JP2005268546A - Cabinet unit housing rack - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cabinet unit housing rack which is capable of cooling a plurality of cabinet units efficiently and is suitable for use under environment where dust poses a problem. <P>SOLUTION: A cabinet unit housing rack 1 can house a plurality of housing units 2 in a vertical direction. The cabinet unit housing rack 1 is structured such that the cabinet unit can be housed inside the rack. Housing chambers 9 with a heat dissipation mouth 8a open and air conducting chambers 10 in communication with the housing chambers via the heat dissipation mouth are arranged in tiers in the vertical direction, respectively. The air conducting chambers are in communication with one another in the vertical direction. At the outlet head of the top tier, a blower fan is provided. At the air conducting chamber of the bottom tier, an exhaust air duct connecting port equipped with an exhaust air fan is formed. In the air conducting chambers, an air rectification plate 15 for guiding warm exhaust air from the heat dissipation mouth and exhaust air from an inlet head to the outlet head or the exhaust air duct connecting port is arranged such that, in the air conducting chambers, the proportion of the area of the passage of the warm exhaust air from the heat dissipation mouth to the area of the passage of the exhaust air from the inlet head in the outlet head and the like becomes smaller from the top tier side to the bottom tier side in sequence, and the amounts of exhaust air in the housing chambers are identical in abbreviation. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a housing unit housing rack used in, for example, a semiconductor factory, and more particularly to a housing unit housing rack that can efficiently cool a plurality of housing units housed therein.

Conventionally, various methods have been proposed in which housing units containing electronic devices are housed in a rack or the like and are arranged in parallel in the vertical direction to efficiently cool the electronic devices disposed in each housing unit. For example, Patent Document 1 discloses a configuration in which a plurality of housing units are tilted obliquely and arranged side by side in the vertical direction so that heat from an electronic device disposed in each housing unit is released upward.
Japanese Patent Laid-Open No. 6-69675 FIG.

  However, in an environment where dust becomes a problem, such as in a semiconductor factory, the configuration in which the heat dissipation of the housing unit is released upward as in Patent Document 1 is not preferable because the dust is rolled up. Therefore, in a storage rack used in the above environment (for example, a rack that stores an amplifier unit of a stage driving motor of a semiconductor exposure apparatus), the air flow is concentrated downward and exhausted outside the factory by an exhaust duct. Configuration is desirable.

In the above storage rack, it is necessary to design the air from a plurality of amplifier units to be uniformly guided to the exhaust duct so as not to generate heat retention and warm air backflow as much as possible inside the rack. .
The present invention has been made to eliminate the disadvantages of the prior art described above, and an object of the present invention is to efficiently cool a plurality of housing units housed therein, and in particular, a housing suitable for use in an environment where dust is a problem. It is to provide a body unit storage rack.

The invention of claim 1 is a housing unit storage rack capable of storing a plurality of housing units with built-in electronic equipment and having a heat dissipating fan on the back side in the vertical direction,
A storage chamber having a front side opened to the outside so that the housing unit can be stored therein, and a heat dissipation opening opened at a position corresponding to the heat dissipation fan when the housing unit is stored, and a rear surface of the storage chamber The air guide chambers arranged on the side and communicated with the storage chamber by the heat radiating openings are respectively arranged in a step shape in the vertical direction, and the air guide chamber is an inflow port for introducing the air of the air guide chamber on the upper stage side or A ventilator that blows air to the lower stage is installed at the uppermost outlet, and a blower fan that blows air to the lower stage is installed at the uppermost outlet. The exhaust duct connection port with the exhaust fan that discharges the outside to the rack is formed,
Inside the air guide chamber, there are arranged air conditioning plates for guiding the exhaust air from the heat radiation port and the exhaust air from the inflow port to the outflow port or the exhaust duct connection port, respectively. Is set so that the ratio of the passage area of the exhaust air from the heat radiating port to the passage area of the exhaust air from the inflow port at the outlet or the exhaust duct connection port decreases sequentially from the upper stage side to the lower stage side. It is characterized by being.

  The invention of claim 2 is characterized in that, in the invention of claim 1, an auxiliary fan for blowing air toward the exhaust duct connection port is installed at the outlet.

  In the present invention, by the arrangement of the air conditioning plate, the warm exhaust air from all the housing units is sucked into the exhaust duct connection port in a state of being nearly equal, and the casing units arranged in parallel vertically can be efficiently cooled. Moreover, in the present invention, the air conditioning plate significantly reduces the possibility that the warm exhaust air from the upper air guide chamber will flow back to the lower storage chamber and the possibility that the warm exhaust air from the storage chamber will flow back to the upper air guide chamber. To do. Furthermore, in the present invention, since the warm exhaust air in the rack is exhausted from the exhaust duct connection port at the lowermost stage, the air flow in the rack is difficult to wind up dust.

Hereinafter, the housing unit storage rack in the embodiment of the present invention will be described in detail with reference to the drawings (corresponding to the housing unit storage racks of claims 1 and 2).
(Configuration of housing unit storage rack)
The housing unit storage rack 1 of this embodiment is used to store a plurality of amplifier units (housing units) 2 of a stage driving motor of a semiconductor exposure apparatus in a semiconductor factory, for example.

  Here, the amplifier unit 2 includes an amplifier (electronic device) 3 having a motor drive circuit and a rectangular parallelepiped housing 4 in which the amplifier 3 is built. A front surface of the housing 4 is formed with a vent 5 for taking outside air into the housing 4 and a handle 6 for facilitating handling. A heat radiating fan 7 for releasing heat generated by the amplifier 3 to the outside is attached to the back surface of the housing 4.

  The housing unit storage rack 1 is configured by attaching side plates 1c to both side surfaces of a top plate 1a and a bottom plate 1b arranged in parallel and closing the back side with a back plate 1d, and the front side is open to the outside. . Between the top plate 1a and the bottom plate 1b, three shelf plates 1e, both ends of which are supported by the side plates 1c, are arranged, and the inside of the housing unit storage rack is partitioned into four stages in the vertical direction by the shelf plates 1e. Yes. Inside the housing unit storage rack 1, partition plates 8 that stand vertically to the shelf plate 1 e and extend in the rack width direction are arranged at the same position for each stage.

Each space on the front side of the rack divided by the partition plate 8 constitutes a storage chamber 9. A part of the space on the rear side of the rack divided by the partition plate 8 constitutes the air guide chamber 10, and the other space constitutes a cable box (not shown). A heat radiation port 8a is opened in the partition plate 8, and the storage chamber 9 and the air guide chamber 10 communicate with each other through the heat radiation port 8a.
In the present embodiment, the storage chamber 9 and the first guide chamber 9a and the first wind guide chamber 10a at the top of the rack to the fourth store chamber 9d and the fourth wind guide chamber 10d at the bottom of the rack are vertically arranged. Four wind chambers 10 are arranged side by side.

  The size of each storage chamber 9 is set slightly larger than the size of the amplifier unit 2. The front side of each storage chamber 9 is open and communicates with the outside, and the amplifier unit 2 can be stored in the storage chamber 9. Note that the position and size of the heat radiation port 8 a of the partition plate 8 in each storage chamber 9 correspond to the position and size of the heat radiation fan 7 when the amplifier unit 2 is stored.

  Openings 11 of the same size are provided at the same position in the shelf plate 1e of each of the air guide chambers 10, and the air guide chambers 10 adjacent to each other in the vertical direction communicate with each other, and the air in the first air guide chamber 10a flows. It reaches the fourth air guide chamber 10d. In each air guide chamber 10, the opening on the upper surface serves as an inflow port through which air from the upper air guide chamber 10 flows in, and the opening on the lower surface serves as an outlet from which air flows into the air guide chamber 10 on the lower stage side.

A blower fan 12 for blowing air to the lower side is installed at the outlet of the first air guide chamber 10a. Further, an exhaust duct connection port 13 is formed on the back side of the fourth air guide chamber 10d. An exhaust fan 14 for exhausting air to the outside of the rack is attached to the inner side surface of the exhaust duct connection port 13.
Inside each of the air guide chambers 10, an air conditioning plate 15 formed in accordance with the width of the air guide chamber 10 is disposed. One end of each air conditioning plate 15 is attached to the upper side of the heat radiating port 8a, and the other end protrudes to the back side of the rack to the position of the outlet (exhaust duct connecting port 13 in the lowermost stage). That is, one end side of the air conditioning plate 15 covers the heat radiation port 8a, and the other end side partitions the inlet to the outflow port (or the exhaust duct connection port 13) into two regions.

  Exhaust air from the inflow port passes through one region of the outlet (or exhaust duct connection port 13) partitioned by the other end of the air conditioning plate 15, and exhaust air from the heat radiation port 8a passes through the other region. pass. Therefore, the warm exhaust air in the storage chamber 9 flowing in from the heat radiating port 8 a is guided to the outlet (or the exhaust duct connection port 13) by the air conditioning plate 15, and hardly flows to the inlet side communicating with the upper air guide chamber 10. ing. On the other hand, the warm exhaust air in the upper air guide chamber 10 flowing in from the inflow port is guided to the outflow port (or the exhaust duct connection port 13) by the air conditioning plate 15, and is difficult to flow to the heat radiation port 8a side.

Further, in the outlet or the like, the ratio of the area of the other region (flow passage area of the heat radiation port 8a) to the area of one region (flow passage area of the inlet port) partitioned by the air conditioning plate 15 is the upper side. Is set so as to decrease sequentially from the lower side to the lower side.
For example, in the example of FIG. 2, in the first air guide chamber 10a, the other end of the air conditioning plate 15 is positioned on the back side of the outlet, and the warm exhaust air from the heat radiation port 8a can pass through the entire area of the outlet. In the second air guide chamber 10b, the other end of the air conditioning plate 15 is positioned at the approximate center of the outlet, and the ratio of the area of one region to the area of the other region is set to 1: 1. In the third air guide chamber 10c, the other end of the air guide plate 15 is disposed closer to the rack front side than the second air guide chamber 10b, and the ratio of the area of one region to the area of the other region is 2: 1. Set to Further, in the fourth air guide chamber 10d, the other end of the air conditioning plate 15 is disposed in front of the exhaust duct connection port 13, and the ratio of the area of one region to the area of the other region is set to 3: 1. .

(Operation and effect of the housing unit storage rack)
The housing unit storage rack 1 of the present embodiment is configured as described above, and the operation and effect in the state where the amplifier unit 2 is stored in the fourth storage chamber 9d from the first storage chamber 9a will be described below.
The amplifier unit 2 in each storage chamber 9 rotates with the heat dissipation fan 7 as the power is turned on, and an air flow is generated from the vent hole 5 toward the heat dissipation fan 7 inside each amplifier unit 2. The air that flows into the inside of the housing 4 from the vent hole 5 takes the heat of the amplifier 3 and is released to the outside of the housing 4 by the heat radiating fan 7. And the warm exhaust air of the heat radiating fan 7 flows into each air guide chamber 10 from the heat radiating port 8 a of each storage chamber 9.

Inside the housing unit storage rack 1, the air blowing fan 12 of the first air guiding chamber 10a and the exhaust fan 14 of the exhaust duct connection port 13 are directed from the first air guiding chamber 10a toward the fourth air guiding chamber 10d. A downward air flow is generated. Therefore, the air flow in the rack is difficult to wind up dust.
The warm exhaust air from the heat radiating port 8a that has flowed into the first air guide chamber 10a is guided by the air conditioning plate 15 and guided to the outlet on the lower surface, and is sent out by the blower fan 12 to the inlet of the second air guide chamber 10b.

In the second air guiding chamber 10b and the third air guiding chamber 10c, the exhaust air from the upper inflow port is guided to one area of the lower outflow port by the air conditioning plate 15, and the warm exhaust air from the heat radiation port 8a is adjusted. It is led to the other area of the outlet on the lower surface by the plate 15 and flows into the lower air guide chamber.
Further, in the fourth air guide chamber 10 d, the exhaust air from the inlet on the upper surface is guided to one area of the exhaust duct connection port 13 by the air conditioning plate 15, and the warm exhaust air from the heat radiation port 8 a is exhausted by the air conditioning plate 15. It is led to the other region of the duct connection port 13 and is discharged out of the factory from the exhaust duct 16 connected to the exhaust duct connection port 13.

Therefore, the air conditioning plate 15 guides the warm exhaust from the heat radiating port 8a and the exhaust from the inlet to the outlet, etc., so that the exhaust from the upper air guide chamber 10 flows into the lower storage chamber 9. The risk of backflow and the risk of warm exhaust air from the storage chamber 9 flowing back to the upper air guide chamber 10 are significantly reduced.
Further, since the ratio of the area of the other region to the area of one region such as the inflow port is sequentially set to be smaller from the upper stage side to the lower stage side, as the distance from the exhaust duct connection port 13 increases, the storage chamber 9 It is set so that the warm exhaust air is easily sucked. Therefore, the warm exhaust air from all the amplifier units 2 is sucked into the exhaust duct connection port 13 in a state of being nearly equal, and the amplifier units 2 arranged in parallel vertically can be efficiently cooled. That is, the possibility of heat accumulation in the upper storage chamber 9 and the air guide chamber 10 away from the exhaust duct connection port 13 is significantly reduced.

(Supplementary items of the embodiment)
As mentioned above, although this invention has been demonstrated by said embodiment, the technical scope of this invention is not limited to the said embodiment. For example, the housing unit storage rack of the present invention is not limited to a motor amplifier of a semiconductor exposure apparatus, but can store other electronic devices (such as a personal computer main body) used in a semiconductor factory or a clean room. Can also be used.

Moreover, although the said embodiment demonstrated the example in which the storage chamber 9 and the baffle chamber 10 were formed in four steps in the up-down direction, the number of steps of a storage rack is not limited to the said embodiment. Furthermore, the ratio of the area of one region to the area of the other region in the above embodiment is merely an example, and may be appropriately changed depending on the design.
In the above embodiment, an auxiliary fan may be provided at the opening (outlet) as necessary. Furthermore, in order to prevent warm air from flowing backward from the gap between the housing and the storage chamber to the front side of the storage chamber, the discharge port of the heat dissipation fan and the heat dissipation port of the rack are connected by a hood formed in a cylindrical shape. (Both are not shown).

  The present invention can be used, for example, in a rack for storing a motor amplifier unit or the like in a semiconductor factory.

The perspective view of the housing | casing unit storage rack of embodiment Longitudinal sectional view of the housing unit storage rack when housing unit storage

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Case unit storage rack 1a Top plate 1b Bottom plate 1c Side plate 1d Back plate 1e Shelf plate 2 Amplifier unit (housing unit)
3 Amplifier (electronic equipment)
4 Housing 5 Ventilation port 6 Handle 7 Radiating fan 8 Partition plate 8a Radiating port 9, 9a to 9d Storage chamber 10, 10a to 10d Air guide chamber 11 Opening (outlet, inlet)
12 Blower fan 13 Exhaust duct connection port 14 Exhaust fan 15 Air conditioning plate 16 Exhaust duct

Claims (2)

A housing unit storage rack that can house a plurality of housing units with built-in electronic devices and a heat dissipation fan on the back side in the vertical direction,
A storage chamber having a front side opened to the outside so that the housing unit can be stored therein, and a heat dissipation opening opened at a position corresponding to the heat dissipation fan when the housing unit is stored, and a rear surface of the storage chamber The air guide chambers arranged on the side and communicated with the storage chamber by the heat radiating openings are respectively arranged in a step shape in the vertical direction, and the air guide chamber is an inflow port for introducing the air of the air guide chamber on the upper stage side or A ventilator that blows air to the lower stage is installed at the uppermost outlet, and a blower fan that blows air to the lower stage is installed at the uppermost outlet. The exhaust duct connection port with the exhaust fan that discharges the outside to the rack is formed,
Inside the air guide chamber, there are arranged air conditioning plates for guiding the exhaust air from the heat radiation port and the exhaust air from the inflow port to the outflow port or the exhaust duct connection port, respectively. Is set so that the ratio of the passage area of the exhaust air from the heat radiating port to the passage area of the exhaust air from the inflow port at the outlet or the exhaust duct connection port decreases sequentially from the upper stage side to the lower stage side. A housing unit storage rack. The housing unit storage rack according to claim 1, wherein an auxiliary fan that blows air toward the exhaust duct connection port is installed at the outlet.

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