JP2005307288A5 - - Google Patents
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- Publication number
- JP2005307288A5 JP2005307288A5 JP2004126645A JP2004126645A JP2005307288A5 JP 2005307288 A5 JP2005307288 A5 JP 2005307288A5 JP 2004126645 A JP2004126645 A JP 2004126645A JP 2004126645 A JP2004126645 A JP 2004126645A JP 2005307288 A5 JP2005307288 A5 JP 2005307288A5
- Authority
- JP
- Japan
- Prior art keywords
- carbon
- steel
- substrate
- base material
- based film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 229910001315 Tool steel Inorganic materials 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- -1 etc.) Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004126645A JP2005307288A (ja) | 2004-04-22 | 2004-04-22 | 炭素系膜及び炭素系膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004126645A JP2005307288A (ja) | 2004-04-22 | 2004-04-22 | 炭素系膜及び炭素系膜形成装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006344465A Division JP2007126754A (ja) | 2006-12-21 | 2006-12-21 | 真空アーク蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005307288A JP2005307288A (ja) | 2005-11-04 |
| JP2005307288A5 true JP2005307288A5 (enExample) | 2007-02-15 |
Family
ID=35436384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004126645A Pending JP2005307288A (ja) | 2004-04-22 | 2004-04-22 | 炭素系膜及び炭素系膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005307288A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009066633A1 (ja) * | 2007-11-21 | 2009-05-28 | Kabushiki Kaisha Kobe Seiko Sho | アークイオンプレーティング装置用の蒸発源及びアークイオンプレーティング装置 |
| US10557194B2 (en) * | 2015-02-26 | 2020-02-11 | United Technologies Corporation | Systems and methods for optimal source material deposition along hole edges |
| JP6413060B1 (ja) * | 2017-05-11 | 2018-10-31 | 日本アイ・ティ・エフ株式会社 | 硬質炭素膜とその製造方法および摺動部材 |
| WO2019059054A1 (ja) * | 2017-09-25 | 2019-03-28 | 住友電気工業株式会社 | 硬質炭素系被膜の製造方法、及び被膜付き部材 |
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2004
- 2004-04-22 JP JP2004126645A patent/JP2005307288A/ja active Pending