JP2005234262A - Illuminator of microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To achieve the miniaturization of a dark-field device of a microscope and thereby to provide an inexpensive configuration. <P>SOLUTION: The microscope is provided with a light source section on a doughnut-shaped middle seat attachable and detachable to and from a stage of the microscope and in a position apart from the optical axis of an objective lens on the rear (the surface on an inner side) of the middle seat. Bright-field illumination is performed by uniformly irradiating a specimen portion by the light from the light source section. Also, an optical transmission member is arranged on the middle seat as another example and the specimen surface is irradiated with the illumination light from the light source section through the optical transmission member. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

    The present invention relates to a microscope illumination device, and more particularly to an epi-illumination dark field illumination device for a microscope used in an inverted metal microscope for routine inspection.

    Conventionally, a dark field observation method has been used in microscope observation.

    This dark field observation method is performed using a microscope revolver, an objective lens, a condenser, and the like provided with a dark field illumination device unique to the microscope.

As a conventional example of an apparatus for performing dark field observation, an apparatus disclosed in the following document is known.
JP, 2003-5082, A This example is an epi-illumination device for a dark field of a microscope. A light beam from a light source is guided to the vicinity of an objective lens by an optical fiber (light guide), and this light beam is provided in a revolver and an objective lens. The incident light is incident on a dark field device to perform dark field observation.

    However, these conventional techniques are equipped with a dark field device unique to the revolver, objective lens, condenser, and the like, so that the apparatus becomes large and expensive. The present invention provides a dark field illumination device for a microscope with a simple configuration and at low cost.

    The microscope stage center according to the present invention has a donut shape that can be attached to and detached from the microscope stage, and illuminates the sample at a position away from the optical axis of the objective lens on the back surface (inner surface) of the center. It is characterized by having.

    That is, the center of the present invention has, for example, a donut shape in which a stage in a metal microscope has a portion hollowed in a ring shape at the center thereof and is hermetically fitted to the hollowed ring-shaped portion. The light source portion is provided on the back surface (inner surface).

    And as the 1st structure, the sample part was illuminated uniformly by providing many light source parts in the back surface (inner surface) of the center at equal intervals, and dark field illumination was made.

    In another configuration, by providing a transmission member in the center seat except for the vicinity of the optical axis of the objective lens, a large number of light source portions arranged at equal intervals on the back surface (inner surface) of the center seat are provided. By forming an optical path of illumination light from these light sources between the stage and the transmission member of the center seat, it is possible to irradiate the sample surface uniformly with light from the light sources and perform dark field illumination It is a thing.

    As a result, uniform dark field illumination with a sufficient amount of light is possible with a relatively small number of light source units.

    In addition, a light source unit is provided on the back surface (inner surface) of the center seat, and a reflector is provided in front of the light source unit. After reflecting the illumination light from the light source by the reflecting member, the back surface of the center seat ( The sample surface is illuminated by reflection at the inner surface, etc., and the sample surface is uniformly illuminated with a sufficient amount of light by the light from one light source unit, thereby performing dark field illumination. It is a thing.

    Furthermore, the illumination device for a microscope of the present invention is an illumination device in which a ring-shaped cut-out portion is formed at the center of a microscope stage, and a light source part is provided on a side surface of the cut-through portion.

    As a result, an illumination device that enables dark field illumination is formed on the microscope stage itself, and this stage itself constitutes an illumination device similar to the center of the present invention described above, and uniform dark field illumination is achieved. It becomes possible. Therefore, the specimen can be observed in a dark field by an inverted metal microscope or the like.

    The center of the present invention can be attached to and detached from the microscope stage with a simple configuration, and the specimen can be illuminated uniformly. The microscope of the present invention is relatively small and can be observed in a dark field by an illumination system configured on a stage.

    The embodiment of the present invention will be described based on each example.

    1 and 2 are diagrams showing a first embodiment of a dark field illumination device for a microscope according to the present invention, FIG. 1 is a side view (sectional view) showing an enlarged vicinity of an objective lens, and FIG. 2 is a bottom view. is there. In the figure, reference numeral 1 denotes a stage in which a central portion is hollowed out in a donut shape, and the hollowed portion has a side large-diameter portion 2 and a small-diameter portion 3. 4 is a donut-shaped central seat, which is fitted so that it does not rattle on the large-diameter portion 2 of the stage 1 and is placed in contact with the contact portion 5, and is detachable from the stage. It is. In addition, an LED light source 6 is fixed or incorporated around the back surface of the center seat 4. The LED light source 6 is arranged at a certain distance from the objective lens 7 in order to prevent contact when the revolver of the objective lens rotates. Since the LED light source 6 is arranged at a certain distance from the objective lens 7 in this way, the area for arranging the LED light source is large, and a large number of LED light sources can be arranged.

    Further, in order to uniformly irradiate the observation specimen surface 8 of the objective lens 7, the LED light sources 6 are arranged on the back surface of the center seat 4 in a ring shape at equal intervals as shown in FIG. 2.

    Thus, the center seat 4 in which the LED light sources 6 are arranged in a ring shape at equal intervals around the back surface of the back surface is installed on the contact portion 5 of the stage 1 whose center portion is cut out in a donut shape.

    In the dark field device of the present invention having such a configuration, the illumination light from the LED light source 6 is emitted in the direction of the observation specimen surface 8 with a certain extent. The emitted illumination light illuminates the observation surface 8 uniformly. That is, since the LED light source 6 is arranged in a ring shape at equal intervals on the back surface of the center seat 10, it uniformly illuminates the observation specimen surface 8.

    Since the light irradiated on the observation specimen surface 8 is emitted from the outside of the objective lens 7, it is assumed that the 0th-order light reflected on the specimen surface does not enter the objective lens 7 and enters the objective lens 7. Is also in the objective lens, so that it becomes a so-called dark field illumination state. Therefore, light diffracted or scattered by scratches or dust on the observation surface 10 enters the objective lens 7 to form a dark field image.

    The first embodiment is a simple and inexpensive dark field observation in which a central base in which an LED light source is fixed or incorporated in a ring shape at equal intervals in an inexpensive metal microscope without a dark field device is simply placed on the center of the stage. Is possible.

    Further, since the position of the LED light source is separated from the optical axis of the objective lens, it is possible to ensure a working distance of the objective lens of high magnification.

    Moreover, since the space between the light source unit and the objective lens 7 is secured to some extent, the cross-sectional area of the LED light source is large, and a large number of LED light sources can be arranged, and bright dark field illumination is possible.

    Furthermore, since the light source is arranged in a ring shape at equal intervals in the apparatus of this embodiment, uniform illumination is possible.

    Note that the number of light sources is not limited to twelve, and the number of light sources may be equally divided by 360 °.

    3 and 4 are diagrams showing a modification of the dark field epi-illumination device according to the first embodiment of the present invention. 3 is a side view (sectional view), and FIG. 4 is a bottom view.

    In this modification, instead of incorporating or fixing the LED light source on the back surface of the center seat, an optical fiber is used, and the emission end 13 of the optical fiber 11 is separated from the optical axis of the objective lens 7 as shown in a ring shape as shown in the figure. It is different from FIGS. 1 and 2 in that the configuration is arranged at intervals.

    3 and 4, the central portion of the microscope stage 1 is cut into a donut shape, and the cut side surface has a large diameter portion 2 and a small diameter portion 3.

    Further, the center seat 4 has a donut shape, is fitted so as not to rattle the large-diameter portion 2 of the stage 1, and is placed in contact with the contact portion 5. 1 is detachable.

    The above configuration is substantially the same as FIG. 1 and FIG.

    However, the apparatus shown in FIGS. 3 and 4 has an illumination light source 20 composed of a halogen lamp or the like, and an optical fiber bundle 21 having an incident end 22 connected to the illumination light source 20. Each optical fiber 23 constituting the optical fiber 23 is disassembled, and the tips thereof are arranged around the back surface of the center seat 4 at equal intervals in a ring shape.

    That is, the apparatus of FIGS. 3 and 4 differs from the apparatus of FIGS. 1 and 2 in that instead of using a large number of LED light sources, a light source such as one halogen lamp and an optical fiber are used.

    The apparatus shown in FIGS. 3 and 4 is configured as described above, and a central portion in which the exit ends of the respective optical fibers are arranged at equal intervals in a ring shape around the back surface is cut into a donut shape at the center. It is installed on the contact portion 5 of the stage 1. On the other hand, the incident end 22 of the optical fiber bundle 21 is attached to the illumination light source 20 for use.

    The light from the illumination light source 20 is incident on the incident end face of the optical fiber bundle 21, and the light transmitted by each optical fiber is emitted with a certain extent from the exit end face, thereby uniformly illuminating the observation specimen surface.

    3 and 4 is an inexpensive inverted metal microscope that is not equipped with a dark field illumination device, and has a central base in which the exit ends of the optical fibers of the optical fiber bundle as described above are fixed or built in a ring shape at equal intervals. Dark field illumination observation can be performed easily and inexpensively by simply placing it on the center of the microscope stage and connecting the incident end of the optical fiber bundle to an illumination light source.

    5 and 6 show a second embodiment of the present invention. FIG. 5 is a side view (sectional view), and FIG. 6 is a bottom view.

    In this embodiment, the center portion of the stage 1 is cut into a donut shape, and the cut side surface is composed of a large diameter portion 2 and a small diameter portion 3. The center seat 4 has a donut shape, is fitted to the large diameter portion 2 of the stage 1 so as not to rattle, and is placed in contact with the contact portion 5. The center seat 4 is detachable from the stage 1. Further, the LED light source 6 is fixed or built in the periphery of the back surface of the center seat 4, and this LED light source 6 is located at a certain distance from the objective lens 7 so as not to come into contact when the revolver of the objective lens 7 is rotated. Is placed.

    Thereby, since the arrangement area can be increased, a large number of LED light sources 6 can be arranged. In order to irradiate the observation specimen 8 uniformly, four LED light sources 6 are arranged on the back surface of the center seat 4 at equal intervals in a ring shape.

    Further, in the lighting device of the second embodiment, a transmission member (reflective member) 11 is disposed at the lower end of the center seat 4 so as to have good adhesion and be detachable. The transmission member 11 has a reflective surface whose surface (upper surface) is mirror-finished, thereby guiding a part of the light from the LED light source 6 onto the observation surface 8, thereby efficiently using the light from the LED light source 6. I have to do it.

    In addition, since the transmission member 11 is held airtight with respect to the center seat 4, there is little light leakage and light can be efficiently irradiated onto the observation specimen surface 8.

    Further, the transmission member 11 is detachable and can be exchanged for a shape that can efficiently and uniformly irradiate the observation specimen surface 8 in accordance with the magnification of the objective lens.

    FIGS. 7 and 8 are modifications of the second embodiment that can be observed particularly efficiently when used in combination with a high-magnification objective lens. 7 is a side view (cross-sectional view), and FIG. 8 is a bottom view.

    In this embodiment, as shown in FIGS. 7 and 8, a transmission member 12 is provided, and the second transmission member is different from the transmission member 11 shown in FIGS. The space between the seat 4 and the seat 4 is shortened.

    As a result, when combined with a high-magnification objective lens, the observation specimen surface 8 can be uniformly irradiated even more efficiently. By using the transmission member 12 having such a shape, the distance between the optical axis side of the objective lens and the center seat becomes small, and even when a high-magnification objective lens with a short working distance is used, a gap with a short working distance is provided. It is possible to irradiate light efficiently.

    The illumination device according to the second embodiment of the present invention is configured so that the transmission member 11 or 12 can be easily installed on the stage contact portion 5 from above with the transmission member 11 or 12 attached to the center seat 4. The outer diameter of 12 is smaller than the inner diameter of the small diameter portion 3 of the stage.

    In the second embodiment, four LED light sources are arranged in a ring shape at equal intervals around the back surface of the center seat 4, and the transmission member 11 or 12 is attached to the back surface of the center seat 4, and the central portion is shaped like a donut. It is installed in the abutting portion 5 of the cut out stage.

    In the second embodiment, the illumination light from the four LED light sources 6 arranged in a ring shape is emitted in the direction of the observation specimen 8 with a certain extent.

    The emitted light is efficiently guided onto the observation specimen surface 8 by the transmission member 11 or 12, and irradiates the specimen surface 8.

    The 0th-order light that is irradiated from the outside of the objective lens 7 that has been scattered or diffracted by scratches, dust, etc. on the observation specimen surface 8 and specularly reflected by the specimen surface does not enter the objective lens, but is incident on it. Even so, since it is seen inside the objective lens, it becomes a so-called dark field illumination state. Then, the light diffracted or scattered by the object on the observation specimen surface 8 forms a dark field image by the objective lens.

    In the second embodiment, a space can be secured between the light source unit and the transmission member and the objective system to some extent, so that the light source does not get in the way when the revolver rotates, and the operability is good.

In addition, observation by dark field illumination can be performed simply by placing an inexpensive inverted microscope that does not include a dark field illumination device and having a transmission member attached to a center with a built-in LED light source on the stage of the microscope. In particular, the second embodiment enables dark field observation with an emphasis on bright and uniform illumination by selecting an appropriate transmission member according to the magnification of the microscope objective system.

    9 and 10 are diagrams showing a third embodiment of the microscope illumination device of the present invention, in which FIG. 9 is a side view and FIG. 10 is a bottom view.

    The third embodiment is an example in which only one LED light source 6 is disposed.

    As shown in FIGS. 9 and 10, one LED light source 6 is disposed in the center seat 4 and a transmission member 11 having a shape similar to that of the second embodiment (FIGS. 5 and 6) is attached. The light source side surface is provided with a reflection member 13 having a mirror surface (reflection surface) 13 a in front of the LED light source 6 of the transmission member 11. Further, the lower surface, side surface, and the like of the center seat 4 are made into reflective surfaces by mirror finishing or the like.

    Other configurations are the same as those of the second embodiment.

    In the illuminating device of the third embodiment, the light emitted from one LED light source 6 is reflected by the reflecting surface 13a of the reflecting member 13 provided on the transmitting member 11, and then the transmitting member provided on the inner seat 4 and the middle It is reflected by the inner surface (reflecting surface) of the seat 4 and uniformly illuminates the observation specimen surface 8.

    The apparatus according to the third embodiment includes a stage 1 in which a central portion 4 is cut out in a donut shape through a central seat 4 having a single LED light source 6 and a transmission member provided with a reflecting member facing the light source. It is installed and used at the contact part.

    After being installed in this manner, the illumination light from the LED light source 6 is reflected by the reflecting member and diffuses around it. The diffused illumination light is uniformly reflected on the observation specimen surface 8 by being repeatedly reflected between the sealing center 4 and the transmission member 11. The third embodiment is an inexpensive apparatus with a simple configuration including only one LED light source and a transmission member provided with a reflecting member, and can perform uniform dark field illumination.

    The embodiment of the present invention described above relates to the center of the microscope stage of the present invention.

    Similarly, a dark field illumination device having a simple configuration can be obtained by forming a hollow portion in the center of the microscope stage and providing an LED light source on the inner surface. That is, it is possible to realize a microscope that has a simple configuration and can perform dark field illumination.

    The present invention can be observed in a simple dark field by being attached to a stage such as a metal microscope. In addition, an effective dark field observation is possible with an inexpensive and small configuration instead of a large dark field illumination device.

Side view of Embodiment 1 of the present invention The bottom view of Example 1 of the present invention The side view of the modification of Example 1 of this invention The bottom view of the modification of Example 1 of this invention Side view of Embodiment 2 of the present invention Bottom view of Embodiment 2 of the present invention Side view of a modification of the second embodiment of the present invention The bottom view of the modification of Example 2 of the present invention Side view of Embodiment 3 of the present invention Bottom view of Embodiment 3 of the present invention

Explanation of symbols

1 stage, 4 center seat, 6 LED light sources 11, 12 transmitting member, 13 reflecting member

Claims (5)

A microscope stage center that has a light emitting portion that illuminates a sample at a position at which the center is separated from the optical axis of the objective lens. 2. The microscope stage center according to claim 1, further comprising a transmission member that is provided between the light emitting unit and the objective lens and forms an optical path of light from the light emitting unit between the light emitting unit and the objective lens. The microscope stage center according to claim 1 or 2, further comprising a reflecting member provided between the light emitting unit and the objective lens and deflecting a light beam from the light emitting unit. 4. The microscope stage center according to claim 1, wherein the light emitting portion is an LED light source. An illumination apparatus for a microscope, comprising: a stage for placing a specimen; and a light emitting unit for illuminating the specimen provided at a position separated from an optical axis of an objective lens of the stage.

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