JP2005277164A - Wiring board - Google Patents

Wiring board Download PDF

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JP2005277164A
JP2005277164A JP2004089426A JP2004089426A JP2005277164A JP 2005277164 A JP2005277164 A JP 2005277164A JP 2004089426 A JP2004089426 A JP 2004089426A JP 2004089426 A JP2004089426 A JP 2004089426A JP 2005277164 A JP2005277164 A JP 2005277164A
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wiring
insulating substrate
conductor
wiring board
pad
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JP4377729B2 (en
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Takeshi Hayamizu
剛 早水
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Kyocera Corp
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Kyocera Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a wiring board which can surely prevent the matter that mechanical teardown is generated on a bonding surface between a connection pad and a conducting bump, a conducting bump itself, etc. over long period of time, even when the connection pad becomes small and the conducting bump is formed of lead free solder, and which wiring board is excellent in reliability of mechanical and electrical connection to an external electric circuit board. <P>SOLUTION: The wiring board 9 is provided with an insulating substrate 1 which is constituted by laminating a plurality of insulators, a wiring conductor 2 formed inside the insulating substrate 1, a plurality of the connection pads 3 which are arranged and formed on an outer peripheral part of a lower surface of the insulating substrate 1 so as to respectively protrude to a plurality of notched parts 1a formed on a side surface of the insulating substrate 1, and electrically connected to the wiring conductor 2 at the notched parts 1a, a conducting pad 4 formed in a center section of a lower surface of the insulating substrate 1, holes 5 of not penetrating which were formed on periphery of the conducting pad 4 of the lower surface of the insulating substrate 1, and conductors 6 formed on internal surfaces of the holes 5 of not penetrating. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、IC,LSI等の半導体集積回路素子、LD(半導体レーザ),LED(発光ダイオード),PD(フォトダイオード),CCD,ラインセンサ,イメージセンサ等の光半導体素子、圧電振動子,水晶振動子等の振動子、その他の種々の電子部品を搭載する配線基板に関する。   The present invention relates to semiconductor integrated circuit elements such as IC and LSI, LD (semiconductor laser), LED (light emitting diode), PD (photodiode), CCD, line sensor, image semiconductor and other optical semiconductor elements, piezoelectric vibrator, crystal The present invention relates to a wiring board on which a vibrator such as a vibrator and other various electronic components are mounted.

IC,LSI等の半導体集積回路素子、LD(半導体レーザ),LED(発光ダイオード),PD(フォトダイオード),CCD,ラインセンサ,イメージセンサ等の光半導体素子、圧電振動子,水晶振動子等の振動子、その他の種々の電子部品が搭載される配線基板は、一般に、酸化アルミニウム質焼結体やガラスセラミック焼結体、窒化アルミニウム質焼結体等の絶縁材料から成る絶縁層を、複数積層して成る絶縁基体と、絶縁基体の内部に形成された配線導体と、絶縁基体の下面の外周部に配列形成された複数の接続パッドとを有する構造である。   Semiconductor integrated circuit elements such as IC and LSI, LD (semiconductor laser), LED (light emitting diode), PD (photodiode), CCD, line sensor, optical semiconductor element such as image sensor, piezoelectric vibrator, crystal vibrator, etc. A wiring board on which a vibrator and other various electronic components are mounted generally includes a plurality of insulating layers made of an insulating material such as an aluminum oxide sintered body, a glass ceramic sintered body, and an aluminum nitride sintered body. Insulating base, a wiring conductor formed inside the insulating base, and a plurality of connection pads arranged on the outer periphery of the lower surface of the insulating base.

絶縁基体の側面には、通常、接続パッドが形成されている部位に対応して複数の切欠き部が配列形成されているとともに、この切欠き部に配線導体の一部が導出されている。また、切欠き部の内側面に接続パッドが延出され、この延出部分で接続パッドと配線導体とが電気的に接続されている。   On the side surface of the insulating base, a plurality of cutouts are usually formed corresponding to the portions where the connection pads are formed, and a part of the wiring conductor is led to the cutouts. In addition, a connection pad extends on the inner side surface of the notch, and the connection pad and the wiring conductor are electrically connected at the extended portion.

そして、絶縁基体の上面に電子部品を搭載するとともに、電子部品の信号用や接地用,電源用等の電極を対応する配線導体に、半田やボンディングワイヤを介して接続し、必要に応じて電子部品を樹脂やキャップで封止することにより電子装置として完成する。   In addition to mounting electronic components on the top surface of the insulating substrate, the electrodes for signal, grounding, power supply, etc. of the electronic components are connected to the corresponding wiring conductors via solder or bonding wires, and if necessary, The electronic device is completed by sealing the component with resin or a cap.

その後、絶縁基体の下面の外周部に配列形成した複数の接続パッドを、それぞれ対応する外部電気回路基板の回路配線に半田等から成る導体バンプを介して接続することにより、電子装置が外部電気回路基板に実装される。   Thereafter, the electronic device is connected to the external electric circuit by connecting a plurality of connection pads arranged on the outer peripheral portion of the lower surface of the insulating base to the circuit wiring of the corresponding external electric circuit board via conductor bumps made of solder or the like. Mounted on the board.

ここで、上記従来の配線基板においては、絶縁基体と外部電気回路の基板との熱膨張係数の差に起因して熱応力が生じ、この熱応力により、導体バンプと接続パッドとの接合面や導体バンプ自体にクラック等の機械的な破壊を生じ易く、配線基板の外部接続の信頼性が低くなり易いという問題を有している。   Here, in the conventional wiring board, thermal stress is generated due to the difference in thermal expansion coefficient between the insulating base and the board of the external electric circuit, and this thermal stress causes the bonding surface between the conductor bump and the connection pad to There is a problem that mechanical breakage such as a crack is likely to occur in the conductor bump itself, and the reliability of external connection of the wiring board is likely to be lowered.

このような問題に対し、絶縁基体の下面のうち接続パッドが形成されていない部位に導電パッドを形成し、この導電パッドを外部電気回路基板に、接続パッドと外部電気回路基板の回路配線とを接続する導体バンプを形成する半田と同様の半田等を介して接合することにより電子部品収納用パッケージと外部電気回路基板との接合を補強し、上記のような熱応力による導体バンプ等の機械的な破壊を防止するという手法が知られている。   For such a problem, a conductive pad is formed in a portion of the lower surface of the insulating substrate where the connection pad is not formed, and this conductive pad is connected to the external electric circuit board, and the connection pad and the circuit wiring of the external electric circuit board are connected. The bonding between the electronic component storage package and the external electric circuit board is reinforced by bonding via the same solder as the solder for forming the conductive bump to be connected, and the mechanical bump such as the conductive bump due to the thermal stress as described above A technique for preventing the destruction is known.

絶縁基体の下面の接続パッドが形成されていない部位としては、その中央部が最も大きく、ここに大きな導電パッドを形成すると、電子部品収納用パッケージの外部電気回路基板に対する接合を効果的に補強し、導体バンプと接続パッドとの接合面や導体バンプ自体にクラック等の機械的な破壊が生じることを防止することができると考えられる。
特開2004−31934号公報 特開2001−332663号公報
The central part of the bottom surface of the insulating substrate where the connection pad is not formed is the largest. If a large conductive pad is formed here, the bonding of the electronic component storage package to the external electric circuit board is effectively reinforced. It is considered that mechanical damage such as cracks can be prevented from occurring on the joint surface between the conductor bump and the connection pad and the conductor bump itself.
JP 2004-31934 A JP 2001-332663 A

しかしながら、絶縁基体の下面の中央部に導電パッドを形成し、これを外部電気回路基板に接合した場合、電子部品収納用パッケージと外部電気回路基板との間の全体的な接合は効果的に補強されるので、接続パッドと導体バンプとの接合面や導体バンプ自体に機械的な破壊が生じることは、従来の配線基板の用途、用法等においては効果的に防止することができるものの、導電パッドの周縁部に沿って大きな熱応力が集中することから、導電パッドの周縁部分を起点として、導電パッドと絶縁基体との接合面や、導電パッドと半田等との接合面等に亀裂が生じ、長期間使用している間に導電パッドによる補強の効果が不十分になって、接続パッドと導体バンプとの接合面や、導体バンプ自体に機械的な破壊が生じやすくなるおそれがあり、外部電気回路基板に対する電気的、機械的な接続の長期信頼性が不十分なものとなる傾向があった。   However, when a conductive pad is formed at the center of the lower surface of the insulating substrate and bonded to the external electric circuit board, the overall bonding between the electronic component storage package and the external electric circuit board is effectively reinforced. Therefore, it is possible to effectively prevent the mechanical destruction of the joint surface between the connection pad and the conductor bump and the conductor bump itself in the use and usage of the conventional wiring board, but the conductive pad. Since a large thermal stress is concentrated along the peripheral edge of the conductive layer, cracks occur in the bonding surface between the conductive pad and the insulating base, the bonding surface between the conductive pad and solder, etc., starting from the peripheral portion of the conductive pad, During long-term use, the effect of reinforcement by the conductive pad becomes insufficient, and there is a possibility that mechanical damage is likely to occur on the joint surface between the connection pad and the conductor bump and the conductor bump itself, Electrical for parts the electric circuit board, tended to be as insufficient long-term reliability of the mechanical connection.

特に、近時の配線基板の小型化(1辺の長さが2mm程度以下)にともない、接続パッドの面積がさらに小さくなってきていること、導体バンプの材料として、従来の錫−鉛共晶半田に代わり、錫−銀系、錫−銀−銅系等のいわゆる鉛フリー半田が多用されるようになり、鉛フリー半田の半田付け温度が高く、また変形しにくいため熱応力等の応力を吸収する作用が低いので、導電パッドの接合部分に作用する熱応力がより大きくなってきていること、等から、導電パッドと半田等との接合面等に亀裂がより生じ易くなり、上記のような外部電気回路基板に対する電気的、機械的な接続の長期信頼性の低下が顕著なものとなってきている。   In particular, with the recent miniaturization of the wiring board (the length of one side is about 2 mm or less), the area of the connection pad is further reduced, and the conventional tin-lead eutectic is used as a material for the conductor bump. Instead of solder, so-called lead-free solders such as tin-silver and tin-silver-copper are used frequently, and the soldering temperature of lead-free solder is high and it is difficult to deform. Since the absorbing action is low, the thermal stress acting on the joint portion of the conductive pad is becoming larger, etc., and cracks are more likely to occur on the joint surface between the conductive pad and solder, etc. The deterioration of long-term reliability of electrical and mechanical connections to such external electric circuit boards has become remarkable.

また、導体バンプとして鉛フリー半田等を用いた場合、上述のように半田付け温度が高く熱応力もより大きくなることから、接続パッドと導体バンプとの接合面や、導体バンプ自体に機械的な破壊が生じることも確実に防止することは難しくなる。   In addition, when lead-free solder or the like is used as the conductor bump, the soldering temperature is high and the thermal stress is larger as described above. Therefore, the bonding surface between the connection pad and the conductor bump or the conductor bump itself is mechanically bonded. It becomes difficult to reliably prevent the occurrence of destruction.

本発明は、上記従来の問題に鑑み案出されたものであり、その目的は、接続パッドが小さくなったり、導体バンプが鉛フリー半田で形成されるようになったりしたとしても、接続パッドと導体バンプとの間の接合面や、導体バンプ自体等に機械的な破壊が生じることを長期にわたって有効に防止することが可能な、外部電気回路基板に対する機械的、電気的な接続の信頼性に優れる配線基板を提供することにある。   The present invention has been devised in view of the above-described conventional problems, and the purpose of the present invention is to provide a connection pad even if the connection pad becomes smaller or the conductor bump is formed of lead-free solder. For the reliability of mechanical and electrical connection to external electric circuit boards that can effectively prevent mechanical destruction on the joint surface between the conductor bumps and the conductor bumps themselves over a long period of time. The object is to provide an excellent wiring board.

本発明の配線基板は、複数の絶縁層が積層されて成る絶縁基体と、該絶縁基体の内部に形成された配線導体と、前記絶縁基体の下面の外周部に、前記絶縁基体の側面に形成された複数の切欠き部にそれぞれ延出するように配列形成されるとともに前記切欠き部で前記配線導体に電気的に接続されている複数の接続パッドと、前記絶縁基体の下面の中央部に形成された導電パッドと、前記絶縁基体の下面の前記導電パッドの周縁上に形成された非貫通の穴と、該非貫通の穴の内側面に形成された導体層とを具備していることを特徴とする。   The wiring board of the present invention is formed on the side surface of the insulating base on the outer peripheral portion of the lower surface of the insulating base, the insulating base formed by laminating a plurality of insulating layers, the wiring conductor formed inside the insulating base. A plurality of connection pads that are arranged to extend to the plurality of cutout portions and are electrically connected to the wiring conductor at the cutout portions, and a central portion of the lower surface of the insulating base. A conductive pad formed; a non-penetrating hole formed on a peripheral edge of the conductive pad on the lower surface of the insulating base; and a conductor layer formed on an inner surface of the non-penetrating hole. Features.

また、本発明の配線基板は好ましくは、前記穴は、横断面形状が円形状または楕円形状であり、同じ間隔で複数形成されていることを特徴とする。   The wiring board of the present invention is preferably characterized in that the hole has a circular or elliptical cross-sectional shape and is formed in plural at the same interval.

本発明の配線基板によれば、絶縁基体の下面の中央部に導電パッドを形成するとともに、絶縁基体の下面の導電パッドの周縁上に非貫通の穴を形成し、非貫通の穴の内側面に導体層を形成したことから、導電パッドの周縁部において、非貫通の穴の内側面の導体層表面に付着した半田によって穴内に半田溜りが形成されるため、導電パッドと外部電気回路基板の配線導体等との間の半田による接合を、穴内の半田溜りによって効果的に補強することができる。その結果、導電パッドと外部電気回路基板の配線導体等との間の接合、導電パッドと半田との間の接合を長期にわたって維持するとともに、配線基板と外部電気回路基板との接続を補強することができる。従って、接続パッドと導体バンプとの間の接合面や、導体バンプ自体等に機械的な破壊が生じることを長期にわたって確実に防止することが可能であり、外部電気回路基板に対する機械的、電気的な接続の信頼性に優れる配線基板を提供することができる。   According to the wiring board of the present invention, the conductive pad is formed at the center of the lower surface of the insulating base, and the non-penetrating hole is formed on the periphery of the conductive pad on the lower surface of the insulating base. Since the conductive layer is formed on the peripheral edge of the conductive pad, a solder pool is formed in the hole by the solder attached to the surface of the conductive layer on the inner surface of the non-through hole. The solder joint between the wiring conductor and the like can be effectively reinforced by the solder pool in the hole. As a result, the bonding between the conductive pad and the wiring conductor of the external electric circuit board, the bonding between the conductive pad and the solder can be maintained for a long time, and the connection between the wiring board and the external electric circuit board can be reinforced. Can do. Therefore, it is possible to reliably prevent mechanical damage on the joint surface between the connection pad and the conductor bump, the conductor bump itself, etc. over a long period of time. A wiring board having excellent connection reliability can be provided.

また、本発明の配線基板は好ましくは、穴は、横断面形状が円形状または楕円形状であり、同じ間隔で複数形成されていることから、穴の一部に熱応力が集中することはなく、また導電パッドの全周にわたってより均一な強度で補強することができる。   In the wiring board of the present invention, the hole preferably has a circular or elliptical cross-sectional shape, and a plurality of holes are formed at the same interval, so that thermal stress does not concentrate on a part of the hole. Further, it can be reinforced with more uniform strength over the entire circumference of the conductive pad.

次に、本発明の配線基板を添付の図面に基づき詳細に説明する。   Next, the wiring board of the present invention will be described in detail with reference to the accompanying drawings.

図1(a)は本発明の配線基板の実施の形態の一例を示す断面図であり、(b)はその平面図である。図1(a),(b)において、1は複数の絶縁層が積層されて成る絶縁基体、2は配線導体、3は接続パッド、4は導電パッド、5は非貫通の穴、6は非貫通の穴5の内側面に形成された導体層である。   FIG. 1A is a cross-sectional view showing an example of an embodiment of a wiring board according to the present invention, and FIG. 1B is a plan view thereof. 1 (a) and 1 (b), 1 is an insulating substrate formed by laminating a plurality of insulating layers, 2 is a wiring conductor, 3 is a connection pad, 4 is a conductive pad, 5 is a non-through hole, and 6 is a non-through hole. It is a conductor layer formed on the inner surface of the through hole 5.

これら絶縁基体1、配線導体2、接続パッド3、導電パッド4、穴5および導体層6により、主に本発明の配線基板9が構成される。   The insulating substrate 1, the wiring conductor 2, the connection pad 3, the conductive pad 4, the hole 5 and the conductor layer 6 mainly constitute the wiring substrate 9 of the present invention.

絶縁基体1は、ガラスセラミック焼結体,酸化アルミニウム質焼結体,窒化アルミニウム質焼結体,ムライト質焼結体,窒化珪素質焼結体,炭化珪素質焼結体等の電気絶縁材料から成る。   The insulating substrate 1 is made of an electrically insulating material such as a glass ceramic sintered body, an aluminum oxide sintered body, an aluminum nitride sintered body, a mullite sintered body, a silicon nitride sintered body, or a silicon carbide sintered body. Become.

絶縁基体1は、例えばガラスセラミック焼結体から成る場合であれば、酸化珪素,酸化アルミニウム等のガラスセラミック原料粉末に適当な有機バインダ,溶剤を添加混合して泥漿状となすとともに、これをドクターブレード法を採用してシート状となすことにより複数枚のセラミックグリーンシートを得て、しかる後、セラミックグリーンシートを切断加工や打ち抜き加工により適当な形状とするとともにこれを複数枚積層し、最後にこの積層されたセラミックグリーンシートを還元雰囲気中、約1000℃の温度で焼成することによって製作される。   If the insulating substrate 1 is made of, for example, a glass ceramic sintered body, an appropriate organic binder and solvent are added to and mixed with a glass ceramic raw material powder such as silicon oxide and aluminum oxide to form a slurry, which is then treated as a doctor. A plurality of ceramic green sheets are obtained by adopting a blade method to form a sheet. After that, the ceramic green sheets are formed into an appropriate shape by cutting or punching, and a plurality of them are laminated. This laminated ceramic green sheet is manufactured by firing at a temperature of about 1000 ° C. in a reducing atmosphere.

絶縁基体1は、IC,LSI等の半導体集積回路素子、LD(半導体レーザ),LED(発光ダイオード),PD(フォトダイオード),CCD,ラインセンサ,イメージセンサ等の光半導体素子、圧電振動子,水晶振動子等の振動子、その他の種々の電子部品(図示せず)を搭載し支持するための基体として機能し、その主面(後述する接続パッド3が形成されている主面と対向する主面等)に電子部品(図示せず)が搭載される。   The insulating substrate 1 is a semiconductor integrated circuit element such as an IC or LSI, an LD (semiconductor laser), an LED (light emitting diode), a PD (photodiode), a CCD, a line sensor, an optical semiconductor element such as an image sensor, a piezoelectric vibrator, It functions as a base for mounting and supporting a vibrator such as a quartz vibrator and other various electronic components (not shown), and faces its main surface (a main surface on which connection pads 3 described later are formed). Electronic components (not shown) are mounted on the main surface or the like.

なお、図1の例では、絶縁基体1は電子部品を収納し搭載するための凹部を上面に形成した形状であるが、平板状のものでもよい。   In the example of FIG. 1, the insulating base 1 has a shape in which a concave portion for housing and mounting an electronic component is formed on the upper surface, but may be a flat plate shape.

絶縁基体1の内部には、配線導体2が形成されており、この配線導体2は、その一部が絶縁基体1のうち電子部品が搭載される部位(以下、搭載部ともいう)に露出し、他の一部が絶縁基体1の側面に導出されている。   A wiring conductor 2 is formed inside the insulating base 1, and a part of the wiring conductor 2 is exposed to a portion (hereinafter also referred to as a mounting portion) on the insulating base 1 where an electronic component is mounted. The other part is led out to the side surface of the insulating substrate 1.

また、絶縁基体1の下面の外周部には、絶縁基体1の側面に形成された複数の切欠き部にそれぞれ延出するように配列形成されるとともに切欠き部で配線導体2に電気的に接続されている複数の接続パッド3が形成されている。   In addition, the outer peripheral portion of the lower surface of the insulating substrate 1 is arranged and formed so as to extend to a plurality of cutout portions formed on the side surface of the insulating substrate 1 and is electrically connected to the wiring conductor 2 at the cutout portions. A plurality of connected pads 3 are formed.

配線導体2および接続パッド3は、搭載部に搭載される電子部品を外部電気回路に接続するための導電路として機能する。配線導体2のうち、搭載部に露出した部位に電子部品の電極をボンディングワイヤや半田等を介して電気的に接続し、接続パッド3を外部電気回路(図示せず)に半田等から成る導体バンプ(図示せず)を介して接続することにより、電子部品の電極が外部電気回路と電気的に接続される。   The wiring conductor 2 and the connection pad 3 function as a conductive path for connecting an electronic component mounted on the mounting portion to an external electric circuit. Of the wiring conductor 2, an electrode of an electronic component is electrically connected to a portion exposed to the mounting portion via a bonding wire, solder, or the like, and the connection pad 3 is a conductor made of solder or the like to an external electric circuit (not shown). By connecting via a bump (not shown), the electrode of the electronic component is electrically connected to an external electric circuit.

なお、絶縁基体1の側面の切欠き部1aは、接続パッド3を絶縁基体1の側面に延出させて面積を大きくするとともに導体バンプのメニスカスを大きく形成し、接続パッド3と導体バンプとの接合をより強くする機能をなす。   In addition, the notch 1a on the side surface of the insulating substrate 1 extends the connection pad 3 to the side surface of the insulating substrate 1 to increase the area and form a large meniscus of the conductor bump. It functions to make bonding stronger.

配線導体2および接続パッド3は、銅や銀,パラジウム,金,タングステン,モリブデン,マンガン等の金属材料からなり、例えば銅から成る場合であれば、銅の粉末を有機溶剤、バインダとともに混練して作製した金属ペーストを、絶縁基体1となるセラミックグリーンシートに印刷しておくこと等により形成される。   The wiring conductor 2 and the connection pad 3 are made of a metal material such as copper, silver, palladium, gold, tungsten, molybdenum, or manganese. For example, when made of copper, copper powder is kneaded with an organic solvent and a binder. It is formed by printing the produced metal paste on a ceramic green sheet to be the insulating substrate 1.

また、絶縁基体1の側面の切欠き部1aは、絶縁基体1と成るセラミックグリーンシートの側面に溝状の切欠きを、金型を用いた打抜き加工等の加工を施すことにより形成される。この場合、このような配線基板9となる領域が広面積の母基板の主面に縦横に配列された多数個取りの形態(図示せず)で作製し、各配線基板9となる領域の境界にまたがるようにして貫通孔(図示せず)を形成しておき、その後、配線基板9となる領域の境界に沿って母基板を分割することによっても、側面に切欠き部1aを有する配線基板9を形成することができる。貫通孔が分割溝に沿って縦に2分割され、それぞれの配線基板9の側面の切欠き部1aとなる。この方法によれば、切欠き部1aを有する配線基板9を、多数個一括して形成できるので、配線基板9の生産性を良好に確保することができる。   Further, the notch 1a on the side surface of the insulating substrate 1 is formed by subjecting the side surface of the ceramic green sheet to be the insulating substrate 1 to a groove-shaped notch, such as punching using a mold. In this case, the region to be the wiring substrate 9 is manufactured in a multi-cavity form (not shown) in which the region to be the wiring substrate 9 is arranged vertically and horizontally on the main surface of the large-area mother substrate. A wiring board having a notch 1a on the side surface is also formed by forming a through hole (not shown) so as to straddle the substrate and then dividing the mother board along the boundary of the region to be the wiring board 9 9 can be formed. The through hole is vertically divided into two along the dividing groove, and becomes a notch portion 1 a on the side surface of each wiring board 9. According to this method, a large number of wiring boards 9 having notches 1a can be formed in a lump, so that the productivity of the wiring board 9 can be ensured satisfactorily.

そして、絶縁基体1の上面に電子部品を搭載するとともに、電子部品の電極を配線導体2の露出部分に半田やボンディングワイヤ等の導電性接続材を介して電気的に接続し、必要に応じて電子部品を蓋体や封止用樹脂で封止することにより電子装置として完成する。   And while mounting an electronic component on the upper surface of the insulation base | substrate 1, the electrode of an electronic component is electrically connected to the exposed part of the wiring conductor 2 via conductive connection materials, such as a solder and a bonding wire, and as needed An electronic device is completed by sealing the electronic component with a lid or a sealing resin.

この電子装置について、接続パッド3を外部の電気回路基板の回路配線に半田等から成る導体バンプを介して電気的,機械的に接続することにより、電子部品の電極が配線導体2,接続パッド3および導体バンプを介して外部の電気回路と電気的に接続される。   In this electronic device, the connection pad 3 is electrically and mechanically connected to the circuit wiring of the external electric circuit board via a conductor bump made of solder or the like, so that the electrode of the electronic component is connected to the wiring conductor 2 and the connection pad 3. And electrically connected to an external electric circuit through the conductor bump.

本発明の配線基板9においては、絶縁基体1の下面の中央部に導電パッド4が形成されている。   In the wiring substrate 9 of the present invention, the conductive pad 4 is formed at the center of the lower surface of the insulating substrate 1.

この導電パッドは4、配線基板9(電子装置)の接続パッド3を外部電気回路基板の回路配線に電気的、機械的に接続するときに、その接続を補強する機能をなす。つまり、導電パッド4を、外部電気回路基板に予め設けておいたダミーの接続用導体等に半田等を介して接合することにより、配線基板9と外部電気回路基板との接合が補強される。接続パッド3と導体バンプとの接合面や導体バンプ自体にクラック等の機械的な破壊が生じることは効果的に防止され、接続パッド3と回路配線との電気的、機械的な接続を長期にわたって維持することができる。   This conductive pad 4 functions to reinforce the connection when the connection pad 3 of the wiring board 9 (electronic device) is electrically and mechanically connected to the circuit wiring of the external electric circuit board. That is, the bonding between the wiring board 9 and the external electric circuit board is reinforced by bonding the conductive pads 4 to a dummy connection conductor or the like provided in advance on the external electric circuit board via solder or the like. Mechanical damage such as cracks is effectively prevented from occurring on the joint surface between the connection pad 3 and the conductor bump and the conductor bump itself, and the electrical and mechanical connection between the connection pad 3 and the circuit wiring can be maintained for a long time. Can be maintained.

また、導電パッド4は、その周縁上に非貫通の穴5が形成され、非貫通の穴5の内側面に導体層6が形成されている。   The conductive pad 4 has a non-penetrating hole 5 formed on the periphery thereof, and a conductor layer 6 is formed on the inner surface of the non-penetrating hole 5.

本発明の配線基板9によれば、上記の構成により、導電パッド4の周縁部において、非貫通の穴5の内側面の導体層6表面に付着した半田によって穴5内に半田溜りが形成されるため、導電パッド4と外部電気回路基板の配線導体等との間の半田による接合を、穴5内の半田溜りによって効果的に補強することができる。その結果、導電パッド4と外部電気回路基板の配線導体等との間の接合、導電パッド4と半田との間の接合を、長期にわたって維持するとともに、配線基板9と外部電気回路基板との接続を補強することができる。従って、接続パッド4と導体バンプとの間の接合面や、導体バンプ自体等に機械的な破壊が生じることを長期にわたって確実に防止することが可能であり、外部電気回路基板に対する機械的、電気的な接続の信頼性に優れる配線基板9を提供することができる。   According to the wiring substrate 9 of the present invention, a solder pool is formed in the hole 5 by the solder adhering to the surface of the conductor layer 6 on the inner side surface of the non-through hole 5 at the peripheral portion of the conductive pad 4 by the above configuration. Therefore, the solder joint between the conductive pad 4 and the wiring conductor of the external electric circuit board can be effectively reinforced by the solder pool in the hole 5. As a result, the bonding between the conductive pad 4 and the wiring conductor of the external electric circuit board, the bonding between the conductive pad 4 and the solder is maintained for a long time, and the connection between the wiring board 9 and the external electric circuit board is maintained. Can be reinforced. Accordingly, it is possible to reliably prevent mechanical damage on the joint surface between the connection pad 4 and the conductor bump, the conductor bump itself, and the like over a long period of time. It is possible to provide the wiring board 9 having excellent connection reliability.

このような穴5は、例えば、絶縁層のうち最下層のもの、または最下層から上方向に複数の層にわたって、導電パッド4の周縁上に貫通孔を打ち抜き形成しておき、貫通孔を形成した絶縁層と貫通孔を形成していない絶縁層とを積層すること等により形成される。   For example, the hole 5 is formed by punching a through hole on the periphery of the conductive pad 4 from the lowermost layer of the insulating layer, or from the lowermost layer to a plurality of layers upward from the lower layer. The insulating layer is laminated with an insulating layer in which no through hole is formed.

また、導電パッド4および導体層6は、配線導体2や接続パッド3と同様の金属材料を用いて形成することができ、例えば、銅から成る場合であれば、銅の粉末を有機溶剤、バインダとともに混練して作製した金属ペーストを、絶縁基体1となるセラミックグリーンシートうち最下面となる部位の中央部や、上述の非貫通の穴5の内側面に印刷しておくこと等により形成される。   In addition, the conductive pad 4 and the conductive layer 6 can be formed using the same metal material as that of the wiring conductor 2 and the connection pad 3. For example, if the conductive pad 4 and the conductive layer 6 are made of copper, copper powder is used as an organic solvent, binder. The metal paste prepared by kneading together is formed by printing on the central part of the lowermost part of the ceramic green sheet to be the insulating substrate 1 or the inner surface of the non-through hole 5 described above. .

また、本発明の配線基板9は、穴5は、横断面形状が円形状または楕円形状であり、同じ間隔で複数形成されていることが好ましい。これにより、穴5の一部に熱応力が集中することはなく、同時に、導電パッド4の全周にわたってより均一な強度で補強することができる。また、長期にわたって、導電パッド4と絶縁基体1との間や、導電パッド4と半田との間等の接合をより確実に維持し、配線基板1と外部電気回路基板との接続をより効果的に補強することができる。また、導電パッド4と外部電気回路基板の配線導体等との間の接合、導電パッド4と半田との間の接合を長期にわたって維持するとともに、配線基板9と外部電気回路基板との接続を補強することができる。従って、接続パッド3と導体バンプとの間の接合面や、導体バンプ自体等に機械的な破壊が生じることを長期にわたってより確実に防止することが可能な、外部電気回路基板に対する機械的、電気的な接続の信頼性に極めて優れる配線基板を提供することができる。   In the wiring board 9 of the present invention, it is preferable that the hole 5 has a circular or elliptical cross-sectional shape, and a plurality of holes 5 are formed at the same interval. Thereby, thermal stress does not concentrate on a part of the hole 5, and at the same time, it can be reinforced with more uniform strength over the entire circumference of the conductive pad 4. In addition, the bonding between the conductive pad 4 and the insulating base 1 or between the conductive pad 4 and the solder is more reliably maintained over a long period of time, and the connection between the wiring board 1 and the external electric circuit board is more effective. Can be reinforced. Further, the bonding between the conductive pad 4 and the wiring conductor of the external electric circuit board, the bonding between the conductive pad 4 and the solder is maintained for a long time, and the connection between the wiring board 9 and the external electric circuit board is reinforced. can do. Therefore, the mechanical and electrical connection to the external electric circuit board can be more reliably prevented over a long period of time from causing mechanical damage to the joint surface between the connection pad 3 and the conductor bump, the conductor bump itself, or the like. It is possible to provide a wiring board that is extremely excellent in reliability of general connection.

例えば、導電パッド4が四角形状の場合、図1(b)に一例を示したように、その各辺に、複数個ずつ、同じ隣接間隔で形成しても良いし、四角形状の角部に形成しても良い。   For example, when the conductive pad 4 has a quadrangular shape, as shown in an example in FIG. 1B, a plurality of conductive pads 4 may be formed at the same interval on each side, or at the corners of the quadrangular shape. It may be formed.

また、非貫通の穴5は、その深さを0.2mm以上としておくことが好ましい。0.2mm未満では、導電パッド4に対する半田等の接合を補強する効果が不十分になるおそれがあり、接続パッド3と回路配線との間の電気的、機械的な接続を長期にわたって効果的に補強することが難しくなる傾向がある。   The depth of the non-through hole 5 is preferably set to 0.2 mm or more. If the thickness is less than 0.2 mm, the effect of reinforcing the bonding of solder or the like to the conductive pad 4 may be insufficient, and the electrical and mechanical connection between the connection pad 3 and the circuit wiring can be effectively performed over a long period of time. It tends to be difficult to reinforce.

また、穴5の内側面の導体層6は、その下端部が導電パッド4の周縁部と接するようにしておくことが好ましい。両者の間が離れていると、導電パッド4に接合される半田等が導体層6の表面にまで接合させることが難しくなり、配線基板9の接続を効果的に補強することが難しくなる傾向がある。   Further, the conductor layer 6 on the inner surface of the hole 5 is preferably arranged so that the lower end thereof is in contact with the peripheral edge of the conductive pad 4. If they are separated from each other, it becomes difficult for solder or the like bonded to the conductive pad 4 to be bonded to the surface of the conductor layer 6, and it becomes difficult to effectively reinforce the connection of the wiring board 9. is there.

なお、導体層6は、穴5のうち、導電パッド4に接した部位だけでなく、内側面の全面に形成してもよい。また、穴5の底面にも形成してもよい。   The conductor layer 6 may be formed not only on the portion of the hole 5 in contact with the conductive pad 4 but also on the entire inner surface. Further, it may be formed on the bottom surface of the hole 5.

また、導電パッド4および導体層6は、厚みが10μm未満では半田等の接合の強度が不十分となる傾向があり、35μmを超えると、内部応力により絶縁層に対する接合の強度が劣化する傾向がある。したがって、導電パッド4および導体層6は、厚みを10〜35μmとすることが好ましい。   Further, when the thickness of the conductive pad 4 and the conductive layer 6 is less than 10 μm, the bonding strength such as solder tends to be insufficient, and when the thickness exceeds 35 μm, the bonding strength to the insulating layer tends to deteriorate due to internal stress. is there. Therefore, the conductive pad 4 and the conductor layer 6 are preferably 10 to 35 μm in thickness.

なお、本発明は上述の実施の形態例に限定されるものではなく、本発明の要旨を逸脱しない範囲で種々の変更は可能である。   Note that the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the gist of the present invention.

(a)は本発明の配線基板の実施の形態の一例を示す断面図、(b)は(a)の平面図である。(A) is sectional drawing which shows an example of embodiment of the wiring board of this invention, (b) is a top view of (a).

符号の説明Explanation of symbols

1・・・絶縁基体
1a・・・切欠き部
2・・・配線導体
3・・・接続パッド
4・・・導電パッド
5・・・非貫通の穴
6・・・導体層
9・・・配線基板
DESCRIPTION OF SYMBOLS 1 ... Insulation base | substrate 1a ... Notch part 2 ... Wiring conductor 3 ... Connection pad 4 ... Conductive pad 5 ... Non-through-hole 6 ... Conductor layer 9 ... Wiring substrate

Claims (2)

複数の絶縁層が積層されて成る絶縁基体と、該絶縁基体の内部に形成された配線導体と、前記絶縁基体の下面の外周部に、前記絶縁基体の側面に形成された複数の切欠き部にそれぞれ延出するように配列形成されるとともに前記切欠き部で前記配線導体に電気的に接続されている複数の接続パッドと、前記絶縁基体の下面の中央部に形成された導電パッドと、前記絶縁基体の下面の前記導電パッドの周縁上に形成された非貫通の穴と、該非貫通の穴の内側面に形成された導体層とを具備していることを特徴とする配線基板。 An insulating base formed by laminating a plurality of insulating layers, a wiring conductor formed inside the insulating base, and a plurality of notches formed on a side surface of the insulating base on the outer periphery of the lower surface of the insulating base And a plurality of connection pads electrically connected to the wiring conductor at the notch, and a conductive pad formed at the center of the lower surface of the insulating base, A wiring board comprising: a non-penetrating hole formed on a peripheral edge of the conductive pad on a lower surface of the insulating base; and a conductor layer formed on an inner surface of the non-penetrating hole. 前記穴は、横断面形状が円形状または楕円形状であり、同じ間隔で複数形成されていることを特徴とする請求項1記載の配線基板。 The wiring board according to claim 1, wherein a plurality of the holes have a circular cross section or an elliptical cross section and are formed at the same interval.
JP2004089426A 2004-03-25 2004-03-25 Wiring board Expired - Fee Related JP4377729B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022016297A (en) * 2020-07-10 2022-01-21 日亜化学工業株式会社 Semiconductor device and manufacturing method for semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022016297A (en) * 2020-07-10 2022-01-21 日亜化学工業株式会社 Semiconductor device and manufacturing method for semiconductor device
JP7223234B2 (en) 2020-07-10 2023-02-16 日亜化学工業株式会社 Semiconductor device and method for manufacturing semiconductor device

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