JP2005338053A5 - - Google Patents

Download PDF

Info

Publication number
JP2005338053A5
JP2005338053A5 JP2004359299A JP2004359299A JP2005338053A5 JP 2005338053 A5 JP2005338053 A5 JP 2005338053A5 JP 2004359299 A JP2004359299 A JP 2004359299A JP 2004359299 A JP2004359299 A JP 2004359299A JP 2005338053 A5 JP2005338053 A5 JP 2005338053A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004359299A
Other versions
JP2005338053A (ja
JP4091041B2 (ja
Filing date
Publication date
Priority claimed from KR1020040038357A external-priority patent/KR100556265B1/ko
Application filed filed Critical
Publication of JP2005338053A publication Critical patent/JP2005338053A/ja
Publication of JP2005338053A5 publication Critical patent/JP2005338053A5/ja
Application granted granted Critical
Publication of JP4091041B2 publication Critical patent/JP4091041B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2004359299A 2004-05-28 2004-12-13 触覚センサー及びその製造方法 Expired - Fee Related JP4091041B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020040038357A KR100556265B1 (ko) 2004-05-28 2004-05-28 촉각센서 및 이의 제조방법

Publications (3)

Publication Number Publication Date
JP2005338053A JP2005338053A (ja) 2005-12-08
JP2005338053A5 true JP2005338053A5 (ja) 2007-10-11
JP4091041B2 JP4091041B2 (ja) 2008-05-28

Family

ID=35423578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004359299A Expired - Fee Related JP4091041B2 (ja) 2004-05-28 2004-12-13 触覚センサー及びその製造方法

Country Status (3)

Country Link
US (1) US7313854B2 (ja)
JP (1) JP4091041B2 (ja)
KR (1) KR100556265B1 (ja)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100312129A1 (en) 2005-01-26 2010-12-09 Schecter Stuart O Cardiovascular haptic handle system
KR100703082B1 (ko) * 2005-07-08 2007-04-06 삼성전기주식회사 플렉서블 촉각센서 및 그 제조방법
JP4951930B2 (ja) * 2005-10-21 2012-06-13 株式会社ニコン 半導体集積センサ
KR100735295B1 (ko) * 2005-10-28 2007-07-03 삼성전기주식회사 폴리머 필름을 이용한 플렉서블 촉각센서 제조방법
US7825567B2 (en) * 2006-01-20 2010-11-02 Panasonic Corporation Three-dimensional structure and its manufacturing method
KR100809284B1 (ko) 2006-04-27 2008-03-04 전자부품연구원 촉각센서 어레이 및 그 제조방법
KR100811861B1 (ko) 2006-08-31 2008-03-10 한국표준과학연구원 촉각센서의 제조 방법
EP2057448A4 (en) * 2006-08-31 2014-04-23 Korea Res Inst Of Standards TOUCH SENSOR FOR CURVED SURFACES AND METHOD OF MANUFACTURING THE SAME
EP1931173B1 (en) * 2006-12-06 2011-07-20 Electronics and Telecommunications Research Institute Condenser microphone having flexure hinge diaphragm and method of manufacturing the same
KR20090060877A (ko) * 2007-12-10 2009-06-15 한국표준과학연구원 고온용 촉각센서 및 그 제조 방법
KR101484944B1 (ko) 2008-10-02 2015-01-22 삼성전자 주식회사 전자기기 케이스 및 이의 제조방법
US8069735B1 (en) 2010-11-10 2011-12-06 Artann Laboratories Inc. Tactile sensor array for soft tissue elasticity imaging
US8942828B1 (en) 2011-04-13 2015-01-27 Stuart Schecter, LLC Minimally invasive cardiovascular support system with true haptic coupling
DE102011103848A1 (de) * 2011-05-27 2012-11-29 Deutsches Zentrum für Luft- und Raumfahrt e.V. Sensoreinrichtung
US10013082B2 (en) 2012-06-05 2018-07-03 Stuart Schecter, LLC Operating system with haptic interface for minimally invasive, hand-held surgical instrument
KR101971945B1 (ko) 2012-07-06 2019-04-25 삼성전자주식회사 촉각 측정 장치 및 방법
KR102100925B1 (ko) 2013-03-22 2020-04-14 삼성전자주식회사 기판 구조체, 상기 기판 구조체를 형성하는 방법, 및 이를 구비하는 전기소자
KR101402820B1 (ko) * 2013-04-05 2014-06-27 한국과학기술원 피부 접촉 센서
TWI583931B (zh) * 2016-02-02 2017-05-21 Asia Pacific Microsystems Inc Miniature piezoresistive pressure sensor
CN108217581B (zh) * 2017-01-20 2021-03-16 迈尔森电子（天津）有限公司 一种mems压电传感器及其制作方法
CN108511409B (zh) * 2018-04-19 2021-03-02 苏州晶方半导体科技股份有限公司 半导体芯片的晶圆级封装方法及其封装结构
CN111912462B (zh) * 2020-08-12 2021-12-24 东南大学 一种具有滑动觉、压觉和温度觉的多功能柔性触觉传感器
CN112179410B (zh) * 2020-09-24 2022-03-01 之江实验室 一种多功能柔性触觉传感器及其制备方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4856993A (en) * 1985-03-29 1989-08-15 Tekscan, Inc. Pressure and contact sensor system for measuring dental occlusion
US4766666A (en) * 1985-09-30 1988-08-30 Kabushiki Kaisha Toyota Chuo Kenkyusho Semiconductor pressure sensor and method of manufacturing the same
US6515586B1 (en) * 1998-12-18 2003-02-04 Intel Corporation Tactile tracking systems and methods
WO2005001422A2 (en) * 2003-06-06 2005-01-06 The Board Of Trustees Of The University Of Illinois Sensor chip and apparatus for tactile and/or flow

Similar Documents

Publication Publication Date Title
BE2015C038I2 (ja)
BRPI0518216C1 (ja)
BRPI0515516B8 (ja)
BR122015024347A2 (ja)
JP2005292212A5 (ja)
JP2004238630A6 (ja)
JP2005338053A5 (ja)
BRPI0508029A (ja)
JP2005229561A5 (ja)
JP2004358238A5 (ja)
JP2005331846A5 (ja)
JP2005204085A5 (ja)
JP2005193669A5 (ja)
JP2005349437A5 (ja)
JP2005341401A5 (ja)
BRPI0508033A (ja)
JP2005283623A5 (ja)
CN300763458S (zh) 数码锁
CN300736471S (zh) 抽水马桶
CN300765733S (zh) 瓶子
CN300765107S (zh) 椅子
CN300764069S (zh) 便携式媒体播放机
CN300764034S (zh) 便携式媒体播放机
CN300763786S (zh) 传感器壳体
CN300741012S (zh) 瓶