JP2005226563A - Vacuum pump device - Google Patents

Vacuum pump device Download PDF

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JP2005226563A
JP2005226563A JP2004036626A JP2004036626A JP2005226563A JP 2005226563 A JP2005226563 A JP 2005226563A JP 2004036626 A JP2004036626 A JP 2004036626A JP 2004036626 A JP2004036626 A JP 2004036626A JP 2005226563 A JP2005226563 A JP 2005226563A
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Japan
Prior art keywords
ejector
atmosphere
tank
circulation pump
actuator
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JP2004036626A
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JP4550444B2 (en
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Yusuke Shimizu
祐介 清水
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TLV Co Ltd
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TLV Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a vacuum pump device capable of preventing a water hammer phenomenon generated inside an ejector when stopping a circulating pump. <P>SOLUTION: The ejector 1, a tank 2 and the circulating pump 3 are successively connected. An atmosphere suction valve 9 is installed in a suction chamber 8 of the ejector 1 via a conduit 10 and a branch pipe 11. The atmosphere suction valve 9 is provided with an atmosphere passing port 13 for connecting an actuator 14 and communicating with the inside of the ejector 1, and an atmosphere suction port 15 communicating with the atmosphere. When driving of the circulating pump 3 is stopped, since the inside of the ejector 1 is a vacuum state, the water hammer phenomenon is not caused inside the ejector 1 by sucking the atmosphere from the atmosphere suction valve 9. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、エゼクタとタンクと循環ポンプを組み合わせた真空ポンプ装置に関し、特に、循環ポンプの停止時にエゼクタ内部で発生する水撃現象、すなわち、液体がエゼクタ内部の壁面等に激しく衝突して衝撃や振動を発生する現象、を防止することのできる真空ポンプ装置に関する。   The present invention relates to a vacuum pump device in which an ejector, a tank, and a circulation pump are combined, and in particular, a water hammer phenomenon that occurs inside the ejector when the circulation pump is stopped, i.e. The present invention relates to a vacuum pump device that can prevent a phenomenon of generating vibration.

真空ポンプ装置は、大気圧以下の真空状態の流体を吸引することができるもので、タンク内の流体を循環ポンプでエゼクタに供給してやることによって、エゼクタで真空吸引力を発生して流体を吸引するものである。   The vacuum pump device is capable of sucking a fluid in a vacuum state below atmospheric pressure. By supplying the fluid in the tank to the ejector with a circulation pump, the ejector generates a vacuum suction force to suck the fluid. Is.

このエゼクタとタンクと循環ポンプを組み合わせた真空ポンプ装置においては、循環ポンプの停止時にタンク内の液体がエゼクタ内へ逆流することによる水撃現象に伴う騒音と衝撃を発生する問題があった。   In the vacuum pump device in which the ejector, the tank, and the circulation pump are combined, there is a problem of generating noise and impact due to a water hammer phenomenon caused by the liquid in the tank flowing back into the ejector when the circulation pump is stopped.

水撃現象は、循環ポンプでタンク内の液体をエゼクタへ供給して、エゼクタ内を真空状態に維持している時に、循環ポンプを停止した瞬間にエゼクタ内へ液体が逆流して発生するもので、液体がエゼクタ内部で激しく衝突することによる衝撃や振動を伴う。
特開平８−３１２６００号公報 The water hammer phenomenon occurs when the liquid in the tank is supplied to the ejector by the circulation pump and the ejector is kept in a vacuum state, and the liquid flows back into the ejector at the moment when the circulation pump is stopped. , Accompanied by shock and vibration due to the violent collision of liquid inside the ejector.
JP-A-8-312600

解決しようとする問題点は、循環ポンプの停止時にエゼクタ内部で発生する水撃現象を防止して振動や騒音を発生することのない真空ポンプ装置を提供することである。   The problem to be solved is to provide a vacuum pump device that prevents the water hammer phenomenon that occurs inside the ejector when the circulation pump is stopped and does not generate vibration or noise.

本発明は、エゼクタとタンクと循環ポンプを連通して、タンク内の流体を循環ポンプの駆動によってエゼクタへ供給するものにおいて、循環ポンプの駆動流体が供給されている場合はアクチュエータを介して閉弁し、駆動流体が供給されていない場合はアクチュエータを介して開弁する大気吸入弁を取り付けたものである。   The present invention communicates an ejector, a tank, and a circulation pump, and supplies fluid in the tank to the ejector by driving the circulation pump. When the drive fluid for the circulation pump is supplied, the valve is closed via the actuator. When the driving fluid is not supplied, an atmospheric intake valve that opens via an actuator is attached.

本発明の真空ポンプ装置は、循環ポンプから駆動流体が供給されている場合はアクチュエータを介して閉弁し、一方、駆動流体が供給されていない場合はアクチュエータを介して開弁する大気吸入弁を取り付けたことにより、この開弁した大気吸入弁からエゼクタ内へ大気が吸引されて、エゼクタ内部の真空状態が解除されることによって、液体のエゼクタ内部への逆流が防止され水撃現象を生じることがない。   The vacuum pump device according to the present invention includes an atmospheric intake valve that closes via an actuator when the driving fluid is supplied from the circulation pump, and opens via the actuator when the driving fluid is not supplied. As a result of the attachment, the air is sucked into the ejector from the opened air intake valve, and the vacuum state inside the ejector is released. There is no.

本発明は、大気吸入弁をエゼクタへ直接に、あるいは、エゼクタの近傍に取り付けることができる。   In the present invention, the air intake valve can be attached directly to the ejector or in the vicinity of the ejector.

図１において、円筒状のタンク２に取り付けたエゼクタ１と、タンク２下部から管路４を介して接続した循環ポンプ３、及び、循環ポンプ３の上部吐出口とエゼクタ１の入口５とを連通する管路６とで真空ポンプ装置を構成する。   In FIG. 1, an ejector 1 attached to a cylindrical tank 2, a circulation pump 3 connected from the lower part of the tank 2 via a pipeline 4, and an upper discharge port of the circulation pump 3 and an inlet 5 of the ejector 1 communicate with each other. A vacuum pump device is constituted by the pipe line 6 to be operated.

エゼクタ１は、液体入口５と吸込室８とディフューザ部７とで構成する。ディフューザ部７はタンク２の内部に配置する。吸込室８の側面には、吸引すべき流体源と連通する管路１０を接続する。管路１０からは主に蒸気を含む気体と水等の液体との混合流体が流下してくる。   The ejector 1 includes a liquid inlet 5, a suction chamber 8, and a diffuser portion 7. The diffuser unit 7 is disposed inside the tank 2. A pipe line 10 communicating with a fluid source to be sucked is connected to the side surface of the suction chamber 8. A mixed fluid of a gas containing steam and a liquid such as water mainly flows down from the pipe 10.

管路１０に分岐管１１を介して大気吸入弁９を取り付ける。大気吸入弁９は、開閉弁の右側にアクチュエータ１４を接続して、このアクチュエータ１４の上下方向の動きに応じて接続した開閉弁が開弁あるいは閉弁するものである。アクチュエータ１４の一端に循環ポンプ３からの駆動流体を導入する駆動流体導入管１２を接続する。アクチュエータ１４の内部には図示しないピストンを上下動自在に配置すると共に、ピストンの下部には同じく図示しないコイルバネを配置する。   An atmospheric intake valve 9 is attached to the pipe line 10 via the branch pipe 11. The air intake valve 9 has an actuator 14 connected to the right side of the on-off valve, and the on-off valve connected according to the vertical movement of the actuator 14 opens or closes. A driving fluid introduction pipe 12 that introduces the driving fluid from the circulation pump 3 is connected to one end of the actuator 14. A piston (not shown) is arranged inside the actuator 14 so as to be movable up and down, and a coil spring (not shown) is also arranged below the piston.

開閉弁に大気吸引口１５と大気通過口１３を設ける。大気通過口１３の下部に分岐管１１を接続し、大気吸引口１５の上部に大気管１６を接続する。循環ポンプ３が駆動されて駆動流体導入管１２からアクチュエータ１４へ駆動流体が導入されると、アクチュエータ１４内部のピストンが下方へ変位することにより開閉弁は閉弁する。 An air suction port 15 and an air passage port 13 are provided in the opening / closing valve. The branch pipe 11 is connected to the lower part of the atmospheric passage port 13, and the atmospheric pipe 16 is connected to the upper part of the atmospheric suction port 15. When the circulating pump 3 is driven and driving fluid is introduced from the driving fluid introduction pipe 12 to the actuator 14, the piston inside the actuator 14 is displaced downward to close the on-off valve.

一方、循環ポンプ３が停止されてアクチュエータ１４への駆動流体の供給が停止されると、コイルバネの弾性力によって開閉弁は開弁する。このように開閉弁が開弁すると大気吸引口１５から大気を吸引して、分岐管１１を介してエゼクタ１へ大気が供給され、内部の真空状態が解除されると共に、タンク２内の液体のエゼクタ１内部への逆流が防止され水撃現象を生じることがない。 On the other hand, when the circulation pump 3 is stopped and the supply of the driving fluid to the actuator 14 is stopped, the on-off valve is opened by the elastic force of the coil spring. When the on-off valve is opened as described above, the atmosphere is sucked from the atmosphere suction port 15 and the atmosphere is supplied to the ejector 1 through the branch pipe 11 to release the internal vacuum state, and the liquid in the tank 2 is discharged. Backflow into the ejector 1 is prevented and water hammer does not occur.

タンク２の上部には不凝縮気体排出及びオーバーフロー管２２を接続する。タンク２の下部にはタンク２内の液体排出管２３を接続する。 A non-condensable gas discharge and overflow pipe 22 is connected to the upper part of the tank 2. A liquid discharge pipe 23 in the tank 2 is connected to the lower part of the tank 2.

循環ポンプ３を駆動してタンク２内の液体をエゼクタ１へ供給すると、吸込室８で吸引力を生じて管路１０から蒸気を含む流体を吸引して、両方の流体は混合されながらディフューザ７内を流下してタンク２内に溜まる。   When the circulation pump 3 is driven to supply the liquid in the tank 2 to the ejector 1, a suction force is generated in the suction chamber 8 to suck a fluid containing steam from the pipe 10, and both the fluids are mixed and the diffuser 7. It flows down inside and accumulates in the tank 2.

駆動していた循環ポンプ３を停止した場合、吸込室８内とディフューザ７内は真空状態であるために、大気吸入弁９を通して大気が吸引されて大気圧状態となる。このように大気をエゼクタ１内に吸引することによって、タンク２内の液体がディフューザ７の下端開口から逆流してエゼクタ１内で衝撃的な水撃現象を生じることを防止する。   When the circulating pump 3 that has been driven is stopped, the inside of the suction chamber 8 and the diffuser 7 are in a vacuum state, so that the atmosphere is sucked through the atmosphere suction valve 9 to the atmospheric pressure state. By sucking the air into the ejector 1 in this way, the liquid in the tank 2 is prevented from flowing backward from the lower end opening of the diffuser 7 and causing a shocking water hammer phenomenon in the ejector 1.

大気吸入弁から大気を吸入して真空状態を解除することによって、循環ポンプの停止時にエゼクタ内部で発生する水撃現象を防止することができる。   By releasing the vacuum state by sucking air from the air suction valve, it is possible to prevent the water hammer phenomenon that occurs inside the ejector when the circulation pump is stopped.

本発明の真空ポンプ装置の実施例を示す構成図。The block diagram which shows the Example of the vacuum pump apparatus of this invention.

符号の説明Explanation of symbols

１ エゼクタ
２ タンク
３ 循環ポンプ
７ ディフューザ
８ 吸込室
９ 大気吸入弁
１３ 大気通過口
１４ アクチュエータ
１５ 大気吸引口
DESCRIPTION OF SYMBOLS 1 Ejector 2 Tank 3 Circulation pump 7 Diffuser 8 Suction chamber 9 Air intake valve 13 Air passage port 14 Actuator 15 Air suction port

Claims (1)

エゼクタとタンクと循環ポンプを連通して、タンク内の流体を循環ポンプの駆動によってエゼクタへ供給するものにおいて、循環ポンプの駆動流体が供給されている場合はアクチュエータを介して閉弁し、駆動流体が供給されていない場合はアクチュエータを介して開弁する大気吸入弁を取り付けたことを特徴とする真空ポンプ装置。
In the case where the ejector, the tank, and the circulation pump are connected to supply the fluid in the tank to the ejector by driving the circulation pump. A vacuum pump device comprising an atmospheric intake valve that opens through an actuator when no gas is supplied.
JP2004036626A 2004-02-13 2004-02-13 Vacuum pump device Expired - Lifetime JP4550444B2 (en)

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Application Number Priority Date Filing Date Title
JP2004036626A JP4550444B2 (en) 2004-02-13 2004-02-13 Vacuum pump device

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JP2004036626A JP4550444B2 (en) 2004-02-13 2004-02-13 Vacuum pump device

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JP2005226563A true JP2005226563A (en) 2005-08-25
JP4550444B2 JP4550444B2 (en) 2010-09-22

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008196435A (en) * 2007-02-15 2008-08-28 Tlv Co Ltd Vacuum pump device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60175800A (en) * 1984-02-21 1985-09-09 Miyoutoku:Kk Ejector pump
JPS63115600U (en) * 1987-01-21 1988-07-26
JPH06330900A (en) * 1993-05-27 1994-11-29 Orii:Kk Vacuum generator
JPH07253100A (en) * 1994-03-15 1995-10-03 Tlv Co Ltd Ejector vacuum pump
JP2003206900A (en) * 2002-01-15 2003-07-25 Tlv Co Ltd Vacuum pump apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60175800A (en) * 1984-02-21 1985-09-09 Miyoutoku:Kk Ejector pump
JPS63115600U (en) * 1987-01-21 1988-07-26
JPH06330900A (en) * 1993-05-27 1994-11-29 Orii:Kk Vacuum generator
JPH07253100A (en) * 1994-03-15 1995-10-03 Tlv Co Ltd Ejector vacuum pump
JP2003206900A (en) * 2002-01-15 2003-07-25 Tlv Co Ltd Vacuum pump apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008196435A (en) * 2007-02-15 2008-08-28 Tlv Co Ltd Vacuum pump device

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