JP2005319510A - Method for manufacturing hollow body of polygonal section and hollow body of polygonal section - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a hollow body of polygonal section and its product used for manufacturing apparatus for semi-conductor, liquid crystal, etc., with which the working time can be shortened, the corner-shaping in a corner part can be formed while reducing the excessive thickness, and the further larger product and the larger product into a prescribed size in the same press facility can be manufactured by utilizing the extension of side part to the excessive thickness. <P>SOLUTION: In the method for manufacturing the hollow body of polygonal section, performing the enlargement of diameter and the formation with the press for forging, A flat plate-shaped upper anvil at the outside of a hollow blank, and a flat-shaped lower anvil at the inside thereof, are used and the hollow body of polygonal section is produced by performing the formations of the side part and the corner part. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a method for producing a polygonal cross-section hollow body used in, for example, a semiconductor or liquid crystal production apparatus (chamber), and a polygonal cross-section hollow body produced by the method.

  The size of semiconductor and liquid crystal manufacturing apparatuses is increasing. In particular, a metal hollow body used in a liquid crystal manufacturing apparatus, for example, a polygonal cross-section hollow body made of aluminum (Al) alloy has a side exceeding 2 m. In recent years, the size has been increased to more than 3 m, and establishment of a manufacturing technique for a large polygonal cross-section hollow body is particularly important.

  In general, methods for producing a polygonal cross-section hollow body include a method of welding a rolled material and a method of cutting from an ingot without performing forging, but the product is inferior in airtightness or after cutting. There is a quality problem in which defects are exposed on the product surface. In addition to the above-mentioned method, a method is also known in which a bamboo ring-shaped hollow body produced by cylindrical extending forging is cut into a circular shape and cut into a product shape, but a core bar having the same size as the inner diameter at the time of forging is required. Therefore, the method is inferior in versatility, and this method is not particularly suitable for producing a large polygonal cross-section hollow body.

  Furthermore, methods for producing a ring-shaped material by a diameter forging method, a hole expanding forging method (see, for example, Patent Document 1), a ring mill method, etc., and cutting this into a product shape have been conventionally used. This method has no problem in terms of quality because plastic processing such as forging is performed, but since the product is directly cut from the ring-shaped material, the amount of material input is large, and as a result, the amount of cutting waste increases and the cutting process is long. There is a drawback that it takes time.

As a method suitable for manufacturing a polygonal cross-section hollow body, the present applicant first forged a ring-shaped material into a material having a shape similar to a product, and then performed a cutting process with a relatively small amount of cutting. The manufacturing method of the polygonal cross-section hollow body which needs a short-time cutting process was proposed (refer patent document 2).
In this case, as shown in FIG. 8, a flat anvil is used as the upper anvil, a core bar 14 having a square section of 400 mm on one side is used as the lower anvil, and the ring-shaped material 1 is formed into an octagonal cross section. The hollow body material 15 is forged and then cut into a product 16.

JP 54-127864 A Japanese Patent Laid-Open No. 2002-224792

In the case of the above-mentioned Patent Document 2, the forging work, which is the molding of the side portion, is performed using a 400 mm cored bar. In this case, it is empirically limited to be performed at a pitch of about 280 mm. As the size of the material increases, the time required to form the polygonal product increases. When one side exceeds 2 m, the required time increases remarkably.
Further, the above patent document discloses a cornering method using a V-shaped anvil as an upper anvil. However, it cannot be applied to the case where the polygonal diagonal length defining the cross-sectional shape of the hollow body material exceeds the open height of the press for pressing. Alternatively, in order to make a corner for a product by this method, the material must be formed with a corner with a ring diameter that is sufficiently smaller than the open height, and then the side is forged. The elongation must be large. In general, the forging work for polygonal sides is less efficient than the forging work for ring-shaped materials (expansion forging), and the more forging work for each side, the more for each side. Length unevenness is likely to occur, and it is difficult to adjust the length.

Moreover, in the said patent document, in order to forge the side part of a hollow body raw material, a flat metal plate is used as an upper metal plate (upper mold), and a polygonal bar-shaped core metal is used as a lower metal plate. When forging work is performed under such an anvil usage condition, the outside of the side is difficult to enlarge and the inside of the side is easily enlarged, so the thickness, outside dimensions, and inside dimensions of the side can be controlled freely. Is difficult. In fact, according to the knowledge of the inventors, the outside dimension is often insufficient even though the inside dimension has reached the target dimension, and until the hollow body having the set size and cross-sectional shape is obtained. It took a long time.
In view of the above problems, the object of the present invention is to shorten the working time, reduce the excess of the corner at the time of square forming, and further use the excess ensured there for forging the side. The present invention provides a method and a product in which a larger product from the same material amount and a larger product can be manufactured to a predetermined size in the same press facility.

That is, the present invention
(1) A method of manufacturing a polygonal cross-section hollow body that is expanded and shaped by a forging press, using a flat plate on the outside of the hollow material and a flat plate on the inside, A method for producing a polygonal cross-section hollow body, characterized by performing side molding and corner molding,
(2) In forming the corner, after pressing the upper corner of the flat metal underlay at a position corresponding to the inner corner of the target polygonal cross-section hollow body, the hollow body-shaped material The method for producing a polygonal cross-section hollow body according to (1), characterized in that it is installed by rotating it around its central axis by 5 ° to 30 °, and then pressurizing.
(3) In forming the side portion, as the flat upper metal plate and the flat lower metal plate, those having the same width or different widths are used to control the amount of forging on the inside and outside of the side portion. (1) The method for producing a polygonal cross-section hollow body according to
(4) When the hollow material has a ring shape, when the region corresponding to the corner of the target polygonal cross-section hollow body reaches a predetermined thickness in the diameter expanding step. Any one of (1) to (3), wherein the predetermined thickness of the region is kept as it is, and only the portion corresponding to the side portion of the target polygonal cross-section hollow body is continuously subjected to diameter expansion forging. A method for producing a polygonal cross-section hollow body according to item 1,
(5) In forming the side portion and the corner portion, a flat anvil having a convex portion is used as the upper anvil or the lower anvil, and the multiple according to any one of (1) to (4) Manufacturing method of square cross-section hollow body,
(6) The method for producing a polygonal cross-section hollow body according to any one of (1) to (5), wherein the polygonal cross-section hollow body is a large polygonal cross-section hollow body.
(7) A polygonal cross-section hollow body manufactured by the manufacturing method according to any one of (1) to (6) above, and
(8) The polygonal cross-section hollow body is any one of polygonal cross-section hollow bodies made of aluminum alloy, magnesium alloy, titanium alloy, and stainless steel, and is used in a semiconductor or liquid crystal manufacturing apparatus. The polygonal cross-section hollow body described in (7),
Is to provide.

According to the present invention, in the polygonal cross-section hollow body, it is possible to freely control the amount of forging on the outside and inside of the side portion, and to linearly form the corner portion, thereby improving the efficiency and shortening of the forging work. Can do. Moreover, since it becomes possible to reduce the surplus remaining in a corner | angular part significantly compared with the conventional method, it becomes possible to manufacture the product of a larger polygonal cross-section hollow body within the given installation restrictions.
In addition, the obtained hollow body (product) having a polygonal cross section has a predetermined size and shape, is excellent in airtightness, and has sufficient strength even if it is large.

The manufacturing method of the polygon cross-section hollow body of this invention and the polygon cross-section hollow body manufactured by it are demonstrated in detail with reference to drawings. In addition, in each figure, the same code | symbol is attached | subjected to the same element and the overlapping description is abbreviate | omitted.
The polygonal cross-section hollow body (sometimes referred to as “product”) of the present invention may have any size, but the maximum diagonal length of the cross-sectional shape is generally 1200 mm or more, preferably 1400 mm to 4700 mm. A large polygonal cross-section hollow body is preferred.
In the present invention, as shown in FIG. 1, the upper and lower anvils 2 and 3 are both flat. The width can be appropriately set, but is preferably 600 mm to 2500 mm, more preferably 900 mm to 1800 mm. For the products of the present invention, if you try to use a core metal with a regular polygonal cross section and a large cross section difference, the work height range during forging work must be increased, and work safety and efficiency And the cost of the cored bar itself is significantly increased. Of course, when using an anvil with a width of 400 mm or less, a conventional cored bar can be used. The length of the underlay used in the present invention is at least about 100 mm longer than the target product length in consideration of forging extra length, product shape, size variation, etc., and considering workability. . Further, the thickness of the flat underlay is appropriately selected depending on the actual situation, but is preferably 200 mm or more, although a thickness sufficient to withstand the load during pressurization is appropriately selected. The corner of the lower anvil has a sufficiently large curvature (R removal) in order to avoid stress concentration during pressurization and material galling during forging, but if the curvature R is too large, the inner corner of the hollow body Since the R of the part becomes large and the surplus amount of the corner part becomes large, the curvature R is preferably 30 to 60 mm.
By using such a wide flat plate anvil, it is possible to increase the pitch by molding while reshaping the square forging, compared to the case where a core having a small dimension corresponding to the width, for example, 400 mm is used. It is a forging method that can be shaped and straightened while suppressing deformation in a much shorter time and efficiently.

  In the present invention, the corners of the hollow material can be efficiently forged and formed by manipulating the flat upper and lower anvils. Apply a hollow material of a predetermined dimension so that the upper corner of the flat bottom metal mating line coincides with the position corresponding to the inner corner of the target polygonal cross-section hollow body (product). Press. At this time, the inner corner portion is formed with high precision according to the curvature of the upper corner of the flat plate underlay as well as the corner is formed, and the side portion is formed corresponding to the width of the flat plate anvil.

  In the present invention, when the ring-shaped material is used as the hollow body-shaped material, the shape of the corner portion becomes the “natural” shape as formed by the above-described method. That is, only the material located between the upper anvil and the lower anvil is pressed, and the corner is formed only at the portion that the inner anvil reaches, and the other portions are not formed. This “occurrence” can be efficiently performed by using a flat anvil without being restricted in size even for a large material.

First, as shown in FIG. 2, the corner portion is formed by substantially matching the inner corner portion of the hollow body material 4 (shown by dotted lines) being forged and the upper corner portion of the lower anvil in the press. Next, the hollow body material 4 is rotated around its central axis by 5 to 30 ° and stopped in that state (solid line portion). Here, the rotation angle is appropriately determined according to the shape of the “occurrence” 5 and the dimensions of the material, but from the experience of the inventors, it has been found that the origin is resolved within the above angle range. . Then pressurize with a press until the “occurrence” is resolved. By this method, the corners can be taken out firmly. That is, the position of the corner is shifted with respect to the press, and it can be used for extending the side portion by pressing the surplus wall that protrudes with an appropriate thickness.
Thus, for example, the hollow cross-section of the hollow body material 4 shown in FIG. 2 with a solid corner, the polygonal cross-section hollow 6 as shown in FIG. 3, and the inner octagonal outer quadrilateral cross-section as shown in FIG. The hollow body 9 can be obtained and used as a product.
In the conventional method, the thickness at the corner portion remains as it is at the diameter expansion ring, but the unnecessary extra thickness at the corner portion can be greatly reduced by the method of the present invention. For example, with regard to the appearance shape, it is possible to reduce the “occurrence” to the shape of the inner corner portion, which is conventionally C300 mm to C400 mm, to a shape of C120 mm or less in the method according to the present invention.

In the method of the present invention, it is preferable to control the amount of forging on the outer side and the inner side of the hollow material. When forging each side of a hollow material with an upper and lower anvil (or core metal), prepare multiple upper and lower anvils (core metal) with different widths and assemble them appropriately. By working together, it is possible to freely control the respective dimensional change amounts on the outer side and the inner side.
Two types (for example, 900 mm and 400 mm) having a wide width and a narrow width are prepared for the upper and lower anvils. A flat metal plate 7 having a convex portion as shown in FIG. 4 can also be used as a narrow metal plate. A flat metal plate having a convex portion can be used as a narrow metal plate for controlling the amount of forging and is convenient for forming a corner. For example, when using a flat underlay with a convex part, compared to a flat anvil without a convex part, the meat at the inner corner of the material can be moved to the part surrounded by the convex part and the flat part, Effective use of meat at the corners. In addition, when the upper anvil is installed on the top, the position where the convex portions of the upper anvil and the lower anvil are shifted can shift the shearing force to move the meat at the outer corner.

This is because the contact area between the upper anvil and the material is different from the contact area between the lower anvil (core metal) and the material when forging the sides using the upper and lower anvils (core metal). Thus, there is a difference in the amount of forging between the outside and inside at the side. Using this feature, the present invention adjusts the amount of deformation on the outside and inside of the side portion by performing forge work while appropriately changing the combination of the widths of the upper and lower anvils as described above. Dimensional shape is possible.
For example, in the forging process, if the outside is overstretched and the inside is understretching, the upper anvil is wide and the lower anvil (core) is narrow, the outside is understretching and the inside In the case of excessive forging, the upper anvil is narrow (or a flat anvil with a convex portion) and the lower anvil is wide. Further, in the case where the amount of forging on the outside and the inside is advanced in the same manner, both the upper and lower anvils may be narrow in order to increase the amount of forging. If the amount of forging is small and the main purpose is to adjust the shape of the sides, both the upper and lower anvils should be wide. By doing so, the amount of forging and stretching can be controlled, and the desired shape can be formed efficiently and accurately.

In order to produce the polygonal cross-section hollow body of the present invention more efficiently, the following method can be employed in the diameter expansion step of the present invention.
(Use of stepped ring-shaped material)
The target polygonal cross-section hollow body (product) needs to have a thicker corner than a side. Therefore, in the diameter expansion process of the ring-shaped material as the hollow material, the ring-shaped material corresponds to the corner of the product when the area corresponding to the corner of the product reaches the required thickness. Only the portion is kept as it is, and only the portion corresponding to the side portion of the product is continuously subjected to diameter expansion forging. Then, a stepped ring-shaped material 8 as shown in FIG. 5 is obtained.
In the stepped ring-shaped material shown in FIG. 5, the stepped portion is built up on the outer and inner diameter sides of the ring, but flat pressing performed when expanding the diameter (pressing the height direction to remove irregular irregularities in the height direction). It is also effective to build up by increasing the height of one side by about 10 to 20 mm from the other side in the region corresponding to the corner of the product. This is because when the polygon is formed from the ring, the corner portion has a large amount of deformation, so that the material is pulled to prevent the occurrence of sink marks (dents) in the height direction.
In the actual process, it is preferable to mark the position corresponding to the side portion of the stepped ring-shaped material with a chalk or the like.
Thereafter, if polygon molding is performed by the method described above, the time required for the polygon molding can be shortened. This is because the forming of the ring, that is, the diameter expanding operation is easier than the forging and forming of the side portions of the polygon and can be performed in a short time.

(Use of rectangular hollow material)
As illustrated in FIG. 6, the center portion of the substantially rectangular parallelepiped slab 10 and two locations corresponding to the inner dimensions of the product, preferably two locations whose distance from the center portion is about 3/8 of the inner dimension of the product. A through hole 11 parallel to the axial direction is opened at a position, and a notch 12 penetrating in the axial direction (thickness direction) connecting the through holes is formed. A rectangular hollow material can be obtained by placing the slab material in a vertical state and placing it in the press.
Alternatively, as illustrated in FIG. 7, the lower part of the material is fixed to the press head in a state where the slab 10 with the cut is laid sideways, a wire or the like is passed through the center hole, and the press is attached to the press anvil. By pulling up, a square hollow material 13 can be obtained.
Then, it is only necessary to perform polygonal molding by the above-described method, and a hollow body-like material can be produced in a shorter time than the forging diameter expanding operation.

The metal used in the production method of the present invention may be any commercially available metal, such as an aluminum alloy, a magnesium alloy, a titanium alloy, and stainless steel, and an aluminum alloy is particularly preferable.
Since the polygonal cross-section hollow body obtained in this way is a forged product close to the intended shape and dimensions, a simple final finishing process is performed as necessary. And this polygonal cross-section hollow body is excellent in airtightness and suitable as a structural member, so it can be used in semiconductor and liquid crystal manufacturing equipment such as chamber walls of etching equipment and CVD film forming equipment. It is suitable for.

The present invention will be described more specifically with reference to the following examples. However, the present invention is not limited to these examples, and can take various embodiments within the scope described in the claims. is there.
(Example 1)
Ingredient composition Si: 0.25% by mass (hereinafter, all shown by mass%), Fe: 0.40%, Cu: 0.10%, Mn: 0.05%, Mg: 2.5%, Cr: 0.0. An Al alloy slab (580 × 1450 × 1450 mm, 3.3 t) was obtained from an Al alloy consisting of 25%, Zn: 0.05%, the balance Al and inevitable impurities. This is repeatedly forged to produce a cylindrical material, and then a through hole is punched in the center to make a hollow material, and then a core metal is passed through the through hole, and a flat metal mat placed on the outside of the core metal. The ring-shaped material 1 (outer diameter 2500 mm, inner diameter 2120 mm, height 710 mm) was produced by expanding the diameter forging.

  First, rough corner forming was performed on the ring-shaped material 1 thus prepared as shown in FIG. That is, a flat metal anvil having a width of 1500 mm was used as an upper metal anvil, and a wide flat metal anvil having a width of 1500 mm and a thickness of 300 mm was used as a lower anvil instead of a conventionally used core metal. The rectangular cross-section hollow body is sequentially pressed four times so that the width direction or length direction of the lower anvil is inscribed in the inner diameter of the material and each corner portion of the square cross-section hollow body coincides with the upper corner R of the lower anvil. It was molded into the general shape. (In FIG. 1, the second, third, and fourth pressures are shown on the right, lower, and left, respectively, but these are positions shown for convenience. In practice, the ring-shaped material 1 is rotated and pressed. (From the top.)

  As described above, after forming a hollow body having a rough quadrangular cross section, as an upper metallack, the overall width is 1000 mm, the convex part width is 400 mm, and the convex part corner is indicated by an arrow A as shown in FIG. And a corner metal plate 7 having a convex part with a radius R of 20 mm to 50 mm was used, and forging work was performed on each side using a core metal having a side of 400 mm as a lower metal plate. Here, the forging work was performed alternately on opposite sides. In other words, after forging one side, rotate the material by 180 ° to forge the second side, then rotate the material by 90 ° to forge the third side, and further 180 ° The work of forging, in which the material is rotated to forge the fourth side, was defined as one cycle.

  Subsequently, by adjusting the combination of the upper and lower anvils (core metal) as appropriate, the inner and outer dimensions of the sides are controlled, each side is forged to some extent, and then the total shape gauge of the delivered product shape Further, the forging work was repeated until the side length (size) was about 70% to 80% of the total type gauge.

After that, a “cornering” operation was performed by molding the corner (see FIG. 2). The inside corner of the rectangular cross-section hollow body material 4 that has been forged in the press is aligned with the upper corner of the lower anvil (shown with dotted lines), and then the material is “made” around its axis. Judging from the shape, it was rotated by 15 °, stopped, and press-pressed until the surplus disappeared.
With this “square out”, it was possible to move a large amount of surplus that had conventionally been in the four corners, extending the outer dimension by 200 mm, and reducing the inner four corners from C350 mm to C120 mm.
In the four corner portions, the wall thickness at the time of the ring remained in the conventional method, but the obtained octagonal cross-section hollow body (outer length: 2210 × 2000 mm, wall thickness: side portion 180 mm / corner portion 260 mm, high S: 665 mm) was able to significantly reduce unnecessary extra corners.
Table 1 shows the upper anvil, the lower anvil, the core bar and the like used in this example.

(Example 2)
Next, an example through a stepped ring-shaped material is shown (see FIG. 5).
When the diameter of the ring-shaped material similar to that in Example 1 is expanded and the region corresponding to the apex of the product hollow body has a thickness of 260 mm, the ring material has a position corresponding to the corner of the product hollow body. Marking with high temperature chalk stopped further expansion of the part. On the other hand, only the portion corresponding to the side portion of the product was continuously expanded in diameter to form the stepped ring-shaped material 8.
Thereafter, a large hollow body 9 having an inner octagonal shape and an outer rectangular shape as indicated by a dotted line in FIG. The ring forming, that is, the diameter expanding operation is easier than the forging of the side portion of Example 1, and the forging time until the product shape is made is shortened by about 10% compared to Example 1.

(Example 3)
An embodiment in the case of using a rectangular hollow material will be described.
A through hole 11 is formed by a punch of a press at a center portion of the slab 10 having the same composition as in Example 1 and a position that is 3/8 of the inner dimension of the target product hollow body. A chiseling operation was performed, and a cut 12 that penetrated in the height direction (perpendicular to the paper surface in FIG. 6) was made. The lower part of the material was fixed to the head of the press, a wire was passed through the center hole, tied to the upper metallage of the press, and then pulled up to the limit of the press daylight to obtain a rectangular hollow material 13. A hollow body material 4 was formed in the same manner as in Example 1, and a large octagonal cross-section hollow body 6 was formed in the same manner as in Example 1.

It is explanatory drawing which forge-molds a hollow raw material using a flat anvil. It is explanatory drawing which forge-molds for "square cutting" of a hollow body raw material. It is a perspective view of an example of a polygon cross-section hollow body (product). It is sectional drawing which illustrates the flat anvil with a convex part. It is explanatory drawing using a stepped ring-shaped material. It is a front view of the slab which provided the through-hole and the notch in order to obtain a square hollow material. It is a front view of a square hollow material obtained by pulling up the press. It is a figure which shows the example of manufacture of the conventional polygonal cross-section hollow body.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Ring-shaped material 2 Upper anvil 3 Lower anvil 4 Hollow body material 5 Origin 6 Polygon cross-section hollow body 7 Flat-shaped anvil with a convex part 8 Stepped ring-shaped material 9 Inner octagonal, outer quadrilateral cross-section hollow body 10 Slab 11 Through-hole 12 Notch 13 Square hollow material 14 Core metal 15 Octagonal cross-section hollow body material 16 Product

Claims (8)

  A method for producing a polygonal cross-section hollow body that is expanded and shaped by a forging press, using a flat upper metal plate on the outside of the hollow material and a flat lower metal plate on the inner side, A method for producing a polygonal cross-section hollow body, characterized by performing molding and corner molding.   In forming the corner, after pressing the upper corner of the flat lower metal sheet at a position corresponding to the inner corner of the target polygonal cross-section hollow body, the hollow body material is centered The method for producing a polygonal cross-section hollow body according to claim 1, wherein the polygonal cross-section hollow body according to claim 1 is installed by rotating around an axis by 5 ° to 30 ° and then pressurizing.   In forming the side portion, as the flat upper metal plate and the flat lower metal plate, those having the same width or different widths are used to control the amount of forging inside and outside the side portion. The manufacturing method of the polygon cross-section hollow body of claim | item 1.   When the hollow material has a ring shape, when the region corresponding to the corner of the target polygonal cross-section hollow body reaches a predetermined thickness in the diameter expansion step, the region The predetermined wall thickness is maintained as it is, and only the portion corresponding to the side portion of the intended polygonal cross-section hollow body is continuously subjected to diameter-enlarging forging. Manufacturing method of polygonal cross-section hollow body.   5. The polygonal cross-section hollow body according to claim 1, wherein a flat anvil having a convex portion is used as an upper anvil or a lower anvil in forming the side portion and the corner portion. Production method.   The said polygonal cross-section hollow body is a large sized polygon cross-section hollow body, The manufacturing method of the polygon cross-section hollow body of any one of Claim 1 thru | or 5 characterized by the above-mentioned.   A polygonal cross-section hollow body manufactured by the manufacturing method according to claim 1. The polygonal cross-section hollow body is any one of polygonal cross-section hollow bodies made of aluminum alloy, magnesium alloy, titanium alloy, and stainless steel, and is used in a semiconductor or liquid crystal manufacturing apparatus. The polygonal cross-section hollow body according to claim 7.

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