JP2005291790A5 - - Google Patents

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Publication number
JP2005291790A5
JP2005291790A5 JP2004104139A JP2004104139A JP2005291790A5 JP 2005291790 A5 JP2005291790 A5 JP 2005291790A5 JP 2004104139 A JP2004104139 A JP 2004104139A JP 2004104139 A JP2004104139 A JP 2004104139A JP 2005291790 A5 JP2005291790 A5 JP 2005291790A5
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JP
Japan
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Application number
JP2004104139A
Other versions
JP4789424B2 (ja
JP2005291790A (ja
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Priority to JP2004104139A priority Critical patent/JP4789424B2/ja
Priority claimed from JP2004104139A external-priority patent/JP4789424B2/ja
Publication of JP2005291790A publication Critical patent/JP2005291790A/ja
Publication of JP2005291790A5 publication Critical patent/JP2005291790A5/ja
Application granted granted Critical
Publication of JP4789424B2 publication Critical patent/JP4789424B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2004104139A 2004-03-31 2004-03-31 気体圧力測定装置及び気体圧力測定方法 Expired - Lifetime JP4789424B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004104139A JP4789424B2 (ja) 2004-03-31 2004-03-31 気体圧力測定装置及び気体圧力測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004104139A JP4789424B2 (ja) 2004-03-31 2004-03-31 気体圧力測定装置及び気体圧力測定方法

Publications (3)

Publication Number Publication Date
JP2005291790A JP2005291790A (ja) 2005-10-20
JP2005291790A5 true JP2005291790A5 (ja) 2005-12-02
JP4789424B2 JP4789424B2 (ja) 2011-10-12

Family

ID=35324897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004104139A Expired - Lifetime JP4789424B2 (ja) 2004-03-31 2004-03-31 気体圧力測定装置及び気体圧力測定方法

Country Status (1)

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JP (1) JP4789424B2 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008026100A (ja) * 2006-07-20 2008-02-07 Toppan Printing Co Ltd 真空度測定装置
JP4952124B2 (ja) * 2006-08-04 2012-06-13 凸版印刷株式会社 弾性表面波素子

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06103230B2 (ja) * 1990-11-30 1994-12-14 日本電素工業株式会社 ストレンゲージ
WO2001045255A1 (fr) * 1999-12-17 2001-06-21 Toppan Printing Co., Ltd. Dispositif de production d'ondes acoustiques superficielles
JP3823699B2 (ja) * 2000-07-12 2006-09-20 凸版印刷株式会社 球状弾性表面波素子
JP3974766B2 (ja) * 2001-10-09 2007-09-12 凸版印刷株式会社 弾性表面波素子
JP3772780B2 (ja) * 2002-03-29 2006-05-10 凸版印刷株式会社 マイクロフルーイッドチップ及びマイクロフルーイッドチップアレイ
JP4611890B2 (ja) * 2003-03-26 2011-01-12 一司 山中 センサヘッド、ガスセンサ及びセンサユニット
JP4426802B2 (ja) * 2003-09-19 2010-03-03 凸版印刷株式会社 弾性表面波素子及び弾性表面波素子を用いた環境差異検出装置
JP4426803B2 (ja) * 2003-09-19 2010-03-03 凸版印刷株式会社 弾性表面波素子及び弾性表面波素子を用いた環境差異検出装置
JP4389552B2 (ja) * 2003-11-11 2009-12-24 凸版印刷株式会社 弾性波素子および弾性波素子を用いた環境差異検出装置
JP4495948B2 (ja) * 2003-11-12 2010-07-07 凸版印刷株式会社 弾性表面波素子アレイ
KR100535405B1 (ko) * 2003-12-30 2005-12-08 현대자동차주식회사 타이어의 압력 및 온도 측정용 표면탄성파 센서

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