JP2005502052A5 - - Google Patents
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- Publication number
- JP2005502052A5 JP2005502052A5 JP2003525313A JP2003525313A JP2005502052A5 JP 2005502052 A5 JP2005502052 A5 JP 2005502052A5 JP 2003525313 A JP2003525313 A JP 2003525313A JP 2003525313 A JP2003525313 A JP 2003525313A JP 2005502052 A5 JP2005502052 A5 JP 2005502052A5
- Authority
- JP
- Japan
- Prior art keywords
- magnetic sensor
- conductive strap
- magnetically responsive
- conductive
- responsive material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 3
- 239000012212 insulator Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 229910000838 Al alloy Inorganic materials 0.000 claims 1
- 229910000881 Cu alloy Inorganic materials 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 239000004020 conductor Substances 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
Claims (9)
- 磁気センサであって、
半導体基板と、
半導体基板の上方に形成される磁気応答性の材料と、
導電性ストラップであって、導電性ストラップの少なくとも一部が磁気応答性の材料と前記基板との間に位置するように、磁気応答性の材料のまわりにコイルとして巻かれた導電性ストラップと、を含むことを特徴とする磁気センサ。 - 前記導電性ストラップはコイルを形成する複数のセグメントを含むことを特徴とする請求項１の磁気センサ。
- 前記セグメントは水平及び垂直のセグメントから成ることを特徴とする請求項２の磁気センサ。
- 前記導電性ストラップは非磁気伝導材料を含むことを特徴とする請求項１の磁気センサ。
- 前記導電性ストラップは銅を含むことを特徴とする請求項１の磁気センサ。
- 前記導電性ストラップはアルミニウムを含むことを特徴とする請求項１の磁気センサ。
- 前記導電性ストラップは銅合金又はアルミニウム合金を含むことを特徴とする請求項１の磁気センサ。
- 更に絶縁体を含み、前記磁気応答性の材料は該絶縁体内に埋設されることを特徴とする請求項１の磁気センサ。
- 前記導電性ストラップは、前記コイルを形成する複数の垂直及び水平のセグメントを含むことを特徴とする請求項８の磁気センサ。
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/947,076 US6700371B2 (en) | 2001-09-05 | 2001-09-05 | Three dimensional conductive strap for a magnetorestrictive sensor |
| PCT/US2002/028239 WO2003021283A1 (en) | 2001-09-05 | 2002-09-05 | A three dimensional strap for a magnetoresistive sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005502052A JP2005502052A (ja) | 2005-01-20 |
| JP2005502052A5 true JP2005502052A5 (ja) | 2006-01-05 |
Family
ID=25485482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003525313A Pending JP2005502052A (ja) | 2001-09-05 | 2002-09-05 | 磁気抵抗センサのための三次元ストラップ |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6700371B2 (ja) |
| EP (1) | EP1423721A1 (ja) |
| JP (1) | JP2005502052A (ja) |
| WO (1) | WO2003021283A1 (ja) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7206693B2 (en) * | 2003-04-15 | 2007-04-17 | Honeywell International Inc. | Method and apparatus for an integrated GPS receiver and electronic compassing sensor device |
| US7265543B2 (en) * | 2003-04-15 | 2007-09-04 | Honeywell International Inc. | Integrated set/reset driver and magneto-resistive sensor |
| US7239000B2 (en) * | 2003-04-15 | 2007-07-03 | Honeywell International Inc. | Semiconductor device and magneto-resistive sensor integration |
| KR100697123B1 (ko) * | 2003-07-18 | 2007-03-20 | 야마하 가부시키가이샤 | 자기 센서 및 그 제조 방법 |
| US7126330B2 (en) * | 2004-06-03 | 2006-10-24 | Honeywell International, Inc. | Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device |
| US7420365B2 (en) * | 2006-03-15 | 2008-09-02 | Honeywell International Inc. | Single chip MR sensor integrated with an RF transceiver |
| WO2008120118A2 (en) * | 2007-03-30 | 2008-10-09 | Nxp B.V. | Magneto-resistive sensor |
| US8130067B2 (en) | 2010-05-11 | 2012-03-06 | Texas Instruments Incorporated | High frequency semiconductor transformer |
| US8698490B2 (en) * | 2010-12-15 | 2014-04-15 | Infineon Technologies Ag | Magnetoresistive angle sensors having conductors arranged in multiple planes |
| IT1403421B1 (it) * | 2010-12-23 | 2013-10-17 | St Microelectronics Srl | Sensore magnetoresistivo integrato, in particolare sensore magnetoresistivo triassiale e suo procedimento di fabbricazione |
| JP2014509389A (ja) * | 2011-02-03 | 2014-04-17 | ゼンジテック ゲゼルシャフト ミット ベシュレンクテル ハフツング | 磁界感知デバイス |
| US8947082B2 (en) | 2011-10-21 | 2015-02-03 | University College Cork, National University Of Ireland | Dual-axis anisotropic magnetoresistive sensors |
| US8829901B2 (en) * | 2011-11-04 | 2014-09-09 | Honeywell International Inc. | Method of using a magnetoresistive sensor in second harmonic detection mode for sensing weak magnetic fields |
| US9372242B2 (en) * | 2012-05-11 | 2016-06-21 | Memsic, Inc. | Magnetometer with angled set/reset coil |
| US10288697B2 (en) * | 2015-01-13 | 2019-05-14 | Stmicroelectronics S.R.L. | AMR-type integrated magnetoresistive sensor for detecting magnetic fields perpendicular to the chip |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH651152A5 (de) | 1979-11-27 | 1985-08-30 | Landis & Gyr Ag | Messwandler zum messen eines insbesondere von einem messstrom erzeugten magnetfeldes. |
| DE3420709A1 (de) | 1984-06-02 | 1985-12-05 | Robert Bosch Gmbh, 7000 Stuttgart | Magnetfeldsensor zur messung der feldstaerke eines magnetfeldes und verfahren zu seiner herstellung |
| US4860138A (en) | 1987-11-12 | 1989-08-22 | International Business Machines Corp. | Differentially sensitive single track read/write head design with improved biasing |
| US4847584A (en) * | 1988-10-14 | 1989-07-11 | Honeywell Inc. | Magnetoresistive magnetic sensor |
| US5247278A (en) * | 1991-11-26 | 1993-09-21 | Honeywell Inc. | Magnetic field sensing device |
| ATE171546T1 (de) | 1994-01-31 | 1998-10-15 | Fraunhofer Ges Forschung | Verwendung einer miniaturisierten spulenanordnung hergestellt in planartechnologie zur detektion von ferromagnetischen stoffen |
| US5500590A (en) * | 1994-07-20 | 1996-03-19 | Honeywell Inc. | Apparatus for sensing magnetic fields using a coupled film magnetoresistive transducer |
| US5561368A (en) * | 1994-11-04 | 1996-10-01 | International Business Machines Corporation | Bridge circuit magnetic field sensor having spin valve magnetoresistive elements formed on common substrate |
| US5929636A (en) * | 1996-05-02 | 1999-07-27 | Integrated Magnetoelectronics | All-metal giant magnetoresistive solid-state component |
| US5831426A (en) | 1996-08-16 | 1998-11-03 | Nonvolatile Electronics, Incorporated | Magnetic current sensor |
| US5952825A (en) * | 1997-08-14 | 1999-09-14 | Honeywell Inc. | Magnetic field sensing device having integral coils for producing magnetic fields |
| KR100480749B1 (ko) * | 1998-07-07 | 2005-09-30 | 삼성전자주식회사 | 차동 솔레노이드형 자계검출소자 및 그 제조방법 |
-
2001
- 2001-09-05 US US09/947,076 patent/US6700371B2/en not_active Expired - Fee Related
-
2002
- 2002-09-05 EP EP02757599A patent/EP1423721A1/en not_active Withdrawn
- 2002-09-05 JP JP2003525313A patent/JP2005502052A/ja active Pending
- 2002-09-05 WO PCT/US2002/028239 patent/WO2003021283A1/en not_active Application Discontinuation
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