JP2005343485A - Conveying tray - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve a problem that an entire optical filter including a main surface and a side surface is charged by static electricity generated by friction between the optical filter stored in a conveying tray with the conveying tray, and when the tray is conveyed when covered with a hermetic sheet and the conveying tray is unsealed, outside dust is attracted, and foreign matters can be deposited on the main surface of the optical filter. <P>SOLUTION: The conveying tray of the optical filter formed of a crystalline material is sealed in a hermetic environment, and the humidity of the hermetic environment is kept at 50-65%. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a packaging form of a transport tray that has an effect of suppressing adhesion of fine dust and dirt to the surface of a main surface of an optical filter when transporting the optical filter.

  Optical filters manufactured from piezoelectric crystal materials are prisms (having a high refractive index) that are used to separate the light source input as the image from the lens into the three primary colors of light, which is the image capturing part of image equipment. It is a transparent thin plate. Since it has an important function to separate the light source that is the video input of the video equipment, the processing accuracy of the optical filter in the manufacturing process is very strict, and structurally, multiple thin plates are bonded together for one optical use. Even in a manufacturing method of forming a filter, a complicated manufacturing process and precise surface treatment are performed.

  Therefore, the optical filter is handled very carefully in the manufacturing process, and a single product as an optical filter is made after passing through a plurality of processes. During the manufacturing process, in order to maximize the function as an optical filter, surface treatment processing to improve transmission characteristics with antireflection effect on the main surface through which the light of the optical filter passes is performed. It is also necessary to perform surface coating by chemicals or vacuum deposition.

  Since manufacturing is performed through these manufacturing processes, an optical filter holding tray for encapsulating the optical filter when moving between processes is performed by using, for example, an optical filter as disclosed in JP-A-2001-158494. It has a shape and structure to hold. Until now, the same transport tray has been used for in-process transport and product shipment, and optical filter dimensions tend to be diversified depending on the purpose and application of the product. In addition, it has a storage tray (optical filter) storage shape with anxiety elements for reliable transport, and also transports optical filters while preparing transport trays with shapes that match various dimensions and shapes. The process is currently underway.

In particular, when the present invention is also applied to conveyance with customers, the dustproof effect is enhanced by sealing and packaging so as to cover the conveyance tray. An example of the material used for hermetic packaging is a sheet made of resin, and the interior of hermetic packaging is an atmospheric environment such as dry air, nitrogen atmosphere, vacuum atmosphere, etc. There is also a case of wrapping.
JP 2001-158494 A

  As described above, the optical filter is in the current state where the transport tray used in the manufacturing process, the transport tray used for shipment to the customer, and the transport tray management are required. Due to the tendency to increase the variety of products, the management of the transport tray itself is complicated, such as the need for a transport tray with different storage dimensions. In addition, the shape of the optical filter holder used for transport by the transport tray is such that the optical filter is dropped into the concave portion of the transport tray. Therefore, dust is easily collected due to the concave shape. In order to enhance the dust-proof effect, shipping work is performed in a resin sheet that covers the transport tray. The crystal and the surface coating film are dielectrics, and static electricity is likely to be generated due to friction between the air and the transfer tray, and dust generated from the surroundings is adsorbed by the static electricity.

  Since the generation of static electricity changes according to the humidity, the atmosphere covered with the resin sheet during transport is not airtight because the transport tray covered with the sheet is in a sealed atmosphere. This also affects the optical filter directly stored in the transport tray. If the atmosphere in the sheet is dry, static electricity is generated on the entire surface and side surfaces of the optical filter due to the friction between the optical filter stored in the transport tray and the transport tray. Since it is electrically charged, it will attract external dust and dust when opening a transport tray (including dust and dust generated inside the sheet) covered with a sealed atmosphere sheet. There is a possibility that foreign matter may adhere to the main surface of the optical filter.

  The purpose of the present invention is to suppress the adhesion of dust and debris to the surface of the optical filter main surface described above due to static electricity. Static electricity generated by friction between both the transport tray and the optical filter is caused by the humidity of the atmosphere (transport tray). Because the amount is greatly different (to be enclosed in a resin sheet), the humidity is set so that condensation does not occur on the main surface of the optical filter and the entire optical filter is difficult to be charged with static electricity. The amount of humidity in the resin sheet is controlled so as to be sealed in a range of humidity atmosphere.

As described above, by setting the humidity component in the resin sheet of the transport tray to be enclosed in the resin sheet of the present invention to an appropriate humidity amount, the optical filter made of a crystal material and the main surface of the filter are coated with SiO. _Although dielectrics such as ₂ have a low electrostatic discharge effect, the amount of static electricity generated can be suppressed by maintaining the humidity level of the atmosphere covering the transport tray with a resin sheet at an appropriate value. The adhesion of dust and dirt can be greatly reduced.

  Accordingly, the present invention provides a transport tray for an optical filter made of a crystal material, wherein the transport tray is sealed in a sealed environment, and the humidity of the sealed environment is maintained at 50 to 65%. It is intended as a tray. In short, by adjusting the atmospheric humidity retention amount inside the sheet when the transport tray is covered with a resin sheet to prevent dust, the entire optical filter is set to a humidity level that suppresses the generation of static electricity without causing condensation. This solves the problem.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. In each figure, the same numerals indicate the same objects. FIG. 1 illustrates the concept of the transport tray 2 of the present invention. FIG. 1 shows a state in which a transport tray 2 made of a conventionally used resin material by vacuum forming or the like is enclosed in a resin sheet 1 and measures against dust are taken. Therefore, it is sufficient that the optical filter can be stored in the transport tray 2 without questioning the structure and structure for storing the optical filter of the transport tray 2 or the shape of the cutout inside the transport tray 2.

  The transport tray 2 is sealed with a resin sheet 1, so-called packaging vinyl or the like, so that the transport tray 2 is almost sealed, thereby protecting the optical filter stored in the transport tray 2 from dust and dirt. Can do. When the transport tray 2 is sealed with the resin sheet 1, an optical filter made of a crystal material (for example, a crystal material) is set by setting the relative humidity of the resin sheet 1 within a range of 50 to 65%. It is possible to suppress the generation rate of static electricity generated by friction when the optical filter is placed in the transport tray 2 without causing the whole to condense. FIG. 2 is a plan view showing an example of a conventionally used transport tray 2. FIG. 2A is a view as seen from the upper surface of the transport tray 2, and the optical filter is accommodated one by one in each mass portion. FIG. 2B illustrates a cross section taken along the line AA in FIG.

  According to the present invention, it is possible to greatly reduce the generation of static electricity when the optical filter is housed and transported in the transport tray, and also to a process for transporting and storing a semiconductor integrated circuit (IC) that does not want to generate static electricity. Besides being applicable, it can also be applied to countermeasures to eliminate static electricity generated in the manufacturing process and work process.

It is a conceptual diagram which shows the concept of the conveyance tray of this invention. It is the top view which gave an example of the conveyance tray used conventionally.

Explanation of symbols

1 Resin sheet 2 Transport tray

Claims (1)

In the transport tray for optical filters made of crystalline material,
A transport tray for an optical filter, wherein the transport tray is sealed in a sealed environment, and the humidity of the sealed environment is maintained at 50 to 65%.

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