JP2005507323A - 湾曲した電気起動のアクチュエータ - Google Patents

湾曲した電気起動のアクチュエータ Download PDF

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Publication number
JP2005507323A
JP2005507323A JP2003541074A JP2003541074A JP2005507323A JP 2005507323 A JP2005507323 A JP 2005507323A JP 2003541074 A JP2003541074 A JP 2003541074A JP 2003541074 A JP2003541074 A JP 2003541074A JP 2005507323 A JP2005507323 A JP 2005507323A
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Japan
Prior art keywords
actuator
segment
edge
segments
tape
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JP2003541074A
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English (en)
Japanese (ja)
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JP2005507323A5 (enExample
Inventor
トップリス、リチャード
バルソド、ニール
シェパード、マーク、リチャード
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１．．．リミテッド
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Publication date
Application filed by １．．．リミテッド filed Critical １．．．リミテッド
Publication of JP2005507323A publication Critical patent/JP2005507323A/ja
Publication of JP2005507323A5 publication Critical patent/JP2005507323A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2027—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having cylindrical or annular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Micromachines (AREA)
JP2003541074A 2001-11-02 2002-10-30 湾曲した電気起動のアクチュエータ Pending JP2005507323A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0126372.2A GB0126372D0 (en) 2001-11-02 2001-11-02 Curved electro-active actuators
PCT/GB2002/004877 WO2003038920A2 (en) 2001-11-02 2002-10-30 Curved electro-active actuators

Publications (2)

Publication Number Publication Date
JP2005507323A true JP2005507323A (ja) 2005-03-17
JP2005507323A5 JP2005507323A5 (enExample) 2006-01-05

Family

ID=9925052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003541074A Pending JP2005507323A (ja) 2001-11-02 2002-10-30 湾曲した電気起動のアクチュエータ

Country Status (8)

Country Link
US (1) US7161279B2 (enExample)
EP (1) EP1446844A2 (enExample)
JP (1) JP2005507323A (enExample)
KR (1) KR20040064268A (enExample)
CN (1) CN100385700C (enExample)
AU (1) AU2002335981A1 (enExample)
GB (1) GB0126372D0 (enExample)
WO (1) WO2003038920A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015005188A1 (ja) * 2013-07-08 2015-01-15 株式会社村田製作所 アクチュエータ

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7732998B2 (en) * 2006-08-03 2010-06-08 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Telescoping cylindrical piezoelectric fiber composite actuator assemblies
JP5123532B2 (ja) * 2007-01-30 2013-01-23 太陽誘電株式会社 マイクロカンチレバー
JP2009055683A (ja) * 2007-08-24 2009-03-12 Toshiba Corp 圧電駆動型ｍｅｍｓ装置および携帯端末
DE102009002631B4 (de) * 2009-04-24 2015-08-20 Michael Förg Piezoelektrischer Antrieb und Mikroventil mit einem solchen
GB201014511D0 (en) * 2010-09-01 2010-10-13 Herrera Derek Drill pipe connection
JP6457151B2 (ja) * 2015-08-31 2019-01-23 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 電気活性又は光活性ポリマーに基づくアクチュエータ又はセンサ装置
JP6464317B2 (ja) * 2015-09-02 2019-02-06 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 電気活性または光活性ポリマーをベースにしたアクチュエータデバイス
US11229927B2 (en) 2015-10-21 2022-01-25 Agency For Science, Technology And Research Ultrasound transducer and method of forming ihe same
US10587210B2 (en) * 2016-03-14 2020-03-10 Ron Varghese Energy sensing and harvesting cantilever
RU2636255C2 (ru) * 2016-04-14 2017-11-21 федеральное государственное бюджетное образовательное учреждение высшего образования "Пермский национальный исследовательский политехнический университет" Пьезоактюатор изгибного типа
EP3620895B1 (en) * 2018-09-04 2022-07-13 Robert Bosch GmbH Reversible actuator, method for producing and device using the same
CN117255969A (zh) * 2021-05-07 2023-12-19 宁波舜宇光电信息有限公司 摄像模组、光学致动器、感光组件及其制造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS612376A (ja) * 1984-06-14 1986-01-08 Ngk Spark Plug Co Ltd シ−ト状圧電体
US5102236A (en) * 1987-05-29 1992-04-07 Ide Russell D Hydrodynamic bearings having a continuous beam mounted support surface
EP0550829A1 (de) 1991-12-05 1993-07-14 Hoechst CeramTec Aktiengesellschaft Verfahren zum Herstellen monolithischer Vielschichtverbunde für Aktuatoren aus ferroelektrischer Keramik
JPH06233557A (ja) * 1993-02-05 1994-08-19 Nikon Corp 超音波モータ
WO1998007183A2 (en) 1996-07-25 1998-02-19 Materials Systems Incorporated Serpentine cross section piezoelectric actuator
US6107726A (en) * 1997-07-25 2000-08-22 Materials Systems, Inc. Serpentine cross-section piezoelectric linear actuator
US6161270A (en) * 1999-01-29 2000-12-19 Eastman Kodak Company Making printheads using tapecasting
US6337465B1 (en) * 1999-03-09 2002-01-08 Mide Technology Corp. Laser machining of electroactive ceramics
JP4117192B2 (ja) * 2001-02-09 2008-07-16 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 超音波変換器及びこの超音波変換器を製造する方法
CN100385699C (zh) * 2001-10-30 2008-04-30 1...有限公司 压电器件和其制造方法
US7005781B2 (en) * 2002-12-11 2006-02-28 J. G. Smits Devices for rotation using piezoelectric benders

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015005188A1 (ja) * 2013-07-08 2015-01-15 株式会社村田製作所 アクチュエータ
CN105453289A (zh) * 2013-07-08 2016-03-30 株式会社村田制作所 致动器
JPWO2015005188A1 (ja) * 2013-07-08 2017-03-02 株式会社村田製作所 アクチュエータ

Also Published As

Publication number Publication date
CN1623240A (zh) 2005-06-01
WO2003038920A3 (en) 2003-11-06
CN100385700C (zh) 2008-04-30
WO2003038920A2 (en) 2003-05-08
KR20040064268A (ko) 2004-07-16
AU2002335981A1 (en) 2003-05-12
GB0126372D0 (en) 2002-01-02
US7161279B2 (en) 2007-01-09
US20050073218A1 (en) 2005-04-07
EP1446844A2 (en) 2004-08-18

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