JP2005531765A5 - - Google Patents

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Publication number
JP2005531765A5
JP2005531765A5 JP2004516984A JP2004516984A JP2005531765A5 JP 2005531765 A5 JP2005531765 A5 JP 2005531765A5 JP 2004516984 A JP2004516984 A JP 2004516984A JP 2004516984 A JP2004516984 A JP 2004516984A JP 2005531765 A5 JP2005531765 A5 JP 2005531765A5
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JP
Japan
Prior art keywords
holder
engaging
inspection element
workpiece
rotatable member
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JP2004516984A
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English (en)
Japanese (ja)
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JP4361016B2 (ja
JP2005531765A (ja
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Publication date
Priority claimed from GBGB0215152.0A external-priority patent/GB0215152D0/en
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Publication of JP2005531765A publication Critical patent/JP2005531765A/ja
Publication of JP2005531765A5 publication Critical patent/JP2005531765A5/ja
Application granted granted Critical
Publication of JP4361016B2 publication Critical patent/JP4361016B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2004516984A 2002-07-01 2003-07-01 プローブまたはスタイラスの位置調整 Expired - Fee Related JP4361016B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0215152.0A GB0215152D0 (en) 2002-07-01 2002-07-01 Probe or stylus orientation
PCT/GB2003/002810 WO2004003466A2 (en) 2002-07-01 2003-07-01 Probe or stylus orientation

Publications (3)

Publication Number Publication Date
JP2005531765A JP2005531765A (ja) 2005-10-20
JP2005531765A5 true JP2005531765A5 (https=) 2006-08-17
JP4361016B2 JP4361016B2 (ja) 2009-11-11

Family

ID=9939603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004516984A Expired - Fee Related JP4361016B2 (ja) 2002-07-01 2003-07-01 プローブまたはスタイラスの位置調整

Country Status (7)

Country Link
US (2) US7100297B2 (https=)
EP (1) EP1546644B1 (https=)
JP (1) JP4361016B2 (https=)
CN (1) CN1695036B (https=)
AU (1) AU2003251143A1 (https=)
GB (1) GB0215152D0 (https=)
WO (1) WO2004003466A2 (https=)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0019200D0 (en) * 2000-08-05 2000-09-27 Renishaw Plc Bearing arrangement
EP1617172B1 (fr) * 2004-07-16 2007-12-26 Tesa SA Palpeur orientable
GB0501690D0 (en) * 2005-01-27 2005-03-02 Renishaw Plc Articulating device
DE102005032749A1 (de) * 2005-07-13 2007-01-18 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum Antasten eines Werkstücks mit einem Koordinatenmessgerät und Koordinatenmessgeräte
GB0605796D0 (en) * 2006-03-23 2006-05-03 Renishaw Plc Apparatus and method of measuring workpieces
EP2207006B2 (en) 2006-09-05 2022-01-26 Renishaw PLC Surface sensing device
GB0617344D0 (en) * 2006-09-05 2006-10-11 Renishaw Plc Surface sensing device
EP1978328B1 (en) * 2007-04-03 2015-02-18 Hexagon Metrology AB Oscillating scanning probe with constant contact force
DE102007022326B4 (de) 2007-05-08 2022-07-07 Carl Zeiss Industrielle Messtechnik Gmbh Koordinatenmessgerät zum Bestimmen von Raumkoordinaten an einem Messobjekt sowie Dreh-Schwenk-Mechanismus für ein solches Koordinatenmessgerät
DE202007012868U1 (de) * 2007-09-14 2007-12-06 The Gleason Works Corp. Schlittenanordnung für eine Werkzeugmaschine
US7587834B2 (en) * 2008-02-07 2009-09-15 Eaton Homer L Motorized coordinate measuring device
US8250772B2 (en) * 2008-02-07 2012-08-28 Eaton Homer L Spatial measurement and robotic arm device
GB0804114D0 (en) * 2008-03-05 2008-04-09 Renishaw Plc Surface sensing device
US8453337B2 (en) * 2009-06-02 2013-06-04 James Richard Lacy System and method for workpiece coordinate measurements
DE102010006505B4 (de) 2010-01-28 2013-09-19 Carl Zeiss Industrielle Messtechnik Gmbh Koordinatenmessgerät mit passivem Dreh-Schwenk-Mechanismus
JP5410317B2 (ja) * 2010-02-05 2014-02-05 株式会社ミツトヨ 三次元測定機
EP2381212B1 (en) * 2010-04-26 2018-04-25 Tesa Sa Coordinate measuring system for rotationally symmetric workpieces
EP2384851B1 (en) * 2010-05-03 2018-01-03 Tesa Sa Coordinate Measuring System with rotatory adapter
EP2386846A1 (en) * 2010-05-14 2011-11-16 Nordson Corporation System and method for testing of bonds of a semiconductor assembly
EP2386845B1 (en) * 2010-05-14 2024-03-13 Nordson Corporation Apparatus and method for testing of bonds of a semiconductor assembly
GB201013938D0 (en) * 2010-08-20 2010-10-06 Renishaw Plc Method for recalibrating coordinate positioning apparatus
EP2614333B1 (de) * 2010-09-10 2021-08-11 Carl Zeiss 3D Automation GmbH Taststift-anordnung
DE102011100467B3 (de) * 2011-05-02 2012-07-05 Carl Zeiss Industrielle Messtechnik Gmbh Messkopf für ein Koordinatenmessgerät zum Bestimmen von Raumkoordinaten an einem Messobjekt
EP2839240B1 (en) 2012-04-18 2017-09-06 Renishaw PLC A method of analogue measurement scanning on a machine tool and corresponding machine tool apparatus
EP2839241B1 (en) 2012-04-18 2018-08-08 Renishaw PLC Method of finding a feature of an object using a machine tool and corresponding machine tool apparatus
US10037017B2 (en) 2012-04-18 2018-07-31 Renishaw Plc Method of measurement on a machine tool and corresponding machine tool apparatus
JP5982194B2 (ja) * 2012-06-26 2016-08-31 株式会社アルバック 起点座標補正方法
KR101459443B1 (ko) 2012-12-14 2014-11-07 현대자동차 주식회사 센서 위치 제어장치 및 그 제어방법
US9696517B2 (en) * 2014-03-19 2017-07-04 Jefferson Science Associates, Llc Insertion device and method for accurate and repeatable target insertion
EP3134707B1 (en) * 2014-04-23 2022-09-28 Renishaw PLC Calibration of measurement probes
WO2016015775A1 (de) * 2014-07-31 2016-02-04 Carl Zeiss Industrielle Messtechnik Gmbh Tastkopf für ein koordinatenmessgeraet
US9952044B2 (en) * 2015-02-02 2018-04-24 Rolls-Royce North American Technologies, Inc. Multi-axis calibration block
CN105467244B (zh) * 2015-12-10 2018-06-19 苏州世纪福智能装备股份有限公司 一种射频测试机
EP3184960B1 (en) * 2015-12-22 2018-06-27 Tesa Sa Motorized orientable head for measuring system
DE102016201466B3 (de) * 2016-02-01 2017-04-27 Carl Zeiss Industrielle Messtechnik Gmbh Dreheinheit für ein Koordinatenmessgerät
NL1042154B1 (en) * 2016-11-21 2018-05-28 Reginald Galestien a method and direct reference-plane-standards for the fast and accurate determining of the axial position of the gauge plane on the center line of conical objects such as conical gauges, plain or with screw thread, internal and external, with the aim in this gauge plane the accurate measurement of the diameters of plain conical gauges and the major diameter, minor diameter and pitch diameter of screw thread gauges using a known 2 dimensional scanning measuring machine.
DE102017114551B4 (de) 2017-06-29 2021-12-23 Carl Zeiss Industrielle Messtechnik Gmbh Dreh-Schwenk-Mechanismus für ein Koordinatenmessgerät
DE102018115745B4 (de) 2018-06-29 2024-12-05 Carl Zeiss Industrielle Messtechnik Gmbh Dreh-Schwenk-Mechanismus für ein Koordinatenmessgerät
CN110030903B (zh) * 2019-05-31 2020-11-20 重庆丰川电子科技有限公司 键盘底板自动检测装置
GB202012104D0 (en) * 2020-08-04 2020-09-16 Renishaw Plc Measurement method
EP4295107B1 (en) 2021-02-17 2025-01-29 Renishaw PLC Metrology apparatus and corresponding operating method
CN115290018B (zh) * 2022-07-11 2024-10-29 安徽摩格恩轴承有限公司 一种精密轴承测量装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1597842A (en) * 1977-02-07 1981-09-09 Rolls Royce Indexing mechanism
US4523450A (en) * 1981-11-07 1985-06-18 Carl-Zeiss-Stiftung, Heidenheim/Brenz Method of calibrating probe pins on multicoordinate measurement machines
US4485453A (en) * 1982-03-29 1984-11-27 International Business Machines Corporation Device and method for determining the location and orientation of a drillhole
US4523540A (en) 1982-04-12 1985-06-18 The Continental Group, Inc. Adhesive applicator
GB8411437D0 (en) * 1984-05-04 1984-06-13 Renishaw Plc Co-ordinate positioning apparatus
DE3735075A1 (de) 1987-10-16 1989-04-27 Zeiss Carl Fa Pruefeinrichtung und verfahren zur bestimmung der messunsicherheit von koordinatenmessgeraeten
DE3740070A1 (de) * 1987-11-26 1989-06-08 Zeiss Carl Fa Dreh-schwenk-einrichtung fuer tastkoepfe von koordinatenmessgeraeten
GB8906287D0 (en) 1989-03-18 1989-05-04 Renishaw Plc Probe calibration
DE3934056A1 (de) 1989-10-12 1991-05-08 Zeiss Carl Fa Tastkopf fuer koordinatenmessgeraete
US5430948A (en) * 1993-07-12 1995-07-11 Vander Wal, Iii; H. James Coordinate measuring machine certification system
DE19605776A1 (de) 1996-02-16 1997-08-21 Zeiss Carl Fa Koordinatenmeßgerät mit einem Taststift, dessen Orientierung einstellbar ist
US6430828B1 (en) * 1998-04-17 2002-08-13 Electronic Measuring Devices, Inc. Coordinate positioning apparatus with indexable stylus, components thereof, and method of using it
JP3628938B2 (ja) * 2000-06-23 2005-03-16 株式会社ミツトヨ タッチ信号プローブ
JP3763124B2 (ja) * 2001-05-31 2006-04-05 株式会社ミツトヨ タッチ信号プローブの信号処理装置および信号処理方法
GB0114360D0 (en) * 2001-06-13 2001-08-08 Renishaw Plc Stylus orientation

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