JP2005354371A - Electret driver, optical apparatus, electronic apparatus having electrostatic driver, and camera - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electret driver capable of reducing noise at the driving of a shutter, an optical apparatus, an electronic apparatus having an electrostatic driver, and a camera. <P>SOLUTION: Electret shutter 40 comprises a front curtain 43a, a rear curtain 43b and stators 46a, 46b on which driving electrodes for respectively driving the front curtain 43a and the rear curtain 43b are arranged. The front curtain 43a, the rear curtain 43b and the stators 46a, 46b are held so as to be put between a base board 41 and a cover 42 which are constituted of a conductive material. Then the base board 41 and the cover 42 are connected to the ground of an electret control driver of a camera body, by fixing them on fitting parts 29a to 29d of a chassis 27 by fixing screws 56a to 56d. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an electret driving device, and more particularly to an electret driving device using a shutter having an electret portion, an electronic device having an optical device and an electrostatic driving device, and a camera.

  Conventionally, as a shutter device in an optical device such as a camera, there are known a method of driving a shutter blade by a step motor and a method of opening and closing the shutter blade using a spring force. However, these systems require a complicated structure in order to transmit the driving force of the driving device that drives the shutter blades to the shutter blades.

In view of this, there has been proposed a shutter device having a very simple structure that is lighter and lower in cost by driving a shutter curtain formed of a light shielding film using the principle of an electrostatic actuator (see, for example, Patent Document 1). ).
Japanese Patent Laid-Open No. 8-220592

  Incidentally, in a shutter device using the principle of an electrostatic actuator as described in Patent Document 1 (hereinafter referred to as an electrostatic shutter device), high-frequency noise is generated when the shutter is driven. Therefore, there is a concern that various problems due to electromagnetic waves occur.

  However, the above-mentioned Patent Document 1 does not disclose countermeasures related to such noise.

  Accordingly, the present invention has been made in view of the above circumstances, and provides an electret driving device, an optical device, an electronic device having an electrostatic driving device, and a camera capable of reducing noise during shutter driving. Objective.

  That is, the invention described in claim 1 is an electret driving device used in an electronic device having a moving body made of an electret and a stator that drives the moving body. The base plate holding the base plate is made of a conductive material, and the base plate is connected to the ground of the electronic device.

  According to a second aspect of the present invention, in the first aspect of the present invention, the base plate is fixed to a ground of the electronic device.

  According to a third aspect of the present invention, in the second aspect of the present invention, the electret driving device is connected to a ground of the electronic device and is connected to a ground of a drive control device that drives the electret driving device. It is characterized by.

  According to a fourth aspect of the present invention, in the first aspect of the invention, the electret driving device is sandwiched between at least the conductive cover member and the base plate, and the conductive cover member and the base plate. It is characterized by being electrically connected to the plate.

  The invention described in claim 5 is the invention described in claim 4, wherein the cover member is formed so as to cover a side surface direction of the fixing member.

  According to a sixth aspect of the present invention, there is provided a moving member that can move to a position that shields a region through which a subject luminous flux passes, a fixed member provided with a plurality of drive electrodes for electrostatically driving the moving member, A holding member configured to hold the moving member and the fixing member so as to sandwich the holding member, and the holding member is connected to a ground of an electronic device to which the holding member is fixed. And

  According to a seventh aspect of the present invention, the holding member according to the sixth aspect of the present invention is configured such that the holding member sandwiches the moving member and the fixing member so as to face at least the moving member and the fixing member. It is comprised by the cover member and the 2nd cover member, and is electrically connected with the ground | ground of the said electronic device, It is characterized by the above-mentioned.

  The invention according to claim 8 is the invention according to claim 7, wherein the holding member is formed so as to cover a side surface direction of the fixing member.

  The invention according to claim 9 is the invention according to claim 7, wherein at least one of the first cover member and the second cover member is formed so as to cover a side surface direction of the fixing member. It is characterized by that.

  The invention according to claim 10 is composed of a moving member movable in a predetermined direction, a fixed member provided with a plurality of drive electrodes for electrostatically driving the moving member, and a conductive material, and the moving In an electronic apparatus having an electrostatic driving device including a member and a holding member that holds the fixing member so as to sandwich the fixing member, the holding member is connected to a ground of the electronic apparatus. .

  According to an eleventh aspect of the present invention, the holding member according to the tenth aspect of the present invention is configured so that the holding member sandwiches the moving member and the fixing member so as to face at least the moving member and the fixing member. It is characterized by comprising a cover member and a second cover member.

  According to a twelfth aspect of the invention, in the invention of the eleventh aspect, the holding member is formed so as to cover a side surface direction of the fixing member.

  The invention according to claim 13 is the invention according to claim 11, wherein at least one of the first cover member and the second cover member is formed so as to cover a side surface direction of the fixing member. It is characterized by that.

  According to the fourteenth aspect of the present invention, there is provided an image pickup device for picking up an image of a subject, a moving member that can be moved to a position that blocks an opening through which the luminous flux of the subject passes, and a plurality of members for electrostatically driving the moving member. An electrostatic shutter device disposed on the front surface of the imaging device, and a conductive member, and the moving member and the fixed member of the electrostatic shutter device. A holding member that holds the holding member in a sandwiched manner, and the holding member is connected to a ground of an electronic device to which the holding member is fixed.

  According to a fifteenth aspect of the present invention, the holding member according to the fourteenth aspect of the present invention is configured so that the holding member faces at least the moving member and the fixed member and sandwiches the moving member and the fixed member. It is comprised by the cover member and the 2nd cover member, and is electrically connected with the ground | ground of the said electronic device, It is characterized by the above-mentioned.

  The invention described in claim 16 is the invention described in claim 15, wherein the holding member is formed so as to cover a side surface direction of the fixing member.

  The invention according to claim 17 is the invention according to claim 15, wherein at least one of the first cover member and the second cover member is formed so as to cover a side surface direction of the fixing member. It is characterized by that.

  ADVANTAGE OF THE INVENTION According to this invention, the electronic device and camera which have the electret drive device which can reduce the noise at the time of shutter drive, an optical apparatus, and an electrostatic drive device can be provided.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  First, the driving principle of the electrostatic shutter device according to the present invention will be described with reference to FIGS.

  The shutter device basically includes a stator 1 and a mover 2, and the mover 2 is configured to be movable in the left-right direction in FIGS. 1A and 1B with respect to the stator 1. Has been. The stator 1 is provided with an opening 3 for guiding a light image from the subject to an image sensor (not shown). Further, a plurality of strip-like extended drive electrodes 4 are arranged in parallel at predetermined intervals on the stator 1 in a direction orthogonal to the moving direction of the moving element 2.

  The mover 2 includes a plurality of permanent-polarized extended derivatives (hereinafter referred to as electrets) 5 described later.

  In such a configuration, when a frequency voltage is applied to the drive electrode 4, an attractive force or a repulsive force is generated between the drive electrode 4 and the above-described electret. Move relative. Therefore, if the movable element 2 is movable so as to open or shield the opening 3 of the stator 1, a shutter device can be configured thereby.

  FIG. 1A shows a state where the shutter is open, and FIG. 1B shows a state where the shutter is closed. Note that the opening 3 is not necessarily required in the stator 1. As shown in FIG. 1A, the area where the driving electrode 4 is not provided, that is, the transmission area. May be formed. Hereinafter, such a region through which the subject luminous flux passes is referred to as an opening for convenience. In addition, the shutter device according to this configuration is referred to as an electret shutter.

  FIG. 2 is a diagram schematically showing a cross section of such an electret shutter and a drive circuit for the electret shutter.

  In the electret shutter 7, voltage signal lines from the drive circuit 10 are connected to the drive electrodes 4 arranged in parallel with the stator 1. A four-phase voltage signal is applied to these voltage signal lines. Therefore, the same voltage signal is applied to each of the four drive electrodes 4. In FIG. 2, the voltage signals are distinguished by attaching the symbols A, B, C, and D to the drive electrode 4.

  The mover 2 is provided with a plurality of permanent-polarized derivatives (electrets) 5 on the surface facing the stator 1.

  This figure is only a schematic diagram, and the number and arrangement interval of electrodes and electret parts in an actual electret shutter are the size of the shutter, the area of the opening, the polarity of the electret part, and the arrangement form thereof. It is determined as appropriate depending on various factors such as the drive resolution required for the shutter device and the maximum shutter speed. In addition, in the case of this electret shutter, electret portions having positive and negative polarities are alternately arranged, but this can be realized with only one of the polarities.

  The left side of FIG. 2 shows the configuration of the drive circuit 10 for generating a voltage signal applied to the electret shutter 7 together with the configuration of the electret shutter 7 described above.

  The rectangular wave train (drive pulse signal) generated by the pulse generation circuit 12 is supplied to the phase shifter 13 and the booster circuit 14. In the booster circuit 14, the input rectangular wave train is boosted to about 100 V, is branched into voltage signals having two polarities, and is supplied to the drive electrodes 4 A and 4 C. On the other hand, the rectangular wave train input to the phase shifter 13 has a waveform delayed by 90 °, and is then input to the booster circuit 14 to form two rectangular wave trains similar to those described above, and is applied to the drive electrodes 4B and 4D. Supplied.

  FIG. 3 is a timing chart showing an example of a voltage signal sequence created by the drive circuit 10 and applied to the drive electrodes 4A to 4D. Among these, FIG. 3A is a drive electrode 4A, FIG. 3B is a drive electrode 4B, FIG. 3C is a drive electrode 4C, and FIG. 3D is a timing chart of the drive electrode 4D.

  The voltage states of the drive electrodes 4A to 4D are such that the four states from time t1 to t4 change repeatedly as time elapses.

  4A to 4D are views for explaining the operation of the electret shutter 7 described above. 4 (a) to 4 (d), the right direction in the figure is the traveling direction of the electret, and the positive (plus) electret (electretized portion) 5a is located on the rear side (left side), and the front side (right side). It is assumed that negative (negative) electrets (electretized sites) 5b are arrayed on each other.

  FIG. 4A shows the voltage state (polarity) of the electret and the drive electrode 4 immediately after switching to the time t1 shown in FIG.

  In this state, the positive electret 5a receives a repulsive force from the drive electrode A (positive electrode) and receives an attractive force from the drive electrode B (negative electrode). The negative electret 5b receives a repulsive force from the drive electrode C (negative electrode) and receives an attractive force from the drive electrode D (positive electrode). For this reason, the movable element 2 receives a force in the right direction in FIG. 4A and moves to the right by one drive electrode pitch d.

  FIG. 4B shows the voltage state of the electret and the drive electrode immediately after switching at time t2.

  In this state, the electret 5a receives a repulsive force from the drive electrode B (positive electrode) and receives an attractive force from the drive electrode C (negative electrode). The electret 5b receives a repulsive force from the drive electrode D (negative electrode) and receives an attractive force from the drive electrode A (positive electrode). Therefore, the mover 2 receives a force in the right direction in FIG. 4B and moves by one drive electrode pitch d.

  Similarly, FIG. 4C shows the voltage state of the electret and the drive electrode immediately after switching at time t3.

  In this state, the electret 5a receives a repulsive force from the drive electrode C (positive electrode) and receives an attractive force from the drive electrode D (negative electrode). Further, the electret 5b receives a repulsive force from another drive electrode A (negative electrode) and receives an attractive force from the drive electrode B (positive electrode). Therefore, the mover 2 receives a force in the right direction in FIG. 4C and moves by one drive electrode pitch d.

  Furthermore, FIG. 4D shows the voltage state of the electret and the drive electrode immediately after switching at time t4.

  In this state, the electret 5a receives a repulsive force from the drive electrode D (positive electrode) and receives an attractive force from the drive electrode A (negative electrode). The electret 5b receives a repulsive force from the drive electrode B (negative electrode) and receives an attractive force from the drive electrode C (positive electrode). For this reason, the moving element 2 receives a force in the right direction of FIG. 4D and moves by one drive electrode pitch d.

  As described above, the movable element 2 moves by one drive electrode pitch d, and this operation is repeated, so that the movable element 2 is as shown in FIGS. 4 (a) → (b) → (c) → (d). Move to the right (arrow F direction in the figure). In order to move the mover 2 in the left direction in the figure, the polarity of the voltage applied to the drive electrode 4 may be switched in reverse.

  Next, an embodiment of the present invention will be described.

(First embodiment)
FIG. 5 is a diagram showing a schematic arrangement configuration of a digital single-lens reflex camera equipped with the electret shutter according to the first embodiment of the present invention.

  In FIG. 5, this digital single-lens reflex camera is equipped with a body unit 20 and a front-side part of the body unit 20 via a body mount 23 and a lens mount 24, and can be exchanged as an accessory device, for example. 21.

  In the body unit 20, a chassis 27 on which a mirror unit 28 and an electret shutter (electrostatic shutter) 40 to be described later are mounted, a pentaprism 32 and a loupe lens 35, an optical low-pass filter 37, and an imager 38 as an image sensor. have.

  The mirror unit 28 is attached so as to be accommodated in the attachment portion 29 of the chassis 27. The mirror unit 28 includes a main mirror 30 and a focusing screen 31 disposed on the optical axis of a lens group (not shown) in the photographing lens 21 described above.

  The main mirror 30 is provided so as to be rotatable in and out of the photographing optical path. The main mirror 30 is disposed at a position indicated by a solid line when observing a subject, and is disposed at a position indicated by a two-dot chain line during an imaging operation. The The subject luminous flux reflected by the main mirror 30 reaches the photographer's eyes through the loop lens 35 via the focusing screen 31 and the pentaprism 32.

  The electret shutter 40 is attached to the attachment portion 29 of the chassis 27. An optical low-pass filter 37 and an imager 38 are disposed behind the electret shutter 40 (on the right side in FIG. 5). During the imaging operation, the subject luminous flux incident through the photographing lens 21 is imaged on the imager 38 through the electret shutter 40 and the optical low-pass filter 37.

  Next, the configuration of the chassis 27 and the electret shutter 40 described above will be described with reference to FIGS.

  FIG. 6 is an assembly view showing a mounting state of the chassis 27 and the electret shutter 40, FIG. 7 is a front view showing the structure of the electret shutter 40 through the base plate 41, and FIG. 8 is a front view showing the chassis 27 and the electret shutter 40. FIG.

  The chassis 27 is made of a conductive material such as aluminum die cast, for example, and screw holes 27a to 27d are formed in the mounting portions 29a to 29d, respectively. In these screw holes 27a to 27d, mounting holes 41a to 41d and 42a to 42d formed in a base plate (first cover member) 41 and a cover (second cover member) 42 as a cover member of the electret shutter 40 are formed. When the fixing screws 56a to 56d are screwed together, the electret shutter 40 is brought into contact with and fixed to the chassis 27.

  Each of the electret shutters 40 is a focal plane shutter having a front curtain (shutter front curtain) 43a and a rear curtain (shutter rear curtain) 43b that travel independently in the direction of arrow F (lateral direction) in the figure at the time of shooting. . The front curtain 43a and the rear curtain 43b correspond to first and second moving members (moving members), and include the above-described electret (electretized portion; not shown). On the opposite surface side of each electret, there are a plurality of strip-like extended electrode members 58a and 58b, and openings (or transmission parts) 45a and 45b that are areas through which the subject luminous flux passes. Provided stators (fixing members, electrode members) 46a and 46b are provided.

  The front curtain 43a and the rear curtain 43b are configured to be movable in the longitudinal direction of the stators 46a and 46b, respectively. The plurality of electrodes are arranged in parallel at predetermined intervals on the stators 46a and 46b in a direction orthogonal to the moving direction of the front curtain 43a and the rear curtain 43b.

  A base plate 41 having an opening 45 is formed on the subject side of the electret shutter 40 (left side in FIGS. 6 and 8), and an opening is formed on the imager side (right side in FIGS. 6 and 8). The cover 42 in which the portion 55 is formed is provided so as to face the stators 46a and 46b, respectively. The base plate 41 and the cover 42 also serve as a protective member for the electret shutter 40. The base plate 41 and the cover 42 are made of a conductive material such as aluminum or carbon.

  Further, between the stator 46a and the base plate 41, a sealing member 48 is disposed in the vicinity of the ends of the four sides. Similarly, a sealing member 49 is disposed between the stator 46a and the stator 46b in the vicinity of the end portions of the four sides. Further, guides 51 and 52 are provided on the surface side of the base plate 41 facing the stator 46a and above and below the opening 45 along the traveling direction of the front curtain 43a. Further, guides 53 and 54 are provided along the traveling direction of the rear curtain 43b above and below the opening 45a on the surface side where the stator 46a faces the stator 46b. These guides 51, 52 and 53, 54 are for assisting the traveling of the front curtain 43a and the rear curtain 43b.

  The stators 46a and 46b are made of glass or the like as a substrate. A driving electrode (not shown) is formed on the surface of the stator 46a and 46b, and an insulating film (not shown) is provided on the driving electrode. ing. By applying this insulating film, a short circuit between adjacent drive electrodes is prevented.

  On the other hand, the front curtain 43a and the rear curtain 43b are made of polyimide or Teflon (registered trademark) as a base material, and are subjected to a light shielding process such as applying a light shielding material. Thereby, it can have a function as a light-shielding curtain. Therefore, irregular reflection of light in the electret shutter 40 can be prevented.

  A plurality of electrets are formed by a corona discharge method on one surface of the base material (film film) used as the front curtain 43a and the rear curtain 43b, in this case, the surface facing the drive electrode ( This is called electretization). In the present embodiment, electret sites having positive and negative polarities are alternately arranged (see, for example, electrets 5a and 5b in FIG. 4).

  Further, the openings 45 a and 45 b of the stators 46 a and 46 b described above are provided at positions corresponding to the openings 45 of the base plate 41 and the openings 55 of the cover 42. Thereby, the subject light taken in from the opening 45 is guided to the imager 38 which is a photoelectric conversion element, and the image of the subject can be photoelectrically converted by the imager 38.

  The stators 46 a and 46 b, the front curtain 43 a and the rear curtain 43 b are accommodated between the base plate 41 and the cover 42. And the fixing screws 56a-56d are attached to the screw holes 27a-27d formed in the attachment portions 29a-29d of the chassis 27 through the attachment holes 42a-42d of the cover 42 and the attachment holes 41a-41d of the base plate 41. The electret shutter 40 is fixed to the chassis 27 by screwing.

  In other words, the electret shutter 40 has a base plate 41, a front curtain 43a, a stator 46a, a rear curtain 43b, a fixed plate behind the chassis 27 in the optical axis direction from the subject side to the optical low-pass filter 37 on the front surface of the imager 38. The child 46b and the cover 42 are sequentially arranged.

  The chassis 27 is connected to the ground of a shutter drive control circuit (drive control device, electronic device) 70 shown in FIG. 9, for example. Accordingly, the base plate 41 is fixed to the chassis 27 by the fixing screws 56a to 56d, whereby the ground of the electret shutter 40 and the ground of the chassis 27 are connected.

  FIG. 9 is a configuration diagram showing signal connection between the shutter drive control circuit 70 and the electret shutter 40.

  As described above, the electret shutter 40 is provided with the front curtain 43a and the rear curtain 43b. In order to drive the respective curtains, the phase shifter 72a having the same configuration as that shown in FIG. Two systems of drive circuits 73a and 73b including 72b are provided. The pulse generation circuit 71 drives the front curtain 43a and the rear curtain 43b based on an opening / closing control signal from a microcomputer (CPU) of a camera (not shown). Thereby, when the shutter release image of the camera is performed, the permanently polarized derivatives (electrets) 47a and 47b provided in the front curtain 43a and the rear curtain 43b are sequentially sucked by A to D of the drive electrodes 58a and 58b, The front curtain 43a and the rear curtain 43b are driven. Thus, the fully open / close operation of the opening 45 and the like is controlled. Naturally, the opening 45 immediately before the shutter release is fully closed by the front curtain 43a, and the rear curtain 43b is in a position retracted from the opening 45a.

  Here, when the electret shutter 40 of the camera is driven, electromagnetic noise is generated from the stators 46a and 46b. Here, the base plate 41 is made of an aluminum plate and is formed so as to cover the stators 46a and 46b. Therefore, electromagnetic noise generated in the stators 46 a and 46 b is absorbed by the surface of the base plate 41 and is released to the ground of the shutter drive control circuit 70 through the chassis 27. In this way, noise generated in the electret shutter 40 is released to the ground.

  The electret shutter 40 does not use the charges induced in the leading curtain 43a and the trailing curtain 43b, but uses the charges that are permanently polarized in the electret. The speed can be increased.

  In addition, since the charge amount of the electret can be given arbitrarily, an optimum charge amount that maximizes the driving force can be given, and an extremely large driving force can be obtained. Therefore, the optimal electret shutter 40 according to the size of the imager 38 can be configured.

  Furthermore, since the front curtain 43a and the rear curtain 43b can use resin materials as materials, they are lightweight. For example, the front curtain 43a and the rear curtain 43b can be formed with thin films of 10 to 20 μm. Therefore, the amount of power required for the operation is small, and a quiet operation can be realized.

(Second Embodiment)
Next, a second embodiment of the present invention will be described.

  In the first embodiment described above, the base plate and the cover are formed so as to cover the surfaces on both sides of the stator of the electret shutter, but the present invention is not limited to this. The second embodiment described below relates to an example in which a cover is formed also in the circumferential direction of the stator, for example.

  FIG. 10 is an assembly diagram showing the configuration of the electret shutter according to the second embodiment of the present invention.

  Note that the second embodiment is different from the first embodiment described above only in the shape of the cover, and other configurations and operations are basically shown in FIGS. Since they are the same as those described above, the same parts are denoted by the same reference numerals, and illustration and description thereof are omitted.

  In FIG. 10, an electret shutter (electrostatic shutter device) 62 includes a stator 46a provided with a drive electrode 58a, a stator 46b provided with a drive electrode 58b, a front curtain 43a, and a rear curtain. 43 b is accommodated between the base plate 41 and the cover 60. Mounting holes 60 a to 60 d are formed in the cover 60 at positions corresponding to the mounting holes 41 a to 41 d of the base plate 41.

  Standing bent portions 61 a to 61 d that are bent toward the base plate 41 are formed at the ends of the cover 60 in the longitudinal direction and in the direction orthogonal to the longitudinal direction. These standing and bent portions 61a to 61d are arranged in a state in which the cover 62 is attached to the chassis 27 via the attachment holes 61a to 61d and the attachment holes 41a to 41d by fixing screws (not shown in FIG. 10). It is formed so as to cover the ends of the four sides of 46a and 46b.

  That is, electromagnetic noise emitted to the surfaces of the stators 46a and 46b is absorbed by the base plate 41 and the cover 60, and electromagnetic noise emitted to the sides of the stators 46a and 46b is absorbed by the standing bent portions 61a to 61d. Is done. The absorbed noise is emitted to the ground of the drive circuit (not shown) through the cover 60, the base plate 41, and the chassis 27 as described above.

  By comprising in this way, the effect which exceeds the 1st Embodiment mentioned above can be acquired by adding a standing bending part.

  The chassis is generally referred to as a front plate of a single lens reflex camera.

  In the above-described embodiment, the electret shutter having the electret portion in the shutter front curtain and the rear curtain has been described. However, the present invention is not limited to this, and an electrostatic shutter device having no electret portion may be used. Applicable.

  As mentioned above, although embodiment of this invention was described, in the range which does not deviate from the summary of this invention other than embodiment mentioned above, this invention can be variously modified.

It is a figure explaining the drive principle of the electrostatic shutter apparatus which concerns on this invention. It is principle explanatory drawing which showed the drive circuit of this electret shutter while showing the cross section of an electret shutter typically. 2 shows an example of a voltage signal train created by the drive circuit 10 of FIG. 2 and applied to the drive electrodes 4A to 4D, where (a) shows the drive electrode 4A, (b) shows the drive electrode 4B, and (c). Is a drive electrode 4C, and (d) is a timing chart of the drive electrode 4D. It is a figure explaining operation | movement of the electret shutter 7 shown by FIG. It is the figure which showed schematic arrangement configuration of the digital single-lens reflex camera carrying the electret shutter which concerns on the 1st Embodiment of this invention. FIG. 6 is an assembly diagram illustrating a configuration of the chassis 27 and the electret shutter 40 and illustrating a mounting state of the chassis 27 and the electret shutter 40 in FIG. 5. FIG. 3 is a front view illustrating the structure of the chassis 27 and the electret shutter 40 and showing the structure of the electret shutter 40 with a base plate 41 seen through. FIG. 3 is an assembly diagram illustrating the configuration of the chassis 27 and the electret shutter 40, illustrating the configuration of the chassis 27 and the electret shutter 40; 3 is a configuration diagram showing signal connection between a shutter drive control circuit 70 and an electret shutter 40. FIG. It is an assembly figure showing composition of an electret shutter of a 2nd embodiment concerning the present invention.

Explanation of symbols

  1, 46a, 46b ... Stator, 2 ... Mover, 3, 45, 45a, 45b, 55 ... Opening, 4, 4A-4D, 58a, 58b ... Drive electrode, 5, 5a, 5b ... Permanently polarized Derivative (electret), 7, 40, 62 ... electret shutter, 10 ... drive circuit, 12 ... pulse generation circuit, 13 ... phase shifter, 14 ... booster circuit, 20 ... body unit, 21 ... photographing lens, 27 ... chassis, 27a 27d ... Screw hole, 28 ... Mirror unit, 29a-29d ... Mounting part, 30 ... Main mirror, 37 ... Optical low pass filter, 38 ... Imager, 41 ... Base plate, 42, 60 ... Cover, 43a ... Front curtain, 43b ... Rear curtain, shutter drive control circuit.

Claims (17)

In an electret driving device used in an electronic apparatus having a moving body composed of an electret and a stator that drives the moving body,
An electret driving device, wherein the moving body and a base plate holding the moving body are made of a conductive material, and the base plate is connected to a ground of the electronic device.   The electret drive device according to claim 1, wherein the base plate is fixed to a ground of the electronic device.   3. The electret drive device according to claim 2, wherein the electret drive device is connected to a ground of the electronic device and is connected to a ground of a drive control device that drives the electret drive device. Electret drive device.   2. The electret drive device according to claim 1, wherein the electret drive device is sandwiched between at least a conductive cover member and the base plate, and the conductive cover member and the base plate are electrically connected. The electret drive device characterized by the above-mentioned.   5. The electret drive device according to claim 4, wherein the cover member is formed so as to cover a side surface direction of the fixing member. A movable member that can move to a position that shields a region through which the subject luminous flux passes;
A fixed member provided with a plurality of drive electrodes for electrostatically driving the moving member;
A holding member that is made of a conductive material and holds the moving member and the fixed member so as to be sandwiched therebetween;
Comprising
The optical device, wherein the holding member is connected to a ground of an electronic device to which the holding member is fixed.   The holding member is composed of a first cover member and a second cover member so as to sandwich at least the moving member and the fixed member so as to sandwich the moving member and the fixed member. The optical apparatus according to claim 6, wherein the optical apparatus is connected in a mechanical manner.   The optical apparatus according to claim 7, wherein the holding member is formed so as to cover a side surface direction of the fixing member.   The optical apparatus according to claim 7, wherein at least one of the first cover member and the second cover member is formed so as to cover a side surface direction of the fixing member. A movable member movable in a predetermined direction, a fixed member provided with a plurality of drive electrodes for electrostatically driving the movable member, and an electrically conductive material so as to sandwich the movable member and the fixed member In an electronic device having an electrostatic driving device provided with a holding member for holding,
An electronic apparatus having an electrostatic driving device, wherein the holding member is connected to a ground of the electronic apparatus.   The holding member includes a first cover member and a second cover member so as to face at least the moving member and the fixed member so as to sandwich the moving member and the fixed member. An electronic apparatus having the electrostatic drive device according to 10.   The electronic device having an electrostatic drive device according to claim 11, wherein the holding member is formed so as to cover a side surface direction of the fixing member.   12. The electronic apparatus having an electrostatic drive device according to claim 11, wherein at least one of the first cover member and the second cover member is formed so as to cover a side surface direction of the fixing member. An image sensor for imaging a subject;
The imaging element having a moving member that can move to a position that blocks an opening through which the luminous flux of the subject passes, and a fixed member provided with a plurality of driving electrodes for electrostatically driving the moving member An electrostatic shutter device disposed in front of
A holding member that is made of a conductive material and holds the moving member and the fixed member of the electrostatic shutter device;
Comprising
The camera, wherein the holding member is connected to a ground of an electronic device to which the holding member is fixed.   The holding member includes a first cover member and a second cover member so as to sandwich at least the moving member and the fixed member so as to sandwich the moving member and the fixed member. The camera according to claim 14, wherein the cameras are connected to each other.   The camera according to claim 15, wherein the holding member is formed so as to cover a side surface direction of the fixing member.   The camera according to claim 15, wherein at least one of the first cover member and the second cover member is formed so as to cover a side surface direction of the fixing member.

Images