JP2006023250A - Piezoelectric vibration detecting/restraining device with controlled thickness of adhesive layer - Google Patents

Piezoelectric vibration detecting/restraining device with controlled thickness of adhesive layer Download PDF

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JP2006023250A
JP2006023250A JP2004203715A JP2004203715A JP2006023250A JP 2006023250 A JP2006023250 A JP 2006023250A JP 2004203715 A JP2004203715 A JP 2004203715A JP 2004203715 A JP2004203715 A JP 2004203715A JP 2006023250 A JP2006023250 A JP 2006023250A
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piezoelectric element
adhesive layer
piezoelectric
vibration detection
adhesive
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JP4552542B2 (en
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Makoto Funahashi
眞 舟橋
Hiroshi Fujito
宏 藤戸
Katsunobu Mitsune
勝信 三根
Akira Matsumoto
亮 松本
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Toyota Motor Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibration detecting/restraining device avoiding a difference in operational performance caused by a deviation in the thickness of an adhesive layer, when installing a piezoelectric element on a vibration detecting or restraining surface by an adhesive. <P>SOLUTION: In this device, the adhesive layer is separately arranged in both end parts and a central part of the piezoelectric element along a curve of a surface by vibration of an object, or a space between the piezoelectric element and an object surface is filled with the adhesive layer by separately placing the piezoelectric element from the object surface by a spacer for limiting the thickness of the adhesive layer, or a laminated body of placing an electric circuit on the piezoelectric element is installed on the object surface by a cover member, and the adhesive layer is arranged by a distance between an inner surface of the cover member and a flange surface abutting on the object surface and the thickness corresponding to a difference in the thickness of the laminated body. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、圧電素子により物体の振動を検出し或は抑制する圧電式振動検出/抑制装置に係る。   The present invention relates to a piezoelectric vibration detection / suppression device that detects or suppresses vibration of an object by a piezoelectric element.

圧電材の板やブロックが伸縮力をかけられるとその対向面間に電位差を生じ、また逆にその対向面間に電位差をかけられると伸縮しようとすることを利用して、圧電素子を自動車の車体やトランスミッション等の振動が問題となる物体の表面に接着材により取り付け、これに一対の電極を付加して該物体の振動を電気的に検出し、或いは該物体の振動を電気的に抑制することが考えられている。そのような技術に関する発明提案は、例えば下記の特許文献1、2、3に記載されている。
特開2001-127354号公報 特開平5-133435号公報 実開平6-32787号公報
When a piezoelectric plate or block is subjected to expansion / contraction force, a potential difference is generated between the opposing surfaces, and conversely, when a potential difference is applied between the opposing surfaces, the piezoelectric element is made to expand and contract. Attached to the surface of an object where vibration of the vehicle body, transmission, etc. is a problem with an adhesive, a pair of electrodes is added to this to electrically detect the vibration of the object, or to electrically suppress the vibration of the object It is considered. Invention proposals relating to such technology are described in, for example, the following Patent Documents 1, 2, and 3.
JP 2001-127354 A JP-A-5-133435 Japanese Utility Model Publication No. 6-32787

上記の特許文献1には、圧電体層を物体の表面に取り付ける接着材層の劣化やばらつきを抑え、また製造工程を簡略化するために、物体上に圧電材と同じ結晶構造に誘導できるアミノポリカルボン酸金属錯体とアミンとの塩から生成された薄膜層を形成し、その薄膜層を介して物体と圧電体層とを接合することを提案されている。上記の特許文献2には、物体に入力される振動の加振周波数が変化しても常に物体の振動レベルを低レベルに保ち、また物体への入力振動の加振周波数に対し最も低い振動レベルが得られる固有振動周波数への変更制御を行うべく、物体に圧電素子を取り付け、物体に入力される振動の加振周波数に対し低い振動レベルが得られるような電圧を圧電素子に印加し、圧電素子により物体に内部引張り力または内部圧縮力を与えることで物体の固有振動周波数を変えること、また印加電圧をパラメータとして予め測定しておいた振動レベル特性データに基づき圧電素子への印加電圧を固有振動周波数制御手段により制御することが提案されている。上記の特許文献3には、軽量でトランスミッションの整備の際に邪魔にならない構造にて自動車のトランスミッションに振動低減効果の大なる振動低減装置を設けるべく、エンジンの振動を振動センサにて検出し、エンジンとトランスミッションとの間にあるフライホイールハウジングに圧電素子を固着し、振動センサの検出値に基づきコントローラにより圧電素子を制御することが提案されている。   In Patent Document 1 described above, in order to suppress deterioration and variation of the adhesive layer for attaching the piezoelectric layer to the surface of the object, and to simplify the manufacturing process, amino acids that can be induced on the object to the same crystal structure as the piezoelectric material are disclosed. It has been proposed to form a thin film layer formed from a salt of a polycarboxylic acid metal complex and an amine, and to bond the object and the piezoelectric layer via the thin film layer. In the above Patent Document 2, the vibration level of the object is always kept at a low level even when the excitation frequency of the vibration input to the object changes, and the lowest vibration level with respect to the excitation frequency of the input vibration to the object. In order to control the change to the natural vibration frequency, the piezoelectric element is attached to the object, and a voltage that gives a vibration level lower than the vibration frequency of the vibration input to the object is applied to the piezoelectric element. By applying internal tensile force or internal compressive force to the object by the element, the natural vibration frequency of the object is changed, and the applied voltage to the piezoelectric element is determined based on the vibration level characteristic data measured in advance using the applied voltage as a parameter. Control by vibration frequency control means has been proposed. In the above-mentioned Patent Document 3, the vibration of the engine is detected by a vibration sensor in order to provide a vibration reduction device having a large vibration reduction effect in the transmission of an automobile with a structure that is lightweight and does not interfere with maintenance of the transmission. It has been proposed that a piezoelectric element is fixed to a flywheel housing between an engine and a transmission, and the piezoelectric element is controlled by a controller based on a detection value of a vibration sensor.

上記の特許文献1の発明は接着材として格別の金属錯体とアミンとの塩を用いるものであるが、これに限らず、従来一般に、圧電式振動検出/抑制装置を構成する圧電材の板或いはブロックよりなる圧電素子は、振動を検出すべき物体或いは振動を抑制されるべき物体の表面に何らかの接着材により取り付けられている。この場合、接着材は一つの層をなしており、いくら薄くても変形と全く無縁ではない。一方、圧電機能による圧電素子の変形は極めて微量であるため、圧電素子を接着材により物体の表面に取り付けた圧電式振動検出/抑制装置の作動特性は、接着材の層の厚みによりかなり影響を受けると考えられる。   The invention of the above-mentioned Patent Document 1 uses a salt of a special metal complex and an amine as an adhesive material. However, the invention is not limited to this. Conventionally, in general, a piezoelectric material plate or a piezoelectric material plate constituting a piezoelectric vibration detection / suppression device is used. The piezoelectric element composed of blocks is attached to the surface of an object whose vibration is to be detected or an object whose vibration is to be suppressed by some kind of adhesive. In this case, the adhesive material forms a single layer, and no matter how thin it is, it is completely free from deformation. On the other hand, since the deformation of the piezoelectric element due to the piezoelectric function is extremely small, the operating characteristics of the piezoelectric vibration detection / suppression device in which the piezoelectric element is attached to the surface of the object with an adhesive material are significantly affected by the thickness of the adhesive layer It is thought to receive.

即ち、今例えば図10に示す如く或る一つの圧電素子100を物体102の表面に或る一定量の接着材104により取り付けるとしても、図のA、B、Cに示す如き3つの場合では、接着材層の厚みが異なり、それぞれ圧電式振動検出/抑制装置としての作動性能に差が生ずると考えられる。   That is, even if a certain piezoelectric element 100 is attached to the surface of the object 102 with a certain amount of adhesive 104 as shown in FIG. 10, for example, in three cases as shown in FIGS. The thickness of the adhesive layer is different, and it is considered that there is a difference in operating performance as a piezoelectric vibration detection / suppression device.

また、従来一般に、接着材による圧電素子の物体表面への取り付けは、物体表面に向かい合う圧電素子の面の全体に接着材を施す所謂べた付けにより行われているが、これに対し上記の如き接着材層の厚みの変化による圧電式振動検出/抑制装置の作動性能の差を回避するために、例えば図11のAに示す如く、圧電素子100の伸縮がなるべく接着材層106に影響されることなく物体102の振動による変形に対応するよう、圧電素子100の両端部のみを接着材により物体表面に固定することが考えられる。しかし、この場合には、図11のBに示す如き物体表面の湾曲変形について、圧電素子の伸縮が物体表面の変形対応しなくなるという問題が生ずる。   Further, in general, the attachment of the piezoelectric element to the object surface with the adhesive is performed by so-called sticking in which the adhesive is applied to the entire surface of the piezoelectric element facing the object surface. In order to avoid a difference in operating performance of the piezoelectric vibration detection / suppression device due to a change in the thickness of the material layer, for example, as shown in FIG. 11A, the expansion and contraction of the piezoelectric element 100 is influenced by the adhesive material layer 106 as much as possible. It is conceivable that only both ends of the piezoelectric element 100 are fixed to the object surface with an adhesive so as to cope with the deformation caused by vibration of the object 102. However, in this case, with respect to the curved deformation of the object surface as shown in FIG. 11B, there arises a problem that the expansion and contraction of the piezoelectric element does not correspond to the deformation of the object surface.

本発明は、振動を検出され或いは振動を抑制されるべき物体の表面に圧電素子を接着材により取り付けることに関する上記の如き問題に鑑み、この点に於いて改良された圧電式振動検出/抑制装置を提供することを課題としている。   The present invention has been made in view of the above-mentioned problems related to attaching a piezoelectric element with an adhesive to the surface of an object whose vibration is to be detected or suppressed, and an improved piezoelectric vibration detecting / suppressing device in this respect. It is an issue to provide.

上記の課題を解決するものとして、本発明は、圧電材の層と対向電極とを有する圧電素子と、前記圧電素子を振動の検出または抑制が施されるべき物体の表面に取り付ける接着材の層とを含む圧電式振動検出/抑制装置にして、前記接着材の層は前記物体の振動による前記表面の湾曲に沿う前記圧電素子の両端部と中央部とに分かれて設けられていることを特徴とする圧電式振動検出/抑制装置を提案するものである。   In order to solve the above problems, the present invention provides a piezoelectric element having a piezoelectric material layer and a counter electrode, and an adhesive layer for attaching the piezoelectric element to the surface of an object to be subjected to vibration detection or suppression. In the piezoelectric vibration detecting / suppressing device, the adhesive layer is provided separately at both ends and a central portion of the piezoelectric element along the curvature of the surface due to the vibration of the object. A piezoelectric vibration detection / suppression device is proposed.

上記の如き圧電式振動検出/抑制装置に於いて、前記圧電素子は実質的に四角形の平面輪郭を有し、前記両端部に於ける接着材層は前記実質的四角形平面輪郭の対向する両辺に沿って設けられており、前記中央部の接着材層は前記両辺の中間位置にて該両辺に実質的に平行に延在する帯域に設けられていてよい。   In the piezoelectric vibration detecting / suppressing device as described above, the piezoelectric element has a substantially quadrangular planar outline, and the adhesive layers at both ends are on opposite sides of the substantially quadrangular planar outline. The adhesive layer in the central portion may be provided in a zone extending substantially parallel to both sides at an intermediate position between the two sides.

或いはまた、上記の如き圧電式振動検出/抑制装置に於いて、前記両端部に於ける接着材層は前記圧電素子の平面輪郭の対向する両端部領域に点在する接着材層として設けられており、前記中央部の接着材層は前記両端部領域の中間部領域に点在する接着材層として設けられていてもよい。この場合、前記圧電素子の平面輪郭は実質的に四角形であり、前記両端部領域に点在する接着材層は前記実質的四角形平面輪郭の対向する両端部の各々に沿って隔置された少なくとも2つの点在接着材層を含み、前記中間部領域に点在する接着材層は前記両端部の中間に位置する少なくとも1つの点在接着材層を含んでいてよく、或はまた、前記圧電素子の平面輪郭は実質的に四角形であり、前記両端部領域に点在する接着材層は前記実質的四角形平面輪郭の対向する両端部の各々に沿って同じ側に偏倚した一対の点在接着材層を含み、前記中間部領域に点在する接着材層は前記両端部の中間にて前記両端部の点在接着材層とは反対の側に偏倚した1つの点在接着材層を含んでいてもよい。   Alternatively, in the piezoelectric vibration detecting / suppressing apparatus as described above, the adhesive layer at both ends is provided as an adhesive layer scattered in opposite end regions of the planar contour of the piezoelectric element. The center adhesive layer may be provided as an adhesive layer interspersed in the middle region of the both end regions. In this case, the planar contour of the piezoelectric element is substantially quadrangular, and the adhesive layers scattered in the both end regions are at least spaced along each opposite end of the substantially quadrangular planar contour. The adhesive layer including two interspersed adhesive layers, the adhesive layer interspersed in the intermediate region may include at least one interspersed adhesive layer located in the middle of the both ends, or the piezoelectric layer The planar outline of the element is substantially quadrangular, and the adhesive layers scattered in the both end regions are a pair of dotted bonds that are biased to the same side along each of opposite opposing ends of the substantially rectangular planar outline. The adhesive layer scattered in the intermediate region includes one interspersed adhesive layer that is biased to the opposite side to the interstitial adhesive layer at both ends in the middle of the both end portions. You may go out.

更にまた、上記の課題を解決するものとして、本発明は、圧電材の層と対向電極とを有する圧電素子と、前記圧電素子を振動の検出または抑制が施されるべき物体の表面に取り付ける接着材の層とを含む圧電式振動検出/抑制装置にして、前記圧電素子は接着材層の厚みを限定するスペーサにより前記物体の表面より隔置されており、前記接着材層は前記スペーサにより隔置された前記圧電素子と前記物体の表面との間の空間を満たすように設けられていることを特徴とする圧電式振動検出/抑制装置をも提案するものである。この場合、前記スペーサは前記圧電素子の平面輪郭の対向する2箇所の小隙部を除きその周縁に沿って延在しており、前記接着材層は前記圧電素子と前記物体の表面と前記スペーサとにより囲まれた空間に前記小隙部の一つより該空間内へ圧入された接着材により形成されていてよい。或はまた、前記圧電素子はその一部に形成された接着材層の厚みを限定する突出部により前記物体の表面より隔置されており、前記接着材層は前記突出部により隔置された前記圧電素子の表面と前記物体の表面との間の空間を満たすように設けられてもよい。   Furthermore, in order to solve the above problems, the present invention provides a piezoelectric element having a piezoelectric material layer and a counter electrode, and an adhesive for attaching the piezoelectric element to the surface of an object to be subjected to vibration detection or suppression. A piezoelectric vibration detecting / suppressing device including a material layer, wherein the piezoelectric element is separated from the surface of the object by a spacer that limits a thickness of the adhesive layer, and the adhesive layer is separated by the spacer. The present invention also proposes a piezoelectric vibration detecting / suppressing device provided to fill a space between the placed piezoelectric element and the surface of the object. In this case, the spacer extends along the periphery of the piezoelectric element except for two small gaps facing each other in the planar outline, and the adhesive layer includes the piezoelectric element, the surface of the object, and the spacer. May be formed of an adhesive press-fitted into the space from one of the gaps. Alternatively, the piezoelectric element is separated from the surface of the object by a protrusion that limits the thickness of an adhesive layer formed on a part of the piezoelectric element, and the adhesive layer is spaced by the protrusion. It may be provided so as to fill a space between the surface of the piezoelectric element and the surface of the object.

更にまた、上記の課題を解決するものとして、本発明は、圧電材の層と対向電極とを有する圧電素子と、前記圧電素子を振動の検出または抑制が施されるべき物体の表面に取り付ける接着材の層とを含む圧電式振動検出/抑制装置にして、前記圧電素子はその上に該圧電素子と電気的に組み合わされる電気回路が積層された状態にてカバー部材により前記物体の表面に取り付けられており、前記カバー部材の前記電気回路を押さえ込む内面と前記物体の表面に当接するフランジ面との間の距離と前記圧電素子と前記電気回路の積層体がなす厚みの差に相当する厚みにて前記接着材の層が設けられていることを特徴とする圧電式振動検出/抑制装置をも提案するものである。この場合、前記カバー部材は前記フランジ面の内側に前記物体の表面より隔置されて該物体の表面に対向する面部を有し、この隔置面部と前記物体の表面との間に施された前記接着材の層により前記物体の表面に固定されていてよい。また、前記カバー部材の前記フランジ面を前記圧電素子の平面輪郭の対向する2箇所の小隙部を除きその周縁に沿って延在させ、接着材層は前記圧電素子と前記物体の表面と前記フランジ面の物体表面より隔置されてこれに対向する面部とにより囲まれた空間に前記小隙部の一つより該空間内へ圧入された接着材により形成されていてよい。或はまた、前記圧電素子はその上に該圧電素子と電気的に組み合わされる電気回路が載置された状態にてカバー部材により前記物体の表面に取り付けられており、前記カバー部材は前記物体の表面に当接するフランジ面と該フランジ面の内側に前記物体の表面より隔置されて該物体の表面に対向する面部を有し、前記面部と前記物体の表面に当接するフランジ面との間の距離と前記圧電素子の厚みの差に相当する厚みにて前記接着材の層が設けられてもよい。   Furthermore, in order to solve the above problems, the present invention provides a piezoelectric element having a piezoelectric material layer and a counter electrode, and an adhesive for attaching the piezoelectric element to the surface of an object to be subjected to vibration detection or suppression. A piezoelectric vibration detecting / suppressing device including a material layer, wherein the piezoelectric element is attached to the surface of the object by a cover member in a state in which an electric circuit electrically combined with the piezoelectric element is laminated thereon And a thickness corresponding to a difference between a distance between an inner surface of the cover member that presses down the electric circuit and a flange surface that contacts the surface of the object and a thickness formed by the laminate of the piezoelectric element and the electric circuit. The present invention also proposes a piezoelectric vibration detection / suppression device provided with the adhesive layer. In this case, the cover member has a surface portion that is spaced apart from the surface of the object inside the flange surface and faces the surface of the object, and is provided between the separation surface portion and the surface of the object. It may be fixed to the surface of the object by the adhesive layer. Further, the flange surface of the cover member is extended along the peripheral edge except for the two small gap portions opposed to each other in the planar outline of the piezoelectric element, and the adhesive layer is formed by the piezoelectric element, the surface of the object, and the surface of the object. It may be formed by an adhesive material press-fitted into the space from one of the small gap portions in a space that is spaced apart from the object surface of the flange surface and surrounded by a surface portion that faces the object surface. Alternatively, the piezoelectric element is attached to the surface of the object by a cover member in a state where an electric circuit electrically combined with the piezoelectric element is placed thereon, and the cover member is attached to the surface of the object. A flange surface abutting on the surface, and a surface portion that is spaced from the surface of the object and faces the surface of the object inside the flange surface, between the surface portion and the flange surface that abuts the surface of the object The adhesive layer may be provided with a thickness corresponding to the difference between the distance and the thickness of the piezoelectric element.

上記の如く圧電材の層と対向電極とを有する圧電素子と、前記圧電素子を振動の検出または抑制が施されるべき物体の表面に取り付ける接着材の層とを含む圧電式振動検出/抑制装置に於いて、前記接着材の層が前記物体の振動による表面の湾曲に沿う圧電素子の両端部と中央部とに分かれて設けられていれば、圧電素子の伸縮がなるべく接着材層に影響されることなく物体の振動による変形に対応するよう接着材の施工面積を減じた上で、物体表面の湾曲変形に対しても圧電素子の伸縮を物体表面の変形に対応させることができる。   Piezoelectric vibration detection / suppression device comprising a piezoelectric element having a piezoelectric material layer and a counter electrode as described above, and an adhesive layer for attaching the piezoelectric element to the surface of an object to be subjected to vibration detection or suppression In this case, if the adhesive layer is provided separately at both ends and the center of the piezoelectric element along the curvature of the surface due to the vibration of the object, the expansion and contraction of the piezoelectric element is influenced by the adhesive layer as much as possible. Without reducing the construction area of the adhesive so as to cope with the deformation caused by the vibration of the object, the expansion and contraction of the piezoelectric element can correspond to the deformation of the object surface even with respect to the curved deformation of the object surface.

その場合に、圧電素子が実質的に四角形の平面輪郭を有しているとき、前記両端部に於ける接着材層が実質的四角形平面輪郭の対向する両辺に沿って設けられ、前記中央部の接着材層が前記両辺の中間位置にて該両辺に実質的に平行に延在する帯域に設けられれば、物体表面の湾曲変形に圧電素子の変形を対応させるために必要な圧電素子の両端部と中央部との固定を各々の位置にて横方向に延在する帯状領域にて行うことにより確実にし、接着材層に影響されることなく圧電素子の伸縮を物体の振動による変形に対応させることを効果的に達成することができる。また、前記両端部に於ける接着材層が圧電素子の平面輪郭の対向する両端部領域に点在する接着材層として設けられ、前記中央部の接着材層が前記両端部領域の中間部領域に点在する接着材層として設けられていれば、圧電素子の伸縮を物体表面の振動による湾曲変形に対応させることを最少量の接着材にて達成し、物体表面の湾曲変形に対応する圧電素子の変形に対する接着材層の影響を最小限に抑えることができる。圧電素子の平面輪郭が実質的に四角形である場合の接着材層を点在させる要領としては、両端部の各々に沿って少なくとも2つの点在接着材層を隔置して設け、両端部の中間に少なくとも1つの点在接着材層を設けることにより、最小限の点在接着材層により物体表面の湾曲変形に圧電素子の変形を対応させる上で高い安定度を得ることができるが、更に、両端部領域に点在する接着材層は両端部の各々に沿って同じ側に偏倚した一対の点在接着材層とし、中間部領域に点在する接着材層は両端部の中間にて前記両端部の点在接着材層とは反対の側に偏倚した1つの点在接着材層とすれば、物体表面の湾曲変形に圧電素子の変形を対応させることを最少数の点在接着材層にて行うことができる。尚、以上いずれの場合にも、接着材層の帯状施工または点在施工により圧電素子と物体表面の間に残された空間には、圧電素子にコンデンサやインダクタンスや抵抗を組み合わせて所謂パッシブタイプの制振装置を構成する場合のコンデンサやインダクタンスや抵抗が配置されてよい。   In that case, when the piezoelectric element has a substantially quadrangular planar contour, adhesive layers at both ends are provided along opposite sides of the substantially quadrangular planar contour, If the adhesive layer is provided in a band extending substantially parallel to both sides at an intermediate position between the two sides, both end portions of the piezoelectric element required to make the deformation of the piezoelectric element correspond to the curved deformation of the object surface And the central part are fixed in a band-like region extending in the lateral direction at each position, and the expansion and contraction of the piezoelectric element is made to correspond to the deformation caused by the vibration of the object without being affected by the adhesive layer. Can be achieved effectively. In addition, the adhesive layer at the both end portions is provided as an adhesive layer interspersed with the opposite end region of the planar contour of the piezoelectric element, and the central adhesive layer is an intermediate region between the both end regions. If it is provided as an adhesive layer interspersed in the piezoelectric material, it is possible to achieve the expansion and contraction of the piezoelectric element corresponding to the curved deformation due to the vibration of the object surface with a minimum amount of adhesive, and the piezoelectric material corresponding to the curved deformation of the object surface. The influence of the adhesive layer on the deformation of the element can be minimized. In the case where the planar outline of the piezoelectric element is substantially quadrangular, the point of interspersing the adhesive layers is that at least two interspersed adhesive layers are provided along each of both end portions. By providing at least one interspersed adhesive layer in the middle, it is possible to obtain a high degree of stability in adapting the deformation of the piezoelectric element to the curved deformation of the object surface with the minimum interspersed adhesive layer. The adhesive layers scattered in the both end regions are a pair of scattered adhesive layers biased to the same side along each of the both end portions, and the adhesive layers scattered in the intermediate region are in the middle of both end portions If one scattered adhesive layer biased to the opposite side of the scattered adhesive layer at both ends is used, the minimum number of scattered adhesives can correspond to the deformation of the piezoelectric element with the curved deformation of the object surface. Can be done in layers. In any of the above cases, the space left between the piezoelectric element and the object surface by the band-like construction or the dotted construction of the adhesive layer is a so-called passive type in which a capacitor, inductance, or resistance is combined with the piezoelectric element. A capacitor, an inductance, and a resistor in the case of configuring the vibration damping device may be arranged.

また、圧電材の層と対向電極とを有する圧電素子と、前記圧電素子を振動の検出または抑制が施されるべき物体の表面に取り付ける接着材の層とを含む圧電式振動検出/抑制装置に於いて、前記圧電素子が接着材層の厚みを限定するスペーサにより物体表面より隔置され、接着材層は前記スペーサ間の圧電素子と物体表面との間の空間を満たすように設けられれば、接着材層の厚み、特に振動による物体表面の湾曲に沿う両端部に於ける接着材層の厚みを所定値に確実に管理することにより、圧電式振動検出/抑制装置の作動性能を所期の性能に安定させることができる。また、この場合、更にスペーサが圧電素子の平面輪郭の対向する2箇所の小隙部を除きその周縁に沿って延在するよう設けられ、接着材層は圧電素子と物体表面とスペーサとにより囲まれた空間に前記小隙部の一方より空気を排出させつつ他方の小隙部より該空間内へ圧入された接着材により形成されるようになっていれば、接着材層の厚みが所定値に正確に管理され、作動性能が所期の性能に安定した圧電式振動検出/抑制装置を低コストにて効率よく製造することができる。前記スペーサに代えて圧電素子の一部に接着材層の厚みを限定する突出部が形成される場合にも同じである。   A piezoelectric vibration detecting / suppressing device including a piezoelectric element having a piezoelectric material layer and a counter electrode, and an adhesive layer for attaching the piezoelectric element to a surface of an object to be subjected to vibration detection or suppression. If the piezoelectric element is spaced from the object surface by a spacer that limits the thickness of the adhesive layer, and the adhesive layer is provided so as to fill a space between the piezoelectric element and the object surface between the spacers, By reliably managing the thickness of the adhesive layer, particularly the thickness of the adhesive layer at both ends along the curvature of the object surface due to vibration, to a predetermined value, the operation performance of the piezoelectric vibration detection / suppression device is expected. The performance can be stabilized. Further, in this case, the spacer is provided so as to extend along the peripheral edge except for the two small gap portions opposed to each other in the planar outline of the piezoelectric element, and the adhesive layer is surrounded by the piezoelectric element, the object surface, and the spacer. The thickness of the adhesive layer is a predetermined value if it is formed by the adhesive pressed into the space from the other small gap while discharging air from one of the small gaps to the space. Therefore, it is possible to efficiently manufacture a piezoelectric vibration detecting / suppressing device that is accurately controlled and has stable operation performance at a desired performance at low cost. The same applies to the case where a protrusion that limits the thickness of the adhesive layer is formed on a part of the piezoelectric element instead of the spacer.

或はまた、圧電材の層と対向電極とを有する圧電素子と、前記圧電素子を振動の検出または抑制が施されるべき物体の表面に取り付ける接着材の層とを含む圧電式振動検出/抑制装置に於いて、圧電素子はその上に該圧電素子と電気的に組み合わされる電気回路が積層された状態にてカバー部材により物体表面に取り付けられており、前記カバー部材の電気回路を押さえ込む内面と物体表面に当接するフランジ面との間の距離と圧電素子と電気回路の積層体がなす厚みの差に相当する厚みにて接着材層が設けられていれば、このように圧電素子と電気回路とをカバー部材により組み合わせ、これを接着材にて物体表面に取り付ける過程に於いて接着材層が所定の厚みを有する層に自動的に仕上られる。この場合、更にカバー部材がフランジ面の内側に物体表面より隔置されて該物体表面に対向する面部を有し、この隔置面部と物体表面との間に施された接着材の層により物体表面に固定されるようになっていれば、カバー部材により圧電素子と電気回路を物体表面に組み付ける工程と圧電素子を所定厚みの接着材層により物体表面に接合する工程とを同一の工程として実行することができる。また、カバー部材の前記フランジ面を圧電素子の平面輪郭の対向する2箇所の小隙部を除きその周縁に沿って延在させ、接着材層が圧電素子と物体表面と前記フランジ面の物体表面より隔置されてこれに対向する面部とにより囲まれた空間に前記小隙部の一つより該空間内へ圧入された接着材により形成されるようになっていれば、カバー部材により圧電素子と電気回路を物体表面に組み付けると共に圧電素子を所定厚みの接着材層により物体表面に接合する工程は一層合理化される。また、カバー部材が前記物体の表面に当接するフランジ面と該フランジ面の内側に前記物体の表面より隔置されて該物体の表面に対向する面部を有し、前記面部と前記物体の表面に当接するフランジ面との間の距離と前記圧電素子の厚みの差に相当する厚みにて前記接着材の層が設けられていても同様の効果が得られる。   Alternatively, a piezoelectric vibration detection / suppression comprising a piezoelectric element having a layer of piezoelectric material and a counter electrode, and a layer of adhesive that attaches the piezoelectric element to the surface of the object to be subjected to vibration detection or suppression. In the apparatus, the piezoelectric element is attached to the object surface by a cover member in a state where an electric circuit electrically combined with the piezoelectric element is laminated thereon, and an inner surface for pressing the electric circuit of the cover member. If the adhesive layer is provided with a thickness corresponding to the difference between the distance between the flange surface contacting the object surface and the thickness of the laminate of the piezoelectric element and the electric circuit, the piezoelectric element and the electric circuit are provided in this way. Are combined with a cover member, and the adhesive layer is automatically finished to a layer having a predetermined thickness in the process of attaching this to the object surface with an adhesive. In this case, the cover member further has a surface portion that is spaced from the object surface inside the flange surface and faces the object surface, and the object is formed by an adhesive layer applied between the spaced surface portion and the object surface. If fixed to the surface, the process of assembling the piezoelectric element and the electric circuit to the object surface by the cover member and the process of bonding the piezoelectric element to the object surface by the adhesive layer having a predetermined thickness are executed as the same process. can do. Further, the flange surface of the cover member is extended along the peripheral edge except for two small gap portions facing each other in the planar contour of the piezoelectric element, and the adhesive layer is formed of the piezoelectric element, the object surface, and the object surface of the flange surface. A piezoelectric element is formed by a cover member as long as it is formed by an adhesive press-fitted into the space by one of the small gap portions in a space that is further spaced apart and surrounded by a surface portion facing the surface portion. And the process of assembling the electric circuit on the object surface and joining the piezoelectric element to the object surface with an adhesive layer having a predetermined thickness is further rationalized. In addition, the cover member has a flange surface that contacts the surface of the object, and a surface portion that is spaced from the surface of the object and that faces the surface of the object inside the flange surface, the surface portion and the surface of the object The same effect can be obtained even if the adhesive layer is provided with a thickness corresponding to the difference between the distance between the flange surface and the thickness of the piezoelectric element.

添付の図1は本発明による圧電式振動検出/抑制装置を一つの実施の形態に於いて示す幾分解図的断面図である。この断面はこの圧電式振動検出/抑制装置が取り付けられた物体の振動によるその表面の湾曲に沿う方向の切断面によるものである。図に於いて、10aにて全体的に示された圧電式振動検出/抑制装置は、圧電素子12とこれを物体14の表面に取り付ける接着材の層16−1、16−2、16−3とを含んでおり、圧電素子12は圧電材の層18とその両面に設けられた対向電極20,22とを有している。接着材の層は物体14の振動によるその表面の湾曲に沿って圧電素子12の両端部に設けられた16−1,16−2と中央部に設けられた16−3とに分かれて設けられている。   FIG. 1 is an exploded sectional view showing a piezoelectric vibration detecting / suppressing device according to the present invention in one embodiment. This cross section is due to a cut surface in a direction along the curvature of the surface due to the vibration of the object to which the piezoelectric vibration detecting / suppressing device is attached. In the figure, a piezoelectric vibration detecting / suppressing device generally indicated by 10a includes a piezoelectric element 12 and adhesive layers 16-1, 16-2, 16-3 for attaching the piezoelectric element 12 to the surface of an object 14. The piezoelectric element 12 includes a piezoelectric material layer 18 and counter electrodes 20 and 22 provided on both sides thereof. The adhesive layer is divided into 16-1 and 16-2 provided at both ends of the piezoelectric element 12 and 16-3 provided at the center along the curvature of the surface of the object 14 due to vibration. ing.

図2は図1に示す圧電式振動検出/抑制装置10aの平面図である。図2より分かる通り、圧電素子12は四角形の平面輪郭を有し、接着材の層16−1,16−2は四角形平面輪郭の対向する両辺に沿って設けられており、中央部の接着材層16−3は前記両辺の中間位置にて該両辺に実質的に平行に延在する帯域に設けられている。このように圧電素子12が物体の振動によるその表面の湾曲に沿う両端部と中央部にて接着材層、特に物体の振動による物体表面の湾曲に沿う方向に対し横方向の全幅に亙って延在する接着材層16−1,16−2,16−3にて物体表面に固定されていれば、圧電素子12がその全面に於いて接着材層により物体表面に固定されていなくても、圧電素子の変形を物体の振動による物体表面の湾曲にほぼ忠実に対応させることができる。   FIG. 2 is a plan view of the piezoelectric vibration detection / suppression device 10a shown in FIG. As can be seen from FIG. 2, the piezoelectric element 12 has a rectangular planar outline, and the adhesive layers 16-1 and 16-2 are provided along opposite sides of the rectangular planar outline. The layer 16-3 is provided in a band extending substantially parallel to both sides at an intermediate position between the both sides. In this way, the piezoelectric element 12 extends over the entire width in the lateral direction with respect to the direction along the curvature of the object surface due to the vibration of the object at the both ends and the center along the curvature of the surface. If the adhesive layers 16-1, 16-2, and 16-3 that extend are fixed to the object surface, the piezoelectric element 12 may not be fixed to the object surface by the adhesive layer over the entire surface. The deformation of the piezoelectric element can be made to correspond almost faithfully to the curvature of the object surface due to the vibration of the object.

図3は図1および図2に示す圧電式振動検出/抑制装置10aの一部を変更したこれに類似の圧電式振動検出/抑制装置10bを図2と同様の要領にて示す平面図である。図3に於いて、図2に示す部分に対応する部分には、図2に於けると同じ符号が付されている。この場合、接着材層は圧電素子12の四角形平面輪郭の対向する両端部の各々に沿って両縁部まで隔置された2つの点在接着材層16−4,16−5,16−6,16−7と、両端部の中間部領域の中央部に位置する点在接着材層16−8として設けられている。かかる接着材層の点在配置によれば、最小限の点在接着材層により物体表面の湾曲変形に圧電素子の変形を対応させる上で高い安定度を得ることができる。   FIG. 3 is a plan view showing a piezoelectric vibration detecting / suppressing device 10b similar to that shown in FIG. 2 in which a part of the piezoelectric vibration detecting / suppressing device 10a shown in FIGS. 1 and 2 is changed. . In FIG. 3, the same reference numerals as in FIG. 2 are assigned to the portions corresponding to the portions shown in FIG. In this case, the adhesive layers are two interspersed adhesive layers 16-4, 16-5, 16-6 that are spaced apart to both edges along opposite ends of the rectangular planar contour of the piezoelectric element 12. , 16-7 and a dotted adhesive layer 16-8 located at the center of the middle region at both ends. According to such a scattered arrangement of the adhesive layers, high stability can be obtained when the deformation of the piezoelectric element is made to correspond to the curved deformation of the object surface with the minimum number of scattered adhesive layers.

図4も同じく図1および図2に示す圧電式振動検出/抑制装置10aの一部を変更したこれに類似の圧電式振動検出/抑制装置10cを図2と同様の要領にて示す平面図である。図4に於いても、図2に示す部分に対応する部分には、図2に於けると同じ符号が付されている。この場合、接着材層は圧電素子12の四角形平面輪郭の対向する両端部の各々に沿って同じ側に偏倚した一対の点在接着材層16−9,16−10と、両端部の中間部領域にて前記両端部の点在接着材層とは反対の側に偏倚した1つの点在接着材層16−11として設けられている。かかる接着材層の点在配置によれば、物体表面の湾曲変形に圧電素子の変形を対応させることを最少数の点在接着材層にて行うことができる。   FIG. 4 is also a plan view showing a piezoelectric vibration detecting / suppressing device 10c similar to that shown in FIG. 2 in which a part of the piezoelectric vibration detecting / suppressing device 10a shown in FIGS. 1 and 2 is changed. is there. Also in FIG. 4, the same reference numerals as in FIG. 2 are assigned to portions corresponding to the portions shown in FIG. In this case, the adhesive layer is composed of a pair of interspersed adhesive layers 16-9 and 16-10 that are biased to the same side along each of opposite ends of the rectangular planar contour of the piezoelectric element 12, and an intermediate portion between the ends. It is provided as one interspersed adhesive layer 16-11 that is biased to the opposite side to the interspersed adhesive layer at both ends in the region. According to the dotted arrangement of the adhesive layers, it is possible to perform the deformation of the piezoelectric element corresponding to the curved deformation of the object surface with the minimum number of the dotted adhesive layers.

図5は本発明による圧電式振動検出/抑制装置を他の一つの実施の形態に於いて示す図1と同様の幾分解図的断面図である。この断面もまた、この圧電式振動検出/抑制装置が取り付けられた物体の振動によるその表面の湾曲に沿う方向の切断面によるものである。また図6は図5に示す圧電式振動検出/抑制装置の平面図である。図5および図6に於いても、図1および図2に示す部分に対応する部分には、図1および図2に於けると同じ符号が付されている。この圧電式振動検出/抑制装置10dに於いても、図6より分かる通り、圧電素子12は四角形の平面輪郭を有し、圧電素子12は物体の振動による表面の湾曲に沿う両端部にて接着材層の厚みを限定するスペーサ24−1,24−2により物体の表面14より隔置されており、接着材層16−12はスペーサ24−1,24−2間の圧電素子と物体の表面との間の空間を満たすように設けられている。このように接着材層の厚みがスペーサにより規定されれば、接着材層の厚み、特に振動による物体表面の湾曲に沿う両端部に於ける接着材層の厚みを所定値に確実に管理することができ、圧電式振動検出/抑制装置の作動性能を所期の性能に安定させることができる。   FIG. 5 is an exploded sectional view similar to FIG. 1 showing the piezoelectric vibration detecting / suppressing device according to the present invention in another embodiment. This cross section is also due to a cut surface in a direction along the curvature of the surface due to the vibration of the object to which the piezoelectric vibration detecting / suppressing device is attached. FIG. 6 is a plan view of the piezoelectric vibration detection / suppression device shown in FIG. 5 and 6, the same reference numerals as those in FIGS. 1 and 2 are assigned to the portions corresponding to the portions shown in FIGS. 1 and 2. Also in this piezoelectric vibration detecting / suppressing device 10d, as can be seen from FIG. 6, the piezoelectric element 12 has a quadrangular planar outline, and the piezoelectric element 12 is bonded at both ends along the surface curvature due to the vibration of the object. Spacers 24-1 and 24-2 that limit the thickness of the material layer are separated from the surface 14 of the object, and the adhesive material layer 16-12 is a piezoelectric element between the spacers 24-1 and 24-2 and the surface of the object. It is provided to fill the space between. If the thickness of the adhesive layer is defined by the spacer in this way, the thickness of the adhesive layer, in particular, the thickness of the adhesive layer at both ends along the curvature of the object surface due to vibration can be reliably managed to a predetermined value. Thus, the operation performance of the piezoelectric vibration detection / suppression device can be stabilized to the expected performance.

図7は図5および図6に示す圧電式振動検出/抑制装置10dの一部を変更したこれに類似の圧電式振動検出/抑制装置10eを図6と同様の要領にて示す平面図である。図7に於いても、図6に示す部分に対応する部分には、図6に於けると同じ符号が付されている。この場合、スペーサ24−3は圧電素子の四角形平面輪郭の対向する2箇所の小隙部26−1,26−2を除きその周縁に沿って延在しており、接着材層16−13は圧電素子12と物体14の表面とスペーサ24−3とにより囲まれた空間に小隙部26−1,26−2の一方より空気を排出させつつ他方の小隙部より該空間内へ圧入された接着材により形成されている。この要領によれば、接着材層の厚みがスペーサ24−3により所定値に正確に管理され、作動性能が所期の性能に安定した圧電式振動検出/抑制装置を低コストにて効率よく製造することができる。   FIG. 7 is a plan view showing a piezoelectric vibration detecting / suppressing device 10e similar to that shown in FIG. 6 except that a part of the piezoelectric vibration detecting / suppressing device 10d shown in FIGS. 5 and 6 is changed. . Also in FIG. 7, the same reference numerals as in FIG. 6 are assigned to the portions corresponding to the portions shown in FIG. In this case, the spacer 24-3 extends along the peripheral edge except for the two small gap portions 26-1 and 26-2 that face each other in the rectangular planar outline of the piezoelectric element, and the adhesive layer 16-13 is Air is discharged from one of the small gap portions 26-1 and 26-2 into the space surrounded by the piezoelectric element 12, the surface of the object 14, and the spacer 24-3 and is pressed into the space from the other small gap portion. It is made of adhesive material. According to this point, the thickness of the adhesive layer is accurately controlled to a predetermined value by the spacer 24-3, and a piezoelectric vibration detecting / suppressing device whose operation performance is stable to the expected performance is efficiently manufactured at low cost. can do.

図8は、上記のスペーサに代えて圧電素子の一部に接着材層の厚みを限定する突出部18−1,18−2が形成された例を示す図5と同様の図である。この例では、突出部18−1,18−2は圧電材層18の一部の厚みが増大されることにより形成されている。突出部の形成位置は図6または図7に示すスペーサと同様の位置であってよい。   FIG. 8 is a view similar to FIG. 5 showing an example in which protrusions 18-1 and 18-2 that limit the thickness of the adhesive layer are formed on a part of the piezoelectric element instead of the spacer. In this example, the protrusions 18-1 and 18-2 are formed by increasing the thickness of a part of the piezoelectric material layer 18. The protruding portion may be formed at the same position as the spacer shown in FIG. 6 or FIG.

図9は本発明による圧電式振動検出/抑制装置を更に他の一つの実施の形態に於いて示す図1および図5と同様の幾分解図的断面図である。この断面もまた、この圧電式振動検出/抑制装置が取り付けられた物体の振動によるその表面の湾曲に沿う方向の切断面によるものである。また図10は図9に示す圧電式振動検出/抑制装置の図9に於ける切断面X−Xによる平断面図である。図8および図10に於いても、図1および図2に示す部分に対応する部分には、図1および図2に於けると同じ符号が付されている。この圧電式振動検出/抑制装置10fに於いては、圧電素子12はその上に該圧電素子と電気的に組み合わされる電気回路28が積層された状態にてカバー部材30により物体14の表面に取り付けられており、カバー部材30の電気回路28を押さえ込む内面32と物体表面に当接するフランジ面34との間の距離と圧電素子12と電気回路28の積層体がなす厚みの差に相当する厚みにて接着材層16−14が設けられている。かかる構造によれば、圧電素子12と電気回路28とをカバー部材30により組み合わせ、これを接着材にて物体表面に取り付ける過程に於いて接着材層16−14が所定の厚みを有する層に自動的に仕上られる。更にまた、カバー部材がフランジ面の内側に物体表面より隔置されて該物体表面に対向する面部36を有し、この隔置面部36と物体表面との間に施された接着材の層により物体表面に固定されるようになっていれば、カバー部材により圧電素子と電気回路を物体表面に組み付ける工程と圧電素子を所定厚みの接着材層により物体表面に接合する工程とを同一の工程として実行することができる。   FIG. 9 is an exploded sectional view similar to FIGS. 1 and 5 showing the piezoelectric vibration detection / suppression device according to the present invention in still another embodiment. This cross section is also due to a cut surface in a direction along the curvature of the surface due to the vibration of the object to which the piezoelectric vibration detecting / suppressing device is attached. FIG. 10 is a cross-sectional plan view of the piezoelectric vibration detection / suppression device shown in FIG. 9 taken along section XX in FIG. 8 and 10, the same reference numerals as those in FIGS. 1 and 2 are assigned to the portions corresponding to the portions shown in FIGS. In this piezoelectric vibration detecting / suppressing device 10f, the piezoelectric element 12 is attached to the surface of the object 14 by the cover member 30 in a state where an electric circuit 28 electrically combined with the piezoelectric element is laminated thereon. The thickness of the cover member 30 corresponds to the difference between the distance between the inner surface 32 that presses down the electric circuit 28 and the flange surface 34 that contacts the object surface, and the thickness of the laminate of the piezoelectric element 12 and the electric circuit 28. An adhesive layer 16-14 is provided. According to such a structure, the adhesive material layer 16-14 is automatically formed into a layer having a predetermined thickness in the process of combining the piezoelectric element 12 and the electric circuit 28 with the cover member 30 and attaching this to the object surface with the adhesive material. Finished. Furthermore, the cover member has a surface portion 36 that is spaced apart from the object surface inside the flange surface and faces the object surface, and a layer of adhesive applied between the separation surface portion 36 and the object surface. If fixed to the object surface, the process of assembling the piezoelectric element and the electric circuit to the object surface by the cover member and the process of bonding the piezoelectric element to the object surface by the adhesive layer having a predetermined thickness are the same process. Can be executed.

また、カバー部材のフランジ面34を圧電素子の平面輪郭の対向する2箇所の小隙部38−1,38−2を除きその周縁に沿って延在させ、接着材層16−14が圧電素子12と物体14の表面とフランジ面の物体表面より隔置されてこれに対向する面部36とにより囲まれた空間に小隙部38−1,38−2の一方より空気を排出させつつ他方の小隙部より該空間内へ圧入された接着材により形成されるようになっていれば、カバー部材により圧電素子と電気回路を物体表面に組み付けると共に圧電素子を所定厚みの接着材層により物体表面に接合する工程は一層合理化される。   Further, the flange surface 34 of the cover member is extended along the peripheral edge except for the two small gap portions 38-1 and 38-2 opposed to each other in the planar outline of the piezoelectric element, and the adhesive layer 16-14 is formed by the piezoelectric element. 12 and the surface of the object 14 and the surface of the flange surface that are spaced apart from the object surface 36 and are opposed to each other, the air is discharged from one of the small gap portions 38-1 and 38-2 while the other surface is discharged. If the adhesive is pressed into the space from the gap, the piezoelectric element and the electric circuit are assembled to the object surface by the cover member, and the piezoelectric element is attached to the object surface by the adhesive layer having a predetermined thickness. The process of joining to is further streamlined.

図11は図9に示す構造の一部を変更した図9と同様の図である。この場合、カバー部材30の内面32は電気回路28の上面より離れており、電気回路28は圧電素子12上に載置され、図には示されていない任意の固定手段により圧電素子12に固定されている。カバー部材には物体の表面に当接するフランジ面34より圧電素子12の厚みと形成されるべき接着材層の厚みの和に相当する距離だけ隔置された位置に物体表面に対向する面部40が形成されており、これによって面部40とフランジ面34との間の距離と圧電素子12の厚みの差に相当する厚みにて接着材層が形成されている。   FIG. 11 is a view similar to FIG. 9 in which a part of the structure shown in FIG. 9 is changed. In this case, the inner surface 32 of the cover member 30 is separated from the upper surface of the electric circuit 28, and the electric circuit 28 is placed on the piezoelectric element 12 and fixed to the piezoelectric element 12 by any fixing means not shown in the drawing. Has been. The cover member has a surface portion 40 facing the object surface at a position spaced apart from the flange surface 34 contacting the object surface by a distance corresponding to the sum of the thickness of the piezoelectric element 12 and the thickness of the adhesive layer to be formed. Thus, the adhesive layer is formed with a thickness corresponding to the difference between the distance between the surface portion 40 and the flange surface 34 and the thickness of the piezoelectric element 12.

以上に於いては本発明をいくつかの実施の形態について詳細に説明したが、これらの実施の形態について本発明の範囲内にて種々の変更が可能であることは当業者にとって明らかであろう。   While the present invention has been described in detail with respect to several embodiments thereof, it will be apparent to those skilled in the art that various modifications can be made to these embodiments within the scope of the present invention. .

本発明による圧電式振動検出/抑制装置を一つの実施の形態に於いて示す幾分解図的断面図。1 is an exploded sectional view showing a piezoelectric vibration detection / suppression device according to the present invention in one embodiment. 図1に示す圧電式振動検出/抑制装置の平面図。FIG. 2 is a plan view of the piezoelectric vibration detection / suppression device shown in FIG. 1. 図1および図2に示す圧電式振動検出/抑制装置の一部を変更したこれに類似の圧電式振動検出/抑制装置を図2と同様の要領にて示す平面図。FIG. 3 is a plan view showing a piezoelectric vibration detection / suppression device similar to that shown in FIG. 2 with a part of the piezoelectric vibration detection / suppression device shown in FIGS. 1 and 2 changed. 図1および図2に示す圧電式振動検出/抑制装置の一部を変更したこれに類似の他の一つの圧電式振動検出/抑制装置を図2と同様の要領にて示す平面図。FIG. 3 is a plan view showing another similar piezoelectric vibration detection / suppression device similar to that shown in FIG. 2 in which a part of the piezoelectric vibration detection / suppression device shown in FIGS. 1 and 2 is changed. 本発明による圧電式振動検出/抑制装置を他の一つの実施の形態に於いて示す図1と同様の幾分解図的断面図。FIG. 3 is an exploded sectional view similar to FIG. 1 showing a piezoelectric vibration detection / suppression device according to the present invention in another embodiment. 図5に示す圧電式振動検出/抑制装置の平面図。FIG. 6 is a plan view of the piezoelectric vibration detection / suppression device shown in FIG. 5. 図5および図6に示す圧電式振動検出/抑制装置の一部を変更したこれに類似の圧電式振動検出/抑制装置を図6と同様の要領にて示す平面図。The top view which shows the piezoelectric vibration detection / suppression apparatus similar to this which changed a part of piezoelectric vibration detection / suppression apparatus shown to FIG. 5 and FIG. 6 in the same way as FIG. スペーサに代えて圧電素子の一部に接着材層の厚みを限定する突出部が形成された例を示す図5と同様の図。The same figure as FIG. 5 which shows the example in which it replaced with the spacer and the protrusion part which limited the thickness of an adhesive material layer was formed in a part of piezoelectric element. 本発明による圧電式振動検出/抑制装置を更に他の一つの実施の形態に於いて示す図1および図5と同様の幾分解図的断面図。FIG. 6 is an exploded sectional view similar to FIGS. 1 and 5 showing a piezoelectric vibration detection / suppression device according to the present invention in still another embodiment. 図9に示す圧電式振動検出/抑制装置の図8に於ける切断面X−Xによる平断面図。FIG. 10 is a cross-sectional plan view of the piezoelectric vibration detection / suppression device shown in FIG. 図9に示す構造の一部を変更した図9と同様の図.The same figure as FIG. 9 which changed a part of structure shown in FIG. 圧電素子100を物体102の表面に或る一定量の接着材により取り付けるとしたときの3つの場合をA、B、Cとして示す従来技術説明図。FIG. 4 is a prior art explanatory diagram showing three cases A, B, and C when the piezoelectric element 100 is attached to the surface of an object 102 with a certain amount of adhesive. 圧電素子100の両端部のみを接着材106により物体102の表面に固定したときの物体表面の湾曲変形と圧電素子の伸縮変形の対応を示す従来技術説明図。FIG. 3 is a prior art explanatory diagram showing correspondence between bending deformation of an object surface and expansion / contraction deformation of a piezoelectric element when only both ends of the piezoelectric element are fixed to the surface of the object by an adhesive.

符号の説明Explanation of symbols

10a〜10f…圧電式振動検出/抑制装置、12…圧電素子、14…物体、16−1〜16−14…接着材層、18…圧電材層、18−1,18−2…圧電材層の厚み増大部、20,22…電極、24−1〜24−3…スペーサ、26−1,26−2…スペーサの小隙部、28…電気回路、30…カバー部材、32…カバー部材の内面、34…カバー部材のフランジ面、36…カバー部材の隔置面部、38−1,38−2…カバー部材フランジ面の小隙部、40…面部、100…圧電素子、102…物体、104…接着材、106…接着材層   DESCRIPTION OF SYMBOLS 10a-10f ... Piezoelectric vibration detection / suppression apparatus, 12 ... Piezoelectric element, 14 ... Object, 16-1 to 16-14 ... Adhesive material layer, 18 ... Piezoelectric material layer, 18-1, 18-2 ... Piezoelectric material layer 20, 22 ... electrodes, 24-1 to 24-3 ... spacers, 26-1 and 26-2 ... spacer gaps, 28 ... electric circuit, 30 ... cover member, 32 ... cover member Inner surface, 34: flange surface of cover member, 36: separation surface portion of cover member, 38-1, 38-2 ... small gap portion of flange surface of cover member, 40 ... surface portion, 100 ... piezoelectric element, 102 ... object, 104 ... Adhesive, 106 ... Adhesive layer

Claims (12)

圧電材の層と対向電極とを有する圧電素子と、前記圧電素子を振動の検出または抑制が施されるべき物体の表面に取り付ける接着材の層とを含む圧電式振動検出/抑制装置にして、前記接着材の層は前記物体の振動による前記表面の湾曲に沿う前記圧電素子の両端部と中央部とに分かれて設けられていることを特徴とする圧電式振動検出/抑制装置。   A piezoelectric vibration detection / suppression device including a piezoelectric element having a piezoelectric material layer and a counter electrode, and an adhesive layer for attaching the piezoelectric element to a surface of an object to be subjected to vibration detection or suppression, The piezoelectric vibration detecting / suppressing device, wherein the adhesive layer is provided separately at both ends and a central portion of the piezoelectric element along a curvature of the surface due to vibration of the object. 前記圧電素子は実質的に四角形の平面輪郭を有し、前記両端部に於ける接着材層は前記実質的四角形平面輪郭の対向する両辺に沿って設けられており、前記中央部の接着材層は前記両辺の中間位置にて該両辺に実質的に平行に延在する帯域に設けられていることを特徴とする請求項1に記載の圧電式振動検出/抑制装置。   The piezoelectric element has a substantially quadrangular planar outline, and adhesive layers at both ends are provided along opposite sides of the substantially quadrangular planar outline, and the adhesive layer in the central part 2. The piezoelectric vibration detection / suppression device according to claim 1, wherein the piezoelectric vibration detection / suppression device is provided in a band extending substantially parallel to both sides at an intermediate position between the two sides. 前記両端部に於ける接着材層は前記圧電素子の平面輪郭の対向する両端部領域に点在する接着材層として設けられており、前記中央部の接着材層は前記両端部領域の中間部領域に点在する接着材層として設けられていることを特徴とする請求項1に記載の圧電式振動検出/抑制装置。   The adhesive layers at the both ends are provided as adhesive layers scattered in opposite end regions of the planar contour of the piezoelectric element, and the center adhesive layer is an intermediate portion between the end regions. The piezoelectric vibration detection / suppression device according to claim 1, wherein the piezoelectric vibration detection / suppression device is provided as an adhesive layer scattered in the region. 前記圧電素子の平面輪郭は実質的に四角形であり、前記両端部領域に点在する接着材層は前記実質的四角形平面輪郭の対向する両端部の各々に沿って隔置された少なくとも2つの点在接着材層を含み、前記中間部領域に点在する接着材層は前記両端部の中間に位置する少なくとも1つの点在接着材層を含んでいることを特徴とする請求項3に記載の圧電式振動検出/抑制装置。   The planar contour of the piezoelectric element is substantially quadrangular, and the adhesive layers interspersed with the two end regions are at least two points spaced along opposite ends of the substantially quadrangular planar contour. 4. The adhesive layer according to claim 3, wherein the adhesive layer includes an adhesive layer and is scattered in the intermediate region, and includes at least one interspersed adhesive layer located between the both ends. Piezoelectric vibration detection / suppression device. 前記圧電素子の平面輪郭は実質的に四角形であり、前記両端部領域に点在する接着材層は前記実質的四角形平面輪郭の対向する両端部の各々に沿って同じ側に偏倚した一対の点在接着材層を含み、前記中間部領域に点在する接着材層は前記両端部の中間にて前記両端部の点在接着材層とは反対の側に偏倚した1つの点在接着材層を含んでいることを特徴とする請求項3に記載の圧電式振動検出/抑制装置。   The planar contour of the piezoelectric element is substantially quadrangular, and the adhesive layers scattered in the both end regions are a pair of points that are biased to the same side along opposite ends of the substantially quadrangular planar contour. One interspersed adhesive layer that includes an interstitial adhesive layer, and the interstitial adhesive layer that is interspersed in the intermediate region is biased to the opposite side of the interstitial adhesive layer at the both ends in the middle of the both ends The piezoelectric vibration detecting / suppressing device according to claim 3, comprising: 圧電材の層と対向電極とを有する圧電素子と、前記圧電素子を振動の検出または抑制が施されるべき物体の表面に取り付ける接着材の層とを含む圧電式振動検出/抑制装置にして、前記圧電素子は接着材層の厚みを限定するスペーサにより前記物体の表面より隔置されており、前記接着材層は前記スペーサにより隔置された前記圧電素子と前記物体の表面との間の空間を満たすように設けられていることを特徴とする圧電式振動検出/抑制装置。   A piezoelectric vibration detection / suppression device including a piezoelectric element having a piezoelectric material layer and a counter electrode, and an adhesive layer for attaching the piezoelectric element to a surface of an object to be subjected to vibration detection or suppression, The piezoelectric element is separated from the surface of the object by a spacer that limits the thickness of the adhesive layer, and the adhesive layer is a space between the piezoelectric element and the surface of the object that are separated by the spacer. A piezoelectric vibration detecting / suppressing device, characterized in that the piezoelectric vibration detecting / suppressing device is provided. 前記スペーサは前記圧電素子の平面輪郭の対向する2箇所の小隙部を除きその周縁に沿って延在しており、前記接着材層は前記圧電素子と前記物体の表面と前記スペーサとにより囲まれた空間に前記小隙部の一つより該空間内へ圧入された接着材により形成されていることを特徴とする請求項6に記載の圧電式振動検出/抑制装置。   The spacer extends along the periphery of the piezoelectric element except for two small gaps facing each other in the planar outline, and the adhesive layer is surrounded by the piezoelectric element, the surface of the object, and the spacer. The piezoelectric vibration detecting / suppressing device according to claim 6, wherein the piezoelectric vibration detecting / suppressing device is formed by an adhesive press-fitted into the space from one of the small gap portions. 圧電材の層と対向電極とを有する圧電素子と、前記圧電素子を振動の検出または抑制が施されるべき物体の表面に取り付ける接着材の層とを含む圧電式振動検出/抑制装置にして、前記圧電素子はその一部に形成された接着材層の厚みを限定する突出部により前記物体の表面より隔置されており、前記接着材層は前記突出部により隔置された前記圧電素子の表面と前記物体の表面との間の空間を満たすように設けられていることを特徴とする圧電式振動検出/抑制装置。   A piezoelectric vibration detection / suppression device including a piezoelectric element having a piezoelectric material layer and a counter electrode, and an adhesive layer for attaching the piezoelectric element to a surface of an object to be subjected to vibration detection or suppression, The piezoelectric element is separated from the surface of the object by a protrusion that limits the thickness of an adhesive layer formed on a part of the piezoelectric element, and the adhesive layer is separated from the surface of the piezoelectric element by the protrusion. A piezoelectric vibration detecting / suppressing device provided to fill a space between a surface and a surface of the object. 圧電材の層と対向電極とを有する圧電素子と、前記圧電素子を振動の検出または抑制が施されるべき物体の表面に取り付ける接着材の層とを含む圧電式振動検出/抑制装置にして、前記圧電素子はその上に該圧電素子と電気的に組み合わされる電気回路が積層された状態にてカバー部材により前記物体の表面に取り付けられており、前記カバー部材の前記電気回路を押さえ込む内面と前記物体の表面に当接するフランジ面との間の距離と前記圧電素子と前記電気回路の積層体がなす厚みの差に相当する厚みにて前記接着材の層が設けられていることを特徴とする圧電式振動検出/抑制装置。   A piezoelectric vibration detection / suppression device including a piezoelectric element having a piezoelectric material layer and a counter electrode, and an adhesive layer for attaching the piezoelectric element to a surface of an object to be subjected to vibration detection or suppression, The piezoelectric element is attached to the surface of the object by a cover member in a state where an electric circuit electrically combined with the piezoelectric element is laminated thereon, and an inner surface for pressing the electric circuit of the cover member, The adhesive layer is provided with a thickness corresponding to a difference between a distance between a flange surface in contact with a surface of an object and a thickness formed by a laminate of the piezoelectric element and the electric circuit. Piezoelectric vibration detection / suppression device. 前記カバー部材は前記フランジ面の内側に前記物体の表面より隔置されて該物体の表面に対向する面部を有し、この隔置面部と前記物体の表面との間に施された前記接着材の層により前記物体の表面に固定されていることを特徴とする請求項8に記載の圧電式振動検出/抑制装置。   The cover member has a surface portion that is spaced apart from the surface of the object inside the flange surface and faces the surface of the object, and the adhesive applied between the spaced surface portion and the surface of the object. The piezoelectric vibration detecting / suppressing device according to claim 8, wherein the piezoelectric vibration detecting / suppressing device is fixed to the surface of the object by a layer. 前記カバー部材の前記フランジ面は前記圧電素子の平面輪郭の対向する2箇所の小隙部を除きその周縁に沿って延在しており、前記接着材層は前記圧電素子と前記物体の表面と前記フランジ面の物体表面より隔置されてこれに対向する面部とにより囲まれた空間に前記小隙部の一つより該空間内へ圧入された接着材により形成されていることを特徴とする請求項9に記載の圧電式振動検出/抑制装置。   The flange surface of the cover member extends along the periphery of the piezoelectric element except for two small gaps facing each other in a planar outline, and the adhesive layer includes the piezoelectric element and the surface of the object. It is formed by an adhesive material press-fitted into the space from one of the small gap portions in a space that is spaced apart from the object surface of the flange surface and surrounded by a surface portion facing the object surface. The piezoelectric vibration detection / suppression device according to claim 9. 圧電材の層と対向電極とを有する圧電素子と、前記圧電素子を振動の検出または抑制が施されるべき物体の表面に取り付ける接着材の層とを含む圧電式振動検出/抑制装置にして、前記圧電素子はその上に該圧電素子と電気的に組み合わされる電気回路が載置された状態にてカバー部材により前記物体の表面に取り付けられており、前記カバー部材は前記物体の表面に当接するフランジ面と該フランジ面の内側に前記物体の表面より隔置されて該物体の表面に対向する面部を有し、前記面部と前記物体の表面に当接するフランジ面との間の距離と前記圧電素子の厚みの差に相当する厚みにて前記接着材の層が設けられていることを特徴とする圧電式振動検出/抑制装置。
A piezoelectric vibration detection / suppression device including a piezoelectric element having a piezoelectric material layer and a counter electrode, and an adhesive layer for attaching the piezoelectric element to a surface of an object to be subjected to vibration detection or suppression, The piezoelectric element is attached to the surface of the object by a cover member in a state where an electric circuit electrically combined with the piezoelectric element is placed thereon, and the cover member abuts on the surface of the object A distance between the flange surface and a flange surface that is spaced apart from the surface of the object and faces the surface of the object on the inner side of the flange surface; A piezoelectric vibration detecting / suppressing device, wherein the adhesive layer is provided with a thickness corresponding to a difference in thickness of the element.
JP2004203715A 2004-07-09 2004-07-09 Piezoelectric vibration detection / suppression device with controlled adhesive layer thickness Expired - Fee Related JP4552542B2 (en)

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