JP2005294387A - Case for electronic component and manufacturing method thereof - Google Patents

Case for electronic component and manufacturing method thereof Download PDF

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JP2005294387A
JP2005294387A JP2004104724A JP2004104724A JP2005294387A JP 2005294387 A JP2005294387 A JP 2005294387A JP 2004104724 A JP2004104724 A JP 2004104724A JP 2004104724 A JP2004104724 A JP 2004104724A JP 2005294387 A JP2005294387 A JP 2005294387A
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side wall
container
container body
electrode pad
prepreg
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JP4364704B2 (en
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Hirokazu Kobayashi
宏和 小林
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Kyocera Crystal Device Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem in a case of electronic component of the conventional ceramic structure that it is difficult to highly accurately control each size of the case body after the baking process, because the baking process is used as the forming means thereof and therefore ceramic is contracted before and after the baking process and the contraction coefficient thereof is not constant. <P>SOLUTION: The case body for electronic component is formed of a metal or an alloy the bottom is formed with an organic multilayer plate, a side wall is erected and fixed at a side edge of one main surface, and an electrode pad for connection of electronic element of the bottom is formed. In the manufacturing method of the case for electronic component, a plurality of cases are manufactured simultaneously by conducting the etching and cutting of the case sheet formed by laminating each member forming the case body described above. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、表面実装型の電子部品パッケージを構成する容器体及びその製造方法に関する発明である。   The present invention relates to a container body constituting a surface-mount type electronic component package and a method for manufacturing the same.

近年、電子機器に搭載される圧電振動子や圧電発振器等の電子部品における小型化やそれに伴う部品寸法の高精度化及び低価格化の要求が強く、それに伴いこれら電子部品を構成するパッケージが各種発明考案されている。   In recent years, there has been a strong demand for downsizing of electronic parts such as piezoelectric vibrators and piezoelectric oscillators mounted on electronic devices, and the accompanying increase in precision and cost of parts dimensions. The invention is devised.

従来技術として、圧電振動子や圧電発振器等に使用される電子部品用パッケージを構成する容器体の一例を図に示す。即ち、容器体は絶縁材であるセラミックスで形成された底部と、該底部の辺縁部に直立する、同じく絶縁材であるセラミックスで形成された側壁部より形成されている。   As a prior art, an example of a container body constituting a package for an electronic component used for a piezoelectric vibrator, a piezoelectric oscillator, or the like is shown in the drawing. That is, the container body is formed of a bottom portion made of ceramic as an insulating material, and a side wall portion made of ceramic as the insulating material, which stands upright on the edge of the bottom portion.

該側壁部に囲まれた、電子素子を搭載する空間を構成する底部の一方の主面には、搭載する電子素子と電気的に接続する金属製の電子素子接続用電極パッドが複数形成され、この電極パッドから底部の他方の主面に形成された他のマザーボード等に電気的に接続及び固着するための外部接続用電極パッドへ至る導通部が形成されている。   A plurality of metal electronic device connection electrode pads that are electrically connected to the electronic device to be mounted are formed on one main surface of the bottom portion that constitutes the space for mounting the electronic device, surrounded by the side wall portion, A conductive portion is formed from this electrode pad to an external connection electrode pad for electrical connection and fixation to another motherboard or the like formed on the other main surface of the bottom.

この導通部の引き回しを形成するためには、複数のセラミックス層を形成し、各々のセラミックス層の主面上に形成した金属膜による導配線間を、セラミックス層を貫通するスルーホールにより導通して電子素子接続用パッドと外部接続用パッド間を導通し容器体を構成している。   In order to form the lead of the conductive portion, a plurality of ceramic layers are formed, and the conductive wires made of the metal film formed on the main surface of each ceramic layer are electrically connected by a through hole penetrating the ceramic layer. A container body is formed by electrical conduction between the electronic element connection pad and the external connection pad.

一般的に、このような容器体の側壁部頂部にメタライズ層等を形成し、そのメタライズ層の上に側壁部の開口部を覆うような金属製の蓋を配置し、メタライズ層と蓋とを固着することで、側壁部で囲われた内部空間を気密封止したパッケージによる電子部品を構成している。   Generally, a metallized layer or the like is formed on the top of the side wall of such a container body, and a metal lid is disposed on the metallized layer so as to cover the opening of the side wall. By adhering, an electronic component is configured by a package in which the internal space surrounded by the side wall is hermetically sealed.

又、上記したような容器体を製造する方法としては、焼成加工により個々の容器体形状の一部を複数形成した一塊のセラミックシートを所定の切断位置で切断分離することで、複数個の容器体を製造する方法が通常用いられている。   In addition, as a method of manufacturing the container body as described above, a plurality of containers are obtained by cutting and separating a lump of ceramic sheets in which a part of each container body shape is formed by firing processing at a predetermined cutting position. Methods for manufacturing the body are commonly used.

前記のような電子部品用の容器体の構造については、以下のような文献が開示されている。   The following documents are disclosed about the structure of the container for electronic components as described above.

特開2002−26680号公報JP 2002-26680 A

尚、出願人は前記した先行技術文献情報で特定される先行技術文献以外には、本発明に関連する先行技術文献を、本件出願時までに発見するに至らなかった。   In addition, the applicant has not found any prior art documents related to the present invention by the time of filing of the present application other than the prior art documents specified by the above prior art document information.

電子部品の小型化薄型化が進み、電子部品の長さ及び幅の寸法が数mm以下且つ厚み寸法が1mm以下となり、且つそれら電子部品の高密度の実装が行われるようになるにつれ、電子部品用のパッケージ、特に容器体においてμm単位での部品寸法精度が必要となってきている。しかし、前述した従来のセラミック構造の電子部品用の容器体では、その形成手段として焼成加工を用いているため、セラミックが焼成加工前後で収縮し且つその収縮率が一定でないため、焼成加工後の容器体の各寸法を高精度でコントロールすることが難しい。   As electronic components become smaller and thinner, the length and width of electronic components are several mm or less and the thickness is 1 mm or less, and these electronic components are mounted with high density. Therefore, it is necessary to have a component dimensional accuracy in units of μm in a package, particularly a container body. However, in the container body for an electronic component having the conventional ceramic structure described above, since the firing process is used as the forming means, the ceramic shrinks before and after the firing process and the shrinkage rate is not constant. It is difficult to control each dimension of the container body with high accuracy.

又、一塊のセラミックシートから複数個の容器体を切断形成する場合では、セラミックスシートに発生してしまう収縮に伴う反り、及びシート毎による容器体寸法のバラツキの発生が懸念される。更に、セラミックによる容器体では外部からの曲げ応力に対し比較的弱く、限界を超えると容易に割れてしまう場合がある。更に電子部品の容器体に使用されるようなセラミックは単価が高くなる場合が多い。   Further, when a plurality of container bodies are cut and formed from a lump of ceramic sheets, there is a concern about the warpage caused by the shrinkage that occurs in the ceramic sheets and the variation of the container body size from sheet to sheet. Furthermore, a container made of ceramic is relatively weak against bending stress from the outside, and may easily crack when the limit is exceeded. Furthermore, the unit price of a ceramic used for a container of an electronic component is often high.

更にセラミック以外の素材で形成されている従来の容器体のうち、樹脂により形成された容器体では、単価はセラミックと比べると安価だが、その材質上容器体としての気密性が低く、且つ加熱又は経時変化によりガスが発生する可能性があり、このガスを起因とする不具合が問題となる場合がある。他に有機絶縁板を多数積層して形成した容器体では、容器体内に電子素子を搭載する空間の形成及び電子素子接続用電極パッドなどのパターンを露出させなければならず、工数及びコストがかかり、更に加工時の発塵を処理しなくてならない問題がある。   Furthermore, among the conventional container bodies formed of materials other than ceramic, the unit price of the container body made of resin is lower than that of ceramic, but the material is not airtight as a container body and is heated or A gas may be generated due to a change with time, and a problem caused by this gas may be a problem. In addition, in a container body formed by laminating a large number of organic insulating plates, it is necessary to form a space for mounting electronic elements in the container body and to expose patterns such as electrode pads for connecting electronic elements, which increases man-hours and costs. Furthermore, there is a problem that dust generation during processing must be processed.

本発明は前述した問題点を解決するために成されたものであり、第1の発明としては、底部と、この底部の辺縁部に直立する側壁部より形成され、電子素子を搭載する側壁部に囲まれた底部の内部側主面上に形成した電子素子接続用電極パッドから、底部の外部側主面に形成した外部接続用電極パッドに至る、この両電極パッド含む導通部が形成されている電子部品用の容器体において、底部は有機多層板で形成されており、底部の電子素子接続用電極パッドが形成されている主面側の辺縁部に直立し且つ固着してある側壁部は、金属又は合金により形成されていることを特徴とする電子部品用の容器体である。   The present invention has been made to solve the above-mentioned problems. As a first aspect of the present invention, a side wall formed with a bottom part and a side wall part standing upright on the edge part of the bottom part is mounted. A conduction portion including both electrode pads is formed from the electrode pad for connecting an electronic element formed on the inner main surface of the bottom surrounded by the portion to the electrode pad for external connection formed on the outer main surface of the bottom. In the container for electronic components, the bottom is formed of an organic multilayer plate, and the side wall is upright and fixed to the edge on the main surface side where the electrode pad for connecting the electronic device of the bottom is formed The part is a container body for an electronic component characterized by being formed of a metal or an alloy.

又、底部の辺縁部表面と側壁部底面とをプリプレグにて接着し固定してある前項記載の電子部品用の容器体でもある。   Further, the container body for an electronic component as described in the preceding item, wherein the edge surface of the bottom part and the bottom surface of the side wall part are bonded and fixed with a prepreg.

第2の発明としては、底部と、この底部の辺縁部に直立する側壁部を形成し、底部には、電子素子を搭載する側壁部に囲まれた底部の内部側主面上に形成した電子素子接続用電極パッドから、底部外部側主面に形成した外部接続用電極パッドに至る、この両電極パッド含む導通部を形成する電子部品用の容器体の製造方法において、
複数個の容器体の底部を合わせた大きさの複数枚の有機絶縁板を積層し、容器体の内側面となる一方の最外面上に、複数個の電子素子接続用電極パッドを個々の容器体に合わせて形成し、容器体の底面となる他方の最外面上に、複数個の外部接続用電極パッドを個々の該容器体に合わせて形成し、電子素子接続用電極パッドと外部接続用電極パッドとの間をスルーホール及び導電部で形成した所望の配線で電気的に接続した有機多層板を形成する工程と、
この有機多層板の電子素子接続用電極パッドが形成されている一方の最外面上にプリプレグを配置する工程と、
このプリプレグの上面に該側壁部の高さを厚み寸法とし且つ有機多層板と同じ縦横寸法の金属又は合金板を配置し、プリプレグを介して有機多層板と金属又は合金板とを固着し容器シートを形成する工程と、
金属又は合金板の上にレジスト膜とを均一な膜厚で形成する工程と、
このレジスト膜の表面上に、金属又は合金板を形成する所望の側壁部の開口形状パターンを形成したマスクを配置し、マスクの上方からレジスト膜を露光し、現像する工程と、
現像によりレジスト膜が除かれて露出した部分の金属又は合金板をエッチングにより除去し、個々の容器体の側壁部となる部分を形成する工程と、
該側壁部の内側底部に露出した該プリプレグを除去し、プリプレグの下の電子素子接続用電極パッドを露出する工程と、
上記加工を施した容器シートを個々の容器体に切断分離する工程とを備えたことを特徴とする電子部品用の容器体の製造方法である
As a second invention, a bottom portion and a side wall portion standing upright on the edge portion of the bottom portion are formed, and the bottom portion is formed on the inner main surface of the bottom portion surrounded by the side wall portion on which the electronic element is mounted. In the method of manufacturing a container body for an electronic component that forms a conduction portion including both electrode pads, from the electrode pad for connecting an electronic element to the electrode pad for external connection formed on the bottom outer side main surface,
A plurality of organic insulating plates having a size matching the bottom of a plurality of container bodies are stacked, and a plurality of electrode pads for connecting electronic devices are placed on the outermost surface which is the inner surface of the container body. A plurality of external connection electrode pads are formed on the other outermost surface, which is the bottom surface of the container body. Forming an organic multilayer board electrically connected to the electrode pad by a desired wiring formed by a through hole and a conductive portion;
A step of disposing a prepreg on one outermost surface where the electrode pad for connecting an electronic element of the organic multilayer plate is formed;
A metal or alloy plate having the same vertical and horizontal dimensions as the organic multilayer plate is disposed on the upper surface of the prepreg, and the organic multilayer plate and the metal or alloy plate are fixed to each other via the prepreg. Forming a step;
Forming a resist film with a uniform thickness on a metal or alloy plate;
On the surface of the resist film, a mask in which an opening shape pattern of a desired side wall part for forming a metal or alloy plate is disposed, the resist film is exposed from above the mask, and developed,
A step of removing the exposed metal or alloy plate by etching after removing the resist film by development to form a portion to be a side wall portion of each container body;
Removing the prepreg exposed at the inner bottom of the side wall and exposing an electrode pad for connecting an electronic device under the prepreg;
And a step of cutting and separating the processed container sheet into individual container bodies.

更に、この側壁部の材質、又は容器シートを構成する金属又は合金板の材質として銅を用いたことを特徴とする前項記載の電子部品用の容器体及びその製造方法でもある。   Further, the present invention is also the container for electronic parts and the method for manufacturing the same according to the preceding item, wherein copper is used as the material of the side wall or the metal or alloy plate constituting the container sheet.

本発明の電子部品用の容器体及びその製造方法において、有機多層板と金属又は合金板の積層加工及びエッチング加工という機械的及び熱的な作用を伴わない簡易な工法を用い、更に工程の一部にフォトリソグラフィ方法を用いているため、同一寸法の容器体を寸法精度良く且つ多数個同時に製造することができる。   In the container for an electronic component of the present invention and the manufacturing method thereof, a simple construction method that does not involve mechanical and thermal action such as laminating processing and etching processing of an organic multilayer plate and a metal or alloy plate is used. Since the photolithographic method is used for the part, a large number of containers having the same size can be manufactured simultaneously with high dimensional accuracy.

又、シート形状により各工程を行っているので、容器体自体の小型化が進んでも治具や製造設備を小型化に伴って小型高精度化にする必要がなく生産性が向上する。更に、本発明における容器体は側壁部が金属又は合金で形成されているのでECM(Electronic Counter Measure)効果が大きく、特に導電率が比較的大きい銅を側壁部材として用いた場合はその効果は更に大きくなり、容器体内部に搭載する電子素子の特性に不具合が生じることを防止できる。   In addition, since each process is performed according to the sheet shape, it is not necessary to reduce the size and accuracy of the jig and the manufacturing equipment as the size of the container body is reduced, so that productivity is improved. Further, the container body according to the present invention has a large ECM (Electronic Counter Measurement) effect because the side wall portion is formed of a metal or an alloy. In particular, when copper having a relatively high conductivity is used as the side wall member, the effect is further increased. It becomes large and it can prevent that the malfunction arises in the characteristic of the electronic element mounted in a container body inside.

上記のような作用により、本発明は寸法精度が非常に高く且つ信頼性が高く、更に安価に製造できる電子部品用の容器及びその製造方法を提供できる効果を奏する。   Due to the above-described actions, the present invention has an effect of providing a container for an electronic component that can be manufactured at a low cost with a very high dimensional accuracy and high reliability, and a manufacturing method thereof.

以下、本発明による電子部品用の容器体及びその製造方法の実施形態を、図面を参照しながら説明する。
図1は本発明に係わる電子部品用の容器体の製造方法を示す工程図である。図2は図1に開示した製造方法により作成した容器体の形状を示す斜視図である。尚、図1乃至2にあって、説明を明りょうにするため構造体の一部を図示せず、また寸法も一部誇張して図示している。特に各部分の厚さ寸法は、本発明を理解し易くするためにデフォルメした形で現している。
DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of a container body for an electronic component and a method for manufacturing the same according to the present invention will be described with reference to the drawings.
FIG. 1 is a process diagram showing a method for manufacturing a container for an electronic component according to the present invention. FIG. 2 is a perspective view showing the shape of the container body produced by the manufacturing method disclosed in FIG. In FIGS. 1 and 2, a part of the structure is not shown and the dimensions are partially exaggerated for the sake of clarity. In particular, the thickness dimension of each part is shown in a deformed form for easy understanding of the present invention.

即ち、図1(a)において、最終工程において形成される容器体の複数個の底部を合わせた大きさの複数枚の有機絶縁板を積層し、容器体の内側面となる一方の最外面13上に、複数個の電子素子接続用電極パッド12を個々の容器体に合わせて形成し、又、容器体の底面となる他方の最外面上には、複数個の外部接続用電極パッド(図示せず)を個々の容器体に合わせて形成し、電子素子接続用電極パッド12と外部接続用電極パッドとの間をスルーホール及び導電部で形成した所望の配線で電気的に接続した有機多層板11を形成し、この有機多層板11の電子素子接続用電極パッド12が形成されている一方の最外面13上に接着作用を有するプリプレグ14を配置し、プリプレグ14の上面に容器体の側壁部の高さを厚み寸法とし且つ有機多層板11と同じ縦横寸法の銅板15を配置する。   That is, in FIG. 1A, a plurality of organic insulating plates having a size combining a plurality of bottom portions of the container body formed in the final process are stacked, and one outermost surface 13 serving as an inner surface of the container body. A plurality of electrode pads 12 for connecting electronic devices are formed on each container body, and a plurality of electrode pads for external connection (see FIG. (Not shown) is formed in accordance with the individual container body, and is electrically connected with the desired wiring formed by through holes and conductive portions between the electrode pads for electronic element connection 12 and the electrode pads for external connection. A plate 11 is formed, a prepreg 14 having an adhesive action is disposed on one outermost surface 13 of the organic multilayer plate 11 on which the electrode pads 12 for connecting electronic elements are formed, and the side wall of the container body is disposed on the upper surface of the prepreg 14. The height of the part is the thickness dimension and Placing copper plate 15 of the same length and width as the organic multilayer board 11.

次に図1(b)において、プリプレグ14を介して有機多層板11と銅板15とを固着し、容器シート10を形成する。プリプレグ14の作用としては、有機多層基板11と銅板15との接着固定のほか、後述するエッチング加工の際に、電子素子接続用電極パッド12を含む有機多層板の一方の最外面13を保護する作用も有する。   Next, in FIG.1 (b), the organic multilayer board 11 and the copper plate 15 are adhere | attached through the prepreg 14, and the container sheet | seat 10 is formed. As an action of the prepreg 14, in addition to adhesion and fixation between the organic multilayer substrate 11 and the copper plate 15, one outermost surface 13 of the organic multilayer plate including the electronic element connection electrode pads 12 is protected during the etching process described later. It also has an effect.

次に図1(c)において、容器シート10を構成する銅板15における後の工程で個々の容器体の側壁部の頂部となる位置の表面から、有機多層基板11に形成されている接地用の導電パターンに至るビアホール16を形成しメッキ処理する。これで後の工程で形成される個々の容器体の側壁部は各々接地されされていることとなり、ECM効果を奏する。   Next, in FIG.1 (c), from the surface of the position used as the top part of the side wall part of each container body in the subsequent process in the copper plate 15 which comprises the container sheet | seat 10, it is for earthing | grounding currently formed in the organic multilayer substrate 11 A via hole 16 reaching the conductive pattern is formed and plated. Thus, the side wall portions of the individual container bodies formed in the subsequent process are grounded, and an ECM effect is produced.

次に図1(d)において、容器シート10を構成する銅板15の上にレジスト膜とを均一な膜厚で形成し、このレジスト膜の表面上に、銅板15に形成する所望の側壁部の開口形状のパターンを形成したマスクを配置し、このマスクの上方からレジスト膜を露光し現像する。現像によりレジスト膜が除かれて露出した部分の銅板15をエッチングにより除去し、個々の容器体の側壁部となる部分を形成する。図1(d)はエッチング後の状態を図示しており、エッチング加工により銅板15を除去された部分の底部にはプリプレグ14が露出している。   Next, in FIG. 1D, a resist film is formed on the copper plate 15 constituting the container sheet 10 with a uniform film thickness, and a desired side wall portion formed on the copper plate 15 is formed on the surface of the resist film. A mask having an opening pattern is disposed, and the resist film is exposed and developed from above the mask. The resist film is removed by development, and the exposed copper plate 15 is removed by etching to form a portion that becomes a side wall portion of each container body. FIG. 1D shows a state after etching, and the prepreg 14 is exposed at the bottom of the portion where the copper plate 15 is removed by etching.

次に図1(e)において、容器体の側壁部の内側底部に露出したプリプレグ14を除去し、プリプレグ14の下の電子素子接続用電極パッド12が形成されている有機多層板11を露出する。プリプレグ14を除去する方法としては、化学的処理で除去する方法や、レーザ等で切断し機械的に除去する方法を用いる。その後容器シート10を個々の容器体に切断線に沿い切断分離する。   Next, in FIG.1 (e), the prepreg 14 exposed to the inner bottom part of the side wall part of a container body is removed, and the organic multilayer board 11 in which the electrode pad 12 for electronic element connection under the prepreg 14 is formed is exposed. . As a method for removing the prepreg 14, a method for removing the prepreg 14 by chemical treatment or a method for mechanically removing it by cutting with a laser or the like is used. Thereafter, the container sheet 10 is cut and separated into individual container bodies along a cutting line.

図2には、上記工程の製造方法により作成した容器体20を示す。即ち、底部21は絶縁性を有する有機絶縁板を積層し、且つ個々の有機絶縁板の表面には導電パターンを形成し、この導電パターン間を導通するために有機絶縁板を貫通するスルーホールなどで構成された有機多層板で形成されている。その底部21の側壁部22の内側底部となる一方の主面23上には電子素子接続用電極パッド12が形成されている。又、その底部21の他方の主面には外部接続用電極パッドが形成されている。更に、電子素子接続用電極パッド12と外部接続用電極パッドとの間は、各有機板の表面に形成した導電線や電極パッドで構成される導電部、及びその導電部を相互に電気的に接続するためのスルーホールなどにより電気的に接続されている。尚、両電極パッド及び導通部は金で形成されている。   In FIG. 2, the container body 20 created by the manufacturing method of the said process is shown. That is, the bottom portion 21 is formed by laminating organic insulating plates having insulating properties, and conductive patterns are formed on the surface of each organic insulating plate, and through holes penetrating the organic insulating plates are used for conducting between the conductive patterns. It is formed with the organic multilayer board comprised by this. An electrode pad 12 for connecting an electronic element is formed on one main surface 23 which is an inner bottom portion of the side wall portion 22 of the bottom portion 21. An external connection electrode pad is formed on the other main surface of the bottom 21. Furthermore, between the electrode pad 12 for electronic element connection and the electrode pad for external connection, the electroconductive part comprised by the conductive wire and electrode pad formed in the surface of each organic board, and the electroconductive part mutually electrically It is electrically connected through a through hole for connection. Both electrode pads and the conductive part are made of gold.

底部21の一方の主面23の辺縁部には、一方の主面23上の電子素子接続用電極パッド12を含む電子素子搭載領域を囲うように、垂直に直立する側壁部22が配置されている。この側壁部22は銅により形成されおり、ビアホール16に形成したメッキにより底部21に形成してある接地パターンと導通してある。この底部21の一方の主面23の辺縁部と側壁部22の底面とは、接着性を有するプリプレグ14にて相互に接着し、容器体20を構成している。   On the edge of one main surface 23 of the bottom portion 21, a vertically upstanding side wall portion 22 is disposed so as to surround the electronic device mounting region including the electronic device connection electrode pad 12 on the one main surface 23. ing. The side wall portion 22 is made of copper, and is electrically connected to the ground pattern formed on the bottom portion 21 by plating formed in the via hole 16. The edge portion of one main surface 23 of the bottom portion 21 and the bottom surface of the side wall portion 22 are adhered to each other by an adhesive prepreg 14 to constitute a container body 20.

尚、上記実施例では、容器体20の側壁部22の材質として銅を使用したものを例示したが、本発明の作用効果は、導電性を有し、製造工程においてエッチング加工が可能な金属又は合金であれば成すことができるものであり、側壁部22の材質を銅に限定するものではない。又、上記実施例で開示した有機絶縁板の素材としては、ガラスエポキシ、ポリイミド、又はコンポジット等を使用している。   In the above embodiment, copper is used as the material of the side wall portion 22 of the container body 20. However, the effect of the present invention is a metal having conductivity and capable of being etched in the manufacturing process. Any alloy can be used, and the material of the side wall 22 is not limited to copper. Further, glass epoxy, polyimide, composite, or the like is used as the material of the organic insulating plate disclosed in the above embodiment.

図1は、本発明に係わる電子部品用の容器体の製造工程の一実施形態を示す工程図である。FIG. 1 is a process diagram showing an embodiment of a manufacturing process of a container body for an electronic component according to the present invention. 図2は、図1に開示の製造工程により製造した電子部品用容器体の一実施例を示す斜視図である。FIG. 2 is a perspective view showing an embodiment of an electronic component container manufactured by the manufacturing process disclosed in FIG.

符号の説明Explanation of symbols

10,容器シート
11,有機多層板
12,電子素子接続用電極パッド
13,有機多層板の一方の最外主面
14,プリプレグ
15,銅板
20,容器体
21,底部
22,側壁部
23、底部21の一方の主面
DESCRIPTION OF SYMBOLS 10, Container sheet 11, Organic multilayer board 12, Electrode element connection electrode pad 13, One outermost main surface of organic multilayer board 14, Prepreg 15, Copper plate 20, Container body 21, Bottom part 22, Side wall part 23, Bottom part 21 One main surface of

Claims (4)

底部と該底部の辺縁部に直立する側壁部より形成され、電子素子を搭載する該側壁部に囲まれた該底部の内部側主面上に形成した電子素子接続用電極パッドから、該底部の外部側主面に形成した外部接続用電極パッドに至る、該両電極パッド含む導通部が形成されている電子部品用の容器体において、
該底部は有機多層板で形成されており、該底部の電子素子接続用電極パッドが形成されている主面側辺縁部に直立し且つ固着されている側壁部は、金属又は合金により形成されていること特徴とする電子部品用の容器体。
An electronic device connection electrode pad formed on an inner main surface of the bottom portion formed from a bottom portion and a side wall portion standing upright on the edge portion of the bottom portion and surrounded by the side wall portion on which the electronic device is mounted. In a container body for an electronic component in which a conductive portion including both electrode pads is formed, leading to an electrode pad for external connection formed on the outer side main surface of
The bottom portion is formed of an organic multilayer plate, and the side wall portion that is upright and fixed to the edge on the main surface side where the electrode pad for connecting an electronic element is formed is formed of a metal or an alloy. A container for electronic parts, characterized in that
該底部の該辺縁部と該側壁部底面とをプリプレグにて接着固定してあることを特徴とする請求項1記載の電子部品用容器体。   2. The electronic component container according to claim 1, wherein the edge of the bottom and the bottom of the side wall are bonded and fixed by a prepreg. 底部と該底部の辺縁部に直立する側壁部を形成し、該底部には電子素子を搭載する該側壁部に囲まれた該底部の内部側主面上に形成した電子素子接続用電極パッドから、該底部の外部側主面に形成した外部接続用電極パッドに至る、該両電極パッド含む導通部を形成する電子部品用の容器体の製造方法において、
複数個の容器体の底部を合わせた大きさの複数枚の有機絶縁板を積層し、該容器体の内側面となる一方の最外面上に、複数個の電子素子接続用電極パッドを個々の該容器体に合わせて形成し、該容器体の底面となる他方の最外面上に、複数個の外部接続用電極パッドを個々の該容器体に合わせて形成し、該電子素子接続用電極パッドと該外部接続用電極パッドとの間をスルーホール及び導電部で形成した所望の配線で電気的に接続した有機多層板を形成する工程と、
該有機多層板の該電子素子接続用電極パッドが形成されている一方の最外面上にプリプレグを配置する工程と、
該プリプレグの上面に該側壁部の高さを厚み寸法とし且つ該有機多層板と同じ縦横寸法の金属又は合金板を配置し、該プリプレグを介して該有機多層板と該金属又は合金板とを固着し、容器シートを形成する工程と、
該容器シートを構成する該金属又は合金板の上にレジスト膜を均一な膜厚で形成する工程と、
該レジスト膜の表面上に、該金属又は合金板を形成する所望の側壁部の開口形状パターンを形成したマスクを配置し、該マスクの上方から該レジスト膜を露光し、現像する工程と、
現像により該レジスト膜が除かれて露出した部分の該金属又は合金板をエッチングにより除去し、個々の容器体の側壁部となる部分を形成する工程と、
該側壁部の内側底部に露出した該プリプレグを除去し、プリプレグの下の電子素子接続用電極パッドを露出する工程と、
上記加工を施した該容器シートを個々の容器体に切断分離する工程と
を備えたことを特徴とする電子部品用の容器体の製造方法。
An electrode pad for connecting an electronic device formed on a main surface on the inner side of the bottom portion surrounded by the side wall portion on which the electronic device is mounted is formed on the bottom portion and a side wall portion standing upright on the edge portion of the bottom portion In the method of manufacturing a container body for an electronic component that forms a conduction portion including both electrode pads, from the external connection main surface formed on the outer main surface of the bottom,
A plurality of organic insulating plates having a size matching the bottoms of a plurality of container bodies are laminated, and a plurality of electronic device connecting electrode pads are individually provided on one outermost surface which is an inner surface of the container body. A plurality of external connection electrode pads are formed on the other outermost surface, which is the bottom surface of the container body, so as to match the container body, and the electronic element connection electrode pad is formed. Forming an organic multilayer board electrically connected by a desired wiring formed by through holes and conductive portions between the electrode pads for external connection and the external connection electrodes;
Disposing a prepreg on one outermost surface of the organic multilayer plate on which the electrode pad for connecting an electronic element is formed;
A metal or alloy plate having the same height and width as the organic multilayer plate is disposed on the upper surface of the prepreg, and the organic multilayer plate and the metal or alloy plate are disposed through the prepreg. Adhering and forming a container sheet;
Forming a resist film with a uniform thickness on the metal or alloy plate constituting the container sheet;
Placing a mask on the surface of the resist film on which a desired side wall opening shape pattern for forming the metal or alloy plate is formed, exposing the resist film from above the mask, and developing;
Removing the resist or the exposed portion of the metal or alloy plate by development to form a portion to be a side wall portion of each container body;
Removing the prepreg exposed at the inner bottom of the side wall and exposing an electrode pad for connecting an electronic device under the prepreg;
And a step of cutting and separating the processed container sheet into individual container bodies.
該側壁部の材質、及び該容器シートを構成する金属又は合金板の材質として銅を用いたことを特徴とする請求項1及び請求項2記載の電子部品用の容器体及びその製造方法。   3. A container body for an electronic component and a method for manufacturing the same according to claim 1, wherein copper is used as a material of the side wall and a material of a metal or alloy plate constituting the container sheet.
JP2004104724A 2004-03-31 2004-03-31 Method for manufacturing container for electronic component Expired - Fee Related JP4364704B2 (en)

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