JP2005288951A - Screen printing machine - Google Patents

Screen printing machine Download PDF

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Publication number
JP2005288951A
JP2005288951A JP2004109571A JP2004109571A JP2005288951A JP 2005288951 A JP2005288951 A JP 2005288951A JP 2004109571 A JP2004109571 A JP 2004109571A JP 2004109571 A JP2004109571 A JP 2004109571A JP 2005288951 A JP2005288951 A JP 2005288951A
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substrate
mask
printing machine
suction nozzle
vacuum suction
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JP4241477B2 (en
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Hirokuni Kurihara
弘邦 栗原
Isao Abe
猪佐雄 阿部
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Hitachi Plant Technologies Ltd
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Hitachi Industries Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a printing machine, the upsizing of a device of which is prevented from developing and with which highly fine and high grade printing is possible by providing a cleaning mechanism for removing foreign matters adhered on a board at the inlet of the printing machine. <P>SOLUTION: This screen printing machine is so constituted as to equip with a printing table equipped with positioning mechanisms and lifting mechanisms of X-axis, Y-axis and θ-axis, a mask, which is stretched on an screen frame and has a transfer pattern as an opening part, a camera picturizing positioning marks provided on the board and on the mask, a squeegee, a squeegee head equipped with a lifting mechanism and a horizontally moving mechanism of the squeegee, a board taking-in conveyor, a board taking-out conveyor, a controller for controlling these mechanisms and an ionizer and a vacuum suction nozzle for removing foreign matters adhered onto the top surface of the board at or after its taking-in. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は電子回路基板にクリームはんだ等の電子材ペーストを供給するために用いるスクリーン印刷機に係り、特に高品質の印刷を行えるスクリーン印刷機に関する。   The present invention relates to a screen printer used for supplying an electronic material paste such as cream solder to an electronic circuit board, and more particularly to a screen printer capable of performing high-quality printing.

特許文献1に示すように、印刷するパターンに応じて開口した開口部を有するマスクを介して、スキージ等を用いて基板面にインクを塗布する従来のスクリーン印刷機においては、マスク面に残留インキが次の基板への塗布に悪影響を及ぼす恐れがあるため、マスク面を清掃する構成が多く提案されている。   As shown in Patent Document 1, in a conventional screen printing machine in which ink is applied to a substrate surface using a squeegee or the like through a mask having openings that are opened according to a pattern to be printed, residual ink is applied to the mask surface. However, since there is a possibility of adversely affecting the application to the next substrate, many configurations for cleaning the mask surface have been proposed.

また、特許文献2には、溶剤を用いて液晶ガラス基板面を清掃する清掃装置が提案されている。   Patent Document 2 proposes a cleaning device that cleans the liquid crystal glass substrate surface using a solvent.

特開平5−229108号公報Japanese Patent Laid-Open No. 5-229108

特開2003−53281号公報JP 2003-53281 A

ところで、スクリーン印刷機において半田バンプ印刷や液晶基板のシール剤の印刷等を行う場合、印刷パターンが高精細化する傾向にある。このようにパターンの高精細化に伴って、基板面に静電力等で異物が付着し印刷に悪影響を及ぼす恐れがある。基板面を清掃するためにスクリーン印刷機とは別に特許文献2に示すような装置を設ければよいが、それでは装置が大型になり、かつ基板を受け渡すための装置も必要となる。   By the way, when performing solder bump printing, printing of a sealant for a liquid crystal substrate, or the like in a screen printing machine, the print pattern tends to be highly precise. As the pattern becomes higher in definition, foreign matter may adhere to the substrate surface due to electrostatic force or the like, and printing may be adversely affected. In order to clean the substrate surface, a device as shown in Patent Document 2 may be provided separately from the screen printing machine. However, this increases the size of the device and also requires a device for delivering the substrate.

そこで本発明の目的は、基板上に付着した異物を除去する清掃機構を、印刷機入り口に設けることで、装置の大型化を防止し、高精細で高品質の印刷が可能な印刷機を提供することにある。   Accordingly, an object of the present invention is to provide a printing machine capable of preventing the enlargement of the apparatus and capable of high-definition and high-quality printing by providing a cleaning mechanism for removing foreign matter adhering to the substrate at the entrance of the printing machine. There is to do.

上記目的を達成するために、本発明では、X軸、Y軸及びθ軸の位置決め機構と昇降機構を備えた印刷テーブル、版枠に貼られ転写パターンを開口部として有するマスク、基板とマスクに設けられた位置決めマークを撮像するカメラ、スキージ、スキージ昇降機構および水平方向移動機構を備えたスキージヘッド、基板搬入コンベア、基板搬出コンベア、これらの機構を制御する制御装置を備え、基板搬入部に基板上面に付着した異物を取り除くためのイオナイザーと真空吸引ノズルを設けた構成としたものである。   In order to achieve the above object, in the present invention, a printing table provided with an X-axis, Y-axis, and θ-axis positioning mechanism and an elevating mechanism, a mask pasted on a plate frame and having a transfer pattern as an opening, a substrate and a mask It is equipped with a camera that images the provided positioning marks, a squeegee, a squeegee head equipped with a squeegee lifting mechanism and a horizontal movement mechanism, a substrate carry-in conveyor, a substrate carry-out conveyor, and a control device that controls these mechanisms. In this configuration, an ionizer and a vacuum suction nozzle for removing foreign matter adhering to the upper surface are provided.

上記構成とすることで、基板上に付着した異物を印刷前に除去できるため、印刷時に異物の影響を受けないため、高精細で高品質の印刷を行うことができる。   With the above-described configuration, the foreign matter attached on the substrate can be removed before printing, and is not affected by the foreign matter at the time of printing. Therefore, high-definition and high-quality printing can be performed.

次に搬入基板の清掃装置について図1から図6を用いて説明する。   Next, the cleaning device for the carry-in substrate will be described with reference to FIGS.

図1において、スクリーン印刷機の本体フレーム1の上部には、1対のガイドレール2によって案内され、図上前後方向に移動可能にスキージヘッド3が設けられている。このスキージヘッド3は、ボールスクリュー4とこれを回転させるモータ(図示せず)からなる駆動機構でスクリーンマスク8上を水平(前後方向)に移動される。   In FIG. 1, a squeegee head 3 is provided at the upper part of a main body frame 1 of the screen printing machine, guided by a pair of guide rails 2 and movable in the front-rear direction in the figure. The squeegee head 3 is moved horizontally (front-rear direction) on the screen mask 8 by a drive mechanism including a ball screw 4 and a motor (not shown) for rotating the ball screw 4.

スキージヘッド3にはスキージ5が搭載されている。スキージ5はスキージ昇降シリンダ6によって上下方向に移動できる。本体フレーム1には版枠受け7が設けられており、版枠受け7には印刷パターンを開口部として持つスクリーン(マスク)8を張った版枠9がセットされるように構成されている。スクリーンマスクの下部には印刷テーブル10が設けてある。印刷テーブル10は、XYθテーブル11とテーブル昇降機構(特に図示せず)を備えている。印刷テーブル10の上面には基板受け取りコンベア12が設けられている。基板受け取りコンベア12は、基板搬入コンベア13によって搬入された基板15を印刷テーブル10上に受け取り、印刷が終了すると基板搬出コンベア14に基板15を排出する。   A squeegee 5 is mounted on the squeegee head 3. The squeegee 5 can be moved up and down by a squeegee lifting cylinder 6. A plate frame receiver 7 is provided on the main body frame 1, and a plate frame 9 with a screen (mask) 8 having a printing pattern as an opening is set on the plate frame receiver 7. A printing table 10 is provided below the screen mask. The printing table 10 includes an XYθ table 11 and a table lifting mechanism (not particularly shown). A substrate receiving conveyor 12 is provided on the upper surface of the printing table 10. The substrate receiving conveyor 12 receives the substrate 15 carried in by the substrate carry-in conveyor 13 on the printing table 10, and discharges the substrate 15 to the substrate carry-out conveyor 14 when printing is completed.

全自動スクリーン印刷機においてはマスク8と基板15の位置合わせを自動的に行う機能を備えている。位置合わせを行うため、CCDカメラ16によってマスク8と基板15のそれぞれに設けられた位置合わせ用マークを撮像し、それらの位置を認識する。基板搬入部である搬入コンベア13の上部には、スクリーン印刷機に搬入される基板15の上面に帯電した電荷を中和するため、イオンを基板面に吹き付けるイオナイザー30が設けてある。またイオナイザー30の基板搬送方向下流側に、基板15上に付着した異物を吸引・除去するための真空吸引ノズル31が設けてある。イオナイザー30と真空吸引ノズル31は本体1に設けられたブラケット32の下に取り付けられている。   The fully automatic screen printer has a function of automatically aligning the mask 8 and the substrate 15. In order to perform alignment, the CCD camera 16 images the alignment marks provided on the mask 8 and the substrate 15, respectively, and recognizes their positions. An ionizer 30 for spraying ions onto the substrate surface is provided above the carry-in conveyor 13 serving as a substrate carry-in section in order to neutralize charges charged on the upper surface of the substrate 15 carried into the screen printer. Further, a vacuum suction nozzle 31 for sucking and removing foreign matter adhering to the substrate 15 is provided downstream of the ionizer 30 in the substrate transport direction. The ionizer 30 and the vacuum suction nozzle 31 are attached below a bracket 32 provided on the main body 1.

印刷機の基板搬入コンベア13の上流側は複数枚の基板を収納して、印刷機の基板搬入コンベアに1枚ずつ基板を供給するローダ(基板供給装置)40が設けてあり、このローダ40には、基板を基板搬入コンベア13に受け渡すための搬出コンベア41が設けてある。   On the upstream side of the substrate carry-in conveyor 13 of the printing machine, a loader (substrate supply device) 40 is provided that stores a plurality of substrates and supplies the substrates to the substrate carry-in conveyor of the printing machine one by one. Is provided with a carry-out conveyor 41 for delivering the substrate to the board carry-in conveyor 13.

図2は図1のA−A矢視図である。特に、基板が基板搬入コンベア13上に搭載されて基板15の清掃を行っている状態を示したものである。図2に示したように、イオナイザー30及び真空吸引ノズル31は基板15の流れ方向(図上の矢印方向)に対し、イオナイザー30が真空吸引ノズル31の上流に位置するように基板15の流れ方向とほぼ直角に配置されている。すなわち、基板15が基板搬入コンベア13上に設けたイオナイザー30の下を通過すると、イオナイザー30から基板15を帯電している電荷を中和するイオンが吹き付けられて、基板15に付着している異物の静電吸着力が弱められる。次に、真空吸引ノズル31部の下に基板15が到達すると、異物は真空吸引力でノズル内に回収される。この異物回収機構については後述する。   FIG. 2 is an AA arrow view of FIG. In particular, the state where the substrate is mounted on the substrate carry-in conveyor 13 and the substrate 15 is being cleaned is shown. As shown in FIG. 2, the flow direction of the substrate 15 is such that the ionizer 30 and the vacuum suction nozzle 31 are positioned upstream of the vacuum suction nozzle 31 with respect to the flow direction of the substrate 15 (arrow direction in the figure). It is arranged at a right angle. That is, when the substrate 15 passes under the ionizer 30 provided on the substrate carry-in conveyor 13, ions that neutralize the charge that charges the substrate 15 are sprayed from the ionizer 30, and the foreign matter attached to the substrate 15. The electrostatic attraction force is weakened. Next, when the substrate 15 reaches under the vacuum suction nozzle 31 portion, the foreign matter is collected in the nozzle by a vacuum suction force. This foreign material recovery mechanism will be described later.

図3は図2のB−B段面図である。図3において、イオナイザー30には清浄な空気を供給するブロワ(図示せず)のデリバリポートと連結された空気供給管34が設けられている。また真空吸引ノズル31には真空ポンプ(図示せず)のサクションポートに連結された真空吸引管33が設けてある。   FIG. 3 is a BB step view of FIG. In FIG. 3, the ionizer 30 is provided with an air supply pipe 34 connected to a delivery port of a blower (not shown) for supplying clean air. The vacuum suction nozzle 31 is provided with a vacuum suction pipe 33 connected to a suction port of a vacuum pump (not shown).

図4は図3のC−C断面図(真空吸引ノズルの長手方向断面図)である。図4に示すように、真空吸引ノズル31の開口部36は本発明のスクリーン印刷機で印刷可能な基板15の最大幅をカバーするに十分な長さを持っている必要がある。しかし、図4に示したように印刷可能な最大基板幅よりも狭い幅の基板15に印刷する場合は、真空吸引ノズル31の開口部36が最大基板幅に一致するように開口していると、開口部36が基板15から外れる部分が発生する。その場合、基板15から外れた開口部の空気抵抗が基板15上部の開口部の空気抵抗よりも著しく小さい。このため、真空吸引ノズル31の吸引風量はほとんどが基板幅から外れた開口部を流れ、基板15の上面の真空吸引力が著しく低下することになる。そのため、本発明では上記の不具合を防ぐためにシャッター35を設けた構成としてある。このシャッター35の位置を、真空吸引ノズル31の開口部36の長さが印刷機に供給される基板15の幅とほぼ一致するように調整できるようにしてある。図5は図4のD−D断面図であり、シャッター35は真空吸引ノズル31に設けた溝37内をスライドさせることにより、開口部36の長さを調整可能にしている。   4 is a cross-sectional view taken along the line CC of FIG. 3 (a cross-sectional view in the longitudinal direction of the vacuum suction nozzle). As shown in FIG. 4, the opening 36 of the vacuum suction nozzle 31 needs to have a length sufficient to cover the maximum width of the substrate 15 that can be printed by the screen printing machine of the present invention. However, when printing on the substrate 15 having a width narrower than the maximum printable substrate width as shown in FIG. A portion where the opening 36 is detached from the substrate 15 is generated. In that case, the air resistance of the opening part removed from the substrate 15 is significantly smaller than the air resistance of the opening part on the upper part of the substrate 15. For this reason, most of the suction air volume of the vacuum suction nozzle 31 flows through the opening portion deviating from the substrate width, and the vacuum suction force on the upper surface of the substrate 15 is significantly reduced. Therefore, in the present invention, the shutter 35 is provided in order to prevent the above problems. The position of the shutter 35 can be adjusted so that the length of the opening 36 of the vacuum suction nozzle 31 substantially matches the width of the substrate 15 supplied to the printing press. FIG. 5 is a cross-sectional view taken along the line D-D of FIG.

図6は本発明によるスクリーン印刷機における基板上面清掃部の空気回路の一例を示す回路図である。本発明のスクリーン印刷機は吸引ノズル24Aを備えた、マスク清掃装置24を備えている。空圧源であるブロア45は、基板上面清掃部の空気源とマスク清掃用の空気源とを共用するために空気切換え弁53を設けてある。空気切換え弁53が中立位置Cにあるときには、ブロア45のサクションポート46とデリベリポート47は空気切換え弁53のバイパスポートで連通しており、ブロア45は基板上面清掃部ともマスク清掃部とも連結されていない。空気切換え弁53を基板上面清掃位置Aに切換えると、ブロア45のサクションポート46が真空吸引ノズル31の吸引管33に、デリベリポート47はイオナイザー30の空気供給管34とそれぞれ連結する。一方、空気切換え弁53をマスク清掃位置Bに切換えると、ブロア45のサクションポート46がマスク清掃吸引ノズル24の吸引管51に、デリベリポート47は空気切換え弁53の排気ポートとそれぞれ連結する。   FIG. 6 is a circuit diagram showing an example of the air circuit of the substrate upper surface cleaning unit in the screen printing machine according to the present invention. The screen printing machine of the present invention includes a mask cleaning device 24 including a suction nozzle 24A. The blower 45, which is an air pressure source, is provided with an air switching valve 53 in order to share the air source of the substrate upper surface cleaning section and the air source for mask cleaning. When the air switching valve 53 is in the neutral position C, the suction port 46 and delivery port 47 of the blower 45 communicate with each other through the bypass port of the air switching valve 53, and the blower 45 is connected to both the substrate upper surface cleaning portion and the mask cleaning portion. Absent. When the air switching valve 53 is switched to the substrate upper surface cleaning position A, the suction port 46 of the blower 45 is connected to the suction pipe 33 of the vacuum suction nozzle 31 and the delivery port 47 is connected to the air supply pipe 34 of the ionizer 30. On the other hand, when the air switching valve 53 is switched to the mask cleaning position B, the suction port 46 of the blower 45 is connected to the suction pipe 51 of the mask cleaning suction nozzle 24, and the delivery port 47 is connected to the exhaust port of the air switching valve 53.

なお、図6において、マスク清掃用の吸引ノズル24のブロア側にはペーストをトラップするためのフィルタ52が、基板面清掃用の真空吸引ノズル31のブロア側には異物をトラップするためのフィルタ38が設けてある。図6のように空気回路を構成することによって、1台のブロアでイオン用の送風と、真空吸引用の真空力とマスク清掃用の吸引用の真空力を発生することができる。   In FIG. 6, a filter 52 for trapping paste is provided on the blower side of the suction nozzle 24 for cleaning the mask, and a filter 38 for trapping foreign matter is provided on the blower side of the vacuum suction nozzle 31 for cleaning the substrate surface. Is provided. By constructing an air circuit as shown in FIG. 6, it is possible to generate air blow for ions, vacuum force for vacuum suction, and vacuum force for suction for mask cleaning with a single blower.

なお、実施例では、スクリーン印刷機の基板上面清掃部は基板搬入コンベア13上に配置した構成として説明した。他の構成として、図示していないが、マスク清掃用吸引ノズル24等からなるマスク清掃部をマスク8とテーブル10との間を移動可能に設けておく。この吸引ノズル24から負圧よりマスクに残留するペーストを吸引除去するマスク清掃部の下部に、イオナイザー30と真空吸着ノズル31を設置することもできる。マスク清掃部にイオナイザー30及び真空吸着ノズル31を設けることで、基板15を印刷テーブル10上に搬入した後にマスク清掃部を基板15上で移動させながら基板上面の清掃を行うことも可能である。また、スクリーン印刷機の上流にイオナイザーと真空吸引ノズルを組み合わせた基板上面清掃装置を別装置として配置することも本発明の趣旨に反するものではない。また、マスク清掃部を基板搬入コンベア13の上部に位置するように停止させて、基板の清掃を行うこともできる。このように、マスク清掃部に基板清掃部を設けることで、印刷機本体1にブラケット32を設ける必要がなく、装置の小型化を図れる。   In addition, in the Example, the board | substrate upper surface cleaning part of the screen printing machine demonstrated as a structure arrange | positioned on the board | substrate carrying-in conveyor 13. FIG. As another configuration, although not shown, a mask cleaning unit including a mask cleaning suction nozzle 24 and the like is provided so as to be movable between the mask 8 and the table 10. An ionizer 30 and a vacuum suction nozzle 31 can also be installed below the mask cleaning unit that sucks and removes the paste remaining on the mask from the suction nozzle 24 due to negative pressure. By providing the ionizer 30 and the vacuum suction nozzle 31 in the mask cleaning unit, it is possible to clean the upper surface of the substrate while moving the mask cleaning unit on the substrate 15 after the substrate 15 is carried onto the printing table 10. Further, it is not contrary to the gist of the present invention to arrange a substrate top surface cleaning device, which is a combination of an ionizer and a vacuum suction nozzle, as a separate device upstream of the screen printing machine. Moreover, a mask cleaning part can be stopped so that it may be located in the upper part of the board | substrate carrying-in conveyor 13, and a board | substrate can also be cleaned. Thus, by providing the substrate cleaning unit in the mask cleaning unit, it is not necessary to provide the bracket 32 in the printing press main body 1, and the size of the apparatus can be reduced.

基板清掃機構を備えたクリーム半田印刷機の1実施例の図である。It is a figure of one Example of the cream solder printer provided with the board | substrate cleaning mechanism. 図1のA−A断面図で、基板清掃状態を説明するための平面図である。It is AA sectional drawing of FIG. 1, and is a top view for demonstrating a substrate cleaning state. 図2のB−B断面図である。It is BB sectional drawing of FIG. 図3のC−C段面図であるFIG. 4 is a CC step view of FIG. 3. 図4のD−D段面図である。FIG. 5 is a DD step view of FIG. 4. 空圧制御系の一例を示した図である。It is the figure which showed an example of the air pressure control system.

符号の説明Explanation of symbols

1…本体、3…スキージヘッド、5…スキージ、6…シリンダ、8…マスク、9…版枠、10…印刷テーブル、12…基板受け渡しコンベア13…基板搬入コンベア、14…基板搬出コンベア、15…基板、17…CCDカメラ、24…マスク清掃用吸引ノズル、30…イオナイザー、31…真空吸引ノズル、35…シャッター、36…開口部。
DESCRIPTION OF SYMBOLS 1 ... Main body, 3 ... Squeegee head, 5 ... Squeegee, 6 ... Cylinder, 8 ... Mask, 9 ... Plate frame, 10 ... Print table, 12 ... Substrate delivery conveyor 13 ... Substrate carry-in conveyor, 14 ... Substrate carry-out conveyor, 15 ... Substrate, 17 ... CCD camera, 24 ... Mask cleaning suction nozzle, 30 ... Ionizer, 31 ... Vacuum suction nozzle, 35 ... Shutter, 36 ... Opening.

Claims (3)

X軸、Y軸及びθ軸の位置決め機構と昇降機構を備えた印刷テーブル、版枠に貼られ転写パターンを開口部として有するマスク、基板とマスクに設けられた位置決めマークを撮像するカメラ、スキージ、スキージ昇降機構および水平方向移動機構を備えたスキージヘッド、基板搬入コンベア、基板搬出コンベア、これらの機構を制御する制御装置を備えたスクリーン印刷機において、
基板搬入時または基板搬入後に基板上面に付着した異物を取り除くためのイオナイザーと真空吸引ノズルを設けたことを特徴とするスクリーン印刷機。
X-axis, Y-axis and θ-axis positioning mechanism and printing table provided with a lifting mechanism, a mask pasted on a plate frame and having a transfer pattern as an opening, a camera for imaging a positioning mark provided on the substrate and the mask, a squeegee, In a squeegee head equipped with a squeegee lifting mechanism and a horizontal movement mechanism, a board carry-in conveyor, a board carry-out conveyor, and a screen printing machine equipped with a control device for controlling these mechanisms,
A screen printing machine comprising an ionizer and a vacuum suction nozzle for removing foreign matter adhering to the upper surface of a substrate when the substrate is loaded or after the substrate is loaded.
請求項1に記載のスクリーン印刷機において、
前記真空吸引ノズルにはその開口部を基板幅に合わせて調整するためのシャッターを備えたことを特徴とするスクリーン印刷機。
The screen printer according to claim 1, wherein
A screen printing machine, wherein the vacuum suction nozzle is provided with a shutter for adjusting an opening of the vacuum suction nozzle according to a substrate width.
請求項1に記載のスクリーン印刷機において、
マスクを清掃するために吸引口を備えたマスク清掃部を設け、
前記イオナイザーからの空気吹き出しと前記真空吸引ノズルによる空気吸引のために用いるブロアを前記マスク清掃部の空気吸引用のブロアと共用し、両者の機能を切換えるための切換え弁を備えたことを特徴とするスクリーン印刷機。
The screen printer according to claim 1, wherein
In order to clean the mask, a mask cleaning part with a suction port is provided,
The blower used for air blowing from the ionizer and air suction by the vacuum suction nozzle is shared with the air suction blower of the mask cleaning unit, and a switching valve for switching the functions of both is provided. Screen printing machine.
JP2004109571A 2004-04-02 2004-04-02 Screen printing machine Expired - Fee Related JP4241477B2 (en)

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Cited By (7)

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CN100382960C (en) * 2006-07-05 2008-04-23 浙江大学 Plate glass side electrode screen printing machine and method for preparing print electrode
KR100899348B1 (en) * 2008-10-27 2009-05-26 라인시스템(주) Screen printing machine for solar cell
KR100988761B1 (en) 2009-12-30 2010-10-20 백산철강(주) Screen print device for solar cell manufacture
KR100994199B1 (en) 2010-02-19 2010-11-12 주식회사 에스제이이노테크 Wafer print device for solar cell
CN105856812A (en) * 2016-04-21 2016-08-17 深圳市龙方自动化科技有限公司 High-accuracy intelligent alignment mechanism applied to screen printing machine
CN113115582A (en) * 2021-04-02 2021-07-13 深圳市众铭安科技有限公司 Feeding device and feeding process of full-automatic chip mounter
CN113815300A (en) * 2021-10-15 2021-12-21 深圳市至臻精密股份有限公司 Cambered surface screen printing machine for semiconductor preparation

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100382960C (en) * 2006-07-05 2008-04-23 浙江大学 Plate glass side electrode screen printing machine and method for preparing print electrode
KR100899348B1 (en) * 2008-10-27 2009-05-26 라인시스템(주) Screen printing machine for solar cell
KR100988761B1 (en) 2009-12-30 2010-10-20 백산철강(주) Screen print device for solar cell manufacture
KR100994199B1 (en) 2010-02-19 2010-11-12 주식회사 에스제이이노테크 Wafer print device for solar cell
CN105856812A (en) * 2016-04-21 2016-08-17 深圳市龙方自动化科技有限公司 High-accuracy intelligent alignment mechanism applied to screen printing machine
CN113115582A (en) * 2021-04-02 2021-07-13 深圳市众铭安科技有限公司 Feeding device and feeding process of full-automatic chip mounter
CN113815300A (en) * 2021-10-15 2021-12-21 深圳市至臻精密股份有限公司 Cambered surface screen printing machine for semiconductor preparation
CN113815300B (en) * 2021-10-15 2022-07-19 深圳市至臻精密股份有限公司 Cambered surface screen printing machine for semiconductor preparation

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