JP2005251773A - 真空チャック装置 - Google Patents

真空チャック装置 Download PDF

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Publication number
JP2005251773A
JP2005251773A JP2004055725A JP2004055725A JP2005251773A JP 2005251773 A JP2005251773 A JP 2005251773A JP 2004055725 A JP2004055725 A JP 2004055725A JP 2004055725 A JP2004055725 A JP 2004055725A JP 2005251773 A JP2005251773 A JP 2005251773A
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JP
Japan
Prior art keywords
vacuum
drain
throttle valve
way throttle
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2004055725A
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English (en)
Japanese (ja)
Other versions
JP2005251773A5 (enExample
Inventor
Masahisa Takahashi
真佐寿 高橋
Akihide Takehara
明秀 竹原
Katsushi Ishikawa
克司 石川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nachi Fujikoshi Corp
Original Assignee
Nachi Fujikoshi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nachi Fujikoshi Corp filed Critical Nachi Fujikoshi Corp
Priority to JP2004055725A priority Critical patent/JP2005251773A/ja
Publication of JP2005251773A publication Critical patent/JP2005251773A/ja
Publication of JP2005251773A5 publication Critical patent/JP2005251773A5/ja
Withdrawn legal-status Critical Current

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  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2004055725A 2004-03-01 2004-03-01 真空チャック装置 Withdrawn JP2005251773A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004055725A JP2005251773A (ja) 2004-03-01 2004-03-01 真空チャック装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004055725A JP2005251773A (ja) 2004-03-01 2004-03-01 真空チャック装置

Publications (2)

Publication Number Publication Date
JP2005251773A true JP2005251773A (ja) 2005-09-15
JP2005251773A5 JP2005251773A5 (enExample) 2007-03-29

Family

ID=35032007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004055725A Withdrawn JP2005251773A (ja) 2004-03-01 2004-03-01 真空チャック装置

Country Status (1)

Country Link
JP (1) JP2005251773A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112621559A (zh) * 2020-12-09 2021-04-09 蚌埠中光电科技有限公司 一种用于研磨机真空管道的研磨液清洁装置
CN112867589A (zh) * 2018-10-19 2021-05-28 科瓦尔公司 用于控制气动部件的设备
CN118043168A (zh) * 2021-12-14 2024-05-14 东和株式会社 切断装置和切断品的制造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112867589A (zh) * 2018-10-19 2021-05-28 科瓦尔公司 用于控制气动部件的设备
CN112621559A (zh) * 2020-12-09 2021-04-09 蚌埠中光电科技有限公司 一种用于研磨机真空管道的研磨液清洁装置
CN118043168A (zh) * 2021-12-14 2024-05-14 东和株式会社 切断装置和切断品的制造方法

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