JP2006064184A - Vibration control unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent a natural frequency from being substantially changed even if a placed load varies despite the fact that the natural frequency in the horizontal direction is small and also prevent the supporting of a placed object from becoming unstable. <P>SOLUTION: O-rings 49a and 49b capable of producing recovering forces in the reverse direction to the acting direction of a shearing force acting on the upper end face 42 or the lower end face 43 of a vibration controlled body 41 are disposed so that a large recovering force can be produced when the inclination angle of the vibration controlled body 41 is increased. As a result, the deterioration of the performance of the vibration controlled body 41 can be reduced. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a vibration control body used in the fields of vibration isolation, vibration isolation, seismic isolation or vibration suppression, and a vibration control unit including the same.

  Semiconductor manufacturing equipment such as an exposure apparatus, precision instruments such as an electron microscope and a three-dimensional measuring instrument must be used in a state in which minute vibrations from the installation floor are insulated in order to fully demonstrate the performance of each apparatus. For this reason, devices such as precision instruments are generally supported by a vibration isolation device using an air spring. In order to improve the performance of the vibration isolator, it is necessary to reduce its natural frequency. In order to reduce the natural frequency in the vertical direction (load support direction) of the air spring, the auxiliary air chamber of the air spring may be increased, but the natural frequency in the horizontal direction cannot be reduced by the same means. Therefore, in order to reduce the natural frequency of the vibration isolator in the horizontal direction, a laminated rubber having a low horizontal rigidity is disposed above or below the air spring. Laminated rubbers are also used in seismic isolation devices for suppressing shaking of buildings during earthquakes, vibration control devices for absorbing shaking of buildings and the like, and vibration isolating devices for blocking mechanical vibrations.

  However, the laminated rubber has the disadvantage that the natural frequency changes when the placement load changes, and the support area of the placed object becomes unstable because the support area decreases due to shear deformation. have.

  Therefore, the object of the present invention is that the natural frequency does not substantially change even when the placement load is changed even though the natural frequency in the horizontal direction is small, and the support of the placed object is not possible. To provide a vibration control unit including a vibration control body that does not become stable.

Means for Solving the Problems and Effects of the Invention

To achieve the above object, the vibration control unit of claim 1 is formed so that the first and second curved surfaces, which are convex surfaces facing each other, satisfy R1 + R2>H> h. In addition, one or a plurality of vibration control bodies arranged in series and at least two plate-like members are each plate-like on the first and second curved surfaces with the plate-like member as both ends and each vibration control body. Auxiliary members that are arranged alternately and in series so as to be supported by the member and that generate a restoring force in a direction opposite to the direction of the shearing force acting on the first or second curved surface are arranged. It is characterized by. Here, each code corresponds as follows.
R1: Average curvature radius of the first curved surface R2: Average curvature radius of the second curved surface H: Overall height of the vibration control body h: Distance between the curved surface centers of the first and second curved surfaces

  Since the vibration control unit according to claim 1 is formed as described above, when the second curved surface is disposed as a lower surface, the vibration control unit is formed from a member that comes into contact with the first curved surface or the second curved surface so as to be capable of relative movement. Due to the received axial force and shearing force, a restoring force (torque) in the direction opposite to the direction of the torque generated by the action of the shearing force is generated and vibrates at a predetermined natural frequency. This natural frequency is determined only by the shape of the vibration control body including the shapes of the first and second curved surfaces. Therefore, the natural frequency in the horizontal direction can be reduced to a desired value only by adjusting the shape of the vibration control body, and the natural frequency can be reduced even if the mass of the object placed thereon changes. There is virtually no change. Therefore, the same vibration control effect can always be obtained without depending on the mass of the object placed thereon.

  In addition, according to claim 1, since a large restoring force can be generated when the tilt angle of the vibration control body is increased, the vibration is compared with a case where the stroke is limited to a small one using a stopper. Deterioration of the performance of the control body is reduced. In addition, the vibration control body can be configured only with a material having high rigidity, not an elastic body such as laminated rubber. Therefore, the vibration control body does not substantially undergo shear deformation, and the object placed thereon is stably supported. In addition, the vibration control body can be easily disposed at a desired location as a unit together with the plate-like member.

  The portion of the plate-like member that contacts the first and second curved surfaces may be a flat surface or a concave curved surface. The vibration control unit according to claim 1, wherein the vibration control body may vibrate in two directions intersecting each other in the horizontal plane with respect to the plate-like member, or may vibrate only in any one direction in the horizontal plane. May be.

  The vibration control unit according to claim 2, wherein the vibration control body is formed symmetrically with respect to the central axis, and the first and second curved surfaces satisfy R1 + R2> H> h. It is characterized by spherical surfaces formed at both ends.

  According to the second aspect, since the first and second curved surfaces are spherical, the design and manufacture are relatively easy.

  The vibration control unit according to claim 3, wherein at least one of the first curved surface and the second curved surface has a region in which a radius of curvature continuously increases as the radius of curvature increases away from the central axis. Yes.

According to the third aspect, since a large restoring force can be generated when the inclination angle of the vibration control body becomes large, the vibration control body is compared with a case where the stroke is limited to a small one using a stopper. Degradation of performance is reduced.

  The vibration control unit according to a fourth aspect is characterized in that an O-ring is disposed between the vibration control body and the plate-like member as the auxiliary member.

  According to the vibration control unit of claim 4, when a shearing force is applied to the vibration control body and the central axis is inclined from the vertical axis, the restoring force in the opposite direction to the shearing force is returned so as to return the central axis to the vertical direction. Can be generated.

  In the vibration control unit according to claim 5, the first member includes a recess in which a part of the first curved surface of the vibration control body is accommodated, and the vibration control unit is disposed between the vibration control body and the recess. Is characterized by the presence of silicon oil.

  According to the fifth aspect, the vibration damping effect can be enhanced.

  The vibration control unit according to a sixth aspect is characterized in that a plurality of support bars that support the vibration control body from the side surface protrude from the inner surface of the recess.

  According to the sixth aspect, the vibration control body can finely vibrate in the horizontal direction inside the recess.

  The vibration control unit according to claim 7 is characterized in that a viscous body blocks a gap between the first member and the second member.

  According to the seventh aspect, it is possible to enhance the vibration damping effect and prevent dust from entering the recess.

  The vibration control unit according to claim 8 is characterized in that three or more vibration control bodies having the same height are arranged in parallel between the two plate-like members.

  According to claim 8, it is possible to constitute a stable support surface having a plane parallel to the plane formed by the object to be placed by arranging three or more vibration control bodies having the same height in parallel. It becomes possible.

  The vibration control unit according to claim 9 is characterized in that a vibration control mechanism for weakening the vibration transmission in the axial direction of the vibration control body is disposed further outside the plate-like member disposed at the end. It is said.

  According to the ninth aspect, it is possible to reduce the natural frequency in the vertical direction in addition to the horizontal direction. In other words, the vibration control body is originally designed to exhibit the characteristics of a rigid body in the axial direction, but by arranging a vibration control mechanism (for example, an elastic body in the axial direction) via a plate-like member, It is possible to provide a blocking characteristic.

  In addition, an ordinary elastic body is deformed not only in the vertical direction but also in the rotational direction. Especially when a stable support surface is configured as in claim 8, an air spring or a coil is formed on the basis of claim 9. A normal elastic body such as a spring can be arranged in series with the vibration control body, and a stable three-dimensional support mechanism can be realized.

  The vibration control unit described above can be used as any one of a vibration isolator, a vibration isolating structure for a vibration generating device, a seismic isolation device or a vibration control device (Claims 10 to 13). It can also be used as a support mechanism for these devices.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a perspective view of a vibration control body according to a first reference example of the present invention. FIG. 2 is a longitudinal sectional view of the vibration control body shown in FIG. The vibration control body 1 shown in FIGS. 1 and 2 has such a shape that the two end surfaces 2 and 3 of the cylinder both protrude outward and become convex spherical surfaces. In use, the vibration control body 1 has an end face with a smaller radius (hereinafter referred to as “lower end face”) 3 downward and an end face with a larger radius (hereinafter referred to as “upper end face”) 2 upward. Be placed. As will be described later, the vibration control body 1 is used as a vibration isolation device, a seismic isolation device, a vibration damping device, or a part thereof.

  The vibration control body 1 is formed so as to be symmetrical with respect to a central axis 8 having an upper end surface 2 and a lower end surface 3 at both ends so as to have an overall height H. Therefore, the center C2 of the spherical surface constituting the upper end surface 2 and the center C1 of the spherical surface constituting the lower end surface 3 are both on the central axis 8. Further, the overall height H of the vibration control body 1 is formed to be smaller than the sum of the radius R2 of the upper end surface 2 and the radius R1 of the lower end surface 3 (R1 + R2> H). Accordingly, the center C2 of the spherical surface constituting the upper end surface 2 is below the center C1 of the spherical surface constituting the lower end surface 3, and the distance between them is offset by a distance h = R1 + R2-H. There is a relationship of R1 + R2> H> h between them. Note that R1 = R2.

  As shown in FIG. 2, the upper surface plate 6 disposed in contact with the upper end surface 2 of the vibration control body 1 is in contact with the lower surface plate 7 disposed in contact with the lower end surface 3. Assume that an object of mass M is placed on the upper surface plate 6 and the lower surface plate 7 is fixed to the floor. At this time, the vibration control body 1 that is a rolling element rolls with respect to the lower surface plate 7 at the lower end surface 3 and also rolls with respect to the upper surface plate 6 at the upper end surface 2. Assuming that an object of mass M on the upper surface plate 6 has moved in the horizontal direction, the amount of movement x is expressed by the following formula (1), where the inclination angle of the vibration control body 1 is θ. At this time, if the object of mass M is supported by a plurality of vibration control bodies having the same height H, the object of mass M only performs translational movement due to the disturbance force. The rotation does not occur and does not affect the movement of the vibration control body 1.

  When an object of mass M on the upper surface plate 6 moves in the horizontal direction, the contact point (load application point) between the upper end surface 2 and the upper surface plate 6 is shifted in the horizontal direction from the contact point between the lower end surface 3 and the lower surface plate 7. In addition, a restoring moment that reduces the inclination acts on the vibration control body 1. Since the magnitude of the restoring moment acting on the vibration control body 1 when the tilt angle of the vibration control body 1 is θ becomes Mghsinθ, the magnitude of the horizontal force acting on the object of mass M is Mghsinθ / (R1 + R2−). hcosθ). Accordingly, the balance of the force of the mass M object placed on the upper surface plate 6 is expressed by the following equation (2).

  Hereinafter, the natural frequency in the horizontal direction of the vibration control body 1 is obtained from the equation (2). First, using Equation (1), second-order differentiation of x with respect to t is obtained by the procedures of Equations (3) to (6) below.

  In addition, when transforming Equation (5) into Equation (6), the relationship of Equation (7) was used.

  Substituting equation (6) into equation (2),

  Is obtained. Here, considering the case of slight vibration where the tilt angle θ of the vibration control body 1 is very small, sin θ = θ and cos θ = 1 are approximated. Then, equation (8) becomes

  It can be expressed as The general solution obtained from the equation of motion of equation (9) indicates free vibration, and its natural frequency f in the horizontal direction can be expressed by the following equation (10) or (11).

  As can be seen from the equation (10) or (11), the horizontal natural frequency f of the mass M object is determined by the radii R2 and R1 of the upper end surface 2 and the lower end surface 3 and the total height H and depends on the mass M. do not do. Therefore, the natural frequency f of the vibration control body 1 can be set to a small value by appropriately determining the shape of the vibration control body 1. Thereby, the vibration control body 1 comes to have a favorable vibration cutoff effect, and the upper surface plate 6 can be reduced in shaking when the lower surface plate 7 vibrates.

  In particular, in the case of the vibration control body 1 of the present embodiment, as is clear from reference to the equation (10) representing the natural frequency f, the vibration control body 1 itself is made too large by reducing h. And the natural frequency f can be reduced. Therefore, the space required for the vibration control body 1 can be made relatively small. And the natural frequency f set in this way does not change even if the mass of the object placed thereon changes. Therefore, by using the vibration control body 1 for a vibration isolation device, a seismic isolation device, or a vibration suppression device, it is possible to always expect an equivalent vibration control effect without depending on the mass of an object placed on the vibration control body 1. It becomes like this.

In addition, unlike the laminated rubber, the vibration control body 1 can be composed of only a material having high rigidity such as stainless steel, so that the object placed on the vibration control body 1 can be stably prevented from undergoing shear deformation. Can be supported.

  Further, according to this reference example, since the convex surface and the concave surface are not combined, and both the upper end surface 2 and the lower end surface 3 are convex surfaces, vibration control is performed only by the vibration control body 1 that is a rolling element. There is an advantage that the unit can be configured.

  As a modification of the present reference example, at least one of the upper end surface 2 and the lower end surface 3 is not a spherical surface, and has a region in which the radius of curvature continuously increases as the distance from the central axis 8 increases. May be. By doing so, it is possible to generate a large restoring force when the tilt angle of the vibration control body 1 becomes large. Therefore, for example, when compared with a case where the stroke is limited to a small one using a stopper, The deterioration of the performance of the vibration control body 21 is reduced. The vibration control body 21 can vibrate in any two or more directions in the horizontal plane, but may be formed to vibrate only in one direction in the horizontal plane. When the vibration control body 21 can vibrate only in one direction in the horizontal plane, it is possible to vibrate in any two or more directions in the horizontal plane by combining a plurality of them.

  The vibration control body 1 can be used as a single unit, or may be configured as one vibration control unit including the upper surface plate 6 and the lower surface plate 7.

  Next, a first embodiment of the present invention will be described with reference to FIG. The present embodiment relates to a vibration control unit including a vibration control body similar to the vibration control body 1 described with reference to FIG. The vibration control unit 20 shown in FIG. 3 includes a vibration control body 21 having a convex spherical surface in which both an upper end surface 22 and a lower end surface 23 protrude outward. The vibration control body 21 has a columnar shape having a relatively large diameter, and has a base portion 21a continuous with the lower end surface 23, and projects coaxially from the base portion 21a so as to have a smaller diameter than the base portion 21a. It is comprised from the continuous protrusion part 21b.

  The shape of the vibration control body 21 satisfies the same relationship as that of the vibration control body 1 according to the first reference example. That is, the radius of the upper end surface 22 is larger than the radius of the lower end surface 23, and the total height of the vibration control body 21 is smaller than the sum of the radius of the upper end surface 22 and the radius of the lower end surface 23. Therefore, the equations (1) to (11) are also established for the vibration control body 21, and the same benefits as the vibration control body 1 of the first reference example can be obtained.

  As shown in FIG. 3, in the vibration control unit 20 according to the present embodiment, the base portion 21 a of the vibration control body 21 and the lower portion of the protruding portion 21 b are accommodated in the housing 24 and provided on the upper surface of the housing 24. The upper portion of the protruding portion 21b protrudes from the formed hole 27a. A slight gap is provided between the inner peripheral surface of the housing 24 and the vibration control body 21 so that the vibration control body 21 can minutely vibrate in the horizontal direction inside the housing 24.

  The housing 24 includes a lower housing 26 having a recess in which the base 21a of the vibration control body 21 is accommodated, and an upper housing 27 having a hole 27a disposed thereon. A plate-like member 28 made of a highly rigid material that contacts the lower end surface 23 of the vibration control body 21 is disposed on the bottom surface of the recess of the lower housing 26. An O-ring 29 is disposed between the peripheral edge of the plate-like member 28 and the lower end surface 23. The O-ring 29 generates a restoring force in a direction opposite to the shearing force so as to return the central axis 33 to the vertical direction when a shearing force is applied to the vibration control body 21 and the central axis 33 is inclined from the vertical axis. .

  A stop plate 30 is disposed between the lower surface of the upper housing 27 and the upper surface of the base portion 21 a of the vibration control body 21. The vertical position of the stop plate 30 can be adjusted by bolts 32 a and 32 b screwed with the upper housing 27. By adjusting the vertical position of the stop plate 30, the play amount on the upper side of the base portion 21a is adjusted.

  When the vibration control unit 20 shown in FIG. 3 is used, the lower housing 26 is fixed to a floor or a base, and an apparatus, a building, or a damping mass body is disposed on the upper end surface 22 of the protruding portion 21b. At this time, since the vibration control body 21 is accommodated in the housing 24, the vibration control unit 20 can be easily disposed at a desired location. Further, since the O-ring 29 is disposed in the housing 24, a large restoring force can be generated when the inclination angle of the vibration control body 21 is increased. As compared with a case where the vibration control body 21 is limited to a small one, the deterioration of the performance of the vibration control body 21 is reduced.

  Next, a second embodiment of the present invention will be described with reference to FIG. The present embodiment relates to a vibration control unit including a vibration control body similar to the vibration control body 1 described with reference to FIG. A vibration control unit 40 shown in FIG. 4 includes a substantially cylindrical vibration control body 41 having a convex spherical surface in which both an upper end surface 42 and a lower end surface 43 protrude outward.

  The shape of the vibration control body 41 satisfies the same relationship as that of the vibration control body 1 according to the first reference example. That is, the radius of the upper end surface 42 is larger than the radius of the lower end surface 43, and the overall height of the vibration control body 41 is smaller than the sum of the radius of the upper end surface 42 and the radius of the lower end surface 43. Therefore, the equations (1) to (11) also hold for the vibration control body 41, and the same benefits as the vibration control body 1 of the first reference example can be obtained.

As shown in FIG. 4, in the vibration control unit 40 according to the present embodiment, the entire vibration control body 41 is accommodated in a housing 44. Although a relatively wide gap is provided between the inner peripheral surface of the housing 44 and the vibration control body 41, the vibration control body 41 is supported from the side surface by the two support bars 48a and 48b. Therefore, the vibration control body 41 can finely vibrate in the horizontal direction inside the housing 44.

  The housing 24 includes a lower housing 46 having a recess that accommodates most of the vibration control body 41 except for the vicinity of the top thereof, and an upper housing 47 having a recess disposed thereon. The concave bottom surface of the lower housing 46 and the concave upper surface of the upper housing 47 are in contact with the lower end surface 43 and the upper end surface 42 of the vibration control body 41, respectively. An O-ring 49 a is disposed between the peripheral edge portion of the lower end surface 43 of the vibration control body 41 and the bottom surface of the concave portion of the lower housing 46, and between the peripheral edge portion of the upper end surface 42 and the upper surface of the concave portion of the upper housing 47. An O-ring 49b is disposed between them. These O-rings 49a and 49b are opposite to the shearing force so as to return the central axis to the vertical direction when a shearing force is applied to the vibration control body 41 and the central axis (not shown) is inclined from the vertical axis. Generates direction restoring force.

  When the vibration control unit 40 shown in FIG. 4 is used, the lower housing 46 is fixed to the floor or the base, and devices, buildings, and damping mass bodies are arranged on the upper housing 47. At this time, since the vibration control body 41 is accommodated in the housing 44, the vibration control unit 40 can be easily disposed at a desired location. In addition, since the O-rings 49a and 49b are arranged, a large restoring force can be generated when the tilt angle of the vibration control body 41 is increased. For example, the stroke can be reduced by using a stopper. Compared with the case where it restrict | limits to, deterioration of the performance of the vibration control body 41 decreases.

  Next, a third embodiment of the present invention will be described with reference to FIG. In FIG. 5, the same members as those in FIG. 4 are denoted by the same reference numerals, and detailed description thereof is omitted. As shown in FIG. 5, in the vibration control unit 50 of the present embodiment, the silicon oil 52 is filled in the gap between the portions below the support bars 48 a and 48 b of the lower housing 46 and the vibration control body 41. Only the point is different from the vibration control unit 40 of the second embodiment described in FIG. Therefore, the vibration control unit 50 has the advantage of the vibration control unit 40 of the second embodiment and also has the advantage that the vibration damping effect is larger than this.

  Next, a fourth embodiment of the present invention will be described with reference to FIG. In FIG. 6, members similar to those in FIG. 4 are denoted by common reference numerals, and detailed description thereof is omitted. As shown in FIG. 6, the vibration control unit 60 of the present embodiment is illustrated only in that a viscous body 62 such as rubber or gel is disposed so as to close the gap between the lower housing 46 and the upper housing 47. This is different from the vibration control unit 40 of the second embodiment described in FIG. Therefore, the vibration control unit 60 has the benefit of the vibration control unit 40 of the second embodiment, and has a greater vibration damping effect than this, and can prevent dust from entering the housing 44. It also has the benefit of

  Next, a fifth embodiment of the present invention will be described with reference to FIGS. 7 (a) and 7 (b). FIG. 7A is a plan view of the vibration control unit according to the present embodiment, and FIG. 7B is a cross-sectional view taken along line AA of FIG. A vibration control unit 70 shown in FIGS. 7A and 7B is arranged concentrically with upper and lower relatively thin disks 71 and 73 and a relatively thick disk 72 disposed therebetween. It includes six vibration control bodies 41a to 41f sandwiched between three disks 71 to 73.

  Among the six vibration control bodies 41a to 41f, the vibration control bodies 41a, 41c, and 41e are sandwiched between two disks 72 and 73 on the lower side and are discs 72 and 73 on the upper end surface and the lower end surface, respectively. The vibration control bodies 41b, 41d, and 41f are sandwiched between the upper two disks 71 and 72 and supported by the disks 71 and 72 on the upper end surface and the lower end surface, respectively. The three vibration control bodies 41a, 41c, 41e sandwiched between the two disks 72, 73 are arranged in parallel so that the lines connecting each of them and the center O of the disks 72, 73 are separated from each other by 120 °. And at the same distance from the center O. On the other hand, the three vibration control bodies 41b, 41d, 41f sandwiched between the two disks 71, 72 are arranged such that the lines connecting each of them and the center O of the disks 71, 72 are separated from each other by 120 °. In parallel with each other and at a position equidistant from the center O. The three vibration control bodies 41a, 41c, 41e and the three vibration control bodies 41b, 41d, 41f do not overlap each other, and the lines connecting each of the six vibration control bodies 41a to 41f and the center O are 60 to each other. It is arranged so that it is separated by °. Note that O-rings 49a and 49b are arranged on the upper and lower end surfaces of the six vibration control bodies 41a to 41f, as in the second to fourth embodiments described above.

  When the vibration control unit 70 shown in FIGS. 7A and 7B is used, a disk 73 is fixed to a floor or a base, and an apparatus, a building, or a damping mass body is disposed on the disk 71. At this time, since the vibration control bodies 41a to 41f are supported by the disks 71, 72, and 73, the vibration control unit 70 can be easily disposed at a desired location. In addition, since the O-rings 49a and 49b are arranged, a large restoring force can be generated when the tilt angle of the vibration control body 41 is increased. For example, the stroke can be reduced by using a stopper. Compared with the case where it restrict | limits to, deterioration of the performance of the vibration control body 41 decreases.

  Moreover, in the vibration control unit 70 of the present embodiment, the vibration control effect can be further enhanced because the vibration control unit 70 is arranged in two stages in series. Furthermore, since three or more vibration control bodies are arranged in parallel at each stage, it is possible to achieve stable support by dispersing the force from the placed object.

  In the present embodiment, the vibration control bodies are arranged in two stages in series, but it is also possible to arrange three or more stages in series. Further, the number of parallel vibration control bodies per stage can be arbitrarily changed.

In the vibration control unit 70 of the present embodiment, a mechanism for weakening vertical vibration transmission, such as an air spring, a coil spring, or a rubber unit, may be disposed above the disk 71 or below the disk 73. Good. Thereby, the natural frequency in the vertical direction is reduced, and an excellent vibration control effect is obtained in both the horizontal and vertical directions.

The preferred embodiments of the present invention have been described above. However, the present invention is not limited to the above-described embodiments, and various design changes can be made as long as they are described in the claims. For example, the shape of the rolling element or the vibration control body is not limited to the illustrated specific shape, and can be changed to various shapes. Specifically, although the vibration control body of the above-described embodiment is symmetric with respect to the central axis, the vibration control body of the present invention is not necessarily formed symmetrically with respect to the central axis. Moreover, in the vibration control body of the above-described embodiment, the upper end surface and the lower end surface (concave surface and convex surface) are both spherical surfaces, but these surfaces may not be spherical surfaces. For example, in the case of the first to fifth embodiments, R1 and R2 satisfy R1 + R2> H> h, where R1 and R2 are the average curvature radii of the upper end surface and the lower end surface, and h is the distance between the curved surface centers of the upper end surface and the lower end surface, respectively. What is necessary is just to be formed.

  An experiment for confirming the vibration shielding effect by the vibration control unit 20 shown in FIG. 3 was performed. FIG. 8 is a graph depicting the results, where the horizontal axis represents the frequency (Hz) and the vertical axis represents the vibration transmissibility (dB), that is, the ratio of the output vibration to the input vibration. Here, the experiment was conducted with the radius R1 of the lower end surface 23 of the vibration control body 21 being 50 mm, the radius R2 of the upper end surface 22 being 50 mm, and the total height H being 93 mm.

  As is clear from FIG. 8, the vibration control unit 20 used in the experiment has a relatively small natural frequency of 0.5 Hz, and reduces the vibration transmissibility at a frequency greater than about 0.7 Hz. It turns out that it can do.

It is a perspective view of the vibration control body by the 1st reference example of the present invention. It is a longitudinal cross-sectional view of the vibration control body shown in FIG. It is a longitudinal cross-sectional view of the vibration control unit by the 1st Embodiment of this invention. It is a longitudinal cross-sectional view of the vibration control unit by the 2nd Embodiment of this invention. It is a longitudinal cross-sectional view of the vibration control unit by the 3rd Embodiment of this invention. It is a longitudinal cross-sectional view of the vibration control unit by the 4th Embodiment of this invention. It is the top view and longitudinal cross-sectional view of the vibration control unit by the 5th Embodiment of this invention. It is the graph which drew the experimental result for confirming the vibration shielding effect of the vibration control unit by 1st Embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Vibration control body 2 Upper end surface 3 Lower end surface 6 Upper surface plate 7 Lower surface plate 8 Center axis

Claims (13)

A plurality of vibration control bodies arranged in series or in series so that the first and second curved surfaces, which are convex surfaces having an overall height H and facing each other, satisfy R1 + R2>H>h; Two plate-like members are arranged alternately and in series so that the plate-like members are both ends and each vibration control body is supported by each plate-like member on the first and second curved surfaces,
The vibration control unit is characterized in that an auxiliary member that generates a restoring force in a direction opposite to the direction in which the shearing force that has acted on the first or second curved surface is disposed.
R1: Average curvature radius of the first curved surface R2: Average curvature radius of the second curved surface H: Overall height of the vibration control body h: Distance between the curved surface centers of the first and second curved surfaces   The vibration control body is formed symmetrically with respect to the central axis, and the first and second curved surfaces are spherical surfaces formed at both ends of the central axis so as to satisfy R1 + R2> H> h. The vibration control unit according to claim 1.   2. The vibration control according to claim 1, wherein at least one of the first curved surface and the second curved surface has a region in which a radius of curvature continuously increases as the distance from the central axis increases. unit.   The vibration control unit according to claim 1, wherein an O-ring is disposed as the auxiliary member between the vibration control body and the plate-like member. The first member has a recess in which a part of the first curved surface of the vibration control body is accommodated,
The vibration control unit according to any one of claims 1 to 4, wherein silicon oil is interposed between the vibration control body and the recess.   The vibration control unit according to claim 5, wherein a plurality of support bars that support the vibration control body from the side surface protrude from the inner surface of the recess.   The vibration control unit according to claim 1, wherein a viscous body blocks a gap between the first member and the second member.   The vibration control unit according to claim 1, wherein three or more vibration control bodies having the same height are arranged in parallel between the two plate-like members.   9. The vibration according to claim 8, wherein a vibration control mechanism for weakening the vibration transmission in the axial direction of the vibration control body is disposed further outside the plate-like member disposed at the endmost portion. Controller unit.   A vibration isolation structure for a precision instrument, wherein floor vibration can be blocked by using the vibration control unit according to any one of claims 1 to 9.   A vibration generating device characterized in that the vibration control unit according to any one of claims 1 to 9 can be cut off so as not to transmit the vibration of the device mounted on the unit to the floor. Anti-vibration structure.   A seismic isolation structure, wherein the vibration control unit according to any one of claims 1 to 9 is used to block transmission of seismic motion.   The vibration control unit according to any one of claims 1 to 9, wherein the vibration control unit is used to support the additional mass of the vibration control device, so that the natural period can be tuned.

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