the container inner disk 30 is a flat disk having a diameter smaller than the inner diameter of the large-diameter cylindrical portion 12 and larger than the inner diameter of the small-diameter cylindrical portion 13, and above the intermediate step wall 14 and the supply rotating member 21. It is mounted horizontally at a slight distance. The in-container disk 30 is fixed to the in-container rotation shaft 20 and rotates integrally with the supply rotation member 21 in the large diameter cylindrical portion 12. The granular material charged into the supply drum 11 from the supply port 15A of the large-diameter cap 15 is accumulated on the intermediate step wall 14 and the container disc 30.

  The upper surface standby guide 31 scrapes the granular material deposited on the container inner disk 30 into an annular space 38 (see FIG. 5) formed between the container inner disk 30 and the side wall of the large-diameter cylindrical portion 12. It is provided for. The upper surface standby guide 31 has an L shape. Specifically, the vertical plate 31A hanging from the upper end wall of the large-diameter cap 15 toward the intermediate stepped wall 14 and the inner circular plate 30 extending from the lower end portion of the vertical plate 31A toward the center of the large-diameter cylindrical portion 12. And a horizontal plate 31B disposed adjacent to the upper surface of the.

  As shown in FIG. 8, the horizontal plate 31B is attached in contact with the side surface of the in-container rotation shaft 20, thereby the horizontal plate 31B with respect to the rotation direction of the in-container disc 30 (the direction of the solid arrow in FIG. 8). Is inclined, and the granular material on the inner disc 30 is guided by the horizontal plate 31B and pushed out toward the edge of the inner disc 30. The horizontal plate 31 </ b> B extends to a position adjacent to the side wall of the large diameter cylindrical portion 12, and causes the extruded powder particles to flow down from the annular space 38 onto the intermediate step wall 14. Furthermore, since the container disc 30 and the upper surface standby guide 31 cooperate to stir the powder in the large-diameter cylindrical portion 12, the granular material is hardened or clogged in the large-diameter cylindrical portion 12. Can be prevented. Thereby, it becomes possible to flow down the granular material on the upper part of the inner disc 30 to the intermediate step wall 14 stably.

  As shown in FIG. 5, the powder particles that have flowed down from the annular space 38 to the intermediate step wall 14 have a predetermined repose angle between the outer edge portion of the container inner disk 30 and the intermediate step wall 14. Form a mountain. The angle of repose of the granular mountain is constant depending on the granular material, and the granular mountain becomes a “weir”, so that excessive granular material is not supplied from the inner disc 30 to the intermediate step wall 14. ing. In other words, it is possible to prevent the granular material from flowing into the small-diameter cylindrical portion 13 while the supply rotating member 21 is stopped.

  In the intermediate stepped wall 14, the granular piles deposited along the side wall of the large-diameter cylindrical portion 12 are scraped off by the supply rotating member 21 whose skirt portion rotates within the large-diameter cylindrical portion 12. It is sent to. As described above, the supply rotation member 21 is fixed to the in-container rotation shaft 20, and is cantilevered laterally from the central plate portion 25 through which the in-container rotation shaft 20 penetrates as shown in FIGS. The dust-collecting feathers 23 and the dusting feathers 24 extend. The dust collection blades 23 and the dust distribution blades 24 rotate in a horizontal plane while being in sliding contact with the upper surface of the intermediate step wall 14.

  As shown in FIG. 9, the dust collection blade 23 has a bent structure in which a plurality of flat plates are connected so as to swell on the opposite side to the rotation direction of the supply rotation member 21 (the direction of the solid line arrow in FIG. 9). 24 extends straight from the central plate portion 25 toward the side wall of the large-diameter cylindrical portion 12 in a state inclined with respect to the rotation direction of the supply rotating member 21. Further, the dust collection blade 23 extends to a position where the tip thereof is adjacent to the side wall of the large-diameter cylindrical portion 12, and the dust collection blade 24 is shorter than that.

  Of the intermediate step wall 14, the granular material deposited along the side wall of the large diameter cylindrical portion 12 is guided to the center side of the intermediate step wall 14 by the powder collecting blades 23 and sent to the small diameter cylindrical portion 13. The granular material that has not entered the small-diameter cylindrical portion 13 is pushed back to the outside of the intermediate step wall 14 by the dust wings 24 and then taken into the small-diameter cylindrical portion 13 when the powder collection wings 23 pass. In addition, the powder body pressure in the small diameter cylindrical portion 13 is easily stabilized. Moreover, the powder collection feather | wing 23 and the dust wing | blade 24 agitate a granular material, and pulverize the lump of a granular material. Furthermore, when the powder is a mixture of two or more kinds of powder, the degree of mixing can be increased.

  An auxiliary guide wall 22 that is obliquely cut and raised from the central plate portion 25 is formed at the base portion 25 </ b> A of the powder collection blade 23 in the central plate portion 25 of the supply rotating member 21. The auxiliary guide wall 22 is inclined so as to gradually descend in the direction in which the granular material is guided by the powder collection blades 23 (the direction of the dotted arrow in FIG. 6). Then, the granular material that has been guided by the powder collection blades 23 and has reached the base end portion thereof is forcibly dropped to the small diameter cylindrical portion 13 by the auxiliary guide wall 22.

  As shown in FIG. 5, a screen plate 33 is detachably attached to the lower end portion of the small diameter cylindrical portion 13 in the supply drum 11. As shown in FIGS. 11 and 12, the screen plate 33 has a structure in which a thin disk is formed by penetrating a plurality of slits 33 </ b> A extending in a direction intersecting the turning direction of the supply rotation member 21. Specifically, each slit 33 </ b> A extends in a curved manner toward the rear in the rotation direction of the supply rotation member 21 (in the direction of the solid line arrow in FIG. 12) as it goes outward from the center of the screen plate 33.

  Each of the slits 33A is closed by a powder arch formed by adhering (crosslinking) the powder particles fed into the small-diameter cylindrical portion 13, and the powder arch is in a collapsed state. The body can pass through. In the present embodiment, a plurality of types of screen plates 33 having different shapes of the slits 33A are prepared, and the screen plate 33 suitable for the granular material is arbitrarily selected before using the substance supply and weighing device 100. Can be attached. Instead of the screen plate 33, punching metal, expanded metal, or woven net may be used.

  As shown in FIG. 5, the screen plate 33 is fixed to the lower end portion of the small-diameter cylindrical portion 13 by a support nut 34 screwed to the outer peripheral surface of the small-diameter cylindrical portion 13. As shown in FIG. 11, the support nut 34 has a structure in which a flange wall 34B projects from the lower end portion of the threaded cylinder portion 34A screwed to the small diameter cylinder portion 13 toward the center. The outer edge portion of the screen plate 33 is sandwiched in the plate thickness direction between the step portion 13A formed on the inner peripheral edge at the lower end of the tube portion 13. Further, a bottomed discharge port cap 35 (see FIG. 11) can be screwed onto the outer peripheral surface of the support nut 34, and the discharge port cap 35 is below the screen plate 33 (the lower end opening of the small diameter cylindrical portion 13). ) Can be sealed.

  As shown in FIG. 10, the supply rotating member 21 includes first to third swivel legs 26, 27, and 28 extending downward from the central plate 25 in addition to the dust collection blades 23 and the dusting feathers 24. Are provided integrally. As shown in FIG. 5, the first to third swivel legs 26, 27, and 28 are all capable of swiveling inside the small-diameter cylindrical portion 13.

  The first swivel legs 26 are paired and are arranged side by side with a space therebetween. The 1st turning leg part 26 is extended below from the base part 25B of the dust blade 24 among the center board parts 25, and has comprised the mutually parallel strip | belt plate shape. The second swivel leg portion 27 extends downward from the base portion 25A of the powder collection blade 23 in the central plate portion 25, and has a width viewed from the front in the swivel direction from the first swivel leg portion 26. It has a wide strip shape (see FIG. 5). These first and second swivel legs 26 and 27 are provided at positions separated from each other by 180 degrees, and as shown in FIGS. It extends diagonally to head toward. In addition, although the inclination of the 1st and 2nd turning leg parts 26 and 27 is about 30 degree | times with respect to a perpendicular direction, you may change according to a granular material characteristic.

  As shown in FIG. 10, the third swiveling leg portion 28 hangs down from the root portion 25 </ b> B of the dust wing 24 in the central plate portion 25, and has a strip plate shape having substantially the same width as the first swiveling leg portion 26. I am doing.

  As shown in FIG. 13, the first swivel leg 26 and the second swivel leg 27 have different lengths. When the supply rotation member 21 rotates, the lower end portion of the first swivel leg portion 26 swirls in the vicinity of the upper surface of the screen plate 33 (a grazing that does not contact the upper surface of the screen plate 33). On the other hand, the lower end portion of the second turning leg portion 27 turns the upper portion of the screen plate 33 from the lower end portion of the first turning leg portion 26. When the first and second swivel legs 26 and 27 swivel above the screen plate 33, the powder arch that closes the slit 33A of the screen plate 33 is collapsed, and the powder granule is released from the slit 33A. Discharged. Similarly to the first swivel leg 26, the lower end of the third swivel leg 28 swirls in the vicinity of the upper surface of the screen plate 33, collapses the powder arch, and discharges the powder from the slit 33A.

  For example, when the rotation speed of the supply rotation member 21 is relatively low, the second swivel leg 27 can apply an external force that breaks the powder arch by simply passing over the powder arch. Instead, only the first swivel leg 26 and the third swivel leg 28 break the granular arch (the state shown in FIG. 13).

  On the other hand, when the rotation speed of the supply rotating member 21 is relatively high, the powder arch is formed by the powder flowing downward toward the screen plate 33 by the guide of the second swivel leg 27. Is destroyed. That is, both the first and second swivel legs 26 and 27 and the third swivel leg 28 break the granular material arch (state of FIG. 14).

  Thus, by increasing the rotation speed of the supply rotation member 21, the discharge amount per rotation of the supply rotation member 21 can be increased. Further, by increasing the rotation speed of the supply rotation member 21, the discharge amount per unit time can be increased rapidly.

  Further, when the supply rotation member 21 rotates, the third turning leg portion 28 turns in the vicinity of the inner peripheral surface of the small diameter cylindrical portion 13. Thereby, the granular material adhering to the internal peripheral surface of the small diameter cylinder part 13 by static electricity etc. can be scraped off.

  In order to transmit the torque of the motor 50 to the supply rotation member 21 described above, a magnet coupling mechanism is used between the output shaft 52 of the motor 50 and the container rotation shaft 20 supported in the supply drum 11. They are connected in a non-contact state and can be rotated together. The magnet coupling mechanism has the following configuration.

  As shown in FIG. 6, a male coupler 53 integrally including an inner magnet 54 is fitted and fixed to the output shaft 52. The male coupler 53 extends downward from the motor 50 and has a shaft shape with a diameter reduced in a stepped manner as the distance from the motor 50 increases. An inner magnet 54 having a cylindrical structure is fitted and fixed to the lower end portion of the male coupler 53. The inner magnet 54 is inserted from above into the inner cylindrical wall 413B of the hollow cylindrical projection 413 formed in the work case 400, and is loosely fitted so as to be relatively rotatable.

  The inner magnet 54 has a structure in which a plurality of magnet disks 54P are coaxially stacked. As shown in FIG. 7, each magnet disk 54P has a shape in which a small hole passes through the center of the disk, and is equally divided into a plurality of magnetic poles in the circumferential direction. That is, the S pole and the N pole are alternately arranged in the circumferential direction. Further, as shown in FIG. 6, the plurality of magnet disks 54P are stacked such that different magnetic poles are adjacent to each other in the axial direction of the inner magnet 54, and the magnet disks 54P are fixed to each other by magnetic force. The inner magnet 54 corresponds to the “first coupling magnet” of the present invention.

  Here, the male coupler 53 is not only loosely fitted to the inner cylindrical wall 413B of the hollow cylindrical protrusion 413, but also always in the vertical direction between the central wall 413C and the annular wall 413D of the hollow cylindrical protrusion 413. A gap is formed. The size of the gap can be adjusted by changing the height of the step protrusion 333 formed at the peripheral edge of the shaft through-hole 332.

  A female coupler 40 is fixed to an upper end portion of the in-container rotation shaft 20 that protrudes inside the small-diameter cap 17 so as to be integrally rotatable. The female coupler 40 has a cylindrical shape corresponding to the internal space of the small diameter cap 17. In the center hole of the female coupler 40, the container rotation shaft 20 is fitted and fixed to the small diameter portion on the lower end side, and the inner cylindrical wall 17B of the small diameter cap 17 is inserted into the large diameter portion on the upper end side. The female coupler 40 is prohibited from moving in the axial direction (vertical direction) inside the small-diameter cap 17, while being rotatable relative to the small-diameter cap 17.

  An outer magnet 41 is provided at an upper end portion of the female coupler 40, specifically, a portion sandwiched between the inner cylindrical wall 17 </ b> B and the outer cylindrical wall 17 </ b> A of the small diameter cap 17. The outer magnet 41 has a structure in which a plurality of magnet rings 41P are coaxially stacked. As shown in FIG. 7, each magnet ring 41P is equally divided into the same number of magnetic poles as the magnet disk 54P in the circumferential direction. That is, the S pole and the N pole are alternately arranged in the circumferential direction. As shown in FIG. 6, the plurality of magnet rings 41 </ b> P are stacked such that different magnetic poles are adjacent to each other in the axial direction of the outer magnet 41, and the magnet rings 41 </ b> P are fixed to each other by magnetic force. The outer magnet 41 corresponds to the “second coupling magnet” of the present invention.

  As shown in FIGS. 6 and 7, the outer magnet 41 surrounds the inner magnet 54 from the side with the inner cylinder wall 413B of the hollow cylindrical protrusion 413 and the inner cylinder wall 17B of the small diameter cap 17 interposed therebetween. More specifically, the magnet disks 54P of the inner magnet 54 are arranged inside the magnet rings 41P of the outer magnet 41, and their opposing surfaces in the radial direction are different magnetic poles. That is, the inner magnet 54 and the outer magnet 41 are magnetically coupled so as to be integrally rotatable in a non-contact state. Thereby, it is possible to transmit the torque of the motor 50 (the output shaft 52) disposed above the outside of the work case 400 to the in-container rotation shaft 20 in the supply drum 11 without contact.

  Further, the supply drum 11 is held suspended from the ceiling wall 410 of the work case 400 against gravity by the magnetic force (attraction force) between the outer magnet 41 and the inner magnet 54. Then, a change in the weight of the entire supply drum 11 including the contents of the supply drum 11 (powder particles, supply rotation member 21, etc.) is transmitted from the outer magnet 41 to the inner magnet 54 and further applied to the inner magnet 54. The change in the weight of the entire supply drum 11 is transmitted to the measuring device 300 via the movable base 320. Thereby, the weight of the granular material supplied from the supply drum 11 to the receiver 545 in the work case 400 (corresponding to the “receiving portion” of the present invention) can be measured by a so-called “loss-in-weight method”. It is possible.

  Since the female coupler 40 rotates inside the small-diameter cap 17 when the in-container rotation shaft 20 is rotated, the small-diameter cap 17 is made of resin (for example, PTFE) having a low frictional resistance in order to reduce the frictional resistance therebetween. ), A sliding contact member that reduces frictional resistance is sandwiched on the sliding surface, or a clearance is preferably provided so that friction does not occur. The above is the description regarding the configuration of the feeder 10.

  Next, the replenisher 200 will be described. As shown in FIG. 1, the replenishing machine 200 includes a replenishing drum 211 (corresponding to the “sealed container” of the present invention) that can accommodate powder particles, and a motor provided at a position directly above the replenishing drum 211. 250. The supply drum 211 and the motor 250 are coaxially positioned by a bracket 312 fixed to the base plate 311 of the fixed base 310.

  As shown in FIG. 4, the bracket 312 has a structure in which a sleeve 314 is fixed to the lower ends of a pair of side plates 313 and 313 depending from the lower surface of the base plate 311. The upper and lower ends of the sleeve 314 are open and the inside is partitioned vertically by a partition wall 315 provided in the middle in the axial direction.

  The lower end portion of the motor 250 (stator) is locked to the upper end surface of the sleeve 314 so as not to be relatively rotatable. An output shaft 252 is connected to a rotor (not shown) of the motor 250 and extends downward. An upper coupler 253 is fixed to the output shaft 252 so as to be integrally rotatable. As shown in FIG. 15, the upper coupler 253 has a cylindrical shape, and a plurality of coupling magnets 254 are embedded side by side in the circumferential direction at the lower end thereof. These coupling magnets 254 are flush with the lower end surface of the upper coupler 253 and are exposed downward. The plurality of coupling magnets 254 are arranged so that the magnetic poles of the exposed surfaces are alternately inverted in the circumferential direction of the upper coupler 253. Further, the upper coupler 253 is not in contact with the inner peripheral surface of the sleeve 314 and the partition wall 315 so that frictional resistance is not generated.

  The replenishing drum 211 can accommodate powder particles in a sealed space in which the upper end opening of the bottomed cylindrical portion 212 is closed with a large-diameter cap 215, and the cylindrical screwing wall 215 </ b> C protruding from the upper surface of the large-diameter cap 215 A small-diameter cap 217 is screwed onto the outer peripheral surface. In the small diameter cap 217, the lower half screwed to the cylindrical screwing wall 215C has a stepped larger diameter than the upper half, and the boss portion 217B projects from the center of the inner surface of the upper end wall 217A.

  The portion above the stepped portion of the small diameter cap 217 is inserted from the lower end opening of the sleeve 314 and can be inserted and removed. Concave and convex engaging portions 260 are provided between the lower end surface of the sleeve 314 and the stepped portion of the outer peripheral surface of the small diameter cap 217. The concave and convex engaging portions 260 and 260 are provided at two positions 180 degrees apart from each other in the circumferential direction of the small-diameter cap 217 and the sleeve 314, and are concave and convex engaged so as to be inserted and removed in the vertical direction.

  As a result, the output shaft 252 of the motor 250 and the in-container rotation shaft 220 that is pivotally supported via the bearing 216 inside the supply drum 211 are positioned coaxially, and the relative rotation of the supply drum 211 with respect to the bracket 312 is performed. prohibited.

  The in-container rotation shaft 220 extends along the central axis inside the supply drum 211. The upper end portion of the container rotation shaft 220 extends through the large diameter cap 215 and extends inside the small diameter cap 217, and the container rotation member 221 is attached to the lower end portion.

  As shown in FIG. 15, a lower coupler 240 is fixed to a portion of the in-container rotation shaft 220 that protrudes upward from the large-diameter cap 215 (inner portion of the small-diameter cap 217) so as to be integrally rotatable. The lower coupler 240 has a cylindrical shape, and the inner rotating shaft 220 is inserted and fitted into the center from the lower end side, and the boss portion 217B of the small diameter cap 217 is inserted from the upper end side. Further, the lower coupler 240 is sandwiched between the upper end wall 217A of the small diameter cap 217 and the bearing 216, and is prohibited from moving in the axial direction (vertical direction).

  A plurality of coupling magnets 241 as many as the coupling magnets 254 provided in the upper coupler 253 are embedded in the upper end portion of the lower coupler 240 side by side in the circumferential direction. These coupling magnets 241 are flush with the upper end surface of the lower coupler 240 and are exposed upward. Further, the plurality of coupling magnets 241 are arranged so that the magnetic poles of the exposed surfaces are alternately inverted in the circumferential direction of the lower coupler 240.

  The coupling magnet 241 of the lower coupler 240 is attracted and magnetically coupled with the coupling magnet 254 of the upper coupler 253, sandwiching the upper end wall 217A of the small diameter cap 217 and the partition wall 315 of the sleeve 314. As a result, the torque of the motor 250 (output shaft 52) can be transmitted to the in-container rotation shaft 220 in a non-contact manner while the supply drum 211 is suspended from the bracket 312 against gravity.

  Inside the replenishing drum 211, an in-container disc 230 and an upper surface waiting guide 231 having the same shape as that provided inside the supply drum 11 are provided. A supply pipe 213 hangs from the center of the bottom wall 214 of the supply drum 211. The supply pipe 213 passes through the ceiling wall 410 of the work case 400, and the lower end thereof is inserted in a non-contact state with the supply port 15A of the supply drum 11 (see FIG. 2). In other words, the sealed space that can accommodate the powder particles in the supply drum 211 communicates with the inside of the work case 400 via the supply pipe 213. Here, a portion of the ceiling wall 410 of the work case 400 through which the supply pipe 213 passes is sealed in an airtight state by the seal member 218.

  As shown in FIG. 15, the granular material deposited on the outer edge of the bottom wall 214 of the supply drum 211 is centered on the bottom wall 214 by the container rotating member 221 rotating between the container inner disk 230 and the bottom wall 214. To the upper end opening of the supply pipe 213.

  As shown in FIG. 2, the lower end opening of the supply pipe 213 is located above the container disk 30 in the supply drum 11, and the powder discharged from the lower end opening of the supply pipe 213 is supplied to the supply drum. 11 flow down to the intermediate step wall 14 and the disc 30 inside the container.

  As shown in FIG. 16, a receiving plate 219 is integrally provided at the lower end portion of the supply pipe 213. The receiving plate 219 is disposed to face the lower end opening of the supply pipe 213 with a gap therebetween, and the space between the receiving plate 219 and the lower end portion of the supply pipe 213 is open to the side.

  As shown in FIG. 15, a flow assisting plate 222 extends from the lower end portion of the in-container rotation shaft 20. The flow assisting plate 222 is formed by cutting a flat plate into a crank shape, and is inserted into the supply pipe 213. The flow-down auxiliary plate 222 is rotated in the supply pipe 213 by the motor 250 to flow down the powder particles in the supply pipe 213 while stirring.

  A rotating blade piece 222H is integrally provided at the lower end portion of the flow-down auxiliary plate 222. As shown in FIG. 16A, the rotary blade piece 222 </ b> H protrudes from the lower end opening of the supply pipe 213 and projects laterally, and rotates on the upper surface of the receiving plate 219.

  The powder particles that have flowed down the supply pipe 213 are once received by the receiving plate 219 and are pushed out to the side by the rotary blade piece 222H and fall from the receiving plate 219.

  The granular material that has flowed down the supply pipe 213 while the rotation of the motor 250 is stopped is received by the receiving plate 219. As a result, when the weight of the granular material discharged from the supply drum 11 is being measured, when the granular material flows down in the supply pipe 213 due to vibration or the like, the weight of the granular material is measured. It is possible to prevent a situation in which a measurement error is caused by being added to.

  Here, when a large amount of powder particles flowed down the supply pipe 213 while the rotation of the motor 250 was stopped, a predetermined angle of repose was provided between the lower end of the supply pipe 213 and the receiving plate 219. A powder pile is formed, and the lower end portion of the supply pipe 213 can be closed. Even in this case, the clogged state can be broken by the rotation of the rotating blade piece 222H, and the closed state can be eliminated.

  As shown in FIG. 15, the replenisher 200 includes a hopper 270 and a cylindrical chute 271 extending from the lower end portion thereof. The hopper 270 has a conical shape with an open upper end and is disposed at a position above the base plate 311 of the fixed base 310 (see FIG. 3). On the other hand, the lower end of the chute 271 passes through the large-diameter cap 215 of the supply drum 211 and is inserted into the supply drum 211. Here, a portion of the large-diameter cap 215 through which the chute 271 passes is sealed in an airtight state by the seal member 273.

  In the chute 271, valves 272 and 272 are provided at an intermediate position in the vertical direction and a position near the lower end, respectively. The valves 272 and 272 can be switched between an open state and a closed state by manually operating a lever.

  An air supply port 274 connected to a pump (not shown) is provided at an intermediate position between the pair of valves 272 and 272 in the chute 271. For example, by operating the pump with the upper valve 272 closed and the lower valve 272 open, the work case 400 communicates with the supply drum 211 via the supply drum 211 and the supply pipe 213. A predetermined gas can be supplied to the gas, and the internal pressure can be adjusted by the gas.

  As shown in FIG. 17, inside the chute 271, a conical throat portion 275 that is narrowed downward is provided at an intermediate position between the pair of valves 272 and 272. When the lower valve 272 is closed and the upper valve 272 is opened, the granular material in the hopper 270 flows down in the chute 271 and accumulates above the lower valve 272 through the throat portion 275. . Then, as shown in FIG. 17, when a granular material pile having a predetermined angle of repose is formed below the throat portion 275, the flow of the granular material within the chute 271 stops. At this time, an annular space 276 is formed inside the chute 271, and the above-described air supply port 274 penetrates the chute 271 from the side at a portion where the annular space 276 is formed.

  The configuration of the substance supply and weighing device 100 of the present embodiment is as described above. An operation in the case of supplying powder particles to the receiver 545 in the work case 400 using the substance supply and weighing device 100 will be described.

  First, the supply drum 11 containing the powder particles is put into the work case 400 through the opening 401 and attached to the ceiling wall 410. That is, the small-diameter cap 17 of the supply drum 11 is inserted from the lower surface opening of the hollow cylindrical protrusion 413 formed on the ceiling wall 410. At this time, the pair of concave and convex engaging portions 60 and 60 are engaged with the concave and convex portions. Then, the outer magnet 41 provided in the female coupler 40 in the supply drum 11 and the inner magnet 54 provided in the male coupler 53 of the motor 50 are attracted in the horizontal direction across the ceiling wall 410 and the small diameter cap 17 of the work case 400. Accordingly, the supply drum 11 is held in a state suspended from the ceiling wall 410 inside the work case 400.

  At this time, the entire weight of the supply drum 11 including the contents of the supply drum 11 (powder particles, supply rotation member 21, etc.) is transmitted from the outer magnet 41 to the inner magnet 54, and further, the movable base 320 is moved from the inner magnet 54. To the measuring device 300.

  When the supply drum 11 is suspended from the ceiling wall 410, the receiver 545 is placed immediately below the supply drum 11, the door 402 of the work case 400 is closed, and the closed space in the work case 400 is made airtight. In the airtight state, the inside of the work case 400 is set to a predetermined atmosphere (a predetermined pressure state or a predetermined gas atmosphere).

  When the atmosphere in the working case 400 is stabilized, the weight of the entire supply drum 11 including the contents (powder particles, the supply rotation member 21 and the like) is weighed by the measuring device 300. The preparation of measuring the supply of the granular material and the supply amount is completed.

  Next, the motor 50 of the feeder 10 is turned on. Then, due to the magnetic connection between the inner magnet 54 and the outer magnet 41, the output shaft 52 and the container rotation shaft 20 rotate together, and the supply rotation member 21 rotates inside the supply drum 11.

  When the supply rotating member 21 rotates, the granular material accommodated in the large diameter cylindrical portion 12 of the supply drum 11 is scraped into the small diameter cylindrical portion 13 and passes through the slit 33A of the screen plate 33, below the supply drum 11, that is, Then, it is discharged toward the receiver 545 in the work case 400.

  As the powder particles are discharged from the supply drum 11, the weight of the entire supply drum 11 decreases, and the change in the weight is transmitted to the measuring device 300 via the outer magnet 41, the inner magnet 54 and the movable base 320. . Then, the amount of decrease in the weight of the entire supply drum 11 detected by the measuring device 300 is taken into the control device 90 as the discharge amount of the granular material from the supply drum 11 (the supply amount to the receiver 545).

  Here, the control device 90 feedback-controls the rotational speed of the motor 50 based on the detection result by the measuring instrument 300 (the amount of decrease in the weight of the entire supply drum 11). Thereby, a granular material can be accurately supplied to the receiver 545 by a fixed amount or a predetermined amount.

  In addition, when the granular material discharged | emitted from the supply drum 11 melt | dissolves in the liquid accommodated in the receiver 545, you may control the discharge amount of a granular material based on the solution density | concentration and density.

  When replenishing the supply drum 11 with powder particles, the motor 50 of the supply machine 10 is temporarily stopped to interrupt the discharge of the powder particles from the supply drum 11, and in this state, the motor 250 of the supply machine 200 is turned off. Turned on and causes the granular material to flow down from the replenisher 200 to the supply drum 11. When the motor 250 is turned on, the output shaft 252 and the container rotation shaft 220 coupled in a non-contact state by the coupling magnets 241 and 254 rotate integrally, and the container rotation member 221 rotates inside the supply drum 211. Then, the granular material flows down in the supply pipe 213, and the granular material is supplied to the supply drum 11. Thus, when supplying the supply drum 11 with powder particles, it is not necessary to take out the supply drum 11 from the work case 400, and the magnetic coupling of the magnet coupling mechanism (the inner magnet 54 and the outer magnet 41) and the work case 400. The granular material can be replenished while maintaining the inside atmosphere.

  When a predetermined amount of powder is supplied to the supply drum 11, the motor 250 of the supply machine 200 is stopped. Then, after the weight of the entire supply drum 11 including the powder particles is re-weighed by the measuring device 300, the motor 50 of the supply device 10 is turned on, and the supply of the powder particles by the supply device 10 is resumed.

  In addition, when supplying powder particles to the supply drum 211, the powder particles are put into the hopper 270. Here, since the hopper 270 is open to the atmosphere, the pair of valves 272 and 272 are opened and closed as follows in order to maintain the atmospheric state in the work case 400. That is, by closing the lower valve 272 and opening the upper valve 272, powder particles are accumulated in the upper part of the chute 271 from the lower valve 272, and then the upper valve 272. Is closed and the lower valve 272 is opened, so that the granular material accumulated between the pair of valves 272 and 272 in the chute 271 flows down to the supply drum 211. As a result, it is possible to replenish the replenishing drum 211 with the granular material while maintaining the atmosphere in the work case 400.

  Thus, according to the present embodiment, the inner magnet 54 provided in the male coupler 53 of the motor 50 and the outer magnet 41 provided in the female coupler 40 in the supply drum 11 are in a non-contact state inside and outside the work case 400. The supply drum 11 is suspended from the ceiling wall 410 in a state of being accommodated in the work case 400, and the rotation of the rotor 50R of the motor 50 is transmitted to the supply rotation member 21 as well as powder particles. The entire weight of the supply drum 11 including the body is transmitted from the outer magnet 41 to the inner magnet 54. Then, by disposing the measuring device 300 between the motor 50 and the fixed base 310, the change in the weight of the entire supply drum 11 applied to the inner magnet 54, that is, the supply of the granular material to the receiver 545. It becomes possible to measure the amount.

  Thus, according to the present invention, since the measuring device 300 for measuring the supply amount of the granular material to the receiver 545 can be arranged outside the working case 400, the temperature inside the working case 400 is increased. The amount of powder supplied can be measured without being affected by atmospheric conditions such as pressure and gas.

  In addition, since the replenisher 200 is provided, it is not necessary to take out the supply drum 11 from the work case 400 when supplying powder to the supply drum 11, and the magnetic coupling of the magnet coupling mechanism and the work case 400 can be removed. Replenishment can be performed while maintaining the atmospheric state.

[Second Embodiment]
As shown in FIGS. 18-20, in this embodiment, the substance supply measuring device 100 is assembled | attached to the work case 420 (for example, reaction tank and stirring tank) which made the container structure (tank structure). In the work case 420, the liquid as the “receiving part” of the present invention is stored, and the granular material as the “supply substance” is supplied to the liquid. Since the configuration of the substance supply and weighing device 100 is the same as that of the first embodiment, a duplicate description is omitted.

  As shown in FIG. 19, the work case 420 is sealed, and a gas-proof case 421 is integrally provided on the inner surface of the ceiling wall. The gas-proof case 421 surrounds the entire supply drum 11 disposed inside the work case 420 in a non-contact manner. A discharge port 422 is formed immediately below the supply drum 11 in the gas-proof case 421 so that particles discharged from the supply drum 11 can pass through. A predetermined gas (for example, inert gas) is supplied into the gas-proof case 421 from a gas purge port 423 that penetrates the ceiling wall of the work case 420, and the internal pressure of the gas-proof case 421 is positive with respect to the outside. Pressure. This prevents intrusion of gas from the outside of the gas-proof case 421 (vapor due to evaporation of the liquid in the work case 420 or reaction gas between the liquid and the granular material), and the gas-proof case 421 has a constant gas atmosphere. Thus, the granular material in the supply drum 11 can be protected from the gas outside the gas-proof case 421.

  FIG. 20 shows a modification of the present embodiment, and the substance supply and metering device 100 of the first embodiment is applied to a solution vaporizer used in a CVD (chemical vapor deposition, chemical vapor deposition) coating method. Is a combination. This solution vaporizer bubbles a solution in which a substance that forms a coating layer (thin film) is dissolved, and partially vaporizes the solution. The liquid in the work case 420 is a solvent (for example, an organic solvent), and the granular film-forming substance (organometallic compound) discharged from the substance supply and metering device 100 is dissolved in the solvent. In the figure, reference numeral 425 is a heater, reference numeral 426 is a stirring motor for stirring the solution in the work case 420, reference numeral 427 is a solvent supply pipe for supplying a solvent into the work case 420, and reference numeral 428 is a reference numeral. , A gas discharge pipe for releasing and bubbling the carrier gas into the solution in the work case 420, a reference numeral 429 is a flow rate sensor for measuring the flow rate of the carrier gas, and a reference numeral 430 is the vaporized gas evaporated from the solution together with the carrier gas. A transport pipe for transporting to a vapor deposition chamber (not shown), reference numeral 431 is a gas concentration sensor, and reference numeral 432 is a measuring instrument for measuring the weight of the solution in the work case 420. The configuration of the present embodiment also has the same effect as the first embodiment. More specifically, the amount of discharged particulate matter can be measured without being affected by the temperature, humidity or vaporized gas in the work case 420.

[Third Embodiment]
The substance supply / metering device 103 of this embodiment will be described with reference to FIG. In the said 1st Embodiment, although it was the structure for supplying the granular material as a "supply substance", in this embodiment, it is the structure for supplying a liquid.

  Specifically, the supply drum 500 is suspended from the ceiling wall 410 of a work case capable of storing liquid. The supply drum 500 is closed at the bottom and can store liquid therein.

  A liquid feed pump 510 (corresponding to the “pump mechanism” of the present invention) is provided inside the supply drum 500. The liquid feed pump 510 is configured to pump the liquid in the tube 512 connected to the liquid feed pump 510 by the rotation operation of the rotor 511 (corresponding to the “supply rotating member” of the present invention), and the rotor 511 is a container. It is fixed to the lower end of the inner rotary shaft 20. Then, the weight of the entire supply drum 500 including the contents (the liquid and the liquid feed pump 510) is measured by the measuring instrument 300, and the liquid is discharged into the work case from the tube 512 extending to the outside of the supply drum 500. It is like that.

  In the substance supply and metering device 103 of the present embodiment, since the supply substance is “liquid”, the powder supply unit 200 (see FIG. 4) as in the first embodiment is not provided. Instead, a liquid supply pipe 513 is provided. The liquid supply pipe 513 has an upper end connected to a liquid supply source (not shown) and a lower end inserted into the supply port 15 </ b> A of the supply drum 500. The lower end opening of the liquid supply pipe 513 is always closed by the valve body 514, and the valve body 514 opens the lower end opening only when replenishment is performed. Other configurations of the substance supply and weighing device 103 are the same as those in the first embodiment. The configuration of the present embodiment also has the same effect as the first embodiment.

[Fourth Embodiment]
The substance supply and weighing device 104 of this embodiment will be described with reference to FIG. In the said 1st-3rd embodiment, although it became the structure for supplying a granular material or a liquid as a "supply substance", this embodiment becomes a structure for supplying the wire S. In addition to the wire shape illustrated in FIG. 22, the wire material S includes a tape shape and a tube shape.

  The supply drum 550 of the supply machine 10 is suspended from the ceiling wall 410 of a work case capable of storing liquid, and the wire S can be dissolved in the work case as a “receiving part” according to the present invention. Possible liquids are stored. The supply drum 550 is closed at the bottom and accommodates a bobbin 551 (corresponding to the “supply rotation member” of the present invention). The lower end portion of the in-container rotation shaft 20 is fixed at the center of the bobbin 551 so that the bobbin 551 can rotate inside the supply drum 550. A wire rod S is wound around the outer peripheral surface of the bobbin 551.

  A wire guide pipe 552 is provided on the side surface of the supply drum 550. The wire guide pipe 552 protrudes from the side surface of the supply drum 550 and is curved downward by 90 degrees and extends downward. In addition, the substance supply measuring device 104 of this embodiment does not include the replenisher 200 described in the first embodiment. Other configurations are the same as those in the first embodiment.

  When the bobbin 551 is rotated in the direction opposite to the winding direction of the wire S by the motor 50, the wire S is sent out from the bobbin 551, passes through the wire guide pipe 552, and is guided downward of the supply drum 550. . The wire S dissolves when it comes into contact with the liquid in the work case 420, and the weight of the entire supply drum 550 including the contents (the wire S and the bobbin 551) is reduced by the amount dissolved. By measuring the decrease in weight with the measuring instrument 300, the weight of the wire S dissolved in the liquid in the work case can be measured. The rotational speed of the motor 50, that is, the discharge amount of the wire S may be feedback-controlled based on the measured value of the measuring instrument 300. Alternatively, the discharge amount of the wire S may be feedback controlled based on the concentration or density of the liquid in which the wire S is dissolved. Also according to the present embodiment, the same effects as those of the first embodiment can be obtained.

[Fifth Embodiment]
The particle processing apparatus provided with the substance supply and metering apparatus 100 will be described with reference to FIGS. In addition, since the structure of the substance supply measurement apparatus 100 is the same as the said 1st Embodiment, the overlapping description is abbreviate | omitted.

  As shown in FIG. 23, a standing wave sound field floating device 540 is provided inside the work case 400. The standing wave sound field floating device 540 is provided at a position directly below the supply drum 11, and as shown in FIG. 24, an ultrasonic transducer 541 and a reflection plate 542 are arranged opposite to each other in the vertical direction. In the space between the ultrasonic transducer 541 and the reflection plate 542, the ultrasonic wave emitted from the ultrasonic transducer 541 and the ultrasonic wave reflected by the reflection plate 542 resonate to form a standing wave sound field.

  The granular material discharged downward from the supply drum 11 is introduced into the standing wave sound field through the introduction path 543 penetrating the reflector 542, and enters the air at the position of the node of the sound pressure existing in the standing wave sound field. Retained. Aerosol or gas (for example, drying gas) of liquid (for example, coating agent) is sprayed from the nozzle 544 to the granular material held in the air. When the standing wave sound field is extinguished, the granular material falls, passes through the discharge path 541A penetrating the center of the ultrasonic vibrator 541, and falls below the standing wave sound field floating device 540. Here, the wind force of the aerosol or gas is such that the granular material held at the node of the sound pressure is not blown away. Instead of spraying liquid aerosol or gas, heat may be applied by a heat ray lamp, or plasma may be applied by a plasma generator. In addition, the structure which provides liquid, gas, heat | fever, and plasma to the granular material in this embodiment is equivalent to the "powder material processing means" of this invention. The introduction path 543 and the discharge path 541A correspond to the “powder body passage path” of the present invention.

  As shown in FIG. 23, the processed granular material by liquid aerosol or gas is received by a receiver 545 disposed below the standing wave sound field floating device 540. Then, the weight of the processed granular material is measured by a granular material measuring instrument 546 (corresponding to the “particle granular weight measuring instrument” of the present invention) provided below the bottom wall 411 of the work case 400.

  Specifically, as shown in FIG. 25, one of the pair of magnets 547A and 547B that repel each other in the vertical direction across the bottom wall 411 of the work case 400 is used as a platform for the powder meter 546. While being fixedly mounted, the other is floated from the bottom wall 411 by the repulsive force in the work case 400, and the receiver 545 is placed on the floated magnet 547B so as not to fall. As a result, a load corresponding to the sum of the weight of the entire receiver 545 including the weight of the granular material received by the receiver 545 and the weight of the magnets 547A and 547B is applied to the granular measurer 546. Then, the increase in weight can be measured as the weight of the processed granular material received in the receiver 545. It should be noted that portions other than the opposing surfaces of the magnets 547A and 547B are covered with magnetic shielding magnet cases 548A and 548B so that the leakage magnetic flux of the magnets 547A and 547B does not affect the powder particle meter 546. .

  In addition, a plurality of guide pins 549P are provided from the bottom wall 411 of the work case 400 so that the magnet 547B that has floated in the work case 400 does not laterally deviate from the position directly above the magnet 547A that is fixedly placed on the granular material measuring instrument 546. The guide pins 549P are inserted into guide holes 549H formed in the magnet case 548B of the magnet 547B that has floated. Thereby, the movement in the horizontal direction can be prohibited while allowing the magnet 547B that has levitated to move up and down. The guide pins 549P and the guide holes 549H correspond to “receptor guides” of the present invention.

  Here, if the frictional resistance between the guide pin 549P and the guide hole 549H is large when the magnet 547B moves up and down, an error may occur in the measurement result by the granular material meter 546. Therefore, a plurality of balls (not shown) held by a retainer (not shown) can be rolled between the outer peripheral surface of the guide pin 549P and the inner peripheral surface of the guide hole 549H, so that the frictional resistance during linear motion can be reduced. It may be reduced. Alternatively, a magnetic repulsive force is generated between the inner peripheral surface of the guide hole 549H and the outer peripheral surface of the guide pin 549P, and the repulsive force causes the outer peripheral surface of the guide pin 549P and the inner peripheral surface of the guide hole 549H to be generated. You may make it hold | maintain a non-contact loose fitting state always.

  FIG. 26 shows a modification of the present embodiment, in which a standing wave sound field having a plurality of nodes is formed between the ultrasonic transducer 541 and the reflection plate 542. Also, a plurality of nozzles 544 for spraying liquid aerosol (for example, the nozzle 544 on the left side of the figure) and a plurality of nozzles 544 for spraying gas (for example, the nozzle 544 on the right side of the figure) are alternately arranged at regular intervals. is there. By shifting the position of the node of the sound pressure downward step by step, the particles captured in each node can be sequentially moved downward, and aerosol and gas can be alternately sprayed on the particles. Thereby, for example, spraying of the coating agent on the granular material and drying by gas can be performed alternately over a plurality of times, and while passing through the standing wave sound field floating device 540, the particles of the granular material A multilayer coating can be formed. Note that any of the plurality of nozzles 544 may be replaced with a heat ray lamp or a plasma generator.

[Sixth Embodiment]
FIG. 27 shows the particle processing apparatus of the present embodiment. This particle processing apparatus is different from the particle processing apparatus of the fifth embodiment in that a plasma torch 630 is provided inside the work case 400. Since the other configuration is the same as that of the fifth embodiment, the same configuration is denoted by the same reference numeral, and redundant description is omitted.

  The plasma torch 630 is disposed between the supply drum 11 and the standing wave sound field floating device 540. The plasma torch 630 includes a plasma generation tube 631 and an induction coil 632 provided outside thereof, and a power source 633 for applying high-frequency power to the induction coil 632 is connected via a matching circuit 634.

  Specifically, an inner case 623 that surrounds the periphery of the supply drum 11 in a non-contact state on the ceiling wall 410 of the work case 400 and has a discharge port 623A immediately below the supply drum 11 is fixed. A plasma generation tube 631 as a “receiving portion” extends vertically downward from the peripheral edge of the discharge port 623A.

  As shown in FIG. 28, a gas introduction tube 637 is provided at the upper end of the plasma generation tube 631 so as to protrude laterally, from which a predetermined working gas for plasma generation (for example, hydrogen, helium, nitrogen, oxygen, Neon, argon or a mixed gas thereof) is introduced. This working gas becomes a swirl flow toward the lower end opening along the cylindrical inner surface of the plasma generation tube 631, and the cylindrical inner surface of the plasma generation tube 631 is covered with the working gas. When high frequency power is applied to the induction coil 632 in this state, the working gas introduced into the plasma generation tube 631 becomes a plasma state, and plasma F1 is generated in the plasma generation tube 631. In addition, an ion sensor 635 (see FIG. 27) for measuring the amount of ions is provided in the vicinity of the lower end opening of the plasma generation tube 631.

  The granular material discharged from the supply drum 11 is conveyed to the plasma generation tube 631 (plasma F1) by the working gas supplied from the gas purge port 423 into the inner case 623 or a carrier gas different from the working gas. And a granular material is heated in the process of passing the plasma F1, for example. In addition, a nozzle 636 is provided at the upper end of the plasma generation tube 631, and the liquid supplied from the liquid tank 638 is aerosolized and supplied into the plasma generation tube 631 (in the plasma F1). Then, due to the action of the heat of the plasma F1 and the liquid and gas supplied into the plasma F1, the granular material is, for example, melted, spheroidized, finely divided, or enlarged. When the plasma F1 is a low-temperature plasma, classification and sizing can be performed by ionization, ion application, fine particle formation, and fine particle annihilation with radical ions. Further, the liquid component ejected from the nozzle 636 adheres to the powder and is combined. The amount of liquid, gas, and granular material to be supplied to the plasma F1 may be set in advance and ionized with the plasma F1 to form a composite. In addition, since the swirling flow is generated along the cylindrical inner surface of the plasma generation tube 631, the powder particles are prevented from adhering to the cylindrical inner surface of the plasma generation tube 631. Moreover, it can be made to stay in plasma F1 comparatively long by conveying a granular material by a swirl flow.

  The granular material flowing through the plasma F1 and flowing down from the lower end opening of the plasma torch 630 is introduced into the standing wave sound field floating device 540 and is captured by the sound pressure node existing in the standing wave sound field. A liquid aerosol or gas is sprayed onto the powder particles. By using a liquid as a coating agent, the particles of the granular material can be coated and surface modification can be performed. Here, you may repeat the reaction process made to react with a granular material as an acid, an alkali, and other exclusive liquid, and the drying process dried with a drying wind or a heat ray lamp etc. until a desired particle is obtained. Further, the particle diameter of the particles captured in the node of the sound pressure existing in the standing wave sound field may be measured, and processing may be performed in the standing wave sound field until a desired particle size is obtained.

[Seventh Embodiment]
Hereinafter, the coating system 600 provided with the substance supply and metering device 100 of the present invention will be described with reference to FIGS. The coating system 600 forms a coating layer on the surface of the workpiece W (film formation) by CVD (chemical vapor deposition, chemical vapor deposition), PVD (physical vapor deposition), sputtering, vacuum deposition, ion plating, thermal spraying, or the like. )

  As shown in FIG. 29, the coating system 600 is configured by connecting a plurality of processing modules 603, 604, and 620 to first and second transfer cases 601 and 602 that can be sealed. Each of the processing modules 603, 604, and 620 has a work case that can be sealed, and performs predetermined processing in the work case. The first and second transfer cases 601 and 602 are respectively provided with horizontal articulated transfer arms 601A and 602A (corresponding to the “outer actuator” of the present invention). The transfer arms 601A and 602A carry workpieces W (for example, substrates) into predetermined processing modules 603, 604, and 620 (work cases) and transfer them from one processing module to another processing module.

  The first transfer case 601 includes a heat treatment module 603 (corresponding to “heating furnace” of the present invention), a plasma processing module 604 and three coating processing modules 620 (corresponding to “coating apparatus” of the present invention). It is connected. Five coating processing modules 620 are connected to the second transfer case 602. The first and second transfer cases 601 and 602 are connected by a common cover processing module 620, and the workpiece W is transferred from the first transfer case 601 to the second transfer case 602 via the cover processing module 620. Is passed. Further, a gate valve 609 is provided between the transfer cases 601 and 602 and the work cases of the processing modules 603, 604, and 620, and the work cases of the processing modules 603, 604, and 620 can form independent sealed spaces. It has become. A pump (not shown) is connected to the work cases of the transfer cases 601 and 602 and the processing modules 603, 604, and 620, and each is held in a vacuum state (a predetermined pressure lower than the atmospheric pressure).

  A carry-in case 605 for taking the workpiece W into the coating system 600 is connected to the first transfer case 601, and an intermediate processing case 606 is connected to the second transfer case 602. A sealing processing case 607 is connected to the intermediate processing case 606, and an unloading case 608 for unloading the workpiece W from the coating system 600 is connected to the sealing processing case 607. A gate valve 609 is also provided between the cases 605 to 608 and between the transfer cases 601 and 602.

  When the work W is set in the carry-in case 605, the transfer arm 601A provided in the first transfer case 601 holds the work W, and the work W is sequentially transferred into each work case of the heat treatment module 603 and the plasma treatment module 604. To do. The workpiece W is heated by the heat treatment module 603, and degassing processing and etching are performed. In the plasma processing module 604, the surface of the workpiece W is cleaned (removal of contaminants) and the surface state is stabilized by plasma. A good coating layer can be formed by these pretreatments.

  Next, the transfer arm 601 </ b> A sequentially loads the workpiece W into the three coating processing modules 620 connected to the first transfer case 601. In the work case 621 of each coating processing module 620, a coating layer is formed on the surface of the workpiece W.

  When the covering process in the covering processing module 620 connecting the first transfer case 601 and the second transfer case 602 is completed, the transfer arm 602A provided in the second transfer case 602 holds the workpiece W, and the second The workpieces W are sequentially carried into the other four coating processing modules 620 connected to the transfer case 602. These coating processing modules 620 also form a coating layer on the surface of the workpiece W.

  Here, when forming a coating layer having a different composition on the workpiece W, it is preferable to perform the coating process with a separate coating processing module 620 (work case 621) for each coating layer. This is to prevent cross-contamination by film-forming substances having different compositions. Further, it is not necessary to carry out the covering process by loading the work W into all the covering processing modules 620, and the covering process may be performed by loading the work W only into the covering processing module 620 selected from a plurality. .

  Next, the transfer arm 602A carries out the workpiece W from the coating processing module 620 and carries it into the intermediate processing case 606. The workpiece W carried into the intermediate processing case 606 is conveyed to the carry-out case 608 through the sealing processing case 607. The sealing process case 607 is filled with an inert gas, and the coating layer of the workpiece W is sealed in the atmosphere to prevent deterioration. Since the pressure inside the sealing processing case 607 is close to atmospheric pressure, an intermediate processing case 606 is provided to buffer the pressure difference between the sealing processing case 607 and the second transfer case 602. ing.

  Here, the number and combination of the transfer cases 601, 602 and the processing modules 603, 604, 620 are not limited to the configuration of the present embodiment, and may be changed as appropriate.

  By the way, the coating processing module 620 is provided with the substance supply and metering device 100 according to the present invention. In the work case 621, the powder-form film-forming substance supplied from the substance supply and metering device 100 and the raw material liquid in which the film-forming substance is dissolved or dispersed are supplied to the heat source, and the film-forming substance is supplied. Is melted, sublimated or ionized, and a film forming substance is adhered to the surface of the workpiece W to form a coating layer. Hereinafter, the covering processing module 620 will be described in detail, but the same components as those in the first and sixth embodiments are denoted by the same reference numerals, and redundant description is omitted.

  As shown in FIG. 30, in the work case 621 of the coating processing module 620, a horizontal articulated moving arm is used to move the workpiece W received from the transfer arms 601A and 602A in the horizontal direction in the work case 621. 625 (corresponding to the “inner actuator” of the present invention) is provided. The moving arm 625 includes a work stage 626 and a chuck 627 at the tip, and the work W placed on the work stage 626 is held by the chuck 627. Here, the work W may be heated by incorporating a heater in the work stage 626. When the coating layer is partially formed, the workpiece W may be held in a state where a portion where the coating layer is not formed is covered with a shadow mask 628.

  In the work case 621 of the coating processing module 620, the supply drum 11 of the feeder 10 is housed, and the periphery thereof is surrounded in a non-contact state by an inner case 623 fixed to the ceiling wall 622 of the work case 621. Yes. In addition, a plasma torch 630 serving as a heat source for melting, sublimating, or ionizing the film forming material is provided inside the work case 621 and below the supply drum 11. The plasma torch 630 has the same configuration as that of the sixth embodiment, and the plasma generation tube 631 extends vertically downward from the peripheral edge of the discharge port 623A at the lower end of the inner case 623. The plasma torch 630 in the present embodiment corresponds to “powder body processing means” of the present invention.

  A nozzle 636 is provided at the upper end of the plasma generation tube 631, and the raw material liquid in which the film forming substance is dissolved or dispersed is aerosolized and injected into the plasma generation tube 631 (in the plasma F1). Further, the granular film-forming substance discharged downward from the supply drum 11 is conveyed to the plasma generation tube 631 (plasma F1) by the working gas or the carrier gas supplied from the gas purge port 423 into the inner case 623. Is done.

  The plasma F1 vaporizes the solvent of the raw material liquid ejected from the nozzle 636, and further melts, sublimates, or ionizes the film forming substance. In addition, the particulate film-forming substance discharged from the supply drum 11 is also melted, sublimated or ionized. These melted, sublimated or ionized film forming substances are emitted from the lower end opening of the plasma generation tube 631 together with the plasma F1, and adhere to the surface of the workpiece W to form a coating layer. By moving the position of the workpiece W with respect to the lower end portion of the plasma torch 630 by the moving arm 625, the coating layer can be formed on the entire surface of the workpiece W or only on a specific portion.

  As a modification of this embodiment, instead of spraying the raw material liquid containing the film-forming substance from the nozzle 636, a solution in which the film-forming substance is dissolved may be vaporized by bubbling to supply the vaporized gas. FIG. 31 shows an example of a solution vaporizer for that purpose. In the figure, the same components as those in the solution vaporizer described in the second embodiment (see FIG. 20) are denoted by the same reference numerals. Further, in this solution vaporizer, a solution in which a film forming substance is dissolved is supplied to the work case 420 by a solution supply pipe 433. A nozzle 636 is connected to the tip of the transport pipe 430. The type of vaporized gas injected from the nozzle 636 may be a single type, but a plurality of solution vaporizers shown in FIG. 31 are provided, connected to a common transport pipe 430, and a plurality of types of vaporized gas are mixed to form a nozzle 636. You may make it spray from. Further, both the raw material liquid and the vaporized gas may be supplied to the plasma generation tube 631.

  Further, the movable arm 625 provided in the work case 621 of the covering processing module 620 may be an articulated arm that can move in the vertical direction. Thereby, the space between the lower end opening of the plasma torch 630 (plasma generating tube 631) and the surface of the workpiece W can be adjusted to an optimum distance. Moreover, you may employ | adopt other conveyance means (a roller conveyor etc.) other than the movement arm 625. FIG.

[Eighth Embodiment]
In the substance supply and metering device of this embodiment, the structure of the supply drum 11 is different from that of the first embodiment. That is, in the said 1st Embodiment, it became the structure which penetrates the slit 33A in the screen board 33 which obstruct | occluded the lower end part of the small diameter cylinder part 13, and discharges a granular material from there, In this embodiment, As shown in FIG. 32, the lower end portion of the small-diameter cylindrical portion 13 is completely closed, and instead, it corresponds to the side discharge port 130 (corresponding to the “powder discharge port” of the present invention) on the cylindrical wall of the small-diameter cylindrical portion 13. ) Is formed through.

  As shown in FIG. 32B, an intermediate weir plate 131 is provided at an intermediate position in the vertical direction inside the small diameter cylindrical portion 13. The intermediate dam plate 131 projects radially inward from the entire circumference of the inner circumferential surface of the small diameter cylindrical portion 13. The first to third swivel legs 26, 27, 28 provided in the supply rotation member 21 are swung in a region above the intermediate dam plate 131 in the small-diameter cylindrical portion 13. A plurality of side outlets 130 are formed in a portion of the cylindrical wall of the small diameter cylindrical portion 13 below the intermediate weir plate 131. As shown in FIG. 32A, the side discharge port 130 has a long hole shape that extends in the circumferential direction of the small-diameter cylindrical portion 13 and has both ends of the hole formed in an arc shape. Further, the upper side discharge port 130 and the lower side discharge port 130 are formed so as to be shifted in the circumferential direction of the small-diameter cylindrical portion 13.

  As shown in FIG. 33A, an extension shaft 120 is extended from the lower end of the in-container rotation shaft 20. The extension shaft 120 extends along the central axis inside the small-diameter cylindrical portion 13 (see FIG. 32B), and a granular material extruding piece 121 is fixed to the lower end portion thereof. The granular material extruding piece 121 is disposed in a region below the intermediate dam plate 131 in the small diameter cylindrical portion 13 and extends to a position near the cylindrical wall of the small diameter cylindrical portion 13 as shown in FIG. ing. Moreover, the granular material extrusion piece 121 is curving so that it may go to the back of the rotation direction (direction shown by the arrow of FIG. 33 (A)) of the supply rotation member 21 as it goes outside from the extension shaft 120.

  In addition, the 2nd turning leg part 27 of this embodiment makes a pair similarly to the 1st turning leg part 26, and is provided side by side at intervals.

  When the container rotation shaft 20 is rotated by receiving the power of the motor 50, the first to third swivel legs 26, 27, and 28 are swung in the region of the small diameter cylindrical portion 13 above the intermediate weir plate 131, In the region below the intermediate weir plate 131, the granular material extruded piece 121 rotates. The granular material exceeding the intermediate weir 131 accumulates on the bottom wall of the small-diameter cylindrical portion 13 and is extruded radially outward by the granular material extruding piece 121 as shown in FIG. 130 is discharged.

  When the motor 50 is stopped, the inflow of the granular material from the large diameter cylindrical portion 12 to the small diameter cylindrical portion 13 is stopped, and a predetermined angle of repose is provided between the intermediate dam plate 131 and the bottom wall of the small diameter cylindrical portion 13. A pile of powdered particles is formed (see FIG. 32B). Thereby, discharge of the granular material from the side part discharge port 130 stops. The configuration of the present embodiment also has the same effect as the first embodiment.

[Ninth Embodiment]
This embodiment is shown in FIGS. 34 to 36, and is provided with an auxiliary connection mechanism that magnetically connects the supply drum 11 and the movable base 320 in a non-contact state with the first embodiment. Is different. Since other configurations are the same as those in the first embodiment, the same reference numerals are given to the same configurations, and duplicate descriptions are omitted.

  The auxiliary magnetic coupling mechanism includes an annular plate 140 (corresponding to the “inner horizontal plate” of the present invention) that is locked to the outer peripheral surface of the supply drum 11 and that protrudes laterally. The annular plate 140 has a structure in which a circular hole is formed through the center of the circular plate. The large-diameter cylindrical portion 12 of the supply drum 11 is fitted inside the circular hole, and a large-diameter is formed at the peripheral portion of the circular hole. The lower end of the cap 15 is locked.

  A pair of outer auxiliary couplers 142 and 142 protrude from positions 180 degrees apart from each other on the upper surface of the annular plate 140. The outer auxiliary coupler 142 has a cylindrical shape upright from the upper surface of the annular plate 140 and is inserted from below into a side cylindrical hollow protrusion 415 formed on the ceiling wall 410 of the work case 400. The side cylindrical hollow protrusion 415 is inserted from below into an upper surface bulging portion 326 formed on the lower horizontal bar 322B of the movable base 320. Here, the lower horizontal bar 322B of the movable base 320 corresponds to an “outer horizontal board” according to the present invention.

  A central recessed portion 143 that is recessed in the axial direction is formed at the center of the upper end portion of the outer auxiliary coupler 142 (see FIG. 35A). A second auxiliary magnet 141 is fixed to a cylindrical wall surrounding the central depression 143. The second auxiliary magnet 141 has substantially the same configuration as the outer magnet 41, and has a structure in which a plurality of magnet rings 141P are coaxially stacked. Each magnet ring 141P is equally divided into a plurality of magnetic poles in the circumferential direction. Further, the plurality of magnet rings 141P are overlapped so that different magnetic poles are adjacent to each other in the axial direction of the second auxiliary magnet 141, and the magnet rings 141P are fixed to each other by magnetic force. The outer auxiliary coupler 142 integrally provided with the second auxiliary magnet 141 is loosely fitted inside the side cylindrical hollow protrusion 415 so as to be directly movable.

  The side cylindrical hollow protrusions 415 are provided in pairs on the ceiling wall 410 of the work case 400 at positions that are 180 degrees apart from each other with the hollow cylindrical protrusion 413 interposed therebetween. The side cylindrical hollow protrusion 415 has substantially the same configuration as the hollow cylindrical protrusion 413 and has a shape along the outer surface on the upper end side of the outer auxiliary coupler 142. That is, the side cylindrical hollow protrusion 415 protrudes upward and opens to the inner surface side of the ceiling wall 410. Further, the center of the upper surface of the side cylindrical hollow protrusion 415 is depressed, and the central depressed portion 416 is loosely fitted inside the central depressed portion 143 formed in the outer auxiliary coupler 142. Further, the side cylindrical hollow protrusion 415 is loosely fitted in the inner space of the upper surface bulging portion 326 formed on the lower horizontal bar 322B of the movable base 320 so as to be directly movable.

  The upper surface bulging portion 326 is provided in pairs at both ends of the lower horizontal bar 322B of the movable base 320. The upper surface bulging portion 326 has a cylindrical shape protruding from the upper surface of the lower horizontal bar 322B and opened downward, and a columnar inner auxiliary coupler 326B protrudes downward from the center of the upper end wall. The inner auxiliary coupler 326B is inserted inside the central depression 416 in the side cylindrical hollow protrusion 415, and is loosely fitted so as to be linearly movable. A first auxiliary magnet 325 is fixed to the lower portion of the inner auxiliary coupler 326B.

  The first auxiliary magnet 325 has substantially the same configuration as the inner magnet 54 and has a structure in which a plurality of magnet disks 325P are coaxially stacked. Each magnet disk 325P has a shape in which a small hole passes through the center of the disk, and is equally divided into a plurality of magnetic poles in the circumferential direction. The plurality of magnet disks 325P are stacked such that different magnetic poles are adjacent to each other in the axial direction of the first auxiliary magnet 325, and the magnet disks 325P are fixed to each other by magnetic force.

  As shown in FIG. 35, the first auxiliary magnet 325 held at the lower end of the inner auxiliary coupler 326B and the second auxiliary magnet 141 held at the upper end of the outer auxiliary coupler 142 have different magnetic poles in the radial direction. Are opposed to each other and are magnetically connected in a non-contact manner with a side cylindrical hollow protrusion 415 formed on the work case 400 interposed therebetween.

  By the magnetic connection of the first and second auxiliary magnets 141 and 325, the annular plate 140 and the movable base 320 (lower horizontal bar 322B) are connected in a non-contact state. By providing such an auxiliary coupling mechanism, the force to suspend the supply drum 11 from the ceiling wall 410 of the work case 400 is strengthened, and even if the contents of the supply drum 11 become heavier, the supply from the ceiling wall 410 is performed. The drum 11 can be suspended.

  Here, in order to further strengthen the magnetic coupling force of the auxiliary coupling mechanism, as shown in FIG. 35B, a third auxiliary magnet 327 in which a plurality of magnet rings are stacked is fitted to the outside of the upper surface bulging portion 326. In combination, the third auxiliary magnet 327 and the second auxiliary magnet 141 of the outer auxiliary coupler 142 may be magnetically coupled.

  Further, as shown in FIG. 36A, the inner auxiliary coupler 326B is separated from the upper end wall of the upper surface bulging portion 326 and connected between them by a bolt 328, and the position of the inner auxiliary coupler 326B can be adjusted in the vertical direction. It is good.

  Further, as shown in FIG. 36 (B), the side cylindrical hollow protrusion 415 protrudes toward the inner surface side of the ceiling wall 410 and is opened upward, and the upper surface bulge is formed from the lower horizontal bar 322B of the movable base 320. It is good also as a structure which eliminated 326,326.

[Other Embodiments]
The present invention is not limited to the above-described embodiment. For example, the embodiments described below are also included in the technical scope of the present invention, and various other than the following can be made without departing from the scope of the invention. It can be changed and implemented.

  (1) Although the replenisher 200 is provided in the first embodiment, a configuration in which a replenisher is not provided may be employed. Alternatively, the supply drum may be eliminated and the lower end portion of the chute 271 may be directly inserted into the supply port 15 of the supply drum 11.

  (2) In the first embodiment, a solvent and a stirring bar are placed in the receiver 545, and the powder particles received in the receiver 545 by stirring with a magnetic stirrer disposed below the bottom wall of the work case 400. The body may be dissolved in a solvent.

  (3) The supply rotation member 21 provided in the supply drum 11 may be configured so as to receive power from the motor 50, rotate in the supply drum 11, and discharge the granular material by the rotation operation. It is not limited to the structure of the embodiment. For example, when the screen plate 33 is not provided and the lower end portion of the small-diameter cylindrical portion 13 is fully open, the first to third swivel legs 26 to 28 in the supply rotating member 21 are eliminated, and the powder collection blade It is good also as a structure provided only with 23 and the dusting feather 24. FIG.

  (4) In the first embodiment, the granular material is supplied to one receiver 545 in the work case 400. However, while holding the plurality of receivers 545, on the bottom wall of the work case 400, A horizontally movable base is provided, and the plurality of receivers 545 are sequentially controlled so as to be positioned directly below the supply drum 11, whereby the granular material is supplied from the supply drum 11 to the plurality of receivers 545. May be distributed and supplied in predetermined amounts. A deep well plate in which the receiver 545 and the moving base are integrated may be used.

  (5) Further, by holding the plate-like substrate instead of the receiver 545 on the moving base, and supplying the powder while moving the moving base, the line of the powder on the upper surface of the plate-like substrate. You may make it draw.

  (6) In the first embodiment, the outer side of the inner magnet 54 fixed to the output shaft 52 of the motor 50 is configured to be magnetically coupled with the outer magnet 41 provided on the supply drum 11 surrounded. However, the outer magnet 41 provided in the supply drum 11 may be configured so that the outer magnet 41 fixed to the output shaft 52 surrounds and is magnetically coupled.

  (7) In the fourth embodiment, the wire S sent from the supply drum 550 into the work case is dissolved in the liquid in the work case and separated from the subsequent wire S. The wire rod S fed in may be melted by heat and separated from the subsequent wire rod S, or the wire rod S fed into the work case may be cut by a cutting blade.

  (8) In the fifth and sixth embodiments, the ultrasonic transducer 541 and the reflection plate 542 of the standing wave sound field floating device 540 are arranged to face each other in the vertical direction. May be arranged opposite to each other in an oblique direction. Alternatively, two or more ultrasonic transducers may be arranged so that their sound axes intersect at one point, and a standing wave sound field may be formed in a region near the intersection.

  (9) In the seventh embodiment, plasma is used as a heat source for melting, sublimating or ionizing the granular film-forming substance. For example, combustion of oxygen and combustion gas (acetylene, propane) is used. Flame may be used as a heat source (so-called flame spraying method).

  (10) In the first embodiment, when supplying powder particles to the supply drum 11, the motor 50 of the supply drum 11 is temporarily stopped to interrupt supply of the powder particles from the supply drum 11. However, it may be as follows. That is, before supplying powder particles to the supply drum 11, the rotational speed of the motor 50 is made constant, and the average supply amount per unit time at that time is taken into the control device 90. While supplying granules, the supply drum 11 is replenished with powder, and when the supply is completed, the supply amount during the replenishment period is estimated by multiplying the time required for replenishment by the average supply amount. In this case, the supply amount during the replenishment period cannot be feedback-controlled, but the powder body supply from the supply drum 11 can be continuously supplied without being interrupted.

  (11) Instead of the standing wave sound field floating device 540 of the fifth and sixth embodiments, a non-contact levitating device using static electricity or a magnetic field may be provided.

(12) The particle processing apparatus of the fifth embodiment or the sixth embodiment is combined with the coating processing module 620 of the seventh embodiment, and the powder processed by the particle processing apparatus is used as a surface coating material. 620 may be supplied.
Specifically, a mechanism (magnets 547A, 547B, guide pins) for measuring the weight of processed powder particles from the particle processing apparatus of the fifth embodiment or the sixth embodiment (see FIGS. 23 and 27). 549P, the receiver 545, and the powder particle meter 546) are removed, and a chute that penetrates the bottom wall 411 of the work case 400 from the lower position of the standing wave sound field floating device 540 in an airtight state is provided, and the lower end of the chute Is connected to the chute 271 of the substance supply apparatus 100 provided in the coating processing module 620 (see FIG. 30). Here, if each valve 272 of the substance supply device 100 provided in the particle processing device and the coating processing module 620 is made automatic, a system in which everything from the production of the surface coating material to the surface coating processing can be constructed.

  (13) An elastic body (spring, rubber) may be used instead of the bolt 328 in the eighth embodiment, or a mechanism combining a bolt and an elastic body may be used.

  (14) In the fifth, sixth, and seventh embodiments, plasma is generated between a pair of parallel plate electrodes arranged in parallel, or between a needle-like electrode and a flat plate, and between a linear electrode and a flat plate electrode. You may generate | occur | produce by applying a voltage between. The plasma generation tube 631 may be a capillary (capillary or capillary tube). What is necessary is just to select these structures suitably according to the target granular material particle | grains and another apparatus structure. In addition, a heater or a gas burner may be used instead of the plasma torch 630 for the purpose of heating the granular material.

  (15) In the fifth, sixth, and seventh embodiments, powder and liquid are supplied to one plasma generation tube 631, but a plurality of plasma generation tubes 631 are provided, and the powder and liquid are provided. May be supplied to separate plasma generation tubes 631.

  (16) In the first embodiment, an ultrasonic generator may be provided that applies ultrasonic vibration to the granular material discharged downward from the supply drum 11 to finely disintegrate the granular material.

(17) In the seventh embodiment, when the workpiece is a long sheet material, a roller unit having a winding roller and a feeding roller can be held by a chuck 627 of the workpiece stage 626, and the roller You may make it convey a sheet material per unit.
Further, a plurality of units having the substance supply and weighing device 100 and the plasma torch 630 are arranged side by side along the sheet material feeding direction by the roller unit with respect to one work case 621 of the coating processing module 620, and the sheet material is On the other hand, a plurality of coating layers may be formed continuously.

  (18) The inner magnet 54 or the outer magnet 41 may be an electromagnet.

  (19) The particle processing apparatus of the fifth embodiment and the particle processing apparatus of the sixth embodiment may be combined to form a particle processing system that performs composite processing.

  (20) In the fifth and sixth embodiments, a sensor or camera for measuring the particle diameter of particles held in a standing wave sound field, or a sensor for measuring temperature, and processing based on the measurement results May be performed.

  (21) In the fifth and sixth embodiments, a uniform magnetic field is generated in the standing wave sound field by the Helmholtz coil, and the processing is performed in a state where particles are concentrated by the action of the magnetic field and the standing wave sound field. You may go. A magnetic field generator other than the Helmholtz coil may be used.

  (22) In the fifth and sixth embodiments, the particles held in the standing wave sound field may be charged by an ionizer, and the processing may be performed in a state where the particles are adhered or repelled.

  (23) In the fifth and sixth embodiments, the particle processing may be performed by generating plasma at the node of the standing wave sound field by the discharge electrode. Further, fine particles of the electrode material released from the discharge electrode when the discharge electrode is subjected to a spark discharge may be attached to the particles of the granular material.

  (24) The particle processing apparatus is not limited to the configurations of the fifth and sixth embodiments, and liquid, gas, heat, plasma, laser, and electrons are supplied to the supply substance discharged from the substance supply and metering apparatus 100. The supply substance may be processed (chemical reaction, washing, drying, baking, melting, ion implantation) or the film may be formed by the processed supply substance by applying lines or the like alone or in combination.

  Specifically, for example, a through hole is formed in the solid substance discharged from the substance supply and metering device with an electron gun or a laser, and then chemical treatment (film formation treatment or the like) is performed in the through hole by gas and plasma, Next, the surface of the solid substance may be washed with liquid or subjected to chemical treatment (film formation treatment or the like), and then the fixed substance may be dried and fired with heat. These processing treatments may be appropriately combined depending on the target processed product.

  (25) You may construct | assemble and use the system which carries out particle | grain processing management so that processing particle | grains may be received in a deep well plate etc., number management may be carried out per processing particle unit, and it may collate with the processing particle data of processing particle unit.

  (26) Although not included in the technical scope of the present invention, the in-container rotary shaft 20 in the substance supply and metering device 100 passes through the through hole in the upper end wall of the supply drum 11 and is connected to the rotor 50R of the motor 50. A known magnetic seal mechanism (see, for example, Japanese Patent No. 3006780) including a plurality of stages of magnetic fluid seals is provided between the outer peripheral surface of the container internal rotating shaft 20 and the inner peripheral surface of the through hole. May be.

11,500,550 Supply drum (Supply material container)
15A Supply port 17 Small diameter cap (second cylindrical hollow protrusion)
17A outer cylinder wall 17B inner cylinder wall 17D annular wall (doughnut-shaped disk)
21 Supply rotation member 26 1st turning leg part (1st arch crushing leg part)
27 Second swivel leg (second arch crush leg)
33A slit (powder outlet)
41 Outer magnet (second coupling magnet)
41P Magnet Ring 50 Motor (Rotary drive source)
54 Inner magnet (first coupling magnet)
54P Magnet disk 60, 60 Concavity and convexity engagement part (container engagement mechanism)
100, 103, 104 Substance supply metering device 121 Granule extruded piece 130 Side outlet (powder outlet)
140 Annular plate (inner horizontal plate)
141 Second auxiliary magnet 200 Supply machine 211 Supply drum (sealed container)
213 Supply pipe 218 Seal member 270 Hopper 271 Chute 272, 272 Valve 300 Measuring instrument (load measuring instrument)
310 Fixed base 320 Movable base 322B Lower horizontal bar (outer horizontal board)
325 First auxiliary magnet 400, 420, 621 Work case 410, 622 Ceiling wall 413 Hollow cylindrical protrusion (first hollow cylindrical protrusion)
413A outer cylinder wall 413B inner cylinder wall 413D annular wall (doughnut-shaped disk)
422 Discharge port 511 Rotor (supply rotation member)
541 Ultrasonic vibrator 541A Discharge path (powder passage)
542 Reflector 543 Introduction furnace (powder passage)
545 Receptor 546 Powder and Particle Meter (Powder Particle Weight Meter)
547A, 547B Magnet 549H Guide hole (Receptor guide)
549P Guide pin (Receptor guide)
551 bobbin (supply rotating member)
552 Wire guide pipe 600 Coating system 601A, 602A Transfer arm (outer actuator)
603 Heat treatment module (heating furnace)
620 Coating processing module (coating equipment)
623 Inner case 625 Moving arm (inner actuator)
630 Plasma torch (powder processing means)
631 Plasma generation tube F1 Plasma S Wire W Work

Claims (23)

A supply substance container containing a supply substance is accommodated in a closed space in a work case, suspended from the ceiling wall of the work case, and a rotation of a supply rotation member extending vertically in the supply substance container The supply substance is discharged from the supply substance container by rotating about a shaft, and is supplied to a receiving unit disposed at a lower part of the work case. The supply substance, the supply rotation member, and other contents In the substance supply measuring device capable of measuring a change in the weight of the entire supply substance container including the supply substance supply amount to the receiving unit with a load measuring instrument,
A fixed base fixed to the outside of the work case and partially or entirely disposed above and outside the work case;
A stator portion suspended from the fixed base and disposed above and outside the work case and held non-rotatably on the fixed base; and a support rotation member pivotally supported by the stator portion so as to be rotatable. A rotational drive source composed of a rotor portion arranged coaxially;
A first coupling magnet fixed to the rotor portion and disposed outside the ceiling wall of the work case;
A container engaging mechanism that is formed between the supply substance container and the ceiling wall of the work case, and engages the supply substance container with respect to the ceiling wall so that the supply substance container can move up and down and cannot rotate;
It is accommodated in the supply substance container, is fixed to the supply rotation member so as to be integrally rotatable, and is magnetically coupled to the first coupling magnet in a non-contact state, and the rotation of the rotor portion is A second coupling magnet that transmits the weight of the entire supply substance container to the first coupling magnet while transmitting to the supply rotating member;
The load measuring device is arranged between the rotational drive source and the fixed base so that a change in the weight of the entire supply substance container applied to the first coupling magnet can be measured. A substance supply weighing device characterized by A plurality of magnet rings in which S magnetic poles and N magnetic poles are alternately arranged in the circumferential direction are stacked on the same axis, and the phases of the magnet rings are fixed so that different magnetic poles are adjacent in the axial direction. An outer magnet,
A plurality of magnet disks each having a columnar or cylindrical shape loosely fitted inside the outer magnet and having S magnetic poles and N magnetic poles alternately arranged in the circumferential direction are coaxially stacked, and different magnetic poles in the axial direction. A magnet coupling capable of transmitting rotation and axial force by an inner magnet formed by fixing the phases of the magnet disks so as to be adjacent to each other,
One of the inner magnet and the outer magnet is used as the first coupling magnet, and the other is used as the second coupling magnet. The ceiling wall of the work case and the supply substance container 2. The substance supply and metering device according to claim 1, wherein the upper end wall has a cylindrical structure corresponding to the inner magnet and the outer magnet. A plurality of magnet rings in which S magnetic poles and N magnetic poles are alternately arranged in the circumferential direction are stacked on the same axis, and the phases of the magnet rings are fixed so that different magnetic poles are adjacent in the axial direction. An outer magnet,
A plurality of magnet disks each having a columnar or cylindrical shape loosely fitted inside the outer magnet and having S magnetic poles and N magnetic poles alternately arranged in the circumferential direction are coaxially stacked, and different magnetic poles in the axial direction. A magnet coupling capable of transmitting rotation and axial force by an inner magnet formed by fixing the phases of the magnet disks so as to be adjacent to each other,
While the inner magnet is the first coupling magnet, the outer magnet is the second coupling magnet,
Provided on the ceiling wall of the work case is a first cylindrical hollow protrusion formed by closing the upper end of the outer cylinder wall and the inner cylinder wall concentrically with a donut-shaped disk. The inner magnet is freely loosely fitted inside the inner cylindrical wall in the cylindrical hollow protrusion,
A second cylindrical hollow protrusion formed by closing the upper end of the outer cylinder wall and the inner cylinder wall concentrically with a donut-shaped disk at the upper end of the supply substance container is provided. The outer magnet is rotatably fitted between the outer cylindrical wall and the inner cylindrical wall of the cylindrical hollow protrusion of the first cylindrical hollow protrusion, and the second cylindrical hollow protrusion is inserted into the first cylindrical hollow protrusion. It was loosely fitted between the outer cylinder wall and the inner cylinder wall so as to be able to move linearly, and the magnet disks of the inner magnet were respectively arranged and magnetically coupled inside the magnet rings of the outer magnet. The substance supply metering device according to claim 1 characterized by things. The load measuring instrument is opposed to the upper side of the ceiling wall of the work case, and an outer horizontal plate in which the stator portion of the rotational drive source is fixed at the center,
An inner horizontal plate that protrudes laterally from the supply substance container, sandwiches the ceiling wall of the work case, and faces the outer horizontal plate from below;
A plurality of first auxiliary magnets fixed at a plurality of positions that are point-symmetric with respect to the stator portion of the rotational drive source of the outer horizontal plate;
A plurality of second auxiliary magnets fixed in positions vertically opposite to the plurality of first auxiliary magnets in the inner horizontal plate and magnetically coupled to the first auxiliary magnets, respectively; The substance supply measuring device according to any one of claims 1 to 3.   5. The substance supply and metering device according to claim 1, wherein the closed space in the work case is hermetically sealed. A replenishment port formed in the supply substance container and always open upward or sideways; and
The replenishment pipe which replenishes the said supply substance inside the said supply port in the state which penetrates the inside and outside of the said work case, and is not in contact with the said supply substance container is characterized by the above-mentioned. 4. The substance supply and metering device according to any one of 3 above. A seal member that seals a portion of the work case through which the replenishment pipe passes is provided, and the closed space in the work case is hermetically sealed.
A sealed space disposed outside the work case and connected to the inside of the work case via the replenishment pipe, and the supply material accommodated in the sealed space accommodates the supply material via the refill pipe The substance supply metering device according to claim 6, further comprising a replenisher capable of replenishing the container.   The replenisher includes a sealed container having the sealed space inside, a chute penetrating the upper end wall of the sealed container in an airtight state, a hopper connected to an upper end portion of the chute, and an upper end side of the chute The substance supply and metering device according to claim 7, further comprising a pair of valves capable of closing the lower end side. The feed substance is a powder,
The supply substance container is provided with a granular material discharge port that opens downward or laterally, and a load is applied to the granular material by the supply rotation member to be outside the granular material discharge port. The substance supply and metering device according to claim 1, wherein the substance supply and metering device is discharged. The granular material outlet is formed on the bottom wall of the supply substance container and is opened downward, and is sized to be closed by a granular arch formed by adhering the granular materials,
The supply rotating member swivels around the rotation axis and extends toward the bottom wall, and applies an external force to the powder arch to form the powder arch. A plurality of arch crushing legs for forcibly dropping the powder body outlet from the powder outlet to the bottom wall,
The plurality of arch crushing legs include a first arch crushing leg having a relatively small distance between the lower end and the bottom wall, and a second arch crushing leg having a relatively large distance between the lower end and the bottom wall. The substance supply metering device according to claim 9, further comprising a portion. The particulate discharge port is formed on the side wall of the supply substance container and opened to the side,
The supply rotating member extends from the rotating shaft toward the rear side of the supply material container toward the side wall of the supply substance container, and extrudes the granular material from the granular material discharge port by rotation. The substance supply measuring device according to claim 9 provided with a piece. The feed material is a liquid;
2. A pump mechanism for applying a pressure to the liquid by the supply rotating member and discharging the liquid to the outside of the supply substance container in the supply substance container. 9. The substance supply / metering device according to any one of the above. The feed material is a wire;
The receiving part is held in a state where the wire can be melted or dissolved,
The supply substance container is provided with a wire guide pipe for inserting the wire inside and guiding the wire to the receiving unit.
The wire rod is wound around the supply rotation member, and the wire rod is supplied from the supply rotation member to the wire rod guide pipe by the rotation of the supply rotation member. The material supply metering device according to the above.   14. The work case according to claim 1, wherein the work case has a container structure, stores liquid as the receiving unit, and can supply the supply substance to the liquid from the supply substance container. Substance supply weighing device. The substance supply and metering device according to any one of claims 1 to 11,
An ultrasonic transducer and a reflective plate are arranged opposite to each other in the receiving part of the work case, and a standing wave sound field is formed by resonating ultrasonic waves between the ultrasonic transducer and the reflective plate. A standing wave sound field generating device capable of holding the particles discharged from the air in the position of the ultrasonic node resonated in the standing wave sound field,
A powder processing means for applying a liquid, gas, heat, and plasma to the standing wave sound field to form a processing atmosphere field and processing particles of the powder held in the air; A particle processing apparatus comprising:   The ultrasonic transducer and the reflection plate are arranged to face each other in the vertical direction, and a powder particle passage that penetrates in the vertical direction is coaxially formed in the ultrasonic transducer and the reflection plate. And the granular material from the supply substance container passes through the granular material passage of one of the ultrasonic vibrator or the reflector and is supplied to the standing wave sound field. When it is turned off, it passes through the other powder particle passage of the ultrasonic vibrator or the reflecting plate and is discharged downward from between the ultrasonic vibrator and the reflecting plate. The particle processing apparatus according to claim 15, wherein the apparatus is a particle processing apparatus.   A plurality of the ultrasonic nodes are formed in the standing wave sound field, and the powder particles can be held in each node, and the powder material processing means includes the powder particles held in the ultrasonic waves The particle processing apparatus according to claim 15 or 16, wherein liquid, gas, heat, and plasma can be applied toward the body. A substance supply and metering device according to any one of claims 1 to 11, comprising:
Fixed to the ceiling wall of the work case, provided with an inner case that accommodates the entire supply substance container in a non-contact state and has a discharge port at a lower end portion;
The upper end opening of the plasma generation tube whose upper and lower ends are open is connected to the discharge port, and the granular material discharged from the supply substance container is used as the receiving unit by the gas supplied to the inner case. A particle processing apparatus characterized in that a particle is processed by the plasma by being conveyed to the plasma generation tube and generating plasma in the plasma generation tube in that state.   The particle processing apparatus according to claim 18, wherein the plasma generation tube has a cylindrical inner surface, and a gas for generating plasma is supplied along a tangent to the inner surface of the cylinder. The substance supply and metering device according to any one of claims 1 to 11,
Liquid, gas, heat around the granular material that is disposed between the bottom wall of the work case and the supply substance container in the closed space in the work case and discharged downward from the supply substance container. , Forming a processing atmosphere field by applying plasma, and processing the powder and particles,
A receptacle for receiving the processed granular material, disposed below the working atmosphere field in the working case;
A receiver guide provided on the bottom wall of the work case for guiding the receiver up and down and horizontally movable;
A powder weight measuring instrument arranged vertically below the receptacle in the outer region of the bottom wall of the work case;
A magnet that repels each other is attached to the powder particle weight measuring device and the receiver, and the weight of the processed powder material can be measured by the powder particle weight measuring device. Particle processing equipment. The substance supply and metering device according to any one of claims 1 to 11,
Powder particles that are arranged between the bottom wall of the work case and the supply substance container in the closed space in the work case and melt or sublimate or ionize the powder discharged downward from the supply substance container. Body treatment means;
Wherein arranged in the lower part of the working casing, and an inner actuator that can be attached to components of the melt or sublimation or ionized granular material on the surface of the workpiece while moving holds word over click,
A coating apparatus, wherein a coating layer is formed by a constituent component of the granular material adhered to the surface of the workpiece. A plurality of coating apparatuses according to claim 21, wherein the coating layers having different compositions can be formed by the coating apparatuses,
An outer actuator common to each coating device is provided outside the work case,
A coating system in which the outer actuator delivers the workpiece to / from each inner actuator of each coating apparatus.   23. The coating system according to claim 22, further comprising a heating furnace that heats the workpiece in a reduced pressure state, wherein gas is removed or etched from the workpiece before the coating layer is formed.