JP2001201736A - Optoelectronic device, its manufacturing method and projection mode display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce deterioration of picture quality in the lapse of time generated in adjacency of a picture frame region in the picture display region due to deformation of an adhesive in the lapse of time in an optoelectronic device composed of various plate-shaped members such as a micro lens array plate stuck to substrates such as a cover glass, a counter substrate, an element substrate or the like. SOLUTION: The optoelectronic device is provided with the cover glass 200 and the counter substrate 20 with the micro lens array. The cover glass and the counter substrate are stuck to each other with the adhesive 210 in a peripheral region located on the periphery of the picture display region and are not stuck to each other in the picture display region so as to leave a space 220.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal device, an EL (E
The invention belongs to the technical field of an electro-optical device such as an electro-luminescence device, a method of manufacturing the same, and a projection display device.

[0002]

2. Description of the Related Art An electro-optical device of this kind is generally manufactured by, for example, T
An electro-optical material such as liquid crystal is sandwiched between a pair of substrates such as an element substrate such as an FT array substrate and a cover glass (or a counter substrate). On the outside of the substrate (that is, on the surface opposite to the side facing the liquid crystal), there is provided a microlens array plate for improving light use efficiency and displaying a bright image, and for protecting the substrate from dust and dirt. A dust-proof glass plate, a heat-dissipating glass plate for suppressing a temperature rise of the electro-optical device,
Various plate-like members such as a defocusing glass plate for reducing adverse effects on display images due to dust or dust shadows on the substrate surface are attached.

[0003] For example, JP-A-60-165621-16
JP-A-5624 and JP-A-5-196926 disclose a liquid crystal device in which a microlens for improving the efficiency of using incident light is provided on a counter substrate. For example, Japanese Patent Application Laid-Open No. Hei 9-113906 discloses a liquid crystal device in which a transparent glass plate having a heat dissipation function and a defocusing function is arranged on one or both outer surfaces of a transparent substrate of the liquid crystal device.

The main body of the electro-optical device to which various plate members such as the microlens array plate are attached as described above is housed in a light-shielding case made of plastic or the like, and transmits and reflects display light. A frame area that defines the edge of the image display area is defined by the edge of the window of the case. Alternatively, a frame-shaped light-shielding film slightly smaller than the window of such a case is provided on at least one of the pair of substrates, and the frame region is defined.

In a method of manufacturing an electro-optical device having such various plate-like members, a microlens array plate or the like is formed on the outside of an element substrate or a cover glass by using a photo-curing adhesive or a thermosetting adhesive. A plate member is attached. At this time, the adhesive is generally applied in a liquid state by spin coating or the like on the entire surface of the element substrate or the cover glass, and is cured after bonding. Thereafter, the main body of the electro-optical device including the substrate to which the plate-shaped member and other members are attached is placed in a light-shielding case, thereby completing the electro-optical device.

An electro-optical device manufactured in this manner is, for example, a liquid crystal device for a light valve of a projector.
Display light (projection light) indicating the image display area viewed through the window of the case
Is transmitted, and the contrast is modulated for each pixel in accordance with the image signal, and the image is displayed.

[0007]

However, in the case of the above-mentioned electro-optical device, while the device is used for a light valve of a projector or the like, a contrast abnormality occurs along the frame region in the image display region near the frame region with time. There is a problem that it occurs. More specifically, for example, when displaying black, a whitish area is generated along the frame, and a discontinuous surface with abnormal contrast becomes visible. In particular, in the case of a device that transmits relatively strong light, such as a liquid crystal device for a light valve of a projector, such deterioration over time is remarkable. Of the three liquid crystal devices for R (red), G (green), and B (blue) in the case of a liquid crystal device for a light valve of a projector, the deterioration over time is most remarkable in the device for B. Is known.
For example, since such a contrast abnormality appears after several hundred hours of use, this problem is extremely serious in practical use in a projector that requires a lifetime of at least several thousand hours.

Further, in the case of the above-mentioned electro-optical device, a light-curing adhesive or a thermosetting adhesive used for attaching a plate member such as a microlens array plate to the outside of an element substrate or a cover glass is used. When air bubbles and impurities are mixed, there is also a problem that image quality is reduced. Further, as such an adhesive, in order to exert the lens function of the microlens array, it is necessary to use an adhesive having a sufficiently low refractive index as compared with the material constituting the microlens array, and in addition, in particular, In the case of a device that transmits relatively strong light, such as a liquid crystal device for a light valve of a projector, it is necessary to use an adhesive that also has chemical properties that do not deteriorate due to light. In addition, such an adhesive is required to be light-transmissive and to have a property of not easily causing light reflection at an interface with the microlens array. As described above, since the requirements for the material and application technique of the adhesive are extremely severe, there is also a problem that the manufacturing cost is increased or a certain degree of image quality deterioration due to the adhesive has to be sacrificed.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-described problems, and has an electro-optical structure in which various plate members such as a microlens array plate are adhered to a substrate such as an element substrate or a cover glass (or a counter substrate). An object of the present invention is to provide an electro-optical device capable of reducing deterioration over time of image quality occurring near a frame of an image display area, a method of manufacturing the same, and a projection display device including the electro-optical device as a light valve. And

[0010]

In order to solve the above-mentioned problems, an electro-optical device according to the present invention comprises: a transparent substrate having a display area and a peripheral area located around the display area; And a transparent plate-shaped member that is disposed so as to face the substrate, wherein the plate-shaped member and the substrate are bonded with an adhesive in the peripheral region.

According to the electro-optical device of the present invention, the plate member is a transparent plate member having various functions such as a micro lens array plate, a dustproof glass plate, a heat radiation glass plate, a defocus glass plate, and the like. In a peripheral area located around the image display area, a transparent substrate (for example, a cover glass, a counter substrate,
Element substrate, etc.). Here, the “peripheral region” is meant to include a frame region that defines the frame of the image display region and a narrowly defined peripheral region located therearound. Here, since the adhesive is disposed in the peripheral area, when display light including ultraviolet rays, heat rays, and the like is incident on the image display area during use of the electro-optical device (particularly, in a projector application). (When strong display light is incident as described above), it is possible to prevent the adhesive from being irradiated with the display light and the adhesive from being deteriorated. Therefore, little or no stress concentration or deformation of the substrate near the boundary between the image display area and the peripheral area due to the deterioration of the adhesive occurs. Therefore, a high-quality image can be displayed in the image display area.
In particular, such deterioration occurs over time (that is, occurs as time elapses), so that the life of the apparatus can be extended, which is advantageous. Further, it is advantageous from the viewpoint that even if the adhesive disposed in the peripheral area is deteriorated and deteriorated to become opaque or cracked, the display quality in the image display area is not directly impaired. Even if the adhesive has voids from the beginning of manufacture, or if the adhesive is made of a material that causes large light reflection at the interface with the substrate or plate-like member (especially if the adhesive is separated from the display light path). This is very advantageous from the viewpoint of not deteriorating the display quality.

According to the study of the present inventor, when a plate-like member such as a microlens array plate is bonded to a substrate (for example, a cover glass) not only in the peripheral region but also in the image display region using a photocurable adhesive. In particular, when strong display light is transmitted through an image display area, such as in a light valve application of a projector, it has been found that this photocurable adhesive causes temporal deformation such as sink marks (thinning deformation). . Here, normally, display light such as projection light is applied in the form of a completed product in which a light-blocking means is provided in a frame area that defines a frame of an image display area. The photo-curable adhesive in the image display area that is largely deformed by light including ultraviolet light, etc., and the photo-curable adhesive in the frame area that is shielded by the light-shielding means and is less deformed by light including ultraviolet light. There is a difference in the amount of deformation of the photocurable adhesive between the agent and the part of the agent. As a result, the substrate to which the plate member is adhered by the photocurable adhesive is deformed temporally due to structural stress concentration near the boundary between these two portions, and finally, in the vicinity of this boundary. It is considered that this leads to deterioration of image quality with time (contrast abnormal increase with time).

However, in the electro-optical device according to the present invention, as described above, since the adhesive is disposed in the peripheral area, the vicinity of the boundary between the image display area and the frame area due to the aging of the photo-curable adhesive. And little or no deformation of the substrate occurs. Therefore, it is possible to reduce the temporal deterioration of the image quality locally occurring near such a boundary.

As a result, according to the electro-optical device of the present invention, high-quality image display can be performed for a long time in accordance with various functions of the plate member. Moreover, the adhesive only needs to have generally stable adhesive properties and a degree that does not become a contamination source, and the optical properties of the adhesive do not matter. Therefore, the degree of freedom regarding the material and application technique of the adhesive that can be used in the manufacturing process of the electro-optical device is greatly expanded, and the manufacturing cost can be reduced.

In one aspect of the electro-optical device of the present invention, the plate-like member includes a microlens array plate.

According to this aspect, the microlens array plate is adhered to the substrate such as the cover glass by the adhesive. Therefore, the display light is collected by the plurality of microlenses of the microlens array plate so as to enter the aperture region of each pixel. Here, in particular, since the adhesive is disposed in the peripheral region, air, a gas or liquid having a low refractive index such as nitrogen or the like is disposed in a predetermined gap between the microlens array plate and the substrate in the image display region. Accordingly, the difference in the refractive index at the interface between such a gas or the like and each microlens made of a photosensitive resin material or the like can be easily increased. This makes it possible to increase the lens capability (light-collecting capability) of each microlens. As a result, by suppressing the temporal deterioration of the image quality in the vicinity of the frame of the image display area, the intensity of light passing through each aperture is increased extremely efficiently even if the pixel aperture ratio is the same,
An image displayed by the electro-optical device can be made brighter.

In another aspect of the electro-optical device according to the present invention, the plate member includes a dust-proof glass plate.

According to this aspect, the dust-proof glass plate is bonded to the substrate with the adhesive. Therefore, it is possible to prevent deterioration of image quality due to scratches, dust, and the like by the dust-proof glass plate while suppressing temporal deterioration of image quality near the frame of the image display area.

In another aspect of the electro-optical device according to the present invention, the plate member includes a heat radiation glass plate.

According to this aspect, the heat radiation glass plate is bonded to the substrate with the adhesive. Accordingly, it is possible to prevent the image quality near the frame of the image display area from deteriorating with time and at the same time to prevent the temperature of the electro-optical device from rising. In particular, when the electro-optical device is used as a light valve in a projector, in order to perform enlarged projection on a screen, the electro-optical device is incident on the electro-optical device in a state where strong light from a light source such as a metal halide lamp is collected. However, the heat dissipation glass can effectively suppress the temperature rise.

In another aspect of the electro-optical device of the present invention, the plate member includes a defocus glass plate.

According to this aspect, the defocusing glass plate is bonded to the substrate with the adhesive. Therefore, it is possible to suppress the deterioration of the image quality over time in the vicinity of the frame of the image display area, and at the same time, to make the image display due to dust or dirt less noticeable by defocusing. In particular, when small dust or dust is enlarged and projected as in a projector, it is very effective to use a defocusing glass plate to perform defocusing.

In another aspect of the electro-optical device of the present invention, the adhesive does not exist in most of the image display area.

According to this aspect, the adhesive does not exist in most of the image display area. Here, "not present in the majority" means that it exists only in less than half the area,
This means that it does not exist at all. For this reason, even if the adhesive deteriorates with time due to light irradiation or the like during use of the electro-optical device, or even if voids or cracks are generated in the adhesive from the beginning of manufacturing, these adversely affect the image quality. Is small according to the small amount of the adhesive occupying the image display area. It goes without saying that the image display area may be configured so that no adhesive is present at all, and furthermore, it may be configured such that no adhesive exists at all in the frame area that defines the frame.

In another aspect of the electro-optical device according to the present invention, the adhesive is discretely arranged at three or more locations in the peripheral area.

According to this aspect, since the adhesive is discretely arranged in the peripheral area, the space between the substrate and the plate-like member in the image display area is not sealed by the adhesive. . Therefore, due to a temperature change during use of the electro-optical device, air or the like sealed in the space between the substrate and the plate-shaped member in the image display area expands or contracts, and the air or the like is formed on the substrate or the plate-shaped member. A situation where stress is generated or deformed can be relatively easily prevented. In addition, since the adhesive is provided at three or more locations, the plate member can be stably fixed to the substrate.

In another aspect of the electro-optical device of the present invention, the adhesive surrounds the periphery of the image display area in a plan view.

According to this aspect, the plate member can be extremely stably fixed to the substrate by the adhesive surrounding the periphery of the image display area, and the predetermined gap between the substrate and the plate member can be displayed on the image display. It is also possible to make it extremely uniform over the entire area.

[0029] In this embodiment, the adhesive may be made of an air-permeable material provided with a large number of fine holes communicating with each other.

According to this structure, through the fine holes,
Air can be introduced into the space between the substrate and the plate member in the image display area from outside the device. In particular, due to a temperature change during use of the electro-optical device, air or the like sealed in the space between the substrate and the plate-like member in the image display area expands or contracts, causing the substrate or the plate-like member to expand. A situation where stress is generated or deformed can be relatively easily prevented. Therefore, the plate-like member can be fixed to the substrate very stably while reducing the deformation of the substrate and the plate-like member, and the predetermined gap between the substrate and the plate-like member can be extremely reduced over the entire image display area. It is also possible to make them uniform.

Alternatively, in the aspect surrounded by the adhesive, the adhesive may be made of a material that does not allow air to pass through, and an opening may be provided for passing air into the space surrounded by the adhesive.

With this configuration, it is possible to introduce air from the outside of the apparatus into the space between the substrate and the plate-like member in the image display area through the opening. In particular, due to a temperature change during use of the electro-optical device, air or the like sealed in the space between the substrate and the plate-like member in the image display area expands or contracts, causing the substrate or the plate-like member to expand. A situation where stress is generated or deformed can be relatively easily prevented. Therefore, the plate member can be fixed to the substrate extremely stably while reducing the deformation of the substrate and the plate member,
It is also possible to make the predetermined gap between the substrate and the plate-like member extremely uniform over the entire image display area.

Alternatively, in this embodiment, the adhesive is made of a material that does not allow air to pass through, and a predetermined type of gas or liquid may be sealed in a space surrounded by the adhesive.

With this configuration, it is possible to prevent dust and dirt from entering the sealed space from the outside. A negative active gas such as nitrogen, a chemically stable liquid, or the like may be sealed in the sealed space with the help of a liquid crystal sealing technique in a conventional liquid crystal device.

In order to solve the above-mentioned problems, an electro-optical device manufacturing method according to the present invention is a method for manufacturing the above-described electro-optical device (including the various aspects described above) according to the present invention. Arranging the uncured adhesive in the peripheral region on the substrate, arranging the plate-shaped member on the substrate on which the uncured adhesive is arranged, and curing the uncured adhesive And the step of causing

According to the method of manufacturing an electro-optical device of the present invention, first, an adhesive before curing is arranged in a peripheral region on a substrate such as a cover glass or a counter substrate. As the adhesive, various known adhesives can be used irrespective of optical characteristics (refractive index, etc.), except for those which generate contaminants upon curing, such as cyan acrylate. For example, an epoxy-based or acrylic-based adhesive can be used. As a method for disposing such an adhesive, a known technique such as a dispenser or screen printing can be used. In particular, in the present invention,
Since bubbles and voids may enter the adhesive, the adhesive may be disposed on the substrate at as low a cost as possible. Next, a transparent plate-like member having various functions such as a microlens array plate, a dust-proof glass plate, a heat-radiation glass plate, and a defocusing glass plate is disposed on the substrate on which the adhesive before curing is disposed. Next, the adhesive disposed in a predetermined gap between the plate member and the substrate is cured. For example, if it is a photo-curable adhesive, it may be irradiated with light such as ultraviolet rays through at least one of the substrate and the plate-like member. Good. As a result, the above-described electro-optical device of the present invention can be manufactured relatively easily and at low cost.

In order to solve the above problems, a projection type display device according to the present invention includes a light valve including the above-described electro-optical device according to the present invention (including the various aspects described above), and projects light to the light valve. A light source; and an optical system that projects the projection light emitted from the light valve.

According to the projection type display device of the present invention, since the above-described electro-optical device (including its various aspects) of the present invention is provided as a light valve, it is possible to display high-quality images for a long period of time. Become.

The operation and other advantages of the present invention will become more apparent from the embodiments explained below.

[0040]

Embodiments of the present invention will be described below with reference to the drawings.

(Overall Configuration of Electro-Optical Device) First, the overall configuration of the electro-optical device according to each embodiment of the present invention will be described with reference to FIGS. Here, a liquid crystal device of a TFT active matrix drive system with a built-in drive circuit is taken as an example.

FIG. 1 is a plan view of a TFT array substrate together with components formed thereon viewed from the counter substrate side, and FIG. 2 is a cross-sectional view taken along the line HH ′ of FIG.

In FIGS. 1 and 2, the liquid crystal device has a TF
The T array substrate 10 and the opposing substrate 20 are arranged to face each other, and a large number of microlenses are formed on the lower surface of the opposing substrate 20, and the opposing substrate 20 is configured as a microlens array plate. An adhesive 21 is provided on the lower surface of the counter substrate 20 on which the microlenses are formed as described above.
With 0, the cover glass 200 as an example of the substrate is adhered. The liquid crystal layer 50 is sealed between the TFT array substrate 10 and the cover glass 200,
The T array substrate 10 and the cover glass 200 are adhered to each other by a seal member 52 provided in a seal area located around the image display area 10a.

The sealing material 52 is made of, for example, an ultraviolet curable resin, a thermosetting resin, or the like for bonding the two substrates together.
After being applied on the TFT array substrate 10 in a manufacturing process to be described later, it is cured by ultraviolet irradiation, heating, or the like. If the liquid crystal device is a small-sized liquid crystal device such as a projector, which performs enlarged display, a glass fiber or a glass fiber for setting a distance between the two substrates (a gap between the substrates) to a predetermined value is included in the sealing material 52. A gap material (spacer) such as glass beads may be sprayed. Alternatively, such a gap material may be included in the liquid crystal layer 50 if the liquid crystal device is a large-sized liquid crystal device such as a liquid crystal display or a liquid crystal television that displays images at the same magnification.

A light-shielding frame 53 for defining the image display area 10a is provided on the counter substrate 20 side in parallel with the inside of the seal area in which the seal material 52 is disposed.

A data line driving circuit 101 and an external circuit connection terminal 102 are provided along a side of the TFT array substrate 10 in a peripheral region outside the sealing region where the sealing material 52 is disposed. 104 are provided along two sides adjacent to this one side. Further, on the remaining one side of the TFT array substrate 10, a plurality of wirings 105 for connecting between the scanning line driving circuits 104 provided on both sides of the image display area are provided. Further, at least one corner portion of the opposite substrate 20 is provided with an upper / lower conductive material 106 for establishing electrical conduction between the TFT array substrate 10 and the opposite substrate 20.

In FIG. 2, an alignment film made of a polyimide-based material is formed on the TFT array substrate 10 and on the pixel electrodes after the pixel switching TFTs 30 and the wirings such as the scanning lines, the data lines, and the capacitance lines are formed. Is formed. On the other hand, on the cover glass 200 (the lower surface in FIG. 2), a polyimide film is formed on the uppermost layer on which a light-shielding film 23 defining a non-opening area for each pixel, a color filter, and the like are formed in addition to a counter electrode. An alignment film made of a base material is formed. Each of the pair of alignment films is coated with a polyimide material and baked, and then subjected to an alignment process to align the liquid crystal in the liquid crystal layer 50 in a predetermined direction and to give the liquid crystal a predetermined pretilt angle. I have. The light-shielding film 23 has a function of improving contrast in a display image, preventing color mixture of a color material when a color filter is formed, and the like. Such a light-shielding film 23 is formed on the TF
It may be formed on the T array substrate 10.

The liquid crystal layer 50 is made of, for example, a liquid crystal in which one or several kinds of nematic liquid crystals are mixed, and takes a predetermined alignment state between a pair of alignment films.

In FIG. 2, as indicated by a broken line, the main body of the liquid crystal device having the above-described configuration is housed in a light-shielding case 300 made of plastic or the like. Case 30
At the center of 0, a window is provided corresponding to the image display area 10a, and an edge portion defining the window of the case 300 is provided corresponding to the frame area.

In this embodiment, in particular, the adhesive 210 is disposed in the gap between the opposing substrate 20 (microlens array plate) and the cover glass 200, and the image display area 10
The opposing substrate 20 and the cover glass 200 are adhered to each other in a peripheral area extending around the area a. Therefore, when strong display light for a projector is incident on the image display area 10a during use of the liquid crystal device, the display light is applied to the adhesive 21.
It is possible to prevent a situation in which the adhesive 210 is deteriorated by being irradiated with zero. As a result, stress concentration near the boundary between the image display area 10a and the peripheral area due to the deterioration of the adhesive 210 and deformation of the counter substrate 20 and the cover glass 200 hardly occur at all. Further, even if the adhesive 210 deteriorates due to deterioration and becomes opaque or cracks, as is clear from FIG. 2, the display quality in the image display area 10a is not directly impaired. In addition, the counter substrate 20 and the cover glass 20 in the image display area 10a
The space 220 between 0 and 0 is filled with air,
Compared with the case where a cover glass is adhered to a microlens array plate with an adhesive applied to the entire surface of an image display area as in the related art, the lens ability (light collecting ability) of each microlens is significantly increased.

Further, in this embodiment, the adhesive 210 is formed in substantially the same area as the sealant 52 in the plan view of FIG. 1, and surrounds the periphery of the image display area 10a. Therefore, the cover glass 200 can be extremely stably fixed to the opposing substrate 20 by the adhesive 210, and the space 22 between them can be fixed.
0 can be uniformed over the entire image display area 10a.

In the case of employing a configuration in which the image display area 10a is surrounded by the adhesive 210 as in this embodiment, the adhesive 21
0 may be made of an air-permeable material provided with a number of fine holes communicating with each other. With this configuration,
Counter substrate 2 in image display area 10a through micro holes
Air can be introduced into the space 220 between the cover glass 200 and the outside from the liquid crystal device. In particular, even if the air in the space 220 surrounded by the adhesive 210 expands or contracts due to a temperature change during use of the liquid crystal device, the counter substrate 20 or the cover glass 200 may be stressed or deformed. And no more. Alternatively, the adhesive 210 is made of a material that does not allow air to pass through, and a part of the adhesive 210 is omitted as in the case of the liquid crystal injection port of the sealing material 52 shown in FIG. The same effect can be obtained by providing an opening for passing air through the enclosed space.

However, when the configuration in which the image display area 10a is surrounded by the adhesive 210 as in the present embodiment is adopted, the adhesive 210 is made of a material that does not allow air to pass through, and the space 220 surrounded by the adhesive 210 is used. May be filled with a predetermined type of gas or liquid. With this configuration, it is possible to prevent dust and dirt from entering the sealed space 220 from the outside. In this sealed space 220,
A negative active gas such as nitrogen, a chemically stable liquid, or the like may be sealed using liquid crystal sealing technology in a conventional liquid crystal device. In particular, it is preferable that a gas or liquid having a low refractive index is sealed as much as possible in order to enhance the light collecting function of each microlens.

In the embodiment shown in FIGS. 1 and 2,
Although the adhesive 210 is not present in the image display area 10a at all, in view of the adhesive ability of the adhesive 210, even if a small amount of the adhesive 210 is present also in the image display area 10a, the present embodiment described above is used. The effect is exhibited to some extent. In any case, most of the image display area 10a includes the adhesive 210
It is good to constitute so that does not exist.

In the embodiment described above, the adhesive 210 is arranged so as to surround the image display area 10a along the frame 53. However, the adhesive 210 is discrete at three or more places in the peripheral area. It may be arranged in a way. By arranging the cover glass 200 at the three positions in this manner, the cover glass 200 can be stably bonded to the counter substrate 20. Moreover, since the space 220 between the cover glass 200 and the counter substrate 20 in the image display area 10a is not sealed by the adhesive 210, the temperature change during use of the liquid crystal device causes the space 220 in the image display area 10a. When the air or the like sealed in the space 220 expands or contracts,
It is possible to relatively easily prevent the stress or deformation of the cover glass 200 from being generated. For example,
The adhesive 210 may be discretely arranged at four locations along the four sides of the frame 53. Thereby, the opposing substrate 20 can be more stably fixed to the cover glass 200, and at the same time, the distance between them can be made uniform over the entire image display area 10a.

(Method of Manufacturing Electro-Optical Device) Next, an embodiment of a process of manufacturing a liquid crystal device having the overall configuration as shown in FIGS. 1 and 2 will be described with reference to FIG.

First, as shown in step (1) of FIG. 3, a microlens array is formed on the cover glass 200 before or after the frame 53 (not shown), the light shielding film 23, the counter electrode, the alignment film, etc. are formed. Opposing substrate 20 on which is formed
Are bonded by a photocurable adhesive 210a before photocuring. Here, in particular, the adhesive 210a is applied only to the peripheral region along the frame 53, and a space 220 filled with air is constructed between the cover glass 200 and the counter substrate 20.

At this time, various known adhesives can be used as the adhesive 210a irrespective of optical characteristics (refractive index, etc.), except for those which generate contaminants during curing, such as cyanoacrylate. is there. For example, an epoxy-based or acrylic-based adhesive can be used. As a method for disposing such an adhesive, a known technique such as a dispenser or screen printing can be used. Particularly, in the present embodiment, the adhesive 2
Since bubbles and voids may enter the inside of the cover glass 200 as much as possible, the adhesive 210a
Should be arranged. The opposite substrate 20 is covered with the cover glass 2.
After opposing the adhesive 210a, the adhesive 210a is placed in the gap between the cover glass 200 and the opposing substrate 20 from the side of the peripheral region.
Can also be injected using capillary action.

Next, as shown in step (2) of FIG.
(Ultra-Violet: ultraviolet) light is irradiated to the photocurable adhesive 210a before photocuring via at least one of the counter substrate 20 and the cover glass 200, and becomes the adhesive 210 after curing.

Next, as shown in step (3) of FIG. 3, the opposing substrate 20 to which the cover glass 200 is adhered and the TFT array substrate 10 on which various elements, wirings, and the like are formed are sealed with a sealing material 52. Paste. In this example, an optical plate 10 'such as a polarizing plate or a retardation plate is also attached outside the TFT array substrate 10.

Next, as shown in step (4) of FIG. 3, the liquid crystal device main body completed in step (3) is housed in case 300.

As a result, the above-described liquid crystal device of the present embodiment can be manufactured relatively easily and at low cost.

In the step (2), the adhesive 210 may be irradiated with heat in place of or in addition to the UV light to cure the adhesive 210. Furthermore, as shown in the step (4 ′) of FIG. 3, instead of defining the image display area 10a with the frame of the case 300, a wide frame 53 ′ may be provided on the cover glass 200.

(Pixel Section of Electro-Optical Device) The pixel section of the electro-optical device according to the present invention will be described with reference to FIGS. FIG. 4 is an equivalent circuit of various elements, wirings, and the like in a plurality of pixels formed in a matrix forming an image display area of the electro-optical device. FIG. 5 is a plan view of a plurality of pixel groups adjacent to each other on a TFT array substrate on which data lines, scanning lines, pixel electrodes, light-shielding films, etc. are formed, and light-shielding films and microlenses formed on a counter substrate. FIG.
It is a schematic diagram which shows the mode that incident light is condensed by the micro lens formed in the opposing board | substrate in a pseudo cross section. In FIG. 6, in order to make each layer and each member have a size recognizable in the drawing, the scale is different for each layer and each member. ,
The arrangement of the microlenses and the TFT is different from the actual arrangement. That is, in actuality, as shown in FIG. 5, the microlenses are arranged so that the lens centers thereof coincide with the centers of the respective pixels, and the TFTs are arranged so as to substantially correspond to the intersections of the light shielding regions. I have.

In FIG. 4, a plurality of pixels formed in a matrix and constituting an image display area of the electro-optical device according to the present embodiment have TFTs for controlling the pixel electrodes 9a.
A plurality of pixels 30 are formed in a matrix, and the data line 6a to which an image signal is supplied is electrically connected to the source of the TFT 30. The image signals S1, S2,..., Sn to be written to the data lines 6a may be supplied line-sequentially in this order, or may be supplied to a plurality of adjacent data lines 6a for each group. good. Also,
The scanning line 3a is electrically connected to the gate of the TFT 30, and is configured to apply the scanning signals G1, G2,..., Gm to the scanning line 3a in a pulsed manner in this order at a predetermined timing. ing. The pixel electrode 9a is a TFT3
., Sn supplied from the data line 6a are written at a predetermined timing by closing the switch of the TFT 30 as a switching element for a predetermined period. .
The image signals S1, S2,..., Sn of a predetermined level written in the liquid crystal via the pixel electrodes 9a are held for a certain period between the counter electrodes formed on the counter substrate. The liquid crystal modulates light by changing the orientation and order of the molecular assembly according to the applied voltage level, thereby enabling gray scale display. In the normally white mode, the incident light cannot be passed according to the applied voltage. In the normally black mode, the incident light can be passed according to the applied voltage. Light having a contrast corresponding to the image signal is emitted from the optical device. Here, in order to prevent the held image signal from leaking, the pixel electrode 9 is used.
A storage capacitor 70 is added in parallel with the liquid crystal capacitor formed between the capacitor a and the counter electrode.

In FIG. 5, a plurality of transparent pixel electrodes 9 are arranged in a matrix on the TFT array substrate of the electro-optical device.
a (indicated by a dotted line) are provided along the data lines 6 along the vertical and horizontal boundaries of the pixel electrode 9a.
a, a scanning line 3a, and a capacitance line 3b. Further, a TFT 30 is provided substantially corresponding to each intersection of these wirings. In the figure, each data line 6a, which is indicated by a dashed line and extends in the vertical direction, is a TF of the semiconductor layer 1a made of a polysilicon film or the like via the contact hole 5.
It is electrically connected to the source region of T30. The pixel electrode 9a is electrically connected to the drain region of the TFT 30 in the semiconductor layer 1a via the contact hole 8.
Further, each scanning line 3a extending in the left-right direction in the figure is arranged so as to face a channel region 1a ′ (a hatched region in the right-down direction in the figure) of the semiconductor layer 1a.
It functions as the gate electrode of FT30.

The capacitance line 3b has a main line extending substantially linearly along the scanning line 3a, and a protruding portion protruding upward in the figure along the data line 6a from a location intersecting the data line 6a. The semiconductor layer 1a extends as a storage capacitor electrode 1f from the TFT 30 along the capacitor line 3b, and the storage capacitor electrode 1f and the capacitor line 3b are interposed via an insulating film (gate insulating film) as a dielectric. The storage capacitors are formed by being opposed to each other.

In the drawing, the scanning line 3a is shown by a one-dot chain line.
A first light-shielding film 11a composed of a plurality of striped portions is provided in a region extending in the left-right direction along the capacitor line 3b. Thus, the TFT 30 including the channel region 1a 'of the semiconductor layer 1a is configured to be covered from the TFT array substrate side. If a light-shielding film is also provided below the TFT as described above, one optical system is configured by combining the back surface reflection (return light) from the TFT array substrate 10 side and a plurality of liquid crystal devices via a prism or the like. In this case, it is possible to prevent a projection light portion or the like that penetrates through a prism or the like from another liquid crystal device from entering the TFT of the liquid crystal device.

FIG. 5 further shows that each pixel electrode 1
Micro-lens ends 500a of a plurality of micro-lenses formed so as to face each other, and a mesh-shaped light-shielding film 23 (a hatched line rising to the right in FIG. Area).

As shown in FIG. 6, the TFT array substrate 10
And the opposing substrate 20 (cover glass 200) are arranged to face each other, and the liquid crystal layer 50 is sandwiched between the two substrates. The TFT array substrate 10 is made of, for example, a quartz substrate, and has a counter substrate 20.
Is made of, for example, a glass substrate or a quartz substrate.

As shown in the upper half section of the schematic diagram of FIG. 6, the opposing substrate 20 of the electro-optical device
A plurality of microlenses 500 arranged in a matrix for condensing incident light incident from the 0 side on a plurality of pixel electrodes 9a, respectively, and formed at positions facing the mutual boundaries of the plurality of microlenses 500, respectively. And a second light shielding film 23. On the surface of the microlens 500, a cover glass 200 attached by an adhesive 210 in a peripheral area not shown in FIG. A second light-shielding film 23 and a counter electrode 21 are further formed thereon (at the lower side in the figure). As will be described later, the microlens 500 is made of a photosensitive resin, and has a very high lens efficiency due to a difference in refractive index between the air filled in the space 220 and the photosensitive resin material constituting the microlens 500. It functions as an optical lens.

In the lower half sectional view of the schematic diagram of FIG. 6, a pixel electrode 9a is provided on the TFT array substrate 10, and a predetermined alignment process such as a rubbing process is performed on the upper side. An alignment film 16 is provided. The pixel electrode 9a is made of, for example, a transparent conductive thin film such as an ITO film (indium tin oxide film). Also, alignment film 1
6 is made of, for example, an organic thin film such as a polyimide thin film.

On the other hand, as shown in the upper half sectional view of the schematic diagram of FIG. 6, a counter electrode (common electrode) 21 is provided on the cover glass 200 over the entire surface thereof. Is provided with an alignment film 22 that has been subjected to a predetermined alignment process such as a rubbing process. The counter electrode 21 is made of, for example, a transparent conductive thin film such as an ITO film. The alignment film 22 is made of an organic thin film such as a polyimide thin film.

With the above configuration, according to the electro-optical device of the present embodiment, a plurality of micro lenses 5 provided between the opposing substrate 20 and the cover glass 200 are provided.
As a result, the incident light from the counter substrate 20 side is focused on the plurality of pixel electrodes 9a. Therefore, the effective aperture ratio in each pixel is increased as compared with the case where the micro lens 500 is not provided.

Then, the incident light from the counter substrate 20 side is respectively condensed on the condensing area 500b on the pixel electrode 9a by the microlens 500 (see FIG. 5), so that the utilization efficiency of the incident light is improved. At the same time, due to the presence of the second light-shielding film 23, the mechanical strength and the heat-shielding performance of the cover glass 200 are each significantly improved as compared with the case where the second light-shielding film 23 is not provided.

(Method of Manufacturing Microlens) Next, three methods of manufacturing the microlens 500 used in the present embodiment will be described with reference to FIGS.

First, the first manufacturing method will be described with reference to FIG. As shown in FIG. 7A, on the substrate 20,
A photosensitive and heat-deformable resist layer 711 is formed. Next, as shown in FIG. 7B, a mask layer 610 having a region to be etched as a positive image on the substrate 20 is positioned so as to overlap the resist layer 711, and ultraviolet rays are passed through the mask layer 610. To expose the resist layer 711. Next, FIG.
As shown in (c), the exposed mask layer 610 is developed to remove the exposed portions. As a result, the resist layer 711 remains in a portion where the microlens is formed, and FIG.
The heating step is performed in the state shown in FIG. As a result, the resist layer 711 is softened, and the corners of the resist layer 711 are rounded as shown in FIG. Next, FIG.
As shown in FIG. 5, dry etching is performed from the surface where the resist layer 711 is arranged in a matrix as a convex surface,
The micro lens 500 is formed on the surface of the zero. Next, as shown in FIG.
A photo-curable adhesive 210 is applied to the surface of No. 0, and a cover glass 200 made of neoceram or the like is pressed and bonded.

Finally, as shown in FIG. 7 (g), a second light-shielding film 23, a counter electrode 21 and an alignment film 22 are formed in this order by sputtering, coating or the like, and a micro lens 500 as shown in FIG. Then, the opposing substrate 20 including the second light shielding film 23 is completed.

Next, another method for manufacturing a microlens will be described with reference to FIG.

As shown in FIG. 8A, a mask layer 611 is formed on the surface of the glass substrate 1 serving as a molding die. Next, as shown in FIG. 8B, openings 611a are formed in the mask layer 611 in a predetermined planar arrangement by a patterning process using a photolithography method. Next, as shown in FIG. 8C, the surface covered with the mask layer 611 is placed in a hydrofluoric acid-based etchant and wet-etched. Next, FIG.
As shown in (d), the mask layer 611 is removed, and the concave portion 3 is formed.
Is wet-etched again, and then a release agent layer 4 made of a hydrofluoric acid-based or silicon-based material is formed on the surface of the glass substrate 1. Next, as shown in FIG. 8E, a photocurable or thermosetting high refractive index resin material 5 is applied to the surface on which the release agent layer 4 is formed.
As shown in (f), the substrate 20 is pressed from above the high refractive index resin material 5, and the high refractive index resin material 5 is developed.
With the substrate 20 superposed on the high-refractive-index resin material 5, the high-refractive-index resin material 5 is cured by irradiating or heating ultraviolet rays, and as shown in FIG. The convex microlens 500 made of the refractive index resin material 5 is separated from the glass substrate 1. Next, as shown in FIG. 8H, an adhesive 210 made of a photocurable low-refractive-index resin material is applied on the convex microlens 500. next,
The cover glass 200 is pressed from above the adhesive 210 on the microlens 500 and cured.

Next, still another method of manufacturing a micro lens will be described with reference to FIG. Although the above-described two microlens manufacturing methods form a convex lens,
The microlens shown in FIG. 9 shows a method of forming a concave lens.

First, as shown in FIG. 9A, a mask layer 612 is formed on a substrate 20 made of neoceram or the like.
Next, as shown in FIG. 9B, openings 612a are formed in the mask layer 612 in a predetermined planar arrangement by a patterning process using a photolithography method. At this time, the opening 612
It is desirable that the opening diameter of a is smaller than the diameter of the concave curved surface portion to be actually formed. Next, as shown in FIG. 9C, the counter substrate 20 is opened through the opening 612a of the mask layer 612.
Is isotropically etched to form a concave curved surface portion 600. This etching is performed by wet etching using an etching solution mainly containing hydrofluoric acid. next,
As shown in FIG. 9D, the mask layer 612 is removed by an etching process.

Next, as shown in FIG. 9E, a thermosetting adhesive 210 is applied to the surface of the microlens 500, and a cover glass 200g made of neoceram or the like is pressed and cured.

Next, as shown in FIG. 9F, 200 g of the cover glass is polished to obtain a cover glass 200 having a predetermined thickness as shown in FIG.

Finally, as shown in FIG. 9 (g), a second light-shielding film 23, a counter electrode 21 and an alignment film 22 are formed in this order by sputtering, coating or the like, and a micro lens 500 as shown in FIG. Then, the opposing substrate 20 including the second light shielding film 23 is completed.

In the above-described microlens manufacturing method, the adhesive 210 is applied only to the peripheral area along the frame 53 (not to the image display area 10a). For this reason, it is possible to efficiently prevent the adverse effects of the adhesive 210 from deteriorating with time, and to use an inexpensive adhesive 210. In addition, by constructing the space 220 in front of the microlens 500, the microlens 500 with extremely high lens efficiency can be manufactured.

(Modification of Electro-Optical Device) Next, a modification of the above-described electro-optical device will be described with reference to FIGS.

First, the micro lens 50 shown in FIG.
For 0, it may be configured as shown in FIG.
That is, a transparent plate (microlens array) on which the convex surface of each lens is formed in advance is placed on the surface of the counter substrate 20 (the upper surface in the figure).
Counter substrate 2 with microlens 500 '
0 may be configured. In this case, the photocurable adhesive 210 'covers the cover glass 200' in the peripheral area.
Are bonded to construct a microlens array facing the space 220 '. Further, such a microlens array may be attached on the surface of the opposite substrate 20 facing the liquid crystal layer 50.

Second, the micro lens 50 shown in FIG.
Instead of 0, as another example of the plate-like member, as shown in FIG. 11, a dust-proof glass 202 may be adhered to the surface (the upper surface in the figure) of the counter substrate 20 with a photocurable adhesive. Or,
A heat radiating glass, a glass plate for defocusing, or the like may be bonded to the surface of the counter substrate 20 with a photocurable adhesive. In any configuration, by applying the adhesive only to the peripheral area (not to the image display area 10a), it is possible to efficiently prevent the adverse effects due to the deterioration of the adhesive over time, and it is possible to use an inexpensive adhesive. Becomes

As described above, according to the present embodiment, in the case of an electro-optical device through which strong projection light is transmitted, such as a light valve for a projector, and particularly a light valve for B (blue), a micro lens array is used. This is very advantageous because it is possible to suppress a situation in which the adhesive bonding the plate or the like is deteriorated with time due to the projection light and adversely affects the adhesive.

Note that, even if the present invention is applied to any liquid crystal device other than the TFT active matrix driving method, such as the TFD active matrix driving method and the passive matrix driving method, the bonding treatment as in the above-described embodiment is performed. Thus, a similar effect can be expected.

Furthermore, in the above-described embodiment, the configuration in which the substrate 20 having the microlenses 500 and the like are bonded to the cover glass 200 via the adhesive 210 for each electro-optical device has been described. A plurality of opposing substrates 20 may be collectively formed. That is, as shown in FIG. 12, a large-sized substrate (mother substrate) 20 'having a plurality of microlenses for electro-optical devices and a large-sized cover glass 200' are bonded together with an adhesive 210a and pressed. Next, UV light is irradiated to the photocurable adhesive 210a before photocuring via at least one of the large substrate 20 'and the large cover glass 200',
The cured adhesive 210 is obtained. Thereafter, by dicing along the dicing line 80, the counter substrate 20 to which the cover glass 200 is adhered for each electro-optical device is obtained. Then, the counter substrate 20 to which the cover glass 200 is adhered and the T on which various elements and wirings are formed are formed.
The FT array substrate 10 is bonded with the sealant 52. By using such a manufacturing method, the process time and the number of processes can be reduced.

In the liquid crystal device according to the embodiment described above, for example, a TN (Twisted Nematic) mode, a VA (Vertically Aligned) mode, and a PDLC (Polym) are provided on the outer surface of the counter substrate 20 and the outer surface of the TFT array substrate 10, respectively.
A polarizing film, a retardation film, a polarizing plate, and the like are arranged in a predetermined direction according to an operation mode such as an (er Dispersed Liquid Crystal) mode or a normally white mode / normally black mode. In addition, the counter substrate 2
A dichroic filter that produces RGB colors using light interference may be formed by depositing a number of interference layers having different refractive indexes on the zero. According to the counter substrate with the dichroic filter, a brighter color liquid crystal device can be realized.

(Electronic Apparatus) Next, an embodiment of an electronic apparatus including the electro-optical device according to the embodiment described in detail above will be described with reference to FIGS.

First, FIG. 13 shows a liquid crystal device 100 comprising the electro-optical device of the above-described embodiment and a driving circuit 1004 for the same.
1 shows a schematic configuration of an electronic device provided with.

In FIG. 13, the electronic equipment includes a display information output source 1000, a display information processing circuit 1002, and a drive circuit 1.
004, a liquid crystal device 100, a clock generation circuit 1008, and a power supply circuit 1010. The display information output source 1000 includes a ROM (Read Only Memory),
It includes a memory such as an AM (Random Access Memory), an optical disk device, and a tuning circuit that tunes and outputs an image signal, and displays display information such as an image signal in a predetermined format based on a clock signal from a clock generation circuit 1008. Output to the information processing circuit 1002. The display information processing circuit 1002 includes various known processing circuits such as an amplification / polarity inversion circuit, a phase expansion circuit, a rotation circuit, a gamma correction circuit, and a clamp circuit. Digital signals are sequentially generated from the information and output to the driving circuit 1004 together with the clock signal CLK. The drive circuit 1004 drives the liquid crystal device 100. The power supply circuit 1010 supplies a predetermined power to each of the above-described circuits. Note that the drive circuit 1004 may be mounted on the TFT array substrate included in the liquid crystal device 100, and in addition, the display information processing circuit 1002 may be mounted.

Next, FIG. 14 shows a specific example of an electronic device configured as described above.

In FIG. 14, a liquid crystal projector (projection display device) 1100, which is an example of electronic equipment, prepares three liquid crystal modules including the liquid crystal device 100 in which the above-described drive circuit 1004 is mounted on a TFT array substrate. Light valves 100R, 100G and 100 for RGB respectively
It is configured as a projector used as B. In the liquid crystal projector 1100, when projection light is emitted from a lamp unit 1102 of a white light source such as a metal halide lamp, three mirrors 1106 and two dichroic mirrors 1108 light components R, G, and R corresponding to the three primary colors of RGB. B, and are led to light valves 100R, 100G, and 100B corresponding to each color. At this time, in particular, the B light is guided through a relay lens system 1121 including an entrance lens 1122, a relay lens 1123, and an exit lens 1124 in order to prevent light loss due to a long optical path. Then, the light valves 100R, 10R
Light components corresponding to the three primary colors modulated by OG and 100B, respectively, are combined again by the dichroic prism 1112, and then projected as a color image on the screen 1120 via the projection lens 1114.

The present invention is not limited to the above-described embodiments, but can be appropriately modified without departing from the spirit or spirit of the invention which can be read from the claims and the entire specification. An electro-optical device or a method of manufacturing the same is also included in the technical scope of the present invention.

[Brief description of the drawings]

FIG. 1 is a plan view illustrating an overall configuration of a liquid crystal device according to an embodiment of the present invention.

FIG. 2 is a sectional view taken along line H-H 'of FIG.

FIG. 3 is a process chart showing a manufacturing method in the embodiment.

FIG. 4 is an equivalent circuit of various elements, wiring, and the like provided in a plurality of pixels in a matrix forming an image display area of the liquid crystal device of the embodiment.

FIG. 5 is a plan view of a TFT array substrate in the liquid crystal device according to the embodiment together with components formed thereon viewed from a counter substrate side.

FIG. 6 is a schematic diagram illustrating a state in which incident light is collected by a microlens provided on a counter substrate in the liquid crystal device of the embodiment.

FIG. 7 is a process chart sequentially showing a method of manufacturing the microlens shown in FIG. 6;

FIG. 8 is a process chart sequentially showing another method of manufacturing a microlens.

FIG. 9 is a process chart sequentially showing another method of manufacturing a microlens.

FIG. 10 is an enlarged cross-sectional view of a counter substrate in a pixel portion on which another example of a microlens according to the embodiment is formed.

FIG. 11 is an enlarged cross-sectional view of a counter substrate in a pixel portion to which a dust-proof glass plate is adhered according to another embodiment of the present invention.

FIG. 12 is a perspective view illustrating a configuration of bonding an opposing substrate and a cover glass according to the present embodiment.

FIG. 13 is a block diagram illustrating a schematic configuration of an embodiment of an electronic device according to the present invention.

FIG. 14 is a cross-sectional view illustrating a liquid crystal projector as an example of an electronic apparatus.

[Explanation of symbols]

 3a scanning line 3b capacitance line 6a data line 9a pixel electrode 10 TFT array substrate 20 counter substrate 23 second light shielding film 30 pixel switching TFT 50 liquid crystal layer 52 sealing material 101 data line driving Circuit 104: Scan line drive circuit 200: Cover glass 210: Adhesive 220: Space 300: Light shielding case 500: Micro lens

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H04N 9/31 H04N 9/31 BF term (Reference) 2H088 EA15 HA03 HA08 HA13 HA14 HA15 HA18 HA23 HA25 JA05 2H091 FA02Y FA08X FA08Z FA11X FA21Z FA29Z FA34Z FB04 FC18 FC23 FC26 FD14 GA13 HA07 JA02 LA03 MA07 5C058 EA12 EA26 EA42 EA51 5C060 BC05 EA01 GB06 HC01 HC12 HC21 HD02 5G435 AA14 BB12 BB17 CC12 DD05 GG01 GG02 GG02 GG02 GG02 GG02

Claims (13)

[Claims] A transparent substrate having a display area and a peripheral area located around the display area; and a transparent plate-shaped member disposed to face the substrate with a predetermined gap therebetween. An electro-optical device, wherein the plate-like member and the substrate are bonded with an adhesive. 2. The method according to claim 1, wherein the plate member includes a microlens array plate. 3. The method according to claim 1, wherein the plate member includes a dust-proof glass plate. 4. The method for manufacturing an electro-optical device according to claim 1, wherein the plate member includes a heat radiation glass plate. 5. The method of manufacturing an electro-optical device according to claim 1, wherein the plate member includes a defocusing glass plate. 6. The electro-optical device according to claim 1, wherein the adhesive does not exist in most of the image display area. 7. The adhesive according to claim 3, wherein said adhesive is
The electro-optical device according to any one of claims 1 to 6, wherein the electro-optical device is arranged discretely at more than one location. 8. The apparatus according to claim 1, wherein the adhesive surrounds the periphery of the image display area when viewed in a plan view.
The electro-optical device according to any one of items 1 to 6, wherein 9. The electro-optical device according to claim 8, wherein the adhesive is made of an air-permeable material provided with a plurality of fine holes communicating with each other. 10. The method according to claim 8, wherein the adhesive is made of a material that does not allow air to pass through, and an opening through which air passes through a space surrounded by the adhesive is provided. Electro-optical device. 11. The method according to claim 8, wherein the adhesive is made of a material impermeable to air, and a predetermined type of gas or liquid is sealed in a space surrounded by the adhesive. Electro-optical device. 12. A method of manufacturing an electro-optical device according to claim 1, wherein an uncured adhesive is disposed in the peripheral region on the substrate. A step of arranging the plate member on a substrate on which the adhesive before curing is arranged; and a step of curing the adhesive before curing. . 13. A light valve comprising the electro-optical device according to claim 1, a light source for projecting light to the light valve, and projecting the projection light emitted from the light valve. And a projection type display device comprising: