JP2005522357A - インクジェットプリントヘッドチップの対称的に作動するインク射出コンポーネント - Google Patents
インクジェットプリントヘッドチップの対称的に作動するインク射出コンポーネント Download PDFInfo
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- JP2005522357A JP2005522357A JP2003583752A JP2003583752A JP2005522357A JP 2005522357 A JP2005522357 A JP 2005522357A JP 2003583752 A JP2003583752 A JP 2003583752A JP 2003583752 A JP2003583752 A JP 2003583752A JP 2005522357 A JP2005522357 A JP 2005522357A
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- 230000015572 biosynthetic process Effects 0.000 description 7
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
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- 229910052719 titanium Inorganic materials 0.000 description 3
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- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
- 239000004408 titanium dioxide Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000002346 layers by function Substances 0.000 description 2
- 230000005499 meniscus Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
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- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
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- 238000010304 firing Methods 0.000 description 1
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- 238000007639 printing Methods 0.000 description 1
- 230000003362 replicative effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1648—Production of print heads with thermal bend detached actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/165—Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
- B41J2002/14435—Moving nozzle made of thermal bend detached actuator
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Ink Jet (AREA)
- Pens And Brushes (AREA)
Abstract
Description
基板と、
基板上に配置されている複数のノズル装置と、
を備えており、
ノズル装置のそれぞれが、
基板の上に基板から隔てられて配置されている能動インク射出構造であって、ルーフと、ルーフ内に画成されているインク射出ポートとを有する、能動インク射出構造と、
基板の上に配置されている静的インク射出構造であって、能動インク射出構造と静的インク射出構造とが、この両方で、インクサプライと流体連通しているノズル室を画成しており、能動インク射出構造が、ノズル室の体積を減少及び増大させてノズル室からインク滴を射出させる目的で、基板の方と基板から離れる方とに静的インク射出構造に対して変位することができる、静的インク射出構造と、
能動インク射出構造を基板の方と基板から離れる方とに静的インク射出構造に対して変位させるように、能動インク射出構造に対して作動するように配置されている、少なくとも二つのアクチュエータであって、能動インク射出構造に実質的に直線状の動きを与えるように構成されておりかつ能動インク射出構造に結合されている、少なくとも二つのアクチュエータと、
を備えている、プリントヘッドチップが提供される。
Claims (12)
- インクジェットプリントヘッドのプリントヘッドチップであって、
基板と、
前記基板上に配置されている複数のノズル装置と、
を備え、
前記ノズル装置のそれぞれが、
前記基板の上に前記基板から隔てられて配置されている能動インク射出構造であって、ルーフと、前記ルーフ内に画成されているインク射出ポートとを有する、前記能動インク射出構造と、
前記基板の上に配置されている静的インク射出構造であって、前記能動インク射出構造と前記静的インク射出構造とが、この両方で、インクサプライと流体連通しているノズル室を画成しており、前記能動インク射出構造が、前記ノズル室の体積を減少及び増大させて前記ノズル室からインク滴を射出させる目的で、前記基板の方と前記基板から離れる方とに前記静的インク射出構造に対して変位することができる、前記静的インク射出構造と、
前記能動インク射出構造を前記基板の方と前記基板から離れる方とに前記静的インク射出構造に対して変位させるように、前記能動インク射出構造に対して作動するように配置されている、少なくとも二つのアクチュエータであって、前記能動インク射出構造に実質的に直線状の動きを与えるように構成されておりかつ前記能動インク射出構造に結合されている、前記少なくとも二つのアクチュエータと、
を備えている、プリントヘッドチップ。 - 前記プリントヘッドチップが集積回路製造技術による製品である、請求項1に記載のプリントヘッドチップ。
- 前記基板がCMOS駆動回路を組み込んでおり、各アクチュエータが前記CMOS駆動回路に接続されている、請求項2に記載のプリントヘッドチップ。
- 複数のアクチュエータが、前記能動インク射出構造を中心として実質的に回転対称となるように配置されている、請求項1に記載のプリントヘッドチップ。
- 前記プリントヘッドチップが、一対の実質的に同一のアクチュエータを含んでおり、前記能動インク射出構造の一対の対向する側面のそれぞれに一つのアクチュエータが配置されている、請求項4に記載のプリントヘッドチップ。
- 前記能動インク射出構造が、前記ルーフから垂下されている側壁を含んでおり、前記側壁の寸法が、前記静的インク射出構造の境界を形成するような寸法である、請求項3に記載のプリントヘッドチップ。
- 前記静的インク射出構造が、前記基板から隔てられておりかつ前記能動インク射出構造の前記ルーフに面しているインク変位形成部を画成しており、前記インク変位形成部が、前記能動インク射出構造が前記基板の方に変位するときに前記インク射出ポートからインクが容易に射出されるような寸法を有するインク変位領域を画成している、請求項6に記載のプリントヘッドチップ。
- 前記基板が複数のインク入口溝を画成しており、一つのインク入口溝が、インク入口開口においてそれぞれの各ノズル室に通じている、請求項7に記載のプリントヘッドチップ。
- 各ノズル装置の前記インク入口溝が、前記インク射出ポートと実質的に位置が合っている前記ノズル室に通じており、前記静的インク射出構造が前記インク入口開口周辺に配置されている、請求項8に記載のプリントヘッドチップ。
- 各アクチュエータが、サーマルベンドアクチュエータの形式であり、各サーマルベンドアクチュエータが、一端において前記基板に固定されておりかつ反対の端部において前記基板に対して可動であり、各アクチュエータが、アクチュエータアームであって、自身に差異的な熱膨張が生じたときに曲がる前記アクチュエータアームを有し、各サーマルベンドアクチュエータが、前記CMOS駆動回路に接続されており、前記サーマルベンドアクチュエータが前記CMOS駆動回路からの電流を受け取ると前記基板の方に曲がる、請求項1に記載のプリントヘッドチップ。
- 前記プリントヘッドチップが、少なくとも二つの結合構造を含んでおり、一つの結合構造が各アクチュエータと前記能動インク射出構造との間に配置されており、各結合構造が、各サーマルベンドアクチュエータの前記反対の端部の弓状の動きと、前記能動インク射出構造の前記実質的に直線状の動きの両方を許容するように構成されている、請求項10に記載のプリントヘッドチップ。
- 前記能動インク射出部材と前記受動インク射出部材の形状が、前記ノズル室にインクが入るときに前記インク射出部材の間の前記ノズル室からインクが漏れることを抑制する目的で、前記インク射出部材と前記インクとが流体シールを画成するような形状である、請求項1に記載のプリントヘッドチップ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/120,439 US6536874B1 (en) | 2002-04-12 | 2002-04-12 | Symmetrically actuated ink ejection components for an ink jet printhead chip |
PCT/AU2002/001168 WO2003086765A1 (en) | 2002-04-12 | 2002-08-29 | Symmetrically actuated ink ejection components for an ink jet printhead chip |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2005522357A true JP2005522357A (ja) | 2005-07-28 |
Family
ID=22390287
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003583752A Pending JP2005522357A (ja) | 2002-04-12 | 2002-08-29 | インクジェットプリントヘッドチップの対称的に作動するインク射出コンポーネント |
Country Status (12)
Country | Link |
---|---|
US (9) | US6536874B1 (ja) |
EP (1) | EP1494865B1 (ja) |
JP (1) | JP2005522357A (ja) |
KR (1) | KR100643657B1 (ja) |
CN (1) | CN1319738C (ja) |
AT (1) | ATE387317T1 (ja) |
AU (1) | AU2002325639B2 (ja) |
CA (1) | CA2482025C (ja) |
DE (1) | DE60225347T2 (ja) |
IL (2) | IL164411A0 (ja) |
WO (1) | WO2003086765A1 (ja) |
ZA (1) | ZA200408131B (ja) |
Families Citing this family (62)
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US6712453B2 (en) * | 1997-07-15 | 2004-03-30 | Silverbrook Research Pty Ltd. | Ink jet nozzle rim |
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US7465030B2 (en) * | 1997-07-15 | 2008-12-16 | Silverbrook Research Pty Ltd | Nozzle arrangement with a magnetic field generator |
US20110228008A1 (en) * | 1997-07-15 | 2011-09-22 | Silverbrook Research Pty Ltd | Printhead having relatively sized fluid ducts and nozzles |
US6682174B2 (en) | 1998-03-25 | 2004-01-27 | Silverbrook Research Pty Ltd | Ink jet nozzle arrangement configuration |
US6855264B1 (en) * | 1997-07-15 | 2005-02-15 | Kia Silverbrook | Method of manufacture of an ink jet printer having a thermal actuator comprising an external coil spring |
US6648453B2 (en) * | 1997-07-15 | 2003-11-18 | Silverbrook Research Pty Ltd | Ink jet printhead chip with predetermined micro-electromechanical systems height |
US20040130599A1 (en) * | 1997-07-15 | 2004-07-08 | Silverbrook Research Pty Ltd | Ink jet printhead with amorphous ceramic chamber |
US7337532B2 (en) * | 1997-07-15 | 2008-03-04 | Silverbrook Research Pty Ltd | Method of manufacturing micro-electromechanical device having motion-transmitting structure |
US7195339B2 (en) | 1997-07-15 | 2007-03-27 | Silverbrook Research Pty Ltd | Ink jet nozzle assembly with a thermal bend actuator |
US7468139B2 (en) * | 1997-07-15 | 2008-12-23 | Silverbrook Research Pty Ltd | Method of depositing heater material over a photoresist scaffold |
US6935724B2 (en) | 1997-07-15 | 2005-08-30 | Silverbrook Research Pty Ltd | Ink jet nozzle having actuator with anchor positioned between nozzle chamber and actuator connection point |
US6984023B2 (en) * | 1999-02-15 | 2006-01-10 | Silverbrook Research Pty Ltd | Micro-electromechanical displacement device |
US6792754B2 (en) * | 1999-02-15 | 2004-09-21 | Silverbrook Research Pty Ltd | Integrated circuit device for fluid ejection |
US6921153B2 (en) * | 2000-05-23 | 2005-07-26 | Silverbrook Research Pty Ltd | Liquid displacement assembly including a fluidic sealing structure |
DE60040622D1 (de) * | 2000-05-24 | 2008-12-04 | Silverbrook Res Pty Ltd | Fluidische dichtung für tintenstrahldüsenanordung |
ATE362847T1 (de) * | 2000-05-24 | 2007-06-15 | Silverbrook Res Pty Ltd | Tintenstrahldruckkopf mit bewegender düse und externem betätiger |
AU2005203480B2 (en) * | 2000-05-24 | 2006-11-23 | Memjet Technology Limited | Inkjet printhead with moveable nozzles |
US7575298B2 (en) * | 2002-04-12 | 2009-08-18 | Silverbrook Research Pty Ltd | Inkjet printhead with ink supply passage to nozzle etched from opposing sides of wafer |
US6962402B2 (en) * | 2002-12-02 | 2005-11-08 | Silverbrook Research Pty Ltd | Inkjet printhead with ink supply passage formed from both sides of the wafer by overlapping etches |
US6536874B1 (en) * | 2002-04-12 | 2003-03-25 | Silverbrook Research Pty Ltd | Symmetrically actuated ink ejection components for an ink jet printhead chip |
US7077493B2 (en) * | 2002-04-12 | 2006-07-18 | Silverbrook Research Pty Ltd | Inkjet printhead with ink chamber inlet etched into wafer |
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- 2002-08-29 JP JP2003583752A patent/JP2005522357A/ja active Pending
- 2002-08-29 DE DE60225347T patent/DE60225347T2/de not_active Expired - Lifetime
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- 2002-08-29 CN CNB028287436A patent/CN1319738C/zh not_active Expired - Fee Related
- 2002-08-29 KR KR1020047015941A patent/KR100643657B1/ko active IP Right Grant
- 2002-08-29 WO PCT/AU2002/001168 patent/WO2003086765A1/en active IP Right Grant
- 2002-08-29 US US10/510,097 patent/US7198356B2/en not_active Expired - Fee Related
- 2002-08-29 AT AT02759892T patent/ATE387317T1/de not_active IP Right Cessation
- 2002-08-29 EP EP02759892A patent/EP1494865B1/en not_active Expired - Lifetime
- 2002-12-02 US US10/307,330 patent/US6666544B2/en not_active Expired - Fee Related
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- 2003-03-24 US US10/394,239 patent/US6641256B1/en not_active Expired - Fee Related
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- 2004-10-08 ZA ZA200408131A patent/ZA200408131B/en unknown
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- 2008-11-17 US US12/272,726 patent/US20090066755A1/en not_active Abandoned
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