JP2006048421A - Work instruction method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide selection work by which a worker can select the latest workpiece information at necessary timing before charging a lot, and a work instruction method. <P>SOLUTION: The work instruction method comprises a process for storing a selecting condition setting and input picture for selecting a preceding confirmation workpiece matched with a specific selecting condition and a workpiece matched with a verification test item condition in order to select a part of workpieces as the preceding confirmation workpiece and a test workpiece from a part for storing a working condition in each manufacturing lot and workpieces constituting one manufacturing lot and a process for selecting and instructing workpieces matched with all selection coincidence conditions. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  According to the present invention, a part of a workpiece that meets certain conditions is extracted from a plurality of workpieces constituting one manufacturing lot as a preceding workpiece and an inspection workpiece, and the main lot of the manufacturing lot is extracted. Prior to input work, prior inspection work for instructing the condition of the work is instructed, and a work for inspection work for confirming the processing state in each processing step is selected and a work instruction is given. .

  Manufacture with semiconductor devices is performed by flowing a large number of semiconductor wafers into a single production system in units of production lots and performing several tens of processes. The details of the work, process sequence, and work conditions are as follows. It depends on the model. A series of operations depending on the type of semiconductor is called a process.

  In semiconductor manufacturing, there are many processes in which it is difficult to grasp the optimum work conditions because the work contents to be performed become good or defective due to subtle differences in work conditions and material lots. For example, an exposure operation is the case, and even if a reference value is set in advance for the material lot, focus, and exposure time, an optimum result may not be actually obtained. In that case, it may become defective in processing lot units.

  Therefore, prior to the input lot, processing work is performed with several pieces in advance to determine and confirm the work conditions. In the case of NG, it is normal to feed back the processing settings based on the result. I try not to give out.

  As described above, when checking whether a specific machining process has been performed according to the standard, select a specified number of workpieces (in units of several) for each lot that meets the selection conditions of the process to be checked. In addition, prior input, processing inspection and check, quality confirmation work in the corresponding process.

  The selection conditions are selected in advance by the staff and designers based on the “number of non-defective products in the wafer” and the “measured inspection results” in the corresponding production lot. I was instructing.

  Staff or designers selected prior work workpieces and quality check workpieces based on different selection criteria for each model, and instructed the results to the workers in advance using paper or other means. We do not consider the latest information such as defects on the way, damaged items, etc., and the selection conditions are not clarified to the workers, so there is a shortage situation (the wafer with the corresponding number has become damaged) In the case of an alternative chip when the chip to be inspected is defective, etc., it has been necessary to request the staff and the designer for selection and instruction again.

  The present invention has been conceived in order to solve such problems, and the staff and designers have registered in advance the operation of selecting and extracting the corresponding wafers that occur during the production lot prior work and quality confirmation work. An object of the present invention is to provide a work instruction method that allows a worker before lot input to select based on selection conditions at a necessary timing and with the latest workpiece information.

  According to the work instruction method of the present invention, a part for storing work conditions for each production lot and a part of the work piece constituting one production lot are processed as a work piece for prior confirmation and a work piece for inspection. A process of storing a selection condition setting input screen for selecting a workpiece that meets a specific selection condition and each workpiece that meets the confirmation inspection item condition for selection as a workpiece, and selection And a step of selecting and instructing a workpiece that meets the matching conditions.

  The computer-readable recording medium of the present invention is characterized by recording a program for causing a computer to execute the work instruction method.

  A program according to the present invention causes a computer to execute the work instruction method.

  According to the present invention, the staff or the designer selects the preceding work product and the quality check product based on different selection criteria for each model, and instructs the result to the worker in advance. The latest information on damaged products is not taken into consideration, and the selection conditions are not clarified to the operator, so there is a shortage (the chip to be inspected in which the wafer with the corresponding number has become damaged) In the case of a defective chip, it is considered to solve the problem that had to be asked to select and give instructions to the staff and designer again. Selection work that allows workers before lot injection to select at the required timing based on the selection conditions registered in advance by staff and designers to select and extract the wafers that occur during the preceding work and quality confirmation work And work instructions It is possible to provide a location.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments to which the invention is applied will be described in detail with reference to the accompanying drawings.

FIG. 1 is a diagram showing an embodiment of the present invention.
In the figure, a processing device operator terminal is provided for each processing device as an instruction / confirmation of input to the processing device. Each processing device reads the processing lot number and the device number bar code that are attached to each cassette and each processing device to manage the processing lot input / discharge time to the processing device (processing lot progress management). Comes with a barcode reader. This processing lot progress management data is centrally managed by the database server. As a device configuration for performing this progress management, a wireless handy bar code terminal that is now widely used may be used.

  The processing device worker terminals 101 to 103 and the selection condition input terminal 104 are connected to the database server 106 via a network.

  In the database server 106, a process progress information internal storage unit 107 for managing the progress of each processing lot, a model-specific information internal storage unit 108 for storing information such as a wafer pattern layout for each model, and a workpiece are selected. The workpiece selection information internal storage unit 109 for storing the information is connected.

  FIG. 2 is an example of a process flow master diagram for managing the process sequence for each production model managed in the database server. It is an example of a table showing what kind of apparatus is used for processing in order to make one production model.

FIG. 3 is a screen for inputting the preceding machining monitor selection condition.
It is a selection condition input screen for selecting a workpiece having conditions necessary for confirming the processing capability (materials and processing conditions, etc.) in the process prior to the lot input to the processing process.

  To briefly explain the input screen, the model number for selecting the preceding machining monitor is input. As shown in FIG. 4, this model number is registered in the database server by the designer or staff by determining the model number when registering a new model for each product model name.

  In the delivery lot No. of FIG. 3, the lot No. to be input is entered. When the model number and the delivery lot number are entered, the selection condition contents and selection items registered in advance by the designer or staff for this selection condition are displayed. The contents of the selection conditions differ depending on the model, and can be set arbitrarily.

  The person in charge can select a wafer number that meets the selection conditions selected in advance by the designer and staff by pressing the “Search” button at the bottom right of the screen, and start pre-processing on the workpiece that matches the conditions. Can do.

  FIG. 5 is a flowchart showing the operation of selecting a wafer based on the preceding process monitor selection condition.

  Briefly, it is checked whether there is a common workpiece that meets the selection conditions in all processes registered prior to lot input (S101). If applicable, the search result (corresponding wafer number) is displayed (S102).

Since all inspection process data can be collected with the same workpiece if there is a workpiece that meets the conditions, workpiece data in a state that does not include variation within a lot can be collected. But rare.
If it does not exist, a check is made as to whether or not there is a workpiece under conditions that meet the selection conditions for each inspection process set and registered in advance as shown in FIG. 6 (S103). At that time, if there is a corresponding workpiece, the search result (corresponding wafer number) is displayed (S104).

  Similarly, it is checked whether or not there is a workpiece under conditions that meet the selection conditions for other inspection processes registered in advance (S105).

  If there is no workpiece corresponding to the selection condition of FIG. 6, the search result based on the priority information registered in advance as shown in FIG. 7 is displayed and the operator is instructed (S106).

  Thereafter, the processing is repeated until there are no inspection items sequentially registered (S103 to S106).

  Next, a corresponding wafer selection method when there is no workpiece corresponding to the selection condition (in the case of S106) will be briefly described.

  When the designer and the staff input the selection conditions on the selection condition screen of FIG. 3, priority marks are set for items that the designer and the staff consider important for selecting each item. The priority mark is weighted according to the selection criteria of the selector. For example, in the case of FIG. 6, the designers and staff who set the conditions of FIG. 3 assign 5 points to the priority mark “◎”, 3 points to “○”, 2 points to “△”, and other items. When matching items, it was set to give 1 point. The score obtained by weighting the priority marks in this way is determined by the importance of the selection content of the necessary process by the setter, and is set arbitrarily by the setter.

  In the case of the selection conditions of FIG. 3, the search result when there is no workpiece that meets the inspection selection conditions as in S106 will be briefly described with reference to FIG.

  In the case of wafer No. 10 in the table, the priority “◎” item “specific chip defect presence / absence” corresponds to the selection item, 5 points, the priority “Δ” item “storage position” corresponds to 2 points, Since the other item “Defect Congestion” is applicable, there is a total of 8 points, but there was no applicable item in other items. In the case of wafer No. 9, the priority “O” item “number of defective chips” corresponds to the selection item, so 3 points, the priority item “△” item “storage position” corresponds to 2 points, and other scratches are present. Therefore, the defect density item corresponds to 7 points in total.

  As shown in the search result screen in FIG. 7, there are no workpieces that meet all the inspection selection conditions, and the workpieces according to the intention of the person who has input the selection setting conditions have the largest total total points. This is wafer No. 10. In addition, when a workpiece with the same score is selected, the one including the higher score of the priority mark is selected.

  FIG. 8 is an operation flowchart for processing the inspection result after inspecting the workpiece selected by the preceding confirmation monitor.

The operator's treatment operation will be briefly described using an input screen as an example.
First, select the inspection items for which data is to be entered from the list. Here, description will be given after FIG. 9 has been selected by the operator. As shown in FIG. 9, the input lot number and wafer number for inputting the inspection result and the result of the designated inspection item are input and registered for each inspection point (S201 to S202).

  Since the inspection point No. differs for each type of inspection point for each inspection, the designer and staff register in advance in the model-specific information internal storage unit 108 in the database using the selection information input terminal 104 of FIG. Keep it. In addition, inspection standard values for each model and each inspection item are also registered.

  Next, the input inspection input data is compared with the standard values registered for each model and each inspection item input in advance by the designer or staff (S203).

  If the comparison result is NG (out of the standard range), a display as shown in FIG. 10 is displayed (S204). FIG. 10 is a diagram showing the display result contents when the inspection data is smaller than the standard value. The subsequent processing of the workpiece is determined because the processing method differs depending on the corresponding inspection process (S205). For example, processing in the case of a process in which a workpiece cannot be reworked is as follows.

  As shown in FIG. 11, the workpiece is processed as damaged (S206). Next, the process returns to the preceding confirmation selection condition input screen (FIG. 3) again, selects the workpiece again, and performs the preceding processing (S207).

  When a defective product is generated in this way, the workpiece that has been damaged from the subsequent search result screen is searched from the result of automatic deletion.

  In the case where the work piece can be reworked, the work piece is reworked and processed again. At this time, judgment is made based on the previous input inspection result status, the machining condition change is instructed and the preceding confirmation machining is performed again (S208).

  When the comparison result is OK (within the standard range), a display as shown in FIG. 12 is displayed, and the input interlock is released so that the main body lot can be input into the corresponding process. In addition, the inspection result input in this operation is registered in the database regardless of OK or NG and becomes future information.

  According to the present embodiment, designers and staff who are process setters can directly input the selection conditions, and the work pieces that are in the corresponding inspection process of the corresponding lot under the conditions according to the selection contents are required by the operator. It can be selected at the timing, and history can also be kept.

  Another object of the present invention is to supply a storage medium storing software program codes for realizing the functions of the above-described embodiments to a system or apparatus, and the computer (or CPU or MPU) of the system or apparatus stores the storage medium. Needless to say, this can also be achieved by reading and executing the program code stored in.

  In this case, the program code itself read from the storage medium realizes the functions of the above-described embodiments, and the program code itself and the storage medium storing the program code constitute the present invention.

  As a storage medium for supplying the program code, for example, a flexible disk, a hard disk, an optical disk, a magneto-optical disk, a CD-ROM, a CD-R, a magnetic tape, a nonvolatile memory card, a ROM, or the like can be used.

  Further, by executing the program code read by the computer, not only the functions of the above-described embodiments are realized, but also an OS (basic system or operating system) running on the computer based on the instruction of the program code. Needless to say, a case where the functions of the above-described embodiment are realized by performing part or all of the actual processing and the processing is included.

  Further, after the program code read from the storage medium is written in a memory provided in a function expansion board inserted into the computer or a function expansion unit connected to the computer, the function is determined based on the instruction of the program code. It goes without saying that the CPU or the like provided in the expansion board or function expansion unit performs part or all of the actual processing and the functions of the above-described embodiments are realized by the processing.

It is a block diagram of one Embodiment of this invention. It is a figure which illustrates the process flow master table in this invention. It is an illustration figure which inputs the preceding process monitor selection conditions in this invention. It is a figure which illustrates the model number registration screen in this invention. It is a flowchart which shows the wafer selection processing operation in this invention. It is a figure which illustrates inspection condition selection of preceding wafer selection in the present invention. It is a figure which illustrates the preceding monitor search result in this invention. It is a flowchart which shows the prior | preceding confirmation monitor process operation | movement in this invention. It is a figure which illustrates the preceding monitor result input screen in this invention. It is a figure which illustrates the preceding monitor processing confirmation result in the present invention. It is a figure which illustrates the advance confirmation monitor loss product processing in the present invention. It is a figure which illustrates completion of prior processing check in the present invention.

Explanation of symbols

101 Worker terminal 1 for processing apparatus
102 Processing Equipment Worker Terminal 2
103 Processing device operator terminal n
104 Selection Information Input Terminal 105 Network 106 Database Server 107 Process Progress Information Internal Storage Unit 108 Model-Specific Information Internal Storage Unit 109 Workpiece Selection Information Internal Storage Unit

Claims (4)

In order to select a part of workpieces from the parts that store the work conditions for each production lot and the workpieces that make up one production lot as the workpiece for preliminary confirmation and the workpiece for inspection, A step of storing a selection condition setting input screen for selecting a preceding confirmation work piece that meets a specific selection condition and each work piece that satisfies a confirmation inspection item condition;
And a step of selecting and instructing a workpiece that satisfies all selection matching conditions.   In the work instruction method according to claim 1, when there is no workpiece that meets all the matching conditions when selecting a workpiece that meets all the selected matching conditions, A work instruction method, comprising: selecting and instructing workpieces that are set in order of conditions of the priority items set individually.   A computer-readable recording medium storing a program for causing a computer to execute the work instruction method according to claim 1.   A program for causing a computer to execute the work instruction method according to claim 1.

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