JP2006072143A

JP2006072143A - Electrostatic driving device, shutter apparatus, and imaging module

Info

Publication number: JP2006072143A
Application number: JP2004257573A
Authority: JP
Inventors: Sumio Kawai; 澄夫川合
Original assignee: Olympus Corp
Current assignee: Olympus Corp
Priority date: 2004-09-03
Filing date: 2004-09-03
Publication date: 2006-03-16

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electrostatic driving device capable of driving a moving body smoothly and obtaining a large driving force even with a small configuration, to provide a shutter using the electrostatic driving device and to provide an imaging module equipped with the shutter. <P>SOLUTION: The electrostatic driving device comprises: a fixed member (1a) provided with a plurality of electrode groups each of which is composed of a plurality of driving electrodes and has different signals applied; and a plurality of moving members (24a-1, 24a-2, and 24a-3) driven by electrostatic forces generated in the plurality of electrode groups. At least one of the plurality of moving members is driven over two or more of the electrode groups. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、静電気力を利用して移動体を駆動する静電駆動装置、シャッタ装置及び撮像モジュールに関する。 The present invention relates to an electrostatic drive device, a shutter device, and an imaging module that drive a moving body using electrostatic force.

従来、静電気力を利用して対象物を駆動する静電駆動の方法が知られている。特許文献１には、静電駆動をカメラのシャッタ機構に利用した技術が記載されている。以下、図１２に基づいて説明する。 2. Description of the Related Art Conventionally, an electrostatic driving method for driving an object using electrostatic force is known. Patent Document 1 describes a technique that uses electrostatic driving for a shutter mechanism of a camera. Hereinafter, a description will be given with reference to FIG.

シャッタ機構１２０は、円形開口１２４が設けられたステータ１２１と光を遮光するフィルム状部材からなるスライダ１２２、１２３からなっている。ステータ１２１には帯状電極１２５が設けられており、スライダ１２２、１２３は電源を入れることによってはじめて帯電電極１２５と対応するように、帯電電極１２５により帯状に帯電される。 The shutter mechanism 120 includes a stator 121 provided with a circular opening 124 and sliders 122 and 123 made of a film-like member that blocks light. The stator 121 is provided with a strip electrode 125, and the sliders 122 and 123 are charged in a strip shape by the charging electrode 125 so as to correspond to the charging electrode 125 only when the power is turned on.

このような状態で帯電電極１２５に適切な位相で正負の電圧を印加することによって、帯電電極１２５とこれに対応するように、帯状に帯電したスライダ１２２、１２３との間に吸引力と反発力が働き、ステータ１２１に対してスライダ１２２、１２３を移動させることができる。
特開平８−２２０５９２号公報 In such a state, by applying positive and negative voltages to the charging electrode 125 with an appropriate phase, an attractive force and a repulsive force are generated between the charging electrode 125 and the sliders 122 and 123 charged in a strip shape so as to correspond thereto. The sliders 122 and 123 can be moved with respect to the stator 121.
Japanese Patent Laid-Open No. 8-220592

しかしながら、特許文献１記載のシャッタ機構には、なお次の課題が存していた。 However, the shutter mechanism described in Patent Document 1 still has the following problems.

特許文献１記載のシャッタ機構には、スライダ１２２、１２３は面方向に少なくとも遮光すべき面積と対等なスライダを退避させるスペースが必要である。このため、シャッタ（静電駆動装置）は大型なものとなっていた。 In the shutter mechanism described in Patent Document 1, the sliders 122 and 123 require a space for retracting at least the area that should be shielded from light in the surface direction. For this reason, the shutter (electrostatic drive device) is large.

また、２つのスライダ１２２、１２３により構成されているのでレンズシャッタのように開口中央から露光させるといった動作しか出来ず、フォーカルプレーンシャッタのようにスリットを形成してスリットが開口部を走査するといった動作ができない。その結果、高速なシャッタスピードが得られなかった。 Further, since it is composed of two sliders 122 and 123, only an operation of exposing from the center of the opening like a lens shutter can be performed, and an operation of forming a slit and scanning the opening by a slit like a focal plane shutter. I can't. As a result, a high shutter speed could not be obtained.

さらに、スライダ１２２、１２３を駆動する帯状電極１２５はステータ１２１の片面にのみ設けられている。従って、複数のスライダを駆動する場合は、帯状電極２５は面方向に異なった領域に設ける必要が生じ、静電駆動装置が面方向に大きくなってしまったり、駆動力が小さくなったりしていた。また、複数のスライダが同一方向に吸引されるため、互いにスライダが接触し、正常に動作できないといったことも生じていた。 Further, the strip electrode 125 for driving the sliders 122 and 123 is provided only on one surface of the stator 121. Therefore, when driving a plurality of sliders, it is necessary to provide the belt-like electrode 25 in different regions in the surface direction, and the electrostatic drive device becomes larger in the surface direction or the driving force becomes smaller. . In addition, since a plurality of sliders are sucked in the same direction, the sliders are in contact with each other and cannot operate normally.

本発明は、上述の課題を解決するためになされたものであり、移動体を滑らかに駆動することができ、しかも小型で大きな駆動力が得られる静電駆動装置および、静電駆動装置を用いたシャッタ装置、及びそのシャッタ装置を搭載した撮像モジュールを提供することを目的とするものである。 The present invention has been made in order to solve the above-mentioned problems, and uses an electrostatic drive device and an electrostatic drive device that can smoothly drive a moving body and can obtain a small driving force. It is an object of the present invention to provide a shutter device and an imaging module equipped with the shutter device.

上記課題を解決するための、本発明に係る請求項１に記載の静電駆動装置は、複数の駆動用電極からなり、それぞれ印加する信号が異なる複数の電極群が設けられた固定部材と、上記複数の電極群に発生する静電気力により駆動される複数の移動部材とからなり、上記複数の移動部材のうち少なくとも1つは、上記電極群のうち２つ以上の電極群にわたって駆動される。 In order to solve the above problems, the electrostatic drive device according to claim 1 according to the present invention comprises a plurality of drive electrodes, and a fixing member provided with a plurality of electrode groups each having a different signal applied thereto, The plurality of moving members are driven by electrostatic force generated in the plurality of electrode groups, and at least one of the plurality of moving members is driven over two or more electrode groups of the electrode groups.

また本発明に係る請求項２に記載の静電駆動装置は、複数の駆動用電極からなり、それぞれ印加する信号が異なる複数の第1の電極群が設けられた第１の固定部材と、上記複数の第１の電極群に発生する静電気力により駆動される複数の第１の移動部材と、複数の駆動用電極からなり、上記第１の電極群に対応してそれぞれ印加する信号が異なる複数の第２の電極群が設けられた第２の固定部材と、上記複数の第２の電極群に発生する静電気力により駆動される複数の第２の移動部材と、を具備し、上記対応する第１の電極群及び第２の電極群にそれぞれ駆動される上記第１の移動部材と上記第２の移動部材とは連動して駆動される。 According to a second aspect of the present invention, there is provided an electrostatic drive device comprising: a first fixing member comprising a plurality of first electrode groups each comprising a plurality of drive electrodes, each having a different applied signal; A plurality of first moving members driven by electrostatic force generated in the plurality of first electrode groups and a plurality of driving electrodes, and a plurality of different signals applied to the first electrode groups, respectively. And a second fixing member provided with the second electrode group, and a plurality of second moving members driven by electrostatic force generated in the plurality of second electrode groups. The first moving member and the second moving member respectively driven by the first electrode group and the second electrode group are driven in conjunction with each other.

また本発明に係る請求項３に記載の静電駆動装置は、複数の駆動用電極からなり、それぞれ印加する信号が異なる複数の第1の電極群を１方の面に設け、他方の面に複数の駆動用電極からなり、それぞれ印加する信号が異なる複数の第２の電極群が設けられた固定部材と、上記複数の第１の電極群に発生する静電気力により駆動される複数の第１の移動部材と、上記複数の第２の電極群に発生する静電気力により駆動される複数の第２の移動部材とを具備し、上記対応する第１の電極群及び第２の電極群にそれぞれ駆動される上記第１の移動部材と上記第２の移動部材とは連動して駆動される。 According to a third aspect of the present invention, there is provided an electrostatic drive device comprising a plurality of drive electrodes, each provided with a plurality of first electrode groups having different applied signals on one surface and on the other surface. A fixing member comprising a plurality of driving electrodes, each provided with a plurality of second electrode groups with different applied signals, and a plurality of first electrodes driven by electrostatic force generated in the plurality of first electrode groups. And a plurality of second moving members driven by electrostatic force generated in the plurality of second electrode groups, and the corresponding first electrode group and second electrode group respectively The first moving member and the second moving member to be driven are driven in conjunction with each other.

また本発明に係る請求項４に記載の静電駆動装置は、複数の駆動用電極からなり、それぞれ印加する信号が異なる複数の電極群が、少なくとも一方の面に設けられた固定部材と、上記複数の電極群に発生する静電気力により駆動される複数の移動部材と、を具備し、上記複数の移動部材は、上記固定部材の上記電極群が設けられている面に略平行な略平面上に設けられている。 According to a fourth aspect of the present invention, there is provided an electrostatic drive device comprising a plurality of drive electrodes, each of which has a plurality of electrode groups with different applied signals, the fixing member provided on at least one surface; A plurality of moving members driven by electrostatic force generated in the plurality of electrode groups, wherein the plurality of moving members are on a substantially plane substantially parallel to a surface of the fixed member on which the electrode groups are provided. Is provided.

また本発明に係る請求項５に記載のシャッタ装置は、所定の大きさを持つ光線通過可能領域を有する固定部材と、上記固定部材の少なくとも一方の面に対して略平行に移動可能であって、上記光線通過可能領域を被覆することにより該領域を通過する光線を制御可能な複数の移動部材と、を具備し、前記複数の移動部材は、上記固定部材の少なくとも一方の面に対して略平行な略平面上を移動可能な少なくとも１つの第１の移動部材と、上記固定部材の少なくとも一方の面に対して略平行であり、かつ、上記第１の移動部材が移動可能な平面とは異なる略平面上を移動可能な少なくとも１つの第２の移動部材とからなり、上記光線通過可能領域を被覆して上記光線を制御する際、少なくとも上記第１の移動部材と上記第２の移動部材とで上記光線通過可能領域を被覆している。 According to a fifth aspect of the present invention, there is provided the shutter device according to the fifth aspect of the present invention, wherein the shutter is movable substantially parallel to the fixed member having a predetermined size and a light-passable region and at least one surface of the fixed member. A plurality of moving members capable of controlling the light rays passing through the region by covering the light-passable region, wherein the plurality of moving members are substantially at least one surface of the fixed member. The at least one first moving member that can move on a substantially parallel plane and the plane that is substantially parallel to at least one surface of the fixed member and that can move the first moving member And at least one second moving member that can move on different substantially planes, and controls at least the first moving member and the second moving member when the light beam is controlled by covering the light ray passable region. And above Covering the wire passage area.

また本発明に係る請求項６に記載のシャッタ装置は、所定の大きさをもつ光線通過可能領域と、複数の駆動用電極からなり、それぞれ印加する信号が異なる複数の第1の電極群と、複数の駆動用電極からなり、それぞれ印加する信号が異なる複数の第２の電極群と、上記第１の電極群及び上記第２の電極群が設けられた固定部材と、上記第１の電極群に信号電圧を印加することにより発生する電荷により、上記固定部材に対して相対移動されてかつ遮光性を有する複数の第１の移動部材と、上記第２の電極群に信号電圧を印加することにより発生する電荷により、上記固定部材に対して相対移動され、かつ遮光性を有する複数の第２の移動部材とをもち、上記第１の移動部材及び上記第２の移動部材により上記光線通過領域を通過する光線を制御する。 According to a sixth aspect of the present invention, there is provided the shutter device according to the sixth aspect of the present invention, comprising: a light-passable region having a predetermined size; a plurality of driving electrodes; A plurality of second electrode groups each composed of a plurality of drive electrodes, each having a different applied signal, a fixing member provided with the first electrode group and the second electrode group, and the first electrode group Applying a signal voltage to the plurality of first moving members that are moved relative to the fixed member and have a light-shielding property and the second electrode group by an electric charge generated by applying a signal voltage to the second electrode group And a plurality of second moving members that are moved relative to the fixed member and have a light shielding property, and the light passing region is formed by the first moving member and the second moving member. Control rays passing through I will do it.

また本発明に係る請求項７に記載のシャッタ装置は、上記記載の発明であるシャッタ装置において、上記第１の電極群は、上記固定部材を構成する第１の固定部材に設けられ、上記第２の電極群は、上記固定部材を構成する第２の固定部材に設けられている。 A shutter device according to a seventh aspect of the present invention is the shutter device according to the above-described invention, wherein the first electrode group is provided on a first fixing member constituting the fixing member. The second electrode group is provided on a second fixing member constituting the fixing member.

また本発明に係る請求項８に記載のシャッタ装置は、上記記載の発明であるシャッタ装置において、上記第１の電極群は上記固定部材の一方の面に設けられ、上記第２の電極群は上記固定部材の他の面に設けられている。 The shutter device according to an eighth aspect of the present invention is the shutter device according to the above-described invention, wherein the first electrode group is provided on one surface of the fixing member, and the second electrode group is It is provided on the other surface of the fixing member.

また本発明に係る請求項９に記載のシャッタ装置は、上記記載の発明であるシャッタ装置において、上記第１の固定部材と、上記第２の固定部材とで挟まれて、上記第１の移動部材と、上記第２の移動部材が移動可能に配置されている。 A shutter device according to a ninth aspect of the present invention is the shutter device according to the above-described invention, wherein the first movement is sandwiched between the first fixing member and the second fixing member. The member and the second moving member are movably disposed.

また本発明に係る請求項１０に記載のシャッタ装置は、上記記載の発明であるシャッタ装置において、上記第１の固定部材と上記固定部材とで挟まれて、上記第１の移動部材が移動可能に配置され、上記第２の固定部材と保護部材とで挟まれて、上記第２の移動部材が移動可能に配置されている。 A shutter device according to a tenth aspect of the present invention is the shutter device according to the above-described invention, wherein the first moving member is movable by being sandwiched between the first fixing member and the fixing member. The second moving member is movably disposed between the second fixing member and the protective member.

また本発明に係る請求項１１に記載のシャッタ装置は、上記記載の発明であるシャッタ装置の上記固定部材に撮像素子ユニットを固着した。 In the shutter device according to an eleventh aspect of the present invention, the imaging element unit is fixed to the fixing member of the shutter device according to the invention described above.

本発明に係る静電駆動装置によれば小型で、複数の移動体を滑らかに駆動する静電駆動装置を提供することができる。また、本発明に関わる静電駆動装置を用いたシャッタ装置及び撮像モジュールによれば、小型で高速の露光秒時を実現できるシャッタ装置及び撮像モジュールを提供することができる。 According to the electrostatic driving device of the present invention, it is possible to provide a small electrostatic driving device that smoothly drives a plurality of moving bodies. Further, according to the shutter device and the imaging module using the electrostatic drive device according to the present invention, it is possible to provide a shutter device and an imaging module that can realize a small and high-speed exposure time.

はじめに、静電駆動装置の駆動原理を説明する。 First, the driving principle of the electrostatic driving device will be described.

図１に示すように、静電駆動装置は固定子１と移動子２とを備え、移動子２は固定子１に対して移動自在に構成されている。そして、固定子１には帯状の複数の駆動電極４が所定の間隔で設けられており、移動子２には永久分極された誘導体（以下、エレクトレットという）の部位を備えている。 As shown in FIG. 1, the electrostatic drive device includes a stator 1 and a mover 2, and the mover 2 is configured to be movable with respect to the stator 1. The stator 1 is provided with a plurality of strip-like drive electrodes 4 at a predetermined interval, and the movable element 2 is provided with a part of a permanently polarized derivative (hereinafter referred to as electret).

このような構成において駆動電極４に正負の電圧を周期的に印加すると、駆動電極４と上述のエレクトレットとの間に吸引力もしくは反発力が発生し、結果的に移動子２が固定子１に対して相対移動する。 When positive and negative voltages are periodically applied to the drive electrode 4 in such a configuration, an attractive force or a repulsive force is generated between the drive electrode 4 and the above-described electret, and as a result, the moving element 2 is applied to the stator 1. Move relative to it.

図２の右には、静電駆動装置の断面を模式的に示している。 The right side of FIG. 2 schematically shows a cross section of the electrostatic drive device.

固定子１に並べられたそれぞれの駆動電極４には、駆動回路１０からの電圧信号線が接続されている。この電圧信号線には４相の電圧信号が印加され、従って、駆動電極４には、４本毎に同一の電圧信号が印加される。図２では、駆動電極４にＡ、Ｂ、Ｃ、Ｄの符号を付してこの電圧信号を区別している。移動子２には、固定子１との対向面に永久分極された誘導体（エレクトレット）５を複数備えている。 A voltage signal line from the drive circuit 10 is connected to each drive electrode 4 arranged on the stator 1. A four-phase voltage signal is applied to the voltage signal line. Therefore, the same voltage signal is applied to the drive electrodes 4 every four lines. In FIG. 2, the voltage signals are distinguished by attaching the symbols A, B, C, and D to the drive electrode 4. The mover 2 is provided with a plurality of permanent-polarized derivatives (electrets) 5 on the surface facing the stator 1.

図２の左には、静電駆動装置に印加する電圧信号を発生する駆動回路１０の構成を示している。 The left side of FIG. 2 shows the configuration of the drive circuit 10 that generates a voltage signal to be applied to the electrostatic drive device.

パルス発生回路１２で生成した矩形波列（駆動パルス信号）は、昇圧回路１４と位相器１５に供給される。昇圧回路１４では、入力した矩形波列を、１００Ｖ程度まで昇圧するとともに、２つの極性を有する電圧信号に分岐して、駆動電極Ａ及びＣに供給する。 The rectangular wave train (drive pulse signal) generated by the pulse generation circuit 12 is supplied to the booster circuit 14 and the phase shifter 15. The booster circuit 14 boosts the input rectangular wave train to about 100 V, branches it into voltage signals having two polarities, and supplies them to the drive electrodes A and C.

一方、位相器１５に入力した矩形波列は、９０°位相が遅れた波形となり、その後、昇圧回路１４に入力されて上述と同様の２つの矩形波列となり、駆動電極Ｂ及びＤに供給される。 On the other hand, the rectangular wave train input to the phase shifter 15 has a waveform delayed by 90 °, and is then input to the booster circuit 14 to form two rectangular wave trains similar to those described above, and supplied to the drive electrodes B and D. The

駆動回路１０によって作成されて、駆動電極４に印加される電圧信号列を図３に示す。電圧電極１０４の電圧の状態は、ｔ１〜ｔ４の４つの状態が時間経過に対応して繰り返して変化する。 FIG. 3 shows a voltage signal sequence created by the drive circuit 10 and applied to the drive electrode 4. As for the voltage state of the voltage electrode 104, four states t1 to t4 change repeatedly corresponding to the passage of time.

図４は、静電駆動装置の動作を説明する図である。 FIG. 4 is a diagram for explaining the operation of the electrostatic drive device.

図４（１）は、ｔ１に切り替った直後のエレクトレットと駆動電極の電圧の状態を示している。エレクトレット５ａは、駆動電極Ａから反発力を受け、駆動電極Ｂから吸引力を受ける。また、エレクトレット５ｂは、駆動電極Ｃから反発力を受け、駆動電極Ｄから吸引力を受ける。このため、移動子２は図の右方向に力を受けて、１つの駆動電極ピッチｄ移動する。 FIG. 4A shows the voltage state of the electret and the drive electrode immediately after switching to t1. The electret 5 a receives a repulsive force from the drive electrode A and receives an attractive force from the drive electrode B. The electret 5 b receives a repulsive force from the drive electrode C and receives a suction force from the drive electrode D. For this reason, the movable element 2 receives a force in the right direction in the figure and moves by one drive electrode pitch d.

図４（２）は、ｔ２に切り替った直後のエレクトレットと駆動電極の電圧の状態を示している。エレクトレット５ａは、駆動電極Ａから反発力を受け、駆動電極Ｂから吸引力を受ける。また、エレクトレット５ｂは、駆動電極Ｃから反発力を受け、駆動電極Ｄから吸引力を受ける。このため、移動子２は図の右方向に力を受けて、１つの駆動電極ピッチｄ移動する。 FIG. 4 (2) shows the voltage state of the electret and the drive electrode immediately after switching to t2. The electret 5 a receives a repulsive force from the drive electrode A and receives an attractive force from the drive electrode B. The electret 5 b receives a repulsive force from the drive electrode C and receives a suction force from the drive electrode D. For this reason, the movable element 2 receives a force in the right direction in the figure and moves by one drive electrode pitch d.

図４（３）は、ｔ３に切り替った直後のエレクトレットと駆動電極の電圧の状態を示し、図４（４）は、ｔ４に切り替った直後のエレクトレットと駆動電極の電圧の状態を示している。上述の動作と同様に移動子２は１つの駆動電極ピッチｄ移動する。そして、この動作が繰り返されることで、移動子２は図の右方向に移動する。なお、移動子２を図の左方向に移動するためには、駆動電極４に印加する電圧の極性を逆に切り替えればよい。 FIG. 4 (3) shows the voltage state of the electret and drive electrode immediately after switching to t3, and FIG. 4 (4) shows the voltage state of the electret and drive electrode immediately after switching to t4. Yes. Similar to the above-described operation, the moving element 2 moves by one drive electrode pitch d. Then, by repeating this operation, the movable element 2 moves to the right in the figure. In order to move the movable element 2 in the left direction in the figure, the polarity of the voltage applied to the drive electrode 4 may be switched in reverse.

［第１の実施の形態］
図５は、本発明に係る第１の実施の形態のシャッタ装置を適用した撮像モジュールを示す図であり、図６はその撮像モジュールの断面図である。図５、図６を参照しつつ、撮像モジュールの構成について説明する。 [First Embodiment]
FIG. 5 is a diagram showing an imaging module to which the shutter device according to the first embodiment of the present invention is applied, and FIG. 6 is a cross-sectional view of the imaging module. The configuration of the imaging module will be described with reference to FIGS.

撮像モジュールは、シャッタユニット２１と撮像ユニット２２で構成されている。 The imaging module includes a shutter unit 21 and an imaging unit 22.

シャッタユニット２１は、遮光幕（先幕）２４ａと遮光幕（後幕）２４ｂとを備えたフォーカルプレーンシャッタである。遮光幕（先幕）２４ａは、独立して走行する幕２４ａ−１、幕２４ａ−２からなる。遮光幕（後幕）２４ｂは、独立して走行する幕２４ｂ−１、幕２４ｂ−２からなる。この遮光幕２４ａ、２４ｂは、上述のエレクトレット５（不図示）を備えている。 The shutter unit 21 is a focal plane shutter provided with a light shielding curtain (front curtain) 24a and a light shielding curtain (rear curtain) 24b. The light-shielding curtain (front curtain) 24a includes curtains 24a-1 and 24a-2 that run independently. The light-shielding curtain (rear curtain) 24b includes curtains 24b-1 and 24b-2 that run independently. The light shielding curtains 24a and 24b are provided with the above-described electret 5 (not shown).

そして、先幕２４ａと後幕２４ｂは、エレクトレット５を設けた面を外側に向けて配設されている。先幕２４ａのエレクトレット５の対向面側には、複数の電極群４ａ−１、４ａ−２からなる複数の駆動用電極４ａ（不図示）と光線通過可能領域（または透光部）を設けた第１固定子１ａが設けられている。後幕２４ｂのエレクトレット５の対向面側には、同様に複数の電極群４ｂ−１、４ｂ−２からなる複数の駆動用電極４ｂ（不図示）と光線通過可能領域（または透光部）を設けた第２固定子１ｂが設けられている。 The front curtain 24a and the rear curtain 24b are arranged with the surface on which the electret 5 is provided facing outward. A plurality of driving electrodes 4a (not shown) made up of a plurality of electrode groups 4a-1 and 4a-2 and a light-transmitting region (or a light transmitting portion) are provided on the side of the front curtain 24a facing the electret 5 side. A first stator 1a is provided. Similarly, a plurality of driving electrodes 4b (not shown) made up of a plurality of electrode groups 4b-1 and 4b-2 and a light-transmitting region (or a light transmitting portion) are provided on the opposite surface side of the electret 5 of the rear curtain 24b. The provided second stator 1b is provided.

そして、第１固定子１ａと第２固定子１ｂは、遮光幕２４ａと、遮光幕２４ｂとを挟んで配設されている。また、第１固定子１ａと第２固定子１ｂとの間には断面が矩形形状のスペーサ３１が遮光幕２４ａと、遮光幕２４ｂとを囲んで設けられている。このようにして、シャッタユニット２１は遮光幕２４ａ、２４ｂの駆動範囲を密閉とした構成となっている。 And the 1st stator 1a and the 2nd stator 1b are arrange | positioned on both sides of the light-shielding curtain 24a and the light-shielding curtain 24b. Also, a spacer 31 having a rectangular cross section is provided between the first stator 1a and the second stator 1b so as to surround the light shielding curtain 24a and the light shielding curtain 24b. In this way, the shutter unit 21 has a configuration in which the driving range of the light-shielding curtains 24a and 24b is sealed.

図７に示すように、第１固定子１ａには各々の電極群４ａ−１，４ａ−２に対応して、接続部４ａ−３、４ａ−４において電気的に接続された給電用電極４ａ−５、４ａ−６が設けられている。また、電極２９ａ−１，２９ａ−２を持ち、各電極から導電パターンが引き出されているフレキ２９ａが上記供給用電極に導電接続されている。 As shown in FIG. 7, the first stator 1 a is electrically connected to the electrode portions 4 a-1 and 4 a-2 corresponding to the electrode groups 4 a-1 and 4 a-2, and the power supply electrode 4 a is electrically connected at the connecting portions 4 a-3 and 4 a-4. -5, 4a-6 are provided. Further, a flexible cable 29a having electrodes 29a-1 and 29a-2 from which a conductive pattern is drawn out is electrically connected to the supply electrode.

また、駆動用電極４ａの一部の電極群は開口によって上下に分割されるため、上下に分かれて配置された駆動用電極を接続する透明電極４ａ−７が設けられている。しかし、本発明はこの形態に限定されず、分割された上下の電極をそれぞれ第１固定子１ａの上下の領域を利用して電気接続しても良い。 In addition, since a part of the electrode group of the drive electrode 4a is divided vertically by the opening, a transparent electrode 4a-7 for connecting the drive electrodes arranged separately in the vertical direction is provided. However, the present invention is not limited to this form, and the divided upper and lower electrodes may be electrically connected using the upper and lower regions of the first stator 1a.

さらに、スペーサ３１の設置される面には絶縁材料からなるベース４ａ−８が、ロの字形状に設けられ、第１固定子１ａに設けられた接続部４ａ−３、４ａ−４の突出部を覆う平面を形成している。 Further, a base 4a-8 made of an insulating material is provided in a square shape on the surface on which the spacer 31 is installed, and the protruding portions of the connecting portions 4a-3 and 4a-4 provided in the first stator 1a. The plane which covers is formed.

第２固定子１ｂの構成も、上述の第１固定子１ａの構成と同様であるため、その詳細の説明は省略する。なお、第２固定子１ｂでは、駆動用電極４ｂ、接続部４ｂ−３、４ｂ−４、給電用電極４ｂ−５、４ｂ−６、透明電極４ｂ−７、ベース４ｂ−８、電極２９ｂ−１、２９ｂ−２、フレキ２９ｂが、図７に示されたそれぞれに対応する部材と同じ形状で第２固定子１ｂの裏面側に対称に配置されている。 Since the structure of the 2nd stator 1b is also the same as that of the above-mentioned 1st stator 1a, the detailed description is abbreviate | omitted. In the second stator 1b, the driving electrode 4b, the connecting portions 4b-3 and 4b-4, the feeding electrodes 4b-5 and 4b-6, the transparent electrode 4b-7, the base 4b-8 and the electrode 29b-1 29b-2 and the flexible cable 29b are symmetrically arranged on the back surface side of the second stator 1b in the same shape as the corresponding members shown in FIG.

このように構成することで移動部材（遮光幕２４ａ、２４ｂ）の設けられた空間を簡単に密閉構造に構成することが可能なため、外部から埃の入り込むことがない信頼性の高いシャッタ装置を実現することができる。 With this configuration, the space provided with the moving members (light-shielding curtains 24a and 24b) can be easily configured in a sealed structure, and thus a highly reliable shutter device that does not allow dust to enter from the outside. Can be realized.

ここで、第１固定子１ａ、第２固定子１ｂはガラス等を基板とし、その表面に各々駆動用電極４ａ、４ｂを形成し、さらに駆動用電極４ａ、４ｂ上に絶縁膜を設けている。一方、遮光幕２４ａ、２４ｂは、ポリイミドやテフロン（登録商標）を基材として用い、その一方の面にコロナ放電法により、複数のエレクトレットを形成する（エレクトレット化する）。そして、本実施の形態においては、正負の極性を有するエレクトレット部位が交互に配置されている。 Here, the first stator 1a and the second stator 1b are made of glass or the like as a substrate, and driving electrodes 4a and 4b are formed on the surfaces thereof, respectively, and an insulating film is provided on the driving electrodes 4a and 4b. . On the other hand, the light-shielding curtains 24a and 24b use polyimide or Teflon (registered trademark) as a base material, and form a plurality of electrets on one surface thereof by the corona discharge method. And in this Embodiment, the electret site | part which has a positive / negative polarity is arrange | positioned alternately.

また、第１固定子１ａ、第２固定子１ｂは、駆動用電極４ａ、４ｂが設けられている面を円筒状にしても良い。このように構成すれば、当該面を平面に構成するよりもシャッタの剛性が向上する。また、遮光幕２４ａ、２４ｂは、駆動用電極４ａ、４ｂに対向しない部分を金属幕で構成している。このように形成することによって軽量で遮光性が高く、耐熱性を持ち、大きな遮光効果が得られる。 The first stator 1a and the second stator 1b may have a cylindrical surface on which the driving electrodes 4a and 4b are provided. If comprised in this way, the rigidity of a shutter will improve rather than comprising the said surface in a plane. Further, the light shielding curtains 24a and 24b are formed of metal curtains at portions not facing the driving electrodes 4a and 4b. By forming in this way, it is lightweight and has high light shielding properties, heat resistance, and a large light shielding effect.

撮像ユニット２２は、収納容器２６内に撮像素子２７と信号線２８を収容して固定し、収納容器２６の被写体側を光線通過可能領域部（透光部）を有する第１固定子１ａで覆って構成している。 The imaging unit 22 accommodates and fixes the imaging element 27 and the signal line 28 in the storage container 26, and covers the subject side of the storage container 26 with a first stator 1 a having a light ray passable area (translucent part). Is configured.

このように、第１固定子１ａの裏面と撮像素子２７を収納した収納容器２６とを固着することで、シャッタユニット２１と撮像ユニット２２は一体の撮像モジュールとして構成されている。ここで、収納容器２６を密閉する部材として、第１固定子１ａを用いずに通常使用される撮像素子封止用のカバーガラスを用いて、カバーガラスと保護部材２５ａを固着してももちろん良い。 As described above, the shutter unit 21 and the imaging unit 22 are configured as an integrated imaging module by fixing the back surface of the first stator 1a and the storage container 26 in which the imaging element 27 is stored. Here, as a member for sealing the storage container 26, a cover glass for sealing an image pickup element that is normally used without using the first stator 1a may be used, and the cover glass and the protective member 25a may be fixed. .

この撮像モジュールは、エレクトレットシャッタを用いてシャッタユニット２１を構成しているため、その厚さを従来のシャッタユニットと比較して大幅に減少することができ、薄型化することができる。また、エレクトレットシャッタは、遮光幕２４ａ、２４ｂに誘導される電荷を利用するのではなく、エレクトレットに永久分極されている電荷を利用するため、立ち上がり時間を短縮してシャッタ動作を高速化することができる。 Since this imaging module comprises the shutter unit 21 using an electret shutter, the thickness thereof can be greatly reduced as compared with a conventional shutter unit, and the thickness can be reduced. In addition, since the electret shutter does not use the charges induced in the light shielding curtains 24a and 24b but uses the charges that are permanently polarized in the electret, it is possible to shorten the rise time and speed up the shutter operation. it can.

また、エレクトレットの電荷量は任意に与えることが可能であることから、駆動力が最大となるような最適の電荷量を与えることができ、極めて大きな駆動力を得ることができる。従って、撮像モジュールのサイズに応じた最適なシャッタユニット２１を構成することができる。 In addition, since the electret charge amount can be arbitrarily given, an optimum charge amount that maximizes the driving force can be given, and an extremely large driving force can be obtained. Accordingly, it is possible to configure an optimal shutter unit 21 corresponding to the size of the imaging module.

更に、遮光幕２４ａ、２４ｂは素材として樹脂材料を用いることができるため軽量である。例えば、遮光幕２４ａ、２４ｂは、１０〜２０μの薄い膜で形成することが可能である。従って、動作に必要な電力量は少なく、かつ静かな動作が実現できる。 Further, the light shielding curtains 24a and 24b are lightweight because a resin material can be used as a raw material. For example, the light shielding curtains 24a and 24b can be formed of a thin film of 10 to 20 μm. Therefore, the amount of power required for the operation is small, and a quiet operation can be realized.

図８は、遮光幕（先幕）２４ａと遮光幕（後幕）２４ｂの動作を説明する図である。 FIG. 8 is a diagram for explaining the operation of the light shielding curtain (first curtain) 24a and the light shielding curtain (rear curtain) 24b.

図８（１）に示す初期状態では全閉状態となっている。即ち、幕２４ａ−１と幕２４ｂ−１が露光光線通過可能領域全体を覆い、撮像ユニット２２を被写体光から完全に遮光している。 The initial state shown in FIG. 8 (1) is a fully closed state. That is, the curtain 24a-1 and the curtain 24b-1 cover the entire area where the exposure light beam can pass, and completely shield the imaging unit 22 from the subject light.

次に撮像動作の開始指示に応じて、図８（２）に示すように電極群４ａ−２及び４ｂ−２に信号電圧を印加すると、幕２４ａ−１と幕２４ｂ一１が図中右の方向に移動を開始し、光線通過可能領域を通過して露光が開始される。次に、電極群４ｂ−１に信号電圧を印加して、幕２４ｂ−２を図４の右の方向に移動させる。図２の（２）に示すように、幕２４ａ−１、幕２４ｂ−１、幕２４ｂ−２を等速度で作動させることにより、幕２４ｂ−１と幕２４ｂ−２により形成した露光スリットで開口を走査する。続いて、電極群４ａ−１に信号電圧を印加して、幕２４ａ−２を図中右の方向に移動させ、先に形成したスリット開口以外の開口が形成されないようにする。 Next, when a signal voltage is applied to the electrode groups 4a-2 and 4b-2 as shown in FIG. 8 (2) in response to an instruction to start the imaging operation, the curtains 24a-1 and 24b-11 are moved to the right in the figure. The movement is started in the direction, and exposure is started after passing through the region where light can pass. Next, a signal voltage is applied to the electrode group 4b-1, and the curtain 24b-2 is moved in the right direction of FIG. As shown in FIG. 2 (2), the curtains 24a-1, 24b-1 and 24b-2 are operated at a constant speed, thereby opening the exposure slit formed by the curtains 24b-1 and 24b-2. Scan. Subsequently, a signal voltage is applied to the electrode group 4a-1, and the curtain 24a-2 is moved in the right direction in the figure so that openings other than the previously formed slit opening are not formed.

所定時間が経過後、幕２４ａ−１がスペーサ３１の内側面に当て付いて停止し、次に幕２４ｂ−１が同様にスペーサ３１に当て付いて停止し、幕２４ａ−２と幕２４ｂ−２は信号電圧の印加の停止により停止する。その結果、図８（３）に示すように、幕２４ａ−２と幕２４ｂ−２が光線通過可能領域を覆い、シャッタの露光動作が終了する。 After a predetermined time has elapsed, the curtain 24a-1 hits the inner surface of the spacer 31 and stops, and then the curtain 24b-1 similarly hits the spacer 31 and stops, and the curtains 24a-2 and 24b-2 are stopped. Stops when the application of the signal voltage is stopped. As a result, as shown in FIG. 8 (3), the curtains 24a-2 and 24b-2 cover the light beam passable area, and the exposure operation of the shutter ends.

その後、各幕を図８（２）の反矢印方向に露光しない状態で駆動し、図８（１）に示す初期状態に復帰し、次の撮像動作に備えて待機する。 Thereafter, each curtain is driven without exposure in the opposite arrow direction of FIG. 8 (2), returns to the initial state shown in FIG. 8 (1), and waits for the next imaging operation.

なお、スリット開口の幅を次第に広く（幕２４ｂ−２の駆動開始時間を遅らせる）していくと最後は開口を全開することが出来る。開口全開の状態で先幕２４ａと後幕２４ｂを保持すれば長時間露光も可能となる。また、第１の実施の形態では遮光幕は４枚で形成していたが、この枚数を増やすことで、遮光幕の収納スペースは小さなものとなるため、小型の静電駆動装置が実現できる。 If the width of the slit opening is gradually increased (the driving start time of the curtain 24b-2 is delayed), the opening can be fully opened at the end. If the front curtain 24a and the rear curtain 24b are held in a state where the opening is fully opened, long exposure can be performed. In the first embodiment, four light-shielding curtains are formed. However, by increasing the number of the light-shielding curtains, the space for storing the light-shielding curtains becomes small, so that a small electrostatic drive device can be realized.

[第1の実施の形態の変形例]
図９は、駆動用電極の変形例を示す図である。第１の実施の形態と異なるのは、開口部および開口部右側には電極群４ａ−２が形成され、開口の左端側に電極群４ａ−１が形成されており、そのさらに左側には電極群４ａ−２が形成されていることと、複数の幕のうち少なくとも１つの幕を電極群４ａ−１の幅より小さくしていることである。このように構成することによって、電極群４ａ−１の位置に駆動されたときに停止保持することが可能である。 [Modification of the first embodiment]
FIG. 9 is a diagram illustrating a modification of the driving electrode. The difference from the first embodiment is that the electrode group 4a-2 is formed on the opening and the right side of the opening, the electrode group 4a-1 is formed on the left end side of the opening, and the electrode is further on the left side. The group 4a-2 is formed, and at least one of the plurality of curtains is made smaller than the width of the electrode group 4a-1. With this configuration, it is possible to stop and hold when driven to the position of the electrode group 4a-1.

図９では幕２４ａ−２、２４ａ−３は、最初は電極群４ａ−１、４ａ−２により、左から右に駆動され、次に幕２４ａ−３と幕２４ａ一１が所定の位置関係になるまで、幕２４ａ−１のみが電極群４ａ−１により保持停止される。幕２４ａ−１が停止保持されていると、幕２４ａ−２は幕２４ａ−１に移動を阻止されて図９の状態になる。上記のように各電極群の信号電圧を制御することにより、電極群４ａ−１より右側で各幕を所定の相対位置関係に設定して駆動することができる。 In FIG. 9, the curtains 24a-2 and 24a-3 are first driven from left to right by the electrode groups 4a-1 and 4a-2, and then the curtains 24a-3 and 24a-11 are in a predetermined positional relationship. Until then, only the curtain 24a-1 is held and stopped by the electrode group 4a-1. If the curtain 24a-1 is held stopped, the curtain 24a-2 is prevented from moving by the curtain 24a-1 and becomes in the state shown in FIG. By controlling the signal voltage of each electrode group as described above, it is possible to drive the curtains in a predetermined relative positional relationship on the right side of the electrode group 4a-1.

[第２の実施の形態]
図１０は、電極群の配置に関する第２の実施の形態のシャッタ装置の主要部分の断面図である。第２の実施の形態では、固定子１ａ、１ｂ、駆動用電極４ａ、４ｂ、幕２４ａ、２４ｂの配置が第１の実施の形態と異なっている。従って、第１の実施の形態と同様の部位には同一の符号を付してその詳細の説明は省略する。 [Second Embodiment]
FIG. 10 is a cross-sectional view of the main part of the shutter device according to the second embodiment regarding the arrangement of the electrode group. In the second embodiment, the arrangement of the stators 1a and 1b, the driving electrodes 4a and 4b, and the curtains 24a and 24b is different from that in the first embodiment. Accordingly, the same parts as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

電極群で構成された駆動用電極４ａは第１固定子１ａに設けられており、また、駆動用電極４ｂは第２固定子１ｂに設けられている。さらに遮光幕２４ａは第１固定子１ａと第２固定子１ｂの間に移動可能に設置され、その移動空間は第１固定子１ａと第２固定子１ｂの間にスペーサ３１を設けることにより形成されている。一方、遮光幕２４ｂは第２固定子１ｂと保護部材２５ｂの間に移動可能に設置され、その移動空間は第２固定子１ｂと保護部材２５ｂの間にスペーサ３２を設けることにより形成されている。 The driving electrode 4a constituted by the electrode group is provided on the first stator 1a, and the driving electrode 4b is provided on the second stator 1b. Further, the light-shielding curtain 24a is movably installed between the first stator 1a and the second stator 1b, and the moving space is formed by providing a spacer 31 between the first stator 1a and the second stator 1b. Has been. On the other hand, the light-shielding curtain 24b is movably installed between the second stator 1b and the protection member 25b, and the movement space is formed by providing a spacer 32 between the second stator 1b and the protection member 25b. .

この様に構成すると、複数の幕から構成される遮光幕が各々単独の空間に配置されるのでより安定した遮光幕動作が実現できる。 If comprised in this way, since the light-shielding curtain comprised from several curtains is each arrange | positioned in single space, more stable light-shielding curtain operation | movement is realizable.

[第3の実施の形態]
図１1は、電極群の配置に関する第３の実施の形態のシャッタ装置の主要部分の断面図である。第３の実施の形態では、固定子１ａ、１ｂ、駆動用電極４ａ、４ｂ、幕２４ａ、２４ｂの配置が第１の実施の形態と異なっている。従って、第１の実施の形態と同様の部位には同一の符号を付してその詳細の説明は省略する。 [Third embodiment]
FIG. 11 is a cross-sectional view of the main part of the shutter device according to the third embodiment relating to the arrangement of electrode groups. In the third embodiment, the arrangement of the stators 1a and 1b, the driving electrodes 4a and 4b, and the curtains 24a and 24b is different from that in the first embodiment. Accordingly, the same parts as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

電極群で構成された駆動用電極４ａ、４ｂは、固定子1の裏面（撮像素子側）と表面（被写体側）にそれぞれ設けられている。さらに遮光幕２４ａは固定子１と保護部材２５ａとの間に移動可能に設置され、その移動空間は固定子１と保護部材２５ａの間にスペーサ３１を設けることにより形成されている。一方、遮光幕２４ｂは固定子１と保護部材２５ｂの間に移動可能に設置され、その移動空間は固定子１と保護部材２５ｂの間にスペーサ３２を設けることにより形成されている。 The driving electrodes 4a and 4b configured by the electrode group are provided on the back surface (image sensor side) and the front surface (subject side) of the stator 1, respectively. Further, the light-shielding curtain 24a is movably installed between the stator 1 and the protection member 25a, and the movement space is formed by providing a spacer 31 between the stator 1 and the protection member 25a. On the other hand, the light-shielding curtain 24b is movably installed between the stator 1 and the protection member 25b, and the movement space is formed by providing a spacer 32 between the stator 1 and the protection member 25b.

この様に構成すると、複数の幕から構成される遮光幕が各々単独の空間に配置されるので、より安定した遮光幕動作が実現でき、さらに図１０の構成に対してより薄型にシャッタ装置を構成することが可能である。 With this configuration, the light-shielding curtain composed of a plurality of curtains is arranged in a single space, so that more stable light-shielding curtain operation can be realized, and the shutter device can be made thinner than the configuration of FIG. It is possible to configure.

上記の構成による静電駆動装置によれば、移動体は複数で構成されているので収納，スペースを少なくすることができ、装置は小型に形成できる。また、２つの固定部材の間に複数の移動部材を、その一部が重なるように配置することにより、板厚方向にも薄く形成でき、小型になる。異なる駆動用電極で駆動される複数の移動部材を制御することによって、各々移動部材同士でスリット開口を形成し、スリットで開口を走査することにより露光するシャッタ装置を構成できる。 According to the electrostatic drive device having the above-described configuration, a plurality of moving bodies are configured, so that storage and space can be reduced, and the device can be formed small. In addition, by arranging a plurality of moving members between two fixed members so as to partially overlap each other, it can be formed thin in the plate thickness direction, and the size is reduced. By controlling a plurality of moving members driven by different driving electrodes, it is possible to form a shutter device that exposes each moving member by forming a slit opening and scanning the opening with the slit.

なお、この発明は、上記実施形態そのままに限定されるものではなく、実施段階ではその要旨を逸脱しない範囲で構成要素を変形して具体化できる。また、上記実施形態に開示されている複数の構成要素の適宜な組み合せにより種々の発明を形成できる。例えば、実施形態に示される全構成要素から幾つかの構成要素を削除してもよい。更に、異なる実施形態に亘る構成要素を適宜組み合せてもよい。 Note that the present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. Further, various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, you may combine suitably the component covering different embodiment.

静電駆動装置の動作原理を説明する固定子と移動子の図。The figure of the stator and moving body explaining the principle of operation of an electrostatic drive device. 静電駆動装置の動作原理を説明する制御系の図。The figure of the control system explaining the operating principle of an electrostatic drive device. 静電駆動装置の動作原理を説明する電極への電圧印加タイミングを示す図。The figure which shows the voltage application timing to the electrode explaining the principle of operation of an electrostatic drive device. 静電駆動装置の動作原理を説明する固定子と移動子の力の作用を示す図。The figure which shows the effect | action of the force of the stator and moving element explaining the principle of operation of an electrostatic drive device. 本発明の第１の実施の形態によるシャッタ装置の図。The figure of the shutter apparatus by the 1st Embodiment of this invention. 本発明の第１の実施の形態によるシャッタ装置の断面図。1 is a cross-sectional view of a shutter device according to a first embodiment of the present invention. 本発明の第１の実施の形態によるシャッタ装置の固定子を示す図。The figure which shows the stator of the shutter apparatus by the 1st Embodiment of this invention. 本発明の第１の実施の形態によるシャッタ装置の動作を示す図。The figure which shows operation | movement of the shutter apparatus by the 1st Embodiment of this invention. 本発明の第１の実施の形態の変形例によるシャッタ装置の主要部を示す図。The figure which shows the principal part of the shutter apparatus by the modification of the 1st Embodiment of this invention. 本発明の第２の実施の形態によるシャッタ装置の断面図。Sectional drawing of the shutter apparatus by the 2nd Embodiment of this invention. 本発明の第３の実施の形態によるシャッタ装置の断面図。Sectional drawing of the shutter apparatus by the 3rd Embodiment of this invention. 従来技術を説明する図。The figure explaining a prior art.

Explanation of symbols

１…固定子、２…移動子、４ａ…駆動電極、４ｂ…駆動電極、５…エレクトレット、１０…駆動回路、１２…パルス発生回路、１４…昇圧回路、２０…撮像モジュール、２１…シャッタ装置、２２…撮像ユニット、２４ａ…遮光幕、２４ｂ…遮光幕、２５…保護部材、２７…撮像素子。 DESCRIPTION OF SYMBOLS 1 ... Stator, 2 ... Mover, 4a ... Drive electrode, 4b ... Drive electrode, 5 ... Electret, 10 ... Drive circuit, 12 ... Pulse generation circuit, 14 ... Booster circuit, 20 ... Imaging module, 21 ... Shutter device, 22 ... an imaging unit, 24a ... a light shielding curtain, 24b ... a light shielding curtain, 25 ... a protective member, 27 ... an imaging element.

Claims

A fixing member comprising a plurality of driving electrodes, each provided with a plurality of electrode groups having different applied signals;
Comprising a plurality of moving members driven by electrostatic force generated in the plurality of electrode groups,
At least one of the plurality of moving members is driven across two or more electrode groups of the electrode group.

A first fixing member comprising a plurality of first electrode groups each comprising a plurality of driving electrodes and different applied signals;
A plurality of first moving members driven by electrostatic force generated in the plurality of first electrode groups;
A second fixing member provided with a plurality of second electrode groups, each of which includes a plurality of drive electrodes, and each of which applies different signals corresponding to the first electrode group;
A plurality of second moving members driven by electrostatic force generated in the plurality of second electrode groups;
Comprising
The electrostatic drive device, wherein the first moving member and the second moving member driven by the corresponding first electrode group and second electrode group are driven in conjunction with each other.

A plurality of first electrode groups composed of a plurality of drive electrodes, each having a different applied signal, are provided on one surface, and a plurality of drive electrodes are formed on the other surface, each having a different applied signal. A fixing member provided with two electrode groups;
A plurality of first moving members driven by electrostatic force generated in the plurality of first electrode groups;
A plurality of second moving members driven by electrostatic force generated in the plurality of second electrode groups,
The electrostatic drive device, wherein the first moving member and the second moving member driven by the corresponding first electrode group and second electrode group are driven in conjunction with each other.

A plurality of electrode groups each composed of a plurality of driving electrodes, each having a different applied signal, and a fixing member provided on at least one surface;
A plurality of moving members driven by electrostatic force generated in the plurality of electrode groups;
Comprising
The electrostatic drive device, wherein the plurality of moving members are provided on a substantially plane substantially parallel to a surface of the fixed member on which the electrode group is provided.

A fixing member having a light-transmitting region having a predetermined size;
A plurality of moving members that are movable substantially parallel to at least one surface of the fixing member, and that can control the light beam passing through the region by covering the light beam passable region;
Comprising
The plurality of moving members are:
At least one first moving member movable on a substantially plane substantially parallel to at least one surface of the fixing member;
And at least one second moving member that is substantially parallel to at least one surface of the fixed member and that can move on a substantially different plane from the plane on which the first moving member can move. ,
A shutter device characterized in that when the light beam passage area is covered and the light beam is controlled, at least the first moving member and the second moving member cover the light ray passage area.

A light-passable region having a predetermined size; and
A plurality of first electrode groups consisting of a plurality of driving electrodes, each having different applied signals,
A plurality of second electrode groups comprising a plurality of driving electrodes, each having different applied signals;
A fixing member provided with the first electrode group and the second electrode group;
A plurality of first moving members that are moved relative to the fixed member and have a light shielding property due to electric charges generated by applying a signal voltage to the first electrode group;
A plurality of second moving members that are moved relative to the fixed member by a charge generated by applying a signal voltage to the second electrode group and have a light shielding property;
A shutter device, wherein the light beam passing through the light beam passage region is controlled by the first moving member and the second moving member.

The first electrode group is provided on a first fixing member constituting the fixing member,
The shutter device according to claim 6, wherein the second electrode group is provided on a second fixing member constituting the fixing member.

The first electrode group is provided on one surface of the fixing member,
The shutter device according to claim 6, wherein the second electrode group is provided on the other surface of the fixing member.

8. The first moving member and the second moving member are movably disposed between the first fixing member and the second fixing member. Shutter device.

The first moving member is movably disposed between the first fixing member and the fixing member,
8. The shutter device according to claim 7, wherein the second moving member is movably disposed between the second fixing member and the protective member.

11. An imaging module comprising: an imaging element unit fixed to the fixing member of the shutter device according to claim 5.