JP2005309943A - Control method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent an integration wind-up and to enable application of a conventional parameter adjusting method and automatic adjusting function. <P>SOLUTION: A control system which has a plurality of control loops is equipped with calculation parts 66-1, 66-2, and 66-3 that convert tracking state quantity deviations calculated based upon input values for control operation inputted to PID control arithmetic parts 64-1, 64-2, and 64-3 controlling tracking state quantities into internal deviations when a specified state quantity is regarded as a reference state quantity and a state quantity controlled so that a relative quantity from the reference state quantity maintains a prescribed value is regarded as a tracking state quantity. The calculation parts 66-1, 66-2, and 66-3 calculate the internal deviations by regarding the internal deviations as sums of a 1st element for the reference state quantity and a 2nd element for the relative quantity, elements of the input values for control operation for the reference state quantity as the 1st elements, and values obtained by multiplying the elements of the input values for control operation for the relative quantity by a 1st coefficient as the 2nd elements. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a process control technique, and more particularly to a control method for controlling a relative quantity such as a state quantity difference in a control system having at least two control loops.

  FIG. 17A shows the configuration of a temperature controller that is a conventional control device (see, for example, Patent Document 1). A heat treatment work 1016 is carried into the furnace 1001, and the heater 1011, detection means 1012 for detecting the control temperature TC 1, detection means 1013 for detecting the surface temperature TC 2 of the work 1016, and the deepest temperature TC 3 of the work 1016. Detection means 1014 for detecting is arranged. Reference numeral 1002 denotes a power regulator. The control unit 1003 includes a comparator 1031 that compares the control temperature TC1 and the execution program pattern set value 1033, a control calculation unit 1032 such as PID controlled by the output of the comparator 1031, and the surface temperature TC2 of the workpiece 1016 and the deepest surface temperature TC2. A temperature difference detector 1034 that detects a difference from the temperature TC3, a temperature difference setter 1035 that sets a predetermined temperature difference, and an output of the temperature difference detector 1034 and an output of the temperature difference setter 1035 are compared. The comparator 1036, the change rate detector 1038 for detecting the temperature change rate of the deepest temperature TC3, and the output of the change rate detector 1038 are compared with the output of the change rate setter 1039 for setting a predetermined temperature change rate. The comparator 1040 to perform, the inclination calculation based on the output of the comparator 1036 and the output of the comparator 1040, and the execution program pattern set value 103 And an inclined calculator 1037 for controlling.

The maximum allowable temperature difference is set in the temperature difference setting unit 1035, and the maximum allowable temperature change rate is set in the change rate setting unit 1039. With the configuration of FIG. 17A, the gradient in the execution program pattern set value 1033 is constantly corrected so that one or both of the temperature difference and the temperature change rate in the heat-treated workpiece 1016 fall within the specified temperature tolerance. The
When attention is paid to the portion surrounded by the broken line in FIG. 17A, the state quantity for calculating the temperature difference (TC2-TC3) and the temperature change rate dTC3 / dt based on the plurality of measured temperatures TC1, TC2, TC3. You can see that the conversion is taking place. That is, the temperature controller in FIG. 17A includes a state quantity conversion unit 1041 that calculates the temperature difference (TC2−TC3) and the temperature change rate dTC3 / dt (FIG. 17B).

  FIG. 18 (a) shows a configuration of a temperature control device that is another conventional control device (see, for example, Patent Document 2). In the figure, reference numeral 2002 denotes a reaction tube of the vertical heat treatment apparatus 2020. Inside the reaction tube 2002, a temperature sensor A for detecting the temperature in the vicinity of the semiconductor wafer mounted on the wafer board 2021 is provided. A temperature sensor B that detects the temperature of the outer surface of the reaction tube 2002 is provided. The deviation circuit unit 2031 outputs a deviation obtained by subtracting a correction value described later from the target value of the temperature sensor A, that is, the target value of the temperature sensor B. The deviation circuit unit 2032 outputs a deviation obtained by subtracting the detection value of the temperature sensor B from the target value of the temperature sensor B to the PID adjustment unit 2004. The PID adjustment unit 2004 performs PID calculation based on the input deviation and outputs the calculation result to the power control unit 2005. The power control unit 2005 uses the vertical heat treatment apparatus based on the output value of the PID adjustment unit 2004. The power supply amount to the heater 2006, which is a heating source of 2020, is controlled. On the other hand, when the detected value of the temperature sensor B converges to the target value, the correction value output unit 2007 calculates the difference (A−B) between the detected value of the temperature sensor A and the detected value of the temperature sensor B at the time of convergence. As a correction value, the target value of the temperature sensor B is corrected by the correction value. With the configuration of FIG. 18A, the detection value of the temperature sensor A converges to the target value.

When attention is paid to a portion surrounded by a broken line in FIG. 18A, it is understood that state quantity conversion for calculating a temperature difference (A−B) based on a plurality of measured temperatures A and B is performed. it can. That is, the temperature adjustment device in FIG. 18A includes the state quantity conversion unit 2008 that calculates the temperature difference (A−B) (FIG. 18B).
As described above, efforts have been made in the past to incorporate not only the actual state quantity itself but also the state quantity difference into the control system. The state quantity conversion unit is provided.

  Here, let us consider that in the two control loops, the state quantity average value PV1 'and the state quantity difference PV2' are controlled, not the state quantities PV1 and PV2 themselves. The control device in this case is shown in FIG. 19 includes a subtractor 3001 that outputs a difference between the set value SP1 ′ and the state quantity average value PV1 ′ with respect to the state quantity average value PV1 ′, and a set value SP2 ′ and the state quantity difference with respect to the state quantity difference PV2 ′. Subtractor 3002 that outputs the difference from PV2 ′, controllers C1 and C2 that calculate operation amounts MV1 and MV2 based on the outputs of subtractors 3001 and 3002, and operation amounts for control target processes P1 and P2, respectively. Actuators A1 and A2 that perform operations according to MV1 and MV2 and a state quantity conversion unit 3003 are included.

The state quantity conversion unit 3003 multiplies multipliers 3004 and 3005 for multiplying the state quantities PV1 and PV2 of the control target processes P1 and P2 by 0.5 and −1 and 1 respectively for the state quantities PV1 and PV2. Multipliers 3006 and 3007 for multiplication, an adder 3008 for adding the outputs of the multipliers 3004 and 3005, and an adder 3009 for adding the outputs of the multipliers 3006 and 3007. By such a state quantity conversion unit 3003, the state quantity average value PV1 ′ and the state quantity difference PV2 ′ are expressed by the following equations.
PV1 ′ = 0.5PV1 + 0.5PV2 (1)
PV2 ′ = PV2-PV1 (2)
Further, the input / output relationship of the state quantity conversion unit 3003 is expressed as a matrix as follows.

  The controller C1 targets the state quantity average value PV1 ', and the controller C2 targets the state quantity difference PV2'. The controller C1 calculates the manipulated variable MV1 based on the deviation between the set value SP1 ′ and the state quantity average value PV1 ′, and the controller C2 calculates the manipulated variable MV2 based on the deviation between the set value SP2 ′ and the state quantity difference PV2 ′. calculate. At this time, since the state quantity average value PV1 ′ and the state quantity difference PV2 ′ are in a controllable state, the operation amount MV1 calculated by the controller C1 is sent to the actuator A1, and the operation calculated by the controller C2 is performed. The quantity MV2 is configured to be sent to the actuator A2. As a result, the actuator A1 operates to control the state quantity average value PV1 ', and the actuator A2 operates to control the state quantity difference PV2'. In this way, the controller C1 that directly controls the state quantity average value PV1 ′ and the state quantity difference PV2 simply by applying the state quantity conversion unit 3003 similar to that shown in FIGS. 17B and 18B. A multi-loop control system including a controller C2 that directly controls' can be configured, and the state quantity average value PV1 'and the state quantity difference PV2' can be controlled to desired values.

  However, when the state quantity PV1 is changed by the operation of the actuator A1, this change also affects the state quantity difference PV2 'by the action of the state quantity conversion unit 3003. Similarly, when the state quantity PV2 is changed by the operation of the actuator A2, this change also affects the state quantity average value PV1 'by the action of the state quantity conversion unit 3003. That is, in the control device shown in FIG. 19, the state quantity conversion unit 3003 is configured to artificially generate inter-loop interference.

  Since the coefficients multiplied by the state quantities PV1 and PV2 to calculate the state quantity average value PV1 ′ are both 0.5, the process gain Kp1 of the control target process P1 and the process gain Kp2 of the control target process P2 are approximately the same. Assuming that, the degree of influence on the state quantity average value PV1 ′ due to operation of the actuator A1 and the degree of influence on the state quantity average value PV1 ′ due to inter-loop interference when the actuator A2 operates (state due to the actuator A2) The degree of influence that disturbs the quantity average value PV1 ′) is about the same. Similarly, since the absolute values of the coefficients multiplied by the state quantities PV1 and PV2 in order to calculate the state quantity difference PV2 ′ are both 1, the degree of influence on the state quantity difference PV2 ′ due to the operation of the actuator A2; The degree of influence on the state quantity difference PV2 ′ due to interference between loops when the actuator A1 operates (the degree of influence that the state quantity difference PV2 ′ is disturbed by the actuator A1) is about the same. Therefore, simply applying the state quantity conversion unit inherently tends to increase the artificial inter-loop interference, which causes a problem that the controllability tends to deteriorate.

  Therefore, in order to realize non-interference between loops, it is easily conceivable to apply the cross controller disclosed in Non-Patent Document 1. The configuration of the control device disclosed in Non-Patent Document 1 is shown in FIG. 20 includes a subtractor 4001 that outputs a difference between the set value SP1 and the state quantity PV1, a subtractor 4002 that outputs a difference between the set value SP2 and the state quantity PV2, and outputs of the subtractors 4001 and 4002. Controller 4003 and 4004 for calculating the operation amounts MV1 and MV2, respectively, and a cross controller 4005 for outputting the operation amounts MV1 ′ and MV2 ′ obtained by converting the operation amounts MV1 and MV2, respectively.

The cross controller 4005 performs processing for previously canceling the influence due to the interference between the loops on the operation amounts MV1 and MV2, a multiplier 4007 that multiplies the operation amount MV1 by a coefficient M12, and a coefficient M21 on the operation amount MV2. Multiplier 4008 for multiplication, subtractor 4009 for outputting the difference between operation amount MV1 and the output of multiplier 4008 as operation amount MV1 ′, and the difference between operation amount MV2 and the output of multiplier 4007 as operation amount MV2 ′. And a subtractor 4010 for outputting. Here, for simplicity of explanation, dynamic characteristics such as process time constant and process dead time are ignored. Assuming that the process gains of the control target process 4006 for the manipulated variables MV1 ′ and MV2 ′ are Kp1 and Kp2, respectively, according to Non-Patent Document 1, the cross controller 4005 for non-interference can be designed as follows.
MV1 ′ = MV1 + (− 0.5Kp2 / 0.5Kp1) MV2 (4)
MV2 ′ = (Kp1 / Kp2) MV1 + MV2 (5)
Further, the input / output relationship of the cross controller 4005 is expressed in a matrix as follows.

  That is, the coefficient M12 is −Kp1 / Kp2, and the coefficient M21 is 0.5Kp2 / 0.5Kp1. The operation amount MV1 calculated by the controller 4003 is converted into the operation amount MV1 ′ by the cross controller 4005 and then sent to the control target process 4006 via an actuator (not shown). The operation amount MV2 calculated by the controller 4004 is After being converted into the operation amount MV2 ′ by the controller 4005, it is sent to the control target process 4006 via the actuator.

  FIG. 21 shows a configuration in which the cross controller 4005 shown in FIG. 20 is applied to the control device of FIG. By using the state quantity conversion unit 3003 and the cross controller 4005, only the first control loop centering on the controller C1 that exclusively controls the state quantity average value PV1 ′ and only the state quantity difference PV2 ′ are exclusively used. A multi-loop control system having a second control loop centered on the controller C2 to be controlled can be realized. The response characteristic of the controller C1 that exclusively controls the state quantity average value PV1 ′ is adjusted in the direction of emphasizing stability (low sensitivity), and the response characteristic of the controller C2 that exclusively controls the state quantity difference PV2 ′ is obtained. If adjustment is made in a direction that emphasizes responsiveness (high sensitivity), the state quantity difference PV2 ′ follows the set value SP2 ′ before the state quantity average value PV1 ′ follows the set value SP1 ′. Thus, it is possible to perform control such that the state quantity average value PV1 ′ is changed to a desired value while maintaining the state quantity difference PV2 ′ at a desired value.

The applicant has not yet found prior art documents related to the present invention by the time of filing other than the prior art documents specified by the prior art document information described in this specification.
JP-A-8-095647 JP-A-9-199491 Kazuo Hiroi, “Basics and Applications of Digital Instrumentation Control System”, Industrial Technology Co., Ltd., October 1987, p. 152-156, ISBN4-905957-00-1

[First issue]
An actual actuator has upper and lower limits of output, and the controller must calculate an operation amount in consideration of the upper and lower limits. That is, in a state where the output of the actuator reaches the upper limit value or the lower limit value and the change in the state quantity is limited, the controller must not raise or lower the operation amount calculation result more than necessary. If a controller such as PID does not consider the physical upper and lower limits of the actuator, there is a problem of integral windup.

  Hereinafter, this integral windup will be specifically described. For example, when the state quantity is temperature and the actuator is a heater, the heater output is generally limited to a lower limit value of 0% and an upper limit value of 100%. When the operation amount MV calculated by the controller increases and reaches 100%, the heater output also reaches 100%. At this time, when the temperature measurement value PV is lower than the temperature set value SP, if the controller ignores the upper limit value 100% of the heater output, the controller calculates an operation amount MV larger than 100%. Become. However, since the heater output saturates at 100%, the increase in the temperature measurement value PV corresponding to the increase in the heater output reaches the limit, and as a result, the controller increases the manipulated variable MV to a larger value. .

  Then, it is assumed that the temperature set value SP is changed to a value lower than the temperature measurement value PV when the calculated value of the manipulated variable MV continues to increase and reaches, for example, 500%. By changing the temperature setting value SP, the controller lowers the operation amount MV from 500%, so that the operation amount MV lower than the upper limit value 100% of the heater output is output from the controller. It takes a long time. Therefore, although the temperature set value SP is changed to a value lower than the temperature measurement value PV, the controller outputs an operation amount of 100% for a long time, and as a result, the start of the temperature drop is greatly delayed. . As described above, the calculation result of the operation amount MV becomes higher than necessary, and the phenomenon that the decrease in the operation amount MV is delayed when the set value SP is changed to a small value is a phenomenon called integral windup. This is because the operation amount is not calculated in consideration of the physical upper and lower limits.

  In the control device shown in FIG. 21, the operation amounts MV1 and MV2 calculated by the controllers C1 and C2 are converted into operation amounts MV1 'and MV2' by the cross controller 4005. In other words, the operation amounts MV1 and MV2 calculated by the controllers C1 and C2 are calculated as composite operation amounts for the plurality of actuators A1 and A2, and the operation amounts MV1 and MV2 of the controllers C1 and C2 and the actuators A1 and A2 are calculated. There is no one-to-one correspondence with the output of A2. Therefore, even if the controllers C1 and C2 calculate the operation amounts MV1 and MV2 in consideration of the upper and lower limits of the outputs of the actuators A1 and A2, the operation amounts MV1 and MV2 are actually output to the actuators A1 and A2. Since the combined operation amounts MV1 ′ and MV2 ′ are generated, there is a possibility that an operation amount output that does not consider the upper and lower limits of the outputs of the actuators A1 and A2 is performed on the actuators A1 and A2. For this reason, the control device shown in FIG. 21 has a problem that the integral windup similar to that of the PID controller described above occurs.

[Second problem]
Moreover, in a normal controller, parameters must be adjusted according to the characteristics of the control target. An example of parameter adjustment is PID parameter adjustment in a PID controller. Conventionally, adjustment methods and automatic adjustment functions for realizing such parameter adjustment have been devised, but this adjustment method and automatic adjustment function basically consists of a controller, an actuator, a controlled object, and a measuring means physically. It is a necessary condition to support.

  Hereinafter, the conventional parameter adjustment will be specifically described. For example, consider a case where the state quantity is temperature, the actuator is a heater, the controlled object is a furnace, and the measuring means is a temperature sensor such as a thermocouple. At this time, as shown in FIG. 22, assuming two control loops, controllers 5003 and 5004, heaters 5005 and 5006 as actuators, furnaces 5007 and 5008 as control objects, and temperature sensors as measurement means. 5009, 5010. In FIG. 22, reference numeral 5001 denotes a subtractor that outputs the difference between the temperature set value SP1 and the temperature measurement value PV1, and 5002 denotes a subtractor that outputs the difference between the temperature set value SP2 and the temperature measurement value PV2.

  In the configuration of FIG. 22, although some inter-loop interference is allowed, the controller 5003 outputs an operation amount MV1 to the heater 5005, the heater 5005 mainly heats the furnace 5007, and the temperature sensor 5009 is a temperature near the furnace 5007. And the controller 5003 must execute a control calculation so as to control the temperature measurement value PV1. Similarly, the controller 5004 outputs the operation amount MV2 to the heater 5006, the heater 5006 mainly heats the furnace 5008, the temperature sensor 5010 measures the temperature near the furnace 5008, and the controller 5004 controls the temperature measurement value PV2. The control operation must be executed as follows. In this way, the controller 5003, 5004, the heaters 5005, 5006, the furnace 5007, 5008, and the temperature sensors 5009, 5010 are physically compatible with each other, so that an adjustment method or an automatic adjustment function that has been devised in the past is applied. It becomes a necessary condition to do. In other words, the controller 5003 calculates the operation amounts MV1 and MV2 distributed at the same level between the heaters 5005 and 5006 as one combined operation amount, and the controller 5004 is also equivalent to the heaters 5005 and 5006. If the operation amounts MV1 and MV2 distributed at the level of 1 are calculated as one composite operation amount, it becomes impossible to apply a conventionally devised adjustment method or automatic adjustment function.

  In the control device shown in FIG. 21, the operation amounts MV1 and MV2 calculated by the controllers C1 and C2 are converted into operation amounts MV1 'and MV2' by the cross controller 4005. In other words, the operation amounts MV1 and MV2 calculated by the controllers C1 and C2 are calculated as composite operation amounts for the plurality of actuators A1 and A2, and the operation amounts MV1 and MV2 of the controllers C1 and C2 and the actuators A1 and A2 are calculated. There is no one-to-one correspondence with the output of A2. That is, the basic condition that the controller, the actuator, the controlled object, and the measuring means physically correspond to each other is not satisfied. Therefore, in the control device shown in FIG. 21, it is impossible to apply a conventionally devised adjustment method or automatic adjustment function, and controller parameter adjustment such as PID parameter adjustment becomes very difficult. was there.

  The present invention has been made to solve the above-described problems, and changes an absolute amount such as an average value of a plurality of state quantities to a desired value while maintaining a relative amount between the plurality of state quantities at a desired value. It is an object of the present invention to provide a control method that can prevent integral windup in a control system that performs such control, and that can apply a conventionally devised parameter adjustment method, automatic adjustment function, and the like.

According to the present invention, in a control method of a control system having at least two control loops, a state quantity serving as a specific reference is set as a reference state quantity, and a relative quantity with respect to the reference state quantity is maintained at a predetermined value. When the state quantity controlled in the following is the follow-up state quantity, the follow-up state quantity deviation Eri calculated based on a plurality of control calculation input values input to the controller that controls the follow-up state quantity A calculation procedure for inputting the tracking state quantity internal deviation Eri ′ to the reference state quantity and a second element for the relative quantity. A value obtained by multiplying the element of the control calculation input value with respect to the relative quantity by a predetermined first coefficient, the element of the control calculation input value with respect to the reference state quantity as the first element With the second element, in which to calculate the follow-up state quantity internal deviation Eri '.
Further, in one configuration example of the control method of the present invention, the calculation procedure uses, as the first element of the tracking state quantity internal deviation Eri ', the element of the control calculation input value with respect to the reference state quantity as it is. Instead of this, a value obtained by multiplying the element of the control calculation input value with respect to the reference state quantity by a predetermined second coefficient is used.

In one configuration example of the control method of the present invention, the calculation procedure includes, as the control calculation input value, a preset reference state quantity set value SPm, a measured reference state quantity measurement value PVm, When the set following state quantity set value SPi and the measured following state quantity measured value PVi are input, a first difference between the following state quantity set value SPi and the reference state quantity set value SPm; The second difference between the follow-up state quantity measurement value PVi and the reference state quantity measurement value PVm defines the degree of followability of the follow-up state quantity measurement value PVi to the reference state quantity measurement value PVm. The second element of the follow-up state amount internal deviation Eri ′ is calculated by multiplying the value based on the coefficient Bi of 1 and linearly combining the first difference and the second difference. It is a thing.
In one configuration example of the control method of the present invention, the calculation procedure includes, as the control calculation input value, a preset reference state quantity set value SPm, a measured reference state quantity measurement value PVm, When the set following state quantity set value SPi and the measured following state quantity measured value PVi are input, the degree of followability of the following state quantity measured value PVi to the reference state quantity measured value PVm is specified. The follow-up state quantity internal deviation Eri ′ is calculated by Eri ′ = SPm−PVm + Bi {(SPi−SPm) − (PVi−PVm)} using the first coefficient Bi.
In one configuration example of the control method of the present invention, the calculation procedure includes, as the control calculation input value, a preset reference state quantity set value SPm, a measured reference state quantity measurement value PVm, When the set following state quantity set value SPi and the measured following state quantity measured value PVi are input, the degree of followability of the following state quantity measured value PVi to the reference state quantity measured value PVm is specified. The follow-up state quantity internal deviation Eri ′ is calculated by Eri ′ = (1−Bi) (SPm−PVm) + Bi (SPi−PVi) using the first coefficient Bi.

In one configuration example of the control method of the present invention, the calculation procedure includes, as the control calculation input value, a preset reference state quantity set value SPm, a measured reference state quantity measurement value PVm, When the set follow-up state quantity relative set value ΔSPim, which is a set value for the relative quantity, and the measured follow-up state quantity measured value PVi are input, the follow-up state quantity relative set value ΔSPim and the follow-up state Based on the first coefficient Bi that defines the degree of followability of the follow-up state quantity measurement value PVi to the reference state quantity measurement value PVm in the difference between the quantity measurement value PVi and the reference state quantity measurement value PVm. The second element of the tracking state quantity internal deviation Eri ′ is calculated by multiplying the values and linearly combining the tracking state quantity relative setting value ΔSPim and the difference. The
In one configuration example of the control method of the present invention, the calculation procedure includes, as the control calculation input value, a preset reference state quantity set value SPm, a measured reference state quantity measurement value PVm, When the set follow-up state quantity relative set value ΔSPim, which is a set value for the relative quantity, and the measured follow-up state quantity measurement value PVi are input, the reference state quantity measurement of the follow-up state quantity measurement value PVi is performed. The follow-up state quantity internal deviation Eri ′ is calculated by Eri ′ = SPm−PVm + Bi {ΔSPim− (PVi−PVm)} using the first coefficient Bi that defines the degree of followability to the value PVm. It is a thing.

Further, in one configuration example of the control method of the present invention, the calculation procedure inputs a preset reference state quantity setting value SPm and a measured reference state quantity measurement value PVm as the control calculation input values. When the reference state quantity setting value SPm and the reference state quantity measurement value PVm are set, the second state that defines the degree of responsiveness of the reference state quantity measurement value PVm to the reference state quantity setting value SPm. The first element of the tracking state quantity internal deviation Eri ′ is calculated by multiplying the value based on the coefficient Am and linearly combining the reference state quantity set value SPm and the reference state quantity measurement value PVm. It is what I did.
In one configuration example of the control method of the present invention, the calculation procedure includes, as the control calculation input value, a preset reference state quantity set value SPm, a measured reference state quantity measurement value PVm, When the set following state quantity set value SPi and the measured following state quantity measured value PVi are input, the degree of followability of the following state quantity measured value PVi to the reference state quantity measured value PVm is specified. Using the first coefficient Bi and the second coefficient Am that defines the degree of responsiveness of the reference state quantity measurement value PVm to the reference state quantity set value SPm. Eri ′ is calculated by Eri ′ = Am (SPm−PVm) + Bi {(SPi−SPm) − (PVi−PVm)}.
In one configuration example of the control method of the present invention, the calculation procedure includes, as the control calculation input value, a preset reference state quantity set value SPm, a measured reference state quantity measurement value PVm, When the set following state quantity set value SPi and the measured following state quantity measured value PVi are input, the degree of followability of the following state quantity measured value PVi to the reference state quantity measured value PVm is specified. Using the first coefficient Bi and the second coefficient Am that defines the degree of responsiveness of the reference state quantity measurement value PVm to the reference state quantity set value SPm. Eri ′ is calculated by Eri ′ = (Am−Bi) (SPm−PVm) + Bi (SPi−PVi).

In one configuration example of the control method of the present invention, the calculation procedure includes, as the control calculation input value, a preset reference state quantity set value SPm, a measured reference state quantity measurement value PVm, When the set follow-up state quantity relative set value ΔSPim, which is a set value for the relative quantity, and the measured follow-up state quantity measurement value PVi are input, the reference state quantity measurement of the follow-up state quantity measurement value PVi is performed. The first coefficient Bi that defines the degree of followability to the value PVm, and the second coefficient Am that defines the degree of responsiveness of the reference state measurement value PVm to the reference state quantity set value SPm; The follow-up state quantity internal deviation Eri ′ is calculated by Eri ′ = Am (SPm−PVm) + Bi {ΔSPim− (PVi−PVm)}.
Further, in one configuration example of the control method of the present invention, the reference state quantity is an average value of two or more following state quantities, and the reference state quantity set value SPm is a value corresponding to each of the two or more following state quantities. The reference state quantity measurement value PVm is an average value of the set values, and is an average value of the measurement values of the two or more following state quantities.
Further, in one configuration example of the control method of the present invention, the reference state quantity is one state quantity specified in advance, and the reference state quantity set value SPm is a set value for the one state quantity. The reference state quantity measurement value PVm is a measurement value of the one state quantity.
Further, in one configuration example of the control method of the present invention, the first coefficient is set so that the followability of the follow-up state quantity measurement value PVi to the reference state quantity measurement value PVm is improved. .

  According to the present invention, in a control system having at least two control loops, a state quantity serving as a specific reference is set as a reference state quantity, and a relative quantity with the reference state quantity is maintained at a predetermined value. When the controlled state quantity is the follow-up state quantity, the follow-up state quantity deviation Eri calculated based on a plurality of control calculation input values input to the controller that controls the follow-up state quantity is set as the follow-up state quantity internal deviation Eri ′. A calculation procedure to be input to the controller is executed after conversion into the following, and in this calculation procedure, the tracking state quantity internal deviation Eri ′ is calculated as the sum of the first element with respect to the reference state quantity and the second element with respect to the relative quantity. Thus, it is possible to realize control for changing the reference state quantity such as the state quantity average value to a desired value while maintaining the relative quantity such as the difference between the state quantity and the reference state quantity at a desired value. That. Further, in the present invention, since a control system in which the operation amount of the controller and the actual actuator output correspond one-to-one can be configured, integral wind-up can be prevented, and parameters conventionally devised. The controller can be adjusted by applying an adjustment method or automatic adjustment function. Further, as a second element of the tracking state quantity internal deviation Eri ′, by using a value obtained by multiplying the element of the control calculation input value for the relative quantity by the first coefficient, the relative quantity is controlled with priority. The reference state quantity can also be controlled simultaneously.

  Further, by using a value obtained by multiplying the element of the input value for control calculation with respect to the reference state quantity by the second coefficient as the first element of the tracking state quantity internal deviation Eri ′, the control based on the first coefficient is performed. It is possible to avoid the instability of the control due to the high sensitivity of the sensor and to sacrifice the priority of the relative amount between the reference state amount and the tracking state amount.

[Principle of the Invention]
Hereinafter, in the present invention, an absolute state quantity serving as a reference, such as a state quantity average value, is set as a reference state quantity, and a relative amount (for example, a state quantity difference) with the reference state quantity is maintained at a predetermined value. The controlled state quantity is referred to as a follow-up state quantity. Also, the setting value for the reference state quantity is the reference state quantity setting value, the measurement value for the reference state quantity is the reference state quantity measurement value, the setting value for the tracking state quantity is the tracking state quantity setting value, and the tracking state quantity measurement value is the tracking state Measured value, set value for the relative amount of the reference state amount and the tracking state amount is the tracking state amount relative setting value, and the measured value of the relative amount of the reference state amount and the tracking state amount is the tracking state amount relative measured value, the reference state The internal deviation set in the controller with respect to the reference state quantity deviation that is the difference between the quantity set value and the reference state quantity measurement value is the difference between the reference state quantity internal deviation, the tracking state quantity setting value, and the tracking state quantity measurement value. An internal deviation set inside the controller with respect to the tracking state quantity deviation which is a difference is referred to as a tracking state quantity internal deviation. Examples of the state quantity include temperature, pressure, and flow rate.

  In the present invention, the manipulated variable MV is calculated by using the internal deviation Er ′ calculated inside the controller separately from the deviation Er = SP−PV by the state quantity set value SP and the state quantity measurement value PV given from the outside. It shall be calculated. At this time, the internal deviation Er ′ is separated into an element Erm with respect to the reference state quantity and an element ΔEr with respect to the relative quantity between the reference state quantity and the follow-up state quantity (Er ′ = Erm + ΔEr). Further, in the present invention, if the deviation is corrected to be smaller than the actual value or corrected to be larger than the actual value, the controller characteristic is substantially shifted to the low sensitivity side, or the high sensitivity side is corrected. In particular, the sensitivity of the reference state quantity and the sensitivity of the relative quantity of the reference state quantity and the tracking state quantity are converted into internal deviations Er ′ that can be individually shifted.

  Thus, in the present invention, the internal deviation Er ′ is separated into the element Erm with respect to the reference state quantity and the element ΔEr with respect to the relative quantity between the reference state quantity and the follow-up state quantity, and this internal deviation Er ′ is determined from the actual deviation Er. Also, the operation amount MV is corrected to a smaller value or a larger value to be used for calculating the operation amount MV. Thus, in the present invention, the response characteristic is shifted to the low sensitivity side for the reference state quantity such as the average value of the state quantity, and the response is made for the relative quantity between the reference state quantity and the tracking state quantity such as the state quantity difference. If the characteristic is shifted to the high sensitivity side, the tracking state quantity relative measurement value ΔPV follows the tracking state quantity relative setting value ΔSP before the reference state quantity measurement value PVm follows the reference state quantity setting value SPm. Therefore, it is possible to perform control such that the reference state quantity is changed to a desired value while maintaining the relative amount between the reference state quantity and the follow-up state quantity at a desired value.

  Further, according to the configuration of the present invention, the only difference from the normal control system is that the deviation Er is converted into the internal deviation Er ′. That is, a control that controls the reference state quantity at the same time while preferentially controlling the relative quantity between the reference state quantity and the follow-up state quantity in a form in which the operation amount of the controller and the actual actuator output have a one-to-one correspondence. A method can be provided.

Here, an operation of correcting the deviation Er (hereinafter referred to as the first point of interest) among the above two points of interest will be described. For example, in a PID controller or the like, the operation amount MV is calculated based on the deviation Er = SP−PV. In order to simplify the description, attention is paid to a proportional action P that calculates the operation amount MV in proportion to the deviation Er from among the actions of the PID. As is generally known, if the proportional band Pb is set to a small value, the characteristics of the PID controller shift to the high sensitivity side, which emphasizes quick response, and if the proportional band Pb is set to a large value, the characteristics of the PID controller focus on stability. Shift to the low sensitivity side. Here, the PID calculation is conceptually described using the proportional band Pb as follows.
MV = (100 / Pb) Er (7)

As apparent from the equation (7), adding an operation for correcting the deviation Er to a larger value is equivalent to correcting the proportional band Pb to a smaller value, and an operation for correcting the deviation Er to a smaller value. Is equivalent to correcting the proportional band Pb to a large value. Therefore, it is understood that the controller characteristics can be adjusted by simply correcting the deviation Er before executing the control calculation by the controller. In order to correct the deviation Er, the deviation Er may be converted into the internal deviation Er ′ using the specific coefficient A as shown in the following equation. If the value of the coefficient A is 0 <A <1, the response characteristic of the controller The sensitivity of the controller can be increased if A> 1.
Er ′ = AEr (8)

Next, of the above two viewpoints, the internal deviation Er ′ is separated into an element with respect to the reference state quantity and an element with respect to the relative quantity between the reference state quantity and the follow-up state quantity (hereinafter referred to as the second viewpoint). Will be described. When the reference state quantity and the relative quantity of the reference state quantity and the follow-up state quantity are controlled simultaneously, the deviation Er is calculated from the element Erm with respect to the reference state quantity and the reference state quantity and the follow-up state quantity as shown in the following equation. It can be separated into the element ΔErm with respect to the relative amount Er = Erm + ΔErm = (SPm−PVm) + (ΔSPm−ΔPVm) (9)

In Expression (9), ΔSPm is a follow-up state amount relative set value, and ΔPVm is a follow-up state amount relative measurement value. Here, the first focus point and the second focus point are summarized as follows from the equations (8) and (9).
Er ′ = A (Erm + ΔErm) = AErm + AΔErm (10)

At this time, AErm in equation (10) is an element related to the reference state quantity, and AΔErm is an element related to the relative quantity between the reference state quantity and the follow-up state quantity. That is, since both are separated into linearly coupled equations that can be individually adjusted for sensitivity, sensitivity adjustment can be performed using individual coefficients A and B as follows.
Er ′ = AErm + BΔErm = A (SPm−PVm) + B (ΔSPm−ΔPVm)
(11)

In Expression (11), A is a coefficient relating to the reference state quantity, and B is a coefficient relating to the relative quantity between the reference state quantity and the follow-up state quantity. When there are a plurality of control loops, the coefficient B relating to the relative amount of the reference state quantity and the follow-up state quantity is preferably given to each control loop individually. In this case, i (i is 1, 2 in the plurality of control loops) , 3...) The following deviation Eri may be converted for the following tracking state quantity.
Eri ′ = AmErm + BiΔErm = Am (SPm−PVm)
+ Bi (ΔSPim−ΔPVim) (12)

  In Expression (12), Eri ′ is an internal deviation with respect to the i-th tracking state quantity, ΔSPim is a tracking state quantity relative setting value that is a setting value of a relative amount between the reference state quantity and the i-th tracking state quantity, and ΔPVim is a reference value A follow-up state quantity relative measurement value, which is a measurement value of a relative quantity between the state quantity and the i-th follow-up state quantity, Bi is a coefficient relating to a relative quantity between the reference state quantity and the i-th follow-up state quantity. The coefficient Am related to the reference state quantity may be given to each control loop or may be given to each control loop individually.

In the equation (12), it is needless to say that ΔSPim = SPi−SPm and ΔPVim = PVi−PVm, and the following equivalent substitution can be easily performed.
Eri ′ = Am (SPm−PVm) + Bi {ΔSPim− (PVi−PVm)}
... (13)
Eri '= Am (SPm-PVm)
+ Bi {(SPi-SPm)-(PVi-PVm)} (14)

  Note that the processing inside the control device is simply different between the case where the follow-up state quantity relative measurement value ΔPVim is adopted and the case where the difference PVi−PVm between the follow-up state quantity measurement value PVi and the reference state quantity measurement value PVm is adopted. Only. On the other hand, when the follow-up state quantity relative set value ΔSPim is adopted, the operator sets the reference state quantity set value SPm and the follow-up state quantity relative set value ΔSPim through the user interface. When the difference SPi−SPm between the amount setting value SPi and the reference state amount setting value SPm is adopted, the operator sets the reference state amount setting value SPm and the tracking state amount setting value SPi through the user interface. Since there is a difference between these two cases, it will be treated as a different configuration.

Further, the equation (14) can be easily arranged into the following equivalent equations.
Eri ′ = (Am−Bi) (SPm−PVm) + Bi (SPi−PVi)
... (15)
Eri ′ = {(Am−Bi) SPm + BiSPi}
-{(Am-Bi) PVm + BiPVi} (16)

Further, when considered as SPi = SPi ″ + ΔSPi ″ and PVi = PVi ″ + ΔPVi ″, the following equivalent conversion can be easily performed in the equation (14).
Eri '= Am (SPm-PVm)
+ Bi {(SPi-SPm)-(PVi-PVm)}
= Am (SPm−PVm) + Bi {(SPi ″ + ΔSPi ″ −SPm)
− (PVi ″ + ΔPVi ″ −PVm)}
= Am (SPm-PVm) + Bi {(SPi "-SPm")
-(PVi "-PVm")} (17)

In Expression (17), SPi ″ and ΔSPi ″ are an element SPi ″ corresponding to an absolute amount and an element ΔSPi ″ corresponding to a relative amount when the follow-up state amount setting value SPi is further separated into another absolute amount and a relative amount. Yes, PVi ″ and ΔPVi ″ are an element PVi ″ corresponding to the absolute quantity and an element ΔPVi ″ corresponding to the relative quantity when the follow-up state quantity measurement value PVi is similarly separated into another absolute quantity and relative quantity. Here, SPm ″ = SPm−ΔSPi ″ and PVm ″ = PVm−ΔPVi ″. That is, replacing SPm or PVm with another SPm ″ or PVm ″ in an element related to the relative amount of the reference state quantity and the follow-up state quantity is an equivalent linear combination expression as long as the relationship between the two is clear. However, it does not substantially depart from the scope of the basic technical idea of the present invention.
Based on the above principle, the internal deviation Er ′ that can individually shift the sensitivity of the reference state quantity and the sensitivity of the relative quantity of the reference state quantity and the tracking state quantity can be obtained.

  Next, the principle of preferentially controlling the relative amount between the reference state amount and the follow-up state amount will be described. In Expression (14), if the relationship between the coefficient Am related to the reference state quantity and the coefficient Bi related to the relative quantity between the reference state quantity and the follow-up state quantity is Am = Bi = 1, then Eri '= SPi-PVi. At this time, the internal deviation Er ′ has not changed at all from the deviation Er, and the sensitivity is not changed from that in the normal control.

Here, what is particularly important is the coefficient Bi relating to the relative amount between the reference state amount and the follow-up state amount. By setting Bi> 1, the sensitivity is improved particularly with respect to the relative amount between the reference state amount and the follow-up state amount. The controller can be operated to preferentially control the amount. Therefore, even if the coefficient Am related to the reference state quantity is always set to Am = 1, the problem solving in the present invention can be achieved, and the conversion to the internal deviation Er ′ as described below may be performed.
Eri ′ = (SPm−PVm) + Bi {ΔSPim− (PVi−PVm)}
... (18)
Eri ′ = (SPm−PVm) + Bi {(SPi−SPm) − (PVi−PVm)}
... (19)
Eri ′ = (1−Bi) (SPm−PVm) + Bi (SPi−PVi) (20)
Eri '= {(1-Bi) SPm + BiSPi}
-{(1-Bi) PVm + BiPVi} (21)

  However, simply improving the sensitivity of the relative amount of the reference state amount and the follow-up state amount will make the control system unstable because the sensitivity will be excessive before sufficient control characteristics can be obtained for the relative amount. It can happen. In such a case, the instability is eliminated by setting the coefficient Am related to the reference state quantity to Am <1, instead of returning the coefficient Bi related to the relative quantity between the reference state quantity and the follow-up state quantity to a small value. It is also possible to avoid sacrificing the priority of the relative amount of the reference state amount and the follow-up state amount. Therefore, it is more preferable to employ a conversion formula in which the coefficient Am related to the reference state quantity can be adjusted.

[First Embodiment]
Hereinafter, a first embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 is a block diagram showing a configuration of a control apparatus according to the first embodiment of the present invention. In the present embodiment, when there are three control loops, the average value of the three control loop states is used as the reference state quantity, and the respective state quantities of the three control loops are adopted as the tracking state quantity. As an example, if two or more control loops are used, a similar control system can be configured based on the same principle.

  The control device of FIG. 1 includes, as a configuration of the first control system related to the first follow-up state quantity, a follow-up state quantity set value SP1 input unit 61-1, a follow-up state quantity measured value PV1 input unit 62-1, and an operation. An amount MV1 output unit 63-1, a PID control calculation unit (PID controller) 64-1, a coefficient B1 storage unit 65-1, and a follow-up state amount internal deviation Er1 ′ calculation unit 66-1. In addition, the control device of FIG. 1 includes a follow-up state quantity set value SP2 input unit 61-2, a follow-up state quantity measured value PV2 input unit 62-2, and the second control system configuration related to the second follow-up state quantity. , An operation amount MV2 output unit 63-2, a PID control calculation unit 64-2, a coefficient B2 storage unit 65-2, and a follow-up state amount internal deviation Er2 ′ calculation unit 66-2. In addition, the control device of FIG. 1 includes a tracking state quantity set value SP3 input unit 61-3, a tracking state quantity measured value PV3 input unit 62-3, and a third control system related to the third tracking state quantity. , An operation amount MV3 output unit 63-3, a PID control calculation unit 64-3, a coefficient B3 storage unit 65-3, and a follow-up state amount internal deviation Er3 ′ calculation unit 66-3.

  Furthermore, the control device of FIG. 1 calculates the average value of the follow-up state quantity set value SP1, the follow-up state quantity set value SP2, and the follow-up state quantity set value SP3 as the reference state quantity set value SPm as a configuration related to the reference state quantity. Reference state quantity set value SPm calculation unit 67, reference state quantity measurement value for calculating an average value of follow-up state quantity measurement value PV1, follow-up state quantity measurement value PV2, and follow-up state quantity measurement value PV3 as reference state quantity measurement value PVm A PVm calculation unit 68 and a coefficient Am storage unit 69 are provided.

  FIG. 2 is a block diagram of the control system in the present embodiment. In FIG. 2, Er1 ′ is an internal deviation of the first following state quantity, Er2 ′ is an internal deviation of the second following state quantity, Er3 ′ is an internal deviation of the third following state quantity, and Am is a coefficient relating to the reference state quantity. , B1 is a coefficient relating to a state quantity difference between the first following state quantity and the reference state quantity, B2 is a coefficient relating to a state quantity difference between the second following state quantity and the reference state quantity, and B3 is a third following state quantity. A coefficient relating to a state quantity difference from the reference state quantity, A1 is an actuator that controls the first follow-up state quantity, A2 is an actuator that controls the second follow-up state quantity, A3 is an actuator that controls the third follow-up state quantity, P1 is a control target process related to the first follow-up state quantity, P2 is a control target process related to the second follow-up state quantity, P3 is a control target process related to the third follow-up state quantity, and Gp1 is the actuator A1 and process P1. Including Block transfer function, Gp2 transfer function of the block and an actuator A2 and process P2, Gp3 is the transfer function of the block and an actuator A3 and process P3.

  Follow-up state quantity set value SP1 input unit 61-1, follow-up state quantity measured value PV1 input unit 62-1, operation amount MV1 output unit 63-1, PID control calculation unit 64-1, follow-up state quantity internal deviation The Er1 ′ calculating unit 66-1, the actuator A1, and the process P1 constitute a first control system (first control loop). Follow-up state quantity set value SP2 input unit 61-2, follow-up state quantity measured value PV2 input unit 62-2, manipulated variable MV2 output unit 63-2, PID control calculation unit 64-2, and follow-up state quantity internal deviation The Er2 ′ calculation unit 66-2, the actuator A2, and the process P2 constitute a second control system (second control loop). The follow-up state quantity set value SP3 input unit 61-3, the follow-up state quantity measured value PV3 input unit 62-3, the operation amount MV3 output unit 63-3, the PID control calculation unit 64-3, and the follow-up state quantity The internal deviation Er3 ′ calculating unit 66-3, the actuator A3, and the process P3 constitute a third control system (third control loop).

  Next, the operation of the control device of the present embodiment will be described with reference to FIG. First, the follow-up state quantity set value SP1 is set by the operator of the control device, and the follow-up state quantity internal deviation Er1 ′ calculating unit 66-1 and the reference state quantity set value are set via the follow-up state quantity set value SP1 input unit 61-1. This is input to the SPm calculation unit 67 (step S501 in FIG. 3). The follow-up state quantity set value SP2 is set by the operator, and the follow-up state quantity internal deviation Er2 ′ calculator 66-2 and the reference state quantity set value SPm calculator 67 are set via the follow-up state quantity set value SP2 input unit 61-2. (Step S502). The follow-up state quantity set value SP3 is set by the operator, and follows the follow-up state quantity internal deviation Er3 ′ calculator 66-3 and the reference state quantity set value SPm calculator 67 via the follow-up state quantity set value SP3 input unit 61-3. (Step S503).

  The follow-up state quantity measurement value PV1 is detected by a first detection unit (not shown), and the follow-up state quantity internal deviation Er1 ′ calculation unit 66-1 and the reference state quantity measurement are performed via the follow-up state quantity measurement value PV1 input unit 62-1. The value is input to the value PVm calculation unit 68 (step S504). The follow-up state quantity measurement value PV2 is detected by a second detection unit (not shown), and the follow-up state quantity internal deviation Er2 ′ calculation unit 66-2 and the reference state quantity measurement are performed via the follow-up state quantity measurement value PV2 input unit 62-2. The value is input to the value PVm calculation unit 68 (step S505). The follow-up state quantity measurement value PV3 is detected by a third detection unit (not shown), and the follow-up state quantity internal deviation Er3 ′ calculation unit 66-3 and the reference state quantity measurement are performed via the follow-up state quantity measurement value PV3 input unit 62-3. The value is input to the value PVm calculation unit 68 (step S506).

Subsequently, the reference state quantity set value SPm calculation unit 67 calculates an average value of the tracking state quantity set value SP1, the tracking state quantity set value SP2, and the tracking state quantity set value SP3 as a reference state quantity set value as shown in the following equation. The reference state quantity set value SPm is calculated as SPm, and the following state quantity internal deviation Er1 ′ calculating section 66-1, the following state quantity internal deviation Er2 ′ calculating section 66-2, and the following state quantity internal deviation Er3 ′ calculating section 66- 3 (step S507).
SPm = (SP1 + SP2 + SP3) / 3 (22)

The reference state quantity measurement value PVm calculation unit 68 calculates an average value of the tracking state quantity measurement value PV1, the tracking state quantity measurement value PV2, and the tracking state quantity measurement value PV3 as the reference state quantity measurement value PVm as in the following equation. Then, the reference state quantity measurement value PVm is transferred to the following state quantity internal deviation Er1 ′ calculating section 66-1, the following state quantity internal deviation Er2 ′ calculating section 66-2, and the following state quantity internal deviation Er3 ′ calculating section 66-3. Output (step S508).
PVm = (PV1 + PV2 + PV3) / 3 (23)

The coefficient Am storage unit 69 stores the coefficient Am related to the reference state quantity in advance, and the coefficient B1 storage unit 65-1 stores the coefficient B1 related to the state quantity difference between the first follow-up state quantity and the reference state quantity in advance. doing. The tracking state quantity internal deviation Er1 ′ calculation unit 66-1 is based on the coefficients Am, B1, the reference state quantity setting value SPm, the reference state quantity measurement value PVm, the tracking state quantity setting value SP1, and the tracking state quantity measurement value PV1. The tracking state quantity internal deviation Er1 ′ is calculated as shown in the following equation (step S509).
Er1 ′ = Am (SPm−PVm)
+ B1 {(SP1-SPm)-(PV1-PVm)} (24)

The coefficient B2 storage unit 65-2 stores in advance a coefficient B2 related to the state quantity difference between the second follow-up state quantity and the reference state quantity. The tracking state quantity internal deviation Er2 ′ calculation unit 66-2 is based on the coefficients Am, B2, the reference state quantity setting value SPm, the reference state quantity measurement value PVm, the tracking state quantity setting value SP2, and the tracking state quantity measurement value PV2. The tracking state quantity internal deviation Er2 ′ is calculated as in the following equation (step S510).
Er2 ′ = Am (SPm−PVm)
+ B2 {(SP2-SPm)-(PV2-PVm)} (25)

The coefficient B3 storage unit 65-3 stores in advance a coefficient B3 related to the state quantity difference between the third follow-up state quantity and the reference state quantity. The tracking state quantity internal deviation Er3 ′ calculation unit 66-3 is based on the coefficients Am, B3, the reference state quantity setting value SPm, the reference state quantity measurement value PVm, the tracking state quantity setting value SP3, and the tracking state quantity measurement value PV3. The tracking state quantity internal deviation Er3 ′ is calculated as shown in the following equation (step S511).
Er3 ′ = Am (SPm−PVm)
+ B3 {(SP3-SPm)-(PV3-PVm)} (26)

Next, the PID control calculation unit 64-1 performs a PID control calculation such as the following transfer function equation to calculate the manipulated variable MV1 (step S512).
MV1 = (100 / Pb1) {1+ (1 / Ti1s) + Td1s} Er1 ′
... (27)
In Expression (27), Pb1 is a proportional band, Ti1 is an integration time, Td1 is a differentiation time, and s is a Laplace operator. If the calculated operation amount MV1 is smaller than the lower limit value OL1 of the output of the actuator A1, the PID control calculation unit 64-1 sets the operation amount MV1 = OL1 and the calculated operation amount MV1 is the upper limit value OH1 of the output of the actuator A1. If larger, an operation amount upper / lower limit process for setting the operation amount MV1 = OH1 is performed as a measure for integral windup.

The PID control calculation unit 64-2 performs a PID control calculation such as the following transfer function equation to calculate the manipulated variable MV2 (step S513).
MV2 = (100 / Pb2) {1+ (1 / Ti2s) + Td2s} Er2 ′
... (28)
In Expression (28), Pb2 is a proportional band, Ti2 is an integration time, and Td2 is a differentiation time. When the calculated operation amount MV2 is smaller than the lower limit value OL2 of the output of the actuator A2, the PID control calculation unit 64-2 sets the operation amount MV2 = OL2 and the calculated operation amount MV2 is the upper limit value OH2 of the output of the actuator A2. If larger, an operation amount upper / lower limit process for setting the operation amount MV2 = OH2 is performed as a measure for integral windup.

The PID control calculation unit 64-3 performs a PID control calculation such as the following transfer function equation to calculate the operation amount MV3 (step S514).
MV3 = (100 / Pb3) {1+ (1 / Ti3s) + Td3s} Er3 ′
... (29)
In Expression (29), Pb3 is a proportional band, Ti3 is an integration time, and Td3 is a differentiation time. When the calculated operation amount MV3 is smaller than the lower limit value OL3 of the output of the actuator A3, the PID control calculation unit 64-3 sets the operation amount MV3 = OL3, and the calculated operation amount MV3 is the upper limit value OH3 of the output of the actuator A3. If larger, an operation amount upper / lower limit process for setting the operation amount MV3 = OH3 is performed as a measure for integral windup.

The operation amount MV1 output unit 63-1 outputs the operation amount MV1 calculated by the PID control operation unit 64-1 to the actuator A1 (step S515). The actuator A1 operates to control the first follow-up state amount based on the operation amount MV1.
The operation amount MV2 output unit 63-2 outputs the operation amount MV2 calculated by the PID control calculation unit 64-2 to the actuator A2 (step S516). The actuator A2 operates to control the second follow-up state quantity based on the operation quantity MV2.
The operation amount MV3 output unit 63-3 outputs the operation amount MV3 calculated by the PID control calculation unit 64-3 to the actuator A3 (step S517). The actuator A3 operates to control the third follow-up state quantity based on the operation quantity MV3.

  The processes in steps S501 to S517 as described above are repeatedly executed for each control cycle until the end of control is instructed by the operator (YES in step S518), for example.

  4, FIG. 5, FIG. 6, FIG. 7, and FIG. 8 show simulation results of the operation of the control device of the present embodiment. 4 (a), 5 (a), 6 (a), 7 (a), and 8 (a) are obtained when the follow-up state amount setting values SP1, SP2, and SP3 are changed to 30.0. FIG. 4B, FIG. 5B, FIG. 6B, FIG. 7B, and FIG. 8B show SP1 = 30.0 and SP2 = 30.0. , Shows a disturbance response of the control system when a disturbance is applied in a state where SP3 = 30.0. The simulation conditions are as follows.

First, the transfer function Gp1 of the block including the actuator A1 and the process P1, the transfer function Gp2 of the block including the actuator A2 and the process P2, and the transfer function Gp3 of the block including the actuator A3 and the process P3 are set as follows: To do. Here, it is assumed that there is no interference between control loops.
Gp1 = 1.2exp (−2.0 s) / {(1 + 70.0 s) (1 + 10.0 s)}
... (30)
Gp2 = 1.6exp (−2.0s) / {(1 + 60.0s) (1 + 10.0s)}
... (31)
Gp3 = 2.0exp (−2.0s) / {(1 + 50.0s) (1 + 10.0s)}
... (32)

The follow-up state quantity measurement values PV1, PV2, and PV3 are determined as follows according to the operation amounts MV1, MV2, and MV3.
PV1 = Gp1MV1 (33)
PV2 = Gp2MV2 (34)
PV3 = Gp3MV3 (35)

  The proportional band Pb1 which is the PID parameter of the PID control calculation unit 64-1 is 50.0, the integration time Ti1 is 35.0, the differential time Td1 is 20.0, and the proportionality which is the PID parameter of the PID control calculation unit 64-2. The band Pb2 is 66.7, the integration time Ti2 is 35.0, the differential time Td2 is 20.0, the proportional band Pb3, which is the PID parameter of the PID control calculation unit 64-3, is 100.0, and the integration time Ti3 is 35. 0, the differential time Td3 is 20.0.

The simulation results shown in FIGS. 4 (a) and 4 (b) are equivalent to normal control (Am = 1.0, B1 = 1.0, B2 = 1.0, B3 = 1.0). Since the relative state quantity (state quantity difference) is not controlled, the follow-up state quantity measurement values PV1, PV2, and PV3 are not aligned.
The simulation results shown in FIGS. 5A and 5B indicate that the effect of the present embodiment is moderate (Am = 1.0, B1 = 1.5, B2 = 1.5, B3 = 1.5), and the relative state quantity (state quantity difference) is slightly controlled, so that the follow-up state quantity measured value PV1 is compared to the cases of FIGS. 4 (a) and 4 (b). , PV2 and PV3 are aligned.

The simulation results shown in FIG. 6A and FIG. 6B are set so that the effect of the present embodiment is remarkable (Am = 1.0, B1 = 3.0, B2 = 3.0, B3 = 3). .0) and the relative state quantity (state quantity difference) is sufficiently controlled, so that the follow-up state quantity measured values PV1, PV1 are compared with those in FIGS. 4 (a) and 4 (b). PV2 and PV3 are considerably aligned.
The simulation results shown in FIGS. 7A and 7B show that the effect of the present embodiment is excessive (Am = 1.0, B1 = 4.0, B2 = 4.0, B3 = 4). .0), control instability occurs during step response, and the follow-up state quantity measurement values PV1, PV2, and PV3 are not aligned as compared with the cases of FIGS. 6 (a) and 6 (b). .

  The simulation results shown in FIG. 8A and FIG. 8B are the settings that avoid the excessive effect of this embodiment (Am = 0.7, B1 = 4.0, B2 = 4.0, B3 = 4). 0.0), and by reducing the sensitivity of the reference state quantity, the follow-up state quantity measurement values PV1, PV2, and PV3 are more even than those in FIGS. 6 (a) and 6 (b). Become.

In the simulation results of FIGS. 4 to 8, by setting SP1 = SP2 = SP3 = 30.0, the state quantity difference between the first follow-up state quantity and the second follow-up state quantity, the second follow-up state quantity, All of the state quantity difference from the third follow-up state quantity and the state quantity difference between the third follow-up state quantity and the first follow-up state quantity are zero.
On the other hand, if the follow-up state quantity set values SP1, SP2, and SP3 are set to different values, the difference between the respective state quantity measured values PV1, PV2, and PV3 corresponds to the difference between the respective state quantity set values SP1, SP2, and SP3. PV1, PV2, and PV3 change so as to be kept constant. For example, if SP1 = 20.0, SP2 = 30.0, and SP3 = 40.0, the state quantity difference PV3-PV2 = 10.0, the state quantity difference PV2-PV1 = 10.0, and the state quantity difference The step response and disturbance suppression response are such that PV3-PV1 = 20.0 is maintained.

[Second Embodiment]
Next, a second embodiment of the present invention will be described. FIG. 9 is a block diagram showing a configuration of a control apparatus according to the second embodiment of the present invention. In this embodiment, there are three control loops, the state quantity of one typical control loop is adopted as the reference state quantity, and the state quantities of the other two control loops are adopted as the tracking state quantity. In this case, a similar control system can be configured on the same principle as long as there are two or more control loops.

  The control device of FIG. 9 includes, as the configuration of the first control system related to the first follow-up state quantity, a follow-up state quantity relative set value ΔSP1m input unit 71-1, a follow-up state quantity measured value PV1 input unit 72-1, An operation amount MV1 output unit 73-1, a PID control calculation unit (PID controller) 74-1, a coefficient B1 storage unit 75-1, and a follow-up state amount internal deviation Er1 ′ calculation unit 76-1 are provided. Further, the control device of FIG. 9 includes, as the configuration of the second control system related to the second follow-up state quantity, a follow-up state quantity relative set value ΔSP2m input unit 71-2 and a follow-up state quantity measured value PV2 input unit 72-2. An operation amount MV2 output unit 73-2, a PID control calculation unit 74-2, a coefficient B2 storage unit 75-2, and a follow-up state amount internal deviation Er2 ′ calculation unit 76-2.

  Furthermore, the control device of FIG. 9 has, as a third control system configuration related to the reference state quantity, a reference state quantity set value SPm input unit 77, a reference state quantity measurement value PVm input unit 78, and an operation amount MV3 output unit 79. A PID control calculation unit 80, a coefficient Am storage unit 81, and a reference state quantity internal deviation Erm ′ calculation unit 82.

  FIG. 10 is a block diagram of the control system in the present embodiment. In FIG. 10, Er1 ′ is an internal deviation of the first following state quantity, Er2 ′ is an internal deviation of the second following state quantity, Erm ′ is an internal deviation of the reference state quantity, Am is a coefficient relating to the reference state quantity, and B1 is A coefficient related to a state quantity difference between the first following state quantity and the reference state quantity, B2 is a coefficient related to a state quantity difference between the second following state quantity and the reference state quantity, and A11 is an actuator that controls the first following state quantity. , A12 is an actuator for controlling the second follow-up state quantity, A13 is an actuator for controlling the reference state quantity, P11 is a control target process related to the first follow-up state quantity, and P12 is a control target related to the second follow-up state quantity. Process, P13 is a process to be controlled according to the reference state quantity, Gp11 is a transfer function of a block including the actuator A11 and the process P11, and Gp12 is an actuator A12 Gp13 is a transfer function of a block including the actuator A13 and the process P13, Gp31 is a transfer function representing interference between the first control loop and the third control loop, and Gp32 is It is a transfer function showing interference between the 2nd control loop and the 3rd control loop.

  Follow-up state quantity relative set value ΔSP1m input unit 71-1, follow-up state quantity measured value PV1 input unit 72-1, manipulated variable MV1 output unit 73-1, PID control calculation unit 74-1, and follow-up state quantity internal Deviation Er1 ′ calculating unit 76-1, actuator A11, and process P11 constitute a first control system (first control loop). Follow-up state quantity relative set value ΔSP2m input unit 71-2, follow-up state quantity measured value PV2 input unit 72-2, manipulated variable MV2 output unit 73-2, PID control calculation unit 74-2, and follow-up state quantity internal The deviation Er2 ′ calculation unit 76-2, the actuator A12, and the process P12 constitute a second control system (second control loop). Then, a reference state quantity set value SPm input section 77, a reference state quantity measurement value PVm input section 78, an operation amount MV3 output section 79, a PID control calculation section 80, a reference state quantity internal deviation Erm ′ calculation section 82, The actuator A13 and the process P13 constitute a third control system (third control loop).

  Next, the operation of the control device of the present embodiment will be described with reference to FIG. First, the follow-up state quantity relative set value ΔSP1m is set by the operator of the control device, and is input to the follow-up state quantity internal deviation Er1 ′ calculator 76-1 via the follow-up state quantity relative set value ΔSP1m input unit 71-1. (FIG. 11, step S601). The follow-up state quantity relative set value ΔSP2m is set by the operator, and is input to the follow-up state quantity internal deviation Er2 ′ calculator 76-2 via the follow-up state quantity relative set value ΔSP2m input unit 71-2 (step S602). The reference state quantity set value SPm is set by an operator, and the tracking state quantity internal deviation Er1 ′ calculating section 76-1 and the tracking state quantity internal deviation Er2 ′ calculating section 76-2 are set via the reference state quantity set value SPm input section 77. And the reference state quantity internal deviation Erm ′ calculation unit 82 (step S603).

  The follow-up state quantity measurement value PV1 is detected by a first detection unit (not shown) and is input to the follow-up state quantity internal deviation Er1 ′ calculation section 76-1 via the follow-up state quantity measurement value PV1 input section 72-1. Step S604). The follow-up state quantity measurement value PV2 is detected by a second detection unit (not shown) and is input to the follow-up state quantity internal deviation Er2 ′ calculation unit 76-2 via the follow-up state quantity measurement value PV2 input unit 72-2. Step S605). The reference state quantity measurement value PVm is detected by a third detection unit (not shown), and the tracking state quantity internal deviation Er1 ′ calculation unit 76-1 and the tracking state quantity internal deviation Er2 are set via the reference state quantity measurement value PVm input unit 78. It is input to 'calculation unit 76-2 and reference state quantity internal deviation Erm' calculation unit 82 (step S606).

The coefficient Am storage unit 81 stores a coefficient Am related to the reference state quantity in advance, and the coefficient B1 storage unit 75-1 stores a coefficient B1 related to the state quantity difference between the first follow-up state quantity and the reference state quantity in advance. doing. The follow-up state quantity internal deviation Er1 ′ calculation unit 76-1 is based on the coefficients Am, B1, the reference state quantity set value SPm, the reference state quantity measured value PVm, the follow-up state quantity relative set value ΔSP1m, and the follow-up state quantity measured value PV1. Then, the tracking state quantity internal deviation Er1 ′ is calculated as in the following equation (step S607).
Er1 ′ = Am (SPm−PVm) + B1 {ΔSP1m− (PV1−PVm)}
... (36)

The coefficient B2 storage unit 75-2 stores in advance a coefficient B2 related to a state quantity difference between the second follow-up state quantity and the reference state quantity. The tracking state quantity internal deviation Er2 ′ calculation unit 76-2 is based on the coefficients Am, B2, the reference state quantity setting value SPm, the reference state quantity measurement value PVm, the tracking state quantity relative setting value ΔSP2m, and the tracking state quantity measurement value PV2. Then, the tracking state quantity internal deviation Er2 ′ is calculated as shown in the following equation (step S608).
Er2 ′ = Am (SPm−PVm) + B2 {ΔSP2m− (PV2−PVm)}
... (37)

The reference state quantity internal deviation Erm ′ calculation unit 82 calculates the reference state quantity internal deviation Erm ′ as follows based on the coefficient Am, the reference state quantity set value SPm, and the reference state quantity measurement value PVm (step S609). ).
Erm ′ = Am (SPm−PVm) (38)

  Next, the PID control calculation unit 74-1 calculates the operation amount MV1 by performing the PID control calculation shown in Expression (27) in the same manner as the PID control calculation unit 64-1 (step S610). When the calculated operation amount MV1 is smaller than the lower limit value OL1 of the output of the actuator A11, the PID control calculation unit 74-1 sets the operation amount MV1 = OL1 and the calculated operation amount MV1 is the upper limit value OH1 of the output of the actuator A11. If larger, an operation amount upper / lower limit process for setting the operation amount MV1 = OH1 is performed as a measure for integral windup.

  The PID control calculation unit 74-2 calculates the manipulated variable MV2 by performing the PID control calculation shown in Expression (28) in the same manner as the PID control calculation unit 64-2 (step S611). When the calculated operation amount MV2 is smaller than the lower limit value OL2 of the output of the actuator A12, the PID control calculation unit 74-2 sets the operation amount MV2 = OL2, and the calculated operation amount MV2 is the upper limit value OH2 of the output of the actuator A12. If larger, an operation amount upper / lower limit process for setting the operation amount MV2 = OH2 is performed as a measure for integral windup.

The PID control calculation unit 80 performs a PID control calculation such as the following transfer function equation to calculate the manipulated variable MV3 (step S612).
MV3 = (100 / Pb3) {1+ (1 / Ti3s) + Td3s} Erm ′
... (39)
In the equation (39), Pb3 is a proportional band, Ti3 is an integration time, and Td3 is a differentiation time. When the calculated operation amount MV3 is smaller than the lower limit value OL3 of the output of the actuator A13, the PID control calculation unit 80 sets the operation amount MV3 = OL3, and the calculated operation amount MV3 is larger than the upper limit value OH3 of the output of the actuator A13. In this case, the operation amount upper / lower limit process for setting the operation amount MV3 = OH3 is performed as a measure against the integral windup.

The operation amount MV1 output unit 73-1 outputs the operation amount MV1 calculated by the PID control calculation unit 74-1 to the actuator A11 (step S613). The actuator A11 operates to control the first follow-up state amount based on the operation amount MV1.
The operation amount MV2 output unit 73-2 outputs the operation amount MV2 calculated by the PID control calculation unit 74-2 to the actuator A12 (step S614). The actuator A12 operates to control the second follow-up state quantity based on the operation quantity MV2.
The operation amount MV3 output unit 79 outputs the operation amount MV3 calculated by the PID control calculation unit 80 to the actuator A13 (step S615). The actuator A13 operates to control the reference state quantity based on the operation quantity MV3.

  The processes in steps S601 to S615 as described above are repeatedly executed for each control cycle until the operator instructs the end of the control (YES in step S616).

  FIG. 12, FIG. 13, FIG. 14, FIG. 15 and FIG. 16 show simulation results of the operation of the control device of the present embodiment. FIGS. 12 (a), 13 (a), 14 (a), 15 (a), and 16 (a) show the reference state quantity set values when the tracking state quantity relative set values ΔSP1m and ΔSP2m are zero. FIG. 12 (b), FIG. 13 (b), FIG. 14 (b), FIG. 15 (b), and FIG. 16 (b) show ΔSP1m when the SPm is changed to 30.0. The disturbance response of the control system is shown when a disturbance is applied in the state of being set at = 0, ΔSP2m = 0, and SPm = 30.0. The simulation conditions are as follows.

First, the transfer function Gp11 of the block including the actuator A11 and the process P11, the transfer function Gp12 of the block including the actuator A12 and the process P12, and the transfer function Gp13 of the block including the actuator A13 and the process P13 are set as follows: To do.
Gp11 = 1.2exp (−2.0 s) / {(1 + 70.0 s) (1 + 10.0 s)}
... (40)
Gp12 = 1.6exp (−2.0 s) / {(1 + 60.0 s) (1 + 10.0 s)}
... (41)
Gp13 = 2.0exp (−2.0s) / {(1 + 50.0s) (1 + 10.0s)}
... (42)

Further, the transfer function Gp31 representing the interference between the first control loop and the third control loop and the transfer function Gp32 representing the interference between the second control loop and the third control loop are expressed by the following equations: Set to.
Gp31 = 0.96exp (−2.0 s)
/{(1+70.0s)(1+10.0s)} (43)
Gp32 = 1.28exp (−2.0 s)
/{(1+60.0s)(1+10.0s)} (44)

The follow-up state quantity measurement values PV1 and PV2 and the reference state quantity measurement value PVm are determined as follows according to the operation amounts MV1, MV2, and MV3.
PV1 = Gp1MV1 + Gp31MV3 (45)
PV2 = Gp2MV2 + Gp32MV3 (46)
PVm = Gp3MV3 (47)

  The proportional band Pb1, which is the PID parameter of the PID control calculation unit 74-1, is 50.0, the integration time Ti1 is 35.0, the differential time Td1 is 20.0, and the proportionality is the PID parameter of the PID control calculation unit 74-2. The band Pb2 is 66.7, the integration time Ti2 is 35.0, the differentiation time Td2 is 20.0, the proportional band Pb3 that is the PID parameter of the PID control calculation unit 80 is 100.0, the integration time Ti3 is 35.0, The differential time Td3 is set to 20.0.

The simulation results shown in FIG. 12 (a) and FIG. 12 (b) are the settings equivalent to the normal control (Am = 1.0, B1 = 1.0, B2 = 1.0). Since the state quantity (state quantity difference) is not controlled, the follow-up state quantity measurement values PV1 and PV2 and the reference state quantity measurement value PVm are not aligned.
The simulation results shown in FIGS. 13A and 13B are set so that the effect of the present embodiment is moderate (Am = 1.0, B1 = 1.5, B2 = 1.5). Since the relative state quantity (state quantity difference) is slightly controlled, the follow-up state quantity measured values PV1 and PV2 and the reference state quantity are compared with those in FIGS. 12 (a) and 12 (b). The measured values PVm are aligned.

The simulation results shown in FIGS. 14 (a) and 14 (b) are the settings (Am = 1.0, B1 = 3.0, B2 = 3.0) in which the effect of the present embodiment is remarkable. Since the relative state quantity (state quantity difference) is sufficiently controlled, the follow-up state quantity measurement values PV1 and PV2 and the reference state quantity measurement are compared to the cases of FIGS. 12 (a) and 12 (b). The values PVm are considerably aligned.
The simulation results shown in FIGS. 15 (a) and 15 (b) are set so that the effect of the present embodiment is excessive (Am = 1.0, B1 = 4.0, B2 = 4.0). Then, control instability occurs at the time of step response, and the follow-up state quantity measurement values PV1 and PV2 and the reference state quantity measurement value PVm are not aligned as compared with the cases of FIGS. 14 (a) and 14 (b).

  The simulation results shown in FIGS. 16A and 16B are set to avoid the excessive effect of the present embodiment (Am = 0.7, B1 = 4.0, B2 = 4.0). By lowering the sensitivity of the reference state quantity, the follow-up state quantity measurement values PV1 and PV2 and the reference state quantity measurement value PVm are more aligned than in the case of FIGS. 14 (a) and 14 (b). .

In the simulation results of FIGS. 12 to 16, by setting ΔSP1m = ΔSP2m = 0.0, the state quantity difference between the first tracking state quantity and the reference state quantity, and the second tracking state quantity and the reference state quantity are All of the state quantity differences become zero.
On the other hand, if ΔSP1m and ΔSP2m are set to values other than 0, corresponding to these settings, PV1, PV2, and PVm change so that the difference between the state quantity measurement values PV1, PV2, and PVm is kept constant. To do. For example, if ΔSP1m = 20.0 and ΔSP2m = 10.0 are set, step response and disturbance such that the state quantity difference PV1-PVm = 20.0 and the state quantity difference PV2-PVm = 10.0 are maintained. It becomes a suppression response.
Further, as is apparent from the simulation results of FIGS. 12 to 16, the present invention can be effectively applied to a control system having inter-loop interference.

  Note that the control device described in the first embodiment and the second embodiment can be realized by a computer including an arithmetic device, a storage device, and an interface, and a program for controlling these hardware resources.

  The present invention can be applied to a process control technique.

It is a block diagram which shows the structure of the control apparatus used as the 1st Embodiment of this invention. It is a block diagram of the control system in the 1st Embodiment of this invention. It is a flowchart which shows operation | movement of the control apparatus in the 1st Embodiment of this invention. It is a figure which shows the simulation result of operation | movement of the control apparatus in the 1st Embodiment of this invention. It is a figure which shows the simulation result of operation | movement of the control apparatus in the 1st Embodiment of this invention. It is a figure which shows the simulation result of operation | movement of the control apparatus in the 1st Embodiment of this invention. It is a figure which shows the simulation result of operation | movement of the control apparatus in the 1st Embodiment of this invention. It is a figure which shows the simulation result of operation | movement of the control apparatus in the 1st Embodiment of this invention. It is a block diagram which shows the structure of the control apparatus used as the 2nd Embodiment of this invention. It is a block diagram of the control system in the 2nd Embodiment of this invention. It is a flowchart which shows operation | movement of the control apparatus in the 2nd Embodiment of this invention. It is a figure which shows the simulation result of operation | movement of the control apparatus in the 2nd Embodiment of this invention. It is a figure which shows the simulation result of operation | movement of the control apparatus in the 2nd Embodiment of this invention. It is a figure which shows the simulation result of operation | movement of the control apparatus in the 2nd Embodiment of this invention. It is a figure which shows the simulation result of operation | movement of the control apparatus in the 2nd Embodiment of this invention. It is a figure which shows the simulation result of operation | movement of the control apparatus in the 2nd Embodiment of this invention. It is a block diagram which shows the structure of the conventional control apparatus. It is a block diagram which shows the structure of the other conventional control apparatus. It is a block diagram which shows the structure of the conventional control apparatus which makes a control object the state quantity average value and a state quantity difference. It is a block diagram which shows the structure of the conventional control apparatus using a cross controller. FIG. 20 is a block diagram illustrating a configuration in which the cross controller in FIG. 20 is applied to the control device in FIG. 19. It is a figure for demonstrating the conventional parameter adjustment.

Explanation of symbols

64-1, 64-2, 64-3, 74-1, 74-2, 80... PID control calculation unit, 65-1, 75-1... Coefficient B1 storage unit, 65-2, 75-2. Storage unit, 65-3 ... Coefficient B3 storage unit, 66-1, 76-1 ... Tracking state amount internal deviation Er1 'calculation unit, 66-2, 76-2 ... Tracking state amount internal deviation Er2' calculation unit, 66- DESCRIPTION OF SYMBOLS 3 ... Tracking state quantity internal deviation Er3 'calculation part, 67 ... Reference | standard state quantity set value SPm calculation part, 68 ... Reference | standard state quantity measured value PVm calculation part, 69, 81 ... Coefficient Am storage part, 82 ... Reference | standard state quantity internal deviation Erm ′ calculator.

Claims (14)

In a control method of a control system having at least two control loops,
When a state quantity that is a specific reference is a reference state quantity, and a state quantity that is controlled so as to maintain a predetermined value relative to the reference state quantity is a tracking state quantity,
A calculation to be input to the controller after converting a tracking state quantity deviation Eri calculated based on a plurality of control calculation input values input to the controller that controls the tracking state quantity to a tracking state quantity internal deviation Eri ′. With steps,
In the calculation procedure, the follow-up state quantity internal deviation Eri ′ is a sum of a first element with respect to the reference state quantity and a second element with respect to the relative quantity, and an element of the control calculation input value with respect to the reference state quantity Is the first element, and a value obtained by multiplying the element of the input value for control calculation with respect to the relative quantity by a predetermined first coefficient is the second element, whereby the follow-up state quantity internal deviation Eri ′ The control method characterized by calculating. The control method according to claim 1,
In the calculation procedure, instead of using the element of the control calculation input value for the reference state quantity as it is as the first element of the tracking state quantity internal deviation Eri ′, A control method characterized by using a value obtained by multiplying an element of an input value by a predetermined second coefficient. The control method according to claim 1,
In the calculation procedure, a preset reference state quantity setting value SPm, a measured reference state quantity measurement value PVm, and a preset follow-up state quantity setting value SPi are measured as the input values for control calculation. When the follow-up state quantity measurement value PVi is input, a first difference between the follow-up state quantity set value SPi and the reference state quantity set value SPm, the follow-up state quantity measurement value PVi, and the reference state quantity measurement Multiplying the second difference from the value PVm by a value based on the first coefficient Bi defining the degree of followability of the follow-up state quantity measurement value PVi to the reference state quantity measurement value PVm, A control method characterized in that the second element of the tracking state amount internal deviation Eri ′ is calculated by linearly combining the first difference and the second difference. The control method according to claim 1,
In the calculation procedure, a preset reference state quantity setting value SPm, a measured reference state quantity measurement value PVm, and a preset follow-up state quantity setting value SPi are measured as the input values for control calculation. When the follow-up state quantity measurement value PVi is input, the follow-up state quantity measurement value PVi is used by using the first coefficient Bi that defines the degree of followability of the follow-up state quantity measurement value PVi to the reference state quantity measurement value PVm. The control method characterized by calculating the state quantity internal deviation Eri ′ by Eri ′ = SPm−PVm + Bi {(SPi−SPm) − (PVi−PVm)}. The control method according to claim 1,
In the calculation procedure, a preset reference state quantity setting value SPm, a measured reference state quantity measurement value PVm, and a preset follow-up state quantity setting value SPi are measured as the input values for control calculation. When the follow-up state quantity measurement value PVi is input, the follow-up state quantity measurement value PVi is used by using the first coefficient Bi that defines the degree of followability of the follow-up state quantity measurement value PVi to the reference state quantity measurement value PVm. A control method characterized by calculating the state quantity internal deviation Eri ′ by Eri ′ = (1−Bi) (SPm−PVm) + Bi (SPi−PVi). The control method according to claim 1,
The calculation procedure includes a preset reference state quantity setting value SPm, a measured reference state quantity measurement value PVm, and a preset setting value for the relative quantity as the control calculation input value. When the state quantity relative set value ΔSPim and the measured follow-up state quantity measurement value PVi are input, the follow-up state quantity relative set value ΔSPim, the follow-up state quantity measurement value PVi, and the reference state quantity measurement value PVm Is multiplied by a value based on the first coefficient Bi that defines the degree of followability of the follow-up state quantity measurement value PVi to the reference state quantity measurement value PVm. A control method characterized by calculating the second element of the tracking state quantity internal deviation Eri ′ by linearly combining ΔSPim and the difference. The control method according to claim 1,
The calculation procedure includes a preset reference state quantity setting value SPm, a measured reference state quantity measurement value PVm, and a preset setting value for the relative quantity as the control calculation input value. When the state quantity relative set value ΔSPim and the measured follow-up state quantity measurement value PVi are input, the degree of followability of the follow-up state quantity measurement value PVi to the reference state quantity measurement value PVm is defined. The following control state internal deviation Eri ′ is calculated by Eri ′ = SPm−PVm + Bi {ΔSPim− (PVi−PVm)} using a coefficient Bi of 1. The control method according to claim 2, wherein
When the preset reference state quantity setting value SPm and the measured reference state quantity measurement value PVm are input as the control calculation input values, the calculation procedure includes the reference state quantity setting value SPm and the The reference state quantity measurement value PVm is multiplied by a value based on the second coefficient Am that defines the degree of responsiveness of the reference state quantity measurement value PVm to the reference state quantity set value SPm. A control method characterized in that the first element of the tracking state quantity internal deviation Eri ′ is calculated by linearly combining a quantity setting value SPm and the reference state quantity measurement value PVm. The control method according to claim 2, wherein
In the calculation procedure, a preset reference state quantity setting value SPm, a measured reference state quantity measurement value PVm, and a preset follow-up state quantity setting value SPi are measured as the input values for control calculation. When the follow-up state quantity measurement value PVi is input, the first coefficient Bi defining the degree of followability of the follow-up state quantity measurement value PVi to the reference state quantity measurement value PVm, and the reference state quantity Using the second coefficient Am that defines the degree of responsiveness of the measured value PVm to the reference state quantity set value SPm, the following state quantity internal deviation Eri ′ is set to Eri ′ = Am (SPm−PVm) + Bi. A control method characterized by calculating by {(SPi-SPm)-(PVi-PVm)}. The control method according to claim 2, wherein
In the calculation procedure, a preset reference state quantity setting value SPm, a measured reference state quantity measurement value PVm, and a preset follow-up state quantity setting value SPi are measured as the input values for control calculation. When the follow-up state quantity measurement value PVi is input, the first coefficient Bi defining the degree of followability of the follow-up state quantity measurement value PVi to the reference state quantity measurement value PVm, and the reference state quantity Using the second coefficient Am that defines the degree of responsiveness of the measured value PVm to the reference state quantity set value SPm, the tracking state quantity internal deviation Eri ′ is set to Eri ′ = (Am−Bi) (SPm -PVm) + Bi (SPi-PVi). The control method according to claim 2, wherein
The calculation procedure includes a preset reference state quantity setting value SPm, a measured reference state quantity measurement value PVm, and a preset setting value for the relative quantity as the control calculation input value. When the state quantity relative set value ΔSPim and the measured follow-up state quantity measurement value PVi are input, the degree of followability of the follow-up state quantity measurement value PVi to the reference state quantity measurement value PVm is defined. The tracking state quantity internal deviation Eri ′ is calculated using a coefficient Bi of 1 and the second coefficient Am that defines the degree of responsiveness of the reference state quantity measurement value PVm to the reference state quantity set value SPm. A control method characterized by calculating by Eri ′ = Am (SPm−PVm) + Bi {ΔSPim− (PVi−PVm)}. The control method according to any one of claims 3 to 11,
The reference state quantity is an average value of two or more following state quantities,
The reference state quantity set value SPm is an average value of the set values for the two or more following state quantities.
The reference state quantity measured value PVm is an average value of the measured values of the two or more following state quantities. The control method according to any one of claims 3 to 11,
The reference state quantity is one state quantity specified in advance,
The reference state quantity setting value SPm is a setting value for the one state quantity,
A reference state quantity measurement value PVm is a measurement value of the one state quantity. The control method according to any one of claims 3 to 11,
The control method characterized in that the first coefficient is set such that the followability of the follow-up state quantity measurement value PVi to the reference state quantity measurement value PVm is improved.

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