JP2005224902A - Substrate processing method of base material surface, base material having substrate processed surface by this method and product - Google Patents

Substrate processing method of base material surface, base material having substrate processed surface by this method and product Download PDF

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JP2005224902A
JP2005224902A JP2004036734A JP2004036734A JP2005224902A JP 2005224902 A JP2005224902 A JP 2005224902A JP 2004036734 A JP2004036734 A JP 2004036734A JP 2004036734 A JP2004036734 A JP 2004036734A JP 2005224902 A JP2005224902 A JP 2005224902A
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base material
treatment
primary
blast
diameter
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JP4392719B2 (en
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Seiji Kataoka
征二 片岡
Akio Moto
昭夫 基
Kenji Tamaoki
賢次 玉置
Mitsugi Umemura
貢 梅村
Kyoichi Iwata
恭一 岩田
Tokuyuki Kodama
徳之 児玉
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Sintokogio Ltd
Tokyo Metropolitan Government
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Tokyo Metropolitan Government
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate processing method of a base material surface capable of forming high adhesive force between painting or various coatings and a base material, preventing growth of a crack and providing a favorable membrane at low processing cost, the base material having a substrate processed surface by this method and a product. <P>SOLUTION: The surface including primary and secondary surfaces 1 and a secondary blast surface 2 is made by applying primary blast treatment on the base material surface on which the painting or the coating is applied, thereafter, cutting it off by a polishing method so that a part of a dimple of blasting remains and treating it by a blasting material finer than a blasting material used for the primary blast treatment as the secondary blast treatment. It is possible to make the primary blast treatment shot peening of more than full coverage. Especially it is suitable as the substrate processing for diamond like carbon film coating. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、塗料や母材と異なる物質をイオンプレーテイング法、スパッタリング法、イオン蒸着法などの任意の方法により、母材表面に塗装或いはコーテイングする場合の母材表面の下地処理方法及びこの方法により下地処理された表面を持つ母材及び製品に関するものである。   The present invention relates to a base material surface treatment method when a material different from a coating material or a base material is coated or coated on the surface of the base material by an arbitrary method such as an ion plating method, a sputtering method, or an ion deposition method, and the method The present invention relates to a base material and a product having a surface that has been surface-treated.

塗料や母材と異なる物質を、イオンプレーテイング法、スパッタリング法、イオン蒸着法、あるいはその他の方法により金属製の母材表面に塗装或いはコーテイングする場合には、母材側に下地処理が施される。従来一般には、ブラスト処理により母材表面の錆、付着物、酸化スケールなどを除去するとともに、母材表面に塗装或いはコーテイングに適合した表面粗し、生地調整をする。このブラスト処理は一般にISO 8504−1、JSI Z0310で規定されている表面清浄度のほか、表面粗さで加工程度を表示している場合が多いが、処理目的により発注者と加工者が処理の都度設定しているのが実情である。   When a material different from paint or base material is coated or coated on the surface of a metal base material by ion plating, sputtering, ion vapor deposition, or other methods, the base material side is subjected to ground treatment. The Conventionally, rusting, deposits, oxide scales, and the like on the surface of the base material are generally removed by blasting, and the surface of the base material is roughened to suit the painting or coating, and the fabric is adjusted. In this blasting process, in addition to the surface cleanliness generally defined by ISO 8504-1 and JSI Z0310, the degree of processing is often indicated by surface roughness. The actual situation is set each time.

しかし塗装やコーテイングをする母材表面について、単に粗さの大きさ或いは粗さの範囲を示すのみでは目的とする母材と塗装の密着力、塗膜の寿命は得られない。また従来から、これらの密着力を上げるため投射材の形状として鋭角を成したものが使用されるが、一般には表面粗さを大きくするほど塗料或いはコーテイング材料が多く必要で、処理コストが高いという問題点があった。また、塗料或いはコーテイング材料の皮膜量が少ないと母材側の荒れた表面部上の塗膜或いはコーテイング材の厚みが著しく薄く荒れた部分を覆うことができず、皮膜の寿命を短かくするという問題点があった。   However, for the surface of the base material to be coated or coated, the desired adhesion between the base material and the coating and the life of the coating film cannot be obtained simply by indicating the size of the roughness or the range of the roughness. Conventionally, in order to increase the adhesion, those having a sharp angle as the shape of the projection material are used, but generally, the larger the surface roughness, the more paint or coating material is required, and the processing cost is high. There was a problem. In addition, if the coating amount of the coating material or coating material is small, the coating film or coating material on the rough surface portion on the base material side is extremely thin and cannot cover the rough portion, which shortens the life of the coating film. There was a problem.

そこで従来から単純なブラスト処理ではなく、投射材の種類を替えて複数回のブラスト処理を行うことが行われている。例えば特許文献1には、アルミニウム合金からなる母材表面に耐磨耗性材料を溶射するための母材の下地処理法として、硬質の投射材を用いた一次ブラスト処理を行った後に、低比重で粒径の細かい投射材による二次処理を行うことが記載されている。しかしこの方法による下地処理面も図4(ロ)に示すように鋭角状の先端部分が残るため、コーテイング膜が厚い場合はともかく、コーテイング膜がダイヤモンドライクカーボン膜のように薄い場合には、鋭角状の先端部がコーテイング膜にクラックを生じさせるおそれがある。   Therefore, conventionally, not a simple blasting process but a blasting process is performed a plurality of times by changing the type of the projection material. For example, Patent Document 1 discloses a low specific gravity after performing a primary blasting process using a hard projection material as a base material base treatment method for spraying a wear-resistant material onto a base material surface made of an aluminum alloy. The secondary treatment with a projection material having a fine particle diameter is described. However, as shown in FIG. 4 (b), the ground-treated surface by this method also has an acute-angled tip portion, so that when the coating film is thin, such as a diamond-like carbon film, the acute angle is not necessary. There is a risk that the tip of the shape will cause cracks in the coating film.

なお、ダイヤモンドライクカーボン膜(DLC膜)は特許文献2に示された潤滑性と硬度に優れた炭素膜であり、工具表面に形成することによって潤滑剤を用いないドライな塑性加工を可能とする技術として注目されている。しかしダイヤモンドライクカーボン膜は金属母材との密着性に問題があり、非特許文献にはブラスト処理による下地処理によって密着性が向上することが記載されているものの、密着性の向上とクラック発生防止とを両立できる下地処理法は未だ確立されていない。
特許第3430427号公報 特開2000−96233号公報 「材料試験技術」Vol.4、No.2,11〜15頁、「金型用DLC膜の密着性評価法」2003年4月
The diamond-like carbon film (DLC film) is a carbon film excellent in lubricity and hardness as disclosed in Patent Document 2, and enables dry plastic processing without using a lubricant by forming it on the tool surface. It is attracting attention as a technology. However, the diamond-like carbon film has a problem with the adhesion to the metal base material, and non-patent literature describes that the adhesion is improved by the ground treatment by blasting, but the adhesion is improved and cracks are prevented. A ground treatment method that can satisfy both of these requirements has not yet been established.
Japanese Patent No. 3430427 JP 2000-96233 A “Material Testing Technology” Vol.4, No.2, pp.11-15, “Adhesion Evaluation Method for DLC Films for Molds” April 2003

本発明は上記した従来の問題点を解決して、塗装あるいは各種コーテイングをする母材の表面を活性化させ、塗装あるいは各種コーテイングと母材間に高い密着力を形成するとともに、クラックの発生を防止し、低処理コストで良好な皮膜を提供することができる母材表面の下地処理方法及びこの方法により下地処理された表面を持つ母材及び製品を提供することを目的としてなされたものである。   The present invention solves the above-mentioned conventional problems, activates the surface of the base material to be coated or coated, forms a high adhesion between the coated or various coating and the base material, and generates cracks. The present invention has been made for the purpose of providing a base material surface preparation method capable of preventing and providing a good film at a low processing cost, and a base material and product having a surface treated by this method. .

上記の課題を解決するためになされた請求項1の発明は、塗装或いはコーテイングが施される母材表面の下地処理方法であって、母材表面に一次ブラスト処理として0.3〜2.5mm径の球形状の投射材或いは多角形の投射材を投射した後、研磨法でブラストの打痕の深さの一部が残るように削り落し、さらに二次ブラスト処理として一次ブラスト処理に使用した投射材より細かい投射材で処理し、一次、二次ブラスト面と二次ブラスト面とを混在させた表面とすることを特徴とするものである。   The invention of claim 1, which has been made to solve the above-mentioned problems, is a base material surface treatment method for coating or coating, wherein the base material surface has a primary blast treatment of 0.3 to 2.5 mm. After projecting a spherical projecting material or polygonal projecting material, it was scraped off by a polishing method so that a part of the depth of the dent of the blast remained, and further used as a primary blasting process as a secondary blasting process. It is characterized in that the surface is processed with a projection material finer than the projection material, and the primary and secondary blast surfaces are mixed with the secondary blast surface.

また同一の課題を解決するためになされた請求項2の発明は、コーテイングが施される母材表面の下地処理方法であって、母材表面に一次ブラスト処理として0.8mm径以下0.2mm径以上の球形状の投射材或いは多角形の投射材を投射した後、研磨法でブラストの打痕の深さの一部が残るよう削り落し、二次ブラストとして一次ブラストに使用した投射材より細かい投射材で処理し、一次、二次ブラスト面と二次ブラスト面とを混在させた表面とすることを特徴とするものである。   The invention of claim 2, which was made to solve the same problem, is a ground surface treatment method for a base material surface to be coated, and the base material surface has a diameter of 0.8 mm or less as a primary blast treatment of 0.2 mm or less. After projecting a spherical projection material or polygonal projection material that is larger than the diameter, it is scraped off by the polishing method so that a part of the depth of the blast mark remains, and from the projection material used for the primary blast as the secondary blast The surface is treated with a fine projection material to form a surface in which primary, secondary blast surfaces and secondary blast surfaces are mixed.

また同一の課題を解決するためになされた請求項3の発明は、コーテイングが施される母材表面の下地処理方法であって、母材表面に一次ブラスト処理として0.8mm径以下0.2mm径以上の球形状の投射材或いは多角形の投射材を投射し、フルカバレージ以上の投射処理にてショットピーニングをし、その後、研磨法でショットピーニング後の打痕の深さの一部が残るよう削り落し、二次処理として一次処理に使用した投射材より細かい投射材でブラスト処理し、一次のショットピーニング処理面に二次ブラスト処理を施した表面と、二次ブラスト面とを混在させた表面とすることを特徴とするものである。   The invention of claim 3, which was made to solve the same problem, is a ground surface treatment method for a base material surface to be coated, and the base material surface has a diameter of 0.8 mm or less as a primary blast treatment of 0.2 mm or less. A spherical projection material or polygonal projection material of a diameter or larger is projected, shot peening is performed by a projection process of full coverage or more, and then a part of the depth of the dent after shot peening is left by a polishing method. The surface of the primary shot peening surface was subjected to secondary blasting, and the secondary blast surface was mixed. It is characterized by having a surface.

さらに同一の課題を解決するためになされた請求項4の発明は、コーテイングが施される母材表面の下地処理方法であって、母材表面に一次処理として1.2mm径以下0.2mm径以上の多角形の投射材を投射し、フルカバレージ以上の投射処理にてショットピーニングをし、その後、研磨法でショットピーニング後の打痕の深さの一部が残るよう削り落し、二次処理として一次処理に使用した投射材より細かい多角形状の投射材0.2mm径以下で下地強化処理をし、一次のショットピーニング処理面に二次ブラスト処理面が混在した表面と、二次ブラスト面とを混在させた表面とすることを特徴とするものである。請求項5の発明は請求項3、請求項4の何れかの方法がダイヤモンドライクカーボン(DLC)をコーテイングするためになされることを特徴とするものである。   Furthermore, the invention of claim 4 made to solve the same problem is a method for ground treatment of a base material surface on which a coating is applied, and the primary treatment of the base material surface is a diameter of 1.2 mm or less and a diameter of 0.2 mm or less. The above-mentioned polygonal projection material is projected, shot peening is performed by a projection process of full coverage or more, and then the grinding process is used to scrape off a part of the depth of the dent after shot peening. The surface of the primary shot peening treatment surface mixed with the secondary blast treatment surface, and the secondary blast treatment surface It is characterized by having a surface mixed with. The invention of claim 5 is characterized in that the method of claim 3 or 4 is made for coating diamond-like carbon (DLC).

なお請求項6の発明は母材を対象とし、請求項1〜請求項4の何れかの方法により下地処理された表面を持つことを特徴とするものであり、請求項7の発明は金属或いはセラミックス製品或いはセラミックス複合製品を対象とし、請求項5の方法により下地処理し、その処理面にダイヤモンドライクカーボン(DLC)をコーテイングした表面を持つことを特徴とするものである。   The invention of claim 6 is directed to a base material, and has a surface that has been surface-treated by any of the methods of claims 1 to 4, and the invention of claim 7 is a metal or A ceramic product or a ceramic composite product is a target, and a surface treatment is performed by the method of claim 5, and the treated surface has a surface coated with diamond-like carbon (DLC).

上記の本発明によれば、母材表面に塗装或いはDLC膜はじめ各種コーテイング膜を施工するにあたり、予め母材の表面に微細かつ密着性を考慮したブラスト肌を得られるよう下地強化の処理を行うので、その表面に成膜される塗装や各種コーテイング膜と母材との密着性は著しく向上し、過酷な使用条件での使用に耐え得る皮膜加工ができる。また本発明の方法によるブラスト処理面は、主として一種類の投射材を使用して凹凸を形成した従来のブラスト処理面に比較し、一次処理後研磨加工を加え更に二次処理として一次処理に使用した投射材より細かい投射材を使用して全面に及ぶ表面粗さを小さくしているため、塗装或いはコーテイング膜にクラックを生じさせないうえ、塗装或いはコーテイング膜の絶対量も少なくでき、塗料或いは成膜材料にかかる材料費用も少なくできる。   According to the above-mentioned present invention, when applying various coating films such as coating or DLC film on the surface of the base material, the surface of the base material is preliminarily treated so as to obtain a fine and blasted skin in consideration of adhesion. Therefore, the adhesion between the coating formed on the surface and various coating films and the base material is remarkably improved, and a film processing that can withstand use under severe use conditions can be achieved. In addition, the blasted surface by the method of the present invention is used for the primary treatment as a secondary treatment by adding polishing after the primary treatment as compared to the conventional blasted surface in which irregularities are mainly formed using one type of projection material. Since the surface roughness over the entire surface is reduced by using a finer projection material than the applied projection material, cracks are not generated in the coating or coating film, and the absolute amount of the coating or coating film can be reduced. Material costs for the material can be reduced.

そのほか、この処理方法は簡便な加工法であり、製造管理方法も簡単ということから製造費全体も安価になる。以上のように本発明によれば、コーテイング品質が高く、製造にかかる費用も安価になるという優れた効果が得られる。特にプレス加工用の金型や工具は、高荷重、高面圧下で使用されるため、使用条件にあわせ各種コーテイング膜が選択、適用されているが繰返しの使用に耐えられず、寿命が短いという問題があったが、本発明の処理方法で製造された部品を適用することでこれらの問題を解決することができる。   In addition, this processing method is a simple processing method, and the manufacturing management method is also simple, so that the entire manufacturing cost is reduced. As described above, according to the present invention, it is possible to obtain excellent effects that the coating quality is high and the manufacturing cost is low. In particular, molds and tools for press work are used under high loads and high surface pressures, so various coating films are selected and applied according to the usage conditions, but they cannot withstand repeated use and have a short life. Although there were problems, these problems can be solved by applying the parts manufactured by the processing method of the present invention.

請求項1の発明は、塗装或いはコーテイングが施される母材表面の下地処理方法に関するもので、母材としては用途に応じた金属が選択されるのが普通である。図1のフローに示すように、先ず母材表面に一次ブラスト処理として、0.2〜2.5mm径の球形状の投射材或いは多角形の投射材を投射する。ここで投射材の径を0.2〜2.5mmとしたのは、これよりも小径では母材表面に十分な深さの打痕を与えにくく、逆にこれよりも大径では打痕の深さが過大となってコーテイング膜にクラックを生じさせ易くなるためである。   The invention according to claim 1 relates to a method for treating a base material surface of a base material on which coating or coating is performed. As the base material, it is common to select a metal according to the application. As shown in the flow of FIG. 1, a spherical projection material or a polygonal projection material having a diameter of 0.2 to 2.5 mm is first projected as a primary blast treatment on the surface of the base material. Here, the diameter of the projection material is set to 0.2 to 2.5 mm. When the diameter is smaller than this, it is difficult to give a dent having a sufficient depth on the surface of the base material. This is because the depth becomes excessive and cracks are likely to occur in the coating film.

これにより母材表面に図2(イ)のような断面形状の打痕を与えたうえ、研磨法で一次ブラスト処理による打痕の深さの一部が残るように削り落し、図2(ロ)のような断面形状とし、さらに一次ブラスト処理に使用した投射材より細かい投射材で二次ブラスト処理を行う。これにより図2(ハ)に示すとおり、一次ブラスト面のうえに二次ブラストが施された表面(一次、二次ブラスト面)1と、研磨された平坦面のうえに二次ブラストが施された表面(二次ブラスト面)2とが混在させた表面が得られる。   As a result, a dent having a cross-sectional shape as shown in FIG. 2 (a) is given to the surface of the base material, and the substrate is scraped off so that a part of the depth of the dent by the primary blasting process remains by the polishing method. ), And a secondary blast process is performed with a projection material finer than the projection material used for the primary blast process. As a result, as shown in FIG. 2C, the secondary blast is applied on the surface (primary and secondary blast surface) 1 on which the secondary blast is applied on the primary blast surface and on the polished flat surface. A surface mixed with the surface (secondary blast surface) 2 is obtained.

図3は本発明の方法により得られた下地処理面の断面拡大図である。また図4(イ)は従来の1種類の投射材を使用してブラストした下地処理面、図4(ロ)は形状の異なる投射材を混合させてブラスト処理するか、形状の異なる投射材を一次、二次に分けそれぞれを投射してブラスト処理する従来法で得られた下地処理面の断面拡大図である。従来のブラスト処理による下地処理面はコーテイング膜にクラックを生じさせるような先端部が存在するのに対して、本発明の方法による下地処理面はとがった先端部がなく、しかもコーテイング膜の密着性向上に寄与する深い谷部(A部)を有する点に、特徴がある。さらに、コーテイング膜の種類に合せて研磨の量を変えることも可能である。これによりコーテイング膜毎に最適な下地処理が可能となる。なお、研磨後の表面に残存したブラストによる打痕量はコーテイング膜の種類に合せて選択するが、好ましくはカバレージ5%〜70%、より好ましくは5%〜30%で選択する。   FIG. 3 is an enlarged cross-sectional view of the base treatment surface obtained by the method of the present invention. Fig. 4 (a) shows a ground treated surface blasted using one type of conventional projection material, and Fig. 4 (b) shows a mixture of blast materials with different shapes, or blast treatment with different shapes. It is a cross-sectional enlarged view of a base treatment surface obtained by a conventional method in which primary and secondary are respectively projected and blasted. The surface treated by the conventional blast treatment has a tip that causes cracks in the coating film, whereas the surface treated by the method of the present invention has no sharp tip and the adhesion of the coating film. It is characterized in that it has a deep valley (A part) that contributes to improvement. Further, the amount of polishing can be changed according to the type of coating film. This makes it possible to perform optimum ground processing for each coating film. The amount of dents due to blast remaining on the polished surface is selected according to the type of coating film, but is preferably selected from 5% to 70%, more preferably from 5% to 30%.

請求項2の発明では、図5のフローに示すように、コーテイングが施される母材表面への一次ブラストを、0.8mm径以下0.2mm径以上の球形状の投射材或いは多角形の投射材を用いて行う。その後の工程は請求項1の発明と同様である。このように請求項2の発明では0.8mm径以下0.2mm径以上の投射材を用いることにより、請求項1の発明よりも均一性に優れた下地処理面を得ることができる。   In the invention of claim 2, as shown in the flow of FIG. 5, the primary blast to the surface of the base material to be coated is made of a spherical projection material having a diameter of 0.8 mm or less and a diameter of 0.2 mm or more or a polygonal shape. This is done using a projection material. Subsequent steps are the same as those of the first aspect of the invention. Thus, in the invention of claim 2, by using a projection material having a diameter of 0.8 mm or less and 0.2 mm or more, it is possible to obtain a ground surface that is more uniform than the invention of claim 1.

請求項3の発明では、図6のフローに示すように、コーテイングが施される母材表面に一次ブラスト処理として、0.8mm径以下0.2mm径以上の球形状の投射材或いは多角形の投射材を投射し、フルカバレージ以上の投射処理にてショットピーニングを行う。ここでフルカバレージとは、打痕間に隙間が無い状態で母材の初期の地肌が残っていない加工状態を意味し、フルカバレージに達する加工時間をフルカバレージタイムという。なおカバレージとはブラストの加工程度を示す値であり、母材の加工全面積AとAに含まれる投射材による打痕の総面積Bより、カバレージC=B/A(%)と定義している。図7にカバレージ50%、70%、フルカバレージの表面状態を示す。   In the invention of claim 3, as shown in the flow of FIG. 6, as a primary blast treatment on the surface of the base material to be coated, a spherical projection material having a diameter of 0.8 mm or less and a diameter of 0.2 mm or more or polygonal A projection material is projected, and shot peening is performed by a projection process of full coverage or more. Here, the full coverage means a machining state in which there is no gap between the dents and the initial surface of the base material is not left, and the machining time to reach the full coverage is called a full coverage time. Coverage is a value indicating the degree of blast processing, and is defined as coverage C = B / A (%) from the total processing area A of the base material and the total area B of the dents included in the projection material included in A. Yes. FIG. 7 shows the surface states of 50% coverage, 70% coverage, and full coverage.

特にダイヤモンドライクカーボンを皮膜する母材の下地強化法は一般に母材表面の錆、酸化スケール或いは異物を除去し、表面を活性化させるためにもフルカバレージになるブラスト仕上が必要である。フルカバレージに達しない加工は、錆、酸化スケール或いは異物が残存し、この原因によりダイヤモンドライクカーボン皮膜と母材との密着力が著しく不足することをいままでの実験で実証している。   In particular, the base strengthening method for the base material coated with diamond-like carbon generally requires a blasting finish to provide full coverage in order to remove rust, oxide scale or foreign matter on the base material surface and activate the surface. It has been proved by experiments so far that rust, oxide scale or foreign matters remain in the processing that does not reach full coverage, and the adhesion between the diamond-like carbon film and the base material is significantly insufficient due to this cause.

その後、研磨法でショットピーニング後の打痕の深さの一部が残るよう削り落し、二次処理として一次処理に使用した投射材より細かい投射材でブラスト処理し、前記と同様に一次のショットピーニング処理面に二次ブラスト処理を施した表面と、二次ブラスト面とを混在させた表面を得る。   Then, it is scraped off by a polishing method so that a part of the depth of the dent after shot peening remains, blasted with a projection material finer than the projection material used for the primary treatment as the secondary treatment, and the primary shot as before A surface obtained by mixing a surface subjected to secondary blasting on the peening surface and a secondary blast surface is obtained.

請求項4の発明では、図8のフローに示すように、コーテイングが施される母材表面に一次ブラスト処理として、1.2mm径以下0.2mm径以上の球形状の投射材或いは多角形の投射材を投射し、フルカバレージ以上の投射処理にてショットピーニングを行う。その後、研磨法でショットピーニング後の打痕の深さの一部が残るよう削り落し、二次処理として一次処理に使用した投射材より細かい多角形状の投射材0.2mm径以下で下地強化処理を行う。このように投射材のサイズと形状が請求項3の発明とは異なるが、一次のショットピーニング処理面に二次ブラスト処理面が混在した表面と、二次ブラスト面とを混在させた表面を得ることは請求項3の発明と同様である。   In the invention of claim 4, as shown in the flow of FIG. 8, as a primary blast treatment on the surface of the base material to be coated, a spherical projection material having a diameter of 1.2 mm or less and a diameter of 0.2 mm or more or a polygonal projection material A projection material is projected, and shot peening is performed by a projection process of full coverage or more. After that, it is scraped off by the polishing method so that a part of the depth of the dent after shot peening remains, and the base reinforcement treatment is performed with a diameter of 0.2 mm or less of the polygonal projection material finer than the projection material used for the primary treatment as the secondary treatment I do. Thus, although the size and shape of the projection material are different from those of the invention of claim 3, a surface in which the secondary blast treatment surface is mixed with the primary shot peening treatment surface and the surface in which the secondary blast treatment surface is mixed is obtained. This is the same as the invention of claim 3.

これらの請求項3,4の発明は特にダイヤモンドライクカーボン膜をコーテイングするための下地処理法として適したものであり、次の実施例に示すとおりの優れた成果を得ることができる。   The inventions according to claims 3 and 4 are particularly suitable as a base treatment method for coating a diamond-like carbon film, and can achieve excellent results as shown in the following examples.

以下に、ダイヤモンドライクカーボン(DLC)を皮膜する母材の下地強化法を説明する。母材は高硬度・高靭性冷間工具鋼(ダイス鋼相当品)で表面硬度HRC60〜63のものである。母材への1次ブラストは0.2〜0.3mm径の多角形状の投射材を用い、母材表面の全面に対してブラストし、その打痕量は打痕間に隙間が無い状態で母材の初期の地肌が残っていないフルカバレージ仕上とした。本発明のブラスト時間はフルカバレージタイムの3倍で実施し、前述の表面の活性化と表面あらさ調整を充分行った。   In the following, the method for strengthening the base material of the base material coated with diamond-like carbon (DLC) will be described. The base material is a high hardness and high toughness cold work tool steel (equivalent to die steel) having a surface hardness of HRC 60 to 63. The primary blasting to the base material uses a polygonal projection material with a diameter of 0.2 to 0.3 mm, blasts over the entire surface of the base material, and the amount of dents is in a state where there is no gap between the dents A full coverage finish with no initial base material remains. The blasting time of the present invention was carried out at 3 times the full coverage time, and the surface activation and surface roughness adjustment were sufficiently performed.

続いて、前述のブラスト表面を研磨盤にて研磨した。研磨量は前述のブラスト処理により発生した打痕の谷部A部(図7参照)を残すように研磨した。研磨後の研磨面と谷の寸法hは3〜5μmとした。なお研磨については特別な加工条件はない。2次ブラストは0.04〜0.08mm径の多角形状の投射材を用い、母材表面の全面に対してブラストし、その打痕量は打痕間に隙間が無い状態で母材表面の研磨面が残っていないフルカバレージの仕上を行った。二次ブラスト後の表面粗さは平均粗さで1.5〜2.2μmであった。   Subsequently, the above blast surface was polished with a polishing disk. Polishing was performed so as to leave a valley portion A (see FIG. 7) of the dent generated by the blasting process described above. The polished surface and valley dimension h after polishing were 3 to 5 μm. There are no special processing conditions for polishing. Secondary blasting uses a polygonal projection material having a diameter of 0.04 to 0.08 mm and is blasted over the entire surface of the base material, and the amount of dents on the surface of the base material with no gaps between the dents. Full coverage with no polished surface left. The surface roughness after secondary blasting was 1.5 to 2.2 μm in terms of average roughness.

このようにして下地強化した凹凸形状をなした表面に、ダイヤモンドライクカーボン膜(DLC膜)を直接成膜する。なお、DLC膜を作製するにあたって、製法の限定は特になく既知のスパッタリング法、イオンプレーテイング等いずれの方法でも良い。また、作製するDLCの膜厚は適用目的、適用時のDLC膜にかかる単位面積あたりの荷重等の使用条件或いは寿命等を考慮し、例えば0.1〜300μmの範囲から選べば良い。本発明のDLC膜は次の条件で作製し、膜の厚さは1μmとした。   A diamond-like carbon film (DLC film) is directly formed on the surface of the concavo-convex shape reinforced in this way. In producing the DLC film, the production method is not particularly limited, and any known method such as sputtering or ion plating may be used. The film thickness of the DLC to be produced may be selected from the range of, for example, 0.1 to 300 μm in consideration of the application purpose, use conditions such as the load per unit area applied to the DLC film at the time of application, or the life. The DLC film of the present invention was produced under the following conditions, and the film thickness was 1 μm.

成膜条件:
前処理:150℃×60minベーキング。Arボンバード(50min)
使用ガスと流量:C6・2cc/min
蒸着の方法:電子衝撃によるイオン化蒸着
基板電圧:2kV,50mA
真空度:1.5×10Pa
基板温度:149〜168℃
成膜時間:150min
Deposition conditions:
Pretreatment: baking at 150 ° C. for 60 minutes. Ar Bombard (50min)
Using gas and flow rate: C 6 H 6 · 2cc / min
Deposition method: Ionization deposition substrate by electron impact Voltage: 2 kV, 50 mA
Degree of vacuum: 1.5 × 10 3 Pa
Substrate temperature: 149-168 ° C
Deposition time: 150 min

次に、前述の成膜条件で得られたDLC膜の密着性を検討するため、この試料をボールオンディスク型の基礎摩擦試験機により摩擦試験を行った。また比較のため、従来のブラスト処理品についてもDLC膜を前述と同様に直接成膜し、摩擦試験を行った。第9図は、試験機の要部を模式的に示しており、3は試料としての回転ディスク、4は固定側のテストボールで、3個の硬球を治具5上に等間隔に配置しており、治具全体が回転ディスク3に対して押圧されることで垂直荷重を負荷するようになっている。   Next, in order to examine the adhesion of the DLC film obtained under the above-mentioned film formation conditions, this sample was subjected to a friction test using a ball-on-disk basic friction tester. For comparison, a DLC film was directly formed on a conventional blasted product in the same manner as described above, and a friction test was performed. FIG. 9 schematically shows the main part of the testing machine, 3 is a rotating disk as a sample, 4 is a test ball on the fixed side, and three hard balls are arranged on the jig 5 at equal intervals. The entire jig is pressed against the rotating disk 3 so that a vertical load is applied.

なお、基礎摩擦試験機の仕様は、次のとおりである。
固定側テストボール:直径1/4inch,材質SUJ2,個数3個
回転側:直径36mm
回転速度:V=160mm/sec, 回転数N=1〜100rpm
また、摩擦条件は次のとおりである。
摩擦径:30mm
摩擦速度:31mm/s
垂直荷重:100,200,400,600,800,1000N(各垂直荷重で10分づつ連続的に摺動)
雰囲気:大気中
潤滑条件:無潤滑
The specifications of the basic friction tester are as follows.
Fixed side test ball: 1/4 inch in diameter, material SUJ2, number of 3 Rotating side: 36 mm in diameter
Rotational speed: V = 160mm / sec, rotational speed N = 1-100rpm
The friction conditions are as follows.
Friction diameter: 30mm
Friction speed: 31mm / s
Vertical load: 100, 200, 400, 600, 800, 1000 N (sliding continuously every 10 minutes for each vertical load)
Atmosphere: In air Lubrication condition: No lubrication

実験に先立って、ボールと試料の表面をアセトンにより脱脂し、乾燥させてから実験に供した。試験は各垂直荷重で10分づつ連続的に摺動させ、最終的に剥離したときの荷重を剥離荷重として耐剥離性を評価した。剥離の発生の有無は、摩擦係数の変化と試料表面の顕微鏡観察によって評価した。1000Nまで剥離を発生しないものについては、この段階で新しいボールに交換し、再び1000Nの垂直荷重を付加し、連続30分間摺動試験を行った。30分間でも膜の剥離が発生しないものについては再びボールを新しい物に交換し、同様に30分づつ合計3時間の摺動試験を行った。上記条件での試験結果を図10(イ)に示す。また従来法による処理を行った母材について同じ試験を行った結果を図10(ロ)に示す。本発明の下地強化法を用いた部品は、図10(ロ)に示した従来法により処理されたものに比較し、低い摩擦係数を示していることがわかる。また、優れた密着性とを備えていることは表1からもわかる。表中、○は剥離発生せず、×は剥離発生を示している。   Prior to the experiment, the surface of the ball and the sample was degreased with acetone and dried before being used in the experiment. In the test, each vertical load was continuously slid for 10 minutes, and the peel resistance was evaluated using the load when finally peeled as the peel load. The presence or absence of peeling was evaluated by changing the friction coefficient and observing the sample surface with a microscope. Those that did not peel until 1000 N were replaced with new balls at this stage, a vertical load of 1000 N was applied again, and a sliding test was conducted for 30 minutes. In the case where peeling of the film did not occur even after 30 minutes, the ball was replaced with a new one again, and similarly, a sliding test was conducted for 30 minutes in total for 3 hours. The test results under the above conditions are shown in FIG. Further, FIG. 10B shows the result of the same test performed on the base material processed by the conventional method. It can be seen that the parts using the ground reinforcement method of the present invention show a lower coefficient of friction than those processed by the conventional method shown in FIG. It can also be seen from Table 1 that it has excellent adhesion. In the table, “◯” indicates that no peeling occurred, and “×” indicates the occurrence of peeling.

本発明をもって、中間層としてセラミックスコーテイングを成した超硬合金やセラミックス製母材についても試験したが、前述と同様な効果が得られた。なお、本発明における金属製品とはプレス成型金型、ポンチ押し型等の成型金型などの産業用の耐摩耗性を要求する金属製品をいい、中間層としてセラミックスコーテイングを成した超硬合金とは高硬度材料を加工するプレス用金型等をいい、セラミックス製品とはビン容器の栓等低硬度、低降伏点の材料を絞り加工する穴ダイス等の成形型などの産業用の耐摩耗性を要求するセラミックス製品をいう。   With the present invention, a cemented carbide alloy or a ceramic base material having a ceramic coating as an intermediate layer was also tested, and the same effect as described above was obtained. The metal product in the present invention refers to a metal product that requires industrial wear resistance such as a press mold, a punch mold, and the like, and a cemented carbide alloy coating as an intermediate layer. Refers to press molds that process high-hardness materials, and ceramic products are industrial wear resistance such as molds such as hole dies that draw materials with low hardness and low yield point, such as stoppers for bottle containers. Ceramic products that require

Figure 2005224902
Figure 2005224902

なお、本発明によるDLC膜の密着性が向上する要因として、次の4つの相乗的なものと考えられる。第一に母材表面にフルカバレージ以上になるようブラスト材を照射することにより、錆、酸化スケールや付着物を除去し表面を活性化させていること。更に1次ブラスト部を研磨加工し、その後再度二次ブラストにより無数の山形状の凹凸を発生するとともに、表面の活性化をさらに高めDLC膜が付着しやすい表面になったこと。第ニに一次ブラスト→研磨加工後に残存した前述の図3(ロ)で示したh寸法部の凹部と二次ブラストで形成された前述のh寸法より細かい凹凸部により母材の表面積が増し、実質的なDLC膜の接着面積が多くなり、それに伴ってDLC膜の接着力が大きくなったこと。第三に前述のブラストにより形成された無数の凹凸部にDLC膜が成膜される際、DLC膜の一部がこの凹凸に入り込み、成膜後部品として使用される場合、DLC膜部にかかる摩擦力などが表面に平行にかかる力に対して母材とDLC膜間で滑りにくく引っかかりとなり、抜けにくくしている。第四に一次ブラスト後研磨加工し、その後細かい投射材を使用してニ次ブラストを実施しているため、一次ブラストのみの処理面に比較し凹凸の高さの数値巾が狭く、また凹凸の山数が著しく多いので、成膜されたDLC膜にかかる荷重をより均等に受けやすく保持し、DLC膜にも負担を掛けないより有利な表面となっている。   The following four synergistic factors can be considered as factors for improving the adhesion of the DLC film according to the present invention. First, the surface of the base material is activated by irradiating the surface of the base material with a blasting material so that it is at least full coverage, thereby removing rust, oxide scale and deposits. Furthermore, the primary blasted part was polished and then secondary blasted again to generate countless mountain-shaped irregularities, and the surface was further activated to make the DLC film easy to adhere. Secondly, the surface area of the base material is increased by the concave portion of the h dimension portion shown in FIG. 3 (b) and the uneven portion finer than the h dimension formed by the secondary blast, which remains after the primary blasting → polishing process. The substantial adhesion area of the DLC film has increased, and the adhesion force of the DLC film has increased accordingly. Third, when a DLC film is formed on the innumerable irregularities formed by blasting as described above, a part of the DLC film enters the irregularities and, when used as a post-deposition part, the DLC film is applied. The frictional force, etc. applied to the surface parallel to the surface makes it difficult to slip between the base material and the DLC film, making it difficult to come off. Fourth, since the primary blasting is polished and then the secondary blasting is performed using a fine projection material, the numerical value of the height of the unevenness is narrower than the treated surface of only the primary blast, and the unevenness Since the number of peaks is remarkably large, the load applied to the formed DLC film is more easily and easily received, and the surface is more advantageous without burdening the DLC film.

また、前述のように一次ブラスト後研磨加工し、その後細かい投射材を使用してニ次ブラストを実施しているため、一次ブラストのみの処理面に比較し凹凸の高さの数値巾が狭くなったことにより、皮膜されたDLC膜の表面のうねりも一次ブラストのみの処理事例に比較し小さくなり、その結果として図10(イ)に示すように試験初期の時点から発生する摩擦係数は著しく低いものになっている。以上のことから本発明の下地強化法はDLCコーティングの密着性向上と摩擦係数の低下に著しく効果があり、特に耐剥離性が著しく向上したことおよび低摩擦係数が得られたことにより、高面圧下での無潤滑による塑性加工、例えば被加工材と擦れ合う金型の表面のDLCコーテイングの下地加工法として有益な処理方法といえる。   In addition, as described above, polishing is performed after primary blasting, and then secondary blasting is performed using a fine projection material, so that the numerical width of the height of the unevenness is narrower than the treated surface of only primary blasting. As a result, the undulation on the surface of the coated DLC film is also smaller than in the case where only the primary blast treatment is performed. As a result, as shown in FIG. It is a thing. From the above, the ground reinforcement method of the present invention is remarkably effective in improving the adhesion of the DLC coating and lowering the friction coefficient, and in particular, the peel resistance is remarkably improved and the low friction coefficient is obtained. It can be said that it is a useful processing method as a base processing method for plastic processing by non-lubrication under pressure, for example, DLC coating on the surface of a mold that rubs against a workpiece.

請求項1の発明のフロー図である。It is a flowchart of invention of Claim 1. 本発明における母材の断面変化を示す拡大断面図である。It is an expanded sectional view which shows the cross-sectional change of the base material in this invention. 本発明法により処理された母材の拡大断面図である。It is an expanded sectional view of the base material processed by this invention method. 従来法により処理された母材の拡大断面図である。It is an expanded sectional view of the base material processed by the conventional method. 請求項2の発明のフロー図である。It is a flowchart of invention of Claim 2. 請求項3の発明のフロー図である。It is a flowchart of invention of Claim 3. ブラストによるカバレージの概念図である。It is a conceptual diagram of coverage by blasting. 請求項4の発明のフロー図である。It is a flowchart of invention of Claim 4. 実施例に用いた試験機の要部の模式図である。It is a schematic diagram of the principal part of the testing machine used for the Example. (イ)は本発明による処理方法で強化した試験片の試験荷重と時間経過による摩擦係数の変化を示すグラフ、(ロ)は従来技術による処理方法で強化した試験片の同様の試験結果を示すグラフである。(A) is a graph showing the test load of the test piece strengthened by the treatment method according to the present invention and the change in the coefficient of friction over time, and (B) shows the same test result of the test piece strengthened by the treatment method according to the prior art. It is a graph.

符号の説明Explanation of symbols

1 一次、二次ブラスト面
2 二次ブラスト面
3 試料としての回転ディスク
4 固定側のテストボール
5 冶具
DESCRIPTION OF SYMBOLS 1 Primary and secondary blast surface 2 Secondary blast surface 3 Rotating disc as sample 4 Test ball on fixed side 5 Jig

Claims (7)

塗装或いはコーテイングが施される母材表面の下地処理方法であって、母材表面に一次ブラスト処理として0.2〜2.5mm径の球形状の投射材或いは多角形の投射材を投射した後、研磨法でブラストの打痕の深さの一部が残るように削り落し、さらに二次ブラスト処理として一次ブラスト処理に使用した投射材より細かい投射材で処理し、一次、二次ブラスト面と二次ブラスト面とを混在させた表面とすることを特徴とする母材表面の下地処理方法。   A method of ground treatment of a base material surface to be painted or coated, after projecting a spherical or polygonal projection material having a diameter of 0.2 to 2.5 mm as a primary blast treatment on the base material surface , Scraped off so that part of the blast depth of the blast remains with the polishing method, and further processed with a projection material finer than the projection material used for the primary blast treatment as the secondary blast treatment, the primary and secondary blast surfaces A base material surface treatment method characterized in that the surface is a mixture of a secondary blast surface. コーテイングが施される母材表面の下地処理方法であって、母材表面に一次ブラスト処理として0.8mm径以下0.2mm径以上の球形状の投射材或いは多角形の投射材を投射した後、研磨法でブラストの打痕の深さの一部が残るよう削り落し、二次ブラストとして一次ブラストに使用した投射材より細かい投射材で処理し、一次、二次ブラスト面と二次ブラスト面とを混在させた表面とすることを特徴とする母材表面の下地処理方法。   A ground surface treatment method for a base material surface to be coated, after projecting a spherical projection material having a diameter of 0.8 mm or less and a diameter of 0.2 mm or more or a polygonal projection material as a primary blast treatment on the surface of the matrix The surface is removed by grinding so that a part of the depth of the blast marks remains, and the secondary blast is treated with a finer projection material than the primary blasting material, and the primary, secondary blast surface and secondary blast surface. A surface treatment method for the surface of a base material, characterized in that the surface is a mixed surface. コーテイングが施される母材表面の下地処理方法であって、母材表面に一次ブラスト処理として0.8mm径以下0.2mm径以上の球形状の投射材或いは多角形の投射材を投射し、フルカバレージ以上の投射処理にてショットピーニングをし、その後、研磨法でショットピーニング後の打痕の深さの一部が残るよう削り落し、二次処理として一次処理に使用した投射材より細かい投射材でブラスト処理し、一次のショットピーニング処理面に二次ブラスト処理を施した表面と、二次ブラスト面とを混在させた表面とすることを特徴とする母材表面の下地処理方法。   A base material surface treatment method for coating a base material surface, and projecting a spherical projection material or a polygonal projection material having a diameter of 0.8 mm or less and a diameter of 0.2 mm or less as a primary blast treatment on the base material surface, Shot peening is performed with a projection process of full coverage or higher, and then the grinding process is used to scrape off part of the depth of the dent after shot peening. A ground surface treatment method for a base material surface, characterized in that a surface obtained by blasting with a material and subjecting a primary shot peening treatment surface to secondary blast treatment and a secondary blast surface is mixed. コーテイングが施される母材表面の下地処理方法であって、母材表面に一次処理として1.2mm径以下0.2mm径以上の多角形の投射材を投射し、フルカバレージ以上の投射処理にてショットピーニングをし、その後、研磨法でショットピーニング後の打痕の深さの一部が残るよう削り落し、二次処理として一次処理に使用した投射材より細かい多角形状の投射材0.2mm径以下で下地強化処理をし、一次のショットピーニング処理面に二次ブラスト処理面が混在した表面と、二次ブラスト面とを混在させた表面とすることを特徴とする母材表面の下地処理方法。   A base material surface treatment method for coating a base material surface, and projecting a polygonal projection material having a diameter of 1.2 mm or less and a diameter of 0.2 mm or more as a primary treatment on the surface of the base material. Shot peening, then scrape off by polishing method so that a part of the depth of the dent after shot peening remains, 0.2mm smaller than the projection material used for the primary treatment as a secondary treatment 0.2mm Substrate reinforcement treatment at a diameter or less, and a surface treatment of the base material surface characterized by a surface in which the secondary blast treatment surface is mixed with the primary shot peening treatment surface and a surface in which the secondary blast treatment surface is mixed Method. 請求項3、請求項4の何れかの方法がダイヤモンドライクカーボン(DLC)をコーテイングするためになされることを特徴とする母材表面の下地処理方法。   5. A base material surface treatment method, wherein the method according to claim 3 or 4 is performed for coating diamond-like carbon (DLC). 請求項1〜請求項4の何れかの方法により下地処理された表面を持つことを特徴とする母材。   A base material having a surface that has been surface-treated by the method according to claim 1. 請求項5の方法により下地処理し、その処理面にダイヤモンドライクカーボン(DLC)をコーテイングした表面を持つことを特徴とする金属或いはセラミックス製品或いはセラミックス複合製品。
A metal, a ceramic product, or a ceramic composite product, characterized by having a surface treated by a method according to claim 5 and having a treated surface coated with diamond-like carbon (DLC).
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WO2010110196A1 (en) 2009-03-23 2010-09-30 東洋炭素株式会社 Carbon material coated with diamond thin film and method for producing same
US9102541B2 (en) 2009-03-23 2015-08-11 Toyo Tanso Co., Ltd. Carbon material covered with diamond thin film and method of manufacturing same
JP2011235434A (en) * 2010-04-16 2011-11-24 Jfe Steel Corp Steel material excellent in coated film adhesiveness and method of manufacturing the same
EP2960017A1 (en) * 2014-06-23 2015-12-30 Les Promotions Atlantiques Inc./ Atlantic Promotions Inc. Method of treating a surface of a utensil
US20160221036A1 (en) * 2015-02-04 2016-08-04 Fuji Kihan Co., Ltd., Method for enhancing adhesion of low-temperature ceramic coating
CN105834918A (en) * 2015-02-04 2016-08-10 株式会社不二机贩 Method for enhancing adhesion of low-temperature ceramic coating
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CN116005098A (en) * 2022-11-30 2023-04-25 西北有色金属研究院 Preparation method of hard coating for improving fatigue of guide cylinder of automatic inclinator

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