JP2005315131A - Throttle valve device - Google Patents

Throttle valve device Download PDF

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JP2005315131A
JP2005315131A JP2004132327A JP2004132327A JP2005315131A JP 2005315131 A JP2005315131 A JP 2005315131A JP 2004132327 A JP2004132327 A JP 2004132327A JP 2004132327 A JP2004132327 A JP 2004132327A JP 2005315131 A JP2005315131 A JP 2005315131A
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rotary valve
valve plates
throttle
bore
throttle valve
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Hirokazu Konohara
弘和 此原
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Aisan Industry Co Ltd
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Aisan Industry Co Ltd
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  • Control Of Throttle Valves Provided In The Intake System Or In The Exhaust System (AREA)
  • Electrically Driven Valve-Operating Means (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To reduce a fluid flow rate passing through clearance between its member, while constituting a flow passage opening-closing member in a noncontact state in full closure. <P>SOLUTION: This throttle valve device 1 is used in an intake air passage of an engine; and has a body 3 including a bore 2, two rotary valve plates 4 and 5 rotatably arranged in the body 3 by crossing the bore 2 and mutually arranged in parallel in a noncontact state, a first motor 6 and a second motor 7 for rotating the respective rotary valve plates 4 and 5. The two rotary valve plates 4 and 5 include throttle holes 4a and 5a capable of mutually overlapping by rotation. The overlapping area of the two throttle holes 4a and 5a is changed by relatively rotating the two rotary valve plates 4 and 5 for changing opening. While the two throttle holes 4a and 5a keep an apparent full closure state of becoming nonoverlapping, the two rotary valve plates 4 and 5 are mutually synchronously rotated. A speed of synchronous rotation is changed for further finely adjusting an air flow rate of the apparent full closure state. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

この発明は、例えば、エンジンの吸気流量など、流体流量を調節するために使用される絞り弁装置に関する。   The present invention relates to a throttle valve device used for adjusting a fluid flow rate such as an intake air flow rate of an engine, for example.

従来、この種の装置として、例えば、エンジンの吸気量を調節するために使用されるスロットル装置がある。スロットル装置は、空気が流れるボアを含むスロットルボディと、スロットルボディに回転可能に設けられた支軸と、支軸に設けられて支軸とともに回転することによりボアを開閉する円板状のスロットルバルブとを備える。スロットルバルブは、その全閉時に、ボア壁面との間の摩耗、変形を懸念して、ボア壁面と機械的に接触しないように構成される。従って、スロットルバルブが全閉になっても、その外周面とボア壁面との間に若干のクリアランスができることから、そこを通る空気量を皆無にすることができなかった。このため、スロットルバルブの全閉時には、エンジンの燃費低減などを考慮して上記クリアランスを極力小さくし、そこを通る空気量を極力少なくすることが要求されている。   Conventionally, as this type of device, for example, there is a throttle device used for adjusting the intake amount of an engine. A throttle device includes a throttle body including a bore through which air flows, a support shaft rotatably provided on the throttle body, and a disk-like throttle valve that is provided on the support shaft and opens and closes the bore by rotating together with the support shaft. With. When the throttle valve is fully closed, the throttle valve is configured not to come into mechanical contact with the bore wall surface in consideration of wear and deformation with the bore wall surface. Therefore, even if the throttle valve is fully closed, a slight clearance is formed between the outer peripheral surface and the bore wall surface, and thus the amount of air passing therethrough cannot be eliminated. For this reason, when the throttle valve is fully closed, it is required to reduce the clearance as much as possible and reduce the amount of air passing therethrough as much as possible in consideration of reduction in fuel consumption of the engine.

下記の特許文献1に記載の絞り組立体は、スロットルボディのボアにスロットルバルブがシャフトを介して回転可能に支持される。スロットルバルブは、その外周面とボア壁面との間のクリアランスを少なくするために、その全閉位置においてボア壁面と接触可能に設けられたシール部材を有する。このシール部材はボア壁面より軟らかい塑性変形材料により形成される。この構成により、スロットルバルブ全閉時には、シール部材がボア壁面形状に即した状態で変形し、スロットルバルブ外周面とボア壁面との間のクリアランスを少なくしている。   In a throttle assembly described in Patent Document 1 below, a throttle valve is rotatably supported by a bore of a throttle body via a shaft. The throttle valve has a seal member provided so as to be able to contact the bore wall surface in the fully closed position in order to reduce the clearance between the outer peripheral surface and the bore wall surface. This seal member is formed of a plastically deformable material that is softer than the bore wall surface. With this configuration, when the throttle valve is fully closed, the seal member is deformed in accordance with the shape of the bore wall surface, and the clearance between the outer peripheral surface of the throttle valve and the bore wall surface is reduced.

一方、下記の特許文献2に記載の絞り装置は、スロットルバルブ全閉時における全閉角度のばらつきによる空気量のばらつきを解消するために、スロットルバルブがボアの軸線に対して垂直をなすように配置される。この配置状態においてボア壁面に対向するスロットルバルブの外周端面は、シャフトの回転中心を中心とする曲率半径の球面形状を有する。この構成により、スロットルバルブの全閉角度にばらつきが生じたときでも、ボア壁面とスロットルバルブの外周端面との間のクリアランス面積を一定化するようにしている。   On the other hand, the throttling device described in Patent Document 2 below is configured so that the throttle valve is perpendicular to the bore axis in order to eliminate the variation in the air amount due to the variation in the fully closed angle when the throttle valve is fully closed. Be placed. In this arrangement state, the outer peripheral end surface of the throttle valve facing the bore wall surface has a spherical shape with a radius of curvature centering on the rotation center of the shaft. With this configuration, the clearance area between the bore wall surface and the outer peripheral end surface of the throttle valve is made constant even when the fully closed angle of the throttle valve varies.

特開平11−101137号公報(第2−5頁、図1−4)JP-A-11-101137 (page 2-5, FIG. 1-4) 特開2003−184583号公報(第2−3頁、図3)Japanese Patent Laid-Open No. 2003-184583 (page 2-3, FIG. 3)

ところが、上記した特許文献1に記載の絞り組立体は、シール部材をスロットルバルブに対して別途取り付けなければならず、取り付け精度も要求されることになった。また、シール部材がボア壁面に接触することから、シール部材の経時劣化や摩耗、さらには接触騒音が懸念されることになった。   However, in the throttle assembly described in Patent Document 1, the seal member has to be separately attached to the throttle valve, and the attachment accuracy is required. In addition, since the seal member comes into contact with the bore wall surface, there is a concern about deterioration of the seal member with time, wear, and contact noise.

一方、上記した特許文献2に記載の絞り装置は、スロットルバルブの全閉時における空気量のばらつきは解消されるものの、スロットルバルブの外周端面とボア壁面との間のクリアランスを通る空気量を低減できなかった。   On the other hand, the throttling device described in Patent Document 2 described above reduces the amount of air passing through the clearance between the outer peripheral end surface of the throttle valve and the bore wall surface, although the variation in the air amount when the throttle valve is fully closed is eliminated. could not.

この発明は上記事情に鑑みてなされたものであって、その目的は、全閉時に流路開閉部材を非接触な構成としながら、その間のクリアランスを通る流体流量を低減することを可能とした絞り弁装置を提供することにある。   The present invention has been made in view of the above circumstances, and an object of the invention is to make it possible to reduce the flow rate of fluid passing through the clearance between them while making the flow path opening / closing member non-contact when fully closed. It is to provide a valve device.

上記目的を達成するために、請求項1に記載の発明の絞り弁装置は、流体が流れるボアを含むボディと、ボアを横切る状態でボディに回転可能に設けられ、互いに非接触状態で平行に配置された複数の回転弁板と、複数の回転弁板は、回転により互いに重複可能な絞り孔を含むことと、各回転弁板を回転させるために各回転弁板のそれぞれに対応して設けられた駆動手段とを備えたことを趣旨とする。   In order to achieve the above object, a throttle valve device according to a first aspect of the present invention includes a body including a bore through which a fluid flows, and a body rotatably provided in a state of crossing the bore, and in parallel with each other in a non-contact state. The plurality of arranged rotary valve plates and the plurality of rotary valve plates include throttle holes that can be mutually overlapped by rotation, and are provided corresponding to each of the rotary valve plates to rotate each rotary valve plate. It is intended to provide a driving means.

上記発明の構成によれば、各駆動手段により各回転弁板を相対回転させることにより、複数の絞り孔の重複面積が変わり、ボアが開閉してボアにおける流体の流量が調節される。ここで、各駆動手段により各回転弁板を相対回転させることにより、複数の絞り孔が互いに非重複な状態となり、ボアは見かけの全閉状態となるが、各絞り孔は各回転弁板のクリアランスを通じて互いに連通する。この状態で、複数の絞り孔が互いに非重複となる状態を保ちながら、各駆動手段により複数の回転弁板を同期回転させることにより、見かけの全閉状態におけるボアの流体の流れは、剪断により制限される。   According to the configuration of the invention, by rotating each rotary valve plate relative to each other by each driving means, the overlapping area of the plurality of throttle holes is changed, the bore is opened and closed, and the flow rate of the fluid in the bore is adjusted. Here, by rotating each rotary valve plate relative to each other by each driving means, the plurality of throttle holes are in a non-overlapping state, and the bore is in an apparently fully closed state. Communicate with each other through clearance. In this state, while maintaining the state where the plurality of throttle holes do not overlap each other, the plurality of rotary valve plates are synchronously rotated by the respective driving means, so that the flow of the bore fluid in the apparent fully closed state is caused by shearing. Limited.

上記目的を達成するために、請求項2に記載の発明の絞り弁装置は、流体が流れるボアを含むボディと、ボアを横切る状態でボディに回転可能に設けられ、互いに非接触状態で平行に配置された複数の回転弁板と、複数の回転弁板は、回転により互いに重複可能な絞り孔を含むことと、各回転弁板を回転させるために各回転弁板のそれぞれに対応して設けられた駆動手段と、複数の絞り孔が互いに非重複となる状態を保ちながら複数の回転弁板を同期回転させるために各駆動手段を制御する同期制御手段とを備えたことを趣旨とする。   In order to achieve the above object, a throttle valve device according to a second aspect of the present invention includes a body including a bore through which a fluid flows, and a body rotatably provided in a state of crossing the bore, and in parallel with each other in a non-contact state. The plurality of arranged rotary valve plates and the plurality of rotary valve plates include throttle holes that can be mutually overlapped by rotation, and are provided corresponding to each of the rotary valve plates to rotate each rotary valve plate. The present invention is provided with the drive means provided and the synchronization control means for controlling each drive means for synchronously rotating the plurality of rotary valve plates while keeping the plurality of throttle holes non-overlapping with each other.

上記発明の構成によれば、複数の絞り孔を互いに非重複とすることにより、ボアは見かけの全閉状態となるが、各絞り孔は各回転弁板のクリアランスを通じて互いに連通する。ここで、同期制御手段が各駆動手段を制御することにより、上記非重複となる状態を保ちながら複数の回転弁板が同期回転される。これにより、見かけの全閉状態におけるボアの流体の流れは、剪断により制限される。   According to the configuration of the present invention, by making the plurality of throttle holes non-overlapping with each other, the bore is in an apparent fully closed state, but the throttle holes communicate with each other through the clearance of each rotary valve plate. Here, when the synchronous control means controls each driving means, the plurality of rotary valve plates are synchronously rotated while maintaining the non-overlapping state. This limits the fluid flow of the bore in the apparent fully closed state due to shear.

上記目的を達成するために、請求項3に記載の発明は、流体が流れるボアを含むボディと、ボアを横切る状態でボディに回転可能に設けられ、互いに非接触状態で平行に配置された複数の回転弁板と、複数の回転弁板は、回転により互いに重複可能な絞り孔を含むことと、各回転弁板を回転させるために各回転弁板のそれぞれに対応して設けられた駆動手段と、複数の絞り孔が互いに非重複となる状態を保ちながら複数の回転弁板を同期回転させるために各駆動手段を制御する同期制御手段と、同期回転の速度を変更するために各駆動制御手段を制御する変速制御手段とを備えたことを趣旨とする。   In order to achieve the above object, an invention according to claim 3 includes a body including a bore through which a fluid flows, and a plurality of bodies arranged rotatably in the body so as to cross the bore and arranged in parallel without contacting each other. The rotary valve plate and the plurality of rotary valve plates include throttle holes that can be mutually overlapped by rotation, and driving means provided corresponding to each rotary valve plate for rotating each rotary valve plate And a synchronous control means for controlling each driving means for synchronously rotating the plurality of rotary valve plates while maintaining a state in which the plurality of throttle holes do not overlap each other, and each drive control for changing the speed of the synchronous rotation The shift control means for controlling the means is provided.

上記発明の構成によれば、複数の絞り孔を互いに非重複とすることにより、ボアは見かけの全閉状態となるが、各絞り孔は各回転弁板のクリアランスを通じて互いに連通する。ここで、同期制御手段が各駆動手段を制御することにより、上記非重複となる状態を保ちながら複数の回転弁板が同期回転される。これにより、見かけの全閉状態におけるボアの流体の流れは、剪断により制限される。また、変速制御手段が上記同期回転の速度を変更することにより、見かけの全閉状態におけるボアの流体の流れが微調節される。   According to the configuration of the present invention, by making the plurality of throttle holes non-overlapping with each other, the bore is in an apparent fully closed state, but the throttle holes communicate with each other through the clearance of each rotary valve plate. Here, when the synchronous control means controls each driving means, the plurality of rotary valve plates are synchronously rotated while maintaining the non-overlapping state. This limits the fluid flow of the bore in the apparent fully closed state due to shear. Further, when the speed change control means changes the speed of the synchronous rotation, the flow of the bore fluid in the apparent fully closed state is finely adjusted.

上記目的を達成するために、請求項4に記載の発明の絞り弁装置は、請求項1乃至3のいずれかに記載の発明の絞り弁装置において、複数の絞り孔の重複面積を変えるために各駆動手段を制御する重複制御手段を備えたことを趣旨とする。   In order to achieve the above object, a throttle valve device according to a fourth aspect of the present invention is the throttle valve device according to any one of the first to third aspects, in order to change the overlapping area of a plurality of throttle holes. The purpose is to provide an overlapping control means for controlling each driving means.

上記発明の構成によれば、請求項1乃至3のいずれかに記載の発明の作用に加え、重複制御手段が各駆動手段を制御して各回転弁板を相対回転させることにより、複数の絞り孔の重複面積が変わり、ボアが開閉してボアにおける流体の流量が調節される。   According to the configuration of the invention described above, in addition to the operation of the invention according to any one of claims 1 to 3, the overlapping control means controls each driving means to relatively rotate each rotary valve plate, so that a plurality of throttles can be obtained. The overlapping area of the holes changes and the bore opens and closes to adjust the fluid flow rate in the bore.

請求項1に記載の発明によれば、複数の絞り孔を互いに非重複な状態としながら複数の回転弁板を同期回転させることにより、全閉時における流路開閉部材を非接触な構成としながら、その間のクリアランスを通る流体流量を低減することができる。   According to the first aspect of the present invention, the plurality of rotary valve plates are synchronously rotated while keeping the plurality of throttle holes non-overlapping with each other, so that the flow path opening / closing member in the fully closed state has a non-contact configuration. , The fluid flow rate through the clearance therebetween can be reduced.

請求項2に記載の発明によれば、全閉時における流路開閉部材を非接触な構成としながら、その間のクリアランスを通る流体流量を低減することができる。   According to the second aspect of the present invention, the flow rate of the fluid passing through the clearance therebetween can be reduced while the flow path opening / closing member in the fully closed state is in a non-contact configuration.

請求項3に記載の発明によれば、全閉時における流路開閉部材を非接触な構成としながら、その間のクリアランスを通る流体流量を低減することができる。また、低流量域まで空気流量の調節範囲を拡大することができ、低流量域での流量調節の分解能を向上させることができる。   According to the third aspect of the present invention, the flow rate of the fluid passing through the clearance therebetween can be reduced while the non-contact configuration of the flow path opening / closing member when fully closed. Further, the adjustment range of the air flow rate can be expanded to the low flow rate range, and the resolution of the flow rate adjustment in the low flow rate range can be improved.

請求項4に記載の発明によれば、請求項1乃至3のいずれかに記載の発明の効果に加え、低流量域から高流量域まで空気流量の調節を行うことができる。   According to the invention described in claim 4, in addition to the effect of the invention described in any one of claims 1 to 3, the air flow rate can be adjusted from the low flow rate range to the high flow rate range.

[第1実施形態]
以下、本発明における絞り弁装置を具体化した第1実施形態につき図面を参照して詳細に説明する。
[First Embodiment]
Hereinafter, a throttle valve device according to a first embodiment of the present invention will be described in detail with reference to the drawings.

図1に本実施形態の絞り弁装置1を縦断面図により示す。図2に絞り弁装置1を横断面図により示す。絞り弁装置1は、エンジンの吸気通路に装着され、エンジンに吸入される空気量を調節するために使用される。絞り弁装置1は、流体としての空気が流れるボア2を含むボディ3と、そのボア2を横切る状態でボディ3に回転可能に設けられ、互いに非接触状態で平行に配置された2枚の回転弁板4,5(上回転弁板4、下回転弁板5)と、各回転弁板4,5を回転させるために各回転弁板4,5のそれぞれに対応して設けられた第1モータ6及び第2モータ7とを備える。図1の太線矢印は、エンジンの吸気通路における空気流の方向を示す。   FIG. 1 is a longitudinal sectional view of a throttle valve device 1 of the present embodiment. FIG. 2 shows the throttle valve device 1 in a cross-sectional view. The throttle valve device 1 is attached to the intake passage of the engine and is used to adjust the amount of air taken into the engine. The throttle valve device 1 includes a body 3 that includes a bore 2 through which air as a fluid flows, and two rotations that are rotatably provided in the body 3 so as to cross the bore 2 and are arranged in parallel without being in contact with each other. Valve plates 4 and 5 (upper rotary valve plate 4 and lower rotary valve plate 5) and first rotary valves 4 and 5 are provided corresponding to the rotary valve plates 4 and 5 in order to rotate the rotary valve plates 4 and 5, respectively. A motor 6 and a second motor 7 are provided. 1 indicates the direction of air flow in the intake passage of the engine.

2枚の回転弁板4,5の間隔は、この実施形態では、「約1mm」に設定される。各回転弁板4,5とボディ3との間にも所定のクリアランスがあり、非接触状態となっている。各回転弁板4,5は、同一軸線を中心に回転可能に配置され、それらの回転により互いに重複可能な絞り孔4a,5aを含む。図3に、各回転弁板4,5と、その絞り孔4a,5aの形状を平面図により示す。各絞り孔4a,5aは、半円弧形状をなす。図1に示すように、各回転弁板4,5は、ベアリング8,9,10を介してボディ3に回転可能に支持される。各回転弁板4,5は、外周に複数の外周歯を有する。ボディ3に設けられた第1モータ6は、その出力軸上の駆動ギア11及び中間ギア12,13を介して上回転弁板4の外周歯に連結される。同様に、ボディ3に設けられた第2モータ7は、その出力軸上の駆動ギア14及び中間ギア15,16を介して下回転弁板5の外周歯に連結される。   In this embodiment, the interval between the two rotary valve plates 4 and 5 is set to “about 1 mm”. There is also a predetermined clearance between the rotary valve plates 4 and 5 and the body 3, which is in a non-contact state. Each of the rotary valve plates 4 and 5 includes throttle holes 4a and 5a that are arranged so as to be rotatable about the same axis and can overlap each other by their rotation. FIG. 3 is a plan view showing the shapes of the rotary valve plates 4 and 5 and the throttle holes 4a and 5a. Each throttle hole 4a, 5a has a semicircular arc shape. As shown in FIG. 1, the rotary valve plates 4 and 5 are rotatably supported by the body 3 via bearings 8, 9, and 10. Each rotary valve plate 4 and 5 has a plurality of outer peripheral teeth on the outer periphery. The first motor 6 provided in the body 3 is connected to the outer peripheral teeth of the upper rotary valve plate 4 via a drive gear 11 and intermediate gears 12 and 13 on the output shaft. Similarly, the second motor 7 provided in the body 3 is connected to the outer peripheral teeth of the lower rotary valve plate 5 via the drive gear 14 and the intermediate gears 15 and 16 on the output shaft.

図1に示すように、上回転弁板4の上面周縁には、多数の突起4bが等角度間隔に配置される。ボディ3には、上回転弁板4に対応して、第1回転センサ31が設けられる。この回転センサ31は、各突起4bに対向して配置される。この回転センサ31は、上回転弁板4の回転に伴い各突起4bの通過を検出することにより、上回転弁板4の回転速度を検出するようになっている。同様に、下回転弁板5の下面周縁には、多数の突起5bが等角度間隔に配置される。ボディ3には、下回転弁板5に対応して、第2回転センサ32が設けられる。この回転センサ32は、各突起5bに対向して配置される。この回転センサ32は、下回転弁板5の回転に伴い各突起5bの通過を検出することにより、下回転弁板5の回転速度を検出するようになっている。   As shown in FIG. 1, a large number of protrusions 4 b are arranged at equiangular intervals on the upper surface periphery of the upper rotary valve plate 4. The body 3 is provided with a first rotation sensor 31 corresponding to the upper rotary valve plate 4. The rotation sensor 31 is disposed to face each protrusion 4b. The rotation sensor 31 detects the rotation speed of the upper rotary valve plate 4 by detecting the passage of each projection 4b as the upper rotary valve plate 4 rotates. Similarly, a large number of protrusions 5 b are arranged at equiangular intervals on the periphery of the lower surface of the lower rotary valve plate 5. The body 3 is provided with a second rotation sensor 32 corresponding to the lower rotary valve plate 5. The rotation sensor 32 is disposed to face each protrusion 5b. The rotation sensor 32 detects the rotation speed of the lower rotary valve plate 5 by detecting the passage of each projection 5b as the lower rotary valve plate 5 rotates.

上記構成において、絞り弁装置1は、各モータ6,7により各回転弁板4,5を相対回転させることにより、二つの絞り孔4a,5aの重複面積が変わり、ボア2が開閉してボア2における空気の流量が調節される。すなわち、図1,2に示すように、二つの絞り孔4a,5aが互いに重複し合わない非重複状態では、絞り弁装置1は、見かけの全閉状態となる。また、図4に示すように、二つの絞り孔4a、5aが互いに完全に重複し合う全重複状態では、絞り弁装置1は、全開状態となる。また、上記した見かけの全閉状態と全開状態との間で、二つの絞り孔4a,5aの重複面積を変えることにより、絞り弁装置1の開度が変えられる。図5に、絞り弁装置1の開度と空気の流量との関係をグラフに示す。このグラフにおいて、「相対回転域」は、二つの絞り孔4a,5aの重複面積を変えることにより、絞り弁装置1の開度と空気流量が変わる領域である。   In the above-described configuration, the throttle valve device 1 rotates the rotary valve plates 4 and 5 relative to each other with the motors 6 and 7, thereby changing the overlapping area of the two throttle holes 4 a and 5 a, and opening and closing the bore 2. The air flow rate at 2 is adjusted. That is, as shown in FIGS. 1 and 2, in the non-overlapping state where the two throttle holes 4 a and 5 a do not overlap each other, the throttle valve device 1 is in an apparent fully closed state. In addition, as shown in FIG. 4, in the fully overlapped state where the two throttle holes 4a and 5a completely overlap each other, the throttle valve device 1 is fully opened. Further, the opening degree of the throttle valve device 1 can be changed by changing the overlapping area of the two throttle holes 4a and 5a between the apparent fully closed state and the fully open state. FIG. 5 is a graph showing the relationship between the opening degree of the throttle valve device 1 and the air flow rate. In this graph, the “relative rotation region” is a region where the opening degree and the air flow rate of the throttle valve device 1 are changed by changing the overlapping area of the two throttle holes 4a and 5a.

上記した見かけの全閉状態では、各絞り孔4a,5aは、各回転弁板4,5のクリアランスを通じて互いに連通することになる。従って、この状態のままでは、そのクリアランスをわずかに空気が流れることになる。そこで、この絞り弁装置1では、二つの絞り孔4a,5aが互いに非重複となる見かけの全閉状態を保ちながら、各モータ6,7により二枚の回転弁板4,5を同期回転させることにより、見かけの全閉状態におけるボア2の空気流を、剪断により微量に制限するようになっている。このときの微量な空気流は、二枚の回転弁板4,5の同期回転速度を変えることで調節されることが分かっている。図5のグラフにおいて、「同期回転域」は、二枚の回転弁板4,5の同期回転速度を変えることにより、絞り弁装置1の実質的な開度と空気流量が変わる領域である。図5の破線楕円で示す曲線部分を、図6に拡大したグラフに示す。このグラフから明らかなように、絞り弁装置1における空気流量は、二枚の回転弁板4,5の回転速度を上げるに連れて更に減少することが分かる。   In the apparent fully closed state described above, the throttle holes 4 a and 5 a communicate with each other through the clearances of the rotary valve plates 4 and 5. Therefore, in this state, air slightly flows through the clearance. Therefore, in this throttle valve device 1, the two rotary valve plates 4 and 5 are synchronously rotated by the motors 6 and 7 while maintaining the apparent fully closed state in which the two throttle holes 4a and 5a do not overlap each other. Thus, the air flow in the bore 2 in the apparent fully closed state is limited to a minute amount by shearing. It has been found that the minute air flow at this time is adjusted by changing the synchronous rotational speed of the two rotary valve plates 4 and 5. In the graph of FIG. 5, the “synchronous rotation region” is a region where the substantial opening degree and the air flow rate of the throttle valve device 1 are changed by changing the synchronous rotation speed of the two rotary valve plates 4 and 5. The curve portion indicated by the broken line ellipse in FIG. 5 is shown in the enlarged graph in FIG. As is apparent from this graph, it can be seen that the air flow rate in the throttle valve device 1 further decreases as the rotational speed of the two rotary valve plates 4 and 5 increases.

図7に、エンジンシステムにおける絞り弁装置1に関連した電気的構成をブロック図により示す。この実施形態では、絞り弁装置1を制御するための電子制御装置(ECU)30を備える。ECU30には、第1モータ6及び第2モータ7が接続される。また、ECU30には、第1回転センサ31及び第2回転センサ32が接続される。ECU30には、各回転センサ31,32から各回転弁板4,5の回転速度を示す信号が入力される。更に、ECU30には、エンジンに設けられた各種センサから各種信号が入力される。すなわち、エンジンの吸気通路における圧力(吸気圧)、アクセルペダルの開度(アクセル開度)、エンジン回転速度及びエンジンの冷却水温の温度(冷却水温)がそれぞれECU30に入力される。ECU30は、絞り弁装置1の開度を制御するべく、上記した各種信号に基づいて各モータ6,7を制御することで二枚の回転弁板4,5を回転、停止させる。   FIG. 7 is a block diagram showing an electrical configuration related to the throttle valve device 1 in the engine system. In this embodiment, an electronic control unit (ECU) 30 for controlling the throttle valve device 1 is provided. A first motor 6 and a second motor 7 are connected to the ECU 30. The ECU 30 is connected to a first rotation sensor 31 and a second rotation sensor 32. The ECU 30 receives signals indicating the rotation speeds of the rotary valve plates 4 and 5 from the rotation sensors 31 and 32. Further, various signals are input to the ECU 30 from various sensors provided in the engine. That is, the pressure in the intake passage of the engine (intake pressure), the opening degree of the accelerator pedal (accelerator opening degree), the engine rotation speed, and the temperature of the cooling water temperature of the engine (cooling water temperature) are respectively input to the ECU 30. The ECU 30 controls the motors 6 and 7 based on the various signals described above to rotate and stop the two rotary valve plates 4 and 5 in order to control the opening degree of the throttle valve device 1.

ここで、ECU30は、二つの絞り孔4a、5aの重複面積を変えるために、各モータ6,7を制御する。ECU30は、この制御を主としてアクセル開度の信号に基づいて行う。例えば、アクセル開度が全閉を示すときは、原則的には、ECU30は、絞り弁装置1が見かけの全閉状態となるように各モータ6,7を制御することで、二枚の回転弁板4,5を相対回転させて絞り孔4a,5aを非重複状態とする。また、アクセル開度が増加するに従い、ECU30は、絞り弁装置1の開度を増大させるように各モータ6,7を制御することで、二枚の回転弁板4,5を相対回転させて絞り孔4a,5aの重複面積を増大させる。このような制御を実行するECU30は、本発明の重複制御手段に相当する。   Here, the ECU 30 controls the motors 6 and 7 in order to change the overlapping area of the two throttle holes 4a and 5a. The ECU 30 performs this control mainly based on an accelerator opening signal. For example, when the accelerator opening indicates fully closed, in principle, the ECU 30 controls the motors 6 and 7 so that the throttle valve device 1 is in an apparently fully closed state, whereby two rotations are performed. The valve plates 4 and 5 are rotated relatively to bring the throttle holes 4a and 5a into a non-overlapping state. Further, as the accelerator opening increases, the ECU 30 controls the motors 6 and 7 so as to increase the opening of the throttle valve device 1 so as to relatively rotate the two rotary valve plates 4 and 5. The overlapping area of the throttle holes 4a and 5a is increased. The ECU 30 that executes such control corresponds to the overlap control means of the present invention.

また、ECU30は、二つの絞り孔4a、5aが互いに非重複となる状態(見かけの全閉状態)を保ちながら二枚の回転弁板4,5を同期回転させるために、各モータ6,7を制御する。ECU30は、二枚の回転弁板4,5が互いに同期回転するように、各回転センサ31,32からの回転速度信号に基づいて各モータ6,7を制御する。このような制御を実行するECU30は、本発明の同期制御手段に相当する。   Further, the ECU 30 keeps the two throttle holes 4a and 5a non-overlapping with each other (apparent fully closed state) while rotating the two rotary valve plates 4 and 5 in synchronization with each of the motors 6 and 7. To control. The ECU 30 controls the motors 6 and 7 based on the rotation speed signals from the rotation sensors 31 and 32 so that the two rotary valve plates 4 and 5 rotate in synchronization with each other. The ECU 30 that executes such control corresponds to the synchronization control means of the present invention.

更に、ECU30は、上記した二枚の回転弁板4,5に係る同期回転の速度を変更するために各モータ6,7を制御する。ECU30は、この制御を主としてエンジン回転速度及び冷却水温の信号、並びに、各回転センサ31,32からの回転速度信号に基づいて行う。例えば、エンジンのアイドル運転時に冷却水温が低いとき、ECU30は、エンジン回転速度が所定速度となるように各モータ6,7を制御することで、二枚の回転弁板4,5の同期回転速度を相対的に低くする。その後、エンジンの暖機が進むに連れて、ECU30は、各モータ6,7を制御することで、二枚の回転弁板4,5の同期回転速度を相対的に高くする。このような制御を実行するECU30は、本発明の変速制御手段に相当する。   Further, the ECU 30 controls the motors 6 and 7 in order to change the speed of the synchronous rotation related to the two rotary valve plates 4 and 5 described above. The ECU 30 performs this control mainly based on the engine speed and cooling water temperature signals and the rotation speed signals from the rotation sensors 31 and 32. For example, when the cooling water temperature is low during engine idle operation, the ECU 30 controls the motors 6 and 7 so that the engine rotation speed becomes a predetermined speed, thereby synchronizing the rotation speed of the two rotary valve plates 4 and 5. Is relatively low. Thereafter, as the engine warms up, the ECU 30 controls the motors 6 and 7 to relatively increase the synchronous rotational speed of the two rotary valve plates 4 and 5. The ECU 30 that executes such control corresponds to the shift control means of the present invention.

以上説明した本実施形態における絞り弁装置1の構成によれば、二つの絞り孔4a,5aを互いに非重複とすることにより、ボア2は見かけの全閉状態となるが、各絞り孔4a,5aは各回転弁板4,5のクリアランスを通じて互いに連通することになる。ここで、ECU30が、各モータ6,7を制御することにより、上記した非重複となる見かけの全閉状態を保ちながら二枚の回転弁板4,5が同期回転される。これにより、見かけの全閉状態におけるボア2の空気流は、剪断により微量に制限される。このため、絞り弁装置1は、その全閉時に、二枚の回転弁板4,5及びボディ3が互いに非接触な構成でありながら、二枚の回転弁板4,5の間のクリアランスを通る空気流量を低減することができる。   According to the configuration of the throttle valve device 1 in the present embodiment described above, the bores 2 are apparently fully closed by making the two throttle holes 4a and 5a non-overlapping with each other, but each throttle hole 4a, 5a communicates with each other through the clearances of the rotary valve plates 4 and 5. Here, when the ECU 30 controls the motors 6 and 7, the two rotary valve plates 4 and 5 are synchronously rotated while maintaining the non-overlapping apparent fully closed state. As a result, the air flow in the bore 2 in the apparent fully closed state is limited to a minute amount by shearing. Therefore, when the throttle valve device 1 is fully closed, the two rotary valve plates 4 and 5 and the body 3 are not in contact with each other, but the clearance between the two rotary valve plates 4 and 5 is reduced. The air flow rate passing therethrough can be reduced.

また、この実施形態の絞り弁装置1によれば、二枚の回転弁板4,5及びボディ3が互いに非接触な構成であることから、各部品3〜5の摩耗や接触騒音の発生を防止することができる。このため、各部品3〜5の耐久性、延いては絞り弁装置1それ自体の耐久性を向上することができる。   Further, according to the throttle valve device 1 of this embodiment, since the two rotary valve plates 4 and 5 and the body 3 are configured to be in non-contact with each other, wear of each of the components 3 to 5 and generation of contact noise are prevented. Can be prevented. For this reason, it is possible to improve the durability of each of the components 3 to 5 and, in turn, the durability of the throttle valve device 1 itself.

また、この実施形態の絞り弁装置1によれば、ECU30が、二枚の回転弁板4,5の同期回転速度を変更することにより、見かけの全閉状態でのボア2における空気流量が微調節される。このため、絞り弁装置1として、低流量域まで空気流量の調節範囲を拡大することができ、低流量域での流量調節の分解能を向上させることができる。このような低流量域での流量調節機能は、エンジンのアイドル運転時に吸気流量を微調節するアイドル・スピード・コントロール・バルブ(ISCV)の機能に相当するものである。つまり、この絞り弁装置1は、ISCVの機能を兼ね備えた装置となる。   Further, according to the throttle valve device 1 of this embodiment, the ECU 30 changes the synchronous rotational speed of the two rotary valve plates 4 and 5, thereby reducing the air flow rate in the bore 2 in the apparent fully closed state. Adjusted. For this reason, as the throttle valve device 1, the adjustment range of the air flow rate can be expanded to the low flow rate region, and the resolution of the flow rate adjustment in the low flow rate region can be improved. Such a flow rate adjusting function in the low flow rate region corresponds to a function of an idle speed control valve (ISCV) that finely adjusts the intake air flow rate when the engine is idling. That is, the throttle valve device 1 is a device having an ISCV function.

更に、この実施形態の絞り弁装置1によれば、ECU30が各モータ6,7を制御して各回転弁板4,5を相対回転させることにより、二つの絞り孔4a,5aの重複面積が変わり、ボア2が開閉してボア2における空気流量が調節される。このため、低流量域から高流量域まで空気流量の調節を行うことができる。   Furthermore, according to the throttle valve device 1 of this embodiment, the ECU 30 controls the motors 6 and 7 to relatively rotate the rotary valve plates 4 and 5, so that the overlapping area of the two throttle holes 4a and 5a is increased. Instead, the bore 2 opens and closes and the air flow rate in the bore 2 is adjusted. For this reason, the air flow rate can be adjusted from the low flow rate range to the high flow rate range.

[第2実施形態]
次に、この発明の絞り弁装置を具体化した第2実施形態につき図面を参照して詳細に説明する。
[Second Embodiment]
Next, a second embodiment that embodies the throttle valve device of the present invention will be described in detail with reference to the drawings.

尚、この実施形態において、前記第1実施形態と同じ構成要素については同一の符号を付して説明を省略し、以下には異なった点を中心に説明する。   In this embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted. Hereinafter, different points will be mainly described.

この実施形態では、回転弁板及び駆動手段などの数の点で第1実施形態と構成が異なる。図8に、この実施形態の絞り弁装置21を縦断面図により示す。図9に、絞り弁装置21を横断面図により示す。図10に、各回転弁板4,5,22とそれらの絞り孔4a,5a,22aの形状を平面図により示す。図11に、絞り弁装置21を横断面図により示す。この実施形態では、上回転弁板4と下回転弁板5との間に中回転弁板22が配置され、合計三枚の回転弁板4,5,22が設けられる。図10に示すように、各回転弁板4,5,22の絞り孔4a,5a,22aは、三分の二円弧形状をなす。また、中回転弁板22に対応して駆動手段としての第3モータ23と、それに関連した駆動ギア24及び中間ギア25,26がボディ3に設けられる。更に、中回転弁板22に対応して第3回転センサ33がボディ3に設けられる。第3回転センサ33に対応して、中回転弁板22の外周には、同センサ33により検出される突起を兼用した多数の外周歯22bが設けられる。   This embodiment differs from the first embodiment in terms of the number of rotary valve plates and drive means. FIG. 8 is a longitudinal sectional view of the throttle valve device 21 of this embodiment. FIG. 9 shows the throttle valve device 21 in a cross-sectional view. FIG. 10 is a plan view showing the shapes of the rotary valve plates 4, 5, 22 and the throttle holes 4a, 5a, 22a. FIG. 11 shows the throttle valve device 21 in a cross-sectional view. In this embodiment, the middle rotary valve plate 22 is disposed between the upper rotary valve plate 4 and the lower rotary valve plate 5, and a total of three rotary valve plates 4, 5, and 22 are provided. As shown in FIG. 10, the throttle holes 4a, 5a, 22a of the rotary valve plates 4, 5, 22 have a two-third arc shape. In addition, a third motor 23 serving as a driving unit and a driving gear 24 and intermediate gears 25 and 26 related to the third motor 23 are provided in the body 3 in correspondence with the middle rotary valve plate 22. Further, a third rotation sensor 33 is provided in the body 3 corresponding to the middle rotation valve plate 22. Corresponding to the third rotation sensor 33, a large number of outer peripheral teeth 22 b that also serve as protrusions detected by the sensor 33 are provided on the outer periphery of the middle rotary valve plate 22.

上記構成において、この絞り弁装置21は、各モータ6,7,23により各回転弁板4,5,22を相対回転させることにより、三つの絞り孔4a,5a,22aの重複面積が変わり、ボア2が開閉してボア2における空気の流量が調節される。すなわち、図8,9に示すように、三つの絞り孔4a,5a,22aが互いに重複し合わない非重複状態では、絞り弁装置21は、見かけの全閉状態となる。図12に、見かけの全閉状態における各回転弁板4,5,22の回転位置の違いを分解斜視図により示す。また、図11に示すように、三つの絞り孔4a,5a,22aが互いに完全に重複し合う全重複状態では、絞り弁装置21は、全開状態となる。図13に、全開状態における各回転弁板4,5,22の回転位置の違いを分解斜視図により示す。また、上記した見かけの全閉状態と全開状態との間で、三つの絞り孔4a,5a,22aの重複面積を変えることにより、絞り弁装置21の開度が調節される。   In the above configuration, the throttle valve device 21 changes the overlapping area of the three throttle holes 4a, 5a, 22a by rotating the rotary valve plates 4, 5, 22 relative to each other with the motors 6, 7, 23, respectively. The bore 2 opens and closes and the air flow rate in the bore 2 is adjusted. That is, as shown in FIGS. 8 and 9, in a non-overlapping state in which the three throttle holes 4a, 5a, and 22a do not overlap each other, the throttle valve device 21 is in an apparent fully closed state. FIG. 12 is an exploded perspective view showing the difference in rotational position between the rotary valve plates 4, 5 and 22 in the apparent fully closed state. In addition, as shown in FIG. 11, in the fully overlapped state where the three throttle holes 4a, 5a, and 22a completely overlap each other, the throttle valve device 21 is fully opened. FIG. 13 is an exploded perspective view showing the difference in rotational position between the rotary valve plates 4, 5 and 22 in the fully opened state. Moreover, the opening degree of the throttle valve device 21 is adjusted by changing the overlapping area of the three throttle holes 4a, 5a, and 22a between the apparent fully closed state and the fully open state.

図8に示すように、上記した見かけの全閉状態では、各絞り孔4a,5a,22aは、各回転弁板4,5,22のクリアランスを通じて互いに連通することになる。従って、この状態のままでは、そのクリアランスをわずかに空気が流れることになる。そこで、この絞り弁装置21でも、三つの絞り孔4a,5a,22aが互いに非重複となる見かけの全閉状態を保ちながら、各モータ6,7,23により三枚の回転弁板4,5,22を同期回転させることにより、見かけの全閉状態におけるボア2の空気流を、剪断により微量に制限するようになっている。   As shown in FIG. 8, in the above-described apparently fully closed state, the throttle holes 4a, 5a, and 22a communicate with each other through the clearances of the rotary valve plates 4, 5, and 22, respectively. Therefore, in this state, air slightly flows through the clearance. Therefore, also in this throttle valve device 21, the three throttle valve 4a, 5a, 22a are maintained in an apparent fully closed state in which the three throttle holes 4a, 5a, 22a do not overlap with each other, and the three rotary valve plates 4, 5 are driven by the motors 6, 7, 23, respectively. , 22 are synchronously rotated so that the air flow in the bore 2 in the apparent fully closed state is limited to a minute amount by shearing.

図14に、絞り弁装置21に関連した電気的構成をブロック図により示す。この実施形態では、第3モータ23及び第3回転センサ33がECU30に接続される点で、図7のブロック図と構成が異なる。ECU30には、第3回転センサ33から、中回転弁板22の回転速度を示す信号が入力される。ECU30は、絞り弁装置21の開度を制御するべく、上記した各種信号に基づいて各モータ6,7,23を制御することで三枚の回転弁板4,5,22を回転、停止させる。その制御の内容は、基本的には、第1実施形態のそれと同じである。   FIG. 14 is a block diagram showing an electrical configuration related to the throttle valve device 21. In this embodiment, the configuration is different from the block diagram of FIG. 7 in that the third motor 23 and the third rotation sensor 33 are connected to the ECU 30. A signal indicating the rotation speed of the middle rotary valve plate 22 is input from the third rotation sensor 33 to the ECU 30. The ECU 30 controls the motors 6, 7, and 23 based on the various signals described above to rotate and stop the three rotary valve plates 4, 5, and 22 in order to control the opening degree of the throttle valve device 21. . The content of the control is basically the same as that of the first embodiment.

従って、この実施形態では、基本的には、第1実施形態と同様の作用効果を得ることができる。加えて、この実施形態では、各回転弁板4,5,22の絞り孔4a,5a,22aが三分の二円弧形状をなすことから、図11に示すように、全開時に開口形状を三分の二円弧形状にすることができ、第1実施形態の半円弧形状の開口形状に比べて開口面積を大きくすることができる。このため、第1実施形態の絞り弁装置1に比べて、全開時における空気流量を増やすことができる。   Therefore, in this embodiment, basically the same operational effects as in the first embodiment can be obtained. In addition, in this embodiment, the throttle holes 4a, 5a, and 22a of the rotary valve plates 4, 5, and 22 have a two-third arc shape, and therefore, as shown in FIG. Therefore, the opening area can be increased as compared with the semicircular opening shape of the first embodiment. For this reason, compared with the throttle valve apparatus 1 of 1st Embodiment, the air flow rate at the time of a full open can be increased.

尚、この発明は前記各実施形態に限定されるものではなく、発明の趣旨を逸脱することのない範囲で、構成の一部を適宜に変更して実施することもできる。例えば、回転弁板の数を二枚や三枚から、四枚や五枚としてもよい。   Note that the present invention is not limited to the above-described embodiments, and a part of the configuration can be changed as appropriate without departing from the spirit of the invention. For example, the number of rotary valve plates may be changed from two or three to four or five.

第1実施形態の絞り弁装置を示す縦断面図。The longitudinal cross-sectional view which shows the throttle valve apparatus of 1st Embodiment. 絞り弁装置を示す横断面図。The cross-sectional view which shows a throttle valve apparatus. 回転弁板を示す平面図。The top view which shows a rotary valve board. 絞り弁装置を示す横断面図。The cross-sectional view which shows a throttle valve apparatus. 開度と空気流量の関係を示すグラフ。The graph which shows the relationship between an opening degree and an air flow rate. 回転速度と空気流量との関係を示すグラフ。The graph which shows the relationship between a rotational speed and an air flow rate. 電気的構成を示すブロック図。The block diagram which shows an electrical structure. 第2実施形態の絞り弁装置を示す縦断面図。The longitudinal cross-sectional view which shows the throttle valve apparatus of 2nd Embodiment. 絞り弁装置を示す横断面図。The cross-sectional view which shows a throttle valve apparatus. 回転弁板を示す平面図。The top view which shows a rotary valve board. 絞り弁装置を示す横断面図。The cross-sectional view which shows a throttle valve apparatus. 全閉時の各回転弁板の回転位置を示す分解斜視図。The disassembled perspective view which shows the rotation position of each rotary valve plate at the time of full closure. 全開時の各回転弁板の回転位置を示す分解斜視図。The disassembled perspective view which shows the rotation position of each rotary valve plate at the time of a full open. 電気的構成を示すブロック図。The block diagram which shows an electrical structure.

符号の説明Explanation of symbols

1 絞り弁装置
2 ボア
3 ボディ
4 上回転弁板
4a 絞り孔
5 下回転弁板
5a 絞り孔
6 第1モータ(駆動手段)
7 第2モータ(駆動手段)
21 絞り弁装置
22 中回転弁板
22a 絞り孔
23 第3モータ(駆動手段)
30 ECU(同期制御手段、変速制御手段、重複制御手段)
DESCRIPTION OF SYMBOLS 1 Throttle valve device 2 Bore 3 Body 4 Upper rotary valve plate 4a Throttle hole 5 Lower rotary valve plate 5a Throttle hole 6 First motor (drive means)
7 Second motor (drive means)
21 Throttle valve device 22 Middle rotary valve plate 22a Throttle hole 23 Third motor (drive means)
30 ECU (synchronous control means, shift control means, overlap control means)

Claims (4)

流体が流れるボアを含むボディと、
前記ボアを横切る状態で前記ボディに回転可能に設けられ、互いに非接触状態で平行に配置された複数の回転弁板と、
前記複数の回転弁板は、回転により互いに重複可能な絞り孔を含むことと、
前記各回転弁板を回転させるために前記各回転弁板のそれぞれに対応して設けられた駆動手段と
を備えたことを特徴とする絞り弁装置。
A body containing a bore through which fluid flows;
A plurality of rotary valve plates provided rotatably in the body in a state of crossing the bore, and arranged in parallel without being in contact with each other;
The plurality of rotary valve plates include throttle holes that can be mutually overlapped by rotation;
A throttle valve device comprising drive means provided corresponding to each of the rotary valve plates for rotating the rotary valve plates.
流体が流れるボアを含むボディと、
前記ボアを横切る状態で前記ボディに回転可能に設けられ、互いに非接触状態で平行に配置された複数の回転弁板と、
前記複数の回転弁板は、回転により互いに重複可能な絞り孔を含むことと、
前記各回転弁板を回転させるために前記各回転弁板のそれぞれに対応して設けられた駆動手段と、
前記複数の絞り孔が互いに非重複となる状態を保ちながら前記複数の回転弁板を同期回転させるために前記各駆動手段を制御する同期制御手段と
を備えたことを特徴とする絞り弁装置。
A body containing a bore through which fluid flows;
A plurality of rotary valve plates provided rotatably in the body in a state of crossing the bore, and arranged in parallel without being in contact with each other;
The plurality of rotary valve plates include throttle holes that can be mutually overlapped by rotation;
Drive means provided corresponding to each of the rotary valve plates to rotate the rotary valve plates;
A throttle valve device comprising: synchronization control means for controlling the drive means to synchronously rotate the plurality of rotary valve plates while maintaining the plurality of throttle holes in a non-overlapping state.
流体が流れるボアを含むボディと、
前記ボアを横切る状態で前記ボディに回転可能に設けられ、互いに非接触状態で平行に配置された複数の回転弁板と、
前記複数の回転弁板は、回転により互いに重複可能な絞り孔を含むことと、
前記各回転弁板を回転させるために前記各回転弁板のそれぞれに対応して設けられた駆動手段と、
前記複数の絞り孔が互いに非重複となる状態を保ちながら前記複数の回転弁板を同期回転させるために前記各駆動手段を制御する同期制御手段と、
前記同期回転の速度を変更するために前記各駆動制御手段を制御する変速制御手段と
を備えたことを特徴とする絞り弁装置。
A body containing a bore through which fluid flows;
A plurality of rotary valve plates that are rotatably provided on the body in a state of crossing the bore and are arranged in parallel without being in contact with each other;
The plurality of rotary valve plates include throttle holes that can be mutually overlapped by rotation;
Drive means provided corresponding to each of the rotary valve plates to rotate the rotary valve plates;
Synchronous control means for controlling each of the driving means to synchronously rotate the plurality of rotary valve plates while keeping the plurality of throttle holes non-overlapping with each other;
A throttle valve device comprising: a shift control unit that controls each of the drive control units in order to change the speed of the synchronous rotation.
前記複数の絞り孔の重複面積を変えるために前記各駆動手段を制御する重複制御手段を備えたことを特徴とする請求項1乃至3のいずれかに記載の絞り弁装置。 The throttle valve device according to any one of claims 1 to 3, further comprising an overlapping control unit that controls each of the driving units to change an overlapping area of the plurality of throttle holes.
JP2004132327A 2004-04-28 2004-04-28 Throttle valve device Pending JP2005315131A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004132327A JP2005315131A (en) 2004-04-28 2004-04-28 Throttle valve device

Publications (1)

Publication Number Publication Date
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Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008202783A (en) * 2007-01-22 2008-09-04 Jig Engineering Co Ltd Air rotary valve for netted air chamber type wet gravity sorter
WO2016056390A1 (en) * 2014-10-08 2016-04-14 東京エレクトロン株式会社 Gas supply mechanism and semiconductor production device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008202783A (en) * 2007-01-22 2008-09-04 Jig Engineering Co Ltd Air rotary valve for netted air chamber type wet gravity sorter
WO2016056390A1 (en) * 2014-10-08 2016-04-14 東京エレクトロン株式会社 Gas supply mechanism and semiconductor production device

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