JP2006071799A - Micro lens array board and manufacturing method therefor, and electro-optical apparatus and electronic equipment provided with micro lens array board - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve the yield in the manufacturing process of an electro-optical apparatus, and also stably perform high quality image display in the electro-optical apparatus. <P>SOLUTION: The micro lens array board comprises a transparent member with two or more lens forming parts for specifying curved lens surfaces of two or more micro lenses arranged in the form of an array, respectively, and a 1st transparent material film formed of a transparent material including poly silane, which is joined with each of the two or more curved lens surfaces, and has at least a diffractive index different from those of two or more lens forming parts of the transparent member. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a microlens array plate used for an electro-optical device such as a liquid crystal device and a manufacturing method thereof, an electro-optical device including the micro-lens array plate, and an electronic device including the electro-optical device. About.

  This type of microlens array plate is used as a counter substrate in a liquid crystal device constituting a light valve of a projector, for example, as an electro-optical device (see Patent Document 1). Such a microlens array plate has, for example, a transparent substrate in which a plurality of concave portions each having a curved lens surface are formed in an array shape on a lens forming surface, and a high refractive index is provided in the plurality of concave portions of the transparent substrate. It is configured by filling an adhesive formed of a transparent resin and bonding a cover glass to the transparent substrate via the adhesive. In the liquid crystal device, incident light can be efficiently used by such a microlens array plate, and a brighter display is possible.

  Patent Document 2 discloses a technique for forming a microlens by performing UV exposure on a photosensitive layer formed on a substrate using a diffraction mask or a gradation mask. At this time, in the photosensitive layer, a micro-lens is formed by forming a predetermined refractive index distribution according to the intensity distribution of light irradiated to the photosensitive layer. Patent Document 3 discloses a microlens array plate in which a convex lens is formed as a microlens on a substrate using a transparent resin such as acrylic.

JP 2003-1310112 A JP 2002-286912 A JP 2002-122706 A

  However, as described above, when the microlens array plate is formed using a transparent resin, in the liquid crystal device constituting the light valve, the transparent resin is formed by the incident light having a relatively high light intensity being incident on the counter substrate. Heated. Therefore, when the liquid crystal device is driven for a long time, the transparent resin in the microlens array plate may deteriorate over time and discolor, and the transmittance may change and the quality of image display may deteriorate. In addition, when an electro-optical device is manufactured, when a microlens array plate formed using a transparent resin is used as a counter substrate and an alignment film or a light shielding film is formed on the counter substrate, the counter substrate is heated to be transparent. There is a problem that assembly failure occurs due to deformation of the resin.

  Furthermore, as described above, when the microlens array plate has a cover glass, the focal length of the microlens is adjusted by polishing the cover glass, for example. At this time, the margin in polishing is, for example, an absolute value of about 10 [μm], which is a relatively large value. Therefore, the focal length of the microlens on the microlens array plate varies, and the luminance in the display image is different for each pixel. In contrast, there is a risk that high-quality image display cannot be performed.

  The present invention has been made in view of the above-described problems. For example, the microlens can improve the yield in the manufacturing process of the electro-optical device and can stably display a high-quality image in the electro-optical device. It is an object of the present invention to provide an array plate, a manufacturing method thereof, an electro-optical device including the microlens plate, and an electronic apparatus including the electro-optical device.

  In order to solve the above problems, a microlens array plate of the present invention has a transparent member having a plurality of lens forming portions that respectively define lens curved surfaces of a plurality of microlenses arranged in an array, and the plurality of lens curved surfaces. And a first transparent material film formed of a transparent material containing polysilane, which is joined to each of the transparent members and has a refractive index different from that of at least the plurality of lens forming portions of the transparent member.

  According to the microlens array plate of the present invention, the transparent member is formed of a transparent substrate such as quartz, and a plurality of lens forming portions are formed in an array on the surface of the transparent member. Each of the plurality of lens forming portions defines a lens curved surface of the microlens, and each lens forming portion is a concave portion or a convex portion.

  And a 1st transparent material film | membrane is joined to the some lens curved surface prescribed | regulated by the lens formation part of a transparent member. The first transparent material film is formed from a transparent material containing polysilane. More specifically, the first transparent material film is formed by applying and filling a transparent material into each concave portion defining the curved surface of the lens and curing it. Or a transparent material is apply | coated so that each convex part which prescribes | regulates a lens curved surface, and a 1st transparent material film | membrane is formed by hardening this.

  The first transparent material film has a refractive index different from that of the plurality of lens forming portions. For example, when the first transparent material film is formed by filling each concave portion as the lens forming portion, the first transparent material film has a refractive index larger than that of the plurality of lens forming portions. It is formed. Therefore, in this case, a so-called plano-convex lens having a light condensing function is formed as a microlens by a part of the first transparent material film filled in each concave portion. In this case, a so-called concave lens having a light divergence function is formed by each concave portion by reversing the magnitude relationship between the refractive index values between the first transparent material film and the lens forming portion with the relationship described above. You may do it.

  Alternatively, when the first transparent material film is formed so as to cover the convex portion as the lens forming portion, the first transparent material film is formed to have a refractive index smaller than that of the plurality of lens forming portions. Is done. Therefore, in this case, a so-called plano-convex lens having a condensing function is formed as a microlens by each convex portion. In this case as well, a part of the first transparent material film covering each convex portion is obtained by reversing the magnitude relationship between the refractive index values between the first transparent material film and the lens forming portion with the relationship described above. Thus, a so-called concave lens having a light divergence function may be formed.

  Here, polysilane has a refractive index (= 1.75) larger than that of quartz (= 1.6), and when irradiated with ultraviolet rays, its composition changes, resulting in a lower refractive index value. . More specifically, the refractive index can be lowered within the range from the maximum value of 1.75 to the minimum value of 1.55 by irradiating the polysilane with ultraviolet rays. Therefore, when forming the first transparent material film, the refractive index of the first transparent material film can be easily changed by irradiating the transparent material with ultraviolet rays.

  Polysilane is colorless and transparent, and for example, even when heated to 300 ° C. or higher, the refractive index does not change and does not change color, making it inorganic. Therefore, the first transparent material film is excellent in heat resistance and light resistance.

  Furthermore, the first transparent material film is formed by curing a transparent material containing polysilane. Therefore, in the microlens array plate of the present invention, the first transparent material film can have the function of a cover glass, so that the cover glass is unnecessary in the microlens array plate. In the microlens array plate, in order to adjust the focal length of each microlens, the film thickness of the first transparent material film may be adjusted. The film thickness can be easily adjusted by applying a transparent member to the transparent material by, for example, a spin coating method with a small margin.

  Here, when the molecular weight of polysilane is changed, its viscosity is also changed. Therefore, if the viscosity of the transparent material is changed by changing the viscosity of the polysilane, and the transparent material is applied onto the transparent substrate by the spin coating method, the thickness of the first transparent material film becomes a predetermined value. In addition, the margin for adjusting the film thickness can be further reduced. In addition, in the first transparent material film, it is possible to flatten the surface opposite to the surface facing the lens curved surface of each microlens. As a result, according to the microlens array plate of the present invention, the focal lengths of the microlenses can be made substantially equal.

  Therefore, if the microlens array plate of the present invention as described above is used as, for example, a counter substrate and a liquid crystal device is configured as an electro-optical device, stable and high-quality image display can be performed in the liquid crystal device. Is possible. In the microlens array plate of the present invention, since the first transparent material film is excellent in heat resistance, the assembly accuracy in the electro-optical device can be improved. As a result, it is possible to improve the yield in the manufacturing process of the electro-optical device.

  In one aspect of the microlens array plate of the present invention, each of the plurality of lens forming portions is a concave portion, and the first transparent material film is filled in the concave portion and is more refracted than the plurality of lens forming portions. Have a rate.

  According to this aspect, a so-called plano-convex lens having a light condensing function can be formed as a microlens by a part of the first transparent material film filled in each concave portion.

  In another aspect of the microlens array plate of the present invention, each of the plurality of lens forming portions is a convex portion, and the first transparent material film has a refractive index smaller than that of the plurality of lens forming portions.

  According to this aspect, a so-called plano-convex lens having a light condensing function can be formed as a microlens by each convex portion.

  In another aspect of the microlens array plate of the present invention, the transparent member is formed of a transparent substrate and a transparent material containing polysilane having a refractive index different from that of the first transparent material film on the transparent substrate. And a second transparent material film having the plurality of lens forming portions.

  According to this aspect, the second transparent material film has a plurality of lens forming portions arranged in an array, and each lens forming portion is a concave portion or a convex portion. The second transparent material film is formed by applying and curing a transparent material containing polysilane on a transparent substrate, as in the first transparent material film. Therefore, when the second transparent material film is formed, the refractive index value can be easily changed by irradiating the transparent material with light mainly containing ultraviolet rays. At this time, the distribution of the light intensity irradiated to the recesses or projections, that is, the distribution of the light intensity irradiated to the recesses or projections, as seen in a plan view, so that the refractive index value at each recess or projection has a predetermined distribution. You may make it irradiate light with respect to a transparent material by adjusting the in-plane distribution of the light intensity in a recessed part or a convex part. As described above, by changing the refractive index in each concave portion or each convex portion, it is possible to finely adjust the lens curved surface of each microlens to a substantially predetermined shape.

  In another aspect of the microlens array plate of the present invention, a transparent material containing polysilane having a refractive index the same as or different from that of the first transparent material film on the first transparent material film on the side opposite to the transparent member. And a cover member formed from the above.

  According to this aspect, the cover member is formed by further applying the transparent material containing polysilane on the first transparent material film on the side opposite to the transparent member and curing the transparent material. Thereby, the first transparent material film is sandwiched between the transparent member and the cover member.

  When forming the cover member, by applying a transparent material on the first transparent material film by, for example, a spin coating method, the film thickness can be easily adjusted with a small margin. Therefore, by further forming a cover member on the first transparent material film in this way, the focal length of each microlens can be adjusted by changing the film thickness of the cover member. . Note that when forming the cover member, the refractive index may be changed by irradiating the transparent material with light mainly containing ultraviolet rays, and the first transparent material film may have the same value. The transparent material film may have a different value.

  In order to solve the above problems, an electro-optical device according to the present invention includes the above-described microlens array plate of the present invention (including various aspects thereof), a display electrode facing the microlens, and the display electrode. A wiring or an electronic device connected to the.

  According to the electro-optical device of the present invention, since the microlens plate of the present invention described above is provided, the light utilization efficiency can be increased by the microlens, and the light transmittance and contrast in each pixel can be improved. In addition, since the microlens plate is excellent in heat resistance and light resistance, the electro-optical device of the present invention can stably perform high-quality image display.

  In addition, since the first transparent material film can be prevented from being deformed by heating the microlens array plate during the manufacture of the electro-optical device, the assembly accuracy in the electro-optical device can be improved. As a result, the yield in the electro-optical device manufacturing process can be improved.

  Such an electro-optical device has an island-shaped pixel electrode arranged as a “display electrode” for each pixel, wiring lines such as scanning lines and data lines, and thin film transistors (Thin Film Transistors; hereinafter referred to as “TFT” as appropriate). And an electro-optical device such as an active matrix drive type liquid crystal device in which electronic elements of a thin film diode (hereinafter referred to as “TFD”) are connected.

  In order to solve the above problems, an electronic apparatus according to the present invention includes the above-described electro-optical device according to the present invention.

  Since the electronic apparatus of the present invention comprises the above-described electro-optical device of the present invention, a projection display device, a television, a mobile phone, an electronic notebook, capable of stably performing high-quality image display, Various electronic devices such as a word processor, a viewfinder type or a monitor direct-view type video tape recorder, a workstation, a videophone, a POS terminal, and a touch panel can be realized. Further, as an electronic apparatus of the present invention, for example, an electrophoretic device such as electronic paper, an electron emission device (Field Emission Display and a Conduction Electron-Emitter Display), an electrophoretic device, and an apparatus using the electron emission device, DLP (Digital Light Processing) and the like can also be realized.

  In order to solve the above problems, a method for manufacturing a microlens array plate according to the present invention includes forming a plurality of lens forming portions that respectively define lens curved surfaces of a plurality of microlenses arranged in an array on a transparent member. Forming a first transparent material film bonded to each of the plurality of lens curved surfaces from a transparent material containing polysilane having a refractive index different from at least the plurality of lens forming portions of the transparent member. 2 steps.

  According to the method for manufacturing a microlens array plate of the present invention, in the first step, as a transparent member, for example, a transparent substrate such as quartz is subjected to an etching process through a resist as described below, so that a plurality of As the lens forming portion, a plurality of concave portions or a plurality of convex portions that define the lens curved surface of each microlens are formed. Using a resist having a plurality of openings corresponding to a plurality of recesses as a mask with respect to the transparent substrate, a plurality of openings are etched through the plurality of openings, for example, by a wet etching method. Recesses are formed in an array. Alternatively, on the transparent substrate, a plurality of convex portions each having a curved surface corresponding to the curved surface of the lens is formed in an array shape with a resist, and the resist and the transparent substrate are subjected to an etching process by, for example, a dry etching method. Thereby, the plurality of convex portions formed of the resist are transferred to the transparent substrate.

  Subsequently, in the second step, a first transparent material film is bonded to each of a plurality of lens curved surfaces formed on a transparent substrate that is a transparent member. More specifically, a transparent material containing polysilane is applied and filled in a plurality of concave portions of the transparent substrate by, for example, spin coating to form a first precursor film, and the first precursor film is, for example, 300 ° C. or higher The first transparent material film is formed by heating and curing. As described above, since polysilane has a refractive index larger than that of quartz, a so-called plano-convex lens having a condensing function is formed as a microlens by a part of the first transparent material film filled in each recess. Will be.

  Here, by changing the viscosity of the polysilane by changing the viscosity of the polysilane, in the first transparent material film, the surface opposite to the surface facing the plurality of recesses is flattened, and the film It is preferable to form such that the thickness becomes a predetermined value. Alternatively, after the first transparent material film is formed, the first transparent material film further contains polysilane so that the surface opposite to the surface facing the plurality of recesses becomes flat. A transparent material may be applied and cured, or a polishing process may be performed.

  Further, in the first precursor film, a portion formed by filling each concave portion, and the light mainly containing ultraviolet rays is irradiated to the joint portion joined to the concave portion to change the refractive index of the joint portion. You may make it make it. In this way, by changing the refractive index of the joint portion so that the value is smaller than each concave portion, it is possible to form a so-called concave lens having a light divergence function by each concave portion. Alternatively, the junction portion is viewed in plan so that the refractive index value of the junction portion has a predetermined distribution, the in-plane distribution of the light intensity at the junction portion is adjusted, and the junction portion is irradiated with light. By doing so, it is possible to finely adjust the lens curved surface of each microlens so as to have a substantially predetermined shape.

  Alternatively, the first precursor film is formed by applying a transparent material on the transparent substrate so as to cover the plurality of convex portions of the transparent substrate, and the first precursor film is heated and cured to form the first precursor film. A transparent material film is formed. At this time, by irradiating the first precursor film with light mainly containing ultraviolet rays, the refractive index of the first precursor film is changed to a value smaller than the plurality of convex portions. Thus, by changing the refractive index of the first precursor film, a so-called plano-convex lens having a condensing function is formed as a microlens by each convex portion. Also in this case, as described above, it is preferable that the first transparent material film is formed so that the surface opposite to the surface facing each convex portion is flat. In addition, the in-plane distribution of the light intensity at the joint portion when the joint portion is viewed in plan so that the refractive index value of the joint portion that covers each convex portion and is joined to the convex portion has a predetermined distribution. By adjusting and adjusting to irradiate the joint with light, it becomes possible to finely adjust the lens curved surface of each microlens to a substantially predetermined shape. In addition, ultraviolet irradiation may not be performed on the first precursor film. Thereby, since the magnitude relationship of the refractive index value between the first transparent material film and the lens forming portion can be reversed with the above-described relationship, a part of the first transparent material film covering each convex portion is used. Thus, it is possible to form a so-called concave lens having a light divergence function.

  In the microlens array plate manufactured as described above, the first transparent material film is excellent in heat resistance and light resistance. In addition, the focal lengths of the microlenses can be made substantially equal.

  In one aspect of the method for manufacturing a microlens array plate of the present invention, in the first step, a plurality of concave portions are formed as the plurality of lens forming portions, and in the second step, the transparent material is filled in the concave portions. A step of forming a first precursor film having a refractive index larger than that of the plurality of lens forming portions, and heating the first precursor film to cure the first transparent material film. Forming.

  According to this aspect, a so-called plano-convex lens having a condensing function can be formed as a microlens by a part of the first transparent material film filled in each recess.

  In another aspect of the method for manufacturing a microlens array plate of the present invention, in the first step, a plurality of convex portions are formed as the plurality of lens forming portions, and the second step covers the convex portions. A step of forming a first precursor film having a refractive index smaller than that of the plurality of lens forming portions by applying ultraviolet irradiation by applying the transparent material; and heating the first precursor film. Forming the first transparent material film by curing.

  According to this aspect, a so-called plano-convex lens having a light condensing function can be formed as a microlens by each convex portion.

  In the first step, in the aspect in which a plurality of concave portions or a plurality of convex portions are formed as the plurality of lens forming portions, the second step is after the step of forming the first precursor film. The method further includes the step of irradiating the first precursor film with light mainly containing ultraviolet rays to change the refractive index of the first precursor film before the step of forming the first transparent material film. You may manufacture as follows.

  If manufactured in this way, after the ultraviolet irradiation, the refractive index of the first precursor film that may have a refractive index smaller than each convex portion is changed so that the value becomes smaller than each convex portion. The convex portion can form a plano-convex lens as a microlens. Alternatively, in the first precursor film, if the refractive index of the joint portion formed by filling each concave portion is changed so that the value is smaller than each concave portion, a concave lens can be formed by the concave portion. It becomes possible.

  In an aspect in which the second step further includes a step of changing the refractive index of the first precursor film, in the step of changing the refractive index of the first precursor film, the plurality of the first precursor films The portion to be joined to the curved surface of the lens is viewed in plan, and the light is applied to the first precursor film so that the in-plane distribution of the light intensity in the portion becomes a predetermined distribution. May be.

  If manufactured in this way, in the first precursor film, the refractive index value of the joint portion formed by filling each concave portion, or the refractive index of the joint portion that covers each convex portion and is joined to the convex portion. It is possible to change the refractive index of the first precursor film so that the value has a predetermined distribution. At this time, in the first precursor film, the joint portion with the above-described concave portion or convex portion is viewed in plan, and the distribution of the intensity of light applied to the joint portion, that is, the in-plane of the light intensity at the joint portion. The first precursor film is irradiated with light so that the distribution becomes a predetermined distribution. Thereby, it is possible to finely adjust the lens curved surface of each microlens so as to have a substantially predetermined shape.

  In another aspect of the method for manufacturing a microlens array plate of the present invention, the first step includes forming a mold in which a plurality of curved surfaces corresponding to the plurality of lens curved surfaces are formed on one surface on a transparent substrate. A transparent material containing polysilane is injected between the mold and the transparent substrate so as to face the transparent substrate, and the plurality of lens forming portions are formed on the surface facing the mold. The step of forming a second precursor film and light mainly containing ultraviolet rays in the second precursor film so that the refractive index of the second precursor film is different from that of the first transparent material film. A step of irradiating and a step of forming a second transparent material film by heating and curing the second precursor film.

  According to this aspect, the mold in which the plurality of convex portions having curved surfaces corresponding to the lens curved surfaces of the plurality of microlenses are arranged so that the plurality of convex portions face the transparent substrate, and the mold and the transparent substrate are arranged. In the meantime, a transparent material containing polysilane is injected to form a second precursor film. In the second precursor film formed in this way, a plurality of recesses that respectively define the lens curved surface of the microlens are formed on the surface facing the mold, corresponding to the plurality of projections.

  Alternatively, a mold in which a plurality of concave portions having curved surfaces corresponding to the lens curved surfaces of a plurality of microlenses is arranged so that the plurality of concave portions face the transparent substrate, and polysilane is interposed between the mold and the transparent substrate. A transparent material is injected to form a second precursor film. In the second precursor film thus formed, a plurality of convex portions each having a lens curved surface of a microlens are formed on the surface facing the mold, corresponding to the plurality of concave portions.

  Thereafter, the second precursor film is irradiated with light mainly containing ultraviolet rays, so that the refractive index of the second precursor film is changed to a value different from that of the first transparent material film. At this time, with respect to the second precursor film, the concave portion or the convex portion is viewed in a plan view so that the refractive index value in each concave portion or the convex portion has a predetermined distribution. The light intensity distribution, that is, the in-plane distribution of the light intensity in the concave portion or the convex portion may be adjusted to irradiate light. Thereby, it is possible to finely adjust the lens curved surface of each microlens so as to have a substantially predetermined shape.

  Thereafter, the second precursor film is cured by heating to 300 ° C. or higher to form a second transparent material film. Note that the second precursor film may be cured without irradiating the second precursor film with light.

  In another aspect of the method for manufacturing a microlens array plate of the present invention, the method further includes a third step of flattening the surface of the first transparent material film.

  According to this aspect, the focal lengths of the microlenses can be made substantially equal.

  In another aspect of the method for producing a microlens array plate of the present invention, a polysilane having a refractive index that is the same as or different from that of the first transparent material film on the first transparent material film on the side opposite to the transparent member. A fourth step of forming a cover member by applying and curing a transparent material containing

  According to this aspect, it is possible to adjust the focal length of each microlens by changing the film thickness of the cover member.

  Such an operation and other advantages of the present invention will become apparent from the embodiments described below.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<1: First Embodiment>
1st Embodiment which concerns on the micro lens array board of this invention is described with reference to FIGS.

<1-1: Microlens array plate>
First, the microlens array plate in the present embodiment will be described with reference to FIGS. 1 and 2. Here, FIG. 1 is a schematic perspective view of a microlens array plate, and FIG. 2A is a partially enlarged plane showing an enlarged portion related to four microlenses in the microlens array plate of the present embodiment. FIG. 2B is a partially enlarged cross-sectional view of the microlens array plate of the present embodiment.

  As shown in FIG. 1, the microlens array plate 20 of this embodiment includes a transparent member 210 made of, for example, a quartz plate. On the lens forming surface of the transparent member 210, a plurality of concave portions 211 are formed as lens forming portions by digging a large number of concave recesses in an array. That is, in the present embodiment, the “lens forming portion” according to the present invention is the concave portion 211 that defines a concave lens curved surface. In the present embodiment, the “lens forming portion” is formed integrally with the main body portion of the transparent substrate 210, and the refractive indexes of both are naturally equal.

  A transparent material containing polysilane is filled in and applied to the transparent member 210 in the concave portions of the concave portions 211, and the first transparent material film 230 is formed by curing the transparent material. Further, the cover member 200 is formed by applying a transparent material containing polysilane on the first transparent material film 230 on the opposite side of the lens forming surface of the transparent member 210 and curing it. As a result, a large number of microlenses 500 arranged in a plane in an array are constructed. In the present embodiment, the refractive indexes of the cover member 200 and the first transparent material film 230 may be the same or different.

  As shown in FIGS. 2A and 2B, the curved surface of each microlens 500 is generally defined by a transparent member 210 and a first transparent material film 230 having different refractive indexes. More specifically, each recess 211 defines a lens curved surface of the microlens 500. In addition, since polysilane has a refractive index (= 1.75) larger than that of quartz (= 1.6), the refractive index of the first transparent material film 230 is larger than each concave portion 211. Each microlens 500 is formed by a part of the first transparent material film 230 filled in each recess 211.

  In this embodiment, the concave portion 211 described with reference to FIGS. 2A and 2B is a lens surface that is defined by an adjacent concave portion 211 having a spherical curved surface or an aspherical lens surface. It may be formed so as to be in contact with the curved surface, or may be formed so as to intersect. If the lens curved surfaces are formed so as to intersect with each other as in the latter, each microlens 500 can have a wide effective area as a lens. Ideally, if the four lens curved surfaces intersect at the corner portion 501 (see FIG. 2A) of each microlens 500, a condensing function is given to every corner of each microlens 500. This makes it possible to maximize the light utilization efficiency.

  Here, even if polysilane is heated to, for example, 300 ° C. or higher, the refractive index does not change and does not change color, and thus becomes inorganic. Therefore, the first transparent material film 230 is excellent in heat resistance and light resistance.

  In addition, since the first transparent material film 230 is formed by curing a transparent material containing polysilane, the first transparent material film 230 can have the function of a cover glass. Therefore, in this embodiment, the cover member 200 is further formed on the first transparent material film 230, but the cover member 200 is not provided by adjusting the film thickness of the first transparent material film 230. It may be. If the cover member 200 is formed in this way, the focal length of each microlens 500 can be adjusted by changing the film thickness of the cover member 200.

<1-2: Electro-optical device>
Next, an overall configuration of an electro-optical device including the above-described microlens array plate 20 as a counter substrate will be described with reference to FIGS. FIG. 3 is a plan view of the TFT array substrate together with the components formed thereon, as viewed from the side of the microlens array plate, which is the counter substrate, and FIG. It is sectional drawing. Here, a TFT active matrix driving type liquid crystal device with a built-in driving circuit, which is an example of an electro-optical device, is taken as an example.

  3 and 4, in the electro-optical device according to this embodiment, a TFT array substrate 10 and a microlens array plate 20 used as a counter substrate are disposed to face each other. A liquid crystal layer 50 is sealed between the TFT array substrate 10 and the microlens array plate 20, and the TFT array substrate 10 and the microlens array plate 20 are provided in a seal region positioned around the image display region 10a. They are bonded to each other by a sealing material 52.

  The sealing material 52 is made of, for example, an ultraviolet curable resin, a thermosetting resin, or the like for bonding the two substrates, and is applied on the TFT array substrate 10 in the manufacturing process and then cured by ultraviolet irradiation, heating, or the like. It is. Further, a gap material such as glass fiber or glass bead is dispersed in the sealing material 52 to set the distance between the TFT array substrate 10 and the microlens array plate 20 (inter-substrate gap) to a predetermined value. That is, the electro-optical device according to the present embodiment is suitable for a small and enlarged display for a projector light valve.

  A light-shielding frame light-shielding film 53 that defines the frame area of the image display region 10a is provided on the microlens array plate 20 side in parallel with the inside of the seal region where the sealing material 52 is disposed. However, part or all of the frame light shielding film 53 may be provided as a built-in light shielding film on the TFT array substrate 10 side.

  Of the peripheral regions located around the image display region 10 a, the data line driving circuit 101 and the external circuit connection terminal 102 are arranged on one side of the TFT array substrate 10 in the region located outside the seal region where the sealing material 52 is disposed. It is provided along. The scanning line driving circuit 104 is provided along two sides adjacent to the one side so as to be covered with the frame light shielding film 53. Further, in order to connect the two scanning line driving circuits 104 provided on both sides of the image display area 10a in this way, the TFT array substrate 10 is covered with the frame light shielding film 53 along the remaining side. A plurality of wirings 105 are provided.

  In addition, at the four corners of the microlens array plate 20, vertical conductive members 106 functioning as vertical conductive terminals between the two substrates are disposed. On the other hand, the TFT array substrate 10 is provided with vertical conduction terminals in a region facing these corner portions. As a result, electrical conduction can be established between the TFT array substrate 10 and the microlens array plate 20.

  In FIG. 4, on the TFT array substrate 10, an alignment film is formed on the pixel electrode 9a after the pixel switching TFT, the scanning line, the data line and the like are formed. On the other hand, although a detailed configuration will be described later, on the microlens array plate 20, in addition to the counter electrode 21, a lattice-shaped or striped light-shielding film 23 and an alignment film are formed in the uppermost layer portion. Further, the liquid crystal layer 50 is made of, for example, a liquid crystal in which one or several types of nematic liquid crystals are mixed, and takes a predetermined alignment state between the pair of alignment films.

  In addition to the data line driving circuit 101, the scanning line driving circuit 104, and the like, the image signal on the image signal line is sampled and supplied to the data line on the TFT array substrate 10 shown in FIGS. Sampling circuit, precharge circuit for supplying a precharge signal of a predetermined voltage level to a plurality of data lines in advance of an image signal, for inspecting the quality, defects, etc. of the electro-optical device during production or at the time of shipment An inspection circuit or the like may be formed.

  Next, the circuit configuration and operation of the electro-optical device configured as described above will be described with reference to FIG. FIG. 5 shows an equivalent circuit of various elements, wirings, and the like in a plurality of pixels formed in a matrix that forms the image display area of the electro-optical device.

  In FIG. 5, each of the plurality of pixels formed in a matrix that forms the image display region 10 a of the electro-optical device according to the present embodiment includes a pixel electrode 9 a and a TFT 30 for switching control of the pixel electrode 9 a. The data line 6 a formed and supplied with an image signal is electrically connected to the source of the TFT 30. The image signals S1, S2,..., Sn written to the data lines 6a may be supplied line-sequentially in this order, or may be supplied for each group to a plurality of adjacent data lines 6a. Good.

  Further, the gate electrode 3a is electrically connected to the gate of the TFT 30, and the scanning signals G1, G2,..., Gm are pulse-sequentially applied in this order to the scanning line 11a and the gate electrode 3a at a predetermined timing. It is comprised so that it may apply. The pixel electrode 9a is electrically connected to the drain of the TFT 30, and the image signal S1, S2,..., Sn supplied from the data line 6a is obtained by closing the switch of the TFT 30 as a switching element for a certain period. Write at a predetermined timing.

  A predetermined level of the image signals S1, S2,..., Sn written in the liquid crystal as an example of the electro-optical material via the pixel electrode 9a is between the counter electrode 21 formed on the microlens array plate 20 for a certain period. Retained. The liquid crystal modulates light and enables gradation display by changing the orientation and order of the molecular assembly depending on the applied voltage level. In the normally white mode, the transmittance for incident light is reduced according to the voltage applied in units of each pixel, and in the normally black mode, the light is incident according to the voltage applied in units of each pixel. The light transmittance is increased, and light having a contrast corresponding to the image signal is emitted from the electro-optical device as a whole.

  In order to prevent the image signal held here from leaking, a storage capacitor 70 is added in parallel with the liquid crystal capacitor formed between the pixel electrode 9a and the counter electrode. The storage capacitor 70 is provided side by side along the scanning line 11a, and includes a capacitor electrode 300 including a fixed potential side capacitor electrode and fixed at a constant potential.

  The detailed configuration and function of the microlens array plate 20 provided in the above-described electro-optical device will be described with reference to FIGS. FIG. 6 is a plan view schematically showing the configuration of the light shielding film 23 in the microlens array plate 20, and FIG. 7 is a diagram showing in more detail the configuration of the cross section shown in FIG. 4 for a plurality of pixels. FIG. 6 is a cross-sectional view for explaining the function of each microlens 500.

  In the microlens array plate 20, a light shielding film 23 having a grid-like plane pattern as shown in FIG. In the microlens array plate 20, a non-opening region is defined by the light shielding film 23, and a rectangular region delimited by the light shielding film 23 becomes the opening region 700. The light shielding film 23 is formed in a stripe shape, for example, and the non-opening region is defined by the light shielding film 23 and various components such as the capacitor electrode 300 and the data line 6a provided on the TFT array substrate 10 side. That is, the opening region 700 may be defined.

  Each microlens 500 is arranged so as to correspond to each pixel. More specifically, as shown in FIG. 7, in the microlens array plate 20, the microlens is formed in an area at least partially including an opening area 700 and a non-opening area located around the opening area 700 for each pixel. 500 is formed.

  In FIG. 7, the counter electrode 21 made of a transparent conductive film is formed on the transparent member 210 so as to cover the light shielding film 23. Further, an alignment film (not shown in FIG. 7) is formed on the counter electrode 21.

  On the other hand, in FIG. 7, pixel electrodes 9 a are formed in regions corresponding to the respective opening regions 700 on the TFT array substrate 10. In addition, the pixel switching TFT 30, the various wirings such as the scanning line 11a and the data line 6a for driving the pixel electrode 9a, and the electronic elements such as the storage capacitor 70 are formed in the non-opening region. With this configuration, the pixel aperture ratio in the electro-optical device can be maintained relatively large. Further, although not shown in FIG. 7, an alignment film is provided on the pixel electrode 9a.

  In FIG. 7, light such as projection light incident on the microlens array plate 20 is collected by each microlens 500. In FIG. 7, the appearance of light collected by the microlens 500 is schematically shown by a one-dot chain line. Then, the light collected by each microlens 500 is transmitted through the liquid crystal layer 50 to be applied to the pixel electrode 9a, passes through the pixel electrode 9a, and is emitted from the TFT array substrate 10 as display light. Therefore, the light directed to the non-opening region among the light incident on the microlens array plate 20 can also be made incident on the opening region 700 by the condensing action of the microlens 500, so that the effective aperture ratio in each pixel is increased. Can do. That is, it is possible to display a brighter image by increasing the light utilization efficiency. Further, in the microlens plate 20, as will be described later, the focal lengths of the microlenses 500 can be made substantially equal, and the first transparent material film 230 is excellent in heat resistance and light resistance. In the optical device, high-quality image display can be stably performed.

  In addition, since the first transparent material film 230 can be prevented from being deformed by heating the microlens array plate 20 during the manufacture of the electro-optical device, it is possible to improve assembly accuracy in the electro-optical device. Become. As a result, the yield in the electro-optical device manufacturing process can be improved.

  In the electro-optical device described above, instead of providing the data line driving circuit 101 and the scanning line driving circuit 104 on the TFT array substrate 10, for example, a TFT array is mounted on a driving LSI mounted on a TAB (Tape Automated Bonding) substrate. You may make it connect electrically and mechanically via the anisotropic conductive film provided in the peripheral part of the board | substrate 10. FIG. Further, for example, a TN (Twisted Nematic) mode, a VA (Vertically Aligned) mode, a PDLC (Polymer Dispersed) are respectively provided on the side on which the projection light of the microlens array plate 20 is incident and the side on which the emission light of the TFT array substrate 10 is emitted. A polarizing film, a retardation film, a polarizing plate, and the like are arranged in a predetermined direction according to an operation mode such as a liquid crystal mode or a normally white mode / normally black mode.

  In the electro-optical device described above, the microlens array plate 20 as shown in FIGS. 1 and 2 is used as the counter substrate. However, the microlens array plate 20 is used as the TFT array substrate 10. Is also possible. Alternatively, it is possible to attach the microlens array substrate 20 to the TFT array substrate 10 side by simply using a glass substrate or the like on which the counter electrode or alignment film is formed as the counter substrate (not the microlens array plate 20). It is. That is, the microlens of the present invention can be built or attached to the TFT array substrate 10 side.

<1-3: Manufacturing method of microlens array plate>
Next, a method for manufacturing the microlens array plate 20 according to the present embodiment will be described with reference to FIGS. FIG. 8 and FIG. 10 are process diagrams schematically showing the cross-sectional configuration of the microlens array plate 20 in order in each step of the manufacturing process.

  First, as shown in FIG. 8A, an amorphous silicon film is formed as a transparent member, for example, by CVD (Chemical Vapor Deposition) as a mask 900 on a lens forming surface of a transparent substrate 210a such as quartz. The mask 900 may be a Cr film having resistance to hydrofluoric acid, a polysilicon film, or the like.

  Subsequently, as shown in FIG. 8B, the mask 900 is patterned at a position corresponding to the formation position of the concave portion 211 shown in FIG. 1 or FIG. A plurality of openings 902 are formed.

  Here, FIG. 9 is a diagram schematically showing an example of a planar configuration of the mask 900. In the mask 900, the plurality of openings 902 are each formed in a planar shape, for example, in a circular shape, and are smaller in size than the concave portion 211 corresponding to the openings 902.

  Subsequently, in FIG. 8C, isotropic etching is performed on the transparent member 210a through the mask 900 in which a plurality of openings 902 are formed, thereby forming a plurality of recesses 211. More specifically, the isotropic etching is preferably performed by wet etching using an etchant such as hydrofluoric acid.

  Thereafter, in FIG. 8D, the mask 900 is removed by an etching process.

  Next, in FIG. 10A, a transparent material containing polysilane, for example, a solution obtained by dissolving polysilane in an organic solvent is applied and filled in, for example, a spin coating method in the plurality of concave portions 211, and the first precursor film 230a is filled. Is deposited. As a result, the thickness of the first precursor film 230a can be set to a predetermined value, and the margin for adjusting the thickness can be reduced. Furthermore, the thickness of the first precursor film 230a may be adjusted by changing the viscosity of the polysilane to change the viscosity of the transparent material and applying the transparent material onto the transparent member 210. . In this case, the margin for adjusting the film thickness of the first precursor film 230a can be made smaller, and in addition, the surface on the opposite side of the surface facing the lens curved surface of each microlens in the first precursor film 230a. It becomes possible to make it flat. Alternatively, after the first precursor film 230a is cured to form the first transparent material film 230, the surface on the opposite side of the first transparent material film 230 from the surface facing the plurality of recesses 211 is flat. As described above, a transparent material containing polysilane may be further applied to the surface and cured, or a polishing process may be performed.

  Subsequently, in FIG. 10B, the first transparent material film 230 is formed by heating and curing the first precursor film 230a to, for example, 300 ° C. or higher.

  Thereafter, in FIG. 10C, on the first transparent material film 230, a transparent material containing polysilane is further applied on the surface opposite to the side facing the plurality of recesses 211 by, for example, spin coating, A precursor film 200a of the cover member 200 is formed. At this time, the film thickness of the precursor film 200a can be easily adjusted with a small margin as in the case of the first precursor film 230a. Further, the film thickness of the precursor film 200a may be adjusted by further changing the viscosity of the transparent material in the same manner as the first precursor film 230a.

  In FIG. 10C, the refractive index of the precursor film 230a is changed to have a value different from that of the first transparent material film 230 by irradiating the precursor film 230a with light mainly containing ultraviolet rays. You may let them. Further, as described above, the surface of the precursor film 230a opposite to the side facing the first transparent material film 230 may be flattened by changing the viscosity of the transparent material. Alternatively, after the precursor film 230a is cured on the surface and the cover member 200 is formed, similarly to the first transparent material film 230, a transparent material containing polysilane is further applied and cured or polished. Processing may be performed.

  Subsequently, in FIG. 10D, the cover member 200 is formed by heating and curing the precursor film 200 a. Therefore, as described above, in addition to the first transparent material film 230 formed by curing the first precursor film 230a whose film thickness is adjusted, each microlens is formed by forming the cover member 200. By adjusting the focal length of 500, it becomes possible to make them equal.

  As described above, if the cover member 200 is not provided on the first transparent material film 230, the number of steps required for manufacturing the microlens plate 20 can be reduced.

<1-4: Modification>
A variation of the method for manufacturing the microlens array plate 20 of the present embodiment described above will be described below. When manufacturing the microlens array plate 20, as described with reference to FIG. 10A, after forming the first precursor film 230a, as described with reference to FIG. Before the first precursor film 230a is cured, the first precursor film 230a may be irradiated with light mainly containing ultraviolet rays to change the refractive index of the first precursor film 230a.

  Here, FIG. 11 schematically shows the chemical structure of polysilane. When the polysilane is irradiated with light mainly containing ultraviolet rays, the Si—Si bond shown in FIG. 11 is cut, and oxygen (O) is introduced between the Si—Si bonds, and the Si—O—Si bond (siloxane bond). ) Changes its composition. This lowers the refractive index of polysilane. Therefore, the refractive index of the first precursor film 230a can be easily changed by irradiating the first precursor film 230a with light mainly containing ultraviolet rays.

  In this way, by reducing the refractive index of the first precursor film 230a and making the refractive index smaller than that of each recess 211, a concave lens can be formed by each recess 211. Alternatively, in the first precursor film 230a, a portion formed by filling each concave portion 211 and having a predetermined distribution of the refractive index value of the joint portion joined to the concave portion 211. , The intensity distribution of the light applied to the joint portion, that is, the in-plane distribution of the light intensity at the joint portion is adjusted to a predetermined distribution, and the first precursor film 230a is irradiated with light. To do. As a result, the lens curved surface of each micro lens 500 can be finely adjusted so as to have a substantially predetermined shape.

<2: Second Embodiment>
A second embodiment according to the microlens array plate of the present invention will be described below with reference to FIGS. In the following description, only differences from the first embodiment will be described, and common parts with the first embodiment will be denoted by the same reference numerals in the drawings, and redundant description will be omitted.

  First, the microlens array plate in the second embodiment will be described with reference to FIG. FIG. 12 is a schematic perspective view of the microlens array plate in the second embodiment.

  As shown in FIG. 12, in the microlens array plate 20, a plurality of convex portions 212 are formed as lens forming portions on the lens forming surface of the transparent member 210. That is, in the present embodiment, the “lens forming portion” according to the present invention is a convex portion 212 that defines a convex lens curved surface. In the present embodiment, the “lens forming portion” is formed integrally with the main body portion of the transparent substrate 210, and the refractive indexes of both are naturally equal. And the 1st transparent material film 230 is formed so that each convex part 212 may be covered. Further, in the first transparent material film 230, a cover member 200 is formed on the surface opposite to the side facing the transparent member 210, that is, on the lower side of the first transparent material film 230 in FIG. Yes. As a result, a large number of microlenses 500 arranged in a plane in an array are formed.

  Each convex portion 212 defines a lens curved surface of the microlens 500. Further, the refractive index of the first transparent material film 230 is smaller than each convex portion 212. Each microlens 500 is formed by each convex portion 212.

  Therefore, even when the microlens array plate 20 in the second embodiment is used as a counter substrate of a liquid crystal device, for example, the same benefits as those in the first embodiment can be obtained. When the microlens array plate 20 is used as a counter substrate, each microlens 500 is preferably arranged with respect to the pixel electrode 9a, similarly to the configuration shown in FIG. In this case, the light shielding film 23 and the counter electrode 21 are formed on the cover member 20.

  Next, a manufacturing method of the microlens array plate 20 in the second embodiment will be described with reference to FIGS. FIG. 13 to FIG. 15 are process diagrams schematically showing a cross-sectional configuration of the microlens array plate 20 in order in each step of the manufacturing process in the second embodiment.

  First, in FIG. 13A, as a transparent member, a plurality of resists 910a are formed on the lens formation surface of a transparent substrate 210a such as quartz at locations corresponding to the formation positions of the convex portions 212 shown in FIG. .

  Subsequently, in FIG. 13B, the plurality of resists 910a are post-baked to form a plurality of convex portions 910 each having a curved surface corresponding to the lens curved surface.

  Thereafter, in FIG. 13C, the plurality of convex portions 910 and the transparent member 210a are preferably etched by a dry etching method. As a result, the plurality of convex portions 910 are transferred to the transparent member 210 a, and the plurality of convex portions 212 having lens curved surfaces corresponding to the curved surfaces of the plurality of convex portions 910 are formed on the transparent member 210.

  Subsequently, in FIG. 14A, a transparent material containing polysilane is applied on the transparent member 210 so as to cover the plurality of convex portions 212 by, for example, a spin coating method to form a first precursor film 230a. .

  Subsequently, in FIG. 14B, the first precursor film 230 a is irradiated with light mainly containing ultraviolet rays, so that the refractive index of the first precursor film 230 a becomes smaller than each convex portion 212. To change. Here, in the first precursor film 230a, a predetermined distribution is applied to the first precursor film 230a so that the refractive index values of the bonding portions that cover the respective protrusions 212 and are bonded to the protrusions 212 have a predetermined distribution. You may make it irradiate the light which has light intensity distribution. As a result, the lens curved surface of each micro lens 500 can be finely adjusted so as to have a substantially predetermined shape.

  Subsequently, in FIG. 14C, the first transparent material film 230 is formed by heating and curing the first precursor film 230a.

  Thereafter, in FIG. 15A, a transparent material containing polysilane is further applied on the surface opposite to the side facing the plurality of convex portions 212 in the first transparent material film 230 by, for example, spin coating. Then, the precursor film 200a of the cover member 200 is formed.

  Subsequently, in FIG. 15B, the precursor film 200a is irradiated with light mainly containing ultraviolet rays to change the refractive index of the precursor film 200a to a value equivalent to that of the first transparent material film 230. . At this time, the refractive index of the first transparent material film 230 may be different from that of the precursor film 230a. In this case, there may be a case where ultraviolet irradiation is not performed.

  Subsequently, in FIG. 15C, the cover film 200 is formed by heating and curing the precursor film 200a.

  Note that the step described with reference to FIG. 14B may be omitted, that is, the first precursor film 230a may not be irradiated with ultraviolet rays. Thereby, the magnitude relationship of the value of the refractive index between the 1st transparent material film 230 and the some convex part 212 can be reversed with the relationship demonstrated with reference to FIG. Therefore, a concave lens can be formed by a part of the first transparent material film 230 covering each convex portion 212.

<3: Modification of the first or second embodiment>
Modification examples of the first or second embodiment described above will be described with reference to FIGS. 16 to 18.

  First, one configuration of the microlens array plate in the present modification and a manufacturing method thereof will be described with reference to FIGS. FIG. 16A and FIG. 16B are cross-sectional views showing a configuration of the microlens array plate in the present modification, and FIG. 17 shows a configuration of the microlens array plate in the present modification. It is process drawing which shows schematically the structure of the cross section of this transparent member in order of the manufacturing method which concerns in particular in each process in manufacture of a transparent member later on.

  16A and 16B, the transparent member 210 includes a transparent substrate 220 such as quartz, and a second transparent material film 222 formed on the transparent substrate 220 from a transparent material containing polysilane. including. The second transparent material film 222 has a refractive index different from that of the first transparent material film 230. The second transparent material film 222 may be formed to have a refractive index different from that of the transparent substrate 220 in addition to or instead of the first transparent material film 230.

  Also, as shown in FIG. 16A, the second transparent material film 222 has a plurality of concave portions 211 as a plurality of lens forming portions formed in an array on the lens forming surface. Alternatively, as shown in FIG. 16B, the second transparent material film 222 has a plurality of convex portions 212 as a plurality of lens forming portions formed in an array on the lens forming surface.

  Next, a manufacturing process relating to the manufacturing of the transparent member 210 shown in FIGS. 16A and 16B will be described with reference to FIG. FIG. 17 shows a cross-sectional configuration of the transparent member 210 in the manufacturing process of the transparent member 210 shown in FIG.

  First, in FIG. 17A, a mold 950 in which a plurality of convex portions having curved surfaces corresponding to the lens curved surfaces of the plurality of microlenses 500 are formed on the transparent substrate 220, and the plurality of convex portions are the transparent substrate 220. It arranges so that it may face. Then, a transparent material containing polysilane is injected between the mold 950 and the transparent substrate 220 to form the second precursor film 222a. When the transparent member 210 shown in FIG. 16B is manufactured, a mold 950 in which a plurality of concave portions having curved surfaces corresponding to the lens curved surfaces of the plurality of microlenses 500 is formed on the transparent substrate 220. The plurality of recesses are arranged so as to face the transparent substrate 220.

  Subsequently, in FIG. 17B, the second precursor film 222 a has a refractive index different from that of the first transparent material film 230, for example, smaller than that of the first transparent material film 230. The precursor film 222a is irradiated with light mainly containing ultraviolet rays. At this time, depending on the value of the refractive index of the first transparent material film 230 formed on the transparent member 210, the second precursor film 222a may not be irradiated with ultraviolet rays.

  Further, in this step, the concave portion 211 or the convex portion 212 is viewed in a plane so that the refractive index value in each concave portion 211 or each convex portion 212 has a predetermined distribution with respect to the second precursor film 222a. The light intensity may be irradiated by adjusting the distribution of the light intensity applied to the concave portion 211 or the convex portion 212, that is, the in-plane distribution of the light intensity in the concave portion 211 or the convex portion 212. As a result, the lens curved surface of each micro lens 500 can be finely adjusted so as to have a substantially predetermined shape.

  Thereafter, in FIG. 17C, the second transparent material film 222 is formed by heating and curing the second precursor film 222a.

  Next, another configuration of the microlens array plate in this modification will be described with reference to FIG. FIG. 18 is a cross-sectional view showing another configuration of the microlens array plate in the present modification.

  In FIG. 18, a lens forming surface in which two transparent members 210 shown in FIG. 1, FIG. 2B or FIG. 16A are used and the two transparent members 210 are formed with a plurality of concave portions 211. Are arranged so as to face each other and are bonded to each other by a transparent material containing polysilane, whereby the microlens array plate 20 is formed.

  Here, by changing the viscosity of the polysilane, the transparent material can be used as an adhesive. Then, the first transparent material film 230 is formed by curing the transparent material injected between the two transparent members 210 in order to bond the two transparent members 210 together.

  In the microlens array plate 20, the two transparent members 210 are arranged such that a plurality of concave portions 211 formed in each of the two transparent members 210 face each other as shown in FIG. The biconvex lens 500 is formed as a microlens by a part of the first transparent material film 230 formed between the concave portions 211 facing each other in this way.

  Therefore, also in the microlens array plate 20 shown in FIG. 18, it is possible to receive the same benefits as in the first or second embodiment.

<4: Electronic equipment>
Next, an overall configuration, particularly an optical configuration, of an embodiment of a projection color display device as an example of an electronic apparatus using the above-described electro-optical device as a light valve will be described. FIG. 19 is a schematic cross-sectional view of the projection type color display device.

  In FIG. 19, a liquid crystal projector 1100, which is an example of a projection type color display device, prepares three liquid crystal modules including a liquid crystal device having a drive circuit mounted on a TFT array substrate. The projector is configured as 100B. In the liquid crystal projector 1100, when projection light is emitted from a lamp unit 1102 of a white light source such as a metal halide lamp, light components R, G, and R corresponding to the three primary colors of RGB are obtained by three mirrors 1106 and two dichroic mirrors 1108. The light is divided into B and led to the light valves 100R, 100G and 100B corresponding to the respective colors. In particular, the B light is guided through a relay lens system 1121 including an incident lens 1122, a relay lens 1123, and an exit lens 1124 in order to prevent light loss due to a long optical path. Light components corresponding to the three primary colors modulated by the light valves 100R, 100G, and 100B are synthesized again by the dichroic prism 1112 and then projected as a color image on the screen via the projection lens 1114.

  The present invention is not limited to the above-described embodiment, and can be appropriately changed within a scope not departing from the gist or concept of the invention that can be read from the claims and the entire specification, and a microlens array with such a change. The plate and the manufacturing method thereof, the electro-optical device including the microlens array plate, and the electronic apparatus including the electro-optical device are also included in the technical scope of the present invention.

It is a schematic perspective view of a micro lens array board. FIG. 2A is a partially enlarged plan view showing an enlarged portion related to four microlenses in the microlens array plate, and FIG. 2B is a partially enlarged sectional view of the microlens array plate. . It is a top view which shows the whole structure of an electro-optical apparatus. It is H-H 'sectional drawing of FIG. 2 is an equivalent circuit of various elements, wirings, and the like in a plurality of pixel portions formed in a matrix that forms an image display region of an electro-optical device. It is a top view which shows typically the structure of the light shielding film in a micro lens array board. It is sectional drawing for demonstrating the function of each micro lens. It is process drawing (the 1) which shows roughly the structure of the cross section of the micro lens array board in each process of a manufacturing process later on. It is a figure which shows roughly an example of the planar structure of a mask. It is process drawing (the 2) which shows roughly the structure of the cross section of the micro lens array board in each process of a manufacturing process later on. It is a figure which shows typically the chemical structure of polysilane. It is a schematic perspective view of the micro lens array board in 2nd Embodiment. It is process drawing (the 1) which shows roughly the structure of the cross section of the micro lens array board in each process of the manufacturing process in 2nd Embodiment later on. It is process drawing (the 2) which shows roughly the structure of the cross section of the micro lens array board in each process of the manufacturing process in 2nd Embodiment later on. It is process drawing (the 3) which shows roughly the structure of the cross section of the micro lens array board in each process of the manufacturing process in 2nd Embodiment later on. FIG. 16A and FIG. 16B are cross-sectional views showing a configuration of a microlens array plate in a modification of the first or second embodiment. About the manufacturing method which concerns on one structure of the micro lens array board in the modification of 1st or 2nd embodiment, especially the structure of the cross section of this transparent member in each process in manufacture of a transparent member is shown roughly in order. It is process drawing shown. It is sectional drawing which shows the other structure of the micro lens array board in the modification of 1st or 2nd embodiment. 1 is a schematic cross-sectional view showing a color liquid crystal projector as an example of a projection type color display device which is an embodiment of an electronic apparatus of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 20 ... Micro lens array board, 200 ... Cover member, 210, 210a ... Transparent member, 211 ... Recessed part, 230 ... First transparent material film, 500 ... Micro lens

Claims (15)

A transparent member having a plurality of lens forming portions that respectively define lens curved surfaces of a plurality of microlenses arranged in an array;
A first transparent material film formed of a transparent material containing polysilane, which is joined to each of the plurality of lens curved surfaces and has a refractive index different from at least the plurality of lens forming portions of the transparent member. A microlens array plate characterized by the above. Each of the plurality of lens forming portions is a recess,
2. The microlens array plate according to claim 1, wherein the first transparent material film has a refractive index higher than that of the plurality of lens forming portions while being filled in the concave portion. Each of the plurality of lens forming portions is a convex portion,
The microlens array plate according to claim 1, wherein the first transparent material film has a refractive index smaller than that of the plurality of lens forming portions. The transparent member is
A transparent substrate;
And a second transparent material film formed of a transparent material containing polysilane having a refractive index different from that of the first transparent material film and having the plurality of lens forming portions on the transparent substrate. The microlens array plate according to any one of claims 1 to 3. A cover member formed of a transparent material containing polysilane having the same or different refractive index as that of the first transparent material film is further provided on the first transparent material film on the side opposite to the transparent member. The microlens array plate according to any one of claims 1 to 4.   A microlens array plate according to any one of claims 1 to 5, a display electrode facing the microlens plate, and a wiring or an electronic element connected to the display electrode. An electro-optical device.   An electronic apparatus comprising the electro-optical device according to claim 6. A first step of forming, on the transparent member, a plurality of lens forming portions that respectively define lens curved surfaces of a plurality of microlenses arranged in an array;
A second step of forming a first transparent material film bonded to each of the plurality of lens curved surfaces from a transparent material containing polysilane having a refractive index different from that of at least the plurality of lens forming portions of the transparent member; A method for manufacturing a microlens array plate, comprising: In the first step, a plurality of concave portions are formed as the plurality of lens forming portions,
The second step includes
Forming a first precursor film having a larger refractive index than the plurality of lens forming portions by filling the concave portion with the transparent material;
The method for producing a microlens array plate according to claim 8, further comprising: forming the first transparent material film by heating and curing the first precursor film. In the first step, a plurality of convex portions are formed as the plurality of lens forming portions,
The second step includes
Applying the transparent material so as to cover the convex portions, and forming a first precursor film that can have a refractive index smaller than the plurality of lens forming portions by performing ultraviolet irradiation;
The method for producing a microlens array plate according to claim 8, further comprising: forming the first transparent material film by heating and curing the first precursor film. In the second step, after the step of forming the first precursor film and before the step of forming the first transparent material film, the first precursor film mainly includes ultraviolet rays. The method for manufacturing a microlens array plate according to claim 9 or 10, further comprising a step of irradiating light to change a refractive index of the first precursor film. In the step of changing the refractive index of the first precursor film, a portion of the first precursor film that is joined to the plurality of lens curved surfaces is viewed in a plane, and the light intensity in the portion is within the plane. The method of manufacturing a microlens array plate according to claim 11, wherein the first precursor film is irradiated with the light so that the distribution becomes a predetermined distribution. In the first step, a mold in which a plurality of curved surfaces corresponding to the plurality of lens curved surfaces are formed on one surface on a transparent substrate is disposed so that the one surface faces the transparent substrate, and the mold and the Injecting a transparent material containing polysilane between the transparent substrates and forming a second precursor film having the plurality of lens forming portions formed on the surface facing the mold;
Irradiating the second precursor film with light mainly containing ultraviolet rays so that the refractive index of the second precursor film is different from that of the first transparent material film;
The step of heating and curing the second precursor film to form a second transparent material film includes: a microlens array plate according to any one of claims 8 to 12; Production method.   The method for manufacturing a microlens array plate according to any one of claims 8 to 13, further comprising a third step of flattening a surface of the first transparent material film. By applying and curing a transparent material containing polysilane having the same or different refractive index as the first transparent material film on the first transparent material film on the side opposite to the transparent member, The method for manufacturing a microlens array plate according to any one of claims 8 to 14, further comprising a fourth step of forming.

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