JP2005228945A - Three wavelength semiconductor laser array monolithically integrated on semiconductor substrate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a three-wavelength semiconductor laser array where three kinds of semiconductor laser elements, i.e. a red laser element, an infrared laser element and a blue laser element are integrated on one substrate, by relaxing mismatch of a blue laser and a substrate material. <P>SOLUTION: In the three wavelength semiconductor laser array, a red laser element, an infrared laser element and a blue laser element are monolithically integrated on a semiconductor substrate. A buffer layer, including at least one kind of compound semiconductor selected from among a group consisting of a I-III-VI compound semiconductor, a II-III-VI compound semiconductor and a II-III-V compound semiconductor, is provided in between the semiconductor substrate and the blue laser element. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a three-wavelength semiconductor laser array device monolithically integrated on a semiconductor substrate.

  Semiconductor lasers have characteristics such as small size, high efficiency, low voltage, low power consumption and long life compared to other types of lasers, and are widely used in the field of optoelectronics. Semiconductor lasers have grown especially as communications technologies. However, recently, the importance of use for storage such as CDs, DVDs, and next-generation disks is also increasing.

Currently, a semiconductor laser is a single wavelength laser, an infrared laser having a wavelength of 780 nm (GaAlAs (750 to 850 nm) is used as a material, GaAs is used as a substrate material), and a red laser (GaAlInP is used as a material) is 650 nm. System (620-680 nm) is used, GaAs is used as the substrate material, blue-violet laser with a wavelength of 405 nm (GaN-based (purple blue green) is used as the material, and sapphire (Al ₂ O ₃ ) is used as the substrate material. ) Recently, a two-wavelength semiconductor laser in which a red laser and an infrared laser are mounted on one substrate (GaAs) has been commercialized. The DVD player and drive currently on sale by realizing the dual wavelength laser can simultaneously read the DVD medium and the CD medium at the same time. Players in the early days of DVD sales used two semiconductor lasers with wavelengths of 780 and 650 nm to simultaneously read a CD. However, in this case, a dichroic prism must be provided for the CD laser. As a result, the pickup becomes enlarged. Therefore, a two-wavelength semiconductor laser that oscillates two wavelengths with one element was developed. By using this, the dichroic prism can be eliminated, and the pits of both CD and DVD can be detected through a collimator lens and an objective lens with a single half mirror, so that the pickup can be miniaturized. ing.

  In the future, optical devices will be required to be smaller, lighter, consume less power, be more energy efficient, and have lower manufacturing costs. Compared to conventional single-wavelength lasers, the number of parts of dual-wavelength lasers has been halved, enabling miniaturization, but semiconductor lasers that are not limited to electrical equipment and medical use are required to be applied in various fields. In the future, it can be said that a new three-wavelength laser that oscillates three lasers (red, infrared, and blue-violet) with one element will be required. With the practical application of multi-wavelength lasers such as two-wavelength lasers and three-wavelength lasers, it is expected that they will be used not only in the fields of optical communications and optical equipment but also in various fields. it can.

  Conventionally, various structures have been proposed for an optical pickup having three wavelengths, and Patent Document 1 is an example. As represented by this, conventionally, two light emitting point positions of a two-wavelength monolithic GaAs semiconductor laser and a light emitting point position of a blue-violet wavelength GaN semiconductor laser are brought close to each other and integrated in a hybrid manner. However, this complicates the manufacturing process and increases the cost.

Further, as disclosed in Patent Document 2, conventionally, ZnO is used as a buffer layer as a method for solving the mismatch of the lattice constant between the GaAs substrate and the GaN light emitting layer region. However, the ZnO buffer layer matches the lattice constant with the GaN light emitting layer region, but does not match the lattice constant with the GaAs substrate. Furthermore, in Patent Document 3, a surface nitride layer is formed on a GaAs substrate to form a GaN light emitting layer, but this also has a large lattice constant mismatch between the GaAs substrate and the surface nitride layer, resulting in dislocations. This has a very bad influence on the luminous efficiency and reliability of the light emitting element.
JP 2002-25104 A Japanese Patent Laid-Open No. 2000-22128 JP-A-8-181386

Conventionally, the substrate material of blue laser is sapphire (Al ₂ O ₃ ). However, sapphire is an unfavorable substrate material for mass production because of its high cost. In manufacturing a three-wavelength laser, if silicon or GaAs can be used as a substrate, these can be said to be suitable for mass production because of their low cost.

  However, there is a mismatch in lattice constant between Si or GaAs used for the substrate material and InGaN, which is the active layer material of the blue laser. The lattice constant refers to the distance between unit atoms constituting a single crystal. If there is a mismatch in the lattice constant, a strain or a fault is generated. As a result, the electrical resistance increases by an order of magnitude, and it may burn in extreme cases due to Joule heat generation. For this reason, conventionally, there has been a problem that a blue laser cannot be grown on a silicon or GaAs substrate.

  The present invention has been made based on such circumstances, and its purpose is to alleviate mismatching between the blue laser and the substrate material, and three types of semiconductor laser elements on one substrate, that is, a red laser element, It is an object to provide a three-wavelength semiconductor laser array device in which an infrared laser element and a blue laser element are integrated.

  According to the present invention, in a three-wavelength semiconductor laser array device in which a red laser element, an infrared laser element, and a blue laser element are monolithically integrated on a semiconductor substrate, I is provided between the semiconductor substrate and the blue laser element. A buffer layer including at least one compound semiconductor selected from the group consisting of a group III-VI compound semiconductor, a group II-III-VI compound semiconductor, and a group II-III-V compound semiconductor is provided. A three-wavelength semiconductor laser array device is provided.

  In the present invention, the buffer layer comprises at least two compound semiconductors selected from the group consisting of a group I-III-VI compound semiconductor, a group II-III-VI compound semiconductor, and a group II-III-V compound semiconductor. It may have a lattice structure or a superlattice structure of the compound semiconductor and the group III nitride semiconductor. Alternatively, the buffer layer is an alternating layer of two compound semiconductors selected from the group consisting of a group I-III-VI compound semiconductor, a group II-III-VI compound semiconductor, and a group II-III-V compound semiconductor, Or an alternating layer of the compound semiconductor and the group III nitride semiconductor, wherein one compound semiconductor of the alternating layer has a lattice constant close to that of the semiconductor substrate, and the other compound semiconductor is composed of the material of the blue laser element. The lattice constant is close, and the thickness of the one compound semiconductor layer decreases from the semiconductor substrate toward the blue laser element, and the thickness of the other compound semiconductor layer decreases from the blue laser element to the semiconductor substrate. It may have a structure that becomes thinner as it goes.

  According to the present invention, it is possible to provide a three-wavelength semiconductor laser array device in which three types of semiconductor lasers are integrated on a single substrate (Si or GaAs), which is effective in reducing the size and weight of optical devices in optical disk devices. It is. Also, CD, DVD, and HD-DVD can be used with a single optical device, so that the spread of HD-DVD is accelerated, contributing to the change of optical recording to magnetic recording. This greatly contributes to the expansion and progress of multi-wavelength laser applications.

  In the present invention, a red laser element, an infrared laser element, and a blue laser element are integrated on the same semiconductor substrate. A buffer layer is formed between the semiconductor substrate and the blue laser element.

  In the present invention, the red laser element (laser diode) may be a GaInP-based one. For example, GaInP is used as an active layer, and p-type and n-type clad layers made of AlGaInP are provided with the active layer interposed therebetween. It can have a configuration. The active layer of the red laser element can have a quantum well structure. The infrared laser element (laser diode) may be of a GaAs type, and has, for example, a configuration in which AlGaAs is used as an active layer and p-type and n-type clad layers made of AlGaAs are provided with the active layer interposed therebetween. Can do. The active layer of the infrared laser element can have a quantum well structure. The blue laser element includes a GaN-based light emitting element having a GaN-based group III nitride semiconductor, particularly a GaN-based light-emitting element having a double heterostructure of a gallium-containing group III nitride semiconductor. Such a double heterostructure GaN-based light emitting device has, for example, InGaN as an active layer, and p-type and n-type clad layers made of a gallium-containing nitride semiconductor (for example, GaN, AlGaN, etc.) are provided across the active layer. May have a different configuration. The active layer of the blue laser element can also have a quantum well structure.

  The buffer layer provided between the blue laser element and the semiconductor substrate (silicon or GaAs) is made of a group I-III-VI compound semiconductor, a group II-III-VI compound semiconductor, and a group II-III-V compound semiconductor. It includes at least one compound semiconductor selected from the group.

The buffer layer according to one embodiment of the present invention includes at least two kinds selected from the group consisting of a group I-III-VI compound semiconductor, a group II-III-VI compound semiconductor, and a group II-III-V compound semiconductor. It has a superlattice structure of a compound semiconductor or a superlattice structure of the compound semiconductor and a group III nitride semiconductor. The superlattice structure is a structure in which a large number of layers having a thickness of about several nanometers are stacked. Among the compound semiconductor layers constituting the superlattice structure, the compound semiconductor layer formed directly on the semiconductor substrate is formed of a compound semiconductor close to the lattice constant of the semiconductor constituting the semiconductor substrate, and the uppermost compound semiconductor layer is It is preferable to form a compound semiconductor close to the lattice constant of the gallium-containing nitride semiconductor in the GaN-based laser element formed thereon. It is preferable to use a combination of CuGaS ₂ and GaAlN or a combination of CuGaS ₂ and ZnIn ₂ S ₄ as the material of such a superlattice.

  FIG. 1 is a schematic cross-sectional view showing one preferred superlattice buffer layer 12 formed on a silicon or GaAs semiconductor substrate 11.

The buffer layer 12 includes an alternate stacked structure of two compound semiconductors of CuGaS ₂ and GaAlN or ZnIn ₂ S ₄ . In FIG. 1, a compound semiconductor layer made of CuGaS _{2 is} represented by 12An (n is an nth layer counted from the one close to the semiconductor substrate 11), and a compound semiconductor layer made of GaAlN or ZnIn ₂ S ₄ is made 12Bn ( n represents the nth layer counted from the one close to the semiconductor substrate 11), the compound semiconductor layer formed directly on the semiconductor substrate 11 is composed of the layer 12A1, and the uppermost layer of the buffer layer 12 is The compound semiconductor layer to be configured is preferably configured by the layer 12Bn. In this case, all the compound semiconductor layers constituting the buffer layer 12 may have substantially the same thickness, for example, 5 nm. Each compound semiconductor layer can be grown by MOCVD. The buffer layer 12 can be composed of, for example, 100 compound semiconductor layers, and the thickness thereof can be, for example, 0.5 μm.

  On the buffer layer 12, for example, a gallium-containing nitride semiconductor layer 13 in a GaN-based laser element can be provided.

In the buffer layer 12 having the superlattice structure shown in FIG. 1, the lattice constant of CuGaS ₂ is 5.4Å, whereas the lattice constant of ZnIn ₂ S ₄ is 3.84Å and the lattice constant of GaAlN is 3.189Å. is there. Therefore, CuGaS ₂ has a lattice constant close to that of silicon (lattice constant is 5.43Å) and GaAs (lattice constant is 5.65Å), and ZnIn ₂ S ₄ and GaAlN are In _x Ga _1-x N (x <0. 1), the buffer layer 12 is characterized in that dislocations generated from the semiconductor substrate 11 are allowed to escape laterally along the interface of the superlattice before reaching the GaN-based laser. it can. For example, dislocations can escape somewhere in the interface of the superlattice before reaching the GaN-based laser element, such as dislocations in the fourth layer even if they do not escape laterally in the first layer. It becomes possible not to introduce defects into the growth layer, and high-quality crystals can be obtained.

The buffer layer according to the second aspect of the present invention includes two kinds of buffer layers selected from the group consisting of a group I-III-VI compound semiconductor, a group II-III-VI compound semiconductor, and a group II-III-V compound semiconductor. Including alternating layers of compound semiconductors, one compound semiconductor having a lattice constant close to that of the semiconductor substrate, and the other compound semiconductor having a lattice constant close to the material of the blue laser element and the one compound semiconductor layer The thickness of the second compound semiconductor layer decreases from the semiconductor substrate toward the blue laser element, and the thickness of the other compound semiconductor layer decreases from the blue laser element toward the semiconductor substrate. Of the compound semiconductor layers constituting the buffer layer, the compound semiconductor layer formed directly on the semiconductor substrate is formed of a compound semiconductor having a lattice constant close to that of the semiconductor substrate, and the uppermost compound semiconductor layer is the blue laser element. It is preferable to use a compound semiconductor having a lattice constant close to that of the material. It is preferable to use a combination of CuGaS ₂ and GaAlN or a combination of CuGaS ₂ and ZnIn ₂ S ₄ as the material of the buffer layer.

  FIG. 2 is a schematic cross-sectional view showing a preferred structure of the buffer layer 22 according to the second aspect formed on the semiconductor substrate 11.

As shown in FIG. 2, the buffer layer 22 includes an alternate stacked structure of two types of compound semiconductors of CuGaS ₂ and GaAlN or ZnIn ₂ S ₄ . In FIG. 2, a semiconductor layer made of CuGaS ₂ is represented by 22An (n is an nth layer counted from the one close to the semiconductor substrate 11), and a compound semiconductor layer made of InGaAlN or ZnIn ₂ S ₄ is made 22Bn (n Represents the nth layer counted from the one close to the semiconductor substrate 11), the compound semiconductor layer directly formed on the semiconductor substrate 11 is composed of the layer 22 A 1 and constitutes the uppermost layer of the buffer layer 12. The compound semiconductor layer to be formed includes the layer 22Bn. The thickness of the layers 22A1 to 22An simply decreases from the layer 22A1 closest to the semiconductor substrate 11 toward the uppermost layer. That is, the layer 22A1 is the thickest and the layer 22An is the thinnest. On the contrary, the thicknesses of the layers 22B1 to 22Bn simply increase from the layer 22B1 closest to the semiconductor substrate 11 toward the uppermost layer. That is, the layer 22B1 is the thinnest and the layer 22Bn is the thickest. This buffer layer 12 may have a thickness of about 1 μm. For example, the compound semiconductor layer 22A1 is formed to a thickness of 10 nm, the compound semiconductor layer 22B1 is formed to a thickness of 1 nm by Ga _0.85 Al _0.15 N, and the compound semiconductor layer 22A2 is 9.9 to 9.5 nm. The compound semiconductor layer 22B2 can be formed to a thickness of 1.1 to 1.5 nm with Ga _0.85 Al _0.15 N. In this way, the compound semiconductor can be formed by sequentially changing the thickness, the compound semiconductor layer 22An can be formed to a thickness of 1 nm, and the compound semiconductor layer 22Bn can be formed to a thickness of 10 nm using Ga _0.85 Al _0.15 N. The buffer layer 22 can be composed of 100 compound semiconductor layers. Since lattice constant matching can be achieved in this way, distortion can be relaxed and the uppermost dislocation can be reduced.

  Next, an example of a method for manufacturing the three-wavelength semiconductor laser array device of the present invention will be described with reference to FIGS.

  At present, in manufacturing a semiconductor laser, an MOCVD growth method (Metal Organic Chemical Vapor Deposition) is used to grow a semiconductor thin film of a semiconductor laser element. This is because uniform thin film growth over a large area is relatively easy as compared with the LPE growth method (Liquid Phase Epitaxy) and MBE growth method (Molecular Beam Epitaxy). MOCVD is a method in which a semiconductor material is introduced into a reaction chamber in the state of an organic compound, and a thin film is grown on a substrate heated to a high temperature by induction heating. The MOCVD growth method is also used in the manufacture of the three-wavelength semiconductor laser array device of the present invention.

First, a GaN blue light emitting semiconductor laser diode (LD) is grown. First, as shown in FIG. 3, a triple quantum well is formed on an n-GaAs substrate 31 with a buffer layer 32 having a thickness of 0.5 μm, for example, and a first n-InAlGaN cladding layer 33 having a thickness of 1 μm, for example. The (TQW) structure InGaN active layer 34 has a total thickness of 40 nm, the first p-InAlGaN cladding layer 35 has a thickness of 0.3 μm, and the n-InAlGaN block layer 36 has a thickness of 0.5 μm, for example. The SiO ₂ film 37 is formed on the block layer 36 to a thickness of 0.5 μm, for example. The buffer layer 32 has the structure described with reference to FIG.

Next, a stripe window 37a having a width of 3 μm is formed in the SiO ₂ film 37 (FIG. 4). By dry etching, the portion of the n-InAlGaN block layer 36 corresponding to the stripe window 37 a is removed by etching until reaching the surface of the first p-InAlGaN cladding layer 35, thereby forming a stripe groove 36 a in the block layer 36. Thereafter, the SiO ₂ film 37 is removed by etching with HF, and then the second p-InAlGaN cladding layer 38 is grown to a thickness of 0.5 μm, for example, and the p-GaN contact layer 39 is grown to a thickness of 0.5 μm, for example. Next, the SiO ₂ film 40 is formed to a thickness of 0.5 μm, for example (FIG. 5).

Next, the SiO ₂ film 40 is left only in a portion (width, for example, 130 μm) 401 corresponding to the blue LD element, and the other SiO ₂ film 40 is removed with a hydrofluoric acid-based etchant (FIG. 6). Thereafter, using the remaining SiO ₂ film 401 as a mask, the p-GaN contact layer 39, the second p-InAlGaN cladding layer 38, the block layer 36, the first p-InAlGaN cladding layer 35, the active layer 34, the first layer The n-InAlGaN cladding layer 33 and the buffer layer 32 are partially removed by dry etching, and the surface of the n-GaAs substrate 31 is partially exposed. In this way, the first n-InAlGaN cladding layer 331, the active layer 341, the first p-InAlGaN cladding layer 351, the block layer 361, and the second p− remaining on the buffer layer 321 remaining under the mask 401, respectively. A blue LD element structure including the InAlGaN cladding layer 381 and the remaining p-GaN contact layer 391 is formed. (FIG. 7).

Subsequently, a red LD element is formed. That is, the first p-AlGaInP cladding layer is formed on the entire surface of the structure shown in FIG. 7 with the n-AlGaInP cladding layer 41 having a thickness of 1.5 μm, for example, and the TQW active layer 42 made of GaInP with a total thickness of 40 nm, for example. The layer 43 is grown to a thickness of 0.3 μm, for example, and the n-AlInP block layer 44 is grown to a thickness of 0.5 μm, for example, and an SiO ₂ film 45 is formed thereon to a thickness of 0.5 μm, for example (FIG. 8). Next, a stripe window 45a having a width of 3 μm, for example, is formed in the SiO ₂ film 45 (FIG. 9). Next, the n-AlInP block layer 44 corresponding to the stripe window 45 a is etched away with phosphoric acid until reaching the surface of the first p-AlGaInP cladding layer 43 to form a stripe groove 44 a in the n-AlInP block layer 44. To do. Thereafter, the SiO ₂ film 45 is removed by etching with a hydrofluoric acid-based etchant. Next, the thickness of the second p-AlGaInP cladding layer 46 for example 0.5 [mu] m, grown p-GaAs contact layer 47 to a thickness of, for example, 0.5 [mu] m, the SiO ₂ film 48 for example on the 0 A thickness of 5 μm is formed (FIG. 10).

Next, the SiO ₂ film 48 is left only in the portion corresponding to the red LD element (width, for example, 130 μm) and the blue LD element portion continuous thereto, and the other SiO ₂ film 48 is removed with a hydrofluoric acid-based etchant (FIG. 11). Thereafter, using the remaining SiO ₂ film 481 as a mask, the p-GaAs contact layer 47, the second p-AlGaInP cladding layer 46, the n-AlInP blocking layer 44, the first p-AlGaInP cladding layer 43, the active layer 42, and The n-AlGaInP cladding layer 41 is partially removed with phosphoric acid, and the surface of the n-GaAs substrate 31 is partially exposed. Thus, under the mask 481, the p-GaAs contact layer 471, the second p-AlGaInP cladding layer 461, the n-AlInP blocking layer 441, the first p-AlGaInP cladding layer 431, the active layer 421, and the n-AlGaInP cladding. Layer 411 remains (FIG. 12).

Next, an infrared LD element is formed. That is, on the entire surface of the structure shown in FIG. 12, the n-AlGaAs cladding layer 49 has a thickness of 1.5 μm, for example, and the TQW active layer 50 made of AlGaAs has a total thickness of 40 nm, for example. The layer 51 is grown to a thickness of 0.3 μm, for example, and the n-AlGaAs block layer 52 is grown to a thickness of 0.5 μm, for example, and the SiO ₂ film 53 is formed thereon to a thickness of 0.5 μm, for example (see FIG. 13). Next, a stripe window 53a having a width of 3 μm, for example, is formed in the SiO ₂ film 53 (FIG. 14). Next, the n-AlGaAs block layer 52 corresponding to the stripe window 53a is removed by etching with a mixed solution of sulfuric acid and hydrogen peroxide until reaching the surface of the p-AlGaAs cladding layer 51, and then the SiO ₂ film 53 is removed by hydrofluoric acid. Etching away with a system etchant. Subsequently, the thickness of the second p-AlGaAs cladding layer 54 for example 0.5 [mu] m, grown p-GaAs contact layer 55 to a thickness of, for example, 0.5 [mu] m, the SiO ₂ film 56 for example on the 0. A thickness of 5 μm is formed (FIG. 15).

Next, only a portion corresponding to the red LD element (width, eg, 130 μm) 561 is left so that a gap having a width of, eg, 20 μm is formed between the red LD element and the infrared LD element, and the other SiO ₂ film 56 part. Is removed by etching with a hydrofluoric acid-based etchant. Thereafter, using the remaining SiO ₂ film 561 as a mask, the p-GaAs contact layer 55, the second p-AlGaAs cladding layer 54, the n-AlGaAs block layer 52, the first p-AlGaAs cladding layer 51 under the mask 561, The portions of the active layer 50 and the n-AlGaAs cladding layer 49 are left, and the other portions are removed by etching with a mixed solution of sulfuric acid and hydrogen peroxide. In this etching, the semiconductor layer located under the SiO ₂ film 481 is not etched. Thus, the n-AlGaAs cladding layer 491, the active layer 501, the first p-AlGaAs cladding layer 511, the n-AlGaAs block layer 521, and the second p-AlGaAs cladding layer 541 remaining under the mask 561 are provided. A red LD element structure having a p-GaAs contact layer 551 is formed (FIG. 17).

Thereafter, only a portion (width, for example, 130 μm) 482 corresponding to the infrared LD element is left so that the distance between the infrared LD and the blue LD is, for example, 20 μm, and the other SiO ₂ film 481 is removed with a hydrofluoric acid-based etching agent. Etching is removed (FIG. 18). Using the remaining SiO ₂ film 482 as a mask, the p-GaAs contact layer 471, the second p-AlGaInP cladding layer 461, the n-AlInP block layer 441, the first p-AlGaInP cladding layer 431, the active layer 421, and the n− The AlGaInP cladding layer 411 is removed by etching using phosphoric acid. In this etching, the semiconductor layer located under the SiO ₂ film 401 is not etched. The n-AlGaInP cladding layer 412, the active layer 422, the first p-AlGaInP cladding layer 432, the n-AlInP blocking layer 442, and the second p-AlGaInP cladding layer 462 remaining under the mask 482 are left. A red LD element structure having a p-GaAs contact layer 472 is obtained (FIG. 19).

Next, after the SiO ₂ films 401, 482 and 561 on each laser element structure are removed by etching, an SiO ₂ film 57 is formed on the entire surface of the structure shown in FIG. 19 (FIG. 20). Next, only the SiO ₂ film 57 portion on the top of each laser element is removed by etching (FIG. 21). Thereafter, nickel is sequentially formed on the entire surface to a thickness of 0.1 μm, for example, and gold is formed to a thickness of 1 μm, for example, by vacuum evaporation to form an electrode layer 58 having a Ni / Au laminated structure (FIG. 22). Next, the electrode layer 58 and the SiO ₂ film 57 on each laser element structure are removed by etching. In this way, electrodes 581, 582, and 583 having a Ni / Au laminated structure are formed on each laser element (FIG. 23).

  Next, after polishing the back surface of the n-GaAs substrate 31 so that the thickness of the substrate 31 becomes 100 μm, an electrode 59 of Au—Ge—Ni alloy is vacuum-deposited to a thickness of 1 μm (FIG. 24). A Cu heat sink 60 is bonded to the electrode 59, a cathode lead wire (copper wire) 61 is attached to the Cu heat sink 60, and an anode lead wire (copper wire) 621 on each of the electrodes 581 to 583 of each LD element. 623 is attached (FIG. 25). Thus, a three-wavelength semiconductor laser array device is completed. FIG. 26 shows an example of the actual size and shape of the three-wavelength semiconductor laser array device thus obtained. On the n-GaAs substrate 100 having a width of 500 μm and a length of 300 μm, a blue LD element BLD, a red LD element RLD, and an infrared LD element IRLD are formed in stripes with a width of 130 μm and a length of 300 μm, respectively, and their spacing Is 20 μm and each height is 4 μm.

1 is a schematic sectional view showing a buffer layer having a superlattice structure according to a first embodiment of the present invention. The schematic sectional drawing which shows the buffer layer which concerns on the 2nd aspect of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic sectional drawing which shows an example of the manufacturing method of the three wavelength semiconductor laser array apparatus of this invention. The schematic perspective view which shows an example of the dimension of the three wavelength semiconductor laser array apparatus of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 ... Semiconductor substrate 12, 32, 321 ... Buffer layer 33 ... 1st n-InAlGaN clad layer 34, 341 ... InGaN active layer 35 ... 1st p-InAlGaN clad layer 36 ... n-InAlGaN block layer 37, 40, 45, 48, 53, 56, 57 ... SiO ₂ film 38 ... Second p-InAlGaN cladding layer 39 ... p-GaN contact layer 41 ... n-AlGaInP cladding layer 42 ... TQW active layer 43 made of GaInP 43 ... First p-AlGaInP cladding layer 44 ... n-AlInP blocking layer 46 ... second p-AlGaInP cladding layer 47 ... p-GaAs contact layer 49 ... n-AlGaAs cladding layer 50 ... TQW active layer 51 made of AlGaAs 51 ... first p -AlGaAs cladding layer 52 ... n-AlGaAs bromine Layer 54 ... second p-AlGaAs cladding layer 55 ... p-GaAs contact layer 58 ... electrode layer 581 to 583 ... anode lead wire 59 ... Au-Ge-Ni alloy electrode 60 ... Cu heat sink 61 ... cathode lead wire 621 ~ 623 ... Anode lead wire

Claims (6)

  In a three-wavelength semiconductor laser array device in which a red laser element, an infrared laser element, and a blue laser element are monolithically integrated on a semiconductor substrate, an I-III-VI group compound is provided between the semiconductor substrate and the blue laser element. A three-wavelength semiconductor laser comprising a buffer layer including at least one compound semiconductor selected from the group consisting of a semiconductor, a group II-III-VI compound semiconductor, and a group II-III-V compound semiconductor Array device.   The three-wavelength semiconductor laser array device according to claim 1, wherein the semiconductor substrate contains silicon or GaAs.   The buffer layer is a superlattice structure of at least two compound semiconductors selected from the group consisting of a group I-III-VI compound semiconductor, a group II-III-VI compound semiconductor, and a group II-III-V compound semiconductor; 3. The three-wavelength semiconductor laser array device according to claim 1, wherein the three-wavelength semiconductor laser array device has a superlattice structure of the compound semiconductor and the group III nitride semiconductor.   The buffer layer is an alternating layer of two kinds of compound semiconductors selected from the group consisting of a group I-III-VI compound semiconductor, a group II-III-VI compound semiconductor, and a group II-III-V compound semiconductor, or The compound semiconductor and the group III nitride semiconductor include alternating layers, and one compound semiconductor of the alternating layer has a lattice constant close to that of the semiconductor substrate, and the other compound semiconductor includes a material and a lattice of the blue laser element. The constants are close, and the thickness of the one compound semiconductor layer decreases from the semiconductor substrate toward the blue laser element, and the thickness of the other compound semiconductor layer decreases from the blue laser element to the semiconductor substrate. The three-wavelength semiconductor laser array device according to claim 1, wherein the three-wavelength semiconductor laser array device has a structure that becomes thinner as a result. 4. The three-wavelength semiconductor laser array device according to claim 3, wherein the superlattice structure is composed of a combination of CuGaS ₂ and GaAlN, or a combination of CuGaS ₂ and ZnIn ₂ S ₄ . 5. The three-wavelength semiconductor laser array device according to claim 4, wherein the buffer layer is composed of a combination of CuGaS ₂ and GaAlN, or a combination of CuGaS ₂ and ZnIn ₂ S ₄ .

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