JP2005257646A - Carrier module for semiconductor test handler - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a carrier module for semiconductor element test handler capable of stably grasping and transferring a semiconductor element even in a case that the semiconductor element includes a lead or ball distributed over the whole area or in the periphery, and stably connecting it to a test socket to test it. <P>SOLUTION: This carrier module comprises a carrier module body 110; an element storage part formed at a bottom surface part of the body; a pair of first latches 140 oppositely set at both sides of the element storage part to be expansible and contractible, and grasping and releasing both side surface parts of the semiconductor elements; a pair of second latches 150 rotatably set at both sides of the first latches, grasping the bottom surface part of the semiconductor element, and releasing the semiconductor element in conjugation at the time of the releasing operation of the first latches; latch buttons 130 vertically movably set on an upper part of the module body and vertically moved to move the first latches; and first and second elastic members 114 and 132 elastically supporting the first latches and the second latches. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a carrier module installed on a test tray in a handler for testing a semiconductor device, and in particular, a lead or ball can be distributed to the periphery of the bottom surface of the device, but it is an ultra-miniaturized BGA type. The present invention relates to a carrier module for a semiconductor element test handler in which a semiconductor element such as the above can be stably attached and can be easily connected to a test socket at a test site.

In general, a memory or a non-memory semiconductor element and a module IC in which these are appropriately configured on a single circuit board are shipped after undergoing various test processes after production.
A handler is a device used to automatically test the semiconductor elements as described above, module RAM, and the like. In such a handler, a tray containing semiconductor elements to be tested by an operator is loaded into the handler. After loading on the stacker, the semiconductor element of the loading stacker is reattached to a separate test tray, the test tray with this semiconductor element attached is sent to the test site, and the lead or ball part of the semiconductor element is connected to the connector of the test socket. In general, after a predetermined test is performed by electrical connection, the semiconductor elements of the test tray are separated again, and the test is performed as a process of classifying and mounting on the customer tray of the unloading stacker according to the test result.

  1 and 2 show a test tray for transferring a semiconductor element from a handler between processes as described above, and a conventional carrier module mounted on the test tray. The test tray 1 is made of metal. A plurality of carrier modules 2 on which semiconductor elements are mounted on a frame 11 made of material are arranged and configured at regular intervals.

  The carrier module 2 includes an element accommodating portion 22 that accommodates a semiconductor element D on a rectangular body 21, and a pair of latches 23 that hold the semiconductor element D are installed on both sides of the element accommodating portion 22. Consists of. Here, the latch 23 repeatedly expands and contracts while pivoting up and down around a hinge shaft (not shown) installed inside the body 21, so that the latches 23 on both sides of the semiconductor element D accommodated on the element accommodating part 22 A portion where the ball Db is not formed is gripped.

  As shown in FIG. 2, the conventional carrier module 2 as described above is mounted with the semiconductor element D so that the ball forming surface is directed upward, and the test tray 1 with the semiconductor element D mounted in this manner is provided. When transferred to the test site of the handler, the index unit installed at the test site pushes the carrier module 2 toward the test socket so that the ball Db of the semiconductor element D is connected to the terminal pin (not shown) of the socket. And perform a predetermined test.

  However, the conventional carrier module as described above can sufficiently hold the semiconductor element D by the latch 23 when there are many portions where the ball Db or lead of the semiconductor element D is not formed. As can be seen from the development trend of the device, when the balls or leads are distributed over the entire peripheral area of the bottom surface of the semiconductor device, or when the semiconductor device is very small, there is a portion that can be gripped by the latch 23 substantially. Since it is not sufficiently secured, there arises a problem that the semiconductor element cannot be mounted on the carrier module.

  SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a lead for a semiconductor element of a semiconductor element having a minimum semiconductor element size, a recently developed MCF (Micro Lead Frame), QFN (Quad Flat No-lead) type, or BGA type. Or a semiconductor that can stably hold and transfer a semiconductor element even when balls are distributed over the entire area or periphery of the element, and can be stably connected to a test socket to perform a test. It is to provide a carrier module for an element test handler.

  An object of the present invention is to enable a carrier module to stably hold a semiconductor element and connect it to a test socket even when handling an ultra-thin semiconductor element.

  In order to achieve the above object, a carrier module for a semiconductor device test handler according to the present invention can extend and contract on both sides of a carrier module body, an element housing portion formed on a bottom surface of the carrier module body, and the element housing portion. At least one pair of first latches that grip and release both side surfaces of the semiconductor element housed in the element housing portion, and are pivotally installed on both sides of the first latch. At least one pair of second latches for holding the bottom surface of the housed semiconductor element and releasing the semiconductor element in conjunction with the release operation of the first latch, and the upper part of the carrier module main body are movably installed vertically A latch button coupled to one end of the first latch and capable of moving the first latch while moving up and down; Characterized in that it contains pitch and a second latch respectively the first elastic member and a second elastic member elastically supporting.

  According to an embodiment of the present invention, in the carrier module of the present invention, the semiconductor element is electrically connected to the protrusions formed to protrude downward on both sides of the second latch, and the test is performed. And a latch pusher formed on both sides of the test socket so as to protrude upward to correspond to the protrusion, and when the semiconductor element of the element receiving portion is connected to the test socket, The second latch pivots outward while the protrusion is in contact with the latch pusher, so that the gripping state of the semiconductor element by the second latch is released.

  According to another embodiment of the present invention, a plurality of ribs extending between the leads or balls of the semiconductor device and supporting the edge of the bottom surface of the semiconductor device are further formed at the tip of the first latch. It is characterized by being.

  According to the carrier module for a semiconductor element test handler of the present invention, a semiconductor element in which leads or balls are distributed over the entire periphery of the element can be stably supported and connected to a test socket, thus improving test reliability. Can be made.

  According to the present invention, when the carrier module holds the semiconductor element, the first latch and the second latch simultaneously hold the semiconductor element and connect the semiconductor element to the test socket to perform the test. Only the second latch pivots outward with the latch holding both sides of the semiconductor element, and the semiconductor element is released, so that the test can proceed smoothly, and the semiconductor element should be separated or accommodated from the carrier module In this case, the semiconductor device is completely discharged while the first latch and the second latch are simultaneously extended.

Hereinafter, preferred embodiments of a carrier module for a semiconductor device test handler according to the present invention will be described in detail with reference to the accompanying drawings.

  FIGS. 3 to 4c are perspective views showing a bottom surface of an embodiment of a carrier module for a semiconductor element test handler according to the present invention. The carrier module 100 includes a carrier module main body 110 and a center of a lower surface of the carrier module main body 110. And a first latch that is disposed opposite to each other on both sides of the element housing portion 115 and grips both side surface portions and the bottom surface portion of the semiconductor element 101. 140 and the second latch 150, and a latch button 130 which is installed on the upper part of the carrier module main body 110 so as to be movable up and down and can operate the first latch 140.

  The first latch 140 is rotatably coupled to the latch button 130 by the first connecting pin 142, and the second latch 150 is pivotally coupled to the carrier module body 110 by the second connecting pin 152.

  A pair of second latches 150 are provided, and two pairs of first latches 140 are disposed on both sides of the second latch 150 with the second latch 150 therebetween.

  The element accommodating portion 115 can be separated from the carrier module main body 110 according to the shape and size of the semiconductor element 101 and can be mounted in replacement.

  A heat sink 120 for suppressing the temperature rise of the semiconductor element is installed at the center of the carrier module main body 110, and a through hole 122 that penetrates vertically from the upper part to the lower part is formed at the center of the heat sink 120.

  The latch button 130 is elastically supported by the first compression spring 132 with respect to the carrier module body 110 in a state where the latch button 130 is inserted into the holes 116 formed on both sides of the heat sink 120.

A long hole-shaped guide groove 144 is formed at an intermediate portion of the first latch 140, and a guide pin 112 fixed to the carrier module main body 110 is located inside the guide groove 144.
Therefore, when an external force is applied to the latch button 130 and the latch button 130 is lowered, the guide groove 144 is guided by the guide pin 112, so that the first latch 140 extends while descending diagonally outward, and conversely the latch button 130 When the external force applied to 130 is removed, the latch button 130 is lifted by the elastic force of the first compression spring 132, whereby the guide groove 144 of the first latch 140 is guided by the guide pin 112 to receive the first latch. 140 shrinks while rising diagonally inward.

Further, on both sides of the first latch 140, latch operating pieces 147 are formed so as to protrude so as to come into contact with the inner surface of the second latch 150.

  On the other hand, the second latch 150 has a locking groove 156 formed at the outer upper end, and one end of the second compression spring 114 is coupled to the locking groove 156 and is elastically supported with respect to the carrier module body 110. The A protruding step 158 extending to the bottom surface of the semiconductor element 101 is formed inside the lower end of the second latch 150, and a protruding portion 154 protruding downward is formed outside the lower end of the second latch 150. When the projecting portion 154 is pressed, the second latch 150 pivots about the second connecting pin 152.

  The carrier module configured as described above operates as follows.

  First, as shown in FIG. 4a, when the semiconductor element 101 to be tested is transported to the lower part of the carrier module 100 of the test tray 1 (see FIG. 1) by a predetermined element transfer device (not shown), the carrier module 100 The pusher descends from the upper side of the button, and the latch button 130 is pushed.

  When the pusher member 170 can push down the latch button 130, the first latch 140 receives the guide of the guide pin 112 and extends downward in the diagonal direction as described above. At the same time, the latch operating piece 147 pushes out the inner surface of the second latch 150 while the first latch 140 is opened, and the second latch 150 rotates and extends outward.

  As described above, when the first latch 140 and the second latch 150 are extended, the lower pusher member (not shown) installed at the lower portion of the carrier module 100 pushes up the semiconductor element 101 and accommodates it on the element accommodating portion 115. Can be made.

  When the semiconductor element 101 is accommodated on the element accommodating portion 115, the pusher member 170 is raised and the latch button 130 is raised by the elastic force of the first compression spring 132, whereby the first latch 140 is raised diagonally inward. As shown in FIG. 4B, the both sides of the semiconductor element 101 are gripped.

  At the same time, when the first latch 140 is raised, the second latch 150 is also turned inward by the elastic force of the second compression spring 114, and the protrusions 158 hold the bottom portions on both sides of the semiconductor element 101.

  When the test tray 1 (see FIG. 1) moves to the position of the test socket 160 at the test site in a state where the semiconductor element 101 is held in the carrier module 100 as described above, a press unit (not shown) becomes the carrier module main body 110. Is pushed to the test socket 160 side.

  A latch pusher 162 corresponding to the protrusion 154 of the second latch 150 is formed on both sides of the test socket 160 so as to protrude upward, and when the carrier module 100 moves to the test socket 160 side, as shown in FIG. While the protrusion 154 of the second latch 150 is in contact with the latch pusher 162, the second latch 150 pivots and extends outward, thereby releasing the gripping state of the semiconductor element by the second latch 150, and only the first latch 140 is a semiconductor. The ball 101a of the semiconductor element 101 and the contact part 164 of the test socket 160 are connected by holding both side surfaces of the element 101.

  When the test is completed, the test tray moves to a position for unloading the semiconductor element, and as described with reference to FIG. 4a, the pusher member 170 is lowered again at the unloading position, and the semiconductor element 101 is moved to the carrier module. Separated from 100.

  On the other hand, as described above, when the semiconductor element 101 is connected to the test socket 160 and the electrical performance test proceeds, heat generated in the semiconductor element 101 is quickly discharged to the outside through the heat sink 120. There is no need for additional equipment or time for heat dissipation, thus reducing test time and costs.

  Then, it is possible to detect whether the carrier module 100 is holding the semiconductor element 101 by sensing the vacuum pressure through the through hole 122 formed in the center of the heat sink 120.

  FIGS. 5 to 7 c show another embodiment of the carrier module according to the present invention. The carrier module 200 of this embodiment can accommodate the micro BGA semiconductor element 102 in the center of the carrier module body 210. An element accommodating portion 215 is formed, and a pair of first latches 240 and second latches 250 are disposed on both sides of the element accommodating portion 215 in a diagonal direction.

  Here, detailed configurations of the first latch 240 and the second latch 250 are the same as those of the first and second latches 140 and 150 of the above-described embodiment, and thus detailed description thereof is omitted.

  In the carrier module 200 as described above, since the first latch 240 and the second latch 250 are arranged diagonally to each other, the small semiconductor element 102 can be gripped effectively and stably.

  The operation of the carrier module 200 according to another embodiment configured as described above is performed as follows.

  First, when the carrier module 200 accommodates the semiconductor element 102 or separates the semiconductor element 102 from the carrier module 200, the pusher member 170 located above the carrier module 200 is lowered as shown in FIG. When the latch button 230 is pushed, the first latch 240 extends while descending diagonally outward, and at the same time, the second latch 250 is also pivoted outward by the latch operating piece 247 of the first latch 240, so that the semiconductor element 102 is opened. Can enter and exit the element housing portion 215.

  As shown in FIG. 6b, when the pusher member 170 is raised and the latch button 130 is in a free state, the latch button 130 is raised by the elastic force of the first compression spring 232, thereby causing the first latch 240 to move diagonally. It shrinks while rising outward, and grips both side portions of the semiconductor element 102 while passing each other. At the same time, as the first latch 240 is raised, the second latch 250 grips the bottom portions on both sides of the semiconductor element 102 while passing inward by the elastic force of the second compression spring 214.

  On the other hand, when the test is performed by bringing the semiconductor element into contact with the test socket, as shown in FIG. 7A, when the semiconductor element 102 is lowered while being held in the element receiving portion 215, the protrusion 254 of the second latch 250 is tested. It comes into contact with latch pushers 162 installed on both sides of the socket 160.

  When the carrier module 200 continues to descend in this state, as shown in FIG. 7b, the second latch 250 extends by overcoming the elastic force of the second compression spring 214, and the semiconductor element 102 continues to be in the first side on both sides. The ball 102 a is connected to the contact portion 164 while being held by the latch 240.

  When the test is completed, the carrier module 200 moves to a predetermined unloading position, and the semiconductor element 201 is separated at the unloading position through the process described with reference to FIG.

  On the other hand, FIGS. 8 and 9 show the configuration of still another embodiment of the carrier module according to the present invention. The carrier module 300 of this embodiment has a ball 103 a of the semiconductor element 103 at the tip of the first latch 340. By forming a plurality of ribs 341 extending between the first latch 340 and the first latch 340, the first latch 340 can simultaneously grip both side surfaces and part of the bottom surface of the semiconductor device, thereby forming an ultrathin BGA semiconductor. More stable support force can be provided when connecting the device to the test socket.

  Of course, the thickness of the rib 341 should be smaller than that of the ball 103a so that the ball 103a of the semiconductor element 103 can be securely connected to the contact portion 164 (see FIG. 4b).

It is a front view of the test tray in which the conventional carrier module was installed. It is a perspective view which shows the bottom face of the conventional carrier module. It is a perspective view which shows the bottom face of one Embodiment of the carrier module by this invention. It is sectional drawing along the AA line which shows the operation example of the carrier module of FIG. It is sectional drawing along the AA line which shows the operation example of the carrier module of FIG. It is sectional drawing along the AA line which shows the operation example of the carrier module of FIG. It is a perspective view which shows the bottom face of other embodiment of the carrier module by this invention. It is principal part sectional drawing which shows the operation example of the carrier module of FIG. It is principal part sectional drawing which shows the operation example of the carrier module of FIG. FIG. 6 is a cross-sectional view taken along line BB showing an operation when the carrier module of FIG. 5 connects a semiconductor element to a test socket. FIG. 6 is a cross-sectional view taken along line BB showing an operation when the carrier module of FIG. 5 connects a semiconductor element to a test socket. It is a perspective view which shows the bottom face of other embodiment of the carrier module by this invention. It is principal part sectional drawing of the carrier module of FIG.

Explanation of symbols

100 Carrier Module 101 Semiconductor Element 101a Ball 110 Carrier Module Body 111 Guide Pin 114 Second Compression Spring 115 Element Housing 120 Heat Sink 130 Latch Button 132 First Compression Spring 140 First Latch 142 First Connection Pin 144 Guide Groove 150 Second Latch 152 Second connecting pin 154 Protrusion

Claims (8)

A carrier module body;
An element housing formed on the bottom surface of the carrier module body;
At least one pair of first latches that are installed on both side portions of the element housing portion so as to extend and contract, and grip and release both side surface portions of the semiconductor element housed in the device housing portion;
At least one pair of first elements that are pivotally installed on both sides of the first latch, hold the bottom surface part of the semiconductor element accommodated in the element accommodating part, and release the semiconductor element in conjunction with the release operation of the first latch. 2 latches,
A latch button installed on the upper part of the carrier module main body so as to be movable up and down, coupled to one end of the first latch, and capable of moving the first latch while moving up and down;
A first elastic member and a second elastic member that elastically support the first latch and the second latch, respectively.
A carrier module for a semiconductor element test handler. Protrusions formed on both sides of the second latch so as to protrude downward;
A latch pusher formed on the both sides of the test socket to which the semiconductor element is electrically connected and testing is formed to protrude upward so as to correspond to the protrusion;
When the semiconductor element of the element receiving portion is connected to the test socket, the second latch pivots outward while the protrusion of the second latch is in contact with the latch pusher, and the semiconductor element is gripped by the second latch. The carrier module for a semiconductor element test handler according to claim 1, wherein the carrier module is released.   2. The semiconductor device according to claim 1, further comprising a plurality of ribs extending between leads or balls of the semiconductor element and supporting an edge of a bottom surface of the semiconductor element at a tip of the first latch. The carrier module for a semiconductor element test handler according to 2.   3. The carrier module for a semiconductor device test handler according to claim 1, wherein one end of the first latch is pivotably coupled to the latch button via a connecting pin. 4.   A slotted guide home formed to be inclined in the first latch; a guide pin fixedly installed in the carrier module body so as to be inserted into the guide groove; and guiding the movement of the first latch; The carrier module for a semiconductor element test handler according to claim 4, further comprising:   The first latch is formed to protrude so as to come into contact with the inner surface of the second latch, and when the semiconductor element is released while the first latch is extended, the second latch is rotated outward to release the semiconductor element. 6. The carrier module for a semiconductor device test handler according to claim 1, further comprising a latch operating piece that can be operated.   2. The carrier module for a semiconductor device test handler according to claim 1, wherein two pairs of the first latches are installed on both sides of the second latch with the second latch therebetween.   2. The carrier module for a semiconductor device test handler according to claim 1, wherein the first latch and the second latch are arranged diagonally to each other.

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