JP2005512814A5 - - Google Patents
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- Publication number
- JP2005512814A5 JP2005512814A5 JP2003553680A JP2003553680A JP2005512814A5 JP 2005512814 A5 JP2005512814 A5 JP 2005512814A5 JP 2003553680 A JP2003553680 A JP 2003553680A JP 2003553680 A JP2003553680 A JP 2003553680A JP 2005512814 A5 JP2005512814 A5 JP 2005512814A5
- Authority
- JP
- Japan
- Prior art keywords
- laser
- laser output
- pulse
- link
- output pulses
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims 89
- 239000000758 substrate Substances 0.000 claims 17
- 239000013077 target material Substances 0.000 claims 12
- 230000003287 optical effect Effects 0.000 claims 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 6
- -1 disilicide Chemical compound 0.000 claims 6
- 238000002161 passivation Methods 0.000 claims 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 6
- 230000001902 propagating effect Effects 0.000 claims 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 3
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 3
- 229910052782 aluminium Inorganic materials 0.000 claims 3
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 claims 3
- 229910052802 copper Inorganic materials 0.000 claims 3
- 239000010949 copper Substances 0.000 claims 3
- 230000003247 decreasing effect Effects 0.000 claims 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 3
- 229910052737 gold Inorganic materials 0.000 claims 3
- 239000010931 gold Substances 0.000 claims 3
- 229910052759 nickel Inorganic materials 0.000 claims 3
- QGAXAFUJMMYEPE-UHFFFAOYSA-N nickel chromate Chemical compound [Ni+2].[O-][Cr]([O-])(=O)=O QGAXAFUJMMYEPE-UHFFFAOYSA-N 0.000 claims 3
- 229910052697 platinum Inorganic materials 0.000 claims 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 3
- 229920005591 polysilicon Polymers 0.000 claims 3
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims 3
- 239000010936 titanium Substances 0.000 claims 3
- 229910052719 titanium Inorganic materials 0.000 claims 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 3
- 229910052721 tungsten Inorganic materials 0.000 claims 3
- 239000010937 tungsten Substances 0.000 claims 3
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 claims 3
- 229910021342 tungsten silicide Inorganic materials 0.000 claims 3
- 230000000644 propagated effect Effects 0.000 claims 2
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US34174401P | 2001-12-17 | 2001-12-17 | |
| PCT/US2002/040410 WO2003052890A1 (en) | 2001-12-17 | 2002-12-17 | Processing a memory link with a set of at least two laser pulses |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005512814A JP2005512814A (ja) | 2005-05-12 |
| JP2005512814A5 true JP2005512814A5 (enExample) | 2006-02-09 |
Family
ID=23338848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003553680A Pending JP2005512814A (ja) | 2001-12-17 | 2002-12-17 | 少なくとも２つのレーザパルスの組によるメモリリンクの処理 |
Country Status (9)
| Country | Link |
|---|---|
| JP (1) | JP2005512814A (enExample) |
| KR (1) | KR20040073958A (enExample) |
| CN (1) | CN1293682C (enExample) |
| AU (1) | AU2002357300A1 (enExample) |
| CA (1) | CA2436227A1 (enExample) |
| DE (1) | DE10296468T5 (enExample) |
| GB (1) | GB2390834B (enExample) |
| TW (1) | TWI295491B (enExample) |
| WO (1) | WO2003052890A1 (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7723642B2 (en) | 1999-12-28 | 2010-05-25 | Gsi Group Corporation | Laser-based system for memory link processing with picosecond lasers |
| US7838794B2 (en) | 1999-12-28 | 2010-11-23 | Gsi Group Corporation | Laser-based method and system for removing one or more target link structures |
| US7671295B2 (en) | 2000-01-10 | 2010-03-02 | Electro Scientific Industries, Inc. | Processing a memory link with a set of at least two laser pulses |
| US6777645B2 (en) | 2001-03-29 | 2004-08-17 | Gsi Lumonics Corporation | High-speed, precision, laser-based method and system for processing material of one or more targets within a field |
| US6947454B2 (en) * | 2003-06-30 | 2005-09-20 | Electro Scientific Industries, Inc. | Laser pulse picking employing controlled AOM loading |
| US7616669B2 (en) | 2003-06-30 | 2009-11-10 | Electro Scientific Industries, Inc. | High energy pulse suppression method |
| US20060000814A1 (en) | 2004-06-30 | 2006-01-05 | Bo Gu | Laser-based method and system for processing targeted surface material and article produced thereby |
| DE602006004913D1 (de) | 2005-04-28 | 2009-03-12 | Semiconductor Energy Lab | Verfahren und Vorrichtung zur Herstellung von Halbleitern mittels Laserstrahlung |
| KR100795526B1 (ko) * | 2006-03-02 | 2008-01-16 | 한국표준과학연구원 | 물질상태변이 유발을 통한 레이저 가공방법 및 가공장치 |
| US8367968B2 (en) * | 2007-01-05 | 2013-02-05 | Gsi Group Corporation | System and method for multi-pulse laser processing |
| US8278595B2 (en) * | 2007-03-16 | 2012-10-02 | Electro Scientific Industries, Inc. | Use of predictive pulse triggering to improve accuracy in link processing |
| US10307862B2 (en) * | 2009-03-27 | 2019-06-04 | Electro Scientific Industries, Inc | Laser micromachining with tailored bursts of short laser pulses |
| JP6087916B2 (ja) | 2011-07-05 | 2017-03-01 | エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド | 使用中の音響光学ビーム偏向器および音響光学変調器の温度安定性を実現するためのシステムならびに方法 |
| DE102018200811B4 (de) * | 2018-01-18 | 2020-02-20 | Trumpf Laser Gmbh | Verfahren und Lasersystem zum Erzeugen verstärkter Pulse on Demand-Ausgangslaserpulse |
| US20210305763A1 (en) * | 2020-03-24 | 2021-09-30 | David Stucker | Composite fiber laser assembly |
| US12489269B2 (en) | 2020-03-24 | 2025-12-02 | Photon Prime Incorporated | Composite fiber laser assembly |
| KR102497645B1 (ko) * | 2021-06-23 | 2023-02-08 | 인하대학교 산학협력단 | 금형 표면 레이저 가공하는 방법 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3150322B2 (ja) * | 1990-05-18 | 2001-03-26 | 株式会社日立製作所 | レーザによる配線切断加工方法及びレーザ加工装置 |
| US5656186A (en) * | 1994-04-08 | 1997-08-12 | The Regents Of The University Of Michigan | Method for controlling configuration of laser induced breakdown and ablation |
| US5742634A (en) * | 1994-08-24 | 1998-04-21 | Imar Technology Co. | Picosecond laser |
| US5720894A (en) * | 1996-01-11 | 1998-02-24 | The Regents Of The University Of California | Ultrashort pulse high repetition rate laser system for biological tissue processing |
| US6057180A (en) * | 1998-06-05 | 2000-05-02 | Electro Scientific Industries, Inc. | Method of severing electrically conductive links with ultraviolet laser output |
| US6281471B1 (en) * | 1999-12-28 | 2001-08-28 | Gsi Lumonics, Inc. | Energy-efficient, laser-based method and system for processing target material |
-
2002
- 2002-12-17 TW TW091136366A patent/TWI295491B/zh not_active IP Right Cessation
- 2002-12-17 KR KR10-2003-7010094A patent/KR20040073958A/ko not_active Ceased
- 2002-12-17 DE DE10296468T patent/DE10296468T5/de not_active Withdrawn
- 2002-12-17 CN CNB028047893A patent/CN1293682C/zh not_active Expired - Fee Related
- 2002-12-17 AU AU2002357300A patent/AU2002357300A1/en not_active Abandoned
- 2002-12-17 GB GB0317976A patent/GB2390834B/en not_active Expired - Fee Related
- 2002-12-17 JP JP2003553680A patent/JP2005512814A/ja active Pending
- 2002-12-17 WO PCT/US2002/040410 patent/WO2003052890A1/en not_active Ceased
- 2002-12-17 CA CA002436227A patent/CA2436227A1/en not_active Abandoned
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