JP2005257514A - Coating film adhesion strength measuring method - Google Patents

Coating film adhesion strength measuring method Download PDF

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JP2005257514A
JP2005257514A JP2004070350A JP2004070350A JP2005257514A JP 2005257514 A JP2005257514 A JP 2005257514A JP 2004070350 A JP2004070350 A JP 2004070350A JP 2004070350 A JP2004070350 A JP 2004070350A JP 2005257514 A JP2005257514 A JP 2005257514A
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coating film
substrate
adhesion
unit area
adhesion strength
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Tetsuo Kado
哲男 門
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National Institute of Advanced Industrial Science and Technology AIST
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an adhesion measuring method for measuring adhesion of a coating film to a substrate as a physical quantity. <P>SOLUTION: In this method for measuring the adhesion strength between the coating film formed on the substrate surface and the substrate, a unit area of a cubic piece having the unit area surface on the coating film is allowed to adhere thereto with the adhesion not exfoliated from the coating film, and then a shearing force is applied in the parallel direction to the adhesive surface of the coating film onto a power point at a fixed distance from the adhesive surface of the cubic piece, and a shear load per unit area when the coating film is exfoliated from the substrate surface is determined, to thereby measure the adhesion. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、工業材料、工具、金型、機械部品などの金属、合金又はセラミックス成形体の表面上にハードコーティング、耐食コーティングを目的として形成された被覆膜の密着強度を測定する方法に関するものである。   The present invention relates to a method for measuring the adhesion strength of a coating film formed for the purpose of hard coating or corrosion-resistant coating on the surface of a metal, alloy or ceramic molded body such as industrial materials, tools, molds and machine parts. It is.

ハードコーティングにおいて、皮膜の基材への密着性を高めることは、皮膜の機能を保つことと同等以上に重要と考えられており、皮膜の基材への密着性を高めることと相まって、基材への皮膜密着力の評価方法も種々提案されている。   In hard coating, increasing the adhesion of the film to the substrate is considered as important as maintaining the function of the film, coupled with improving the adhesion of the film to the substrate. Various methods for evaluating the adhesion of the film to the skin have been proposed.

例えば、弱い密着強度の膜については、粘着テープを用いて引き剥がす方法、中程度の密着強度の膜については、はんだやエポキシ系接着剤を用いて棒を膜面に垂直に立設し、棒に力を加え、膜を基板からはぎ取る方法がある。また、膜に垂直方向に棒を引っ張ったり、横に引き倒したり、トルクをかけて捻るなどして、それに印加した力を測定する方法、いわゆる直接引き剥がし法、引倒し法及び捻り法と呼ばれている方法がある（非特許文献１参照）。   For example, for films with weak adhesion strength, use a method of peeling with an adhesive tape. For films with moderate adhesion strength, use a solder or an epoxy-based adhesive to place the rod upright on the film surface. There is a method in which a force is applied to the film to peel off the film from the substrate. Also, a method of measuring the force applied to the membrane by pulling a rod perpendicularly to the membrane, pulling it sideways, twisting it with torque, etc., called the so-called direct peeling method, pulling method and twisting method (See Non-Patent Document 1).

そのほか、ダイヤモンドなどで被覆した超硬合金の被覆部材の付着強度評価において、くぼみの縁におけるせん断応力値（ｄｙｎ／ｃｍ2）をその強度値とする試験方法（特許文献１参照）、工具チップ上に成膜されたＴｉＮ層などのセラミック被覆層の破壊ないし剥離が生じ始めるスクラッチ臨界荷重（Ｎ）をその密着強度値とする試験方法（特許文献２参照）、またダイヤモンド被覆超硬合金のダイヤモンドの密着力評価において、その膜剥離が発生した時の負荷荷重（Ｎ）を密着強度値とする試験方法（特許文献３参照）などが知られている。 In addition, in the adhesion strength evaluation of a cemented carbide coated member coated with diamond or the like, a test method using the shear stress value (dyn / cm 2 ) at the edge of the indentation as its strength value (see Patent Document 1), on the tool tip A test method in which the critical stress (N) at which scratching or peeling of a ceramic coating layer such as a TiN layer formed on the surface begins to occur is the adhesion strength value (see Patent Document 2), and the diamond-coated cemented carbide diamond In adhesion strength evaluation, a test method (see Patent Document 3) in which a load load (N) when film peeling occurs is used as an adhesion strength value is known.

さらに、球状あるいはピラミッド上の圧子を膜表面に押し付けて膜面に傷が発生する荷重値（Ｎ）を密着強度値の目安とする方法や、押し込みの際の荷重を一定にして多数のサンプルについて押し込み試験を行い、その被膜が剥離した個数の割合を目安とする試験方法（特許文献４参照）、めっき層や溶射層などの被覆層の基体への密着性を評価するために被覆膜表面上で所定径の球体などを所定荷重で転動させて剥離の有無を調べ、予めせん断強度が明らかな被覆膜の検量線に照らして被覆膜の密着強度を評価する方法（特許文献５参照）なども提案されている。   Furthermore, a method that uses a load value (N) that causes a scratch on the membrane surface by pressing a spherical or pyramid indenter against the membrane surface, and a method that uses a constant load during indentation for many samples. In order to evaluate the adhesion of a coating layer such as a plating layer or a sprayed layer to a substrate, a test method using an indentation test and using the ratio of the number of peeled films as a guide (see Patent Document 4) A method of evaluating the adhesion strength of the coating film in the light of a calibration curve of the coating film whose shear strength is clear in advance by rolling a sphere of a predetermined diameter with a predetermined load and examining the presence or absence of peeling (Patent Document 5) For example).

しかしながら、これらの方法は、単に相対的な評価による密着力の大小を定める方法として利用されているだけであり、単位面積当りの物理量としての絶対評価を得るものではない。単純に考えれば、一定の面積の棒を膜面に垂直に立てておき、棒に力を加え、膜を基板から剥ぎ取る方法で、垂直に引っ張り試験を行い、剥離の際の臨界法線応力を測定すれば、物理量としての密着強度の測定は可能であるが、この際の棒の引き上げ方法が難しく、実用化はされていないのが現状である。   However, these methods are merely used as a method for determining the magnitude of the adhesion force by relative evaluation, and do not obtain an absolute evaluation as a physical quantity per unit area. In simple terms, a rod with a certain area is set up perpendicular to the film surface, a force is applied to the rod, and the film is peeled off from the substrate. It is possible to measure the adhesion strength as a physical quantity, but the method of pulling up the rod at this time is difficult and has not been put into practical use.

特開平７−３０５１７０号公報（実施例及び表１）JP-A-7-305170 (Examples and Table 1) 特開平１０−９４９０５号公報（００２５及び表１〜表３）JP-A-10-94905 (0025 and Tables 1 to 3) 特開平１１−１７２３６１号公報（００１６及び表１と表２）JP-A-11-172361 (0016 and Tables 1 and 2) 特開２００１−３４２５６５号公報（００３１〜００３２及び表１〜表４）JP 2001-342565 A (0031 to 0032 and Tables 1 to 4) 特開平７−１２０３７８号公報（特許請求の範囲その他）JP-A-7-120378 (Claims and others) 馬場茂、「熱処理」、１９８９年、第２９巻、第４号、ｐ．２２３Baba Shigeru, “Heat Treatment”, 1989, Vol. 29, No. 4, p. 223

本発明は、被覆膜の基体に対する密着力を物理量として測定するための密着力測定方法を提供するものである。   The present invention provides an adhesion force measuring method for measuring the adhesion force of a coating film to a substrate as a physical quantity.

本発明者は、単位面積面を有する方体片を被覆膜面に垂直に立設し、その側面に被覆膜面と平行方向に剪断力を加え、被覆膜を基板からはぎ取ることにより、密着力を測定できることを見出し、この知見に基づいて本発明をなすに至った。   The inventor erected a rectangular piece having a unit area surface perpendicularly to the coating film surface, applied a shearing force to the side surface in a direction parallel to the coating film surface, and stripped the coating film from the substrate. The inventors have found that the adhesion force can be measured, and have come to make the present invention based on this finding.

すなわち、本発明は、基体表面に形成された被覆膜と基体との間の密着強度を測定する方法において、該被覆膜上に単位面積面を有する方体片の単位面積を被覆膜との間で剥離を生じない密着力で接着したのち、該方体片の接着面から一定の距離にある力点に対し、被覆膜の接着面と平行な方向に剪断力を加え、被覆膜が基体表面から剥離したときの単位面積当りの剪断荷重を求めることを特徴とする被覆膜密着強度測定方法を提供するものである。   That is, the present invention relates to a method for measuring the adhesion strength between a coating film formed on a substrate surface and the substrate, and the unit area of a rectangular piece having a unit area surface on the coating film is a coating film. After adhering with an adhesive force that does not cause peeling, a shear force is applied in a direction parallel to the adhesive surface of the coating film to the force point at a certain distance from the adhesive surface of the rectangular piece. It is an object of the present invention to provide a coating film adhesion strength measuring method characterized by obtaining a shear load per unit area when a film peels from a substrate surface.

本発明方法における密着性評価の対象としては、工業材料、工具、金型、機械部品などの金属、合金又はセラミックス成形体の表面上にハードコーティング、耐食コーティングを目的として形成された被覆膜のほかに、めっき膜や塗膜など、種々の基体上に形成された皮膜を挙げることができる。   The object of adhesion evaluation in the method of the present invention is a coating film formed for the purpose of hard coating or corrosion-resistant coating on the surface of metal, alloy or ceramic molded body such as industrial materials, tools, molds, machine parts, etc. In addition, the film formed on various base | substrates, such as a plating film and a coating film, can be mentioned.

本発明方法においては、単位面積面を有する方体片を用いるが、これは剪断力を印加したときに折れたり、曲ったりすることのない高強度、高剛性、硬質の材料であることが必要である。このような材料としては、例えば、鋼、超硬合金や、炭化ケイ素、窒化ケイ素、ジルコニア、アルミナのような高強度、高剛性、硬質のセラミックスを挙げることができる。そのほか、低い密着強度のものに対してはガラスを用いることもできる。   In the method of the present invention, a rectangular piece having a unit area surface is used, and this needs to be a high-strength, high-rigidity, hard material that does not bend or bend when a shearing force is applied. It is. Examples of such materials include steel, cemented carbide, and high strength, high rigidity, and hard ceramics such as silicon carbide, silicon nitride, zirconia, and alumina. In addition, glass having a low adhesion strength can be used.

これは、方体状の細片として形成されるが、この方体は立方体でもよいし直方体でもよい。そして、この方体片は、単位面積面、例えば１ｍｍ平方面又は１ｃｍ平方面を有することが必要である。これよりも小さい単位面積面例えば１μｍ平方面では剪断力を加えたときに破壊されてしまうし、またこれよりも大きい単位面積面例えば１ｍ平方面では、剪断力を大きくしなければ、被覆膜を剥離することができないので、取り扱いにくくなる。好ましいのは１ｍｍ平方面である。この単位面積面については、正確に１ｍｍ平方面とすることは必ずしも必要ではなく、少々の誤差を生じても、その面積を測定し、単位面積に換算した剪断力を算出することにより、密着強度を求めることができる。   This is formed as a rectangular strip, which may be a cube or a cuboid. And this rectangular parallelepiped piece needs to have a unit area surface, for example, a 1 mm square surface or a 1 cm square surface. A smaller unit area surface, for example, a 1 μm square surface, is destroyed when a shearing force is applied. On a larger unit area surface, for example, a 1 m square surface, if the shearing force is not increased, the coating film Can not be peeled off, making it difficult to handle. A 1 mm square surface is preferred. It is not always necessary for this unit area surface to be a 1 mm square surface. Even if a slight error occurs, the surface area is measured, and by calculating the shear force converted to the unit area, the adhesion strength Can be requested.

この方体片は、その単位面積面で被覆膜上に接着されるが、これは基体と被覆膜との間の接着力よりも方体片の単位面積面と被覆膜との間の接着力が大きくなるように接着されていることが必要である。これは、接着剤としてエポキシ系の強力接着剤を用いることによって実現される。特に（有）ブレニー技研から製造販売されている商品名「ＧＭ−８３００」は、常温での最大接着強度が２．５×１０7Ｐａ以上であるので好適である。 This cuboid piece is bonded on the coating film at its unit area surface, but this is between the unit area surface of the cuboid piece and the coating film rather than the adhesive force between the substrate and the coating film. It is necessary that they are bonded so as to increase the adhesive force. This is realized by using an epoxy-based strong adhesive as the adhesive. In particular, the product name “GM-8300” manufactured and sold by Brennie Giken is suitable because the maximum adhesive strength at room temperature is 2.5 × 10 7 Pa or more.

方体片は基体に被覆処理された皮膜の上にエポキシ系接着剤で接着されるが、通常は、測定個数を多くするために、１ｍｍ厚のセラミック板などをエポキシ系接着剤で張り付け、それを刃の厚さが１ｍｍ以下のダイヤモンド回転切断機で１ｍｍ四方に数多く切り出すのが有利である。この際、カットの深さは被覆膜まで十分到達することが必要である。   The rectangular piece is bonded to the substrate with an epoxy-based adhesive on the coated film. Usually, in order to increase the number of measurements, a 1 mm thick ceramic plate or the like is attached with an epoxy-based adhesive. It is advantageous to cut a large number of 1 mm squares with a diamond rotary cutter with a blade thickness of 1 mm or less. At this time, the depth of the cut needs to reach the coating film sufficiently.

次に、添付図面に従って、本発明方法を詳細に説明する。
図１は、本発明方法を説明するための斜視図であり、基体１の表面に被覆膜２が設けられている。この被覆膜２の上には、硬質セラミックス例えば炭化ケイ素からなる方体片３が強固に接着され、それは接着面が単位面積例えば１ｍｍ平方になるようにカットされている。 Next, the method of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a perspective view for explaining the method of the present invention, and a coating film 2 is provided on the surface of a substrate 1. A rectangular solid piece 3 made of hard ceramic, for example, silicon carbide, is firmly bonded on the coating film 2 and is cut so that the bonded surface has a unit area of, for example, 1 mm square.

次に、鋼棒（以下ピンと称する）４を方体片３の側面に当て、これを介して被覆膜２と平行の方向に剪断力を加え、方体片３が剥離するときの剪断力（以下臨界剪断力という）を求める。この際の剪断力を加える方体片３の力点は、常に接着面から一定の距離になるようにすることが必要である。この距離が変動すると、力のモーメントが異なることになり、印加された剪断力を測定して、正確に接着強度を求めることができなくなる。この剪断力は、ピン４を介して印加され、剪断力により被覆膜２が基体１から剥離するときの臨界剪断力を測定する。   Next, a steel rod (hereinafter referred to as a pin) 4 is applied to the side surface of the cuboid piece 3, and a shearing force is applied in a direction parallel to the coating film 2 through the steel bar 3. (Hereinafter referred to as critical shear force). At this time, it is necessary that the force point of the rectangular piece 3 to which the shearing force is applied is always a constant distance from the bonding surface. If this distance fluctuates, the moment of force will be different, and the applied shear force cannot be measured to accurately determine the adhesive strength. This shearing force is applied via the pin 4 and the critical shearing force when the coating film 2 is peeled from the substrate 1 by the shearing force is measured.

この測定には、変動荷重が１ｍｍ平方面に印加され、かつピン４に印加される荷重が出力される密着性評価装置が用いられる。一定の荷重印加速度で変動荷重がかけられるようになっていれば、Ｘ−Ｔレコーダーに接続して、剪断応力を測定することができる。荷重は矢印で示すようにピン４の上部より印加され、ピン４を通して方体片３の１ｍｍ平方面に負荷されるようになっている。ピン４は効率よく荷重が印加できるよう先端を細く加工したものを用いる。   For this measurement, an adhesion evaluation apparatus is used in which a fluctuating load is applied to a 1 mm square surface and a load applied to the pin 4 is output. If a variable load can be applied at a constant load application speed, the shear stress can be measured by connecting to an XT recorder. A load is applied from the upper part of the pin 4 as indicated by an arrow, and is applied to the 1 mm square surface of the rectangular piece 3 through the pin 4. The pin 4 is a pin whose tip is processed so that a load can be applied efficiently.

ピン４の材質は通常、高速度鋼が用いられるが、硬い金属であればどのようなものでも差しつかえない。方体片３が剥離した際にこれによって支えられたピン４は落下し、ピン４は衝撃を受けるが、臨界剪断応力はこの衝撃によってピン４から発生するＡＥ信号やピン４の加速度の変動によって破断と同時に方体片３にかかる剪断荷重を検出できる。   The pin 4 is usually made of high-speed steel, but any material can be used as long as it is a hard metal. When the cuboid piece 3 is peeled off, the pin 4 supported thereby falls and the pin 4 receives an impact, but the critical shear stress is caused by the AE signal generated from the pin 4 due to this impact and the fluctuation of the acceleration of the pin 4. The shear load applied to the rectangular parallelepiped piece 3 can be detected simultaneously with the fracture.

通常のスクラッチ試験機ではスクラッチに際して針にかかる横方向の抵抗力が検出できるが、スクラッチ試験機の針をピンの代りに用いても、剥離の際の衝撃を横方向の抵抗力の変化として検出できる。このため、スクラッチ試験機で、針をピンに替え、試料位置を動かさず一定に保ち、方体片３に荷重をかけて抵抗出力信号を検出することにより臨界剪断応力を求めることも可能である。   In normal scratch testing machines, the lateral resistance force applied to the needle during scratching can be detected, but even when the scratch testing machine needle is used instead of a pin, the impact during peeling is detected as a change in the lateral resistance force. it can. For this reason, it is also possible to obtain the critical shear stress by detecting the resistance output signal by applying a load to the cuboid piece 3 by changing the needle to the pin, keeping the sample position constant without moving it, with a scratch tester. .

測定に際してはピン４が方体片３からはずれないようにするため、試料を装置の測定台に固定するのが好ましい。   In order to prevent the pins 4 from being detached from the rectangular piece 3 at the time of measurement, it is preferable to fix the sample to the measuring table of the apparatus.

次に実施例により本発明を実施するための最良の形態を説明するが、本発明はこれらの例によって何ら限定されるものではない   Next, the best mode for carrying out the present invention will be described with reference to examples, but the present invention is not limited to these examples.

反応性スパッタリング法で異なる条件でアルミニウム合金板上に形成された３種類のモリブデンオキシカーバイド硬質膜について剪断剥離法による密着性評価を行った。１ｍｍ厚の炭化ケイ素板を市販のエポキシ系接着剤［（有）ブレニー技研製、商品名「ＧＭ−８３００、」常温での最大接着強度２．５×１０7Ｐａ］で被覆膜表面に貼り付けた。それを刃の厚さが０．５ｍｍのダイヤモンド回転切断機で１ｍｍ四方に６個切り出した。基体は約０．３ｍｍの深さまでカットされていて、剪断面となる方体片の被覆膜への接合面積は１ｍｍ平方であった。密着性評価試験装置としては市販のスクラッチテスター（新東科学製、商品名「ＨＥＩＤＯＮ １８Ｌ」）を、測定に際して試料位置が変動しないように改良して使用した。 Three kinds of molybdenum oxycarbide hard films formed on an aluminum alloy plate under different conditions by the reactive sputtering method were evaluated for adhesion by a shear peeling method. A 1 mm thick silicon carbide plate is affixed to the surface of the coating film with a commercially available epoxy adhesive [manufactured by Brennie Giken, trade name “GM-8300,” maximum adhesive strength at room temperature of 2.5 × 10 7 Pa]. I attached. Six of them were cut out in a 1 mm square with a diamond rotary cutter with a blade thickness of 0.5 mm. The substrate was cut to a depth of about 0.3 mm, and the bonding area of the rectangular piece serving as the shear surface to the coating film was 1 mm square. A commercially available scratch tester (manufactured by Shinto Kagaku Co., Ltd., trade name “HEIDON 18L”) was used as an adhesion evaluation test apparatus, so that the sample position was not changed during measurement.

図１に示すように被覆膜上に接着された方体片の側面に対して被覆膜面に平行かつ被覆膜面に接するようにピンを押し当てて力を加え、剪断応力により被覆膜を基板からはぎ取り、この際の臨界剪断応力を測定した。方体片には先端断面積３ｍｍ2のピンを通して１．４７Ｎ／ｓの荷重印加速度で最大２９．７Ｎ（３ｋｇ重）の変動荷重がかけられるようになっていて、Ｘ−Ｔレコーダーにピンにかかる抵抗を出力して、臨界剪断応力を測定した。その結果を表１に示す。 As shown in FIG. 1, a force is applied by pressing a pin against the side surface of the rectangular piece adhered on the coating film so as to be parallel to the coating film surface and in contact with the coating film surface. The covering film was peeled off from the substrate, and the critical shear stress at this time was measured. A maximum of 29.7N (3kg weight) of fluctuating load can be applied to the rectangular parallelepiped piece through a pin with a tip cross-sectional area of 3mm 2 at a load application speed of 1.47N / s. The resistance was output and the critical shear stress was measured. The results are shown in Table 1.

Figure 2005257514
Figure 2005257514

この表中の試料Ａ及び試料Ｂは、スパッタリングによる被覆膜形成に先立つ基板前処理を１０Ｐａの真空圧力でＡｒ雰囲気及びＡｒと窒素の混合雰囲気でそれぞれ行ったもので、密着性が高いため、スクラッチテストでは針荷重３００ｇの範囲では共に被覆膜の破壊は観察されなかった。
本発明の試験法による結果では、被覆膜剥離に要する剪断応力はそれぞれ１６８ｋｇｆ／ｃｍ2及び１０７ｋｇｆ／ｃｍ2であり、被覆膜の剪断剥離法による密着性評価を行えることが分った。 Sample A and Sample B in this table were obtained by performing substrate pretreatment prior to coating film formation by sputtering in a vacuum atmosphere of 10 Pa in an Ar atmosphere and a mixed atmosphere of Ar and nitrogen, respectively. In the scratch test, no destruction of the coating film was observed in the range of the needle load of 300 g.
As a result of the test method of the present invention, the shear stress required for peeling the coating film was 168 kgf / cm 2 and 107 kgf / cm 2 , respectively, and it was found that the adhesion evaluation by the shear peeling method of the coating film could be performed.

また、表中の試料Ｃはスパッタリングによる被覆膜に先立つ基板前処理を１１０Ｐａの高い真空圧力でＡｒと窒素の混合雰囲気で行ったもので、密着性が低いためスクラッチテストでは針荷重１３０ｇで被覆膜の破壊が観察された。
本発明の試験法による結果では、被覆膜剥離に要する剪断応力は７０ｋｇｆ／ｃｍ2であり、被覆膜の剪断剥離法による密着性評価を行えることが分った。 Sample C in the table was obtained by performing substrate pretreatment prior to the coating film by sputtering in a mixed atmosphere of Ar and nitrogen at a high vacuum pressure of 110 Pa. Because of low adhesion, the scratch test was performed with a needle load of 130 g. Breaking of the overcoat was observed.
As a result of the test method of the present invention, it was found that the shear stress required for peeling the coating film was 70 kgf / cm 2 , and the adhesion evaluation by the shear peeling method of the coating film could be performed.

本発明によると、基体とその上に設けられた被覆膜との間の密着強度の絶対評価を簡単に行うことができるので、工業材料、工具、金型、機械部品に施した被覆膜の密着性の評価に利用することができる。   According to the present invention, since the absolute evaluation of the adhesion strength between the substrate and the coating film provided thereon can be easily performed, the coating film applied to industrial materials, tools, molds, and machine parts. It can utilize for evaluation of adhesiveness.

本発明方法を説明するための斜視図。The perspective view for demonstrating this invention method.

符号の説明Explanation of symbols

１ 基体
２ 被覆膜
３ 方体片
４ ピン 1 Substrate 2 Coating film 3 Rectangular piece 4 Pin

Claims (2)

基体表面に形成された被覆膜と基体との間の密着強度を測定する方法において、該被覆膜上に単位面積面を有する方体片の単位面積を被覆膜との間で剥離を生じない密着力で接着したのち、該方体片の接着面から一定の距離にある力点に対し、被覆膜の接着面と平行な方向に剪断力を加え、被覆膜が基体表面から剥離したときの単位面積当りの剪断荷重を求めることを特徴とする被覆膜密着強度測定方法。   In a method for measuring the adhesion strength between a coating film formed on a substrate surface and the substrate, the unit area of a rectangular piece having a unit area surface on the coating film is peeled from the coating film. After bonding with an adhesive force that does not occur, a shearing force is applied in a direction parallel to the adhesive surface of the coating film to the force point at a certain distance from the adhesive surface of the rectangular piece, and the coating film peels off from the substrate surface A method for measuring the adhesion strength of a coating film, characterized in that a shear load per unit area is obtained. 基体が金属、合金又はセラミックスからなる請求項１記載の被覆膜密着強度測定方法。
2. The coating film adhesion strength measuring method according to claim 1, wherein the substrate is made of a metal, an alloy or a ceramic.
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CN104764692A (en) * 2015-04-21 2015-07-08 中国工程物理研究院材料研究所 Testing device for testing bonding strength of coating specimen
CN112098324A (en) * 2020-10-26 2020-12-18 枚林优交(上海)新材料开发有限公司 Method for testing peel strength of electronic adhesive and adhered PC (polycarbonate) substrate sample
CN116793891A (en) * 2023-08-21 2023-09-22 中铁九局集团第五工程有限公司 Method for testing specific surface area of aggregate

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JP2000321196A (en) * 1999-05-14 2000-11-24 Toshiba Corp Method for measuring adhesion strength of conductive pad
JP2001174401A (en) * 1999-12-15 2001-06-29 Hitachi Ltd Bonded/joined structure
JP2003106990A (en) * 2001-09-27 2003-04-09 Fujitsu Ltd Adhesive peeling test piece and its testing method
JP2003315253A (en) * 2002-04-26 2003-11-06 Toshiba Corp Durability testing method of coating member and test device therefor

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009300410A (en) * 2008-06-12 2009-12-24 Resuka:Kk Scratch testing method and device using acceleration detection method
CN104764692A (en) * 2015-04-21 2015-07-08 中国工程物理研究院材料研究所 Testing device for testing bonding strength of coating specimen
CN112098324A (en) * 2020-10-26 2020-12-18 枚林优交(上海)新材料开发有限公司 Method for testing peel strength of electronic adhesive and adhered PC (polycarbonate) substrate sample
CN116793891A (en) * 2023-08-21 2023-09-22 中铁九局集团第五工程有限公司 Method for testing specific surface area of aggregate
CN116793891B (en) * 2023-08-21 2023-11-14 中铁九局集团第五工程有限公司 Method for testing specific surface area of aggregate

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