JP2005300246A - Movable body detector - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a movable body detector for enhancing its yield, improving its installation workability, and in its turn, actualizing its cost reduction, since the use of a spin valve type giant magnetoresistive element of a magnetic field vector detection type reduces variations in its midpoint voltage. <P>SOLUTION: This movable body detector comprises a gear wheel 1 as a magnetic-material movable body having projection parts 2, a bias magnet 5 for generating a magnetic field, and at least one spin valve type giant magnetoresistive element. In the position of the magnetoresistive element, the magnetic field mainly has a magnetic field component parallel to the magnetism-sensitive surface of the magnetoresistive element. The direction of the field component parallel to the magnetism-sensitive surface with respect to a pin layer magnetizing direction of the magnetoresistive element varies with the rotation of the gear wheel 1. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a moving body detection device for detecting a magnetic field change accompanying movement of a magnetic material moving body, and particularly to detecting rotation information of a soft magnetic gear used for industrial machine tools, automobile engines, and the like. The present invention relates to a moving body detection apparatus suitable for use in the above.

2. Description of the Related Art Conventionally, a moving body detection device such as a rotation sensor using an intensity detection type magnetoresistive element that detects a change in magnetic field intensity due to movement of an uneven portion made of a soft magnetic material is known. The basic sensor configuration is that at least one set of magnetoresistive elements is arranged facing the uneven portion of the soft magnetic material to be detected, and a bias magnet is arranged behind the magnetoresistive elements. A yoke (magnetic material) is added for equalization. Each magnetoresistive element is connected by a bridge circuit, and information such as the rotation speed and the rotation angle is obtained from the output signal based on the midpoint voltage (average value of the maximum peak value and the minimum peak value). As a known example showing a structure in which a yoke for adjusting the intensity of a bias magnetic field by a bias magnet is added, for example, Patent Document 1 below can be cited.
JP 2000-39472 A

  FIG. 5 shows a conventional rotation sensor. As shown in FIG. 5A, strength detection type magnetoresistive elements R01 and R02 are arranged in two regions so as to face a soft magnetic gear 1 as a magnetic material moving body. A configuration in which a bias magnet 5 and a magnetic yoke 6 are disposed behind the magnetoresistive elements R01 and R02 is shown. The arrangement interval of the magnetoresistive elements R01 and R02 is an interval suitable for the concavo-convex pitch of the gear 1 (the magnetic element arrangement interval L = P / 2 is optimum for the convex / convex pitch = P of the gear). ing).

  As shown in FIG. 5B, the supply voltage Vin is supplied to the serial connection of the magnetoresistive elements R01 and R02, and the voltage between the connection point of the magnetoresistive elements R01 and R02 and the ground is obtained as the detection output Vout. . When the gear 1 rotates, a signal corresponding to the unevenness appears in the detection output Vout.

  FIG. 6A shows the magnetic characteristics of the intensity detection type magnetoresistive element, and the resistance change rate (ΔR / R) depends on the strength of the external magnetic field H. For this reason, in the arrangement of the rotation sensor in FIG. 5A, if the operating range of the magnetoresistive elements R01 and R02 is shifted as indicated by the dotted arrows in FIG. 6A, the output waveform of the detection output Vout is FIG. It becomes like the dotted line waveform of (B), and the midpoint voltage may deviate from the desired value. Therefore, by changing the shape, thickness, etc. of the yoke 6, the operation range of the magnetoresistive elements R01, R02 is set to the correct range as shown by the solid line arrow in FIG. The midpoint voltage is set to a desired value so that the output waveform of the output Vout becomes the solid line waveform of FIG.

  As described with reference to FIG. 6, the conventional moving body detection device such as a rotation sensor uses a strength detection type magnetoresistive element, and thus there is a problem that the variation in the midpoint voltage is large. The causes of the variation are (1) variation in resistance value of magnetoresistive element, (2) variation in sensitivity (resistance change rate) of magnetoresistive element, (3) variation in magnetic field strength generated by bias magnet, (4) gear-magnetoresistive element An inter-gap is considered. In order to suppress variations, it is necessary to adjust the midpoint voltage by replacing the yokes having different shapes such as thicknesses. However, such operations are poor in workability and lead to an increase in cost.

  In view of the above points, the present invention uses a magnetic field vector detection type spin valve type giant magnetoresistive element (SV-GMR element) to reduce the midpoint voltage variation, improve the yield, improve the mounting workability, As a result, it aims at providing the mobile body detection apparatus which can aim at cost reduction.

  Other objects and novel features of the present invention will be clarified in embodiments described later.

In order to achieve the above object, the invention of claim 1 of the present application provides a magnetic material moving body having at least one convex portion or concave portion, a bias magnet for generating a magnetic field, and at least one spin valve type giant magnetoresistive element. A moving body detection apparatus comprising:
The magnetic field at the magnetoresistive element position mainly has a magnetic field component parallel to the magnetosensitive surface of the magnetoresistive element, and the direction of the magnetic field component parallel to the magnetosensitive surface relative to the pinned layer magnetization direction of the magnetoresistive element is It changes with the movement of the magnetic material moving body.

  According to a second aspect of the present invention, there is provided the moving body detection apparatus according to the first aspect, wherein the pinned layer magnetization direction is a substantially forward direction or a substantially reverse direction with respect to a movement direction of the magnetic material moving body. The magnetic material moving body is configured to generate a magnetic flux that is substantially perpendicular to the pinned layer magnetization direction when the magnetic material moving body is not present.

  According to a third aspect of the present invention, there is provided a moving body detecting apparatus according to the first or second aspect, wherein one or more pairs of the magnetoresistive elements are provided, and the pin layer magnetization directions of the magnetoresistive elements forming a pair are mutually The magnetic material moving body is directed in a substantially forward direction and a substantially reverse direction with respect to the moving direction of the magnetic material moving body.

  According to a fourth aspect of the present invention, there is provided a moving body detection apparatus according to the third aspect, wherein the paired magnetoresistive elements are arranged in a direction substantially perpendicular to the moving direction of the magnetic material moving body. It is said.

  The moving object detection device according to the invention of claim 5 is characterized in that, in claim 1, 2, 3 or 4, the detection output waveform due to the resistance change of the magnetoresistive element is a substantially sine wave.

  According to the moving body detection apparatus of the present invention, instead of using a magnetic field intensity detection type magnetoresistive element as a magnetosensitive element, a magnetic field vector detection type SV-GMR element is used, and at the position of the SV-GMR element. The magnetic field is set so as to mainly have a magnetic field component parallel to the magnetosensitive surface of the SV-GMR element, and the orientation of the magnetic field component parallel to the magnetosensitive surface with respect to the pinned layer magnetization direction of the SV-GMR element is a magnetic material. Since changes using the movement of the moving body are used, it is not affected by variations related to the magnetic field strength, such as variations in magnetic field strength generated by the bias magnet and gaps between the magnetic material moving body and the magnetoresistive element. For this reason, the variation in the midpoint voltage can be reduced, the yield can be improved, the adjustment work at the time of attachment can be simplified and the workability can be improved, and the cost can be reduced.

  Hereinafter, as a best mode for carrying out the present invention, an embodiment of a moving body detection apparatus will be described with reference to the drawings.

  FIG. 1 shows a first embodiment of a moving body detection apparatus according to the present invention, in which a rotation sensor for detecting rotation of a soft magnetic gear is configured as a magnetic material moving body.

  In FIG. 1A, reference numeral 1 denotes a soft magnetic gear, which has irregularities on the outer peripheral surface (for example, has convex portions 2 with a constant arrangement pitch P).

  In addition, two SV-GMR elements R1 and R2 are fixedly arranged so as to face the outer peripheral surface of the soft magnetic gear 1, and the magnetic sensitive surfaces of the SV-GMR elements R1 and R2 face the outer peripheral surface of the gear. They are on the same plane (a plane parallel to the moving direction of the gear 1) and are arranged in a direction substantially perpendicular to the moving direction of the gear 1 (in the thickness direction of the gear 1). The pin layer magnetization direction of the SV-GMR element R1 is substantially opposite to the moving direction of the gear 1, and the pin layer magnetization direction of the SV-GMR element R2 is substantially forward (opposite direction of the SV-GMR element R1). is there.

  The bias magnet 5 for generating the bias magnetic field has the magnetic pole surface 5a so that the magnetic field at the position of the SV-GMR elements R1 and R2 mainly has a magnetic field component parallel to the magnetic sensitive surface of the SV-GMR elements R1 and R2. It is substantially perpendicular to the magnetosensitive surface. Further, when there is no gear 1 as a magnetic material moving body, the bias magnet 5 generates a magnetic flux substantially perpendicular to the pinned layer magnetization direction of each SV-GMR element R1, R2. The side surface 5b of the bias magnet 5 is on the same plane as the magnetosensitive surface so that the bias magnet 5 does not protrude into the gap between the magnetosensitive surface of the SV-GMR elements R1 and R2 and the outer peripheral surface of the gear 1. Or it is in a slightly retracted position.

  As shown in FIG. 1B, the supply voltage Vin is supplied to the series connection of the SV-GMR elements R1 and R2, and the voltage between the connection point of the SV-GMR elements R1 and R2 and the ground is detected output Vout. can get. When the gear 1 is rotated, the convex portions 2 having the arrangement pitch P move, and accordingly, the magnetic field component parallel to the magnetic sensitive surface by the bias magnet 5 with respect to the pinned layer magnetization direction of the SV-GMR elements R1 and R2. As the direction changes, a signal corresponding to the unevenness appears in the detection output Vout (the operation principle will be described with reference to FIGS. 2 and 3 below).

  The SV-GMR element is composed of a pinned layer whose magnetization direction is fixed in one direction, a nonmagnetic layer through which a current mainly flows, and a free layer whose magnetization direction matches the external magnetic field direction (external magnetic flux direction). . When the pin layer magnetization direction matches the external magnetic field vector direction, the resistance value is low. When the external magnetic field vector direction is rotated in the SV-GMR element plane, the resistance value changes depending on the angle formed with the pin layer magnetization direction. In the opposite direction, the resistance value is high. This characteristic is the in-plane magnetic characteristic of the SV-GMR element shown in FIG. 2A, and the external magnetic field is perpendicular to the magnetosensitive surface under the condition that an external magnetic field parallel to the magnetosensitive surface of the SV-GMR element exists. This shows the relationship between the rotation angle with respect to the pinned layer magnetization direction and the resistance change rate (ΔR / R). In this case, the rate of change in resistance (ΔR / R) changes gently with a waveform close to a sine wave, and no saturation region occurs.

  On the other hand, FIG. 2B shows the surface perpendicular magnetic characteristics of the SV-GMR element, in which an external magnetic field is present that is perpendicular to the rotation center axis that is parallel to the magnetosensitive surface of the SV-GMR element and orthogonal to the pinned layer magnetization direction. The relationship between the rotation angle with respect to the pinned layer magnetization direction and the rate of change in resistance (ΔR / R) is shown below by rotating the external magnetic field. In this case, the resistance change rate (ΔR / R) has a saturation region for both the lower limit value and the upper limit value.

  In the present embodiment, the in-plane magnetic characteristics of the SV-GMR element shown in FIG. That is, the external magnetic field is changed under the condition that a bias magnetic field is applied by a bias magnet parallel to the magnetic sensing surface of the SV-GMR element as shown in FIG. By utilizing the in-plane magnetic characteristics that change with time, an output waveform of a substantially sine wave (without a saturation region) in FIG.

  In the arrangement shown in FIG. 1A, when the convex portion 2 of the gear 1 is directly opposite to the SV-GMR elements R1 and R2, a magnetic field parallel to the magnetic sensitive surface of each SV-GMR element R1 and R2. The direction of the component is not affected by the convex portion 2 and is substantially perpendicular to the pinned layer magnetization direction. On the other hand, at the position where the convex portion 2 of the gear 1 is shifted to the left side from the front position of the SV-GMR elements R1 and R2, the direction of the magnetic field component parallel to the magnetosensitive surface is affected by the convex portion 2 and leftward. Bends (the magnetic flux from the magnetic pole surface 5a bends to the left). Further, at the position where the convex portion 2 of the gear 1 is shifted to the right side from the front position of the SV-GMR elements R1 and R2, the direction of the magnetic field component parallel to the magnetosensitive surface is bent to the right side due to the influence of the convex portion 2. (The magnetic flux emitted from the magnetic pole surface 5a bends to the right). Therefore, the direction of the external magnetic field with respect to the pinned layer magnetization direction changes periodically with the rotation of the gear 1 within the operating range of the solid arrow in FIG. 3B, and the detection output Vout close to a sine wave as shown in FIG. Is obtained.

  According to the first embodiment, the following effects can be obtained.

(1) In the first embodiment, a magnetic field intensity detection type magnetoresistive element is not used as the magnetosensitive element, but magnetic field vector detection type SV-GMR elements R1 and R2 are used and the magnetic field at the position of the SV-GMR element is used. Has a magnetic field component parallel to the magnetosensitive surface of the SV-GMR element, and the direction of the magnetic field component parallel to the magnetosensitive surface with respect to the pinned layer magnetization direction of the SV-GMR element is a gear projection. It is used that changes with the movement of. Since the resistance value of the SV-GMR element is determined by the pinned layer magnetization direction and the vector direction of the external magnetic field (external magnetic flux density), the midpoint voltage of the detection output Vout (the average value of the maximum peak and the minimum peak of the detection output Vout) ) Is determined only by the resistance value variation of the SV-GMR element and the magnetic field vector variation generated by the bias magnet 5, and by the bias magnet generated magnetic field strength variation and the gap between the gear and the SV-GMR element (assembly variation). Since it is not affected, the midpoint voltage of the detection output Vout is stabilized.

(2) Since the variation of the midpoint voltage can be reduced, the product yield can be improved, the adjustment work during the installation can be simplified and the workability can be improved, and the cost can be reduced.

(3) Apply a bias magnetic field parallel to the magnetosensitive surface of the SV-GMR element as shown in FIG. 3 (A) to use the in-plane magnetic characteristics, and pin the operating range as shown in FIG. 3 (B). In order to use a portion where the angle of the two changes around the point where the magnetization direction of the layer and the magnetic field are substantially orthogonal (to utilize the linear portion of the in-plane magnetic characteristic change of the SV-GMR element), there is no saturation as the detection output Vout. A waveform very close to a sine wave is obtained. Especially in the case of industrial equipment, the sensor output is regarded as a sine wave and the angle information is obtained from the output waveform. Therefore, it is essential to make the output waveform as close to the sine wave as possible, but this requirement is satisfied. It is possible.

(4) The paired SV-GMR elements R1 and R2 are used, and the pin layer magnetization directions of the SV-GMR elements R1 and R2 are substantially in the forward and reverse directions with respect to the movement direction of the gear 1. Therefore, the SV-GMR elements R1 and R2 are connected in series, the supply voltage Vin is supplied, and the detection output Vout is taken out from the connection point of the SV-GMR elements R1 and R2, thereby using one SV-GMR element. As a result, twice as many detection outputs can be obtained.

  FIG. 4 shows a second embodiment of the moving object detection apparatus according to the present invention. In FIG. 4A, SV-GMR elements R1 and R2 are fixedly arranged side by side on a plane substantially perpendicular to the outer peripheral surface of the soft magnetic gear 1 (substantially parallel to the plane on which the gear 1 rotates). The magnetosensitive surfaces of the elements R1 and R2 are parallel to a plane substantially perpendicular to the outer peripheral surface of the gear 1. The arrangement direction of the two SV-GMR elements R1 and R2 is arranged in a direction substantially perpendicular to the moving direction of the gear 1 (extending direction of the radius of the gear 1). The pin layer magnetization direction of the SV-GMR element R1 is substantially opposite to the moving direction of the gear 1, and the pin layer magnetization direction of the SV-GMR element R2 is substantially forward (opposite direction of the SV-GMR element R1). is there.

  The bias magnet 5 has a magnetic pole surface 5a on the magnetosensitive surface so that the magnetic field at the position of the SV-GMR elements R1 and R2 mainly has a magnetic field component parallel to the magnetosensitive surface of the SV-GMR elements R1 and R2. It is almost vertical. Further, when there is no gear 1 as a magnetic material moving body, the bias magnet 5 generates a magnetic flux substantially perpendicular to the pinned layer magnetization direction of each SV-GMR element R1, R2. That is, the relationship between the magnetic field generated by the bias magnet 5 and the SV-GMR elements R1 and R2 is the same as that in the first embodiment.

  The electrical connection relationship between the SV-GMR elements R1 and R2 in FIG. 4B is the same as that in the first embodiment.

  Also in the case of the second embodiment, when the convex portion 2 of the gear 1 is located in front of the SV-GMR elements R1 and R2, a magnetic field parallel to the magnetic sensitive surface of each SV-GMR element R1 and R2 is used. The direction of the component is not affected by the convex portion 2 and is substantially perpendicular to the pinned layer magnetization direction. On the other hand, at the position where the convex portion 2 of the gear 1 is shifted to the left side from the front position of the SV-GMR elements R1 and R2, the direction of the magnetic field component parallel to the magnetosensitive surface is affected by the convex portion 2 and leftward. At the position that is bent (the magnetic flux from the magnetic pole surface 5a is bent to the left) and shifted to the right, the direction of the magnetic field component parallel to the magnetic sensitive surface is bent to the right by the influence of the convex portion 2 (from the magnetic pole surface 5a). The magnetic flux that comes out turns to the right). Therefore, the direction of the external magnetic field with respect to the pinned layer magnetization direction changes periodically with the rotation of the gear 1 within the operating range of the solid arrow in FIG. 3B, and the detection output Vout close to a sine wave as shown in FIG. Is obtained.

  In the first and second embodiments, the case where the convex portions of the rotating soft magnetic gears are periodically arranged as the magnetic material moving body has been shown. However, the soft magnetic circle in which the convex portions or the concave portions rotate is shown. One or more magnetic material moving bodies provided on the outer peripheral surface of the plate can be used. Further, the magnetic material moving body may have a configuration in which one or a plurality of convex portions or concave portions are provided on a soft magnetic linear moving body.

  Further, although a pair of SV-GMR elements R1 and R2 are used, a detection output may be taken out by configuring a Wheatstone bridge or the like using a plurality of pairs of SV-GMR elements.

  Although the embodiments of the present invention have been described above, it will be obvious to those skilled in the art that the present invention is not limited to these embodiments, and various modifications and changes can be made within the scope of the claims.

BRIEF DESCRIPTION OF THE DRAWINGS It is Embodiment 1 of the mobile body detection apparatus which concerns on this invention, Comprising: (A) is a typical perspective view which shows the structure of a mobile body detection apparatus, (B) is a circuit diagram. It is two magnetic characteristics of the SV-GMR element used in the embodiment of the present invention, where (A) is an in-plane magnetic characteristic, and (B) is an explanatory diagram showing a surface perpendicular magnetic characteristic. FIG. 6 is an operation explanation of the first embodiment, where (A) is a perspective view showing a relationship between a bias magnetic field, a magnetosensitive surface of the SV-GMR element, and a pinned layer magnetization direction, and (B) is an element plane of the SV-GMR element. An explanatory view showing magnetic characteristics and an operating range, and (C) is an explanatory view showing an example of an output waveform. It is Embodiment 2 of the mobile body detection apparatus which concerns on this invention, Comprising: (A) is a typical perspective view which shows the structure of a mobile body detection apparatus, (B) is a circuit diagram. It is a rotation sensor as the conventional mobile body detection apparatus, Comprising: (A) is a typical perspective view which shows an apparatus structure, (B) is a circuit diagram. FIG. 6A is an explanatory diagram showing the operation of a conventional apparatus, in which FIG. 8A is an explanatory diagram showing magnetic characteristics and an operating range of an intensity detection type magnetoresistive element, and FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Soft magnetic gear 2 Convex part 5 Bias magnet R1, R2 SV-GMR element

Claims (5)

A moving body detection apparatus having a magnetic material moving body having at least one convex portion or a concave portion, a bias magnet for generating a magnetic field, and at least one spin valve type giant magnetoresistive element,
The magnetic field at the magnetoresistive element position mainly has a magnetic field component parallel to the magnetosensitive surface of the magnetoresistive element, and the direction of the magnetic field component parallel to the magnetosensitive surface relative to the pinned layer magnetization direction of the magnetoresistive element is A moving body detection apparatus that changes with the movement of the magnetic material moving body.   The pinned layer magnetization direction is substantially forward or substantially opposite to the moving direction of the magnetic material moving body, and the bias magnet is substantially perpendicular to the pinned layer magnetization direction when the magnetic material moving body is not present. The moving body detection device according to claim 1, wherein the moving body detection device is arranged to generate a magnetic flux.   One or more pairs of the magnetoresistive elements are provided, and the pinned layer magnetization directions of the paired magnetoresistive elements are oriented in a substantially forward direction and a substantially opposite direction with respect to the moving direction of the magnetic material moving body. The moving body detection apparatus according to claim 1 or 2.   The moving body detection device according to claim 3, wherein the paired magnetoresistive elements are arranged in a direction substantially perpendicular to a moving direction of the magnetic material moving body.   5. The moving body detection apparatus according to claim 1, wherein a detection output waveform due to a resistance change of the magnetoresistive element is a substantially sine wave.

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