JP2005208027A - Distance-measuring equipment, optical measurement equipment and method for them - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical distance-measuring equipment, optical measurement equipment and a method for the same, capable of measuring distance with a principal error. <P>SOLUTION: The processes for distance measurement include (step 10) detecting of a reference pixel supposed to be maximum receiving light amount among pixel group constituting the imaging element 22, based on the imaging signal Sd from the imaging element 22; (step 20) calculating of the comprehensive volume of sum of difference between a threshold and light amount of a detected pixel, by setting the threshold having an arbitral ratio value to the maximum receiving light; (step 30) is Y. If the comprehensive volume agrees with a prescribed volume; and (step 40 ) for measuring the distance between the measurement objects, based on a pixel of center of gravity of the pixel group specified as the position of light-receiving spot and the pixel of reference position Ra, where in the pixel group detected at calculating the comprehensive volume, a pixel corresponding to the center of gravity is calculated and specified as the position of the light-receiving spot. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a distance measuring device, an optical measuring device, and a method for measuring these distances.

As a conventionally known optical measuring apparatus, it measures the distance and inclination of an object to be measured using the principle of triangulation, and includes a distance measuring optical system and an inclination measuring optical system. In the distance measuring optical system, the light from the light projecting element converged by the lens is projected obliquely onto the object to be measured, and the reflected light is converged by the lens to form an image on the imaging surface of the imaging means. The distance of the object to be measured can be measured from the imaging position on the imaging surface.
In addition, the tilt measurement optical system projects light from the light projecting element, which has been collimated by the lens, onto the object to be measured from an oblique direction, and the reflected light is converged by the lens to be connected to the imaging surface of the imaging means. The inclination of the object to be measured can be measured based on the imaging position on the imaging surface.
JP-A-8-240408

By the way, it is a well-known fact that the spot diameter of the reflected light from the object to be measured varies due to various aberrations such as spherical aberration of the lens.
In the case of the above configuration, as shown in FIG. 14, the reflected light from the object W to be measured passes near the central axis C of the lens 101, and the case where it passes near the peripheral area away from the central axis C. In this case, the light receiving spot is enlarged when it passes through the vicinity of the peripheral region. When the received light amount distributions of these two light receiving spots are profiled, the two are common in the shape of a mountain, but the received light amount of the pixel that is the maximum received light amount when passing through the vicinity of the peripheral region of the lens 101. Is low, and it is obvious that the slope of the mountain shape is gentle. Therefore, since fixing the threshold value results in variations in measurement accuracy, it is essential to determine the threshold value based on the maximum amount of received light.

However, even with the threshold value setting method as described above, the measurement accuracy still varies. That is, there was a problem that the resolution was not fixed.
The present invention has been completed based on the above circumstances, and provides a distance measuring device, an optical measuring device, and a distance measuring method capable of measuring a distance with a unique error. Objective.

As a means for achieving the above object, the invention of claim 1 is characterized in that the light from the light projecting element is converged by the converging lens, and the object to be measured is irradiated with the convergent light. In the distance measuring apparatus for converging the regular reflected light from the light and condensing it on the light receiving element group of the imaging means, and measuring the distance to the object to be measured based on the imaging signal output from the imaging means,
A reference light receiving element having a maximum light receiving amount in the light receiving element group is detected from the image pickup signal, and a total volume value is calculated based on the light receiving amount of each light receiving element in the light receiving spot with reference to the reference light receiving element. When the value coincides with the predetermined volume value, the center of gravity position in the detected light receiving element group is detected, and the measurement target is based on the positional relationship between the light receiving element corresponding to the center of gravity position and the light receiving element corresponding to the reference position. It is characterized in that it has a measuring means for measuring the distance of an object.

According to the second aspect of the present invention, the light from the light projecting element is converged by the converging lens, and the convergent light is irradiated onto the object to be measured, and the specularly reflected light from the object to be measured is converged to capture the imaging means. In the distance measuring device that collects light on the light receiving element group and measures the distance to the object to be measured based on the imaging signal output from the imaging means,
A reference light receiving element that is the maximum light receiving amount in the light receiving element group is detected from the imaging signal, and a total area value is calculated based on the light receiving amount of the light receiving element at the light receiving spot with reference to the reference light receiving element. Is detected, the center of gravity position of the detected light receiving element group is detected, and based on the positional relationship between the light receiving element corresponding to the center of gravity position and the light receiving element corresponding to the reference position, the object to be measured is detected. It is characterized in that it has a measuring means for measuring the distance.

  A third aspect of the invention is characterized in that, in the first or second aspect of the invention, the distance measuring light-receiving means is composed of a two-dimensional image sensor.

According to a fourth aspect of the present invention, there is provided the distance measurement storage unit according to the third aspect, wherein the distance measurement storage unit receives the imaging signal output from the distance measurement light reception unit and stores information regarding the light reception amount of each pixel;
A distance measuring pixel detecting means for detecting a pixel having a light receiving amount higher than a predetermined threshold from the information on the light receiving amount;
The measuring means is characterized in that, among the pixels detected by the distance measuring pixel detecting means, a pixel having a maximum light receiving amount is detected as the reference light receiving element.

  According to a fifth aspect of the invention, there is provided the notifying means according to the fourth aspect, wherein the number of pixels detected by the pixel detecting means is counted, and notification is made that the detection is impossible on condition that the number is not more than a predetermined number. It is characterized by

According to a sixth aspect of the present invention, in the method according to the third aspect, distance measuring pixel selecting means for selecting a specific pixel based on the amount of light received by each pixel;
A distance measurement storage means for storing information relating to the amount of light received by the pixel selected by the distance measurement pixel selection means;
The measuring means is characterized in that, among the pixels detected by the distance measuring pixel detecting means, a pixel having a maximum light receiving amount is detected as the reference light receiving element.

According to a seventh aspect of the present invention, the distance measuring pixel selecting means according to the sixth aspect of the present invention,
It is characterized in that the received light amount of each pixel is compared with a predetermined threshold value based on an imaging signal output from the distance measuring imaging means, and a pixel having a received light amount exceeding the predetermined threshold value is selected.

The invention according to an eighth aspect is the one according to the sixth aspect, wherein the distance measuring pixel selecting means comprises:
Based on the imaging signal output from the distance measuring imaging means, the amount of light received by each pixel is compared with a predetermined threshold, and an area is specified so as to include a pixel whose amount of light received exceeds the predetermined threshold. It is characterized in that it operates so as to receive an imaging signal of pixels included in the region.

  The invention according to claim 9 is the one according to claim 7 or 8, wherein the number of pixels detected by the pixel selection means is counted, and a notification of undetectability is provided on condition that the number is not more than a predetermined number. It is characterized in that a notification means is provided.

The invention of claim 10 converges the light from the distance measuring light projecting means by the converging lens, irradiates the object to be measured with the converged light, and converges the regular reflection light from the object to be measured. A distance measuring optical system for focusing on the light receiving element group of the distance measuring imaging means and measuring the distance to the object to be measured based on an imaging signal output from the distance measuring imaging means; The light from the light projecting means is converted into parallel light by a collimator lens, and the parallel light is irradiated onto the object to be measured, and the reflected light from the object to be measured is converged to be used for the image sensor for tilt angle measurement. In an optical measurement apparatus having an inclination measurement optical system that irradiates an imaging surface and measures the inclination of the measurement object based on an imaging signal output from the inclination measurement imaging means,
A reference light receiving element having a maximum light receiving amount in the light receiving element group is detected from the image pickup signal, and a total volume value is calculated based on the light receiving amount of each light receiving element in the light receiving spot with reference to the reference light receiving element. When the value coincides with the predetermined volume value, the center of gravity position in the detected light receiving element group is detected, and the measurement target is based on the positional relationship between the light receiving element corresponding to the center of gravity position and the light receiving element corresponding to the reference position. It is characterized in that it has a measuring means for measuring the distance of an object.

In the eleventh aspect of the invention, the light from the distance measuring light projecting means is converged by the converging lens, and the convergent light is irradiated onto the object to be measured, and the regular reflection light from the object to be measured is converged. A distance measuring optical system for focusing on the light receiving element group of the distance measuring imaging means and measuring the distance to the object to be measured based on an imaging signal output from the distance measuring imaging means; The light from the light projecting means is converted into parallel light by a collimator lens, and the parallel light is irradiated onto the object to be measured, and the reflected light from the object to be measured is converged to be used for the image sensor for tilt angle measurement. In an optical measurement apparatus having an inclination measurement optical system that irradiates an imaging surface and measures the inclination of the measurement object based on an imaging signal output from the inclination measurement imaging means,
A reference light receiving element having a maximum light receiving amount in the light receiving element group is detected from the imaging signal, and a total area value is calculated based on the light receiving amount of each light receiving element in the light receiving spot with reference to the reference light receiving element. When the value coincides with a predetermined area value, the center of gravity position in the detected light receiving element group is detected, and the object to be measured is based on the positional relationship between the light receiving element corresponding to the center of gravity position and the light receiving element corresponding to the reference position. It is characterized in that it has a measuring means for measuring the distance.

  The invention of claim 12 is characterized in that, in the invention of claim 10 or 11, the distance measuring light-receiving means is composed of a two-dimensional image sensor.

A thirteenth aspect of the present invention is the distance measuring storage unit according to the twelfth aspect, wherein the distance measurement storage unit receives the imaging signal output from the distance measurement light reception unit and stores information related to the light reception amount of each pixel;
A distance measuring pixel detecting means for detecting a pixel having a light receiving amount higher than a predetermined threshold from the information on the light receiving amount;
The measuring means is characterized in that, among the pixels detected by the distance measuring pixel detecting means, a pixel having a maximum light receiving amount is detected as the reference light receiving element.

  According to a fourteenth aspect of the invention, in the thirteenth aspect of the invention, there is provided notifying means for counting the number of pixels detected by the pixel detecting means and notifying that detection is impossible on the condition that the number is not more than a predetermined number. It is characterized by

According to a fifteenth aspect of the invention, in the twelfth aspect of the invention, distance measurement pixel selection means for selecting a specific pixel based on the amount of light received by each pixel;
A distance measurement storage means for storing information relating to the amount of light received by the pixel selected by the distance measurement pixel selection means;
The measuring means is characterized in that, among the pixels detected by the distance measuring pixel detecting means, a pixel having a maximum light receiving amount is detected as the reference light receiving element.

According to a sixteenth aspect of the invention, in the twelfth aspect of the invention, the distance measurement pixel selecting means includes:
It is characterized in that the received light amount of each pixel is compared with a predetermined threshold value based on an imaging signal output from the distance measuring imaging means, and a pixel having a received light amount exceeding the predetermined threshold value is selected.

According to a seventeenth aspect of the invention, in the twelfth aspect of the invention, the distance measurement pixel selecting means includes:
Based on the imaging signal output from the distance measuring imaging means, the amount of light received by each pixel is compared with a predetermined threshold, and an area is specified so as to include a pixel whose amount of light received exceeds the predetermined threshold. It is characterized in that it operates so as to receive an imaging signal of pixels included in the region.

  According to an eighteenth aspect of the present invention, in any of the fifteenth to eighteenth aspects, the number of pixels detected by the pixel selection means is counted, and a notification that the detection is impossible is made on condition that the number is a predetermined number or less. It is characterized in that a notification means is provided.

The invention of claim 19 converges the light from the distance measuring light projecting means with a converging lens, irradiates the object to be measured with the converged light, and converges the regular reflection light from the object to be measured. The distance measuring method is a distance measuring method in a distance measuring device that collects light on a light receiving element group of a distance measuring imaging means and measures the distance to the object to be measured based on an imaging signal output from the distance measuring imaging means. And
A process of detecting a reference light receiving element that is a maximum light receiving amount in the light receiving element group from the imaging signal;
A process of calculating a total volume value based on the amount of light received by each light receiving element at a light receiving spot with reference to the reference light receiving element;
When the total volume value coincides with the predetermined volume value, the center of gravity position in the detected light receiving element group is detected, and based on the positional relationship between the light receiving element corresponding to the center of gravity position and the light receiving element corresponding to the reference position, And a process for measuring the distance of the object to be measured.

The invention of claim 20 converges the light from the distance measuring light projecting means by the converging lens, irradiates the object to be measured with the converged light, and converges the regular reflection light from the object to be measured. The distance measuring method is a distance measuring method in a distance measuring device that collects light on a light receiving element group of a distance measuring imaging means and measures the distance to the object to be measured based on an imaging signal output from the distance measuring imaging means. And
A process of detecting a reference light receiving element that is a maximum light receiving amount in the light receiving element group from the imaging signal;
A process of calculating a total area value based on the amount of light received by each light receiving element at a light receiving spot with reference to the reference light receiving element;
When the total area value coincides with the predetermined area value, the center of gravity position in the detected light receiving element group is detected, and based on the positional relationship between the light receiving element corresponding to the center of gravity position and the light receiving element corresponding to the reference position. And a process for measuring the distance of the measurement object.

The invention of claim 21 converges the light from the distance measuring light projecting means with a converging lens, irradiates the object to be measured with the converged light, and converges the regular reflection light from the object to be measured. A distance measuring optical system for focusing on the light receiving element group of the distance measuring imaging means and measuring the distance to the object to be measured based on an imaging signal output from the distance measuring imaging means; The light from the light projecting means is converted into parallel light by a collimator lens, and the parallel light is irradiated onto the object to be measured, and the reflected light from the object to be measured is converged to be used for the image sensor for tilt angle measurement. A distance measurement method in an optical measurement apparatus having an inclination measurement optical system that irradiates an imaging surface and measures the inclination of the measurement object based on an imaging signal output from the inclination measurement imaging means,
A process of detecting a reference light receiving element that is a maximum light receiving amount in the light receiving element group from the imaging signal;
A process of calculating a total volume value based on the amount of light received by each light receiving element at a light receiving spot with reference to the reference light receiving element;
When the total volume value coincides with the predetermined volume value, the center of gravity position in the detected light receiving element group is detected, and based on the positional relationship between the light receiving element corresponding to the center of gravity position and the light receiving element corresponding to the reference position, And a process for measuring the distance of the object to be measured.

The invention of claim 22 converges the light from the distance measuring light projecting means with a converging lens, irradiates the object to be measured with the convergent light, and converges the regular reflection light from the object to be measured. A distance measuring optical system for focusing on the light receiving element group of the distance measuring imaging means and measuring the distance to the object to be measured based on an imaging signal output from the distance measuring imaging means; The light from the light projecting means is converted into parallel light by a collimator lens, and the parallel light is irradiated onto the object to be measured, and the reflected light from the object to be measured is converged to be used for the image sensor for inclination measurement. A distance measurement method in an optical measurement apparatus having an inclination measurement optical system that irradiates an imaging surface and measures the inclination of the measurement object based on an imaging signal output from the inclination measurement imaging means,
A process of detecting a reference light receiving element that is a maximum light receiving amount in the light receiving element group from the imaging signal;
A process of calculating a total area value based on the amount of light received by each light receiving element at a light receiving spot with reference to the reference light receiving element;
When the total area value coincides with the predetermined area value, the center of gravity position in the detected light receiving element group is detected, and based on the positional relationship between the light receiving element corresponding to the center of gravity position and the light receiving element corresponding to the reference position. And a process for measuring the distance of the measurement object.

<Invention of Claims 1, 2, 3, 10, 11, 12, 19, 20, 21, 22>
In the above invention, the total volume value or the total area value is fixed to a predetermined value and set as a threshold value.
In the first place, the above-mentioned distance measurement method has been reached by a great deal of research by the inventors, and it is extremely difficult to conceive easily from the conventional distance measurement method.

  First, as shown in FIG. 6, the maximum amount of received light is different between light passing through the central axis of the lens or the vicinity thereof and light passing through the peripheral region of the lens. When the predetermined ratio value in each maximum received light amount is set as the threshold value, it is clear that the measurement accuracy does not match between the two. The graph shown in FIG. 6 clearly shows the problems of the conventional distance measuring method described in the background art.

  On the other hand, as shown in FIG. 7, with a reference light receiving element as the maximum light receiving amount in the light receiving element group as a reference, a predetermined ratio value is set as a threshold value from the maximum light receiving amount, and the received light amount exceeds the threshold value. While detecting the light receiving element, a total volume value that is the sum of the difference values between the detected light receiving amount of the light receiving element and the threshold value is calculated. When the relationship between the total volume value calculated while changing the above threshold value and the threshold value was confirmed, it was revealed by an experiment conducted by the inventors that the relationship was inversely proportional.

Then, the relationship between the measurement accuracy and the total volume value is derived from FIGS. 6 and 7, and according to this, the measurement accuracy is substantially constant by setting the threshold value so that the total volume value becomes a predetermined volume value. (See FIG. 8).
Therefore, by performing the distance measurement by the above method, it is possible to eliminate variations in measurement accuracy, and it is possible to stabilize the measurement accuracy.

  Moreover, it is good also as a structure using a two-dimensional image sensor as a light receiving element group. According to this, even if the reflected light from the object to be measured moves two-dimensionally, distance measurement can be reliably performed. In particular, when measuring the tilt and distance of an object to be measured as in the optical measuring device, the reflected light from the object to be measured moves two-dimensionally. A suitable configuration is adopted.

<Invention of Claims 4 and 17>
In the above-described invention, a pixel having a light reception amount equal to or greater than a predetermined threshold is detected, and a light reception center position (maximum luminance position, area centroid position, volume centroid position) is detected from the detected pixel. In this way, the light reception center position can be detected without referring to the light reception amount information of all the pixels, so that the processing time can be shortened.

<Invention of Claims 4, 6, 7, 8, 13, 15, 16, 17>
With such a configuration, unnecessary amount of received light amount information is eliminated in the detection of the light receiving center position, and the processing time can be shortened.
For example, when performing a measurement operation a plurality of times and calculating the tilt angle or distance based on each result, in the first measurement operation, all the pixels on the imaging surface are designated, and in the second and subsequent measurement operations, A region necessary for detection of the light receiving center position on the light irradiation surface may be designated based on the amount of light received by each pixel in the first measurement operation. By doing in this way, there exists an advantage that the processing time of the measurement operation | movement after the 2nd time can be shortened.

<Inventions of Claims 5, 9, 14, 18>
For example, when the tilt angle (distance) of the measurement object deviates from the measurement allowable range of the apparatus, the imaging unit is not irradiated with the reflected light from the measurement object. In such irregular use, since accurate measurement cannot be performed, it is necessary to inform the administrator or user that measurement cannot be performed by any method.
On the other hand, in the said invention, when it is set as measurement impossible, since it can alert | report by an alerting | reporting means, it can contribute to a reliable measurement.

<Embodiment 1>
A first embodiment of an optical measuring device according to the present invention will be described with reference to FIGS. The configuration of the present embodiment is as shown in FIG. 1, and the light emitted from the angle measuring laser light source 11 and the distance measuring laser light source 21 is converted into dichroic mirror 31, beam splitter 32, and collimator lens 33 ("collimator lens" and The workpiece W (object to be measured) is irradiated with both lights via a “convergence lens”), and the specularly reflected light is composed of, for example, a two-dimensional CCD via a collimator lens 33, a beam splitter 32, and a dichroic mirror 34. The imaging surface of the angle measuring image sensor 12 and the distance measuring image sensor 22 (corresponding to “light receiving element group” and “two-dimensional image sensor”), which is also formed of a two-dimensional CCD, are irradiated, and the CPU 4 ( Corresponding to “setting means”), the inclination and distance of the work W are calculated. The surface of the workpiece W may be a mirror surface or a non-mirror surface.

  Both laser light sources 11 and 21 emit light having different wavelengths, for example, the angle measuring laser light source 11 emits laser light having a wavelength λ1, while the distance measuring laser. The light source 21 emits laser light having a wavelength λ2. Laser drive circuits 13 and 23 are connected to the laser light sources 11 and 21, respectively, and drive currents Ia and Ib are supplied to the laser light sources 11 and 21 based on control signals Sa and Sb from the CPU 4, respectively. (An angle measuring light source 11 and a laser driving circuit 13 constitute an angle measuring light projecting means, and a distance measuring laser light source 21 and a laser driving circuit 23 constitute a distance measuring light projecting means). The laser light sources 11 and 21 can be driven intermittently or continuously.

The dichroic mirror 31 is configured to transmit the light with the wavelength λ1 and reflect the light with the wavelength λ2, so that the laser light of the angle measuring laser light source 11 is transmitted through the dichroic mirror 31 and the beam splitter. The light from the distance measuring laser light source 21 is reflected by the dichroic mirror 31 and travels toward the beam splitter 32.
The laser light from the angle measuring laser light source 11 is incident on the incident surface of the dichroic mirror 31 perpendicularly, and the laser light from the distance measuring laser light source 21 is incident obliquely on the incident surface of the dichroic mirror 31. It is configured to make it. As a result, the beam axis of the angle measuring laser light source 11 is made parallel to the optical axis LC (L′ C ′) of the optical system, and the beam axis of the distance measuring laser light source 21 is set to the optical axis LC (L of the optical system). 'C') is inclined.

  The laser light reflected from the beam splitter 32 is converted into parallel light by the collimator lens 33 and irradiated onto the workpiece W. At this time, the laser light from the angle measurement laser light source 11 is irradiated perpendicularly to the surface of the workpiece W when the workpiece W is in a posture without inclination, whereas the laser beam for distance measurement is used. Since the laser light from the laser light source 21 is inclined with respect to the optical axis LC (L′ C ′) of the optical system, the light is irradiated obliquely onto the surface of the workpiece W. The spot diameter of the laser light applied to the workpiece W is smaller for the laser light from the laser light source 21 than for the laser light from the laser light source 11, and the laser light from the laser light source 21 is the laser light from the laser light source 11. Irradiation is within the irradiation range.

  The specularly reflected light from the workpiece W is collected by the collimator lens 33, and is specularly reflected by the angle measuring laser light source 11 (the specularly reflected light for angle measurement) by the dichroic mirror 34 having the same characteristics as the dichroic mirror 31. ) Forms an image on the imaging surface of the angle-measuring imaging device 12 to form a focused spot. Further, the regular reflection light (distance measurement regular reflection light) from the distance measurement laser light source 21 is reflected by the dichroic mirror 34 and applied to the imaging surface of the distance measurement image sensor 22. Since the image pickup surface of the distance measuring image pickup element 22 is arranged behind the focal position F of the regular reflection light, a light image having a predetermined size is formed on the image pickup surface. Here, the reason why the imaging surface of the distance measuring image pickup element 22 is not coincident with the focal position F is that the optical path to the focal position F changes according to the distance of the workpiece W. This is because the distance of the workpiece W can be calculated.

The angle measuring image pickup device 12 and the distance measuring image pickup device 22 transmit to the CPU 4 image pickup signals Sc and Sd formed of a digital signal sequence corresponding to a light image or a condensing spot formed on the image pickup surface. In the imaging signal, the amount of light received at each pixel is assigned to a numerical value from 0 to 255, for example, and this numerical value is transmitted to the CPU 4 as a digital signal.
In the imaging surfaces 12A and 21A, a coordinate system in which the horizontal direction in FIG. 10 is the X axis and the vertical direction is the Y axis is set, and the center of the imaging surface 15A is defined as the origin O. The imaging surfaces 12A and 21A are configured in a rectangular shape with a plurality of pixels arranged in a matrix.

  The CPU 4 transmits the control signals Sa and Sb to the laser drive circuits 13 and 23 described above, captures the imaging signal Sc from the angle measurement imaging device 12 in synchronization with the transmission of the control signal Sa, and transmits the control signal Sb. The image pickup signal Sd from the distance measuring image pickup device 22 is captured in synchronization with the above. Then, the inclination of the workpiece W and the distance from the collimator lens 33 to the workpiece W are measured based on the imaging signals Sc and Sd.

  The configuration of the present embodiment is as described above, and the operation will be described next.

"Tilt detection"
In the present embodiment, the tilt measurement is performed using a well-known autocollimation method, and detailed description thereof is omitted here. First, the pixel having the maximum light reception amount is determined as the center position S0 of the condensing spot S from the imaging signal Sc from the angle measurement imaging device 12, and the reference position Ra (for example, the center position of the imaging surface) on the imaging surface is determined. And a tilt direction and a tilt angle are calculated from the positional relationship between the center position S0 and the center position S0.

"Distance detection"
For example, when the workpiece W is at the position (1) (distance d1, tilt angle 0) in FIG. 1 (see FIG. 2 for details), the light condensing formed on the imaging surface of the angle measurement imaging device 12 Since the spot position S1 coincides with the reference position Ra, the inclination angle is measured as 0 °. For distance measurement, the distance d1 is measured based on the formation position of the optical image L1 on the imaging surface of the distance measurement imaging element 122 and the position S1 of the focused spot.

When the workpiece W is at the position (2) (distance d2, inclination angle 0) in FIG. 1 (see FIG. 3 for details), the condensing spot formed on the imaging surface of the angle measurement imaging device 22 Since the position S2 coincides with the reference position Ra, the inclination angle is measured as 0 °.
Further, the distance d2 is measured based on the formation position of the optical image L2 on the imaging surface of the distance measuring image sensor 112 and the position S2 of the focused spot.

When the workpiece W is at the position (3) (distance d2, inclination angle θ1) in FIG. 1 (see FIG. 4 for details), the position of the light receiving spot formed on the imaging surface of the angle measurement imaging device 12 Since S3 is separated from the reference position Ra by the distance d, the inclination angle θ1 is measured based on this distance.
The optical image L3 formed on the imaging surface of the distance measuring image sensor 122 is formed at a position different from the optical image L2 in the case of the position (2). However, since the distance is calculated based on the formation position of the optical image L3 and the position S3 of the focused spot, the distance is eventually measured as d2.

The distance measurement will be described in more detail.
As shown in the flowchart of FIG. 5, a reference pixel having a maximum light receiving amount is detected from the pixel group constituting the image sensor 22 based on the image signal Sd from the distance measurement image sensor 22 (step S10). A total volume that is a sum of the difference between the received light amount of the detected pixel and the threshold, while detecting a pixel having a light reception amount that exceeds the threshold by setting an arbitrary ratio of the maximum received light amount as a threshold value A value is calculated (step S20). When the total volume value matches the predetermined volume value (“Y” in step S30), a pixel corresponding to the center of gravity is calculated in the pixel group detected when the total volume value is calculated, and this pixel corresponds to the center of gravity. The pixel is specified as the position of the light receiving spot, and the distance of the object to be measured is calculated based on the positional relationship with the pixel corresponding to the reference position Ra (step S40).

The “centroid position” includes a so-called area centroid position and a volume centroid position, which are defined as follows.
<Area of center of gravity>
Area centroid position = {Σ (MI) / ΣM}
I: Position vector of each pixel in an arbitrary area on the light receiving surface of the image sensor M: For example, 1 when the received light level of each pixel is equal to or higher than a predetermined level, 0 otherwise
<Volume center of gravity position>
Volume centroid position = {Σ (mI) / Σm}
I: Same as in the case of the area centroid position m: Coefficient according to the light reception level of each pixel

The basis for the above distance calculation method is shown below.
First, as shown in FIG. 14, the amount of light received by the pixel having the maximum amount of received light differs between the light passing through the central axis of the lens 33 or the vicinity thereof and the light passing through the peripheral region of the lens 33. . It is clear from the graph of FIG. 13 that the measurement accuracy does not coincide between the two when the value of a predetermined ratio in each maximum received light amount is set as the threshold value.
6 to 8, the light reception amount of the pixel having the maximum light reception amount among the light reception spots formed by the light passing through the central axis of the lens 33 or the vicinity thereof is “225”, and the peripheral region of the lens 33 is shown. Of the light receiving spots formed by the light that has passed, the light receiving amount of the pixel that is the maximum light receiving amount is “120”. Further, the threshold value on the horizontal axis is shown as a ratio (%) with respect to the light reception amount of the pixel which is the maximum light reception amount.

  On the other hand, as shown in FIG. 6, with reference to a reference pixel that is the maximum light reception amount in the pixel group constituting the distance measurement imaging means 22, a predetermined ratio value is set as a threshold value from the maximum light reception amount. The total volume value that is the sum of the received light amounts of the detected pixels is calculated while detecting the pixels with the received light amount exceeding. When the relationship between the total volume value calculated while changing the above threshold value and the threshold value was confirmed, it was revealed by an experiment conducted by the inventors that the relationship was inversely proportional.

Then, the relationship between the measurement accuracy and the total volume value is derived from FIGS. 6 and 7, and according to this, by setting the threshold value so that the total volume value becomes a predetermined volume value, the measurement accuracy is substantially constant. (See FIG. 8).
Therefore, by performing the distance measurement by the above method, variation in measurement accuracy can be eliminated, and thus measurement accuracy can be stabilized.

  Further, by using the configuration using the two-dimensional imaging device 12, it is possible to reliably measure the distance even when the reflected light from the object to be measured moves two-dimensionally. In particular, when measuring the tilt and distance of the workpiece W as in the optical measuring device, the reflected light moves in a two-dimensional direction, so that the optimum configuration is obtained.

  Moreover, in the said structure, it can also be set as the structure which radiate | emits the laser beam of the same wavelength from both the laser light sources 11 and 21. FIG. In this case, the control signals Sa and Sb are supplied from the CPU 4 to the laser drive circuits 13 and 23 so that the respective laser light sources 11 and 21 are alternately lit, and a beam splitter, for example, is arranged in place of the dichroic mirrors 31 and 34. You just have to do it. Further, as described above, the CPU 4 transmits the control signals Sa and Sb to the laser drive circuits 13 and 23, and captures the image pickup signal Sc from the angle measurement image pickup device 12 in synchronization with the transmission of the control signal Sa. In synchronization with the transmission of Sb, the imaging signal Sd from the distance measuring imaging element 22 is captured. The tilt of the workpiece W and the distance from the collimator lens 33 to the workpiece W are measured based on the imaging signals Sc and Sd. If it does in this way, for example, a laser beam will be radiate | emitted alternately, interference of light will be suppressed and the effect that a measurement precision improves will be acquired.

  In the present embodiment, a pixel P having a received light amount equal to or greater than a predetermined threshold is extracted, and the center position S0 of the focused spot S is detected from the extracted pixel P. In this way, since the center position S0 can be detected without referring to the amount of light received by all pixels, the processing time can be shortened.

<Embodiment 2>
In the present embodiment, the distance measurement is performed based on the so-called total area value, which is different from the first embodiment, and other configurations are the same.
A reference pixel that is the maximum light reception amount is detected in the pixel group constituting the image pickup signal Sd from the distance measurement image pickup device 22, and an arbitrary ratio value with respect to the maximum light reception amount is set as a threshold value, which exceeds the threshold value. In addition to detecting a pixel that is the amount of received light, a total area value that is a total value of the detected number of light receiving elements is calculated. When the total area value matches the predetermined area value, the center of gravity position in the detected pixel group is detected, and the measurement target is based on the positional relationship between the pixel corresponding to the center of gravity position and the pixel corresponding to the reference position. The distance of the object W is measured.
As described in the first embodiment, the “centroid position” includes the area centroid position and the volume centroid position, and either may be applied.

<Embodiment 3>
An embodiment of the optical measurement apparatus of the present invention will be described with reference to FIGS. In addition, the same code | symbol is attached | subjected to the part same as the said Embodiment 1, and the overlapping description is abbreviate | omitted.
In the optical measurement apparatus of the present embodiment, as shown in FIG. 11, a comparator 6 (corresponding to “pixel selection means” described in the claims) is interposed between the imaging elements 12 and 22 and the memory 5. The configuration of the first embodiment is different from that of the first embodiment in that a light emitting unit 7 that performs a light emitting operation in response to a drive signal from the CPU 4 is provided.
The comparator 6 receives the imaging signals Sc and Sd output from the imaging device 12 (22), compares the level of the imaging signal Sc (Sd) with a predetermined threshold value, and compares the imaging signal Sc (Sd) exceeding the predetermined threshold value. ) To the memory 5.

Hereinafter, in the measurement operation of the present embodiment, first, the imaging signal Sc (Sd) output from the imaging device 12 (22) is compared with a predetermined threshold by the comparator 6, and the imaging signal Sc (Sd) exceeding this threshold is detected. The amount of received light is transmitted to the memory 5 and stored therein.
Here, when the number of pixels P having a light receiving amount exceeding a predetermined threshold does not reach a predetermined number n (n = 1, 2, 3,...), The CPU 4 applies the light emission unit 7 to the light emitting unit 7. By transmitting the drive signal and operating the light emitting unit, the user, the administrator, and the like are notified that measurement is impossible (the CPU 4, the comparator 6, and the light emitting unit 7 constitute the “notification unit” described in the claims). Have been).
In the above case, it is conceivable that the tilt angle of the workpiece W exceeds the allowable measurement range of the apparatus. In such irregular use, accurate tilt angle measurement should be performed. I can't. However, since this can be notified by the operation of the light emitting unit 7, reliable measurement is promised.
Thereafter, an area designation process, a light receiving center position detection process, and an inclination angle calculation process are performed. Since these processes can be performed by applying the processes described in any of the first to fourth embodiments, detailed description thereof will be omitted.

  In the present embodiment, received light amount information having a level equal to or higher than a predetermined threshold value is stored in the memory 81, and the tilt angle (distance) of the workpiece W is measured from the received light amount information stored in the memory 5. . Thereby, unnecessary received light amount information in the detection of the center position S0 is eliminated, and the processing time can be shortened. In the present embodiment, the CPU 4 may be configured to have the function of the comparator 6 as shown in FIG.

  Moreover, a structure as shown in FIG. 11 may be sufficient. In this case, a CMOS image sensor 112 (122) is arranged as an image pickup element, and the light irradiation surface 112A (122A) is irradiated with regular reflection light from the work W. Further, the drive signal Se (Sf) and the control signal Sg (Sh) are transmitted from the CPU 4 to the CMOS image sensor 112 (122).

  The CMOS image sensor 112 (122) receives the drive signal Se (Sf) from the CPU 4 and outputs an imaging signal Sc (Sd) corresponding to the amount of light received by each pixel. On the other hand, when the control signal Sg (Sh) is received, the imaging signal Sc (Sd) relating to the pixel designated by the control signal Sg (Sh) or the pixel in the designated region is output.

  The CPU 4 outputs a drive signal Se (Sf) and a control signal Sg (Sh) to the CMOS image sensor 112 (122). The drive signal Se (sf) is a signal that is output when the imaging signal Sc (Sd) is extracted from the CMOS image sensor 112 (122). The control signal Sg (Sh) is a signal for designating a predetermined pixel or a pixel in a predetermined region in the pixel group constituting the light irradiation surface 112A (122A). Accordingly, when a pixel or region on the light irradiation surface 112A (122A) is designated by the control signal Sg (Sh) and the drive signal Se (Sf) is transmitted to the CMOS image sensor 112 (122), the designated pixel or designation is designated. Only the image pickup signal Sc (Sd) from the pixels in the set area is output from the CMOS image sensors 112 and 122.

In the measurement operation, the CPU 4 sends a control signal Se (Sf) for designating a region where the focused spot S is formed on the light irradiation surface 112A (122A) of the CMOS image sensor 112 (122) from the CPU 4 to the COMS image sensor 112 (122). ).
As a result, the CMOS image sensor 112 (122) outputs to the CPU 4 an imaging signal Sc (Sd) relating to the amount of light received by the pixels in the designated area. Thereafter, the tilt angle (distance) of the workpiece W can be measured by applying the processing of the first to fourth embodiments.

  In the above configuration, for example, when the tilt angle calculating operation is performed a plurality of times and the tilt angle of the workpiece W is calculated based on the respective results, the light irradiation surface 112A is used by the control signal Se (Sf) in the initial tilt angle calculating operation. All pixels in (122A) are designated, and in the second and subsequent tilt angle calculation operations, a region including the condensed spot S on the light irradiation surface 112A (122A) based on the imaging signal Sc (Sd) in the first tilt angle calculation operation May be specified by the control signal Sg (Sh). By doing in this way, there exists an advantage that the processing time of the inclination calculation operation | movement after the 2nd time can be shortened.

<Fourth embodiment>
Next, an embodiment of the present invention will be described with reference to FIG. The difference between the present embodiment and the above embodiment is that a collimator lens 14 is disposed between the angle measuring laser light source 11 and the dichroic mirror 31, and between the distance measuring laser light source 21 and the dichroic mirror 31. A collimator lens 24 is arranged so that the light from each of the laser light sources 11 and 21 is converted into parallel light and then reaches the dichroic mirror 31. A converging lens 36 is disposed between the dichroic mirror 34 and the beam splitter 33.

  With this configuration, the laser light from both laser light sources 11 and 21 is converted into parallel light by the respective collimator lenses 14 and 24 and then guided to the beam splitter 33. It is not necessary to adjust the optical distance to the beam splitter 33, and the assembly accuracy of the optical system in the apparatus can be moderated, and the adjustment work of the optical system can be simplified.

<Seventh embodiment>
Next, an embodiment of the present invention will be described with reference to FIG. The difference between the present embodiment and the sixth embodiment is that a polarizing beam splitter 37 that reflects S-polarized light and transmits P-polarized light is disposed in place of the beam splitter 33, and further between the polarizing beam splitter 37 and the workpiece W. Are provided with a quarter-wave plate 38. The surface of the workpiece W is preferably a mirror surface.

  In general, the laser light is linearly polarized. Therefore, when the laser beams from both laser light sources 11 and 21 are irradiated onto the polarization beam splitter 37, the S-polarized light is reflected and travels toward the quarter-wave plate 37, and the P-polarized light is To Penetrate. The S-polarized light is changed to circularly-polarized light by passing through the quarter-wave plate 38 and is irradiated onto the workpiece W. The regular reflection light from the work W is transmitted through the quarter-wave plate 38 as circularly polarized light. At this time, the circularly polarized light is changed to P-polarized light, and the light is transmitted through the polarizing beam splitter 37 and irradiated to the respective image pickup devices 12 and 22.

  By adopting the configuration of this embodiment, it is possible to reduce optical loss and improve the S / N ratio in mirror body detection. In addition, since the light emitted from the laser light sources 11 and 21 is linearly polarized light, the configuration for emitting linearly polarized light can be greatly simplified.

<Other embodiments>
The present invention is not limited to the embodiments described with reference to the above description and drawings. For example, the following embodiments are also included in the technical scope of the present invention, and further, within the scope not departing from the gist of the invention other than the following. Various modifications can be made.
(1) In the above embodiment, the light receiving spot is formed on the two-dimensional CCD and the distance is measured from the light receiving spot. For example, the distance is measured by forming the light receiving spot on the one-dimensional CCD. The structure which performs may be sufficient.

  (2) Moreover, in the said embodiment, although it was set as the structure which calculates a total volume value in parallel with calculation of an individual volume value, it is good also as a structure which processes both in parallel.

  (3) In the above embodiment, in the light irradiated to the workpiece W, the irradiation spot formed by the light from the angle measuring laser light source 11 surrounds the irradiation spot formed by the light from the distance measuring laser light source 21. However, the irradiation spot formed by the light from the distance measuring laser light source 21 surrounds the irradiation spot formed by the light from the angle measuring laser light source 11. Also good. Moreover, the structure which the irradiation spot formed with the light from both the laser light sources 11 and 21 mutually overlaps may be sufficient.

Schematic diagram showing the overall configuration of the optical measurement apparatus according to the first embodiment Schematic showing work position and reflected light path Schematic showing work position and reflected light path Schematic showing work position and reflected light path Flow chart showing the details of the distance measurement process Graph showing the relationship between threshold and measurement accuracy Graph showing the relationship between threshold and total volume Graph showing the correlation between threshold, measurement accuracy and total volume value The figure which showed the whole structure of the optical measuring device which concerns on Embodiment 3. Conceptual diagram showing the configuration of the optical measurement device Conceptual diagram showing the configuration of the optical measurement device The figure which showed the whole structure of the optical measuring device which concerns on Embodiment 6. FIG. The figure which showed the whole structure of the optical measuring device which concerns on Embodiment 7. Conceptual diagram showing the relationship between the lens passing position and the light intensity distribution of the light receiving spot

Explanation of symbols

4 ... CPU
DESCRIPTION OF SYMBOLS 11 ... Laser light source for angle measurement 12 ... Image sensor for angle measurement 13 ... Laser drive circuit 21 ... Laser light source for distance measurement 22 ... Image sensor for distance measurement 23 ... Laser drive circuit 31 ... Dichroic mirror 32 ... Beam splitter 33 ... Collimator lens W ... Work LC ... Optical axis of optical system

Claims (22)

The light from the distance measuring light projecting means is converged by the converging lens, and the converged light is irradiated onto the object to be measured, and the specularly reflected light from the object to be measured is converged so that the distance measuring light receiving means In a distance measuring device that collects light on a light receiving element group and measures the distance to the object to be measured based on an imaging signal output from the light receiving means for distance measurement,
A reference light receiving element having a maximum light receiving amount in the light receiving element group is detected from the image pickup signal, and a total volume value is calculated based on the light receiving amount of each light receiving element in the light receiving spot with reference to the reference light receiving element. When the value coincides with the predetermined volume value, the center of gravity position in the detected light receiving element group is detected, and the measurement target is based on the positional relationship between the light receiving element corresponding to the center of gravity position and the light receiving element corresponding to the reference position. A distance measuring device comprising measuring means for measuring the distance of an object. The light from the distance measuring light projecting means is converged by the converging lens, and the converged light is irradiated onto the object to be measured, and the specularly reflected light from the object to be measured is converged so that the distance measuring light receiving means In a distance measuring device that collects light on a light receiving element group and measures the distance to the object to be measured based on an imaging signal output from the light receiving means for distance measurement,
A reference light receiving element having a maximum light receiving amount in the light receiving element group is detected from the imaging signal, and a total area value is calculated based on the light receiving amount of each light receiving element in the light receiving spot with reference to the reference light receiving element. When the value coincides with a predetermined area value, the center of gravity position in the detected light receiving element group is detected, and the object to be measured is based on the positional relationship between the light receiving element corresponding to the center of gravity position and the light receiving element corresponding to the reference position. A distance measuring device comprising a measuring means for measuring the distance. 3. The distance measuring device according to claim 1, wherein the distance measuring light receiving means is constituted by a two-dimensional image sensor. A distance measuring storage means for receiving an imaging signal output from the distance measuring light receiving means and storing information relating to the amount of light received by each pixel;
A distance measuring pixel detecting means for detecting a pixel having a light receiving amount higher than a predetermined threshold from the information on the light receiving amount;
4. The distance measuring apparatus according to claim 3, wherein the measuring unit detects a pixel having a maximum light receiving amount as the reference light receiving element among the pixels detected by the distance measuring pixel detecting unit. The distance measurement according to claim 4, further comprising a notifying unit that counts the pixels detected by the pixel detecting unit and notifies that detection is impossible on the condition that the number is not more than a predetermined number. apparatus. Distance measuring pixel selection means for selecting a specific pixel based on the amount of light received by each pixel;
A distance measurement storage means for storing information relating to the amount of light received by the pixel selected by the distance measurement pixel selection means;
4. The distance measuring apparatus according to claim 3, wherein the measuring unit detects a pixel having a maximum light receiving amount as the reference light receiving element among the pixels detected by the distance measuring pixel detecting unit. The distance measurement pixel selection means includes:
The received light amount of each pixel is compared with a predetermined threshold based on an imaging signal output from the distance measuring imaging means, and a pixel having a received light amount exceeding the predetermined threshold is selected. 6. The distance measuring device according to 6. The distance measurement pixel selection means includes:
Based on the imaging signal output from the distance measuring imaging means, the amount of light received by each pixel is compared with a predetermined threshold, and an area is specified so as to include a pixel whose amount of light received exceeds the predetermined threshold. The distance measuring device according to claim 6, wherein the distance measuring device operates so as to receive an imaging signal of a pixel included in the region. 9. A notification means for counting the number of pixels detected by the pixel selection means and notifying that detection is impossible on condition that the number is equal to or less than a predetermined number. The described distance measuring device. The light from the distance measurement light projecting means is converged by the converging lens, and the converged light is irradiated onto the object to be measured, and the specularly reflected light from the object to be measured is converged so that the distance measurement imaging means Light from a distance measuring optical system that collects light on a light receiving element group and measures the distance to the object to be measured based on an imaging signal output from the distance measuring imaging means, and light from a tilt measuring light projecting means Is converted into parallel light by a collimator lens, and the parallel light is irradiated onto the object to be measured, and the reflected light from the object to be measured is converged and irradiated onto the imaging surface of the inclination measuring imaging unit, In an optical measurement apparatus having an inclination measurement optical system that measures the inclination of the measurement object based on an imaging signal output from an inclination measurement imaging means,
A reference light receiving element having a maximum light receiving amount in the light receiving element group is detected from the image pickup signal, and a total volume value is calculated based on the light receiving amount of each light receiving element in the light receiving spot with reference to the reference light receiving element. When the value coincides with the predetermined volume value, the center of gravity position in the detected light receiving element group is detected, and the measurement target is based on the positional relationship between the light receiving element corresponding to the center of gravity position and the light receiving element corresponding to the reference position. An optical measuring apparatus comprising measuring means for measuring the distance of an object. The light from the distance measurement light projecting means is converged by the converging lens, and the converged light is irradiated onto the object to be measured, and the specularly reflected light from the object to be measured is converged so that the distance measurement imaging means Light from a distance measuring optical system that collects light on a light receiving element group and measures the distance to the object to be measured based on an imaging signal output from the distance measuring imaging means, and light from a tilt measuring light projecting means Is converted into parallel light by a collimator lens, and the parallel light is irradiated onto the object to be measured, and the reflected light from the object to be measured is converged and irradiated onto the imaging surface of the inclination measuring imaging unit, In an optical measurement apparatus having an inclination measurement optical system that measures the inclination of the measurement object based on an imaging signal output from an inclination measurement imaging means,
A reference light receiving element having a maximum light receiving amount in the light receiving element group is detected from the imaging signal, and a total area value is calculated based on the light receiving amount of each light receiving element in the light receiving spot with reference to the reference light receiving element. When the value coincides with a predetermined area value, the center of gravity position in the detected light receiving element group is detected, and the object to be measured is based on the positional relationship between the light receiving element corresponding to the center of gravity position and the light receiving element corresponding to the reference position. An optical measuring device comprising a measuring means for measuring the distance. The optical measuring device according to claim 10 or 11, wherein the distance measuring light-receiving means comprises a two-dimensional image sensor. A distance measuring storage means for receiving an imaging signal output from the distance measuring light receiving means and storing information relating to the amount of light received by each pixel;
A distance measuring pixel detecting means for detecting a pixel having a light receiving amount higher than a predetermined threshold from the information on the light receiving amount;
13. The optical measurement apparatus according to claim 12, wherein the measurement unit detects a pixel having a maximum light reception amount as the reference light receiving element among the pixels detected by the distance measurement pixel detection unit. 14. The optical measurement according to claim 13, further comprising a notifying unit that counts the pixels detected by the pixel detecting unit and notifies that the detection is impossible on condition that the number is not more than a predetermined number. apparatus. Distance measuring pixel selection means for selecting a specific pixel based on the amount of light received by each pixel;
A distance measurement storage means for storing information relating to the amount of light received by the pixel selected by the distance measurement pixel selection means;
13. The optical measurement apparatus according to claim 12, wherein the measurement unit detects a pixel having a maximum light reception amount as the reference light receiving element among the pixels detected by the distance measurement pixel detection unit. The distance measurement pixel selection means includes:
The received light amount of each pixel is compared with a predetermined threshold based on an imaging signal output from the distance measuring imaging means, and a pixel having a received light amount exceeding the predetermined threshold is selected. 12. The optical measuring device according to 12. The distance measurement pixel selection means includes:
Based on the imaging signal output from the distance measuring imaging means, the amount of light received by each pixel is compared with a predetermined threshold, and an area is specified so as to include a pixel whose amount of light received exceeds the predetermined threshold. The optical measurement apparatus according to claim 12, wherein the optical measurement apparatus operates to receive an imaging signal of a pixel included in the region. 19. A notification unit that counts the pixels detected by the pixel selection unit and notifies that detection is impossible on condition that the number is equal to or less than a predetermined number. The optical measuring device described. The light from the distance measurement light projecting means is converged by the converging lens, and the converged light is irradiated onto the object to be measured, and the specularly reflected light from the object to be measured is converged so that the distance measurement imaging means A distance measuring method in a distance measuring device that collects light on a light receiving element group and measures the distance to the object to be measured based on an imaging signal output from the distance measuring imaging means,
A process of detecting a reference light receiving element that is a maximum light receiving amount in the light receiving element group from the imaging signal;
A process of calculating a total volume value based on the amount of light received by each light receiving element at a light receiving spot with reference to the reference light receiving element;
When the total volume value coincides with the predetermined volume value, the center of gravity position in the detected light receiving element group is detected, and based on the positional relationship between the light receiving element corresponding to the center of gravity position and the light receiving element corresponding to the reference position, And a distance measuring method for measuring the distance of the object to be measured. The light from the distance measurement light projecting means is converged by the converging lens, and the converged light is irradiated onto the object to be measured, and the specularly reflected light from the object to be measured is converged so that the distance measurement imaging means A distance measuring method in a distance measuring device that collects light on a light receiving element group and measures the distance to the object to be measured based on an imaging signal output from the distance measuring imaging means,
A process of detecting a reference light receiving element that is a maximum light receiving amount in the light receiving element group from the imaging signal;
A process of calculating a total area value based on the amount of light received by each light receiving element at a light receiving spot with reference to the reference light receiving element;
When the total area value coincides with the predetermined area value, the center of gravity position in the detected light receiving element group is detected, and based on the positional relationship between the light receiving element corresponding to the center of gravity position and the light receiving element corresponding to the reference position. And a process for measuring the distance of the measurement object. The light from the distance measurement light projecting means is converged by the converging lens, and the converged light is irradiated onto the object to be measured, and the specularly reflected light from the object to be measured is converged so that the distance measurement imaging means Light from a distance measuring optical system that collects light on a light receiving element group and measures the distance to the object to be measured based on an imaging signal output from the distance measuring imaging means, and light from a tilt measuring light projecting means Is converted into parallel light by a collimator lens, and the parallel light is irradiated onto the object to be measured, and the reflected light from the object to be measured is converged and irradiated onto the imaging surface of the inclination measuring imaging unit, A distance measurement method in an optical measurement apparatus having an inclination measurement optical system that measures the inclination of the measurement object based on an imaging signal output from an inclination measurement imaging means,
A process of detecting a reference light receiving element that is a maximum light receiving amount in the light receiving element group from the imaging signal;
A process of calculating a total volume value based on the amount of light received by each light receiving element at a light receiving spot with reference to the reference light receiving element;
When the total volume value coincides with the predetermined volume value, the center of gravity position in the detected light receiving element group is detected, and based on the positional relationship between the light receiving element corresponding to the center of gravity position and the light receiving element corresponding to the reference position, A distance measuring method for an optical measuring apparatus, comprising: a process for measuring a distance of an object to be measured. The light from the distance measurement light projecting means is converged by the converging lens, and the converged light is irradiated onto the object to be measured, and the specularly reflected light from the object to be measured is converged so that the distance measurement imaging means Light from a distance measuring optical system that collects light on a light receiving element group and measures the distance to the object to be measured based on an imaging signal output from the distance measuring imaging means, and light from a tilt measuring light projecting means Is converted into parallel light by a collimator lens, and the parallel light is irradiated onto the object to be measured, and the reflected light from the object to be measured is converged and irradiated onto the imaging surface of the inclination measuring imaging unit, A distance measurement method in an optical measurement apparatus having an inclination measurement optical system that measures the inclination of the measurement object based on an imaging signal output from an inclination measurement imaging means,
A process of detecting a reference light receiving element that is a maximum light receiving amount in the light receiving element group from the imaging signal;
A process of calculating a total area value based on the amount of light received by each light receiving element at a light receiving spot with reference to the reference light receiving element;
When the total area value coincides with the predetermined area value, the center of gravity position in the detected light receiving element group is detected, and based on the positional relationship between the light receiving element corresponding to the center of gravity position and the light receiving element corresponding to the reference position. A distance measuring method in the optical measuring device, comprising: a process of measuring a distance of the measuring object.

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