JP2005265594A - 可動部を有する半導体デバイス - Google Patents
可動部を有する半導体デバイス Download PDFInfo
- Publication number
- JP2005265594A JP2005265594A JP2004078057A JP2004078057A JP2005265594A JP 2005265594 A JP2005265594 A JP 2005265594A JP 2004078057 A JP2004078057 A JP 2004078057A JP 2004078057 A JP2004078057 A JP 2004078057A JP 2005265594 A JP2005265594 A JP 2005265594A
- Authority
- JP
- Japan
- Prior art keywords
- movable part
- holes
- movable
- longitudinal direction
- semiconductor layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Pressure Sensors (AREA)
Abstract
【解決手段】 可動部20は、互いに異なる方向へ延びる複数個の部分21a、21bを有するものであり、複数個の貫通穴20aは、可動部20の複数個の部分21a、21bのそれぞれにおいて個々の部分21a、21bの長手方向X、Yに沿って延びる細長の穴形状をなすものである。
【選択図】 図2
Description
なお、上記図2に示される例では、可動部20のフレーム部21における第1の部分21aと第2の部分21bのそれぞれにおいて、当該部分21a、21bの長手方向とすべての貫通穴20aの長手方向とがそろっていた。
1b…半導体層としての他方のシリコン基板、20…可動部、20a…貫通穴、
21a…第1の部分、21b…第2の部分。
Claims (2)
- 支持基板(1a)に支持された半導体層(1b)をエッチングすることにより、前記支持基板(1a)からリリースされた可動部(20)が形成されており、
前記可動部(20)に複数個の貫通穴(20a)が形成されている可動部を有する半導体デバイスにおいて、
前記可動部(20)は、互いに異なる方向へ延びる複数個の部分(21a、21b)を有するものであり、
前記複数個の貫通穴(20a)は、前記複数個の部分(21a、21b)のそれぞれにおいて個々の部分(21a、21b)の長手方向に沿って延びる細長の穴形状をなすものであることを特徴とする可動部を有する半導体デバイス。 - 前記可動部(20)は、力学量の印加に伴い所定方向に変位可能となっているものであることを特徴とする請求項1に記載の可動部を有する半導体デバイス。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004078057A JP2005265594A (ja) | 2004-03-18 | 2004-03-18 | 可動部を有する半導体デバイス |
US11/063,857 US20050205949A1 (en) | 2004-03-18 | 2005-02-24 | Semiconductor device having moving part |
DE102005011658A DE102005011658A1 (de) | 2004-03-18 | 2005-03-14 | Halbleiteranordnung mit einem beweglichen Teil |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004078057A JP2005265594A (ja) | 2004-03-18 | 2004-03-18 | 可動部を有する半導体デバイス |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2005265594A true JP2005265594A (ja) | 2005-09-29 |
Family
ID=34983125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004078057A Pending JP2005265594A (ja) | 2004-03-18 | 2004-03-18 | 可動部を有する半導体デバイス |
Country Status (3)
Country | Link |
---|---|
US (1) | US20050205949A1 (ja) |
JP (1) | JP2005265594A (ja) |
DE (1) | DE102005011658A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006058022A (ja) * | 2004-08-17 | 2006-03-02 | Nippon Soken Inc | 角速度センサ |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4367165B2 (ja) * | 2004-02-13 | 2009-11-18 | 株式会社デンソー | 半導体力学量センサの検査方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5536988A (en) * | 1993-06-01 | 1996-07-16 | Cornell Research Foundation, Inc. | Compound stage MEM actuator suspended for multidimensional motion |
US6316796B1 (en) * | 1995-05-24 | 2001-11-13 | Lucas Novasensor | Single crystal silicon sensor with high aspect ratio and curvilinear structures |
DE19537814B4 (de) * | 1995-10-11 | 2009-11-19 | Robert Bosch Gmbh | Sensor und Verfahren zur Herstellung eines Sensors |
JP3307328B2 (ja) * | 1998-05-11 | 2002-07-24 | 株式会社デンソー | 半導体力学量センサ |
DE10046958B4 (de) * | 1999-09-27 | 2009-01-02 | Denso Corp., Kariya-shi | Kapazitive Vorrichtung zum Erfassen einer physikalischen Grösse |
-
2004
- 2004-03-18 JP JP2004078057A patent/JP2005265594A/ja active Pending
-
2005
- 2005-02-24 US US11/063,857 patent/US20050205949A1/en not_active Abandoned
- 2005-03-14 DE DE102005011658A patent/DE102005011658A1/de not_active Withdrawn
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006058022A (ja) * | 2004-08-17 | 2006-03-02 | Nippon Soken Inc | 角速度センサ |
Also Published As
Publication number | Publication date |
---|---|
DE102005011658A1 (de) | 2005-10-13 |
US20050205949A1 (en) | 2005-09-22 |
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