JP2005510755A5 - - Google Patents
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- Publication number
- JP2005510755A5 JP2005510755A5 JP2003548011A JP2003548011A JP2005510755A5 JP 2005510755 A5 JP2005510755 A5 JP 2005510755A5 JP 2003548011 A JP2003548011 A JP 2003548011A JP 2003548011 A JP2003548011 A JP 2003548011A JP 2005510755 A5 JP2005510755 A5 JP 2005510755A5
- Authority
- JP
- Japan
- Prior art keywords
- grating
- forming
- segments
- segment
- phase mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000835 fiber Substances 0.000 claims 53
- 238000000034 method Methods 0.000 claims 52
- 238000012937 correction Methods 0.000 claims 50
- 239000000758 substrate Substances 0.000 claims 50
- 229920002120 photoresistant polymer Polymers 0.000 claims 38
- 239000012780 transparent material Substances 0.000 claims 12
- 238000012935 Averaging Methods 0.000 claims 8
- 238000005530 etching Methods 0.000 claims 8
- 238000012545 processing Methods 0.000 claims 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 4
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 claims 4
- 229910052804 chromium Inorganic materials 0.000 claims 4
- 239000011651 chromium Substances 0.000 claims 4
- 229910000423 chromium oxide Inorganic materials 0.000 claims 4
- 230000002452 interceptive effect Effects 0.000 claims 4
- 239000013307 optical fiber Substances 0.000 claims 4
- 238000011161 development Methods 0.000 claims 3
- 238000001459 lithography Methods 0.000 claims 3
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 230000000750 progressive effect Effects 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/940,947 US6567588B2 (en) | 2001-08-28 | 2001-08-28 | Method for fabricating chirped fiber bragg gratings |
| PCT/US2002/026951 WO2003046628A1 (en) | 2001-08-28 | 2002-08-22 | Method for fabricating chirped fiber bragg gratings |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005510755A JP2005510755A (ja) | 2005-04-21 |
| JP2005510755A5 true JP2005510755A5 (enExample) | 2005-11-17 |
Family
ID=25475697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003548011A Pending JP2005510755A (ja) | 2001-08-28 | 2002-08-22 | チャープファイバブラッググレーティングを形成するための方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US6567588B2 (enExample) |
| EP (1) | EP1430343A4 (enExample) |
| JP (1) | JP2005510755A (enExample) |
| AU (1) | AU2002332649A1 (enExample) |
| CA (1) | CA2458886C (enExample) |
| WO (1) | WO2003046628A1 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001242313A (ja) * | 2000-02-28 | 2001-09-07 | Dainippon Printing Co Ltd | 光ファイバー加工用位相マスクの製造方法及びその光ファイバー加工用位相マスクを使用して作製されたブラッグ回折格子付き光ファイバー |
| JP3829325B2 (ja) * | 2002-02-07 | 2006-10-04 | 日本電気株式会社 | 半導体素子およびその製造方法並びに半導体装置の製造方法 |
| US20050042523A1 (en) * | 2003-08-20 | 2005-02-24 | Banqiu Wu | Endpoint detection of plasma-assisted etch process |
| US7909396B2 (en) * | 2004-01-08 | 2011-03-22 | Audiovox Corporation | Automobile entertainment system |
| US7435533B2 (en) * | 2004-06-14 | 2008-10-14 | Photronics, Inc. | Method of forming a semiconductor layer using a photomask reticle having multiple versions of the same mask pattern with different biases |
| US7396617B2 (en) * | 2004-06-14 | 2008-07-08 | Photronics, Inc. | Photomask reticle having multiple versions of the same mask pattern with different biases |
| WO2006014376A1 (en) * | 2004-07-02 | 2006-02-09 | The Government Of The United States Of America, As Represented By The Secretary Of The Navy Naval Research Laboratory | Deformable mirror apparatus |
| US9005848B2 (en) * | 2008-06-17 | 2015-04-14 | Photronics, Inc. | Photomask having a reduced field size and method of using the same |
| US9005849B2 (en) * | 2009-06-17 | 2015-04-14 | Photronics, Inc. | Photomask having a reduced field size and method of using the same |
| US9435944B2 (en) * | 2011-10-11 | 2016-09-06 | Baker Hughes Incorporated | Phase mask period control |
| RU2707663C1 (ru) * | 2019-01-18 | 2019-11-28 | Федеральное государственное бюджетное учреждение науки Институт Ядерной Физики им. Г.И. Будкера Сибирского отделения (ИЯФ СО РАН) | Способ изготовления брэгговской структуры с гофрировкой поверхности |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5499134A (en) | 1994-08-24 | 1996-03-12 | Imra America | Optical pulse amplification using chirped Bragg gratings |
| US5718738A (en) | 1996-11-04 | 1998-02-17 | Lucent Technologies Inc. | Method for making continuously chirped fiber bragg gratings |
| JP3526215B2 (ja) * | 1997-07-03 | 2004-05-10 | 大日本印刷株式会社 | 光ファイバー加工用位相マスク及びその製造方法 |
| EP0974853B1 (en) | 1998-01-20 | 2006-09-13 | Hiroyuki Hoshino | Method for producing chirped in-fibre bragg grating |
| JP2001242313A (ja) | 2000-02-28 | 2001-09-07 | Dainippon Printing Co Ltd | 光ファイバー加工用位相マスクの製造方法及びその光ファイバー加工用位相マスクを使用して作製されたブラッグ回折格子付き光ファイバー |
| US6833954B2 (en) * | 2000-09-20 | 2004-12-21 | Teraxion Inc. | Lithographic method for manufacturing a mask used in the fabrication of a fiber Bragg grating |
| US6778733B2 (en) * | 2001-01-05 | 2004-08-17 | Teraxion Inc. | Lithographic fabrication of phase mask for fiber Bragg gratings |
-
2001
- 2001-08-28 US US09/940,947 patent/US6567588B2/en not_active Expired - Lifetime
-
2002
- 2002-08-22 WO PCT/US2002/026951 patent/WO2003046628A1/en not_active Ceased
- 2002-08-22 EP EP02803958A patent/EP1430343A4/en not_active Withdrawn
- 2002-08-22 CA CA2458886A patent/CA2458886C/en not_active Expired - Lifetime
- 2002-08-22 AU AU2002332649A patent/AU2002332649A1/en not_active Abandoned
- 2002-08-22 JP JP2003548011A patent/JP2005510755A/ja active Pending
-
2003
- 2003-02-19 US US10/369,262 patent/US6868209B2/en not_active Expired - Lifetime
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