JP2006080672A5 - - Google Patents

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Publication number
JP2006080672A5
JP2006080672A5 JP2004260145A JP2004260145A JP2006080672A5 JP 2006080672 A5 JP2006080672 A5 JP 2006080672A5 JP 2004260145 A JP2004260145 A JP 2004260145A JP 2004260145 A JP2004260145 A JP 2004260145A JP 2006080672 A5 JP2006080672 A5 JP 2006080672A5
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JP
Japan
Prior art keywords
hole
piezoelectric oscillator
piezoelectric
package
oscillator according
Prior art date
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Application number
JP2004260145A
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Japanese (ja)
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JP4692715B2 (en
JP2006080672A (en
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Priority to JP2004260145A priority Critical patent/JP4692715B2/en
Priority claimed from JP2004260145A external-priority patent/JP4692715B2/en
Publication of JP2006080672A publication Critical patent/JP2006080672A/en
Publication of JP2006080672A5 publication Critical patent/JP2006080672A5/ja
Application granted granted Critical
Publication of JP4692715B2 publication Critical patent/JP4692715B2/en
Expired - Fee Related legal-status Critical Current
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Claims (10)

圧電振動片とこの圧電振動片を発振させる回路を有する半導体素子とをパッケージに搭載した圧電発振器であって、
前記パッケージには貫通孔が形成され、
前記貫通孔は導電性の封止材によって閉塞されており、
前記封止材と前記半導体素子とが電気的に接続されていることを特徴とする圧電発振器。
A piezoelectric oscillator in which a piezoelectric vibrating piece and a semiconductor element having a circuit for oscillating the piezoelectric vibrating piece are mounted in a package,
A through hole is formed in the package,
The through hole is closed by a conductive sealing material,
The piezoelectric oscillator, wherein the sealing material and the semiconductor element are electrically connected .
前記封止材は、前記貫通孔に形成された導電膜と導通されており、
前記導電膜と前記半導体素子との間を電気的に接続する電気的接続手段前記パッケージに形成されていることを特徴とする請求項1に記載の圧電発振器。
The sealing material is electrically connected to the conductive film formed in the through hole,
The piezoelectric oscillator according to claim 1, characterized in that electrical connecting means for electrically connecting between the semiconductor element and the conductive film is formed on the package.
前記パッケージは内部に前記圧電振動片を収容する空間を有し、The package has a space for accommodating the piezoelectric vibrating piece therein,
前記貫通孔が前記封止材によって閉塞されることにより前記空間が気密に封止されていることを特徴とする請求項1または2に記載の圧電発振器。3. The piezoelectric oscillator according to claim 1, wherein the space is hermetically sealed by closing the through hole with the sealing material.
前記貫通孔は、信号の入力および出力の少なくともいずれか一方を行う入出力電極であることを特徴とする請求項1ないし3のいずれかに記載の圧電発振器。4. The piezoelectric oscillator according to claim 1, wherein the through-hole is an input / output electrode that performs at least one of input and output of a signal. 前記貫通孔は、前記パッケージに形成された外部電極と同じ面に形成されていることを特徴とする請求項1ないし4のいずれかに記載の圧電発振器。 The through hole, the piezoelectric oscillator according to any one of claims 1 to 4, characterized in that it is formed on the same surface as the external electrodes formed on the package. 前記貫通孔は、前記外部電極に隣接して配置されたことを特徴とする請求項5に記載の圧電発振器。 The piezoelectric oscillator according to claim 5 , wherein the through hole is disposed adjacent to the external electrode. 前記外部電極は、凹部を備えたことを特徴とする請求項5または6に記載の圧電発振器。 The piezoelectric oscillator according to claim 5 , wherein the external electrode includes a concave portion. 請求項1ないしのいずれかに記載の圧電発振器を備えたことを特徴とする電子機器。 An electronic apparatus comprising the piezoelectric oscillator according to any one of claims 1 to 7. 圧電振動片とこの圧電振動片を発振させる回路を有する半導体素子とをパッケージに搭載した圧電発振器の製造方法であって、
前記パッケージに形成された貫通孔を導電性の封止材で封止し、前記半導体素子と前記封止材とを電気的に接続する工程と、
封止後の前記貫通孔を用いて、発振周波数調整用データを前記半導体素子に書き込む書き込み工程と、
を備えたことを特徴とする圧電発振器の製造方法。
A method for manufacturing a piezoelectric oscillator in which a piezoelectric resonator element and a semiconductor element having a circuit for oscillating the piezoelectric resonator element are mounted in a package,
A step of sealingly and electrically connects the sealing member and the semiconductor element a through hole formed in the package by a conductive sealing material,
A writing step of writing oscillation frequency adjustment data into the semiconductor element using the through-hole after sealing;
A method for manufacturing a piezoelectric oscillator, comprising:
前記書き込み工程は、前記貫通孔を封止している前記導電性の封止材に対してプローブを接触させて行うことを特徴とする請求項に記載の圧電発振器の製造方法。 10. The method of manufacturing a piezoelectric oscillator according to claim 9 , wherein the writing step is performed by bringing a probe into contact with the conductive sealing material sealing the through hole.
JP2004260145A 2004-09-07 2004-09-07 Piezoelectric oscillator, electronic device, and method for manufacturing piezoelectric oscillator Expired - Fee Related JP4692715B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004260145A JP4692715B2 (en) 2004-09-07 2004-09-07 Piezoelectric oscillator, electronic device, and method for manufacturing piezoelectric oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004260145A JP4692715B2 (en) 2004-09-07 2004-09-07 Piezoelectric oscillator, electronic device, and method for manufacturing piezoelectric oscillator

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010049441A Division JP2010124494A (en) 2010-03-05 2010-03-05 Piezoelectric oscillator, electronic apparatus and method of manufacturing piezoelectric oscillator

Publications (3)

Publication Number Publication Date
JP2006080672A JP2006080672A (en) 2006-03-23
JP2006080672A5 true JP2006080672A5 (en) 2007-11-01
JP4692715B2 JP4692715B2 (en) 2011-06-01

Family

ID=36159795

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004260145A Expired - Fee Related JP4692715B2 (en) 2004-09-07 2004-09-07 Piezoelectric oscillator, electronic device, and method for manufacturing piezoelectric oscillator

Country Status (1)

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JP (1) JP4692715B2 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4973290B2 (en) * 2006-06-12 2012-07-11 セイコーエプソン株式会社 Probe contact electrode, package, and electronic device
JP4952076B2 (en) * 2006-06-12 2012-06-13 セイコーエプソン株式会社 Electrical characteristic measuring apparatus and electrical characteristic measuring method
JP4973752B2 (en) * 2006-06-12 2012-07-11 セイコーエプソン株式会社 Electronic device package manufacturing method and electronic device manufacturing method
JP5100211B2 (en) * 2007-06-13 2012-12-19 日本電波工業株式会社 Crystal oscillator for surface mounting
JP5122902B2 (en) * 2007-10-05 2013-01-16 京セラクリスタルデバイス株式会社 Piezoelectric oscillator
JP4851549B2 (en) * 2009-02-10 2012-01-11 日本電波工業株式会社 Piezoelectric device
JP6051577B2 (en) 2012-04-20 2016-12-27 セイコーエプソン株式会社 Electronic devices and electronic equipment
JP6098224B2 (en) * 2013-02-26 2017-03-22 株式会社大真空 Surface mount type piezoelectric oscillator
JP2019220795A (en) * 2018-06-18 2019-12-26 株式会社大真空 Piezoelectric generator

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH104152A (en) * 1996-06-17 1998-01-06 Matsushita Electric Ind Co Ltd Electronic component
JP2001094378A (en) * 1999-09-22 2001-04-06 Nippon Dempa Kogyo Co Ltd Surface mounted container, piezoelectric device and temperature compensating quartz oscillator
JP2002190710A (en) * 2000-12-20 2002-07-05 Nippon Dempa Kogyo Co Ltd Crystal oscillator for surface mounting

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