JP2006061768A - Optical part holding device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem that spin drying alone causes staining and contamination and thus needs wiping requiring high skill in conventional optical part holding devices based on three-point holding or having a through hole at the center, used in ultrasonic cleaning and spin drying of small optical parts, and to realize an optical part holding device capable of cleaning and drying a large number of optical parts at the same time without essential wiping work. <P>SOLUTION: A peripheral through hole is formed in the inner peripheral section of an optical part holding device which has two or more optical part holding sections and a peripheral section of a two-step structure. A connection groove is formed between adjacent holding sections, and ends of the through holes and grooves are connected. Trough holes of two or more thin openings are formed in the optical part mounting section of the holding sections, and at least a pair of through holes are formed on the edge of the mounting sections, and cleaning and drying is carried out while the mounting sections retain optical parts so as to allow the parts to move freely without fixing. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an optical component holder that can be used for either or both of cleaning of an optical component and drying for removing a cleaning liquid adhering to an object to be cleaned.

  In optical communication, various modules such as optical isolators, circulators, WDMs, filters, etc. are used. Crystals such as quartz and calcite, multilayer filters, etc. are incorporated in these modules.

  Usually, a module such as an isolator or a filter is obtained by inputting light input to the module from an optical fiber, for example, into a multilayer filter or the like, and utilizing optical phenomena such as transmission, reflection, separation, and refraction. The function of is realized. If the surface of a filter or the like is dirty, light input from the optical fiber to the module may be attenuated or diffusely reflected on the surface of the dirty filter or the like, resulting in increased coupling loss or impaired module functionality. is there. The cleanliness of the surface of the optical components used in the module is extremely important for the quality of the module.

  For this reason, many contrivances have been made for cleaning these optical components.

  Conventionally, for example, three rod-shaped support components are used to support a large number of optical components at three points from three directions (hereinafter also referred to as holding), or an optical component holder having an optical component insertion portion ( The optical component holder may be appropriately referred to as a case. Hereinafter, in such a case, the optical component holder is configured by combining rod-shaped support components so as to support the above three points. The holding parts are also referred to as optical parts holders unless otherwise required), and the optical parts are cleaned with an ultrasonic cleaner to clean the surfaces of the optical parts, and then the cleaning liquid adhered with a spin dryer. Was trying to remove. However, when cleaning an optical component with a maximum surface size of 8 mm square (that is, a square with a side dimension of 8 mm) or less, the optical component is mounted with a conventional three-point supporting jig. When supporting and cleaning, since the support component cannot be made very thin to maintain the strength of the support component in order to securely support the optical component with the support component, Optical parts may remain dirty because the ultrasonic waves are not effectively applied to the shaded area, or optical parts may be lost during drying after or during cleaning. In the so-called draining process, that is, the drying process that removes the cleaning liquid adhering to the optical components, the cleaning residual liquid cannot be completely removed, and the optical components are left as they are, and a normal module is formed. Optical components that can not be used to that there has been a large problem that frequently.

  Therefore, in practice, when mounting optical components on the module or after cleaning, each optical component is held with dedicated tweezers one by one, and the surface is wiped with a cleaning paper or cotton swab dipped in a solvent. I had to rely on.

  This optical component wiping operation is a task of carefully grasping optical components one by one with tweezers and wiping off dirt with cleaning paper or cotton swabs with pure water or organic solvent, even for large optical components with a side of about 11 mm. Although it is a difficult and time-consuming operation that requires a high level of skill, especially when the size of the optical component that cleans the surface is as small as around 1 mm square, a very high level of skill is required and satisfactory quality is achieved. It took at least several months of training to be able to clean the optical component to have properties. This wiping operation is poor in work efficiency, and in the example of the multilayer filter, only about 20 can be cleaned per hour.

  In cleaning optical components, the process of removing dirt adhering to optical components in the cleaning liquid is naturally an important cleaning step, but the cleaning solution (including ultrapure water) that has adhered to optical components after the cleaning step is also included. A drying process for removing the cleaning liquid or detergent is also an important process for cleaning.

  FIG. 7 is a diagram schematically showing a main part of a conventional spin dryer used in this drying process.

  In FIG. 7, reference numeral 1301 denotes a conventional spin drying apparatus, 1302 denotes an outer frame of the spin drying apparatus 1301, 1303 denotes a rotating body having a rotating plate constituting the spin drying apparatus 1301, and 1310 to 1313 denote rotating bodies. An optical component holder for drying which holds an optical component (hereinafter also referred to as a workpiece) with a holder attached to a rotating plate 1303 and a holding frame (hereinafter also referred to as a cradle) which holds the optical component holder. ) (For example, shown in FIGS. 17 and 16), holders 1310c, 1311c, 1312c, and 1313c are side walls of holders 1310 to 1313, 1310a, 1310b, 1311a, 1311b, 1312a, 1312b, 1313a, and 1313b, respectively. Are side walls 1310c, 1311c, 1312c, respectively. A cradle installation groove 1313c, a support rod 1315 for positioning the cradle, 1316 an arrow indicating a rotation direction, 1320 a spin dryer lid, 1323 a blower opening provided in the lid 1320, 1322 Is a filter attached to the air outlet.

  In FIG. 7, the holders 1310 to 1313 are held in a state of being fixed to the rotating body 1303 with screws or the like.

  When spin-drying a cleaned workpiece with a spin drying apparatus as shown in FIG. 7, a cradle containing an optical component holder holding the workpiece is used, and a protrusion (shown in FIG. 17) provided on the cradle is used as a holder. After inserting into each of the cradle installation grooves 1310a, 1310b, 1311a, 1311b, 1312a, 1312b, 1313a and 1313b of 1310 to 1313 and disposing them in the holders 1310 to 1313, the rotating body 1303 is placed in the direction of the arrow 1316, for example. Spin drying is performed by rotating. At this time, the bottom surface of the cradle mounted on the rotating body is given by the rotation of the rotating body so that the cradle is most stably held against the centrifugal force given by the rotation of the rotating body, as shown in FIG. It is attached to the holder so as to be orthogonal to the direction of centrifugal force.

  The holding method by supporting the workpiece at three points is also described in, for example, Japanese Patent Laid-Open No. 6-208093 (hereinafter referred to as Patent Document 1), and the details are not so detailed, but can be generally understood from the drawings and texts. it can.

  FIGS. 8 to 11 are diagrams for explaining a holding method by supporting a workpiece at three points, which is not completely the same as that of Patent Document 1, but in the classification of the inventors of the present invention, the workpiece 3 based on the same kind of technical idea is used. It can be called a holding method by point support, and is currently used for cleaning and drying of optical components.

  FIG. 8 is a diagram for explaining a holding method by supporting a workpiece at three points.

  In FIG. 8, reference numeral 1331 denotes a work as an object to be dried, and 1332-1334 denote optical component support parts for fixing the work 1331.

  In FIG. 8, the optical component support components 1332 and 1334 are arranged at approximately the center of both sides of the side surface of the work 1331, and the optical component support component 1333 is divided into two equal bisectors connecting the optical component support components 1332 and 1334. It is arranged on the side of the optical component near the line.

  In FIG. 8, when cleaning and drying the workpiece 1331, it is preferable that the contact area of the optical component supporting components 1332 to 1334 for fixing the workpiece is as small as possible.

  9 to 11 are views for explaining an example of the optical component support component of FIG. 8, FIG. 9 is a perspective view of one optical component support component, and FIG. 10 is a diagram of the optical component support component of FIG. FIG. 11 is a diagram viewed obliquely from a cross section cut along a straight line Y1-Y2 of FIG. 9, and FIG. 11 is a diagram for explaining a state in which the optical component supporting component of FIG.

  9 to 11, reference numeral 1340 is a conventional optical component support component, 1341 is a support column constituting the optical component support component 1340, 1342 is a screw provided at an end of the support column 1341, and 1343 is an optical component support component 1340. The supporting plates 1341a and 1341b are the caulking portions where the supporting plates 1343 inserted in the grooves of the support columns 1341 are fixed by caulking, and 1344 is a V-shaped groove formed in the supporting plate 1343.

  The optical component support component 1340 shown in FIG. 9 and FIG. 10 is provided with a screw 1342 at the tip of the column 1341, and although not shown, a plurality of optical component support components 1340 are attached to the support component mounting frame. An optical part holder for cleaning and drying is formed so as to be fixed at an appropriate interval for holding. The support plate 1343 is made of a fluororesin, has a certain degree of elasticity, and has a saw blade shape having a V-shaped groove as shown in the figure. The V-shaped groove has the same shape and size at the same position in the longitudinal direction of all the columns 1341 used as the same optical component holder.

  In FIG. 11, the work 1331 is supported by V-shaped groove portions of the support plate 1343 of the three optical component support components 1340 from a total of three directions, two on the left and right in the horizontal direction and one perpendicular to the workpiece.

  When the workpiece 1331 is fixed using the optical component support component described with reference to FIGS. 9 to 11, the portion of the support plate 1343 that supports the workpiece is formed in a V-shaped groove shape. The work 1331 is supported by the V-shaped groove of the support plate 1343 only at the ridges on the three side surfaces, and is loosely fixed so that the contact area with the support plate 1343 is relatively small.

  However, since the support plate 1343 of the optical component support component 1340 described with reference to FIGS. 9 to 11 is formed of tetrafluoroethylene (for example, a trade name, Teflon) which is a fluororesin, one side However, it was only possible to fix a workpiece that was not very heavy, such as 10 mm or more, and a smaller workpiece smaller than this had to be held by another method.

  FIGS. 12 and 13 are diagrams for explaining a conventional example different from the example explained with reference to FIGS. 9 to 11 of the optical component support component, which is an example different from Patent Document 1. FIG.

  FIG. 12 is a perspective view of one optical component support component, and FIG. 13 is a diagram for explaining a state in which the workpiece is fixed (loosely fixed) by the three optical component support components of FIG.

  In FIG. 12 and FIG. 13, reference numeral 1350 is an optical component support component, 1351 is a column constituting the optical component support component 1350, and 1353 is a V-shaped groove for fixing a workpiece provided on the column 1351.

  In FIG. 12, the support column 1351 has a cylindrical shape and a diameter of 6 mm to 10 mm. In addition, the groove 1353 is provided with the same shape and size on the support column 1351 at regular intervals, and a cross section cut in the length direction of the support column 1351 as a V-shaped groove.

  In FIG. 13, the work 1331 is loosely fixed by inserting a part of the work 1331 into a groove 1353 formed in the column 1351. In this case, the left and right sides of the work 1331 in the figure are supported slightly above the center. In this loosely fixed state, the workpiece is carefully held with tweezers or the like. For example, the workpiece 1331 is formed in a portion of the groove 1353 formed in the three support columns 1351 assembled as an optical component supporting component of three-point support. When the workpiece is inserted and held, the workpiece will not come out of the groove 1353 when the workpiece is ultrasonically cleaned or spin-dried, but the workpiece is held by tweezers etc. It means that it is fixed to such an extent that it can be taken out from the machine or inserted into the groove 1353. Hereinafter, in the description of the three-point support, unless otherwise specified, such loose fixing is simply referred to as fixing or binding. The holding state shown in FIGS. 11 and 13 is also a loosely fixed state.

  FIG. 14 is a diagram for explaining a contact state between the workpiece and the optical component support component when the workpiece 1331 is fixed by the optical component support component, and is a diagram viewed from the direction of the arrow 1354 in FIG. .

  In FIG. 14, the work 1331 is loosely fixed by contacting a slope formed by a groove 1353 formed in the column 1351.

  When the workpiece is fixed using the optical component supporting component as described with reference to FIGS. 12 and 13, since the support column 1351 is formed in a cylindrical shape, the groove 1353 is also formed in a cylindrical shape. Requires very little contact area. However, when one side of the workpiece is 8 mm or less, as shown in FIG. 14, the workpiece 135 is fixed in a state where the column 1351 is very close to the workpiece. There was a disadvantage that a shadow part was generated, the ultrasonic wave could not be effectively applied to the workpiece, and the cleaning itself was not successful.

  At present, the columns 1341 for fixing the support plate 1343 by caulking and the columns 1351 formed with the grooves 1353 are processed one by one by machining. As the material for the support, stainless steel or a metal coated with a resin is used. The strut made of resin alone has a problem in strength, and a grooved metal or a grooved metal coated with a resin was mainly used.

  As described above, conventionally, when the work is small, there has been a big problem that the work cannot be fixed by the optical component support component, or even if the work can be fixed, the work cannot be effectively cleaned.

  Therefore, when cleaning and drying a small workpiece, the workpiece is usually stored in a cleaning jig as will be described later with reference to FIG. A method of wearing, cleaning and drying is adopted.

  FIG. 15 is a perspective view of a conventional optical component holder for cleaning and drying.

  In FIG. 15, reference numeral 1355 denotes a conventional cleaning / drying optical component holder, and 1356 denotes an optical component insertion portion for inserting a workpiece. The optical component insertion portion 1356 has a hole shape, and an optical component placement frame 1356a for holding the optical component inserted therein is provided at the peripheral portion of the bottom portion of the hole, and the cleaning liquid passes through the inside thereof. A through hole 1356b is provided. The diameter of the through hole 1356b is sufficiently smaller than the workpiece, and is provided at the center of the optical component placement frame 1356a.

  As can be inferred from FIG. 15, the basic technical idea of the optical component holder 1355 is that the optical component is placed on the optical component mounting frame 1356a without being loosely fixed like the three-point support, and is washed and dried. The important part of the optical surface, which is a particularly important part of the optical component, is taken into consideration so that it can be kept out of contact with the surrounding part at the through hole 1356b.

  When performing cleaning and drying using the cleaning / drying optical component holder as shown in FIG. 15, the workpiece is put in the optical component insertion portion, and the optical component holder is put in a cradle or the like, and the cleaning device or spin drying is performed. Place it at a predetermined position on the device.

  FIG. 16 is a diagram illustrating a cradle used in a cleaning or drying process. 16A is a view of the cradle as viewed from above, FIG. 16B is a view of the cradle as viewed from the front side, and FIG. 16C is a view of the cradle as viewed from the right side. The positional relationship is shown.

  In FIG. 16, reference numeral 800 denotes a cradle, 811 to 814 are side walls of the cradle, 820 and 821 are pins attached to lower portions of the side walls 812 and 813, 830 is a handle portion used when the cradle 800 is held, and 852 to 855 are respectively A support column 851 provided below the inner side of the side walls 811 to 814 (that is, the bottom of the cradle) is a mounting unit on which an optical component holder for cleaning and drying is mounted, and is fixed to the columns 852 to 854. The cradle 800 can be made of, for example, stainless steel.

  In FIG. 16, when the optical component holder for cleaning / drying holding the optical component is placed in the cradle 800 and the cleaned optical component is spin-dried, the optical component holder for cleaning / drying is placed on the mounting portion 851. Place the cradle on the spin dryer. The mounting portion 851 is not limited to this, but is formed below the cradle, for example, slightly above the position of the pins 820 and 821, and when using an optical component holder for cleaning and drying parallel plates, For handling, if the bottom surface of the cradle mounted on the rotating body of the spin dryer and the front and back surfaces of the optical component holder for cleaning / drying the mounting portion 851 and the parallel plate are formed in parallel, Convenient.

  FIG. 17 is a cross-sectional view for explaining a conventional spin drying apparatus.

  In FIG. 17, reference numeral 1010 denotes a rotating body of the spin drying apparatus, 1011 denotes a rotating shaft for rotating the rotating body 1010, 1012a, 1012b, 1013a, and 1013b denote fixing screws for connecting and fixing the rotating body 1010 and the rotating shaft 1011; Reference numerals 1014 and 1015 denote cleaning / drying optical component holders for holding and holding a workpiece to be dried. Reference numerals 1016 and 1017 denote cleaning / drying optical component holders 1014 and 1015 for placing and holding the workpieces. 1018a and 1019a are holders for holding the cradle protrusions, 1020 is an upper frame of the rotating body, 1018b and 1019b are cradle hanging grooves provided on the holders 1018a and 1019a, and 1018 and 1019 are cradle protrusions. Grooves 1018b, 1019 in holders 1018a, 1019a The connecting pins for holding the cradles 1016 and 1017 in the holders 1018a and 1019a, 1021 to 1024 are support bars attached to the holders 1018a and 1019a to support the cradle when the rotating body 1010 rotates, and 1370 is a rotating plate. is there.

  In FIG. 17, cradles 1016 and 1017 have cleaning and drying optical component holder upper surface portions 1014a and 1015a (when the cleaning and drying optical component holder is a parallel plate, similarly, And the central axis A1-A2 at the center of the upper surface portions 1014a and 1015a of the optical component holder for cleaning and drying so as to be parallel to the central axis A1-A2 serving as the rotation center of the rotary shaft 1011. Are further arranged symmetrically with respect to the central axis A1-A2 of the rotating body 1010 so as to be parallel to the tangential plane (not shown) of the outer surface of the virtual cylinder centering around The optical parts after cleaning placed on the optical parts holder for drying are washed and left on the optical parts cleaned by rotating the entire rotating body around the rotating shaft 1011. And it is adapted to dry the optics by removing the liquid.

  However, as a result of the investigation by the inventors of the present invention, the conventional drying method as described with reference to FIGS. 15 and 17 cannot completely remove the remaining cleaning liquid from the work, and spin drying. When the rotation of the device was stopped, the remaining cleaning liquid often wets the workpiece, which caused stains on the workpiece such as the multilayer filter, and therefore could not be cleaned and dried well.

  For this reason, conventionally, in order to remove the remaining water, a work such as a multilayer filter is carefully picked up with tweezers, and a manual operation of wiping off the water with a cleaning paper or a cotton swab is required.

  18 and 19 are schematic diagrams for explaining a method of wiping off the residual cleaning liquid in the conventional cleaning / drying method for optical components.

  18 and 19, reference numeral 400 is a workpiece, 501 is a cotton swab, 502 and 503 are ends of the cotton swab 501, 504 is an arrow indicating the direction of movement of the swab, 510 is a hand wrap, 511 is an organic solvent, and 512 is a hand wrap. , 513 is tweezers, and 514 is a tube. In FIG. 18, the organic solvent 511 is contained in the hand wrap 510. When the dish 512 is pushed down by the end 502 or 503 of the cotton swab 501, for example, the organic solvent 511 causes the tube 514 to reach the dish 512 by capillary action. Then, an appropriate amount of the organic solvent 511 can be attached to the end 502 or 503 of the cotton swab 501.

  In FIG. 19, the work surface 400 is picked by tweezers 513, and the optical surfaces 401 and 402 of the work 400 are wiped and cleaned while moving the end 502 or 503 of the cotton swab 501 soaked with an organic solvent in the direction of the arrow 504. I can do it.

  Further, the work 400 can be wiped without attaching an organic solvent to the cotton swab 501 to remove moisture from the work 400.

  The cleaning / drying method described with reference to FIGS. 18 and 19 is often used for cleaning / drying although it cannot be cleaned / dried by the method described with reference to FIGS. However, in the case of a small work with a side of 8 mm or less, for example, a thin filter with a 1.4 mm square optical surface usually used for optical communication, the work is very small, The work of wiping off moisture is a very difficult work.

  This wiping operation required very high skill and required several months of worker training in order to obtain satisfactory quality characteristics. And even if the operator who acquired this wiping work performed, the working efficiency was poor, and only 20 / hour multilayer filters could be cleaned at most.

  An example different from the example shown in FIG. 15 of a conventional optical component holder for cleaning and drying is described in Japanese Patent Laid-Open No. 2000-249466 (hereinafter referred to as Patent Document 2). Patent Document 2 describes that an optical component is put into a mortar-shaped through hole provided on a pallet and dried (see FIGS. 1 to 3 of Patent Document 2). 2 and 5 to 7 of Patent Document 2 describe cross-sectional views in which a lid is attached to the hole, and the lid is provided with a hole that is appropriately formed. With respect to the hole in the lid, no special action other than flowing air through the mortar-shaped through hole is described.

  The inventors of the present invention performed cleaning and drying in the same manner as described above using an optical component holder such as that disclosed in Patent Document 2, but it was impossible to perform good cleaning and drying, and hand wiping work was indispensable. there were. Furthermore, it was found that some optical components were damaged, and it was difficult to attach and remove the optical components.

  As a result of the investigations by the inventors of the present invention, in drying an optical component cleaned using a conventional optical component holder, various drying methods have been changed. As a result, it was found that improvement of the optical component holder is indispensable.

JP-A-6-208093 JP 2000-249466 A

  As explained above, long-time operator training is indispensable and it is not necessary to perform highly skilled wiping work, and many optical parts can be dried at once, so that the performance as an optical part is demonstrated satisfactorily. There has been a strong demand for an optical component holder for spin drying that can mass-produce optical components having clean optical surfaces that can be used.

  The present invention has been made in view of such points, and one of the objects of the present invention is that it requires a long-time worker training and does not require a highly skilled hand-wiping operation, and is a compact optical device. Even in the case of parts, it is possible to dry a large number of cleaned optical parts at once, and to provide an optical part holder suitable for drying that is easy to handle.

  The present invention has been made to solve the above problems.

  The optical component holder according to claim 1 of the present invention is an optical component holder that can be used for at least one of cleaning of an optical component and spin drying of the cleaned optical component. The front side of the optical part holder has a front side peripheral part and an optical part holding part forming part inside thereof, and the front side peripheral part is formed adjacent to the front side outer peripheral part and the inside thereof. Two types of peripheral edge portions of the inner peripheral edge portion are formed, and the front-side outer peripheral edge portion and the front-side inner peripheral edge portion are different in height in the direction perpendicular to the front-side surface of the optical component holder (hereinafter referred to as “the two-stage shape”) The front-side two-stage shape is defined as a direction in which the height from the front surface to the back surface of the optical component holder is low, and the front-side outer peripheral edge is Height than front side inner periphery It is formed low, and a plurality of pin-shaped convex portions and concave portions (hereinafter also referred to as surface concave portions) such as a plurality of holes into which the pin-shaped convex portions can be fitted are formed at the front inner peripheral edge portion. A concave portion such as a hole (hereinafter also referred to as a back surface concave portion) into which the pin-shaped convex portion can be fitted is formed on the back surface of the optical component holder on the surface where the convex portion is formed. And the convex portion of the front surface is fitted into the concave portion of the back surface formed on the back side, and the two optical component holders can be overlapped and joined together. The optical component holding portion forming portion inside the front side inner peripheral edge has a plurality of optical component holding portions capable of placing and holding an optical component as an object to be cleaned or an object to be dried. , At least one of the optical parts The holding portion has an optical component placement portion on which an optical component held therein can be placed, and the optical component placement portion includes a front side of the optical component placement portion, that is, the optical component. At least two through holes are formed so as to penetrate from the mounting side to the side opposite to the side on which the optical component is mounted (hereinafter also referred to as the back side of the optical component holder). The back side peripheral part of the back side of the component holder has a two-stage shape (hereinafter also referred to as a back side two-stage shape) of a back side outer peripheral part having a different height and a back side inner peripheral part formed adjacent to the inside. The back side two-stage shape has the same definition as the front side two-stage shape, and the back side outer peripheral edge is lower in height than the back side inner peripheral edge, that is, the optical component holder In the back side from the back side outer peripheral edge of the back side A side peripheral edge is formed to be recessed, a through hole of the optical component holding part is formed inside the back side inner peripheral edge, and the front side inner peripheral edge is inside the back side inner peripheral edge. It is formed in a shape and size that can be inserted, and two different optical component holders, the front inner peripheral edge of one of the optical component holders, and the back inner inner peripheral edge of the other optical component holder A convex portion formed on the front inner peripheral edge of the one optical component holder is fitted into a rear concave portion formed on the rear inner peripheral edge of the other optical component holder so as to face the portion. It has a structure that can be connected, and an opening is twice as large as the opening of the optical component holding portion at the front side inner peripheral edge outside the position where the optical component holding portion is formed. Has a longer length , Wherein the front inner periphery rear inner perimeter to penetrate to and through holes (hereinafter, also referred to as inner periphery through holes) is an optical component holder, characterized in that it is plural number.

  An optical component holder according to a second aspect of the present invention is the optical component holder according to the first aspect, wherein at least a part of the back-side outer peripheral edge is located inside the back-side outer peripheral edge, that is, the back-side inner peripheral edge. Is formed so as to reach the outside of the backside outer peripheral edge (hereinafter also referred to as a backside outer peripheral groove), and the depth of the backside outer peripheral groove is the surface of the backside inner peripheral edge It is an optical component holder characterized by not being shallower.

  The optical component holder according to claim 3 of the present invention is the optical component holder according to claim 1 or 2, wherein the contour shape of the optical component holder as viewed from the front surface is the presence or absence of corner notches. It is an optical component holder characterized by being generally quadrangular except the detailed structure.

  The optical component holder according to claim 4 of the present invention is the optical component holder according to claim 3, wherein the back side outer peripheral edge grooves are formed at four corners of the back side outer peripheral part. It is an optical component holder.

  The optical component holder according to claim 5 of the present invention is the optical component holder according to any one of claims 1 to 4, wherein the optical component holder is provided with the optical component holder. The optical component holder is formed in a matrix in the vertical and horizontal directions on the front side of the optical component holder, and the optical component holder is a plurality of adjacent optical elements in at least one of the vertical and horizontal directions on the front side of the optical component holder. An optical component characterized in that a groove (hereinafter also referred to as a connecting groove) shallower by 0.5 mm or more than a peripheral edge portion of the optical component mounting portion of the optical component holding portion is formed between the component holding portions. It is a holding tool.

  The optical component holder according to claim 6 of the present invention is the optical component holder according to claim 5, wherein the plurality of connecting grooves are formed in parallel in one direction on the surface of the optical component holder. Is an optical component holder.

  The optical component holder according to claim 7 of the present invention is the optical component holder according to claim 5 or 6, wherein the width of the rear outer peripheral edge groove is wider than the width of the connecting groove. An optical component holder.

  The optical component holder according to claim 8 of the present invention is the optical component holder according to any one of claims 5 to 7, wherein the inner peripheral edge through hole and the plurality of connecting grooves are connected. An optical component holder characterized in that the optical component holder is formed.

  The optical component holder according to claim 9 of the present invention is the optical component holder according to claim 8, wherein the groove width of the connecting groove is the inner peripheral edge through hole to which the connection groove is connected and the optical in front thereof. An optical component holder characterized in that the gap between two adjacent optical component holders is narrower than that between the component holders.

  The optical component holder according to claim 10 of the present invention is the optical component holder according to any one of claims 2 to 9, wherein each of the plurality of optical component holders is adjacent to another optical component. And at least two of the through holes formed in the optical component mounting portion are elongated in the openings of the through holes in the optical component mounting portion. It has a shape, and at least half of one side of the opening of the through-hole is formed in contact with one of the opposing ends of the optical component mounting portion. Is an optical component holder.

  An optical component holder according to an eleventh aspect of the present invention is the optical component holder according to the tenth aspect, wherein the openings of the at least two through holes of the optical component mounting portion are elongated in the direction of the opening. Are formed continuously from one end to the other end of the opposite ends of the optical component mounting portion formed in contact with each other in a different direction. An optical component holder.

  The optical component holder according to claim 12 of the present invention is the optical component holder according to any one of claims 1 to 11, wherein openings of all through holes formed in the optical component mounting portion are provided. Is an optical component holder characterized by having an elongated shape and being formed parallel to each other.

  As described above, by using the optical component holder of the present invention for spin drying, spin drying of a small optical component after cleaning, which could not be dried without using a hand wiping process, It became possible to dry with high quality in a large amount of time at a time without making the hand wiping process indispensable.

  And, by cleaning and drying using the optical component holder of the present invention, the production yield of optical components having extremely high quality clean optical surfaces can be greatly improved, and the manufacturing cost can be greatly reduced. I can do it now.

  Furthermore, the optical component holder of the present invention has a structure advantageous for transportation, and can be used for transportation of clean optical components in a compact, shock-resistant package after drying. It is what has.

  Examples of embodiments of the present invention will be described below with reference to the drawings. The drawings used for the description schematically show the dimensions, shapes, arrangement relationships, and the like of each component to the extent that an example of the present invention can be understood. For convenience of explanation of the present invention, there may be cases where the enlargement ratio is partially changed for illustration, and the drawings used for explanation of the examples of the present invention may not necessarily be similar to the actual objects and descriptions of the embodiments. Moreover, in each figure, about the same component, it attaches and shows the same number, The overlapping description may be abbreviate | omitted.

  1-6 is a figure explaining the example of embodiment of the optical component holder of this invention.

  1 is a plan view of the optical component holder 200 as viewed from the side where the optical component is inserted into the optical component holder, that is, from the front side. FIG. 2 is a side where the optical component holder 200 is inserted into the optical component holder. FIG. 4 is a plan view seen from the opposite side, that is, the back side, and is a plan view in a state where the line segment B1-B2 in FIG. 3 is a cross-sectional view taken along line B3-B4 in FIG. 1, FIG. 4 is a view of the optical component mounting portion of the optical component holding portion viewed from the side where the optical component is inserted into the optical component holding portion, and FIG. FIG. 6 is a partially enlarged cross-sectional view of a corner portion of the optical component holder 200.

  1 to 6, reference numeral 200 denotes an optical component holder as an embodiment of the present invention, 201 denotes a substrate, 201a denotes a front side of the substrate 201, 201a1 denotes a front side outer peripheral edge, 201a2 denotes a front side inner peripheral edge, 201a3 Is an optical component holding part forming part, 201b is the back side of the substrate 201, 201b1 is a back side outer peripheral part, 201b2 is a back side inner peripheral part, 201b3 is a back side of the optical part holding part forming part, 202 is an optical part holding part, 202b is a substrate 201 is a portion on the back side of the substrate corresponding to a portion where the optical component holding portion 202 is formed on the front side of 201, 203a1 and 203a2 are connecting grooves formed to connect to the optical component holding portion 202, and 203b1 to 203b4 are on the back side of the substrate. A back side outer peripheral edge groove 204 provided in the corner part, 204 is provided in a corner part of the front side inner peripheral part 201 a 2 on the surface of the substrate 201. Surface recesses such as holes, 204a is the peripheral edge of the surface recess, 204b is the back side of the substrate of the surface recess 204, 205 is a pin-like protrusion provided at the corner of the front inner periphery 201a2 of the surface of the substrate 201, 205b Is a back surface concave portion such as a hole formed on the back surface of the substrate, which is the back side of the convex portion 205 on the substrate surface, 205b1 is a peripheral edge portion of the back surface concave portion 205b, 207a to 207l are inner peripheral edge through holes, 212 is an optical component mounting portion, 212b is an outer peripheral portion of the optical component placement portion 212, 212c and 212d are opposite end portions of the optical component placement portion, and 214a to 214d are island portions of the optical component placement portion (hereinafter, each of the island portions or 215a to 215e are through-holes (hereinafter referred to as through-holes or collectively referred to as through-holes 215) of the optical component mounting portion. A say).

  As shown in FIG. 1, the optical component holder 200 has a front side peripheral portion and an optical component holding portion forming portion 201a3 on the inner side as shown in FIG. Two types of peripheral edge portions are formed, namely, a peripheral edge portion 201a1 and a front side inner peripheral edge portion 201a2 formed adjacent to the inside thereof, and as shown in FIG. 3, a front side outer peripheral edge portion 201a1 and a front side inner peripheral edge portion 201a2 are It has a two-stage shape (front-side two-stage shape) with different heights in a direction perpendicular to the front-side surface of the optical component holder, and the front-side two-stage shape has a back surface from the front surface of the optical component holder as described above. The front-side outer peripheral edge 201a1 is formed to be lower in height than the front-side inner peripheral edge 201a2.

  The shape of the optical component holder 200 viewed from the side is formed such that the front side inner peripheral edge 201a2 and the optical component holding part forming portion 201a3 protrude from the front outer peripheral edge 201a1. The portions of the front side inner peripheral edge 201a2 and the optical component holding part forming part 201a3 are parallel flat plates. This shape makes it easy to set conditions when a plurality of optical component holders are used in an overlapping manner, can improve the cleaning / drying quality, and has a great effect in mass production.

  The shape of the optical component holder 200 viewed from directly above is a quadrangular outline, and is formed adjacent to the front side inner peripheral edge 201a2 formed adjacent to the front side outer peripheral edge 201a1 and the inner side thereof. The contour of the optical component holding part forming part 201a3 is also a quadrangle.

  An optical component holding unit 202 that can place and hold an optical component as an object to be cleaned or an object to be dried on the optical component holding unit forming unit 201a3 inside the front side inner peripheral edge 201a2 of the optical component holder 200. The optical component holding unit 202 includes an optical component mounting unit 212 on which an optical component held therein can be mounted. The optical component mounting unit 212 includes At least two through-holes are formed penetrating from the front side of the optical component mounting portion, that is, the side on which the optical component is mounted, to the side opposite to the side on which the optical component is mounted, that is, to the back side of the optical component holder. Has been.

  Inner peripheral edge through holes 207a to 207l having elongated openings are formed in each side of the front inner peripheral edge 201a2 as shown in FIGS. The openings of the inner peripheral edge through-holes 207a to 207l are formed as openings that are twice or more as long as the openings of the through-hole 214 of the optical component mounting portion. It is more than twice the length. When the length of the inner peripheral edge through-hole is set to more than twice the length of the opening of the optical component holding unit 202, the cleaning residual liquid moving from a large number of optical component holding units during spin drying is effectively removed. In addition, the cleaning residual liquid adhering to the inner peripheral edge could be removed without leaving.

  The inner peripheral edge through-holes 207a to 207l are formed so as to penetrate in a uniform cross section from the front inner peripheral edge 201a2 to the rear inner peripheral edge 201b2 on the rear side.

  As shown in FIG. 1, an optical component holder 200 according to an embodiment of the present invention has an optical component holder 202 formed as a recess in a surface 201 a of a flat substrate 201 in a matrix of 10 rows and 10 columns. A connecting groove 203a1 is formed between each optical component holding portion 202 formed in each vertical row, and any of the optical component holding portion 202 and the inner peripheral edge through holes 207d to 207f at the end of each vertical row. Alternatively, a connecting groove 203a2 is formed between any of the inner peripheral edge through holes 207j to 207l. The connecting groove 203a2 is formed wider than the connecting groove 203a1. Each connecting groove 203a2 and connecting groove 203a1 are formed in parallel with each other in one direction, and are formed as grooves shallower by 0.5 mm or more than the depth of the peripheral part of the optical component mounting portion of the optical component holding portion 202. .

  By doing so, the cleaning liquid removing effect at the time of spin drying can be enhanced, and the optical component can be easily attached to and removed from the optical component holding unit 202, and the possibility of damaging the optical component is reduced. is doing.

  As shown in FIG. 1, three or four connecting grooves 203a2 are connected to the inner peripheral edge through holes 207d to 207f and the inner peripheral edge through holes 207j to 207l. With this structure, the cleaning liquid removal effect during spin drying can be further enhanced.

  A plurality of (in this case, two) pin-like protrusions 205 and a plurality of (in this case, two) holes or the like, such as a plurality of holes, can be inserted into the front-side inner peripheral edge 201a2. A surface recess 204 is formed. The two pin-shaped convex portions 205 and the two surface concave portions 204 are respectively formed at corner portions on the diagonal line of the front side inner peripheral edge portion 201a2.

  The back side peripheral edge of the back side of the optical component holder 200 has a two-stage shape (back side two-stage shape) of a back side outer peripheral edge 201b1 having a different height and a back side inner peripheral edge 201b2 formed adjacent to the inside. The back side two-stage shape has the same definition of the height as the front side two-stage shape, and the back side outer peripheral edge 201b1 is lower in height than the back side inner peripheral edge 201b2, that is, the optical component holder 200. 2 is formed so that the back side inner peripheral edge 201b2 is recessed from the back side outer peripheral edge 201b1 on the back side of the optical component holder, that is, the back face 201b, and the inner side of the back inner peripheral edge 201b2. A through hole of the optical component holding part 202 is formed in the upper part.

  The state of the height of the two steps on the front side and the two steps on the back side also appears in the cross-sectional view of FIG.

  On the back surface of the optical component holder 200 where the convex portion 205 is formed, a concave portion such as a hole into which the pin-shaped convex portion can be fitted, that is, a rear concave portion 205b is formed. The convex portion 205 on the front surface of the optical component holder 200 is fitted into the rear concave portion 205b, so that the two optical component holders 200 can be joined together.

  That is, when two optical component holders 200 having the same shape and dimension are stacked with the front side in the same direction, the front inner peripheral edge of one optical component holder is set to the inner peripheral edge of the back side of the other optical component holder. It is formed in a shape and size that can be inserted inside, and the two optical component holders are opposed to the front inner peripheral edge of one optical component holder and the rear inner peripheral edge of the other optical component holder. Then, the convex portion 205 formed at the corner portion of the front side inner peripheral edge portion of one optical component holder is fitted into the back surface concave portion 205b formed at the rear inner peripheral edge portion of the other optical component holder to be connected. It has a structure that can.

  At this time, the back side of one optical component holder 200 of the two stacked optical component holders 200 by the structure and operation of the peripheral edge portion 204a of the front surface recess portion 204 and the peripheral edge portion 205b1 of the back surface recess portion 205b described later. Between the back side of the portion where the front side inner peripheral edge 201a2 and the optical component holding portion forming portion 201a3 are formed and the front side inner peripheral edge 201a2 and the optical component holding portion forming portion 201a3 of the other optical component holder 200 A gap is formed, and the cleaning liquid removal effect during spin drying can be further enhanced.

  As a suitable example of the gap (interval) between the two substrates in the usage method in which a plurality of optical component holders are stacked, when the thickness is 0.1 to 0.5 mm, extremely good cleaning and drying of the optical component is performed. Could be done. If the gap between the two substrates is 0.1 mm or more, the effect of water drainage in the spin drying of the present inventors is great, but if the gap is larger than 0.5 mm, depending on the shape and dimensions of the workpiece, the gap The workpiece may jump out from the top, and 0.1 to 0.5 mm is a particularly preferable gap.

  On the back surface 201b of the optical component holder 200, at least a part of the back-side outer peripheral edge 201b1 reaches the outside of the back-side outer peripheral edge from the back-side inner peripheral edge inside the back-side outer peripheral edge 201b1, as shown in FIG. The back side outer peripheral edge grooves 203b1 to 203b4 are formed, and the back side outer peripheral edge grooves 203b1 to 203b4 are wider than the connecting groove 203a2, and the back side outer peripheral edge is formed. The depth of the groove is formed so as not to be shallower than the surface of the back side inner peripheral edge, thereby enhancing the cleaning liquid removal effect during spin drying.

  The back side outer peripheral edge grooves 203b1 to 203b4 are formed at the four corners of the back side outer peripheral edge part 201b1, as shown in FIG.

  The optical component holder 200 shown in FIGS. 1 and 2 has a square outline shape, and has a notch at a corner.

  When one optical component holding portion 202 is viewed from directly above the surface 201a of FIG. 1, an optical component placement portion having a circular opening and a circular contour shape is formed on the bottom portion. As shown in FIG. 4, through holes 215 and island portions 214 are alternately formed in the portion. Using the optical component holding portion having such a shape, it is possible to hold, clean and dry optical components having many shapes such as a circular shape, a triangular shape, and a quadrangular shape.

  As shown in FIG. 4, the optical component placement section 212 has six through holes 215 a to 215 e with elongated openings, and each through hole extends from the surface of the optical component placement section to the back side of the substrate. The through hole has a uniform shape and size up to 201b.

  Since the opening of the through hole has an elongated shape, when the cleaning liquid at the time of drying is removed, the liquid flow in the through hole is prevented from being stopped by bubbles of the cleaning liquid.

  In FIG. 4, an island portion 214 that is a flesh portion of the optical component placement portion 212 is formed between each two through holes of the optical component placement portion 212. That is, there is an island portion 214a between the through hole 215a and the through hole 215b, an island portion 214b between the through hole 215b and the through hole 215c, and an island portion 214c between the through hole 215c and the through hole 215d. There is an island 214d between the through hole 215d and the through hole 215e. Each of the through holes 215a to 215e is formed so that the sides on the island side are parallel to each other.

  The through-holes 215b, 215c, and 215d are formed so that their centerlines are parallel to each other (excluding strictly the ends in the longitudinal direction) (therefore, the through-holes are parallel to each other), The outer peripheral part 212b of the optical component mounting part 212 is continuously formed from one end to the other end facing each other. The through hole 215c is formed so as to pass through the center of the optical component mounting portion 212. One of the elongated sides (sides indicated by reference numerals 215a1 and 215e1) of the elongated through hole 215a and the through hole 215e formed at both ends of the optical component placing unit 212 is the optical component placing unit 212. The outer peripheral portion 212b is formed in contact with one of the end portions 212c and 212d facing each other, which is different from the end portions facing the through holes 215b, 215c, and 215d. ing. These structures have an effect of promoting water drainage of the detergent residual liquid during spin drying.

  The fact that one side of the opening of the through hole and a part of the end (outer peripheral part 212b) of the optical component mounting part 212 are in contact with each other means that the manufacturing cost is particularly high when manufacturing with a molding technique using resin. This is because it has been confirmed by the examination of the inventors of the present invention that it is possible to mold with an error within this range without incurring an increase in the amount of water and that the effect of draining water is not much disturbed.

  The portion of each island 214a to 214d in which the opening of each through hole is formed is chamfered or formed into a curved surface so that the mounted optical component is not damaged. It is preferable to enhance the cleaning / drying effect.

  The shape of the side surface of the through hole of the optical component placement part, that is, the shape of the part forming the through hole of the island part on both sides is generally from the surface of the optical component placement part to the back surface of the optical component holder. They are formed in parallel.

  If the outer peripheral portion 212b of the optical component holding portion 212 is formed to be 10% or more larger than the maximum size of the portion placed on the placement portion of the optical component that is put into the optical component and cleaned and dried, Cleaning and drying are performed in an appropriate state, such as when the optical components move appropriately during drying, for example, they prevent clogging of the opening of the through-hole during spin drying and prevent the water draining effect. The effect can be further enhanced. It should be noted that “more than 10% larger” does not mean that 10% larger is particularly good.

  As shown in FIG. 3, the side wall of the optical component holding portion 202 is a uniform cylinder having the same diameter from the opening for inserting the optical component to the outer peripheral portion 212b of the optical component placement portion which is a boundary with the optical component placement portion 212. It is formed in the shape of a surface. This structure is easy to insert optical components, reduces the risk of damage when optical components move on the optical component holder during cleaning and drying, reduces the restrictions on target optical components, etc. Bring about the effect.

  The opening of the optical component holding unit 202, that is, the entrance portion of the optical component holding unit 202 is formed into a curved surface such as a tapered surface or a so-called R surface, so that the optical components to be cleaned and dried can be easily taken in and out. Further, when the optical component holder 200 is used in an overlapping manner, the risk of damage to the optical component can be effectively reduced. Although not shown, good results were obtained when this embodiment was also applied.

  5 and 6 are partially enlarged sectional views of corner portions of the optical component holder 200. FIG.

  The peripheral edge portion 204a of the surface concave portion 204 is formed so as to protrude by a predetermined dimension from the portion indicated by the reference numeral 204a2. The portion denoted by reference numeral 204a2 is formed at the same height as the parallel plate-shaped front side inner peripheral edge 201a2 and optical component holding part forming part 201a3.

  The peripheral edge portion 205b1 of the back surface concave portion 205b is formed so as to protrude by a predetermined dimension from the portion indicated by the reference numeral 205b2 around it. The part denoted by reference numeral 205b2 is formed at the same height as the back side inner peripheral edge 201b2 and the back side 202b of the optical component holding part forming part in the shape of a parallel plate.

  The protrusion amount (dimension) from the portion indicated by reference numeral 204a2 of the peripheral edge portion 204a of the front surface recess 204 and the protrusion amount (dimension) from the portion indicated by reference numeral 205b2 of the peripheral edge portion 205b1 of the back surface concave portion 205b are the same.

  As described above, two pairs of the surface concave portion 204 and the surface convex portion 205 are formed diagonally at the corner portion of the front side inner peripheral edge portion 201a2, and two optical component holders 200 having the same shape and size are provided. As described above, when the back side of one optical component holder 200 is overlapped with the front side of the other optical component holder 200, the convex portion 205 enters the back concave portion 205b, and the two optical component holders 200 are formed. Unless it is lifted up a little, it will not come off easily. At this time, due to the difference in height between the peripheral edge 205b1 of the back surface recess 205b and the front surface of the substrate and the peripheral surface 205b1 of the back surface recess 205b and the back surface of the substrate, the predetermined gap between the two optical component holders stacked. Is to be maintained.

  The plurality of optical component holding portions formed in the optical component holding portion forming portion 201a3 have partition portions that are distinguished from other adjacent optical component holding portions.

  Further, the various optical component holders of the present invention are not only cleaned and dried of optical components, but also cleaned in a clean environment after cleaning and drying, for example, by carrying out dustproof packaging with a transparent thin plastic material or the like. It can be packed in an appropriate buffer and shipped to a delivery destination or the like, and its application is extremely wide.

  The embodiment of the present invention has been described above with reference to the drawings. However, the present invention is not limited to this, and many variations are possible.

  As described above, according to the present invention, spin drying of a small optical component after cleaning, which could not be dried without using a hand wiping process, is performed in a large amount at once without making the hand wiping process inevitable. It became possible to dry with high quality in a short time.

  Furthermore, the optical component holder of the present invention has a great advantage that it can be cleaned and dried in a single step, and can be packaged compactly after drying and used for transporting clean optical components. It is.

  The present invention is not limited to the optical communication field, and exhibits a great effect in a wide range of industries such as the camera industry, the mobile phone industry, and the eyeglass industry.

It is a top view of the front side of the optical component holder as an embodiment of the present invention. It is a top view of the back side of the optical component holder as an embodiment of the present invention. It is sectional drawing along B3-B4 of FIG. 1 of the optical component holder as an example of embodiment of this invention. It is a figure explaining the optical component mounting part of the optical component holder as an embodiment of this invention. It is a partial expanded sectional view of the corner part of the optical component holder as an embodiment of the present invention. It is a partial expanded sectional view of the corner part of the optical component holder as an embodiment of the present invention. It is the perspective view which showed the principal part of the conventional spin dryer as a model. It is a figure explaining the holding | maintenance method by 3 point | piece support of a workpiece | work. It is a figure for demonstrating the example of an optical component support component, and is a perspective view of one optical component support component. It is the figure which looked at the optical component support component of FIG. 9 diagonally from the cross section cut in the position of the straight line Y1-Y2. It is a figure for demonstrating the state holding the workpiece | work with three optical component support components of FIG. It is a figure for demonstrating the example of an optical component support component, and is a perspective view of one optical component support component. It is a figure explaining the state holding the workpiece | work with the three optical component support components of FIG. It is a figure for demonstrating the contact state of a workpiece | work and support components. It is a perspective view of the conventional optical component holder for washing and drying. It is a figure explaining a cradle. In the figure, (A) is a view of the cradle viewed from above, (B) is a view of the cradle viewed from the front, and (C) is a view of the cradle viewed from the right side. It is sectional drawing for demonstrating the conventional spin dryer. It is a figure explaining the manual cleaning operation | work of the residual washing | cleaning liquid in the washing | cleaning and drying method of the conventional optical component. It is a figure explaining the manual cleaning operation | work of the residual washing | cleaning liquid in the washing | cleaning and drying method of the conventional optical component.

Explanation of symbols

200, 1014, 1015, 1355: Optical component holder 201: Substrate 201a: Front side of substrate 201a1: Front side outer peripheral portion 201a2: Front side inner peripheral portion 201a3: Optical component holding portion forming portion 201b: Back side of substrate 201b1: Back side outer peripheral portion Part 201b2: Back side inner peripheral edge part 201b3: Back side of optical part holding part forming part 202: Optical part holding part 202b: Parts on the back side of the substrate corresponding to the part where the optical part holding part is formed 203a1, 203a2: Connecting grooves 203b1 203b4: Back side outer peripheral groove 204: Front concave part 204a: Periphery part of front concave part 204b: Substrate rear surface side of front concave part 205: Pin-like convex part on the front surface of the substrate 205b: Back concave part on the back side of convex part on the substrate surface 205b1: Peripheral portions 207a to 207l of the concave portion on the back surface: inner peripheral peripheral portion through hole 212: Scientific component placement section 212b: outer peripheral portion 212c, 212d of optical component placement section: opposite end portions 214, 214a to 214d of optical component placement section: island portions 215, 215a of optical component placement section 215e, 1356b: through-holes 215a1, 215e1: one of the elongated sides of the through-holes 400, 1331: work (optical component)
501: Cotton swab 502, 503: End portion 504, 1316: Arrow 510: Hand wrap 511: Organic solvent 512: Dish portion 513: Tweezers 514: Tube 800, 1016, 1017: Cradle 830: Handle part 1010, 1303: Rotating body 1011 : Rotating shaft 1012a, 1012b, 1013a, 1013b: Fixing screw 1018, 1019: Connection pin 1018a, 1019a, 1310-1313: Holder 1018b, 1019b: Groove 1020: Upper frame 1021-1024, 1315: Support rod 1301: Spin dryer 1310c, 1311c, 1312c, 1313c: Side walls 1310a, 1310b, 1311a, 1311b, 1312a, 1312b, 1313a, 1313b: Cradle installation grooves 1332-1334, 1 40,1350: optical components supporting parts (optical parts support rod)
1356: Optical component insertion portion 1356a: Optical component mounting frame 1370: Rotating plate

Claims (12)

  In an optical component holder that can be used for at least one of cleaning of an optical component and spin drying of the cleaned optical component, the optical component holder is located on the front side of the optical component holder and on the inner side thereof It has an optical component holding part forming part, and the front side peripheral part is formed with two kinds of peripheral parts, a front side outer peripheral part and a front side inner peripheral part formed adjacent to the inside. The front side outer peripheral edge and the front side inner peripheral edge have a two-stage shape (hereinafter also referred to as a front-side two-stage shape) having different heights in a direction perpendicular to the front-side surface of the optical component holder. The two-stage shape defines the direction from the front surface to the back surface of the optical component holder as a low height direction, and the front outer peripheral edge is formed lower than the front inner peripheral edge, Front side inner circumference A plurality of pin-shaped convex portions and concave portions such as a plurality of holes (hereinafter also referred to as surface concave portions) capable of fitting the pin-shaped convex portions are formed in the portion, and the surface of the optical component holder is A concave portion such as a hole (hereinafter also referred to as a rear surface concave portion) into which the pin-shaped convex portion can be fitted is formed on the back surface where the convex portion is formed, and the convex portion on the front surface is the back side thereof. The optical component holder is fitted into the concave portion on the back surface, and the two optical component holders can be overlapped and joined, and the optical inside the front side inner peripheral edge of the optical component holder The component holding portion forming portion has a plurality of optical component holding portions that can place and hold optical components as objects to be cleaned or to be dried, and at least one of the optical component holding portions is , Optical components held there An optical component placement unit that can be placed is provided, and the optical component placement unit places the optical component on the front side of the optical component placement unit, that is, the side on which the optical component is placed. At least two through-holes formed so as to penetrate to the side opposite to the side (hereinafter also referred to as the back side of the optical component holder), and the back side peripheral portion on the back side of the optical component holder has a height Of the back side outer peripheral edge and the back side inner peripheral edge formed adjacent to the inner side of the back side outer peripheral edge (hereinafter also referred to as the back side two-step shape). The definition is the same as in the case of the front side two-stage shape, and the back side outer peripheral edge portion is lower in height than the back side inner peripheral edge portion, that is, from the back side outer peripheral edge portion to the back side inner edge portion on the back surface of the optical component holder. It is formed so that the peripheral part is depressed A through hole of the optical component holding part is formed inside the back side inner peripheral part, and the front side inner peripheral part is formed in a shape and a dimension that can be inserted inside the back side inner peripheral part. Two different optical component holders, the one optical component holder with the front side inner peripheral edge of the other optical component holder facing the back inner peripheral edge of the other optical component holder. The convex part formed in the front side inner peripheral part of the tool is structured to be able to be fitted and connected to the rear surface concave part formed in the back side inner peripheral part of the other optical component holder, The front side inner periphery that is outside the position where the optical component holding part is formed has an opening that is at least twice as long as the opening of the optical component holding part, and the front inner periphery Inside the back side from the part Through hole extending through the peripheral portion (hereinafter, referred to as inner periphery through holes) optical component holder, characterized in that is formed in plural.   2. The optical component holder according to claim 1, wherein the optical component holder is formed on at least a part of the backside outer peripheral edge so as to reach the inside of the backside outer peripheral edge, that is, from the backside inner peripheral edge to the outer side of the backside outer peripheral edge. An optical component holder, wherein a groove (hereinafter also referred to as a back side outer peripheral edge groove) is formed, and the depth of the back side outer peripheral edge groove is not shallower than the surface of the back side inner peripheral edge.   3. The optical component holder according to claim 1, wherein a contour shape of the optical component holder as viewed from the front surface is generally a rectangle except for a detailed structure such as the presence or absence of a notch at a corner. Optical component holder.   4. The optical component holder according to claim 3, wherein the back-side outer peripheral edge groove is formed at four corners of the back-side outer peripheral edge portion.   5. The optical component holder according to claim 1, wherein the optical component holder is formed in a matrix in the vertical and horizontal directions on the front side of the optical component holder. The optical component holding part is arranged between a plurality of adjacent optical component holding parts in at least one of a vertical direction and a horizontal direction on the front side of the optical component holder, and the optical component holding part An optical component holder, wherein a groove (hereinafter also referred to as a connecting groove) shallower by 0.5 mm or more than a peripheral edge portion of the component mounting portion is formed.   6. The optical component holder according to claim 5, wherein the plurality of connecting grooves are formed in parallel in one direction on the surface of the optical component holder.   7. The optical component holder according to claim 5, wherein a width of the back side outer peripheral edge groove is wider than a width of the connection groove.   The optical component holder according to claim 5, wherein the inner peripheral edge through hole and the plurality of connecting grooves are connected to each other.   9. The optical component holder according to claim 8, wherein the groove width of the connecting groove is two adjacent optical components than between the inner peripheral edge through hole to which the connecting groove is connected and the optical component holding portion in front thereof. An optical component holder characterized by being narrower between the holding portions.   The optical component holder according to any one of claims 2 to 9, wherein each of the plurality of optical component holders has a partition portion that is distinguished from another optical component holder that is adjacent thereto, At least two of the through-holes formed in the optical component placement portion have an elongated shape of the opening of each through-hole in the optical component placement portion, and an elongated shape of the opening of the through-hole. An optical component holder, wherein at least half of one side is formed in contact with either one of the opposing end portions of the optical component mounting portion.   The optical component holder according to claim 10, wherein an opening of at least two of the through holes of the optical component mounting portion is formed such that one side of the elongated portion of the opening is in contact with the optical component mounting portion. An optical component holder, wherein the optical component holder is formed continuously from one end portion to the other end portion of both end portions facing each other in a direction different from opposite end portions. The optical component holder according to any one of claims 1 to 11, wherein all through-hole openings formed in the optical component mounting portion have an elongated shape and are formed in parallel to each other. An optical component holder.

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