JP2005315090A - 分子ポンプの温度制御装置 - Google Patents
分子ポンプの温度制御装置 Download PDFInfo
- Publication number
- JP2005315090A JP2005315090A JP2004130815A JP2004130815A JP2005315090A JP 2005315090 A JP2005315090 A JP 2005315090A JP 2004130815 A JP2004130815 A JP 2004130815A JP 2004130815 A JP2004130815 A JP 2004130815A JP 2005315090 A JP2005315090 A JP 2005315090A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- stator
- molecular pump
- rotor
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
【解決手段】 ロータ4の外側及び内側にステータ3a1、3b1を有すると共に、これらステータ3a1、3b1の加熱手段5を有する分子ポンプ1において、前記ロータ及びステータの温度検出手段7a、7bと、該温度検出手段7a、7bからの検出信号を入力して前記加熱手段5を制御する制御手段6とを具備し、分子ポンプ1の運転開始後の一定時間に限り前記ステータを所定の温度勾配で加熱制御するように形成した。
【選択図】 図2
Description
3 ねじ溝真空ポンプ部
3a1 外側ステータ
3b1 内側ステータ
4 ロータ
5 加熱手段(ヒータ)
6 制御手段(制御装置)
7a、7b 温度検出手段(温度センサー)
Claims (5)
- 互に連設されている外側ステータと内側ステータとの対向面間に形成される円筒状の空隙部に円筒状のロータを介入配置し、ロータとステータの対向面のいずれか一方の面にねじ溝を形成したねじ溝真空ポンプ部を有する分子ポンプにおいて、前記ステータの温度を検出する温度検出手段と、前記ステータを加熱する加熱手段と、該温度検出手段からの検出信号を入力して前記ステータを設定温度に制御する制御信号を前記加熱手段に出力する制御手段とを具備し、該制御手段はポンプの運転開始後の一定時間内に限り前記ステータを所定の温度勾配で加熱制御することを特徴とする分子ポンプの温度制御装置。
- 前記所定の温度勾配によるステータの加熱制御により、前記ロータとステータの温度差が所定値以下となるように形成したことを特徴とする請求項1に記載の分子ポンプの温度制御装置。
- 前記ステータの所定の温度勾配による加熱は、通常のPID制御による円弧状の温度上昇曲線の一部を勾配を有する直線で置き換える制御としたことを特徴とする請求項1又は請求項2に記載の分子ポンプの温度制御装置。
- 前記所定の温度勾配を、毎時5℃乃至毎時13℃としたことを特徴とする請求項1乃至請求項3のいずれか1に記載の分子ポンプの温度制御装置。
- 前記ロータとステータの温度差の所定値を55℃以下としたことを特徴とする請求項2に記載の温度制御装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004130815A JP4528019B2 (ja) | 2004-04-27 | 2004-04-27 | 分子ポンプの温度制御装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004130815A JP4528019B2 (ja) | 2004-04-27 | 2004-04-27 | 分子ポンプの温度制御装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005315090A true JP2005315090A (ja) | 2005-11-10 |
JP4528019B2 JP4528019B2 (ja) | 2010-08-18 |
Family
ID=35442794
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004130815A Expired - Lifetime JP4528019B2 (ja) | 2004-04-27 | 2004-04-27 | 分子ポンプの温度制御装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4528019B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015525049A (ja) * | 2012-02-10 | 2015-08-27 | ルノー エス.ア.エス. | 温度に基づき電気機械の電力供給を制御するためのシステムおよび方法 |
GB2553374A (en) * | 2016-09-06 | 2018-03-07 | Edwards Ltd | Temperature sensor for a high speed rotating machine |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03290092A (ja) * | 1990-02-28 | 1991-12-19 | Shimadzu Corp | ターボ分子ポンプ |
JPH08338394A (ja) * | 1995-06-13 | 1996-12-24 | Japan Atom Energy Res Inst | 分子ポンプ |
JP2001329991A (ja) * | 2000-05-18 | 2001-11-30 | Alps Electric Co Ltd | ターボ分子ポンプ |
JP2002070788A (ja) * | 2000-09-05 | 2002-03-08 | Shimadzu Corp | ターボ分子ポンプの温度制御回路 |
JP2004076622A (ja) * | 2002-08-13 | 2004-03-11 | Osaka Vacuum Ltd | 分子ポンプのシール構造 |
-
2004
- 2004-04-27 JP JP2004130815A patent/JP4528019B2/ja not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03290092A (ja) * | 1990-02-28 | 1991-12-19 | Shimadzu Corp | ターボ分子ポンプ |
JPH08338394A (ja) * | 1995-06-13 | 1996-12-24 | Japan Atom Energy Res Inst | 分子ポンプ |
JP2001329991A (ja) * | 2000-05-18 | 2001-11-30 | Alps Electric Co Ltd | ターボ分子ポンプ |
JP2002070788A (ja) * | 2000-09-05 | 2002-03-08 | Shimadzu Corp | ターボ分子ポンプの温度制御回路 |
JP2004076622A (ja) * | 2002-08-13 | 2004-03-11 | Osaka Vacuum Ltd | 分子ポンプのシール構造 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015525049A (ja) * | 2012-02-10 | 2015-08-27 | ルノー エス.ア.エス. | 温度に基づき電気機械の電力供給を制御するためのシステムおよび方法 |
GB2553374A (en) * | 2016-09-06 | 2018-03-07 | Edwards Ltd | Temperature sensor for a high speed rotating machine |
US10837836B2 (en) | 2016-09-06 | 2020-11-17 | Edwards Limited | Temperature sensor for a high speed rotating machine |
GB2553374B (en) * | 2016-09-06 | 2021-05-12 | Edwards Ltd | Temperature sensor for a high speed rotating machine |
Also Published As
Publication number | Publication date |
---|---|
JP4528019B2 (ja) | 2010-08-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6416290B1 (en) | Turbo molecular pump | |
CN109642826B (zh) | 用于高速旋转机器的红外温度传感器 | |
JP4235273B2 (ja) | 真空ポンプ | |
CN111836968A (zh) | 真空泵 | |
WO2017086135A1 (ja) | 真空ポンプ | |
US20170002832A1 (en) | Vacuum pump | |
KR102214001B1 (ko) | 진공 펌프, 및 이 진공 펌프에 이용되는 단열 스페이서 | |
JP4594689B2 (ja) | 真空ポンプ | |
JP4528019B2 (ja) | 分子ポンプの温度制御装置 | |
JP2002180988A (ja) | 真空ポンプ | |
US10917940B2 (en) | Vacuum pump and pump-integrated power source device | |
JP2009074512A (ja) | ターボ分子ポンプ | |
US10221863B2 (en) | Vacuum pump | |
JP4673011B2 (ja) | ターボ分子ポンプの温度制御装置 | |
JP2005083271A (ja) | 真空ポンプ | |
EP3808983B1 (en) | Vacuum pump with heater in the side cover | |
JP7427536B2 (ja) | 真空ポンプ | |
JP2006037739A (ja) | ターボ分子ポンプ装置 | |
JP2003197552A (ja) | 熱処理炉用ヒータ | |
JP3084622B2 (ja) | ターボ分子ポンプ | |
JP2611039B2 (ja) | 磁気軸受タ−ボ分子ポンプ | |
JP2930015B2 (ja) | ターボ分子ポンプ | |
JP5374249B2 (ja) | マイクロ波漏洩抑制部材およびハイブリッド式加熱炉 | |
US20200092952A1 (en) | Vacuum pump and heating device therefor | |
US10221864B2 (en) | Vacuum pump |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070418 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20090916 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090918 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20091113 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20100517 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20100604 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130611 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4528019 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |