JP2005340570A - Ebullient cooling device for semiconductor device - Google Patents

Ebullient cooling device for semiconductor device Download PDF

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JP2005340570A
JP2005340570A JP2004158802A JP2004158802A JP2005340570A JP 2005340570 A JP2005340570 A JP 2005340570A JP 2004158802 A JP2004158802 A JP 2004158802A JP 2004158802 A JP2004158802 A JP 2004158802A JP 2005340570 A JP2005340570 A JP 2005340570A
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refrigerant
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semiconductor device
ebullient cooling
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JP4375124B2 (en
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Toru Miyazaki
徹 宮崎
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Fuji Electric Co Ltd
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Fuji Electric Systems Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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Abstract

<P>PROBLEM TO BE SOLVED: To secure an ebullient cooling function for a semiconductor device arrayed on the lower surface of a bottom wall by suppressing the biasing flow of a refrigerant sealed in a tank even in a state that the posture of a cooling unit is slanted, in the object of ebullient cooling device applied for a power converter mounted to a rolling stock. <P>SOLUTION: An ebullient cooling unit 2 is constituted of a flat tank 5 for sealing a liquid phase refrigerant 4 and condensing units 6 arranged continuously on the upper side of the tank. The ebullient cooling device is provided with power semiconductor devices 1 arrayed in parallel on the lower surface of the bottom wall of the tank, and mounted so as to transfer heat to discharge the generating heat of the semiconductor device to the outside of a system utilizing the phase change (evaporation-condensation cycle) of the refrigerant. In such an ebullient cooling device, eaves-like blocks 7 for covering the upper part of the level of the refrigerant in a region excluding a central region in the tank are provided in the tank as a liquid level control member for suppressing the biasing flow of the refrigerant liquid by the slanting of the posture of the device. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、鉄道車両に搭載した電力変換装置などに適用する半導体装置用の沸騰冷却装置に関する。   The present invention relates to a boiling cooling device for a semiconductor device applied to a power conversion device mounted on a railway vehicle.

周知のように、近時の鉄道車両には主電動機を駆動制御する主回路システムとして、パワー半導体デバイスを主回路素子としたコンバータ/インバータ方式の電力変換装置が採用されている。また、この電力変換装置に装備したパワー半導体デバイスの冷却に沸騰冷却方式を採用したものが従来から知られている(例えば、特許文献1,2参照)。   As is well known, a converter / inverter type power converter using a power semiconductor device as a main circuit element is adopted as a main circuit system for driving and controlling a main motor in recent railway vehicles. Moreover, what employ | adopted the boiling cooling system for cooling of the power semiconductor device with which this power converter device was equipped is conventionally known (for example, refer patent document 1, 2).

次に、前記の電力変換装置に適用した沸騰冷却装置の従来構成を図2に示す。図2において、1は電力変換装置のコンバータ,インバータ部を構成する主回路素子としてのダイオード,IGBTなどのパワー半導体デバイス、2は沸騰式の冷却ユニット、3は冷却空気を通風する風胴である。ここで、沸騰式冷却ユニット2は代替フロンなどの冷媒(液相冷媒)4を減圧して封入した平形圧力容器になるタンク5と、該タンク5に連ねてその上面側に風冷式の凝縮部6を組み合わせた構成になり、前記タンク5の底壁の下面には電力変換装置のブリッジ回路を構成する複数のパワー半導体デバイス1を並置配列して伝熱的に装着し、前記凝縮部6は風胴3の中の通風路に配置している。なお、この電力変換装置は全体を外箱で覆い、鉄道車両の床下などに取り付けて搭載する。   Next, FIG. 2 shows a conventional configuration of a boiling cooling device applied to the power conversion device. In FIG. 2, 1 is a converter of a power conversion device, a diode as a main circuit element constituting an inverter unit, a power semiconductor device such as IGBT, 2 is a boiling type cooling unit, and 3 is a wind tunnel through which cooling air is passed. . Here, the boiling type cooling unit 2 is a tank 5 that is a flat pressure vessel in which a refrigerant (liquid phase refrigerant) 4 such as alternative chlorofluorocarbon is decompressed and enclosed, and an air-cooled condensation on the upper surface side of the tank 5. A plurality of power semiconductor devices 1 constituting a bridge circuit of a power converter are juxtaposed on the lower surface of the bottom wall of the tank 5 and mounted in a heat transfer manner. Is arranged in the ventilation path in the wind tunnel 3. The power converter is entirely covered with an outer box, and is mounted and mounted under the floor of a railway vehicle.

上記沸騰冷却装置の原理は周知の通りであり、パワー半導体デバイス1の通電に伴う発生熱がタンク5に伝熱してタンク内に封入した冷媒4を沸騰させ、この際に冷媒が気化潜熱を吸熱する。また、冷媒蒸気は冷媒液面の上方空間に拡散してタンク5から圧力の低い凝縮部6に移動し、ここで風胴3の中を通風する冷却空気(送風ブロアにより周囲外気を取り込んで風胴3に送風する)との熱交換により蒸発潜熱を系外に放熱して凝縮し、その後に液化した冷媒が再びタンク5に流下還流する。この蒸発−凝縮の相変化サイクルを繰り返すことにより、パワー半導体デバイス1の発生熱が効率よく熱輸送されて系外の冷却空気中に熱放散される。
特開平11−3971号公報 特開2003−219507号公報
The principle of the boiling cooling device is well known, and heat generated by energization of the power semiconductor device 1 is transferred to the tank 5 to boil the refrigerant 4 enclosed in the tank. At this time, the refrigerant absorbs latent heat of vaporization. To do. Further, the refrigerant vapor diffuses into the space above the refrigerant liquid level and moves from the tank 5 to the condensing unit 6 where the pressure is low. Here, the cooling air that flows through the wind tunnel 3 (air outside air is taken in by the blower blower) The latent heat of vaporization is dissipated out of the system and condensed by heat exchange with the air sent to the cylinder 3, and then the liquefied refrigerant flows down to the tank 5 and recirculates again. By repeating this evaporation-condensation phase change cycle, the generated heat of the power semiconductor device 1 is efficiently transported and dissipated into the cooling air outside the system.
Japanese Patent Laid-Open No. 11-3971 JP 2003-219507 A

ところで、電力変換装置の半導体デバイスを冷却する手段として鉄道車両に搭載した前記した従来構造の沸騰冷却装置には次記のような課題がある。   By the way, the above-described conventional boiling cooling device mounted on a railway vehicle as a means for cooling the semiconductor device of the power converter has the following problems.

すなわち、車両の加速,減速,横揺れ、および線路の勾配などにより車体が傾くと、図3で表すように冷却ユニット2も一緒に水平姿勢から傾くためにタンク5に封入した冷媒4が流動して液面Hの状態が変化する。この場合に、図示のように冷却ユニットが矢印方向(左下がり)に傾くと冷媒4がタンク内を流動して左側に片寄りし、これと反対の右端側底壁の面域が露呈して冷媒液4に浸されない「液枯れ」の状態となってこの面域には冷媒4の沸騰熱伝達が作用しなくなる。このような状態になると、タンク5の底面に分散配列したパワー半導体デバイス1のうち、右端の列に並ぶ半導体デバイスに対する冷却作用がタンク5との間の熱伝導のみとなって極端に低下し、その結果として半導体デバイス1の温度が許容温度以上に上昇して熱破壊するおそれがある。   That is, when the vehicle body tilts due to vehicle acceleration, deceleration, roll, and track gradient, the cooling unit 2 also tilts from the horizontal posture as shown in FIG. As a result, the state of the liquid level H changes. In this case, as shown in the figure, when the cooling unit is tilted in the direction of the arrow (downward to the left), the refrigerant 4 flows in the tank and shifts to the left side, and the surface area of the right end side bottom wall opposite to this is exposed. In this surface area, the boiling heat transfer of the refrigerant 4 does not act on the surface area because it is in a “liquid withering” state that is not immersed in the refrigerant liquid 4. In such a state, among the power semiconductor devices 1 distributed and arranged on the bottom surface of the tank 5, the cooling action on the semiconductor devices arranged in the rightmost column becomes only the heat conduction with the tank 5 and is extremely reduced. As a result, there is a possibility that the temperature of the semiconductor device 1 rises above the allowable temperature and is thermally destroyed.

このような問題に対して従来では、タンク5の高さを大きくした上で、ここに封入する冷媒4の量を増やしてタンク内での液面高さHが十分高くなるように設計に余裕をもたせ、車両走行中に車体が傾いても冷却ユニット2のタンク5に前記のような「液枯れ」現象が生じないようにすることで対処しているが、このためにタンク5の容積が増大して冷却装置が大型化するほか、封入冷媒も増量して材料費アップ,重量増加などの問題が発生していた。   Conventionally, with respect to such a problem, the height of the tank 5 is increased, and the amount of the refrigerant 4 enclosed therein is increased so that the liquid level height H in the tank is sufficiently high. However, even if the vehicle body is tilted while the vehicle is running, the tank 5 of the cooling unit 2 is dealt with by preventing the above-mentioned “liquid draining” phenomenon from occurring. In addition to the increase in the size of the cooling device, the amount of the enclosed refrigerant was increased, causing problems such as an increase in material cost and an increase in weight.

本発明は上記の点に鑑みなされたものであり、前記の沸騰冷却ユニットのタンク内部に簡単な機能部品を装備することで、冷却ユニットの姿勢が傾いた際にタンク内で冷媒が片寄り流動するのを抑えてタンクの底壁下面に装備した半導体デバイスの沸騰冷却機能を維持できるように改良した半導体装置用の沸騰冷却装置を提供することを目的とする。   The present invention has been made in view of the above points, and by installing a simple functional component inside the tank of the boiling cooling unit, when the cooling unit is tilted, the refrigerant flows in an offset direction in the tank. An object of the present invention is to provide a boiling cooling device for a semiconductor device which is improved so that the boiling cooling function of a semiconductor device mounted on the lower surface of a bottom wall of a tank can be maintained.

上記目的を達成するために、本発明によれば、液相の冷媒を封入した平形のタンクと、該タンクの上部側に連設した凝縮部とからなり、前記タンクの底壁下面にパワー半導体デバイスを並置配列して伝熱的に装着し、半導体デバイスの発生熱を前記冷媒の相変化を利用して系外に放出するようにした沸騰冷却装置において、
前記タンクの内部に、当該装置の姿勢の傾きによって冷媒液がタンク内で片寄り流動するの抑える液面制御部材を設けるものとし(請求項1)、具体的にはその液面制御部材を次記のような態様で構成する。
(1)前記の液面制御部材を、タンク内の中央部を除いた領域で冷媒の液面上方を覆った庇状のブロックで構成する(請求項2)。
(2)前項(1)において、ブロックは、その断面形状が外周から中央の開口部に向けて先細りとなるように上下面にテーパーを付し、冷媒の蒸発−凝縮サイクルに伴いタンクと凝縮部との間を移動する冷媒蒸気,冷媒液を前記テーパー面に沿って導くようにする(請求項3)。
In order to achieve the above object, according to the present invention, a flat tank filled with a liquid-phase refrigerant and a condensing part connected to the upper side of the tank are provided. In the boil cooling device in which the devices are arranged side by side and mounted in a heat transfer manner, and the generated heat of the semiconductor device is released out of the system using the phase change of the refrigerant,
A liquid level control member is provided in the tank to prevent the refrigerant liquid from drifting in the tank due to the inclination of the posture of the apparatus (Claim 1). Specifically, the liquid level control member is The configuration is as described below.
(1) The liquid level control member is constituted by a bowl-shaped block that covers the upper surface of the refrigerant in the region excluding the central portion in the tank.
(2) In the preceding paragraph (1), the block has a taper on the upper and lower surfaces so that the cross-sectional shape tapers from the outer periphery toward the central opening, and the tank and the condensing part are associated with the refrigerant evaporation-condensation cycle. The refrigerant vapor and the refrigerant liquid moving between the two are guided along the tapered surface.

上記の構成によれば、冷却ユニットの姿勢が傾いた場合でも、タンク内に封入した冷媒液がブロックに拘束されて極端に片寄り流動することがなく、タンクの底壁全域が冷媒液で浸った状態を維持する。これにより、従来装置で問題となっていた冷却ユニットの傾きに伴うタンク底壁の「液枯れ」現象発生を抑止し、タンクの下面側に並置配列した半導体デバイスに対する沸騰冷却機能を安定確保して信頼性の向上が図れる。
また、前記の「液枯れ」を効果的に抑止できることで、タンク容積の縮減,冷媒封入量の減量が可能となり、これにより冷却装置の小形,軽量化に寄与できる。
According to the above configuration, even when the posture of the cooling unit is tilted, the refrigerant liquid sealed in the tank is not restrained by the block and flows extremely sideways, and the entire bottom wall of the tank is immersed in the refrigerant liquid. Maintain the state. This prevents the “bottom of liquid” phenomenon on the tank bottom wall that accompanies the tilt of the cooling unit, which has been a problem with conventional equipment, and ensures a stable boiling cooling function for semiconductor devices arranged side by side on the bottom side of the tank. Reliability can be improved.
In addition, since the above-mentioned “liquid withering” can be effectively suppressed, the tank volume can be reduced and the amount of refrigerant filled can be reduced, thereby contributing to the reduction in size and weight of the cooling device.

以下、本発明の実施の形態を図1(a),(b)に示す実施例に基づいて説明する。なお、(a)図は冷却ユニット2の姿勢が水平な定常状態,(b)図は冷却ユニットが傾いた状態を表しており、実施例の図中で図2,図3に対応する部材には同じ符号を付してその説明は省略する。   Embodiments of the present invention will be described below based on the examples shown in FIGS. 1 (a) and 1 (b). (A) shows a steady state in which the posture of the cooling unit 2 is horizontal, and (b) shows a state in which the cooling unit is tilted. In the drawings of the embodiment, members corresponding to FIGS. Are denoted by the same reference numerals and their description is omitted.

すなわち、図示実施例の沸騰冷却ユニット2においては、冷媒4を封入したタンク5の内部に液面制御部材としてブロック7が追加装備されている。このブロック7はタンク5の周壁から中央に向け迫り出して冷媒4の液面Hの上方を覆うようにした庇状の板になり、その中央部位に開口部7aを形成してタンク5の内部空間を上下に連通させている。また、ブロック7のその断面形状が外周から中央の開口部7aに向けて先細りとなるように上下面にテーパーを付し、冷媒の蒸発−凝縮サイクルに伴ってタンク5と凝縮部6との間で上昇,流下移動する冷媒を前記テーパー面に沿って停滞なく誘導するようにしている。   That is, in the boiling cooling unit 2 of the illustrated embodiment, a block 7 is additionally provided as a liquid level control member inside the tank 5 in which the refrigerant 4 is enclosed. The block 7 is a bowl-shaped plate that protrudes from the peripheral wall of the tank 5 toward the center and covers the upper surface of the liquid level H of the refrigerant 4. The space communicates up and down. In addition, the upper and lower surfaces are tapered so that the cross-sectional shape of the block 7 tapers from the outer periphery toward the central opening 7a, and between the tank 5 and the condensing unit 6 in accordance with the refrigerant evaporation-condensation cycle. In this way, the refrigerant moving up and down is guided without stagnation along the tapered surface.

上記の構成において、図1(a)の定常状態では、図2で述べたと同様にパワー半導体デバイス1の発熱を受けてタンク内に封入した冷媒4が蒸発−凝縮サイクルを繰り返して半導体デバイスを冷却する。なお、タンク5で沸騰気化した冷媒蒸気,および凝縮部6で凝縮液化した冷媒液はブロック7のテーパー面に沿って誘導されつつ中央の開口部7aを通じて上下方向に移動し、この蒸発−凝縮サイクルの繰り返しによる熱輸送により半導体デバイス1の発生熱が凝縮部6を通じて系外に熱放出される。   In the above-described configuration, in the steady state of FIG. 1A, similarly to the case described with reference to FIG. 2, the refrigerant 4 that has received heat generated from the power semiconductor device 1 and enclosed in the tank repeats the evaporation-condensation cycle to cool the semiconductor device. To do. The refrigerant vapor boiled and vaporized in the tank 5 and the refrigerant liquid condensed and liquefied in the condensing unit 6 are guided along the taper surface of the block 7 and move up and down through the central opening 7a, and this evaporation-condensation cycle. The heat generated by the semiconductor device 1 is released to the outside of the system through the condenser 6 by heat transport by repeating the above.

一方、当該冷却装置を搭載した鉄道車両の走行中の傾きにより、冷却ユニット2が図1(b)で表すように傾いた場合には、その姿勢の傾き方向に対応してタンク5に封入した冷媒液が図3で述べたようにタンクの低くなった方に流動しようとするが、図示実施例においては、タンク内に設けたブロック7によって冷媒4の片寄り流動が抑止されてその液面Hが図示状態に維持される。したがって、図3で述べたようにタンク5の右端側領域でタンク底壁が冷媒4の液面Hより上方に露呈していわゆる「液枯れ」の状態になることがなく、これにより冷却装置2の姿勢の傾き有無に関係なく、タンク5の下面に並置配列して設置した全てのパワー半導体デバイス1に対する沸騰冷却機能を確保できる。   On the other hand, when the cooling unit 2 is inclined as shown in FIG. 1B due to the inclination of the railway vehicle on which the cooling device is mounted, it is enclosed in the tank 5 corresponding to the inclination direction of the attitude. As described in FIG. 3, the refrigerant liquid tends to flow toward the lower side of the tank. However, in the illustrated embodiment, the offset flow of the refrigerant 4 is suppressed by the block 7 provided in the tank, and the liquid level is reduced. H is maintained in the illustrated state. Therefore, as described in FIG. 3, the tank bottom wall is not exposed above the liquid level H of the refrigerant 4 in the right end side region of the tank 5, so that a so-called “liquid drainage” state does not occur. Regardless of whether the posture is inclined or not, it is possible to secure a boiling cooling function for all the power semiconductor devices 1 arranged in parallel on the lower surface of the tank 5.

本発明の実施例による沸騰冷却装置の構成,作用の説明図で、(a),(b)はそれぞれ冷却ユニットの定常姿勢,および傾斜姿勢の状態を表す図BRIEF DESCRIPTION OF THE DRAWINGS It is explanatory drawing of the structure of a boiling cooling device by an Example of this invention, and an effect | action, (a), (b) is the figure showing the state of the steady attitude | position of a cooling unit, and the inclination attitude | position, respectively. 従来における沸騰冷却装置の構成図で冷却ユニットが定常姿勢の状態を表す図A diagram showing the state of the cooling unit in a steady posture in the configuration diagram of the conventional boiling cooling device 図2の構成で冷却ユニットの姿勢が傾斜した状態を表す図The figure showing the state in which the attitude | position of the cooling unit inclined in the structure of FIG.

符号の説明Explanation of symbols

1 パワー半導体デバイス
2 沸騰冷却ユニット
4 冷媒
5 タンク
6 凝縮部
7 ブロック(液面制御部材)
7a 中央開口部
DESCRIPTION OF SYMBOLS 1 Power semiconductor device 2 Boiling cooling unit 4 Refrigerant 5 Tank 6 Condensing part 7 Block (liquid level control member)
7a Center opening

Claims (3)

液相の冷媒を封入した平形のタンクと、該タンクの上部側に連設した凝縮部とからなり、前記タンクの底壁下面にパワー半導体デバイスを並置配列して伝熱的に設置し、半導体デバイスの発生熱を前記冷媒の相変化を利用して系外に熱放出するようにした沸騰冷却装置において、
前記タンクの内部に、当該装置の姿勢の傾きによって冷媒液がタンク内で片寄り流動するのを抑制する液面制御部材を設けたことを特徴とする半導体装置用の沸騰冷却装置。
It consists of a flat tank filled with a liquid-phase refrigerant and a condensing part connected to the upper side of the tank. Power semiconductor devices are arranged side by side on the bottom wall of the tank, and are installed in a heat transfer manner. In the boiling cooling apparatus in which the heat generated by the device is released from the system using the phase change of the refrigerant,
A boiling cooling device for a semiconductor device, characterized in that a liquid level control member is provided in the tank to prevent the refrigerant liquid from drifting in the tank due to the inclination of the posture of the device.
請求項1記載の沸騰冷却装置において、液面制御部材が、タンク内の中央部を除いた領域で冷媒の液面上方を覆った庇状のブロックであることを特徴とする半導体装置用の沸騰冷却装置。 2. The boiling cooling apparatus according to claim 1, wherein the liquid level control member is a bowl-shaped block that covers the upper surface of the refrigerant in a region excluding the central portion in the tank. Cooling system. 請求項2記載の沸騰冷却装置において、ブロックは、その断面形状が外周から中央の開口部に向けて先細りとなるように上下面にテーパーを付したことを特徴とする半導体装置用の沸騰冷却装置。 3. The boiling cooling device for a semiconductor device according to claim 2, wherein the block has a tapered upper and lower surface so that a cross-sectional shape thereof is tapered from the outer periphery toward the central opening. .
JP2004158802A 2004-05-28 2004-05-28 Boiling cooler for semiconductor devices Expired - Fee Related JP4375124B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109906025A (en) * 2019-04-24 2019-06-18 常州恒创热管理有限公司 A kind of U-shaped temperature-uniforming plate and radiator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109906025A (en) * 2019-04-24 2019-06-18 常州恒创热管理有限公司 A kind of U-shaped temperature-uniforming plate and radiator
CN109906025B (en) * 2019-04-24 2024-02-20 常州恒创热管理有限公司 U-shaped temperature equalization plate and radiator

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