JP2005241603A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2005241603A5 JP2005241603A5 JP2004055264A JP2004055264A JP2005241603A5 JP 2005241603 A5 JP2005241603 A5 JP 2005241603A5 JP 2004055264 A JP2004055264 A JP 2004055264A JP 2004055264 A JP2004055264 A JP 2004055264A JP 2005241603 A5 JP2005241603 A5 JP 2005241603A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004055264A JP4387834B2 (ja) | 2004-02-27 | 2004-02-27 | 点回折干渉計、並びに、それを利用した露光装置及び方法 |
US11/064,558 US7304749B2 (en) | 2004-02-27 | 2005-02-24 | Point diffraction interferometer and exposure apparatus and method using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004055264A JP4387834B2 (ja) | 2004-02-27 | 2004-02-27 | 点回折干渉計、並びに、それを利用した露光装置及び方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005241603A JP2005241603A (ja) | 2005-09-08 |
JP2005241603A5 true JP2005241603A5 (ja) | 2007-04-12 |
JP4387834B2 JP4387834B2 (ja) | 2009-12-24 |
Family
ID=34879781
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004055264A Expired - Fee Related JP4387834B2 (ja) | 2004-02-27 | 2004-02-27 | 点回折干渉計、並びに、それを利用した露光装置及び方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7304749B2 (ja) |
JP (1) | JP4387834B2 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8004690B2 (en) * | 2004-01-16 | 2011-08-23 | Carl Zeiss Smt Gmbh | Device and method for the optical measurement of an optical system, measurement structure support, and microlithographic projection exposure apparatus |
JP4835091B2 (ja) * | 2005-10-03 | 2011-12-14 | 株式会社ニコン | 位置検出装置 |
JP2007180152A (ja) * | 2005-12-27 | 2007-07-12 | Canon Inc | 測定方法及び装置、露光装置、並びに、デバイス製造方法 |
JP2008098604A (ja) * | 2006-09-12 | 2008-04-24 | Canon Inc | 露光装置及びデバイス製造方法 |
KR100780185B1 (ko) | 2006-11-07 | 2007-11-27 | 삼성전기주식회사 | 회절광학소자를 이용한 렌즈 파면 측정장치 |
JP2008192855A (ja) * | 2007-02-05 | 2008-08-21 | Canon Inc | 測定装置、露光装置及びデバイス製造方法 |
JP2008192936A (ja) * | 2007-02-06 | 2008-08-21 | Canon Inc | 測定装置、露光装置及びデバイス製造方法 |
JP2009216454A (ja) * | 2008-03-07 | 2009-09-24 | Canon Inc | 波面収差測定装置、波面収差測定方法、露光装置およびデバイス製造方法 |
DE102008029970A1 (de) * | 2008-06-26 | 2009-12-31 | Carl Zeiss Smt Ag | Projektionsbelichtungsanlage für die Mikrolithographie sowie Verfahren zum Überwachen einer lateralen Abbildungsstabilität |
JP5604777B2 (ja) * | 2008-07-16 | 2014-10-15 | 株式会社ニコン | 波面生成光学系及び波面収差測定装置 |
US8432530B2 (en) * | 2008-07-22 | 2013-04-30 | Canon Kabushiki Kaisha | Device, method, and system for measuring image profiles produced by an optical lithography system |
JP5359397B2 (ja) * | 2009-03-10 | 2013-12-04 | 株式会社ニコン | 光学部材及び光学機器 |
DE102017216679A1 (de) * | 2017-09-20 | 2019-03-21 | Carl Zeiss Smt Gmbh | Mikrolithographische Projektionsbelichtungsanlage |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5764139A (en) | 1980-10-08 | 1982-04-19 | Nippon Kogaku Kk <Nikon> | Interferometer |
JP2679221B2 (ja) | 1989-03-02 | 1997-11-19 | 株式会社ニコン | 干渉計 |
US5457533A (en) * | 1994-06-10 | 1995-10-10 | Wilcken; Stephen K. | Point-diffraction interferometer utilizing separate reference and signal beam paths |
US5835217A (en) * | 1997-02-28 | 1998-11-10 | The Regents Of The University Of California | Phase-shifting point diffraction interferometer |
US6312373B1 (en) * | 1998-09-22 | 2001-11-06 | Nikon Corporation | Method of manufacturing an optical system |
JP2001227909A (ja) * | 2000-02-17 | 2001-08-24 | Nikon Corp | 点回折干渉計、反射鏡の製造方法及び投影露光装置 |
-
2004
- 2004-02-27 JP JP2004055264A patent/JP4387834B2/ja not_active Expired - Fee Related
-
2005
- 2005-02-24 US US11/064,558 patent/US7304749B2/en not_active Expired - Fee Related