JP2006038051A - Elastic seal member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide structure of an elastic seal member having groove shape of dimension capable of obtaining repulsion of an elastic O-ring higher in comparison with a case using groove shape designed on the basis of Japanese Industrial Standard. <P>SOLUTION: This elastic seal member is provided with a first plate 11, an elastic O-ring fitting angular groove 12 formed in the first plate 11, the elastic O-ring 10 to be fitted in the angular groove 12, and a second plate 13 to be brought in pressure-contact with the first plate 11 through the O-ring 10. Groove width W of the angular groove 12 is set at 1.05-1.30 times of the inside diameter ϕ<SB>2</SB>of the angular groove 12. With this structure that the groove width W of the angular groove 12 of the first plate 11 is set at 1.05-1.30 times of the inside diameter ϕ<SB>2</SB>of the angular groove 12, when fastening ratio ξ to the elastic O-ring 10 is about 10.0% or more, repulsion higher than the case of using the angular groove designed on the basis of the JIS regulation is obtained, and sealing performance of the elastic O-ring 10 can be remarkably improved. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a structure of a seal portion of an elastic seal member.

  For example, when a semiconductor wafer such as a silicon wafer is subjected to plasma processing as a dry cleaning process to remove contaminants on the surface in a semiconductor manufacturing process, for example, a vacuum chamber 1 as shown in FIG. 22 is used. Thus, a method is employed in which plasma is generated by the plasma discharge electrode 6 and irradiated to the semiconductor wafer 2 accommodated in the vacuum chamber 1. In this case, a cleaning treatment with an inert gas is also used as necessary.

  In such a semiconductor cleaning apparatus using plasma, in order to maintain a high degree of vacuum in the vacuum chamber 1, for example, a reaction chamber opening / closing lid portion 3 above the vacuum chamber 1 and a door portion for taking in and out the semiconductor wafer 2. 4. Various opening portions such as an opening / closing valve portion 8 provided at a connection portion between the discharge pipe 5 for discharging air and inert gas, and a connection portion between the discharge pipe 5 for discharging air and inert gas and the vacuum pump for exhaust 7 In general, an elastic seal structure using, for example, a rubber elastic O-ring 10 having a high sealing performance is employed as an elastic seal member (for example, the following patent is used as a seal structure similar to this). Reference 1).

These elastic O-rings 10 made of rubber are currently designed based on Japanese Industrial Standards (JIS 250), and the grooves into which the elastic O-rings 10 are fitted are, for example, as shown in FIG. In the case of the square groove 12 having a cross-sectional shape, the groove width W is W = 1.34φ ₂ (φ ₂ is the diameter of the cross section of the elastic O-ring 10), and the groove into which the elastic O-ring 10 is fitted is For example, in the case of the dovetail groove 16 as shown in FIG. 24, the groove angle θ is designed to be θ = 25.0 °.

  Note that the elastic seal structure in FIGS. 23 and 24 shows an example in which the elastic seal structure is applied to, for example, the door portion 4 into / out of the semiconductor wafer 2 in FIG.

Published Patent Publication 2001-512897 (Specification, page 1-19, FIG. 1)

  However, in actual measurement, when the O-ring mounting groove designed by the above relational expressions is used, the tightening rate for the elastic O-ring 10 is increased in both cases of the square groove 12 and the dovetail groove 16. However, it has been found that a sufficiently high repulsive force cannot always be obtained, and it is difficult to further improve the sealing performance.

  Therefore, in view of such circumstances, the present invention has a dimension-related groove shape that can obtain a higher resilience of the elastic O-ring than the case where the groove shape designed in the above-mentioned Japanese Industrial Standard is used. It is an object of the present invention to provide a structure of an elastic seal member having the above.

  In order to achieve the above object, the present invention is configured with the following problem solving means.

(1) First Problem Solving Means The first problem solving means of the present invention includes a first plate 11, a square groove 12 for fitting an elastic O-ring formed on the first plate 11, and the corners. An elastic seal member comprising an elastic O-ring 10 fitted in a groove 12 and a second plate 13 pressed against the first plate 11 via the elastic O-ring 10, The groove width W of the groove 12 is 1.05 to 1.30 times the inner diameter D of the diameter φ ₂ of the cross section of the elastic O-ring 10.

As described above, when the groove width W of the square groove 12 on the first plate 11 side is 1.05 to 1.30 times the diameter φ ₂ of the cross-sectional portion of the elastic O-ring 10, the elastic O-ring 10 is tightened. When the rate ξ increases to about 10.0% or more, a higher repulsive force can be obtained compared to the case of using a square groove designed according to the conventional JIS standard, and the sealing performance of the elastic O-ring 10 Can be significantly improved.

(2) Second Problem Solving Means The second problem solving means of the present invention includes a first plate 11, a dovetail groove 16 for fitting an elastic O-ring formed in the first plate 11, and the dovetail. An elastic seal member comprising an elastic O-ring 10 fitted in a groove 16 and a second plate 13 pressed against the first plate 11 via the elastic O-ring 10, The groove angle θ of the groove 16 is 10.0 ° to 20.0 °.

  As described above, when the groove angle θ of the dovetail groove 16 of the first plate 11 is 10.0 ° to 20.0 °, the tightening rate ξ with respect to the elastic O-ring 10 becomes about 10.0% or more. When compared with the case where dovetail grooves designed according to the conventional JIS standard are used, a higher repulsive force can be obtained, and the sealing performance of the elastic O-ring 10 can be remarkably improved.

  As a result, according to the present invention, it is possible to provide a high-performance elastic seal member in which the elastic O-ring has a sufficient elastic repulsive force and can exhibit high sealing performance.

  Hereinafter, some of the best embodiments for carrying out the present invention will be described with reference to the accompanying drawings.

(First best embodiment)
First, FIGS. 1 to 4 show the structure of an elastic O-ring used in the elastic sealing member and the elastic sealing structure according to the first preferred embodiment of the present invention.

  As shown in FIG. 1, for example, the seal structure of the elastic seal member according to the best embodiment includes an alumina seal plate (first plate) 11 constituting one side seal surface of the seal portion, and the seal plate. The elastic O-ring fitting angular groove 12 formed in 11, the rubber elastic O-ring 10 fitted in the square groove 12 as shown in FIGS. 2 and 3, and the elastic O-ring 10 An alumina lid plate (second plate) 13 that constitutes the other sealing surface of the seal portion that is pressed against the seal plate 11 is provided.

  Then, the elastic O-ring 10 is fitted into the square groove 12 on the inner peripheral side as shown in FIG. 1, for example, and the lid plate 13 is pressed from above at a predetermined tightening rate (%). Thus, the elastic O-ring 10 is compressed and deformed to the outer peripheral side as shown in FIG. 4 to obtain a desired repulsive force on the lid plate 13 side, whereby the O-ring between the seal plate 11 and the lid plate 13 is obtained. The inside and outside of the space are sealed with high accuracy.

The square groove 12 has a groove width W, an inner diameter D, a depth E, a radius of curvature at each of the inner and outer edges of the upper end opening R ₁ , and a radius of curvature at each of the inner and outer corners of the bottom of the groove R. ₂

On the other hand, as the elastic O-ring 10, for example, a fluororubber having an inner diameter of φ ₁ and a cross-sectional diameter of φ ₂ is employed.

In the case of this best embodiment, in the above configuration, the width W of the square groove 12 is particularly in the range of 1.05 to 1.30 times the diameter φ ₂ of the cross section of the elastic O-ring 10. It is characterized by being.

As described above, when the width W of the elastic O-ring fitting square groove 12 formed on the seal plate 11 side is 1.05 to 1.30 times the diameter φ ₂ of the cross-section of the elastic O-ring 10, When the tightening ratio ξ due to the pressure contact of the lid plate 13 is increased to about 10.0% or more, the square groove having the dimensions designed in the conventional JIS standard (the width W of the groove is equal to that of the cross section of the elastic O-ring 10). The repulsive force of the elastic O-ring 10 can be obtained higher than the case of using 1.34 times the diameter φ ₂ ), and the sealing performance of the elastic O-ring 10 using fluororubber is remarkable. An improvement is seen.

  Now, when this is confirmed by FEM analysis, it is as follows.

(1) Analytical model Seal structure of elastic seal member having the configuration shown in FIG. 1 (material of seal plate 11 and lid plate 13: alumina, groove width W of square groove 12, inner diameter D of groove, depth E of groove, In the curvature radius R ₁ of the inner and outer opening edge of the upper end side and the curvature radius R ₂ of the corner inside and outside of the groove, the configuration as shown in FIGS. 2 and 3 (the inner diameter φ _{1 of the} ring portion, the diameter φ of the cross section) ₂ ) The elastic O-ring 10 made of fluororubber was used.

  2 and FIG. 3, the elastic O-ring 10 having the structure shown in FIG. 2 and FIG. 3 is fitted into the square groove 12 of the seal plate 11 having the above-described structure, and is lowered downward in the center direction via the lid plate 13. The behavior was analyzed by tightening at a tightening rate equal to or greater than a predetermined value and compressively deforming as shown in FIG. 4 (see JIS: P22A to P50).

  Compared to the elastic O-ring 10 made of fluoro rubber, the alumina seal plate 11 and the lid plate 13 have extremely high rigidity and can be handled as a rigid body. Accordingly, the elastic O-ring 10 is regarded as a superelastic axisymmetric element, the square groove 12 portion and the lid plate 13 are regarded as rigid bodies, the square groove 12 is a completely fixed node, and the lid plate 13 is a node having a forced displacement in the vertical direction. Modeled.

(2) Analysis conditions (Restriction conditions)
In this analysis, since the square groove 12 and the lid plate 13 are treated as rigid bodies as described above, the nodes representing the inner shape of the square groove 12 are completely fixed, and the nodes representing the inner surface shape of the lid plate 13 are set to other than the vertical direction. Fixed.

(Loading condition)
Then, under the same restraint condition, as shown in FIG. 5, the lid plate 13 is forcedly displaced downward in the vertical direction.

  In the case of the square groove 12, the expression using the tightening rate ξ is easy to understand. Therefore, the tightening rate ξ of the elastic O-ring 10 is defined by the following equation.

ξ = (H−h) / H
Here, H is the cross-sectional height of the elastic O-ring 10 before compression deformation (diameter: see FIG. 5... H = φ ₂ ), and h is the cross-sectional height of the elastic O-ring 10 after compression deformation ( The diameter in the minor axis direction: see FIG. Therefore, the maximum forced displacement amount ν = (H−h) in the vertical direction of the lid plate 13 is obtained by ξH.

(3) Analysis results Based on the above analysis conditions, the behavior (stress distribution and deformation, repulsive force) when the elastic O-ring 10 made of fluororubber is compressed by the lid plate 13 is represented by a general-purpose FEM structural analysis code (MSC). / NASTRAN V70.5).

According to JIS standards P22A to P50, the elastic O-ring 10 used has an inner diameter φ ₁ of 23.7 mm, a cross-sectional diameter φ ₂ of 3.5 mm, and the square groove 12 suitable for the elastic O-ring 10 is the groove. The width W is 4.7 mm and the inner diameter D of the groove is φ24.0 (24.0 mm).

(Influence of groove width W of the square groove 12)
The inner diameter φ ₁ of the elastic O-ring 10 to be used is 23.7 mm of JIS standard value, the diameter φ _{2 of the} cross section is 3.5 mm of JIS standard value, and the inner diameter D of the groove is JIS standard value of φ24.0 (24 0.0 mm), the influence of the groove width W on the repulsive force of the elastic O-ring 10 is examined.

  As a result of the analysis of the initial stress performed in advance, it has been found that when the inner diameter D of the square groove 12 is φ24.0, the influence of the initial stress on the repulsive force is as small as 6.2%. The initial stress is not considered in all the following analysis.

  First, in the case of the square groove 12 with the inner diameter D of the groove being φ24.0, for example, when the width W of the groove is changed in multiple steps between 5.5 to 3.8 mm, the elasticity O due to the difference in the tightening rate ξ. Changes in the repulsive force of the ring 10 are shown in the following Table 1 and the graph of FIG.

  According to these data, as the width W of the square groove 12 decreases from 5.5 → 5.3... 4.0 → 3.9 → 3.8, even if the tightening ratio ξ is constant, It can be seen that the repulsive force of the elastic O-ring 10 gradually increases. In particular, when the width W of the square groove 12 is 4.2 mm or less, which is smaller than the JIS standard value of 4.7 mm, the repulsive force of the elastic O-ring 10 may rapidly increase when the tightening rate ξ is 20.0% or more. I can read.

  For example, when the tightening rate ξ is 25.0%, the repulsive force at the groove width W = 4.7 mm (JIS standard value) is 28.4 kgf, whereas the groove width W = 3.8 mm. It was revealed that the repulsive force of 54.0kgf was as high as 90.8%.

  The repulsive force at W = 4.5 mm is 30.2 kgf, W = 4.3 mm at 32.3 kgf, W = 4.2 mm at 33.4 kgf, W = 4.1 mm at 34.6 kgf, W = 4.0 mm, the same as 35.4 kgf, and W = 3.9 mm, the same 41.2 kgf.

When the groove width W = 3.8 mm to 4.5 mm at which the repulsive force is improved is viewed in relation to the diameter φ ₂ = 3.5 mm of the cross section of the elastic O-ring 10, the groove width at which the repulsive force is improved. W is approximately 1.08 to 1.30 times the cross-sectional diameter φ ₂ of the elastic O-ring 10.

  In the above data, the groove width W which is reduced is only measured up to 3.8 mm, but the groove width W is smaller than 3.8 mm as seen from the results of FIG. 6 and “Table 1”. Then, it is clear that the resilience increases further.

However, when the width is smaller than 3.8 mm and the groove width W becomes equal to the diameter φ ₂ (= 3.5 mm) of the cross section of the elastic O-ring 10, the ring portion is deformed when it is compressed and deformed by the increase of the tightening rate ξ. For example, as shown in FIG. 7C, the rectangular groove 12 does not fit in an optimal state, and the upper part may protrude in the outer peripheral direction.

  As a result, there is a problem that the pressure contact state is not stable, the ring portion is damaged, and the sealing performance is deteriorated.

For this reason, the groove width W in the minimum direction is required to be at least about 3.68 mm (about 0.18 mm larger) at least slightly than the diameter φ ₂ (= 3.5 mm) of the cross section of the elastic O-ring 10. . The numerical value W = 3.68 mm is about 1.05 times the diameter φ ₂ (= 3.5 mm) of the cross section of the elastic O-ring 10.

When these results are comprehensively judged, the groove width W = 3.68 mm to 4.5 mm, which can effectively improve the repulsive force and obtain the effective sealing performance, is set to the cross section of the elastic O-ring 10. When viewed in relation to the diameter φ ₂ = 3.5 mm, the groove width W is about 1.05 to 1.30 times the diameter φ ₂ of the cross section of the elastic O-ring 10.

  On the other hand, when the width W of the groove increases, the repulsive force decreases. However, when the width W of the groove is increased to 5.3 mm or more, the reduction of the repulsive force is hardly observed. For example, when the tightening rate ξ is 30%, the repulsive force at the groove width W = 5.3 mm is 37.4 kgf, whereas the repulsive force at the groove width W = 5.5 mm is 37.0 kgf. It turns out that there is almost no change.

  7 (a), (b), and (c) to FIG. 7 (a), (b), and (c) to FIG. 10 (a), (b), and (c). Looking at these patterns, if the width W of the square groove 12 is different, the elastic O-ring 10 from the start of deformation until the end of deformation (tightening rate ξ10% → 20% → 30%) It can be seen that the contact area with the outer diameter side of the square groove 12 changes. This difference in the contact area affects the binding force to the outer periphery during compression deformation, and is presumed to be the cause of the change in repulsive force.

  From these results, the following conclusions can be drawn.

  In short, in the case of the square groove 12, the repulsive force of the elastic O-ring 10 increases as the width W of the square groove 12 decreases, and if W ≦ 4.5 mm, the repulsive force increases effectively, and particularly W ≦ 4. When it reaches 0 mm, it rises rapidly. In the case of W ≦ 4.0 mm, even if the tightening rate ξ is about 10%, it contributes to the increase of the repulsive force. The repulsive force varies depending on the contact area between the elastic O-ring 10 and the outer diameter surface side of the square groove 12. The smaller the contact area with the outer diameter surface side, the lower the repulsive force. When the contact area with the outer diameter surface side disappears, the repulsive force does not decrease.

The contact area with the outer diameter surface side that can obtain the same effective repulsive force is the diameter φ ₂ of the cross section of the elastic O-ring 10 that defines the amount of compressive deformation in the outer circumferential direction of the square groove 12 and the groove If it depends on the width W and the diameter φ _{2 of the} cross section is constant, it is determined by the size of the groove width W for the same constant diameter φ ₂ .

Then, the groove width W of the square groove 12 that achieves the effective repulsive force and provides a sufficient contact area with the groove outer diameter surface side to realize an appropriate sealing performance is as described above. About 1.05 to 1.30 times the diameter φ ₂ of the cross section of the elastic O-ring 10 is optimal.

(Second best embodiment)
Next, FIGS. 11 and 12 show an elastic seal structure according to the second best mode of the present invention.

  The elastic seal structure of the best embodiment is formed on an alumina seal plate (first plate) 11 constituting one side seal surface of the seal portion and the seal plate 11 as shown in FIG. The dovetail groove 16 for fitting the elastic O-ring, the elastic O-ring 10 made of fluororubber similar to that shown in FIG. 2 and FIG. And an alumina lid plate 13 that constitutes the other seal surface of the seal portion that is pressed against the seal plate 11. Then, the elastic O-ring 10 is fitted into the dovetail groove 16 as shown in FIG. 11, for example, and the lid plate (second plate) 13 is pressed from above at a predetermined tightening rate. Thus, the elastic O-ring 10 is compressed and deformed as shown in FIG. 12 to obtain a desired repulsive force in the direction of the lid plate 13, thereby providing an inner side of the O-ring space between the seal plate 11 and the lid plate 13. The outside is sealed with high accuracy.

The dovetail groove 16, the groove angle theta, inner diameter D as viewed in the opening, depth E, the radius of curvature of the inner and outer circumferential sides each corner of the bottom portion has a R _3.

In the elastic O-ring 10, for example, the inner diameter of the ring portion is φ ₁ and the diameter of the cross-sectional portion is φ ₂ .

  In the case of this best mode, the above configuration is characterized in that the groove angle θ of the dovetail groove 16 is 10.0 ° to 20.0 °.

  As described above, when the groove angle θ of the dovetail groove 14 of the seal plate 11 is 10.0 ° to 20.0 °, the tightening rate ξ with respect to the elastic O-ring 10 is increased to about 10.0% or more. Sometimes, a higher repulsive force can be obtained compared to the case of using a dovetail groove (θ = 25.0 °) designed according to the conventional JIS standard, and the sealing performance of the elastic O-ring 10 made of fluororubber is improved. Significant improvement is possible.

  Now, when this is confirmed by FEM analysis, it is as follows.

(1) Analytical model Seal structure of an elastic seal member having the configuration shown in FIG. 11 (material of seal plate 11 and lid plate 13: alumina, dovetail groove 16 has a groove angle θ, an inner diameter D, a depth E, and a groove bottom portion. Made of fluororubber with the configuration shown in FIGS. 2 and 3 (the inner diameter of the ring portion is φ ₁ and the diameter of the cross-section portion is φ ₂ ) in the radius of curvature of each corner portion on the inner and outer peripheral sides is R ₃ ) The elastic O-ring 10 was adopted.

  Then, the elastic O-ring 10 having the structure shown in FIGS. 2 and 3 is fitted into the dovetail groove 16 of the seal plate 11 having the structure described above, for example, as shown in FIG. By applying a tightening force of a predetermined value or more and compressing and deforming as shown in FIG. 12, the behavior was analyzed (see JIS: P22A to P50).

  Compared with the elastic O-ring 10 made of fluoro rubber, the alumina seal plate 11 and the lid plate 13 have remarkably high rigidity and can be handled as a rigid body. Accordingly, the elastic O-ring 10 is regarded as a superelastic axisymmetric element, the dovetail groove 16 and the lid plate 13 are regarded as rigid bodies, the dovetail groove 16 is a completely fixed node, and the lid plate 13 is a node having a forced displacement in the vertical direction. On the other hand, there was no friction due to contact between the elastic O-ring 10 and the wall surface of the dovetail groove 16 and between the elastic O-ring 10 and the inner wall surface of the lid plate 13.

(2) Analytical condition Elastic O-ring 10 in the dovetail groove 16 in which the radius of curvature R ₃ and the groove angle θ of the inner and outer corners of the bottom of the dovetail groove 16 are changed (inner diameter D of ring portion = 23.7 mm) The behavior of the cross-sectional diameter φ ₂ = 3.5 mm) is analyzed.

(Effect of the radius of curvature R ₃ of the inner and outer corners of the groove bottom portion)
Next, in the dovetail groove 16 having a groove angle θ of 20.0 deg (θ = 20 °), the radius of curvature R ₃ of each of the inner and outer corner portions of the groove bottom portion is changed to 0.4 to 1.0 mm. The change in the repulsive force of the elastic O-ring 10 due to the difference in the tightening rate ξ is shown in the following Table 2 and FIG.

According to these, it can be seen that the radius of curvature R ₃ of the corner has little influence on the repulsive force of the elastic O-ring 10.

(Influence of groove angle θ)
In contrast, the radius of curvature R ₃ of the inner and outer corners of the dovetail 16 the groove bottom with a dovetail groove 16 which was 0.4 mm, the groove angle θ 10.0~30.0deg (θ = 10.0 ° ~30 . Table 3 and FIG. 14 show the change in the repulsive force of the elastic O-ring 10 due to the difference in the tightening rate ξ when the angle is changed to 0 °.

  According to this, as the groove angle θ decreases from 30.0 → 25.0 → 20.0 → 17.5 → 15.0 → 12.5 → 10.0, the repulsive force of the elastic O-ring 10 gradually increases. It is clear that it rises. In particular, when the groove angle θ is smaller than 15.0 deg (15.0 °), it can be seen that the repulsive force of the elastic O-ring 10 rapidly increases from the time when the tightening rate ξ becomes 10% or more.

  Even when θ = 20.0 deg (20.0 °) and θ = 17.5 deg (17.5 °), which are smaller than the JIS standard value θ = 25.0 deg (25.0 °), at least the tightening rate ξ When it exceeds 20%, the repulsive force is effectively improved.

  Further, the cross-sectional Mises stress distribution of the elastic O-ring 10 due to the difference between the groove angle θ and the tightening rate ξ together with the cross-sectional deformation thereof is shown in FIGS. 15 (a), (b), (c) to FIGS. , (C). According to these, it is clear that the contact area between the elastic O-ring 10 and both the inner and outer wall surfaces of the dovetail groove 16 increases as the groove angle θ decreases. And the increase of the contact area seems to be the cause of the repulsive force increase.

In short, if the dovetail 16, the repulsive force is hardly affected by the radius of curvature R ₃ of the inner and outer corners of the dovetail 16 the bottom. It is presumed that this is because the contact area between the elastic O-ring 10 and both side walls of the groove hardly changes even if the curvature radii R ₃ of the inner and outer corners of the bottom of the dovetail 16 change.

  In contrast, the repulsive force of the elastic O-ring 10 is greatly affected by the groove angle θ, and the repulsive force increases as θ decreases. In particular, when the groove angle θ is 15.0 deg (15.0 °) or less, for example, even when the tightening rate ξ is about 10%, the repulsive force increases rapidly. This is presumably because the repulsive force increases as the contact area between the elastic O-ring 10 and both side walls of the groove increases as the groove angle θ decreases.

  Also from these things, when the groove angle θ of the dovetail groove 16 of the seal plate 11 is 10.0 deg to 20.0 deg (10.0 ° to 20.0 °), the tightening ratio ξ to the elastic O-ring 10 Is higher than about 10.0%, a higher repulsive force can be obtained compared with the case where dovetail grooves θ = 25.0 deg (θ = 25.0 °) designed according to the conventional JIS standard is used. Thus, it is confirmed that the sealing performance of the elastic O-ring 10 made of fluororubber can be remarkably improved.

It is sectional drawing which shows the seal structure of the elastic seal member which concerns on the best Embodiment 1 of this invention. It is a top view which shows the structure of the elastic O-ring of the seal member. It is sectional drawing of the elastic O-ring. It is sectional drawing of the sealing state of the said sealing member. It is explanatory drawing which shows the deformation | transformation state at the time of sealing of the said elastic O-ring. It is a graph which shows the relationship between the tightening rate ξ and the repulsive force according to the width W (3.8 mm, 4.0 mm, 4.2 mm, 4.7 mm, 5.2 mm) of the fitting groove of the elastic O-ring. When the width W of the fitting groove of the elastic O-ring is W = 3.8 mm, compression when the tightening ratio ξ is increased in three stages, 10.0%, 20.0%, and 26.0%. It is a figure which shows a deformation | transformation state. When the width W of the fitting groove of the elastic O-ring is W = 4.2 mm, the compression when the tightening ratio ξ is increased in three stages of 10.0%, 20.0%, and 30.0% It is a figure which shows a deformation | transformation state. When the width W of the fitting groove of the elastic O-ring is W = 4.7 mm, the compression when the tightening ratio ξ is increased in three stages of 10.0%, 20.0%, and 30.0% It is a figure which shows a deformation | transformation state. When the width W of the fitting groove of the elastic O-ring is W = 5.2 mm, the compression is performed when the tightening rate ξ is increased in three stages: 10.0%, 20.0%, and 30.0%. It is a figure which shows a deformation | transformation state. It is sectional drawing which shows the seal structure of the elastic seal member which concerns on best Embodiment 2 of this invention. It is sectional drawing which shows the compression deformation state at the time of sealing of the elastic O-ring of the seal member. Curvature of corner corner of fitting groove when tightening rate ξ of elastic O-ring is 5.0%, 10.0%, 15.0%, 20.0%, 25.0%, 27.0% it is a graph showing the relationship between the radius R ₃ and repulsion. Tightening rate of the elastic O-ring when the groove angle θ of the dovetail fitting the elastic O-ring is 10.0 deg, 12.5 deg, 15.0 deg, 17.5 deg, 20.0 deg, 30.0 deg It is a graph which shows the relationship between (xi) and a repulsive force. When the groove angle θ of the dovetail to which the elastic O-ring is fitted is 10.0 deg, the tightening rate ξ is increased in three stages: 10.0%, 20.0%, and 24.0%. It is a figure which shows the compression deformation state at the time. When the groove angle θ of the dovetail to which the elastic O-ring is fitted is 12.5 deg, the tightening rate ξ is increased in three stages: 10.0%, 20.0%, and 26.0%. It is a figure which shows the compression deformation state at the time. When the groove angle θ of the dovetail into which the elastic O-ring is fitted is 15.0 deg, the tightening rate ξ is increased in three stages: 10.0%, 20.0%, and 27.0%. It is a figure which shows the compression deformation state at the time. When the groove angle θ of the dovetail into which the elastic O-ring is fitted is 17.5 deg, the tightening rate ξ is increased in three stages: 10.0%, 20.0%, and 27.0%. It is a figure which shows the compression deformation state at the time. When the groove angle θ of the dovetail to which the elastic O-ring is fitted is 20.0 deg, the tightening rate ξ is increased in three stages: 10.0%, 20.0%, and 27.0%. It is a figure which shows the compression deformation state at the time. When the groove angle θ of the dovetail to which the elastic O-ring is fitted is 25.0 deg, the tightening rate ξ is increased in three stages: 10.0%, 20.0%, and 27.0%. It is a figure which shows the compression deformation state at the time. When the groove angle θ of the dovetail into which the elastic O-ring is fitted is 30.0 deg, the tightening rate ξ is increased in three stages: 10.0%, 20.0%, and 27.0%. It is a figure which shows the compression deformation state at the time. It is the schematic which shows an example of the apparatus from which the elastic sealing member is generally employ | adopted conventionally. It is sectional drawing which shows an example of the seal structure of the elastic seal member. It is sectional drawing which shows the other example of the sealing structure of the elastic sealing member.

Explanation of symbols

  10 is an elastic O-ring, 11 is a seal plate, 12 is a square groove, 13 is a lid plate, and 16 is a dovetail.

Claims (2)

A first plate (11), a square groove (12) for fitting an elastic O-ring formed in the first plate (11), and an elastic O-ring (10) fitted in the square groove (12) ) And a second plate (13) pressed against the first plate (11) via the elastic O-ring (10), the angular groove (12) The groove width W of the elastic seal member is 1.05 to 1.30 times the diameter φ ₂ of the cross-sectional portion of the elastic O-ring (10).   A first plate (11), a dovetail groove (16) for fitting an elastic O-ring formed in the first plate (11), and an elastic O-ring (10) fitted in the dovetail groove (16) ) And a second plate (13) pressed against the first plate (11) via the elastic O-ring (10), the dovetail groove (16) The elastic seal member is characterized by having a groove angle θ of 10.0 ° to 20.0 °.

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