JP2006007334A - Positioning device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a positioning device, inserting a plug part of a positioning plug mechanism mounted in a base member of the reference side and a taper sleeve in a cylindrical hole of the movable member side to position the movable member, preventing lowering of positioning accuracy due to abrasion chips by removing cutting chips adhering to the outer peripheral surface of the taper sleeve, and reducing the diameter of a rod for pulling the taper sleeve to increase the wall thickness of the plug part. <P>SOLUTION: The main body member of an XY positioning device 3 is provided with a plurality of nozzles 40 for blowing air to the outer periphery of the taper sleeve 13, and pressurized air is supplied to a gap between the taper sleeve and the plug part 12. A rod 14 is constructed by a solid article, and the lower end part of the rod is caught by a regulating pin 29 provided on a piston part. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a positioning apparatus for precisely positioning a movable member by fitting a plug portion and a taper sleeve of a positioning plug mechanism mounted on a base member on a reference side into a cylindrical hole of the movable member to increase the diameter of the taper sleeve.

Various types of positioning and fixing devices have been proposed and put into practical use for positioning and fixing a work pallet used for fixing, transporting and positioning of a workpiece in a machining center or the like to a table or the like of the machining center.
In the automatic positioning device described in Patent Document 1, a datum block is fixed to a base plate on a table side of a machine tool, a plug member protruding upward is provided on the datum block, and a tapered sleeve-shaped intermediate member is provided on the plug member in a circumferential direction. A piston member and a bolt screwed into the piston portion and connected to the upper end portion of the intermediate member are provided on a pull member that is fitted through three rows of metal balls at intervals of 120 degrees, and the plug member is inserted through the piston member. An oil chamber is provided for releasing the part upward, and a plurality of disc springs for retracting and driving the piston part downward are provided.

When positioning the work pallet (movable member) on the base plate, the hydraulic pressure is supplied to the oil chamber, the piston member is released upward, the plug member is inserted into the positioning hole of the work pallet, and the work pallet is covered. After the support surface is received by the support surface of the base plate, the hydraulic pressure of the oil chamber is released, and the intermediate member is moved downward by the elastic force of multiple disc springs through the piston member and bolt to enlarge the diameter, thereby positioning the intermediate member The work pallet is precisely positioned by tightly fitting it in the hole. Patent Document 2 also describes a positioning jig for positioning a workpiece using a T-groove of a table based on the same technical idea.
JP 2003-31572 A JP 2000-107970 A

  In the automatic positioning device described in Patent Document 1, since the work pallet is not equipped with any air blow mechanism for removing cutting chips adhering to the outer peripheral surface of the intermediate member in a state where the work pallet is unloaded from the table, the work pallet Since the outer peripheral surface of the intermediate member must be blown with air by a manual air blow nozzle before the cutting chips are removed, cutting chips must be removed, which is an obstacle in terms of unmanned operation of the machining center.

  In addition, since the bolt is screwed into the shaft portion of the piston member and the intermediate member is connected to the upper end portion of the bolt, not only the number of parts increases, but the diameter of the shaft portion of the piston member is difficult to reduce. It is difficult to reduce the inner diameter, and the thickness of the plug member tends to be small. Therefore, there is a problem that the positioning accuracy is likely to be lowered due to elastic deformation of the plug member. Increasing the thickness of the plug member increases the size of the positioning device.

  An object of the present invention is to provide a positioning device capable of air-blowing the outer peripheral surface of a taper sleeve of a positioning plug mechanism, and to provide a positioning device capable of increasing rigidity by increasing the thickness of a plug portion.

  The positioning device according to claim 1 includes a positioning plug mechanism mounted on a base member on the reference side, and the plug portion of the positioning plug mechanism is fitted into a cylindrical hole of a movable member fixed to the base member. In the positioning device for positioning the movable member in a direction orthogonal to the axis of the plug portion, the positioning plug mechanism is formed integrally with the main body member and the upper end portion of the main body member. A plug portion protruding from the plug portion, the plug portion having a positioning portion whose diameter decreases toward the upper side at least at a part of the outer peripheral surface, and the outer peripheral surface forms a cylindrical surface in the direction of increasing the diameter. An elastically deformable taper sleeve; a rod inserted through the plug portion and having an upper end connected to the taper sleeve; and drive means capable of driving the rod up and down A plurality of nozzles capable of ejecting pressurized air are formed on the outer peripheral surface of the taper sleeve, and air supply means for supplying pressurized air to the plurality of nozzles is provided on the main body member. It is.

  When the movable member is positioned in the direction orthogonal to the axis of the plug portion by the positioning plug mechanism of this positioning device, the diameter of the taper sleeve is slightly reduced with the rod raised relative to the main body member by the driving means. In this state, the movable member is lowered from above, the plug portion and the taper sleeve are inserted into the cylindrical hole of the movable member, and then the rod is driven downward by the driving means with respect to the main body member. The elastic member is elastically deformed in the diameter-enlarging direction and is fitted into the cylindrical hole of the movable member in close contact, and the movable member is positioned with high accuracy in the direction orthogonal to the axis of the plug portion by the positioning plug mechanism.

  When cutting chips and other foreign substances adhering to the outer peripheral surface of the plug portion are removed before setting the movable member, if pressurized air is supplied to the plurality of nozzles from the air supply means, the plurality of nozzles taper. Pressurized air is sprayed onto the outer peripheral surface of the sleeve to reliably remove the cutting chips and other foreign matters, and in this state, the movable member is set on the positioning plug mechanism.

  According to a second aspect of the present invention, there is provided the positioning device according to the first aspect, wherein the rod has a head connected to the upper end of the taper sleeve, and a rod main body integrally formed with the head.

  According to a positioning device of a third aspect, in the invention of the second aspect, the driving means is constituted by a hydraulic cylinder, a lower end portion of a rod main body portion of the rod is screwed and fastened to a piston portion of the hydraulic cylinder, and the piston portion And a restriction pin for receiving the lower end of the rod body and restricting the relative position between the piston and the rod body.

  According to a fourth aspect of the present invention, in the invention of the third aspect, the hydraulic cylinder includes a first oil chamber for driving the rod downward and a second oil chamber for driving the rod upward. To do. According to a fifth aspect of the present invention, there is provided the positioning device according to the fourth aspect, wherein an elastic member is provided in the first oil chamber of the hydraulic cylinder to urge the rod downward.

  The positioning device according to claim 6 includes a positioning plug mechanism mounted on the base member on the reference side, and the plug portion of the positioning plug mechanism is fitted into the cylindrical hole of the movable member fixed to the base member. In the positioning device for positioning the movable member in a direction orthogonal to the axis of the plug portion, the positioning plug mechanism is formed integrally with the main body member and the upper end portion of the main body member. A plug portion protruding from the plug portion, the plug portion having a positioning portion whose diameter decreases toward the upper side at least at a part of the outer peripheral surface, and the outer peripheral surface forms a cylindrical surface in the direction of increasing the diameter. An elastically deformable taper sleeve; a rod inserted through the plug portion and having an upper end connected to the taper sleeve; and drive means capable of driving the rod up and down It, is characterized in that a drivable drive means pulls the rod downward by an elastic force of the elastic member.

  In this positioning device, the same effect as in paragraph [0008] of claim 1 is obtained, but the driving means capable of driving the rod up and down can pull and drive the rod downward by the elastic force of the elastic member. High responsiveness when driven to pull downward can be maintained. In particular, when a plurality of positioning devices are used in combination with each other, it is suitable for application to a positioning device that positions first.

  According to the positioning device of the first aspect, as described in the section of operation, the positioning plug mechanism includes a main body member fixed to the base member on the reference side, a plug portion, a taper sleeve, a rod, and a drive. Therefore, the positioning plug mechanism can position the movable member on the main body member fixed to the base member in the direction orthogonal to the axis of the plug portion.

  In addition, the main body member is provided with a plurality of nozzles capable of ejecting pressurized air on the outer peripheral surface of the taper sleeve, and air supply means for supplying pressurized air to the plurality of nozzles is provided. Pressurized air is supplied to a plurality of nozzles, and pressurized air is sprayed from the plurality of nozzles onto the outer peripheral surface of the taper sleeve, so that cutting chips and foreign matters adhering to the outer peripheral surface of the taper sleeve can be reliably removed. . Since the operation of the drive means and the air supply means can be automatically controlled, the positioning apparatus can be automatically operated.

  According to the positioning device of the second aspect, since the rod has a head connected to the upper end of the taper sleeve and a rod main body formed integrally with the head, the rod inserted through the plug is minimized. The thickness of the plug portion can be ensured as large as possible, and a decrease in positioning accuracy due to elastic deformation of the plug portion can be suppressed.

  According to the positioning device of claim 3, the driving means is configured by a hydraulic cylinder, a lower end portion of the rod main body portion of the rod is screwed and fastened to a piston portion of the hydraulic cylinder, and the rod main body portion is connected to the piston portion. Since a restriction pin that receives the lower end and restricts the relative position between the piston and rod body is provided, a step part (step part with a changed diameter) that restricts the screwing limit position of the rod body part with respect to the piston part is formed. Since it is not necessary to reduce the diameter of the rod as much as possible, it is possible to ensure the thickness of the plug portion as large as possible and to suppress a decrease in positioning accuracy due to elastic deformation of the plug portion.

According to the positioning device of claim 4, since the hydraulic cylinder includes the first oil chamber for driving the rod downward and the second oil chamber for driving the rod upward, the rod is strengthened by the hydraulic cylinder. It can be driven up and down.
According to the positioning device of the fifth aspect, in the invention of the fourth aspect, since the elastic member that is attached to the first hydraulic pressure of the hydraulic cylinder and urges the rod downward is provided, the plug portion is lowered by the driving means via the rod. Responsiveness during driving can be sufficiently enhanced.

  According to the positioning device of the sixth aspect, the same effect as in the paragraph [0015] of the first aspect is obtained, but the driving means capable of driving the rod up and down can be driven by pulling the rod downward by the elastic force of the elastic member. Therefore, it is possible to maintain high responsiveness when the rod is pulled downward. In particular, when a plurality of positioning devices are used in combination with each other, it is suitable for application to a positioning device that positions first.

  A positioning device according to the present invention includes a positioning plug mechanism mounted on a base member on a reference side, and a plug portion of the positioning plug mechanism is fitted into a cylindrical hole of a movable member fixed to the base member. In the positioning device for positioning the movable member in a direction orthogonal to the axis of the plug portion, the positioning plug mechanism is formed integrally with the main body member and the upper end portion of the main body member. A plug portion protruding from the plug portion, the plug portion having a positioning portion whose diameter decreases toward the upper side at least at a part of the outer peripheral surface, and the outer peripheral surface forms a cylindrical surface in the direction of increasing the diameter. A taper sleeve that can be elastically deformed, a rod that is inserted through the plug portion and has an upper end portion connected to the taper sleeve, and drive means that can drive the rod up and down The main body member is provided with a plurality of nozzles capable of ejecting pressurized air on the outer peripheral surface of the taper sleeve, and air supply means for supplying pressurized air to the plurality of nozzles is provided. Is.

Embodiments of the present invention will be described below with reference to the drawings.
This positioning device is a device for accurately positioning a movable member (for example, a work pallet) in a horizontal direction with respect to a base member which is a table of a machining center (numerically controlled machine tool).

  FIG. 1 is a plan view of the base member 1 and a plurality of positioning devices mounted thereon. As shown in FIG. 1, the movable member 2 includes an XY positioning device 3 for positioning the movable member 2 in the XY direction. And three sets of Z direction positioning devices 5 for positioning the movable member 2 in the Z direction (vertical direction), and a θ direction for positioning the movable member 2 in the horizontal rotation direction (θ direction) with the XY positioning device 3 as the center. A positioning device 4 is provided. The XY positioning device 3 and the θ-direction positioning device 4 constitute a positioning system that positions the movable member 2 in all horizontal directions. In addition, description about the said Z direction positioning apparatus 5 is abbreviate | omitted.

Next, the XY positioning device 3 will be described.
As shown in FIGS. 1 to 3, the XY positioning device 3 includes a positioning plug mechanism 10 that is mounted on the base member 1 on the reference side, and the plug portion 12 of the positioning plug mechanism 10 is connected to the base member 1. This is a device for positioning the movable member 2 in a direction orthogonal to the axis of the plug portion 12 by fitting in the cylindrical hole 6 at the bottom of the movable member 2 set to the position.

  The positioning plug mechanism 10 includes a main body member 11, a plug portion 12, a taper sleeve 13, a rod 14, and a double-acting hydraulic cylinder 15 as a driving means capable of driving the rod 14 up and down. . The main body member 11 has a fixing flange portion 11a and a cylindrical portion 11b, and the lower surface of the flange portion 11a is formed on a horizontal reference plane. The cylindrical portion 11b is mounted in a cylindrical hole 1a formed in the base member 1 with the axis centered in a vertical posture, and the three bolt holes 11c are in a state where the lower surface of the flange portion 11a is in contact with the upper surface of the base member 1. The main body member 11 is positioned and fixed to the base member 1 with high accuracy by the fixing bolts 7 respectively inserted into the base member 1.

  The plug portion 12 is integrally formed with the main body member 11 and protrudes upward from the central portion of the upper end portion of the main body member 11, and the entire portion of the outer peripheral surface of the plug portion 12 that engages with the taper sleeve 13 is The positioning portion 16 is formed of a gently inclined taper surface whose diameter decreases toward the top.

  The taper sleeve 13 has an outer peripheral surface formed in a cylindrical surface and an inner peripheral surface formed in a taper surface, and is externally fitted to the plug portion 12 so as to be elastically deformable in the diameter increasing direction. One longitudinal slit 17 for enabling the elastic deformation is formed at one place in the circumferential direction of the tapered sleeve 13, and the tapered sleeve 13 is divided by the longitudinal slit 17. At a position corresponding to the vertical slit 17, one small-diameter steel ball 18 is mounted in the recess on the outer peripheral surface of the plug portion 12, and a part of the steel ball 18 is engaged with the vertical slit 17. Thus, the taper sleeve 13 is restricted from rotating around the axis of the plug portion 12 with respect to the plug portion 12.

  The rod 14 is provided in a state of being inserted through the plug portion 12 concentrically with the plug portion 12 in order to drive the taper sleeve 13 up and down, and a head portion 19 at the upper end portion of the rod 14 is connected to the taper sleeve via the engagement ring 20. 13 is connected so as to be able to transmit the driving force of the lifting drive. The rod 14 has a head 19 connected to the upper end of the taper sleeve 13 and a rod main body 21 integrally formed with the head 19. The head 19 is trapezoidal in a side view and has a tapered outer peripheral surface, and the tapered outer peripheral surface inserts the head 19, the taper sleeve 13 and the plug portion 12 into the cylindrical hole 6 of the movable member 2. It functions as a guide surface when

  An inner flange portion 13 a that protrudes inward is formed at the upper end portion of the taper sleeve 13, the engagement ring 20 is fixed to the upper end portion of the rod body portion 21 by shrink fitting, and the inner flange portion 13 a of the taper sleeve 13 is fixed. It is clamped between the head 19 and the outer peripheral flange portion 20a of the engagement ring 20, and when the rod 14 is raised, the taper sleeve 13 is raised by a few millimeters relative to the plug portion 12, and when the rod 14 is lowered, the taper sleeve 13 is tapered. The sleeve 13 is lowered by a few millimeters relative to the plug portion 12.

  A hydraulic cylinder 15 as a driving means for moving the rod 14 up and down is provided at the lower part of the main body member 11. The hydraulic cylinder 15 has a vertically oriented cylinder hole 22 formed in the main body member 11 and a piston part 23 that is mounted in the cylinder hole 22 so as to be movable up and down. A first oil chamber 24 for driving the rod 14 downward is formed, and a second oil chamber 25 for driving the rod 14 upward is formed below the piston portion 23. The first oil chamber 24 is connected to a hydraulic pressure supply source (not shown) via a hydraulic pressure supply path 26 formed in the base member 1, and the second oil chamber 25 is supplied with hydraulic pressure formed in the base member 1. It is connected to a hydraulic pressure supply source via a path 27.

  A compression coil spring 28 is mounted on the first oil chamber 24 as an elastic member that urges the piston portion 23 downward. The lower end portion of the rod body portion 21 is formed with a screw portion 21a having substantially the same diameter as the other portions of the rod body portion 21. The screw portion 21a is screwed and fastened to the piston portion 23, so Is provided with a lateral regulating pin 29 that receives the lower end of the rod body 21 and regulates the relative position between the piston 23 and the rod body 21. In addition, the lower part of the cylinder hole 22 is formed in the cylindrical part 11b of the main body member 11, and seal members 30 to 32 for sealing the hydraulic pressure of the first and second oil chambers 24 and 25 are provided. .

  Air blow means for removing cutting chips, dust and foreign matter adhering to the outer peripheral surface of the taper sleeve 13 by air blow is provided as follows. An annular groove 35 is formed in the upper end portion of the main body member 11 near the outer peripheral side of the base portion of the plug portion 12, an upper portion of the annular groove 35 is sealed with a ring member 36, and an annular passage 37 is formed at the bottom of the annular groove 35. An inclined air passage 38 that is formed and guides pressurized air to the annular passage 37 is formed in the main body member 11. The inclined air passage 38 includes an air passage in the base member 1 from a pressurized air supply source (not shown). Pressurized air is supplied via 39.

  In the ring member 36, for example, four nozzles 40 having a small diameter are formed at a circumferentially equally divided position toward the outer peripheral surface of the tapered sleeve 13, and an inclined air passage 38 is connected from a pressurized air supply source through an air passage 39. When the pressurized air is supplied to the annular groove 37, the pressurized air is ejected from the four nozzles 40, and the outer peripheral surface of the taper sleeve 13 is blown to remove chips and the like. An annular seal member 38 a is provided at the lower end of the inclined air passage 38.

An upper end annular passage 41 is formed between the upper end of the plug portion 12 and the engagement ring 20 as an air blowing means for injecting pressurized air into the gap between the plug portion 12 and the taper sleeve 13, and this upper end annular passage. 41 communicates with the sliding gap between the plug portion 12 and the taper sleeve 13. A spiral passage 42 is formed in the inner peripheral portion of the taper sleeve 13, and a horizontal passage 43 that connects the spiral passage 42 to the annular passage 37 is formed in the main body member 11.
The pressurized air supplied to the annular passage 37 is supplied to the upper end annular passage 41 through the horizontal passage 43 and the spiral passage 42, and between the plug portion 12 and the taper sleeve 13 from the entire circumference of the upper end annular passage 41. It blows into the sliding gap and air blows cutting chips and abrasion powder adhering to the sliding gap.

Next, the θ direction positioning device 4 will be described with reference to FIGS. 4 and 5.
Among the θ-direction positioning device 4, the same components as those in the XY-direction positioning device 3 are denoted by the same reference numerals and description thereof is omitted, and only different configurations are described.
Positioning portions 12a and 12b, which are locating portions 12a and 12b having a smaller diameter toward the upper side and are in sliding contact with the inner surface of the taper sleeve 13, are provided at two locations in the circumferential direction of the plug portion 12A (two locations having a phase difference of 180 degrees). The other part of the plug part 12A is formed on a vertical ftate surface having a smaller diameter than the positioning parts 12a and 12b.

The θ-direction positioning device 4 is a device that positions the movable member 2 in the horizontal rotation direction (θ direction) with the XY positioning device 3 as the center. Therefore, the direction connecting the positioning portions 12a and 12b is the XY positioning. It is set so as to face in a direction orthogonal to a line connecting the axis of the device 3 and the axis of the θ-direction positioning device 4.
Further, pressurized air is supplied from the pressurized air supply source to the XY positioning device 3 and the θ-direction positioning device 4 through the common air passage 39, and from the hydraulic supply source (not shown), the XY positioning device 3 and θ The hydraulic pressure is supplied to and discharged from the hydraulic pressure supply paths 26 and 27 common to the direction positioning device 4. The taper sleeve 13 has the same structure as the taper sleeve 13. In the θ-direction positioning device 4, the coil spring 28 attached to the first oil chamber 24 is omitted.

Next, the operation and effect of the positioning system for positioning the movable member 2, that is, the operation and effect of the XY positioning device 3 and the θ-direction positioning device 4 will be described.
Before the movable member 2 is moved above the base member 11 and the plug portions 12 and 12 of both positioning devices 3 and 4 are not inserted into the cylindrical holes 6 and 6, pressurized air is applied to both positioning devices 3 and 4. When pressurized air is supplied from the supply source to the annular passages 37, 37 through the air passage 39 and the inclined air passages 38, 38, the pressurized air is supplied from the four nozzles 40 of the positioning devices 3, 4. It blows out and air blows the outer peripheral surface of the taper sleeves 13 and 13. Therefore, since the movable member 2 can be positioned with the outer peripheral surfaces of the taper sleeves 13 and 13 being cleaned, the positioning accuracy is improved by metal powder such as cutting chips adhering to the outer peripheral surfaces of the taper sleeves 13 and 13. It is possible to reliably prevent the decrease.

  In parallel with the air blow, the pressurized air supplied to the upper annular passages 41, 41 through the annular passages 37, 37, the horizontal passages 43, 43 and the spiral passages 42, 42 of the positioning devices 3, 4 is plugged. Since the chips 12 and 12A flow through the sliding gap between the taper sleeves 13 and 13 and are ejected to the outside, the cutting chips and wear powder in the sliding gap are reliably removed. 12A and the taper sleeves 13 and 13 can be reliably prevented from being positioned while cutting chips or wear powder is caught, and the positioning accuracy can be reliably prevented from being lowered by cutting powder or wear powder. be able to. The above operation is the same in the XY positioning device 3 and the θ-direction positioning device 4.

  Next, in the XY positioning device 3 and the θ-direction positioning device 4, the movable member 2 is positioned by the cooperation of the positioning plug mechanisms 10, 10 and the cylindrical holes 6, 6 of the movable member 2. First, the second oil chambers 25, 25 are filled with hydraulic pressure, the rods 14, 14 are held at the upper limit position, and the taper sleeves 13, 13 are elastically deformed to a small diameter state, and the movable member 2 is moved to the base member 1. The plug parts 12 and 12A of both positioning devices 3 and 4 are inserted into the corresponding cylindrical holes 6 and 6, and the movable member 2 is positioned with high accuracy in the Z direction by the three sets of Z direction positioning devices 5. After that, the hydraulic pressures in the second oil chambers 25 and 25 in both positioning devices 3 and 4 are released, and the hydraulic pressure is supplied to the first oil chambers 24 and 24.

  Then, in the XY positioning device 3, the force for lowering the rod 14 is stronger than the θ-direction positioning device 4 by the amount that the compression coil spring 28 is provided in the first oil chamber 24. 14 moves downward, and the taper sleeve 13 that is driven downward by the rod 14 is elastically deformed in the diameter-enlarging direction and is brought into close contact with the cylindrical hole 6 of the movable member 2 to perform positioning in the XY directions. Immediately thereafter, the rod 14 of the θ-direction positioning device 4 is moved downward, and the taper sleeve 13 driven downward by the rod 14 is elastically deformed in the diameter increasing direction so as to be in close contact with the cylindrical hole 6 of the movable member 2 in the XY direction. Perform positioning. As described above, since the positioning by the XY positioning device 3 and the positioning by the θ-direction positioning device 4 are performed in this order, the movable member 2 can be positioned with high accuracy in the X, Y, and θ directions.

Next, other functions and effects of the positioning devices 3 and 4 will be described.
Since the rotation of the taper sleeve 13 with respect to the plug portion 12 is restricted by engaging the steel ball 18 provided in the plug portion 12 with the vertical slit 17 of the taper sleeve 13, the rotation between the taper sleeve 13 and the plug portions 12 and 12A. Since the relative position in the direction does not fluctuate, the plug portions 12, 12A and the taper sleeve 13 are used for positioning in a state of a constant relative rotation position, so that variations in positioning accuracy are reduced.

  Since the rod 14 is formed as an integral part, the structure for connecting the taper sleeve 13 to the rod 14 is simplified, and the number of parts can be reduced. In addition, since the restriction pin 29 for receiving the lower end of the rod main body 21 is provided and the position of the lower end of the rod main body 21 with respect to the piston 23 is determined by the restriction pin 29, the screw 21a of the rod main body 21 is fixed. Since there is no need to determine the position of the lower end of the rod body 21 with respect to the piston 23 at the diameter-reduced stepped portion at the upper end, the rod 14 can be made smaller in diameter, the thickness of the plug portions 12 and 12A is increased, and the plug portion 12 , 12A can prevent the positioning accuracy from being lowered.

An example in which the embodiment is partially changed will be described.
1) In the XY positioning device 3 of the above embodiment, the hydraulic pressure can be supplied to the first oil chamber 24. However, since the compression coil spring 28 is provided, the first oil chamber 24 is configured not to be hydraulic. Also good.
2) In the above-described embodiment, the Z-direction position of the movable member is determined by the Z-direction positioning device 5. It is also possible to do.

3) In addition, it goes without saying that those skilled in the art can implement the present invention by adding various modifications without departing from the spirit of the present invention.

It is a top view of the base member which concerns on the Example of this invention, and its positioning device. It is a longitudinal cross-sectional view of an XY positioning device. FIG. 3 is a cross-sectional view of a rod, a plug portion, and a taper sleeve at the steel ball position in FIG. 2. It is a longitudinal cross-sectional view of a θ positioning device. FIG. 3 is a cross-sectional view of a rod, a plug portion, and a taper sleeve at the steel ball position in FIG. 2.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Base member 2 Movable member 3 XY positioning device 4 (theta) positioning device 6 Cylindrical hole 10 Positioning plug part mechanism 11 Main body member 12, 12A Plug part 13 Taper sleeve 14 Rod 15 Hydraulic cylinder 24 1st oil chamber 25 2nd oil chamber 28 Compression Coil spring 29 Restriction pin 40 Nozzle

Claims (6)

A positioning plug mechanism is provided on the base member on the reference side, and the plug portion of the positioning plug mechanism is fitted into the cylindrical hole of the movable member fixed to the base member, thereby moving the movable member to the shaft of the plug portion. In a positioning device for positioning in a direction perpendicular to the center,
The positioning plug mechanism includes:
A body member fixed to the base member;
A plug portion integrally formed with the main body member and projecting from the upper end portion of the main body member, the plug portion including a positioning portion that decreases in diameter toward the upper side at least at a part of the outer peripheral surface;
A taper sleeve that is externally fitted to the plug portion and has an outer peripheral surface that forms a cylindrical surface and is elastically deformable in a diameter-enlarging direction;
A rod inserted through the plug portion and having an upper end connected to the tapered sleeve;
Drive means capable of driving the rod up and down,
In the main body member, a plurality of nozzles capable of ejecting pressurized air is formed on the outer peripheral surface of the taper sleeve, and air supply means for supplying pressurized air to the plurality of nozzles is provided.
A positioning device characterized by that.   The positioning device according to claim 1, wherein the rod has a head connected to an upper end of the taper sleeve, and a rod main body integrally formed with the head.   The drive means is constituted by a hydraulic cylinder, the lower end portion of the rod main body portion of the rod is screwed and fastened to the piston portion of the hydraulic cylinder, the piston portion receives the lower end of the rod main body portion, and the piston portion and the rod main body portion The positioning device according to claim 2, further comprising a regulation pin that regulates a relative position between the positioning device and the positioning device.   4. The positioning apparatus according to claim 3, wherein the hydraulic cylinder includes a first oil chamber for driving the rod downward and a second oil chamber for driving the rod upward.   The positioning device according to claim 4, further comprising an elastic member that is attached to the first oil chamber of the hydraulic cylinder and biases the rod downward. A positioning plug mechanism is provided on the base member on the reference side, and the plug portion of the positioning plug mechanism is fitted into the cylindrical hole of the movable member fixed to the base member, thereby moving the movable member to the shaft of the plug portion. In a positioning device for positioning in a direction perpendicular to the center,
The positioning plug mechanism includes:
A body member fixed to the base member;
A plug portion that is integrally formed with the main body member and protrudes from the upper end portion of the main body member, the plug portion including a positioning portion that decreases in diameter toward the upper side at least at a part of the outer peripheral surface;
A taper sleeve that is externally fitted to the plug portion and has an outer peripheral surface that forms a cylindrical surface and is elastically deformable in a diameter-enlarging direction;
A rod inserted through the plug portion and having an upper end connected to the tapered sleeve;
Driving means capable of driving the rod up and down, and driving means capable of driving the rod downward by the elastic force of the elastic member;
A positioning device comprising: