JP2005298393A5 - - Google Patents

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Publication number
JP2005298393A5
JP2005298393A5 JP2004115747A JP2004115747A JP2005298393A5 JP 2005298393 A5 JP2005298393 A5 JP 2005298393A5 JP 2004115747 A JP2004115747 A JP 2004115747A JP 2004115747 A JP2004115747 A JP 2004115747A JP 2005298393 A5 JP2005298393 A5 JP 2005298393A5
Authority
JP
Japan
Prior art keywords
butyrolactone
bromo
chloro
methoxy
dimethyl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004115747A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005298393A (ja
JP4567362B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004115747A priority Critical patent/JP4567362B2/ja
Priority claimed from JP2004115747A external-priority patent/JP4567362B2/ja
Publication of JP2005298393A publication Critical patent/JP2005298393A/ja
Publication of JP2005298393A5 publication Critical patent/JP2005298393A5/ja
Application granted granted Critical
Publication of JP4567362B2 publication Critical patent/JP4567362B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2004115747A 2004-04-09 2004-04-09 （メタ）アクリル酸エステルの製造法 Expired - Lifetime JP4567362B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004115747A JP4567362B2 (ja) 2004-04-09 2004-04-09 （メタ）アクリル酸エステルの製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004115747A JP4567362B2 (ja) 2004-04-09 2004-04-09 （メタ）アクリル酸エステルの製造法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010144725A Division JP5249287B2 (ja) 2010-06-25 2010-06-25 （メタ）アクリル酸エステルの製造法

Publications (3)

Publication Number Publication Date
JP2005298393A JP2005298393A (ja) 2005-10-27
JP2005298393A5 true JP2005298393A5 (cg-RX-API-DMAC10.html) 2007-03-08
JP4567362B2 JP4567362B2 (ja) 2010-10-20

Family

ID=35330374

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004115747A Expired - Lifetime JP4567362B2 (ja) 2004-04-09 2004-04-09 （メタ）アクリル酸エステルの製造法

Country Status (1)

Country Link
JP (1) JP4567362B2 (cg-RX-API-DMAC10.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007122691A1 (ja) * 2006-04-14 2007-11-01 Mitsubishi Chemical Corporation 高純度α－（メタ）アクリロイロキシーγ－ブチロラクトン及びその製造方法
JP5249287B2 (ja) * 2010-06-25 2013-07-31 大阪有機化学工業株式会社 （メタ）アクリル酸エステルの製造法
JP6020477B2 (ja) * 2014-01-24 2016-11-02 信越化学工業株式会社 ポジ型レジスト材料及びこれを用いたパターン形成方法
JP6442965B2 (ja) * 2014-10-07 2018-12-26 Jsr株式会社 感放射線性樹脂組成物及びレジストパターン形成方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL89791A0 (en) * 1989-03-29 1989-09-28 Bromine Compounds Ltd Process for the preparation of bromo-substituted aromatic esters of alpha,beta-unsaturated acids
JP2967252B2 (ja) * 1993-06-17 1999-10-25 大阪有機化学工業株式会社 グリシジルメタクリレートの製造法
CA2139379A1 (en) * 1994-01-03 1995-07-04 Rodney M. Harris Anhydride-functional monomers and polymers and reactive compositions prepared from same
JP3546679B2 (ja) * 1997-01-29 2004-07-28 住友化学工業株式会社 化学増幅型ポジ型レジスト組成物
JP3972568B2 (ja) * 2000-05-09 2007-09-05 住友化学株式会社 化学増幅型ポジ型レジスト組成物及びスルホニウム塩

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