JP2005187804A5 - - Google Patents

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Publication number
JP2005187804A5
JP2005187804A5 JP2004340020A JP2004340020A JP2005187804A5 JP 2005187804 A5 JP2005187804 A5 JP 2005187804A5 JP 2004340020 A JP2004340020 A JP 2004340020A JP 2004340020 A JP2004340020 A JP 2004340020A JP 2005187804 A5 JP2005187804 A5 JP 2005187804A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004340020A
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Japanese (ja)
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JP2005187804A (ja
JP4387928B2 (ja
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Priority to JP2004340020A priority Critical patent/JP4387928B2/ja
Priority claimed from JP2004340020A external-priority patent/JP4387928B2/ja
Publication of JP2005187804A publication Critical patent/JP2005187804A/ja
Publication of JP2005187804A5 publication Critical patent/JP2005187804A5/ja
Application granted granted Critical
Publication of JP4387928B2 publication Critical patent/JP4387928B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2004340020A 2003-12-01 2004-11-25 開環メタセシス共重合体水素添加物およびその製造方法 Expired - Lifetime JP4387928B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004340020A JP4387928B2 (ja) 2003-12-01 2004-11-25 開環メタセシス共重合体水素添加物およびその製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003401920 2003-12-01
JP2004340020A JP4387928B2 (ja) 2003-12-01 2004-11-25 開環メタセシス共重合体水素添加物およびその製造方法

Publications (3)

Publication Number Publication Date
JP2005187804A JP2005187804A (ja) 2005-07-14
JP2005187804A5 true JP2005187804A5 (cg-RX-API-DMAC7.html) 2005-09-29
JP4387928B2 JP4387928B2 (ja) 2009-12-24

Family

ID=34797469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004340020A Expired - Lifetime JP4387928B2 (ja) 2003-12-01 2004-11-25 開環メタセシス共重合体水素添加物およびその製造方法

Country Status (1)

Country Link
JP (1) JP4387928B2 (cg-RX-API-DMAC7.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5309526B2 (ja) * 2007-10-19 2013-10-09 信越化学工業株式会社 開環メタセシス重合体水素添加物、それを含有するレジスト材料及びパターン形成方法
JP5498654B2 (ja) * 2007-10-19 2014-05-21 三井化学株式会社 開環メタセシス重合体水素添加物の製造方法
JP5515232B2 (ja) * 2008-03-26 2014-06-11 信越化学工業株式会社 高分子化合物及びその製造方法、並びにレジスト材料及びパターン形成方法
JP5682363B2 (ja) * 2010-02-24 2015-03-11 セントラル硝子株式会社 トップコート用組成物およびそれを用いたパターン形成方法
WO2011105399A1 (ja) * 2010-02-24 2011-09-01 セントラル硝子株式会社 含フッ素ラクトンモノマー化合物、含フッ素ラクトンポリマー化合物とそのレジスト液およびトップコート用組成物、およびそれを用いたパターン形成方法

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